TWI370506B - Substrate processing apparatus having a sensing unit - Google Patents

Substrate processing apparatus having a sensing unit

Info

Publication number
TWI370506B
TWI370506B TW097122352A TW97122352A TWI370506B TW I370506 B TWI370506 B TW I370506B TW 097122352 A TW097122352 A TW 097122352A TW 97122352 A TW97122352 A TW 97122352A TW I370506 B TWI370506 B TW I370506B
Authority
TW
Taiwan
Prior art keywords
processing apparatus
sensing unit
substrate processing
sensing
substrate
Prior art date
Application number
TW097122352A
Other languages
English (en)
Other versions
TW200908190A (en
Inventor
Won Ki Jeong
Original Assignee
Advanced Display Proc Eng Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Display Proc Eng Co filed Critical Advanced Display Proc Eng Co
Publication of TW200908190A publication Critical patent/TW200908190A/zh
Application granted granted Critical
Publication of TWI370506B publication Critical patent/TWI370506B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW097122352A 2007-08-01 2008-06-16 Substrate processing apparatus having a sensing unit TWI370506B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070077462A KR100920417B1 (ko) 2007-08-01 2007-08-01 센싱유닛 및 이를 가지는 기판처리장치

Publications (2)

Publication Number Publication Date
TW200908190A TW200908190A (en) 2009-02-16
TWI370506B true TWI370506B (en) 2012-08-11

Family

ID=40331983

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097122352A TWI370506B (en) 2007-08-01 2008-06-16 Substrate processing apparatus having a sensing unit

Country Status (4)

Country Link
US (1) US20090032189A1 (zh)
KR (1) KR100920417B1 (zh)
CN (1) CN101359580B (zh)
TW (1) TWI370506B (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403409B (zh) * 2009-05-22 2013-08-01 Primax Electronics Ltd 具有即時熱度控制功能之薄片熱疊合裝置
WO2011109758A2 (en) * 2010-03-05 2011-09-09 Applied Materials, Inc. Measuring flow properties of multiple gas nozzles of a gas distributor
US20170301567A9 (en) * 2012-11-20 2017-10-19 Tokyo Electron Limited System of controlling treatment liquid dispense for spinning substrates
CN104332378B (zh) * 2013-07-22 2016-09-07 中微半导体设备(上海)有限公司 等离子体处理装置及其温度测试装置
US10607817B2 (en) * 2016-11-18 2020-03-31 Applied Materials, Inc. Thermal repeatability and in-situ showerhead temperature monitoring
CN110634723B (zh) * 2018-06-21 2022-07-05 中微半导体设备(上海)股份有限公司 一种耐腐蚀的气体混合装置及等离子体处理设备
CN111261540A (zh) * 2018-11-30 2020-06-09 东泰高科装备科技有限公司 工艺腔室和半导体处理设备
CN112713074B (zh) * 2019-10-25 2023-03-07 中微半导体设备(上海)股份有限公司 气体喷淋头组件及等离子体处理设备

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US2640245A (en) * 1951-06-27 1953-06-02 United Carr Fastener Corp Mounting of threaded fastening devices
US3018127A (en) * 1958-10-30 1962-01-23 Westinghouse Electric Corp Enclosed device with cover-mounting means
US3368602A (en) * 1966-04-01 1968-02-13 Tridair Industries Self-locking captive screw assembly
US4387497A (en) * 1980-11-07 1983-06-14 Bulent Gulistan Captive screw assembly method and product
DE3244718A1 (de) * 1982-12-03 1984-06-07 Degussa Ag, 6000 Frankfurt Vorrichtung zum befestigen von elektrischen bauteilen im anschlusskopf von elektrischen thermometern
US4915557A (en) * 1988-09-13 1990-04-10 Rexnord Holdings Inc. Captive screw assembly
US5600104A (en) * 1993-10-20 1997-02-04 Structural Instrumentation, Inc. Load cell having reduced sensitivity to non-symmetrical beam loading
US5806980A (en) * 1996-09-11 1998-09-15 Novellus Systems, Inc. Methods and apparatus for measuring temperatures at high potential
US6063234A (en) * 1997-09-10 2000-05-16 Lam Research Corporation Temperature sensing system for use in a radio frequency environment
US6073577A (en) 1998-06-30 2000-06-13 Lam Research Corporation Electrode for plasma processes and method for manufacture and use thereof
JP3077693B1 (ja) * 1999-04-12 2000-08-14 国産部品工業株式会社 管継手
JP4437351B2 (ja) * 2000-01-14 2010-03-24 キヤノンアネルバ株式会社 プラズマエッチング装置
JP4896337B2 (ja) * 2000-05-17 2012-03-14 東京エレクトロン株式会社 処理装置およびそのメンテナンス方法，処理装置部品の組立機構およびその組立方法，ロック機構およびそのロック方法
KR101004173B1 (ko) * 2001-02-09 2010-12-24 도쿄엘렉트론가부시키가이샤 성막 장치
JP4121269B2 (ja) * 2001-11-27 2008-07-23 日本エー・エス・エム株式会社 セルフクリーニングを実行するプラズマｃｖｄ装置及び方法
US6646233B2 (en) * 2002-03-05 2003-11-11 Hitachi High-Technologies Corporation Wafer stage for wafer processing apparatus and wafer processing method
KR100901892B1 (ko) * 2003-09-03 2009-06-10 도쿄엘렉트론가부시키가이샤 가스 처리 장치 및 처리 가스 토출 구조체
JP4451221B2 (ja) * 2004-06-04 2010-04-14 東京エレクトロン株式会社 ガス処理装置および成膜装置
JP5519105B2 (ja) * 2004-08-02 2014-06-11 ビーコ・インストゥルメンツ・インコーポレイテッド 化学気相成長の方法及び化学気相成長リアクタ用のガス供給システム
KR20060013276A (ko) * 2004-08-06 2006-02-09 삼성전자주식회사 조립성이 개선된 샤워헤드를 갖는 반도체 제조설비
US7429410B2 (en) * 2004-09-20 2008-09-30 Applied Materials, Inc. Diffuser gravity support
KR100628888B1 (ko) * 2004-12-27 2006-09-26 삼성전자주식회사 샤워 헤드 온도 조절 장치 및 이를 갖는 막 형성 장치
JP5044931B2 (ja) * 2005-10-31 2012-10-10 東京エレクトロン株式会社 ガス供給装置及び基板処理装置
US7829468B2 (en) * 2006-06-07 2010-11-09 Lam Research Corporation Method and apparatus to detect fault conditions of plasma processing reactor

Also Published As

Publication number Publication date
KR100920417B1 (ko) 2009-10-14
TW200908190A (en) 2009-02-16
CN101359580A (zh) 2009-02-04
KR20090013389A (ko) 2009-02-05
US20090032189A1 (en) 2009-02-05
CN101359580B (zh) 2010-06-09

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees