TWI372653B - System for eliminating waste gases by making use of plasmas at low and atmospheric pressure - Google Patents

System for eliminating waste gases by making use of plasmas at low and atmospheric pressure

Info

Publication number
TWI372653B
TWI372653B TW098129434A TW98129434A TWI372653B TW I372653 B TWI372653 B TW I372653B TW 098129434 A TW098129434 A TW 098129434A TW 98129434 A TW98129434 A TW 98129434A TW I372653 B TWI372653 B TW I372653B
Authority
TW
Taiwan
Prior art keywords
plasmas
low
atmospheric pressure
making use
waste gases
Prior art date
Application number
TW098129434A
Other languages
Chinese (zh)
Other versions
TW201021902A (en
Inventor
Ick Nyeon Kim
Hong Jin Kim
Hong Ki Chang
Young Yeon Ji
Original Assignee
Triple Cores Korea
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triple Cores Korea filed Critical Triple Cores Korea
Publication of TW201021902A publication Critical patent/TW201021902A/en
Application granted granted Critical
Publication of TWI372653B publication Critical patent/TWI372653B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00—Testing
    • H05H2240/10—Testing at atmospheric pressure
TW098129434A 2008-09-02 2009-09-01 System for eliminating waste gases by making use of plasmas at low and atmospheric pressure TWI372653B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080086283A KR101026457B1 (en) 2008-09-02 2008-09-02 System for eliminating waste gases by making us of plasmas at low and high pressure

Publications (2)

Publication Number Publication Date
TW201021902A TW201021902A (en) 2010-06-16
TWI372653B true TWI372653B (en) 2012-09-21

Family

ID=41797641

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098129434A TWI372653B (en) 2008-09-02 2009-09-01 System for eliminating waste gases by making use of plasmas at low and atmospheric pressure

Country Status (3)

Country Link
KR (1) KR101026457B1 (en)
TW (1) TWI372653B (en)
WO (1) WO2010027184A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI628358B (en) * 2013-04-04 2018-07-01 愛德華有限公司 Vacuum pumping and abatement system, and method of pumping a vacuum pumping arrangement of a vacuum pumping and abatement system

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120032204A (en) * 2010-09-28 2012-04-05 (주)트리플코어스코리아 Microwave generator and driving method thereof, and system for eliminating waste gases
KR101230513B1 (en) * 2010-12-27 2013-02-06 (주)엘오티베큠 Treatment apparatus for discharging fluid
CN106165062A (en) * 2014-04-16 2016-11-23 清洁要素技术有限公司 Process the plasma reactor of the waste gas that process apparatus occurs
CN106170845A (en) * 2014-04-16 2016-11-30 清洁要素技术有限公司 Process the plasma reactor of the waste gas betiding process apparatus
KR101609474B1 (en) 2014-10-14 2016-04-05 (주)트리플코어스코리아 System and method for treating gas from chemical vapor deposition apparatus
JPWO2018221067A1 (en) * 2017-05-29 2020-02-06 カンケンテクノ株式会社 Exhaust gas decompression method and apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001149741A (en) * 1999-11-30 2001-06-05 Japan Organo Co Ltd Device and method for treating waste gas containing volatile organic substance
KR20030043404A (en) * 2001-11-28 2003-06-02 주식회사 성광엔비텍 Method for removal of volatile organic compounds and odor using non-thermal plasma and apparatus thereof
KR20070035565A (en) * 2004-07-13 2007-03-30 레르 리뀌드, 소시에떼 아노님 아 디렉또와르 에 꽁세예 드 쉬르베양스 뿌르 레뛰드 에 렉스쁠로아따시옹 데 프로세데 죠르쥬 끌로드 Atmospheric-pressure plasma treatment of gaseous effluents
KR100658374B1 (en) * 2005-02-28 2006-12-15 엄환섭 Plasma scrubber for elimination of waste cleaning gases emitted from semiconductor industries
EP1904664A2 (en) * 2005-07-12 2008-04-02 Air Liquide Electronics Systems Method for plasma treatment of gas effluents
WO2008093442A1 (en) * 2007-01-30 2008-08-07 Kanken Techno Co., Ltd. Gas processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI628358B (en) * 2013-04-04 2018-07-01 愛德華有限公司 Vacuum pumping and abatement system, and method of pumping a vacuum pumping arrangement of a vacuum pumping and abatement system

Also Published As

Publication number Publication date
KR20100027383A (en) 2010-03-11
WO2010027184A2 (en) 2010-03-11
KR101026457B1 (en) 2011-03-31
TW201021902A (en) 2010-06-16
WO2010027184A3 (en) 2010-07-08

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