TWI382548B - A two-dimensional polymer grating of the solar cells - Google Patents

A two-dimensional polymer grating of the solar cells Download PDF

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TWI382548B
TWI382548B TW097151476A TW97151476A TWI382548B TW I382548 B TWI382548 B TW I382548B TW 097151476 A TW097151476 A TW 097151476A TW 97151476 A TW97151476 A TW 97151476A TW I382548 B TWI382548 B TW I382548B
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grating
dimensional polymer
solar cell
polymer grating
dimensional
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TW097151476A
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TW201025635A (en
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Kao Feng Yen
Tsung Chan Cheng
Jau Kun Kuo
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Univ Far East
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02E10/50Photovoltaic [PV] energy

Description

具二維高分子光柵之太陽能電池 Solar cell with two-dimensional polymer grating

本發明是有關於一種太陽能電池,特別是有關於一種具二維高分子光柵之太陽能電池。 The present invention relates to a solar cell, and more particularly to a solar cell having a two-dimensional polymer grating.

目前,國內外對於提高太陽能電池效率方面的研究方法眾多,大致可分為改變太陽能電池元件材料與集光式太陽能電池二種方法。改變太陽能電池元件材料係利用不同的能隙材料來吸收不同波長的光子,減少載子能帶內的能量釋放,大幅的提高太陽電池的效率,例如:矽與化合物半導體太陽能電池及非晶矽太陽能電池。而集光式太陽能電池係提高日光照射至太陽能電池之強度,藉以提升太陽能電池效率。如第1圖所示,其係為習知矽背面局部擴散護佈式射極電池示意圖。此電池在頂部具有至少一倒置角錐體結構11,是利用非等向性蝕刻,以暴露出蝕刻速度較慢的結晶面。此倒置角錐體結構11可以減少入射光再頂部表面的反射。因為垂直於電池的入射光會以斜角度撞擊傾斜的面,然後以斜角度折射入電池內部。背面接觸12是由一介於中間的氧化層與矽分隔開來。又如習知具有聚光特性之太陽能電池,是利用鏡子與透鏡可以將陽光聚焦,藉以提高太陽能電池之功率。然而,在改變元件材料方面,其缺點為從事此一研究之人員,須深入了解半導體元件物理特性才能發揮其最大功效。而集光式太陽能電池此一方法須配合太陽追蹤系統,才可真正的提升其效率。因此需花費更多的成本在此一追蹤系統上。 At present, there are many research methods for improving the efficiency of solar cells at home and abroad, which can be roughly divided into two methods of changing solar cell component materials and collecting solar cells. Changing the solar cell component materials uses different energy gap materials to absorb photons of different wavelengths, reducing the energy release in the carrier energy band, and greatly improving the efficiency of solar cells, such as germanium and compound semiconductor solar cells and amorphous germanium solar energy. battery. The concentrating solar cell system increases the intensity of solar radiation to the solar cell, thereby improving the efficiency of the solar cell. As shown in Fig. 1, it is a schematic diagram of a conventionally diffused protective cloth type emitter cell on the back side. The cell has at least one inverted pyramid structure 11 on top, which is anisotropically etched to expose a slower crystalline surface. This inverted pyramid structure 11 can reduce the reflection of incident light on the top surface. Because the incident light perpendicular to the battery strikes the inclined face at an oblique angle and is then refracted into the interior of the battery at an oblique angle. The back contact 12 is separated from the crucible by an intermediate oxide layer. Another example is a solar cell having a concentrating property, which uses a mirror and a lens to focus sunlight, thereby increasing the power of the solar cell. However, the disadvantage of changing the material of the component is that the personnel engaged in this research must have an in-depth understanding of the physical properties of the semiconductor component in order to achieve its maximum efficacy. This method of collecting solar cells must be combined with the solar tracking system to truly improve its efficiency. Therefore, it takes more cost to be on this tracking system.

有鑑於上述習知技藝之問題,本發明之目的就是在提供一種具二維高分子光柵之太陽能電池,以解決有關習知技藝之各項問題。 In view of the above-mentioned problems of the prior art, it is an object of the present invention to provide a solar cell having a two-dimensional polymer grating to solve various problems associated with the prior art.

根據本發明之目的,提出一種具二維高分子光柵之太陽能電池,其包含一太陽能電池本體及一二維高分子光柵,此二維高分子光柵係疊合於該太陽電池本體上。其中,二維高分子光柵係為一反射式繞射光柵,且其光柵深度係為180~220μm,光柵週期為0.4~0.6μm。二維高分子光柵係具有兩不同方向之光柵圖案,且其係可由光阻材料或有機(OG)高分子材料形成。 According to the object of the present invention, a solar cell with a two-dimensional polymer grating is provided, which comprises a solar cell body and a two-dimensional polymer grating, and the two-dimensional polymer grating is superposed on the solar cell body. The two-dimensional polymer grating is a reflective diffraction grating with a grating depth of 180-220 μm and a grating period of 0.4-0.6 μm. The two-dimensional polymer grating has a grating pattern of two different directions, and it may be formed of a photoresist material or an organic (OG) polymer material.

根據本發明之另一目的,提出一種具二維高分子光柵之太陽能電池,其特徵在於:太陽能電池上具有一二維高分子光柵,藉以提高太陽能電池之受光時間,進而提升功率轉換效率。二維高分子光柵係可為一反射式繞射光柵,且其光柵深度係為180~220μm,光柵週期為0.4~0.6μm。二維高分子光柵係指具有兩不同方向之光柵圖案之光柵,且其係利用光阻材料或有機(OG)高分子材料形成。再者,二維高分子光柵係可由翻模製造之方式製造,或由由全像術干涉疊加黃光微影技術加以製造。 According to another object of the present invention, a solar cell with a two-dimensional polymer grating is provided, characterized in that: the solar cell has a two-dimensional polymer grating, thereby improving the light receiving time of the solar cell, thereby improving the power conversion efficiency. The two-dimensional polymer grating system can be a reflective diffraction grating with a grating depth of 180-220 μm and a grating period of 0.4-0.6 μm. A two-dimensional polymer grating refers to a grating having grating patterns in two different directions, and is formed using a photoresist material or an organic (OG) polymer material. Furthermore, the two-dimensional polymer grating can be manufactured by means of overmolding, or by superimposed yellow lithography by holographic interference.

是故,本發明之具二維高分子光柵係藉由微機電製程技術與光學干涉技術的相互配合,其中包含軟性印刷技術、微接觸印刷、毛細管微成形及複製成形技術等係為本領域之工作者所熟知,故在此不在贅述。綜合此些製程 方法以製作出二維高分子反射式繞射光柵。利用二維反射式繞射光柵來反射被太陽能基板所反射出來的光線,使此光線再一次被利用,而提升太陽能電池基板的集光率,進而使得太陽能電池功率轉換效率增加。 Therefore, the two-dimensional polymer grating of the present invention cooperates with the micro-electromechanical process technology and the optical interference technology, and includes soft printing technology, micro-contact printing, capillary micro-forming and replica forming technology, etc. The workers are well known, so they are not described here. Integrating these processes The method is to produce a two-dimensional polymer reflective diffraction grating. The two-dimensional reflective diffraction grating is used to reflect the light reflected by the solar substrate, so that the light is once again utilized, thereby increasing the etendue of the solar cell substrate, thereby increasing the power conversion efficiency of the solar cell.

光柵是由許多等間距週期性細密條纹所構成的光學元件;最簡單的光柵是於一塊平板玻璃或金屬薄板上刻有許多平行等間距的密集直線凹槽,一般達幾萬條數量級;從原理上而言,光柵屬於多狹縫繞射,當光通過多狹縫時會產生繞射之原理。 A grating is an optical component consisting of a plurality of equally spaced periodic fine stripes; the simplest grating is a plurality of parallel equidistant dense linear grooves engraved on a flat glass or metal foil, typically on the order of tens of thousands; In principle, the grating is a multi-slit diffraction that produces the principle of diffraction as it passes through multiple slits.

請參閱第2圖,其係為本發明之具二維高分子光柵之太陽能電池之實施例示意圖。圖中,具二維高分子光柵之太陽能電池係包含一太陽能電池本體21及一二維高分子光柵22。二維高分子光柵22係疊合於太陽能電池本體21上。本發明所採用之二維高分子光柵22,其係為一反射式繞射光柵,且其光柵深度係為180~220μm,光柵週期為0.4~0.6μm。二維高分子光柵22係具有兩不同方向之光柵條紋圖案(如第2圖所示),且其係可由光阻材料或有機(OG)高分子材料形成。由於光柵之物理特性,故可增加太陽能電池本體21上的集光效率。其中,二維高分子光柵22之製作方式係可包含翻模製造之方式製造,或由全像術干涉疊加黃光微影技術加以製造。 Please refer to FIG. 2 , which is a schematic diagram of an embodiment of a solar cell with a two-dimensional polymer grating of the present invention. In the figure, a solar cell having a two-dimensional polymer grating includes a solar cell body 21 and a two-dimensional polymer grating 22. The two-dimensional polymer grating 22 is superposed on the solar cell body 21. The two-dimensional polymer grating 22 used in the present invention is a reflective diffraction grating having a grating depth of 180 to 220 μm and a grating period of 0.4 to 0.6 μm. The two-dimensional polymer grating 22 has a grating stripe pattern of two different directions (as shown in FIG. 2), and it may be formed of a photoresist material or an organic (OG) polymer material. Due to the physical characteristics of the grating, the light collecting efficiency on the solar cell body 21 can be increased. The two-dimensional polymer grating 22 can be manufactured by means of overmolding, or by holographic interferometric yellow lithography.

請續參閱第3圖,其係為本發明之具二維高分子光柵之太陽能電池之光柵製作流程圖。本圖係描述利用翻模以製造二維高分子光柵之流程。圖中,步驟S31係為旋轉塗佈 高分子材料聚二甲基矽氧烷(Polydimethylsiloxane,PDMS)及舉離PDMS:此步驟係藉由PDMS作為轉印過程之橋樑,而後將已塗佈上PDMS之基板置於烤箱(Oven)加速PDMS材料固化。接下來便可舉離(Lift-Off)PDMS薄膜,由於PDMS材料的特性,可輕易地將PDMS與基板分離,分離後,其光柵條紋之圖案即轉移於PDMS薄膜上。步驟S32係為注入OG高分子材料:此步驟係將已轉印有繞射光柵之PDMS薄膜置於玻璃基板上方,其兩旁放置適當高度的隔離子,且於隔離子上方再放置一玻璃基板,此時PDMS薄膜即被夾於兩片玻璃中間,再灌入OG高分子於其中。步驟S33係為固化OG高分子材料:此步驟係利用紫外線(UV)光源照射固化的方法使OG高分子材料固化。步驟S34係為舉離OG高分子光柵:此步驟係將PDMS薄膜與OG高分子分離,如此即得到一二維OG高分子光柵。 Please refer to FIG. 3, which is a flow chart of the grating fabrication of the solar cell with the two-dimensional polymer grating of the present invention. This figure describes the flow of using a mold to fabricate a two-dimensional polymer grating. In the figure, step S31 is a spin coating Polymer material polydimethylsiloxane (PDMS) and lift-off PDMS: This step is based on PDMS as a bridge for the transfer process, and then the substrate coated with PDMS is placed in the oven (Oven) to accelerate PDMS. The material is cured. Next, the Lift-Off PDMS film can be lifted. Due to the characteristics of the PDMS material, the PDMS can be easily separated from the substrate. After separation, the pattern of the grating stripe is transferred to the PDMS film. Step S32 is to inject the OG polymer material: in this step, the PDMS film to which the diffraction grating has been transferred is placed on the glass substrate, and spacers of appropriate height are placed on both sides, and a glass substrate is placed on the spacers. At this time, the PDMS film was sandwiched between two sheets of glass, and then poured into the OG polymer. Step S33 is curing the OG polymer material: in this step, the OG polymer material is cured by irradiation with a ultraviolet (UV) light source. Step S34 is to lift off the OG polymer grating: this step separates the PDMS film from the OG polymer, thus obtaining a two-dimensional OG polymer grating.

請續參閱第4圖,其係為本發明之具二維高分子光柵之太陽能電池之另一光柵製作流程圖。本圖係描述全像術干涉並疊加黃光微影技術以製造二維高分子光柵之流程。圖中,步驟S41係清洗基板:此基板係為玻璃材質,利用丙酮與甲醇等有機溶劑配合超音波震洗機各震洗,再以去離子水震洗去除基板上的雜質,後續將基板置於烤箱中,以高溫去除基板上的水氣。步驟S42係為旋轉塗佈光阻及軟烤光阻:將具室溫之光阻液利用旋轉塗佈機,將光阻均勻的塗佈於基板上,而後再對光阻進行軟烤。步驟S43係利用全像術干涉微影製作繞射光柵圖案:將已軟烤完畢之基板置於兩束雷射光交會之平面上,此時反射 光柵圖案即感光於具光阻之基板上方。步驟S44係曝光、烘烤及顯影:進行加熱。以減少光阻於感光時所造成的佇波現象與加速光阻分子的解離。再以顯影液對反射式繞射光柵基板顯影,後續再利用去離子水定影,再以氮氣將基板吹乾,最後利用烤箱烘烤。 Please refer to FIG. 4, which is a flow chart of another grating fabrication of a solar cell with a two-dimensional polymer grating of the present invention. This figure depicts the process of holographic interferometry and superposition of yellow lithography to create a two-dimensional polymer grating. In the figure, step S41 is to clean the substrate: the substrate is made of glass, and the organic solvent such as acetone and methanol is combined with the ultrasonic washing machine for each shock washing, and then the impurities on the substrate are removed by shaking with deionized water, and then the substrate is placed. In the oven, the moisture on the substrate is removed at a high temperature. Step S42 is a spin coating photoresist and a soft baking photoresist: a photoresist having a room temperature is uniformly applied to the substrate by a spin coater, and then the photoresist is soft baked. Step S43 is to make a diffraction grating pattern by using holographic interference lithography: placing the soft-baked substrate on the plane of the two laser light intersections, and reflecting at this time The grating pattern is photosensitive above the substrate with photoresist. Step S44 is exposure, baking and development: heating is performed. In order to reduce the chopping phenomenon caused by the photoresist in the photosensitive light and accelerate the dissociation of the photoresist molecules. The reflective diffraction grating substrate is further developed with a developing solution, followed by fixing with deionized water, and then the substrate is blown dry with nitrogen, and finally baked in an oven.

如第2圖至第4圖所述,此具二維反射式繞射光柵的太陽能基板其功率轉換效率較原本的太陽能基板來的高,且本發明具有製程簡單及低製造成本之優點。 As shown in FIG. 2 to FIG. 4, the solar substrate with the two-dimensional reflective diffraction grating has higher power conversion efficiency than the original solar substrate, and the invention has the advantages of simple process and low manufacturing cost.

以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。 The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

11‧‧‧倒置角錐體結構 11‧‧‧Inverted pyramid structure

12‧‧‧背面接觸部 12‧‧‧Back contact

21‧‧‧太陽能電池 21‧‧‧ solar cells

22‧‧‧二維高分子光柵 22‧‧‧Two-dimensional polymer grating

23‧‧‧光線 23‧‧‧Light

S31至S34‧‧‧步驟流程 S31 to S34‧‧‧ Step procedure

S41至S44‧‧‧步驟流程 S41 to S44‧‧‧ Step procedure

第1圖係為本發明之具二維高分子光柵之太陽能電池之習知技藝示意圖;第2圖係為本發明之具二維高分子光柵之太陽能電池之實施例示意圖;第3圖係為本發明之具二維高分子光柵之太陽能電池之光柵製作流程圖;以及第4圖係為本發明之具二維高分子光柵之太陽能電池之另一光柵製作流程圖。 1 is a schematic view of a conventional solar cell of a two-dimensional polymer grating of the present invention; FIG. 2 is a schematic view of an embodiment of a solar cell with a two-dimensional polymer grating of the present invention; A flow chart for fabricating a solar cell with a two-dimensional polymer grating according to the present invention; and FIG. 4 is a flow chart for fabricating another grating of a solar cell with a two-dimensional polymer grating of the present invention.

21‧‧‧太陽能電池 21‧‧‧ solar cells

22‧‧‧二維高分子光柵 22‧‧‧Two-dimensional polymer grating

23‧‧‧光線 23‧‧‧Light

Claims (7)

一種具二維高分子光柵之太陽能電池,其包含:一太陽能電池本體;以及一反射式繞射二維高分子光柵,係直接疊合於該太陽能電池本體上,該反射式繞射二維高分子光柵係藉由反射特性將該太陽能電池本體所反射之光線反射回該太陽能電池本體上,以提升該太陽能電池本體之受光時間,進而提升功率轉換效率。 A solar cell with a two-dimensional polymer grating, comprising: a solar cell body; and a reflective diffractive two-dimensional polymer grating directly superposed on the solar cell body, the reflective diffraction is two-dimensionally high The molecular grating reflects the light reflected by the solar cell body back to the solar cell body by the reflection characteristic to enhance the light receiving time of the solar cell body, thereby improving the power conversion efficiency. 如申請專利範圍第1項所述之具二維高分子光柵之太陽能電池,其中該二維高分子光柵之光柵深度係為180~220μm。 The solar cell with a two-dimensional polymer grating according to claim 1, wherein the two-dimensional polymer grating has a grating depth of 180 to 220 μm. 如申請專利範圍第1項所述之具二維高分子光柵之太陽能電池,其中該二維高分子光柵之光柵週期為0.4~0.6μm。 The solar cell with a two-dimensional polymer grating according to claim 1, wherein the two-dimensional polymer grating has a grating period of 0.4 to 0.6 μm. 如申請專利範圍第1項所述之具二維高分子光柵之太陽能電池,其中該二維高分子光柵係具有兩不同方向之光柵條紋圖案。 The solar cell with a two-dimensional polymer grating according to claim 1, wherein the two-dimensional polymer grating has a grating stripe pattern in two different directions. 如申請專利範圍第1項所述之具二維高分子光柵之太陽能電池,其中該二維高分子光柵係可由光阻材料或有機(OG)高分子材料形成。 The solar cell with a two-dimensional polymer grating according to claim 1, wherein the two-dimensional polymer grating is formed of a photoresist material or an organic (OG) polymer material. 如申請專利範圍第1項所述之具二維高分子光柵之太陽能電池,其中該二維高分子光柵係可由翻模製造之方式製造。 The solar cell with a two-dimensional polymer grating according to claim 1, wherein the two-dimensional polymer grating can be manufactured by overmolding. 如申請專利範圍第1項所述之具二維高分子光柵之太陽能電池,其中該二維高分子光柵係可由全像術干涉及黃光微 影技術加以製造。 The solar cell with a two-dimensional polymer grating according to the first aspect of the patent application, wherein the two-dimensional polymer grating can be holographically involved in the yellow light micro Shadow technology is manufactured.
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