TWI381478B - Front opening substrate container with bottom plate - Google Patents

Description

Open substrate container with bottom plate attached

The present application claims priority to U.S. Patent Application Serial No. Serial No. Serial No. No. No. No

The present invention relates to a sealable container having a latching system for carrying, storing, and processing a wafer, a flat panel, and other substrates. More specifically, the present invention relates to a container having a base plate for providing engagement and interface with associated equipment.

Wafer carriers or pod containers are utilized to hold, transport, and store substrates before, during, and after processing. Such a substrate is used in the manufacture of semiconductors such as integrated circuits and liquid crystal display panels. These delicate and expensive substrates are subjected to repeated processing, storage and transportation as they are converted into final products. These substrates must be protected from physical damage from particulate contaminants, electrostatic discharges, ruptures, or contamination by vapors or gases such as gases used in the process to escape gases.

Such substrate containers are referred to as FOUP (Front Opening Unified Pod) and FOSB (Front Opening Shipping Box). The industry standard specification for such substrate containers utilizes kinematic coupling, which consists of three radial grooves at the bottom of the container, which are triangularly arranged in three circles on the process equipment. The interface of the protrusions. These kinematic couplings provide for precise positioning of the wafer container, thereby allowing precise handling of the container Remove or insert wafers with contents, such as with a robotic arm. These containers typically have means to allow the robotic arm to transport containers with contents. This means may include a robotic arm flange on top of the wafer container, and suitable rails or other features on the bottom of the container to allow the container to be properly transported on a conveyor having rollers or suitable carriers. Obviously, sudden start and stop can cause vibration of the wafer container containing the wafer and cause damage to the wafer. Therefore, it is preferable to provide a suitable wafer shock absorber during transportation, including transportation in the apparatus. Wafer fixtures and external packaging are conventionally used to provide such shock absorption during transport between devices. In equipment where the conveyor is engaged with the FOUP and/or FOSB floor and transporting the container in this manner, additional wafer damping and damping systems are also desirable.

Such FOUP and FOSB utilize a latching mechanism on a sealed door to create a fully sealed container. These containers require vents and/or vents that prevent deformation or unintended leakage of the carrier due to pressure differentials, such as changes in atmospheric pressure. The use of such a filter in several locations on the pod container is a conventional technique and typically has a hole in the housing to secure a suitable fixture and filter to the aperture.

In general, the industry is less likely to have the number of openings into such containers. In the prior art, such filters or venting characteristics are typically attached using openings formed in the outer casing portion.

Since the kinematic coupling must be accurately positioned relative to the wafer housing to allow precise interaction of the process equipment with the container and wafer, the three trenches at the bottom of the wafer container are aligned The positioning of the position becomes absolutely important. Traditionally molded heat in such wafer containers Plastic plastic, which may be distorted and deformed during molding or subsequent processes, so special care must be taken to provide accurate positioning. A conventional means of attaching kinematic coupling characteristics to a container portion includes directly molding a groove into the outer casing; using a screw to attach a separate flat plate having a groove; and utilizing an inner superstructure including a wafer outer casing And a bottom plate having a groove and inserted into the outer casing portion. It is preferred to utilize a separate molded panel that can be attached to the container, which has an adjustment function and is securely attached by the minimum near point attachment provided by the screw. Such a stand-alone slab can therefore easily incorporate additional functions, such as conveyor interface functions (such as rails), application methods, and attachment of other accessories, using different slab configurations or simply mounting the items. Attached to the tablet. Moreover, an ideally suitable means is provided for assisting the wafer contact area on the housing through kinematic coupling and kinematic coupling protrusions on the device or other receiving bases on the fixed wafer container Grounded.

A front open substrate carrier having a container portion and a latching door that closes the container portion, and a separately formed flat panel attached to the bottom of the container portion provides unique attachment means and innovative functions and benefits. In a preferred embodiment, the base plate has a kinematically coupled groove and a transfer rail, the groove having a contact surface formed therein, and the transfer rail being located at the periphery of the plate. In a preferred embodiment, the plate can be attached at a plurality of locations at the bottom of the container portion by a plurality of larger diameter connectors, for example, the larger diameter connector can be, for example, greater than about 1/2 inch and less than 3 inches, extending through the corresponding holes in the plate and the container portion. Such a connection can be achieved by Made from a unitary snap-in bushing, the single slider bushing can be closed or have a bore extending therethrough. In a preferred embodiment, the bore can be configured to receive a filter and/or a valve cartridge or valve member. In addition, the attachment location may utilize an elastomeric bushing or a differently constructed resilient member to provide damping between the conveyor plate and the outer casing.

In other preferred embodiments, there may be a plurality of openings at the bottom of the container, the bottom of the container is attached with a first member, and the first member is attached to the bottom plate. The two members are joined and at least one of the members is rotatable to provide a precise vertical positioning of the base plate relative to the outer casing or container portion for precise vertical positioning relative to the wafer support housing. The adjustment means may utilize an O-ring or similar means for providing friction to secure the two threaded members to the desired position. The threaded members can be individually formed separately from the container portion and the plate, can be snapped into position, can be properly sealed using an O-ring, and can have a bore extending through the two members to accommodate the filter and/or valve. Cartridge or valve member.

In a preferred embodiment, the valve cartridge provided may include a duckbill exhaust valve that may be formed of a thermoplastic elastomer that forms a V or inverted V-shape in one direction and a direction perpendicular to the first direction. rectangle. The duckbill valve is preferably formed by adding a slit after molding the member. Furthermore, the valve cartridge can have a filter member.

In a preferred embodiment, the resilient damper member can be positioned between certain points of attachment between the container portion and the plate, or between all of the connection points between the plate and the container portion, thereby providing a means of resilient damper The base plate is completely isolated from the container portion. In other embodiments, the elastic damper can be positioned to slow down The shock generated by the transport on the peripheral track of the slab while allowing a separate rigid retainer to provide a precise and rigid connection of the conveyor plate to the internal position, thereby allowing the kinematically coupled grooves to be accurately Located in the wafer housing.

Figures 1 through 4 show different views of the wafer carrier of the present invention. The carrier constitutes a wafer container, such as a FOSB or FOUP, which includes a container portion 20 having a front opening 22, a door 24 and a bottom plate 26 that close the front opening 22. The container portion generally has a top portion 30, a bottom portion 32, side portions 34, a rear portion 36, a bottom surface 37, and an open interior 38. A wafer holder 40 for supporting the wafer is provided on the inside of the side of the container portion, and a single wafer W is shown in FIG. The features of the conventional front open wafer carrier are disclosed in U.S. Patent Nos. 2,822,221, 6, 010, 008, and 6, 267, 245, the entire disclosure of each of

Referring to Figures 2, 3, 4 and 6, the detail of the bottom plate is shown. The bottom plate has a top surface 44, a bottom surface 46 and a perimeter 48. The track portion 50 for interfacing with the conveyor (such as the conveyor 51 shown in Fig. 3) is located on the front side, the rear side, the left side, and the right side of the periphery of the flat panel. The slab has three kinematic coupling grooves 52 each having a kinematic coupling surface 54 for engaging a prong coupling interface of a process device or other stationary device on which the container is placed. . The plate has four holes 60 that mate with corresponding holes 62 in the bottom 37 of the container portion. In one embodiment, the pin bushings shown in Figures 4 and 7 can be used to extend through the holes in the container portion and the holes in the plate to secure the two hole perimeters 64, 66 together. Additional structural ribs 68 can provide structural support and engagement with the bottom surface 37 of the container portion.

Referring to Figure 8, a method and apparatus (spacer) 169 for further connecting the bottom panel 26 to the container portion or housing 20 is disclosed. A first bushing 70 is snap fit into the aperture 72 of the housing and secured to the position by the latch 76. O-rings 78, 80 provide tight fixation and stability of the system and frictionally close the first bushing for positioning. The first bushing has a bore 84, a threaded end portion 86 and a collar 88. A second connecting member 92 constitutes a second annular bushing for snapping into the position of the insertion hole 94. On the plate, the tweezers 96 places the second annular bushing into the hole in the bottom plate. The second annular bushing has an upper end 100 that is threaded to engage the threaded end of the first annular bushing. In the present embodiment, the distance between the conveyor plate 26 and the outer casing can be accurately adjusted by the rotation of the second annular bushing 92 with respect to the first annular bushing 70. The additional O-ring 102 provides a means of friction to maintain the second annular bushing in the desired rotational position for proper position adjustment. A filter/valve, a plug or filter as described below can be placed in the bore 84.

Referring to Figures 9, 10, 11 and 12, an embodiment of the filter/valve 130, 132 is shown. The valve cartridge primarily has a duckbill valve member 138 that is preferably formed by injection molding a material, and then a slit 140 is cut at the top end 142 of the duckbill valve member, thereby forming the valve flaps 144, 146. The duckbill valve member can be positioned in the cartridge housing 164 by a collar 160 as appropriate. O-ring 168 can be utilized to place the cartridge seal in a suitably sized bore, such as bore 84. The valve cartridge shown in Figures 9, 10 and 11 also has filter members 172, 174 which may be formed from suitable filter materials of the prior art. Holding member 178 and 180 respectively hold the filter member in the valve cylinder.

Referring to Figure 13, another embodiment of a wafer carrier is shown and includes an elastic damper 190. The damper is located between the outer casing and the plate to absorb any vibration applied to the plate and minimize the same vibration transmitted to the wafer. The elastic dampers 190, as shown by the dashed lines in Fig. 4, can be placed on the holes 60, 62 of the outer plate body, respectively. Alternatively, the elastomer can be placed at other locations between the outer casing and the panel using other suitable structural characteristics. The bushing can be utilized to provide complete isolation between the panel and the housing such that there is no rigid plastic contact between the housing and the panel directly to the rigid plastic. Alternatively, the rigid elements between the outer casing and the slab can be joined directly and a damper placed adjacent the perimeter of the slab to provide some damping means near the perimeter of the slab, particularly when using the conveyor track 50 to transport the wafer carrier. . In another embodiment, the kinematic coupling may integrate the outer casing or container portion and may be exposed at the bottom; and the plate may have a conveyor track to engage the conveyor 51, as shown in Figure 3, and may be coupled by a damper The casing is isolated.

A variety of different materials are suitable for fabricating components of wafer carriers. For example, PEI with carbon fiber filler is suitable for the outer casing as well as the flat plate. Carbon fiber filled PEEK is also a suitable material, but it is more expensive. It is also possible to use polycarbonate, in particular carbon powder, to fill the polycarbonate, however, it is less desirable in terms of flammability and smoky properties at the time of combustion.

Thus, as described above, various aspects of the substrate carrier have been described. Precisely, such progressive aspects include the following individual aspects or combinations thereof, but are not limiting, that is, utilizing an elastic damper between the conveyor plate and the outer casing; utilizing a plurality of diameters greater than 1/2 inch Extending through the outer casing and flat a structural attachment member of the panel; utilizing a pin bushing to secure the panel to the housing; utilizing a connector having a bore extending therethrough to allow insertion of a filter/valve in the bore; utilizing an adjustable a threaded member to position the bottom plate relative to the wafer housing and the wafer plane; use an O-ring to lock or secure the individual components in place; use a threaded member to adjust and attach, which extends through Drill holes to insert filter cartridges, valve cartridges, combinations of the two or solid billets. It is further provided to utilize a valve formed of a resilient material that constitutes a duckbill valve to provide venting and/or pressure equalization.

While the features described above are described with respect to a semiconductor wafer container, the progressive aspects of the present invention are also applicable to flat panel carriers, wire mesh carriers, and film carrier vehicles.

20‧‧‧ container part; outer casing

22‧‧‧ front opening

24‧‧‧

26‧‧‧floor

30‧‧‧ top

32‧‧‧ bottom

34‧‧‧ side

36‧‧‧ Rear

37‧‧‧ bottom surface

38‧‧‧Open interior

40‧‧‧ Wafer Support

44‧‧‧ top surface

46‧‧‧ bottom surface

48‧‧‧around

50‧‧‧ Track section

51‧‧‧Conveyor

52‧‧ ‧ kinematically coupled grooves

54‧‧‧Sports coupling surface

60‧‧‧ holes

62‧‧‧ holes

64‧‧‧ Around the hole

66‧‧‧ Around the hole

68‧‧‧Structural ribs

70‧‧‧First bushing

72‧‧‧ hole

76‧‧‧掣子

78‧‧‧O-ring

80‧‧‧O-ring

84‧‧‧Drilling

86‧‧‧End of thread

88‧‧‧ collar

92‧‧‧Second connection member

94‧‧‧ hole

96‧‧‧掣子

100‧‧‧ upper end

102‧‧‧O-ring

130‧‧‧Filter/valve

132‧‧‧Filter/valve

138‧‧‧ Duckbill valve components

140‧‧‧slit

142‧‧‧Top

144‧‧‧Valve

146‧‧‧Valve

160‧‧‧ collar

164‧‧‧Valve housing

168‧‧‧O-ring

169‧‧‧Connecting device (spacer)

172‧‧‧Filter components

174‧‧‧Filter components

178‧‧‧ Keeping components

180‧‧‧ Keeping components

190‧‧‧elastic damper

W‧‧‧ wafer

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a previously opened wafer container of the present invention, which is tilted rearward to show the bottom plate.

Figure 2 is a bottom plan view of the panel of the present invention attached to the bottom of the wafer container.

3 is a side elevational view of a wafer carrier in accordance with the present invention.

4 is an exploded perspective view of a container portion, a plate, and a connector in accordance with the present invention.

Figure 5 is a perspective view of the bottom of the wafer container of Figure 1 when the plate is not attached.

Figure 6 is a top perspective view of the plate of Figure 1.

Figure 7 is a perspective view of a pin connector in accordance with the present invention.

Figure 8 is a cross-sectional view of the apparatus and method in accordance with the present invention showing the use of a threaded member to attach the container portion to the plate to adjust the wafer plane.

Figure 9 is a perspective view of an alternative filter/valve cartridge in accordance with the present invention.

Figure 10 is a perspective view of an alternative filter/valve cartridge in accordance with the present invention.

Figure 11 is a cross-sectional view of a duckbill valve in accordance with the present invention.

Figure 12 is an exploded view of the duckbill valve of Figure 11.

Figure 13 is a perspective view of an elastic damper in accordance with the present invention.

20‧‧‧ container; outer casing

24‧‧‧

32‧‧‧ bottom

34‧‧‧ side

Claims (20)

A substrate container comprising: a container portion having an inner portion and an outer portion; a plurality of supports disposed inside to accommodate the substrate; a door partially sealed by the container; and a bottom plate connected to the plurality of positions a container portion having a plurality of radially aligned kinematic grooves; the bottom plate being spaced apart from the container portion except at the plurality of locations; at least one drilled hole attached to the container at the bottom plate One of the plurality of locations extends through the bottom plate and the container portion and provides fluid communication between the interior of the container portion and the exterior thereof; and a valve disposed within the at least one bore. The substrate container of claim 1, wherein the valve is a check valve. The substrate container of claim 1, further comprising a filter locably disposed when the valve is opened to filter air entering the container portion through the valve. The substrate container of claim 1, further comprising: a plurality of adjustable spacers for adjusting a position of the bottom plate relative to the container portion, wherein each of the adjustable spacers comprises: A member and a second member threadedly coupled to the first member. The substrate container of claim 4, wherein the position of the bottom plate relative to the container portion is adjusted by rotating at least one of the first member and the second member. The substrate container of claim 1, further comprising an elastic damper disposed between the bottom plate and the container portion. A substrate container comprising: a container portion having a front opening; the container portion comprising: a pair of opposing side walls, a bottom wall, a top wall, and a rear wall, the wall systems being connected and defining a An open interior; and a plurality of substrate holders located within the open interior for supporting the substrate; a door for sealingly closing the front opening; and a bottom plate coupled to the container portion at a plurality of locations; Outside the plurality of locations, spaced apart from the container portion; at least one borehole located at one of the plurality of locations, and providing fluid communication between the interior of the container portion and the exterior of the container portion; And at least one of a valve, a filter, or a plug is located within the at least one bore. The substrate container of claim 7, wherein a check valve is disposed in the at least one bore. The substrate container of claim 7, wherein a duckbill valve is disposed in the at least one bore. The substrate container of claim 7, wherein the at least one borehole includes a valve and a filter disposed therebetween. The substrate container of claim 7, further comprising: a plurality of adjustable spacers for adjusting a position of the bottom plate relative to the container portion, wherein each of the adjustable spacers comprises: member, And a second member threadedly coupled to the first member. The substrate container of claim 11, wherein the position of the bottom plate relative to the container portion is adjusted by rotating at least one of the first member and the second member. The substrate container of claim 7, further comprising an elastic damper disposed between the bottom plate and the container portion. A substrate container comprising: a container portion having a front opening; the container portion comprising: a pair of opposing side walls, a bottom wall, a top wall, and a rear wall, the wall systems being connected and defining a An open interior; and a plurality of substrate holders in the open interior for supporting the substrate; a door for sealingly closing the front opening; and a coupling plate coupled to the container portion for coupling the container portion To the surface of the machine; at least one aperture in which the interior of the container portion is in fluid communication with the exterior of the container portion and extends through a position where the coupling plate is coupled to the container portion; and a valve, filter, or plug is at least One of them is located in the at least one hole. The substrate container of claim 14, wherein a check valve is disposed in the at least one hole. The substrate container of claim 14, wherein a duckbill valve is disposed in the at least one hole. The substrate container of claim 14, wherein the at least A hole includes a valve and a filter disposed therebetween. The substrate container of claim 14, further comprising: a plurality of adjustable spacers for adjusting a position of the coupling plate relative to the container portion, wherein each of the adjustable spacers comprises: A member and a second member threadedly coupled to the first member. The substrate container of claim 18, wherein the position of the coupling plate relative to the container portion is adjusted by rotating at least one of the first member and the second member. The substrate container of claim 14, further comprising an elastic damper disposed between the coupling plate and the container portion.