TWI382147B - Techniques to measure width of microchannels on a rotating disk and to detect the liquid filling in the channels by the use of optical pick-up head devices - Google Patents

Techniques to measure width of microchannels on a rotating disk and to detect the liquid filling in the channels by the use of optical pick-up head devices Download PDF

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TWI382147B
TWI382147B TW98101368A TW98101368A TWI382147B TW I382147 B TWI382147 B TW I382147B TW 98101368 A TW98101368 A TW 98101368A TW 98101368 A TW98101368 A TW 98101368A TW I382147 B TWI382147 B TW I382147B
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laser light
detecting
reflected
measuring
optical reading
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TW201027047A (en
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Jerry Min Chen
kun yu Liu
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Univ Nat Chunghsing
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Description

運用光學讀取裝置量測微流道寬度與偵測流道流體之方法Method for measuring microchannel width and detecting flow channel fluid using optical reading device

本發明係關於一種方法,尤指一種運用光學讀取裝置量測微流道寬度與偵測流道流體之方法者。The present invention relates to a method, and more particularly to a method for measuring the width of a microchannel and detecting a fluid in a flow channel using an optical reading device.

現今微流道技術在生醫工程運用上扮演了十分重要的角色,但卻並未有能方便有效檢測微流道的方法與儀器,而現有檢測微流道之方法主要係有接觸式及光學式兩種,但接觸式可能損壞流道結構,且需於微流道封裝前進行,而光學式雖可於微流道封裝後來進行檢測,但無法準確量測封裝後的流道寬度,因此現有的檢測方法在操作上實有相當大的限制。Nowadays, micro-channel technology plays a very important role in the application of biomedical engineering, but there is no method and instrument for detecting micro-channels conveniently and effectively. The existing methods for detecting micro-channels are mainly contact and optics. Two types, but the contact type may damage the flow channel structure and need to be performed before the micro flow channel package, while the optical type can be detected after the micro flow channel package, but the flow channel width after the package cannot be accurately measured. Existing detection methods have considerable limitations in operation.

另外,現有的檢測方法只能用以檢測微流道其成型之尺寸,如深度等是否合乎設計,無法用以檢測其微流道間之寬度及流通狀況與否,即無法檢測實際操作時,液體是否如設計般流經各流道,因此在使用上亦存在有其不足之處。In addition, the existing detection method can only be used to detect the size of the micro flow channel, such as the depth, etc., whether it is suitable for detecting the width and the flow condition between the micro flow channels, that is, when the actual operation cannot be detected, Whether the liquid flows through the various channels as designed, there are also deficiencies in its use.

因此本發明人有鑑於現有微流道檢測方法的不足與缺失,特經過不斷的試驗與研究,終於發展出一種可改進現有缺失之本發明。Therefore, in view of the deficiencies and shortcomings of the existing microchannel detecting methods, the present inventors have finally developed a present invention which can improve the existing defects through continuous experimentation and research.

本發明之主要目的在於提供一種運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其可透過反射之雷射光訊號來方便且簡易地量測計算出微流道之寬度,或偵測是否有流體通過微流道,可達到提高檢測微流道之方便性及準確性之目的者。The main object of the present invention is to provide a method for measuring the microchannel width and detecting the flow channel fluid by using an optical reading device, which can conveniently and easily measure the width of the microchannel through the reflected laser light signal. , or to detect the presence of fluid through the microchannel, to achieve the purpose of improving the convenience and accuracy of detecting microchannels.

為達上述目的,本發明主要係提供一種運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其包含有下列步驟:In order to achieve the above object, the present invention mainly provides a method for measuring a microchannel width and detecting a channel fluid using an optical reading device, which comprises the following steps:

1)以一定的轉速轉動一受測之微流道碟片;1) rotating a measured microfluidic disk at a certain rotational speed;

2)啟動一雷射光發射裝置以發射雷射光訊號;2) starting a laser light emitting device to emit a laser light signal;

3)將雷射光訊號經一導引裝置導引至轉動的微流道碟片;3) guiding the laser light signal to a rotating micro-channel disc via a guiding device;

4)接收自微流道碟片反射之雷射光訊號;4) receiving a laser light signal reflected from the microchannel disc;

5)利用訊號電壓差計算反射雷射訊號無/低訊號時間;以及5) calculating the reflected/unlighted signal time of the reflected laser signal by using the signal voltage difference;

6)利用無/低訊號時間計算微流道之寬度或判定微流道內是否有流體通過。6) Calculate the width of the microchannel using the no/low signal time or determine if there is fluid in the microchannel.

所述之方法,其中在計算微流道的寬度時,係以所接收及計算之無/低訊號時間,配合碟片之轉速,以下列公式計算所得:The method wherein, when calculating the width of the microchannel, the received/calculated no/low signal time, in conjunction with the rotational speed of the disc, is calculated by the following formula:

2π×l ×t ×s ÷602π× l × t × s ÷60

其中,l為距離碟片旋轉中心之長度,t為無/低訊號時間,而s為碟片之轉速。Where l is the length from the center of rotation of the disc, t is the no/low signal time, and s is the rotational speed of the disc.

所述之方法,其中轉動微流道碟片的轉速為每分鐘500轉。The method wherein the rotational speed of the microfluidic disk is 500 revolutions per minute.

所述之方法,其中雷射光訊號由雷射光發射裝置發射後係被導引通過一相位光柵(Phase grating),而使穿過該相位光柵的雷射光產生三道光束以提供聚焦伺服與循軌伺服所需之誤差訊號。The method wherein the laser light signal is emitted by the laser light emitting device and then guided through a phase grating, and the laser light passing through the phase grating generates three beams to provide focus servo and tracking. The error signal required by the servo.

所述之方法,其中該導引裝置係含有一極化分光鏡(Polarization beam splitter,PBS ),而將雷射光訊號經該極化分光鏡反射至轉動的微流道碟片。The method, wherein the guiding device comprises a Polarization Beam Splitter ( PBS ), and the laser light signal is reflected by the polarization beam splitter to the rotating micro-channel disc.

所述之方法,其中該光感測器係直接接收由碟片所反射出來的雷射光訊號。In the method, the photo sensor directly receives the laser light signal reflected by the disc.

所述之方法,其中電射光反射後係經由極化分光鏡中穿過後,再由光感測器接收反射的雷射光訊號。In the method, after the reflected light is reflected through the polarizing beam splitter, the reflected laser light signal is received by the light sensor.

藉由上述之技術手段,本發明係利用雷射光訊號會因微流道產生散射現象,或利用微流道內流體之折射現象,而於所接收的訊號中產生一無/低訊號區間,以藉此準確地檢測微流道之寬度及是否有流體通過微流道,且本發明係藉由雷射光反射訊號來檢測微流道,故屬非接觸式之檢測方法,可於碟片封裝前或封裝後進行檢測,可達到提高微流道檢測之方便性及實用性者。According to the above technical means, the present invention utilizes a laser light signal to generate a scattering phenomenon due to a micro flow channel or a refraction phenomenon of a fluid in a micro flow channel to generate a no/low signal interval in the received signal. Thereby, the width of the micro flow channel and the presence or absence of fluid passing through the micro flow channel are accurately detected, and the invention detects the micro flow channel by the laser light reflection signal, so it is a non-contact detection method, which can be before the disk package Or after the package is tested, the convenience and practicability of improving the microchannel detection can be achieved.

本發明係提供一種運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,請配合參看第一、二圖,由圖中可看到,本發明之方法主要係包含有下列步驟:The present invention provides a method for measuring the microchannel width and detecting the flow channel fluid by using an optical reading device. Please refer to the first and second figures. As can be seen from the figure, the method of the present invention mainly includes the following step:

1)以一定的轉速轉動一受測之微流道碟片(10):其中該微流道碟片(10)係成型有供檢測的微流道,該微流道的寬度係依實際運用的情況而有所不同,而位於400μm至數mm之間,而該微流道碟片(10)之結構可如第三圖所示者,其係包含有一基材(12),於基材(12)之一側面上成型至少一道的微流道(122),並於基材(12)形成微流道(122)的側面上另設置一透明基板(14),而於透明基板(14)之另側則塗覆有一層反射層(16),該反射層(16)可為鋁質反射層以濺鍍的方式塗覆於透明基板(14)上,又轉動微流道碟片的轉速可為500rpm,即每分鐘500轉。1) rotating a microfluidic disk (10) to be tested at a certain rotational speed: wherein the microfluidic disk (10) is formed with a micro flow path for detection, and the width of the micro flow channel is practically applied. The case is different, and is located between 400 μm and several mm, and the structure of the micro-channel disc (10) can be as shown in the third figure, which comprises a substrate (12) on the substrate. (12) forming at least one microchannel (122) on one side, and further providing a transparent substrate (14) on the side of the substrate (12) forming the microchannel (122), and on the transparent substrate (14) The other side is coated with a reflective layer (16), which can be applied to the transparent substrate (14) by sputtering on the aluminum reflective layer, and rotates the microfluidic disk. The rotational speed can be 500 rpm, ie 500 revolutions per minute.

2)啟動一雷射光發射裝置(22)以發射雷射光訊號:其中該雷射光發射裝置(22)可為一雷射二極體(Laser diode),並於雷射二極體前設置有一相位光柵(Phase grating)(23),而使穿過相位光柵(23)的雷射光產生三道光束以提供聚焦伺服與循軌伺服所需之誤差訊號。2) starting a laser light emitting device (22) to emit a laser light signal: wherein the laser light emitting device (22) can be a laser diode and a phase is arranged in front of the laser diode A grating (23), which causes the laser light passing through the phase grating (23) to generate three beams to provide the error signals required for the focus servo and the tracking servo.

3)將雷射光訊號經一導引裝置導引至轉動的微流道碟片(10):該導引裝置可包含有一極化分光鏡(Polarization beam splitter,PBS)(24),而可將雷射光訊號反射至轉動的微流道碟片(10),另可設置可用以聚焦的透鏡(26)等裝置,使雷射光聚焦後得以更加集中。3) guiding the laser light signal through a guiding device to the rotating micro-channel disc (10): the guiding device may comprise a Polarization Beam Splitter (PBS) (24), and The laser light signal is reflected to the rotating microfluidic disk (10), and a device such as a lens (26) that can be used for focusing can be arranged to concentrate the laser light.

4)接收自微流道碟片(10)反射之雷射光訊號:雷射光在照射至碟片(10)時會由基材(12)異於形成微流道(122)的一側射入,經透明基板(14)後,會因反射層(16)而自碟片(10)反射,並以一光感測器(28)來接收該反射訊號,其中該光感測器(28)可直接接收由碟片(10)所反射出來的雷射光訊號,亦可令雷射光再經由極化分光鏡(24)中穿過後,再由光感測器(28)接收反射的雷射光訊號,而藉由光感測器(28)將光能轉變成電能。4) Laser light signal received from the micro-channel disc (10): when the laser light is irradiated onto the disc (10), the substrate (12) is different from the side on which the micro-channel (122) is formed. After passing through the transparent substrate (14), it is reflected from the disc (10) by the reflective layer (16), and receives the reflected signal by a photo sensor (28), wherein the photo sensor (28) The laser light signal reflected by the disc (10) can be directly received, and the laser light can be transmitted through the polarizing beam splitter (24), and then the reflected laser light signal is received by the light sensor (28). Light energy is converted into electrical energy by a light sensor (28).

5)利用訊號電壓差計算反射雷射訊號無/低訊號時間:當雷射光在照射到碟片(10)上未形成微流道(122)的位置時,雷射光可依照所設計的路徑反射至光感測器(28)上,光感測器(28)所接受到的訊號即會在一高準位上,即光感測器(28)所接收的訊號係形成一高訊號區間。5) Calculate the reflected laser signal by the signal voltage difference. No/low signal time: When the laser light is irradiated onto the disc (10) and the micro flow path (122) is not formed, the laser light can be reflected according to the designed path. On the photo sensor (28), the signal received by the photo sensor (28) will be at a high level, that is, the signal received by the photo sensor (28) forms a high signal interval.

而當雷射光在照射到碟片(10)上形成微流道(12)的位置時,雷射光訊號在進入微流道(122)內後,會於微流道(122)底部形成散射,而無法由反射層(16)依照所設計的路徑反射至光感測器(28)上,故光感測器(28)所接受到的訊號即會在低準位上,即光感測器所接收的訊號係形成一無訊號區間。When the laser light is irradiated onto the disc (10) to form the microchannel (12), the laser light will form a scattering at the bottom of the microchannel (122) after entering the microchannel (122). However, the reflective layer (16) cannot be reflected on the photosensor (28) according to the designed path, so the signal received by the photo sensor (28) will be at a low level, that is, the photo sensor. The received signals form a no-signal interval.

又當微流道(122)內有流體通過時,射入具流體之微流道(122)的雷射光會因流體本身折射率的差異性,產生局部反射而部份散射的效果,而僅部份的訊號會依所設計的路徑反射至光感測器(28),所以光感測器(28)所接收的訊號係形成一低訊號區間。When a fluid passes through the microchannel (122), the laser light incident on the fluid microchannel (122) may have partial reflection and partial scattering due to the difference in refractive index of the fluid itself, and only Some of the signals are reflected to the photosensor (28) according to the designed path, so the signal received by the photo sensor (28) forms a low signal interval.

而由光感測器(28)所接收的高、低或無訊號區間,即可計算出無/低訊號時間。The high/low or no signal interval received by the light sensor (28) can calculate the no/low signal time.

6)利用無訊號時間計算微流道之寬度或判定微流道內是否有流體通過:由所接收及計算之無訊號時間,配合碟片(10)之轉速,即可計算出微流道(122)的寬度,其公式為:6) Calculate the width of the microchannel by using no signal time or determine whether there is fluid in the microchannel: the microchannel can be calculated from the received and calculated no signal time and the speed of the disc (10). 122) The width of the formula is:

2π×l ×t ×s ÷602π× l × t × s ÷60

其中,l為距離碟片旋轉中心之距離,t為無/低訊號時間,而s為碟片之轉速。Where l is the distance from the center of rotation of the disc, t is the no/low signal time, and s is the rotational speed of the disc.

另外,藉由低訊號時間亦可判定微流道(122)內是否有流體通過。In addition, it is also possible to determine whether or not a fluid passes through the microchannel (122) by a low signal time.

以下便以數個實際例子來進一步說明本發明之方法:第四圖所示者,係利用本發明檢測未形成微流道之碟片之結果,由圖中可看到,由於在碟片上未形成微流道,故反射的訊號均會保持在高準位的狀態。In the following, the method of the present invention will be further illustrated by a number of practical examples: the fourth figure shows the result of detecting the disc in which the microfluidic channel is not formed by using the present invention, as can be seen from the figure, due to the disc. The micro-channel is not formed, so the reflected signal will remain at a high level.

第五圖所示者,係利用本發明檢測形成一道微流道之碟片之結果,由圖中可看到,當雷射光訊號照射在碟片上相對於形成微流道的位置處時,因雷射光訊號在微流道的底部會因散射現象,而產生無訊號區段,而由所接受的訊號圖可清楚看到僅一道無訊號區段產生,故可清楚地看出於碟片形成有一道微流道,並可依無訊號區段的時間配合碟片的轉速,來計算出該微流道的寬度,而藉此判斷該微流道之寬度是否合乎設計預期。As shown in the fifth figure, the result of detecting the disc forming a microfluidic channel by using the present invention, as can be seen from the figure, when the laser light signal is irradiated on the disc at a position relative to the formation of the microfluidic channel, Since the laser signal is scattered at the bottom of the microchannel due to scattering phenomenon, a signal-free section is generated, and it is clear from the accepted signal diagram that only one non-signal section is generated, so that it can be clearly seen on the disc. A micro flow channel is formed, and the width of the micro flow channel can be calculated according to the time of the non-signal segment to match the rotation speed of the disk, thereby judging whether the width of the micro flow channel is in accordance with design expectations.

第六圖所示者,係利用本發明檢測形成二道微流道之碟片之結果,由圖中可看到,於訊號圖中有兩道無訊號區段產生,故可清楚地看出於碟片形成有二道微流道,並可依各無訊號區段的時間配合碟片的轉速,來計算出各微流道的寬度。The figure shown in the sixth figure uses the present invention to detect the result of forming a disc of two microfluidic channels. As can be seen from the figure, two non-signal sections are generated in the signal diagram, so it can be clearly seen Two microchannels are formed on the disc, and the width of each microchannel can be calculated according to the time of each signal section and the rotation speed of the disc.

如七、八圖所示者,係本發明運用於檢測是否有流體通過微流道之實驗結果,由第七圖中可看出,於該碟片上形成有一道微流道,且於微流道中未導入流體,故於訊號圖中形成有一段無訊號區段,而該相對於微流道之無訊號區段兩側較小之無訊號區段係因用以結合基材及透明基板之膠體因其折射率所形成,而當將流體導入微流道後,如第八圖所示者,因微流道內流體折射率的影響,會於訊號圖中形成一低訊號區間,而由七、八兩圖之量測結果可清楚地判斷出流體確實通過該微流道。As shown in Figures 7 and 8, the present invention is applied to test whether there is fluid passing through the microchannel. As can be seen from the seventh figure, a microchannel is formed on the disc, and No fluid is introduced into the flow channel, so a signal-free section is formed in the signal diagram, and the smaller signal-free section on both sides of the non-signal section relative to the micro-channel is used to bond the substrate and the transparent substrate. The colloid is formed by its refractive index. When the fluid is introduced into the microchannel, as shown in the eighth figure, due to the influence of the refractive index of the fluid in the microchannel, a low signal interval is formed in the signal diagram. The measurement results of the seven and eight figures can clearly determine that the fluid actually passes through the microchannel.

因此,本發明可準確地檢測微流道之寬度及是否有流體通過微流道,其精密度依本發明人之實驗可達0.7μm左右,且本發明係藉由雷射光反射訊號來檢測微流道,故屬非接觸式之檢測方法,可於碟片封裝前或封裝後進行檢測,可藉以提高微流道檢測之方便性及實用性者。Therefore, the present invention can accurately detect the width of the microchannel and whether or not fluid passes through the microchannel, and the precision thereof can be about 0.7 μm according to the experiment of the present inventors, and the present invention detects the micro by the laser light reflection signal. The flow path is a non-contact detection method, which can be detected before or after the package, so as to improve the convenience and practicability of the micro flow path detection.

(10)...碟片(10). . . Disc

(12)...基材(12). . . Substrate

(122)...微流道(122). . . Microchannel

(14)...透明基板(14). . . Transparent substrate

(16)...反射層(16). . . Reflective layer

(22)...雷射光發射裝置(twenty two). . . Laser light emitting device

(23)...相位光柵(twenty three). . . Phase grating

(24)...極化分光鏡(twenty four). . . Polarizing beam splitter

(26)...透鏡(26). . . lens

(28)...光感測器(28). . . Light sensor

第一圖係本發明之流程圖。The first figure is a flow chart of the present invention.

第二圖係本發明之光學讀取裝置操作示意圖。The second drawing is a schematic view of the operation of the optical reading device of the present invention.

第三圖係本發明檢測之微流道碟片之放大圖。The third figure is an enlarged view of the microfluidic disk detected by the present invention.

第四圖係利用本發明檢測未形成有微流道之碟片之訊號圖。The fourth figure is a signal diagram for detecting a disc in which a micro flow path is not formed by the present invention.

第五圖利用本發明檢測具一道微流道之碟片之訊號圖。The fifth figure uses the present invention to detect a signal map of a disk having a micro flow path.

第六圖利用本發明檢測具兩道微流道之碟片之訊號圖。The sixth figure uses the present invention to detect a signal map of a disc having two microchannels.

第七圖利用本發明檢測未有流體流入微流道之碟片之訊號圖。The seventh figure uses the present invention to detect a signal map of a disc having no fluid flowing into the microchannel.

第八圖利用本發明檢測流體流入微流道之訊號圖。The eighth figure uses the present invention to detect a signal pattern of fluid flow into the microchannel.

(10)...碟片(10). . . Disc

(22)...雷射光發射裝置(twenty two). . . Laser light emitting device

(23)...相位光柵(twenty three). . . Phase grating

(24)...極化分光鏡(twenty four). . . Polarizing beam splitter

(26)...透鏡(26). . . lens

(28)...光感測器(28). . . Light sensor

Claims (14)

一種運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其包含有下列步驟:1)以一定的轉速轉動一受測之微流道碟片;2)啟動一雷射光發射裝置以發射雷射光訊號;3)將雷射光訊號經一導引裝置導引至轉動的微流道碟片;4)接收自微流道碟片反射之雷射光訊號;5)利用訊號電壓差計算反射雷射訊號無/低訊號時間;以及6)利用無/低訊號時間計算微流道之寬度或判定微流道內是否有流體通過。A method for measuring microfluidic width and detecting flow channel fluid by using an optical reading device, comprising the steps of: 1) rotating a measured microfluidic disk at a certain rotational speed; 2) starting a laser light The transmitting device transmits the laser light signal; 3) directs the laser light signal to the rotating micro-channel disc through a guiding device; 4) receives the laser light signal reflected from the micro-channel disc; 5) utilizes the signal voltage The difference is calculated by the reflected laser signal without/low signal time; and 6) the width of the micro flow channel is calculated using the no/low signal time or whether fluid is passed through the micro flow path. 如申請專利範圍第1項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中在計算微流道的寬度時,係以所接收及計算之無/低訊號時間,配合碟片之轉速,以下列公式計算所得:2π×l ×t ×s ÷60其中,l為距離碟片旋轉中心之距離,t為無/低訊號時間,而s為碟片之轉速。A method for measuring a microchannel width and detecting a flow channel fluid using an optical reading device as described in claim 1, wherein the width of the microchannel is calculated as the no/low of the received and calculated The signal time, in conjunction with the rotational speed of the disc, is calculated by the following formula: 2π × l × t × s ÷ 60 where l is the distance from the center of rotation of the disc, t is the no/low signal time, and s is the disc Rotating speed. 如申請專利範圍第1或2項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中轉動微流道碟片的轉速為每分鐘500轉。A method of measuring a microchannel width and detecting a flow channel fluid using an optical reading device according to claim 1 or 2, wherein the rotational speed of the rotating microfluidic disk is 500 revolutions per minute. 如申請專利範圍第3項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中雷射光訊號由雷射光發射裝置發射後係被導引通過一相位光柵(Phase grating),而使穿過該相位光柵的雷射光產生三道光束以提供聚焦伺服與循軌伺服所需之誤差訊號。A method for measuring a microchannel width and detecting a flow channel fluid using an optical reading device according to claim 3, wherein the laser light signal is emitted by the laser light emitting device and then guided through a phase grating ( The phase grating produces three beams of laser light that pass through the phase grating to provide the error signals required for focus servo and tracking servo. 如申請專利範圍第4項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中該導引裝置係含有一極化分光鏡(Polarization beam splitter,PBS),而將雷射光訊號經該極化分光鏡反射至轉動的微流道碟片。A method for measuring a microchannel width and detecting a flow channel fluid using an optical reading device according to the fourth aspect of the invention, wherein the guiding device comprises a polarization beam splitter (PBS), The laser light signal is reflected by the polarization beam splitter to the rotating microfluidic disk. 如申請專利範圍第5項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中該光感測器係直接接收由碟片所反射出來的雷射光訊號。The method of measuring a microchannel width and detecting a channel fluid by using an optical reading device according to claim 5, wherein the photo sensor directly receives the laser light signal reflected by the disc. 如申請專利範圍第5項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中電射光反射後係經由極化分光鏡中穿過後,再由光感測器接收反射的雷射光訊號。The method for measuring a microchannel width and detecting a flow channel fluid by using an optical reading device according to claim 5, wherein the electro-optic light is reflected and passed through the polarizing beam splitter, and then the light is sensed. The receiver receives the reflected laser light signal. 如申請專利範圍第1或2項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中雷射光訊號由雷射光發射裝置發射後係被導引通過一相位光柵(Phase grating),而使穿過該相位光柵的雷射光產生三道光束以提供聚焦伺服與循軌伺服所需之誤差訊號。A method for measuring a microchannel width and detecting a flow channel fluid by using an optical reading device according to claim 1 or 2, wherein the laser light signal is emitted by the laser light emitting device and is guided through a phase A grating is used to generate three beams of laser light that passes through the phase grating to provide the error signals required for focus servo and tracking servo. 如申請專利範圍第8項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中該導引裝置係含有一極化分光鏡(Polarization beam splitter,PBS),而將雷射光訊號經該極化分光鏡反射至轉動的微流道碟片。The method for measuring a microchannel width and detecting a flow channel fluid by using an optical reading device according to claim 8, wherein the guiding device comprises a polarization beam splitter (PBS). The laser light signal is reflected by the polarization beam splitter to the rotating microfluidic disk. 如申請專利範圍第9項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中該光感測器係直接接收由碟片所反射出來的雷射光訊號。The method of measuring a microchannel width and detecting a channel fluid by using an optical reading device according to claim 9, wherein the photo sensor directly receives the laser light signal reflected by the disc. 如申請專利範圍第9項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中雷射光反射後係經由極化分光鏡中穿過後,再由光感測器接收反射的雷射光訊號。 The method for measuring a microchannel width and detecting a flow channel fluid by using an optical reading device according to claim 9, wherein the laser light is reflected and passed through the polarization beam splitter, and then the light is sensed. The receiver receives the reflected laser light signal. 如申請專利範圍第1或2項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中該導引裝置係含有一極化分光鏡(Polarization beam splitter,PBS),而將雷射光訊號經該極化分光鏡反射至轉動的微流道碟片。 A method for measuring a microchannel width and detecting a flow channel fluid using an optical reading device according to claim 1 or 2, wherein the guiding device comprises a polarization beam splitter (PBS). And reflecting the laser light signal through the polarizing beam splitter to the rotating microfluidic disk. 如申請專利範圍第12項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中該光感測器係直接接收由碟片所反射出來的雷射光訊號。 The method of measuring a microchannel width and detecting a channel fluid by using an optical reading device according to claim 12, wherein the photo sensor directly receives the laser light signal reflected by the disc. 如申請專利範圍第12項所述之運用光學讀取裝置量測微流道寬度與偵測流道流體之方法,其中雷射光反射後係經由極化分光鏡中穿過後,再由光感測器接收反射的雷射光訊號。The method for measuring a microchannel width and detecting a flow channel fluid by using an optical reading device according to claim 12, wherein the laser light is reflected and passed through the polarizing beam splitter, and then the light is sensed. The receiver receives the reflected laser light signal.
TW98101368A 2009-01-15 2009-01-15 Techniques to measure width of microchannels on a rotating disk and to detect the liquid filling in the channels by the use of optical pick-up head devices TWI382147B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4987301A (en) * 1988-11-28 1991-01-22 Victor Company Of Japan, Ltd. Reflective optical encoder device with light beams applied as spats spaced by 2 predetermined pitch
TW200523545A (en) * 2003-04-23 2005-07-16 Nagaoka Kk Optical bio-discs including spiral fluidic circuits for performing assays

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4987301A (en) * 1988-11-28 1991-01-22 Victor Company Of Japan, Ltd. Reflective optical encoder device with light beams applied as spats spaced by 2 predetermined pitch
TW200523545A (en) * 2003-04-23 2005-07-16 Nagaoka Kk Optical bio-discs including spiral fluidic circuits for performing assays

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