TWI382001B - 製造玻璃薄片之製程及設備 - Google Patents
製造玻璃薄片之製程及設備 Download PDFInfo
- Publication number
- TWI382001B TWI382001B TW097116558A TW97116558A TWI382001B TW I382001 B TWI382001 B TW I382001B TW 097116558 A TW097116558 A TW 097116558A TW 97116558 A TW97116558 A TW 97116558A TW I382001 B TWI382001 B TW I382001B
- Authority
- TW
- Taiwan
- Prior art keywords
- dust
- sheet
- glass
- flakes
- deposition surface
- Prior art date
Links
- 239000011521 glass Substances 0.000 title claims description 190
- 238000000034 method Methods 0.000 title claims description 112
- 230000008569 process Effects 0.000 title claims description 105
- 239000000428 dust Substances 0.000 claims description 501
- 238000000151 deposition Methods 0.000 claims description 117
- 230000008021 deposition Effects 0.000 claims description 110
- 239000002245 particle Substances 0.000 claims description 98
- 238000005245 sintering Methods 0.000 claims description 76
- 239000010410 layer Substances 0.000 claims description 58
- 239000000203 mixture Substances 0.000 claims description 26
- 239000010455 vermiculite Substances 0.000 claims description 24
- 229910052902 vermiculite Inorganic materials 0.000 claims description 24
- 235000019354 vermiculite Nutrition 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000005520 cutting process Methods 0.000 claims description 16
- 238000004804 winding Methods 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 9
- 230000007062 hydrolysis Effects 0.000 claims description 8
- 238000006460 hydrolysis reaction Methods 0.000 claims description 8
- 239000002019 doping agent Substances 0.000 claims description 7
- 239000002356 single layer Substances 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 239000011819 refractory material Substances 0.000 claims description 4
- 238000007665 sagging Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims 1
- 230000006698 induction Effects 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 31
- 239000007789 gas Substances 0.000 description 15
- 230000035882 stress Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 7
- 230000000704 physical effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 230000001939 inductive effect Effects 0.000 description 4
- 238000003698 laser cutting Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 238000010924 continuous production Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011143 downstream manufacturing Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000003286 fusion draw glass process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000012864 cross contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005308 flint glass Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1484—Means for supporting, rotating or translating the article being formed
- C03B19/1492—Deposition substrates, e.g. targets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
- C03B2207/52—Linear array of like burners
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
- Surface Treatment Of Glass (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/800,585 US7677058B2 (en) | 2007-05-07 | 2007-05-07 | Process and apparatus for making glass sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200911708A TW200911708A (en) | 2009-03-16 |
| TWI382001B true TWI382001B (zh) | 2013-01-11 |
Family
ID=39540710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097116558A TWI382001B (zh) | 2007-05-07 | 2008-05-05 | 製造玻璃薄片之製程及設備 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7677058B2 (enExample) |
| EP (1) | EP2069245B1 (enExample) |
| JP (2) | JP2010526748A (enExample) |
| KR (1) | KR101501301B1 (enExample) |
| CN (1) | CN101687682B (enExample) |
| TW (1) | TWI382001B (enExample) |
| WO (1) | WO2008136924A1 (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101511584B1 (ko) * | 2008-09-25 | 2015-04-13 | 해성디에스 주식회사 | 롤 투 롤 반도체부품 제조장치 및 그에 적용되는 이송방법 |
| JP5691148B2 (ja) | 2008-10-01 | 2015-04-01 | 日本電気硝子株式会社 | ガラスロール、ガラスロールの製造装置、及びガラスロールの製造方法 |
| US8062733B2 (en) * | 2009-05-15 | 2011-11-22 | Corning Incorporated | Roll-to-roll glass material attributes and fingerprint |
| TWI464124B (zh) * | 2009-05-15 | 2014-12-11 | Corning Inc | 滾軸至滾軸玻璃材料屬性及特徵 |
| US8181485B2 (en) * | 2009-06-19 | 2012-05-22 | Corning Incorporated | Roll-to-roll glass soot sheet sintering method and apparatus |
| US8359884B2 (en) * | 2009-07-17 | 2013-01-29 | Corning Incorporated | Roll-to-roll glass: touch-free process and multilayer approach |
| GB2478307A (en) * | 2010-03-02 | 2011-09-07 | Heraeus Quartz Uk Ltd | Manufacture of silica glass |
| JP2013521615A (ja) * | 2010-03-05 | 2013-06-10 | ケアストリーム ヘルス インク | 透明導電性膜、物品、および方法 |
| US8438876B2 (en) * | 2010-03-29 | 2013-05-14 | Corning Incorporated | Method and apparatus for removing glass soot sheet from substrate |
| TWI487677B (zh) | 2010-05-28 | 2015-06-11 | Corning Inc | 可撓玻璃的捲狀物及用於捲繞之方法 |
| DE102011014875B3 (de) * | 2011-03-23 | 2012-04-19 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung poröser Granulatteilchen aus anorganischem Werkstoff sowie deren Verwendung |
| GB201106015D0 (en) | 2011-04-08 | 2011-05-25 | Heraeus Quartz Uk Ltd | Production of silica soot bodies |
| US8628840B2 (en) | 2011-06-29 | 2014-01-14 | Eastman Kodak Company | Electronically conductive laminate donor element |
| US8865298B2 (en) | 2011-06-29 | 2014-10-21 | Eastman Kodak Company | Article with metal grid composite and methods of preparing |
| US9321669B2 (en) | 2011-08-23 | 2016-04-26 | Corning Incorporated | Thin glass sheet with tunable coefficient of thermal expansion |
| US8713966B2 (en) * | 2011-11-30 | 2014-05-06 | Corning Incorporated | Refractory vessels and methods for forming same |
| US9199870B2 (en) * | 2012-05-22 | 2015-12-01 | Corning Incorporated | Electrostatic method and apparatus to form low-particulate defect thin glass sheets |
| US8857216B2 (en) * | 2012-05-31 | 2014-10-14 | Corning Incorporated | Burner modules, methods of forming glass sheets, and glass sheets formed thereby |
| TW201420464A (zh) | 2012-11-26 | 2014-06-01 | Ind Tech Res Inst | 傳送裝置 |
| US9452946B2 (en) | 2013-10-18 | 2016-09-27 | Corning Incorporated | Locally-sintered porous soot parts and methods of forming |
| US9919958B2 (en) | 2014-07-17 | 2018-03-20 | Corning Incorporated | Glass sheet and system and method for making glass sheet |
| US9296614B1 (en) | 2014-11-12 | 2016-03-29 | Corning Incorporated | Substrate such as for use with carbon nanotubes |
| EP3978450A1 (en) | 2014-11-26 | 2022-04-06 | Corning Incorporated | Thin glass sheet and system and method for forming the same |
| US10570048B2 (en) | 2015-02-13 | 2020-02-25 | Corning Incorporated | Silica-containing sheet and related system and methods |
| US9634349B2 (en) | 2015-04-13 | 2017-04-25 | Corning Incorporated | High silica content substrate such as for use in thin-film battery |
| WO2017027788A1 (en) * | 2015-08-13 | 2017-02-16 | Corning Incorporated | Additive manufacturing processes and manufactured article |
| US9422187B1 (en) | 2015-08-21 | 2016-08-23 | Corning Incorporated | Laser sintering system and method for forming high purity, low roughness silica glass |
| WO2017165769A1 (en) * | 2016-03-24 | 2017-09-28 | Corning Incorporated | Laser sintering system and method for forming high purity, low roughness, low warp silica glass |
| US10435324B2 (en) | 2016-08-18 | 2019-10-08 | Corning Incorporated | Laser system and method forming an edge section of a high purity fused silica glass sheet |
| US11274056B2 (en) | 2016-08-24 | 2022-03-15 | Corning Incorporated | Laser system and method forming a high purity fused silica glass sheet with micro-crenellations |
| US10821707B2 (en) * | 2018-05-17 | 2020-11-03 | Vaon, Llc | Multi-layer, flat glass structures |
| US10619926B2 (en) * | 2016-10-07 | 2020-04-14 | Corning Incorporated | Process for sintering material |
| EP3476815B1 (en) | 2017-10-27 | 2023-11-29 | Heraeus Quarzglas GmbH & Co. KG | Production of a porous product including post-adapting a pore structure |
| WO2019108808A2 (en) | 2017-11-29 | 2019-06-06 | Corning Incorporated | Highly loaded inorganic filled aqueous resin systems |
| US11912860B2 (en) | 2018-03-29 | 2024-02-27 | Corning Incorporated | Highly loaded inorganic filled organic resin systems |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3844751A (en) * | 1969-02-18 | 1974-10-29 | Regina Glass Fibre Ltd | Method and apparatus for the continuous production of a web or mat of staple fibres |
| JPH09286621A (ja) * | 1996-04-19 | 1997-11-04 | Toshiba Ceramics Co Ltd | 石英ガラス製板材の製造方法及びその装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3806570A (en) * | 1972-03-30 | 1974-04-23 | Corning Glass Works | Method for producing high quality fused silica |
| JPS55130828A (en) * | 1979-03-29 | 1980-10-11 | Ohara Inc | Formation of rod type or plate type optical glass |
| JPS58161929A (ja) * | 1982-03-17 | 1983-09-26 | Nippon Sheet Glass Co Ltd | 高純度石英ガラス板の製造方法 |
| US4494968A (en) * | 1983-10-03 | 1985-01-22 | Corning Glass Works | Method of forming laminated single polarization fiber |
| CA1255382A (en) * | 1984-08-10 | 1989-06-06 | Masao Kawachi | Hybrid optical integrated circuit with alignment guides |
| JPH06191860A (ja) * | 1992-12-28 | 1994-07-12 | Sano Fuji Koki Kk | プリズムの成形装置 |
| DE4418401C1 (de) * | 1994-05-26 | 1995-06-01 | Heraeus Quarzglas | Verfahren und Vorrichtung zur Herstellung von Platten aus Quarzglas |
| US6263706B1 (en) * | 1999-03-30 | 2001-07-24 | Deliso Evelyn M. | Method of controlling fluorine doping in soot preforms |
| US7299657B2 (en) * | 2002-07-12 | 2007-11-27 | Corning Incorporated | Method of making high strain point glass |
| WO2004007353A2 (en) | 2002-07-17 | 2004-01-22 | Hitco Carbon Composites, Inc. | Continuous chemical vapor deposition process and process furnace |
| US7423286B2 (en) | 2003-09-05 | 2008-09-09 | Si2 Technologies, Inc. | Laser transfer article and method of making |
| US7259106B2 (en) | 2004-09-10 | 2007-08-21 | Versatilis Llc | Method of making a microelectronic and/or optoelectronic circuitry sheet |
-
2007
- 2007-05-07 US US11/800,585 patent/US7677058B2/en active Active
-
2008
- 2008-04-22 WO PCT/US2008/005171 patent/WO2008136924A1/en not_active Ceased
- 2008-04-22 EP EP08767398.4A patent/EP2069245B1/en not_active Ceased
- 2008-04-22 KR KR1020097025376A patent/KR101501301B1/ko not_active Expired - Fee Related
- 2008-04-22 JP JP2010507392A patent/JP2010526748A/ja active Pending
- 2008-04-22 CN CN2008800233593A patent/CN101687682B/zh not_active Expired - Fee Related
- 2008-05-05 TW TW097116558A patent/TWI382001B/zh not_active IP Right Cessation
-
2014
- 2014-04-28 JP JP2014092417A patent/JP5868450B2/ja not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3844751A (en) * | 1969-02-18 | 1974-10-29 | Regina Glass Fibre Ltd | Method and apparatus for the continuous production of a web or mat of staple fibres |
| JPH09286621A (ja) * | 1996-04-19 | 1997-11-04 | Toshiba Ceramics Co Ltd | 石英ガラス製板材の製造方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101687682B (zh) | 2012-11-21 |
| TW200911708A (en) | 2009-03-16 |
| JP2014159369A (ja) | 2014-09-04 |
| KR101501301B1 (ko) | 2015-03-10 |
| EP2069245A1 (en) | 2009-06-17 |
| US20080280057A1 (en) | 2008-11-13 |
| JP2010526748A (ja) | 2010-08-05 |
| WO2008136924A1 (en) | 2008-11-13 |
| CN101687682A (zh) | 2010-03-31 |
| JP5868450B2 (ja) | 2016-02-24 |
| US7677058B2 (en) | 2010-03-16 |
| EP2069245B1 (en) | 2013-07-17 |
| KR20100023848A (ko) | 2010-03-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |