TWI365777B - Ultrasonic transducer and method of operation the same - Google Patents

Ultrasonic transducer and method of operation the same

Info

Publication number
TWI365777B
TWI365777B TW094124324A TW94124324A TWI365777B TW I365777 B TWI365777 B TW I365777B TW 094124324 A TW094124324 A TW 094124324A TW 94124324 A TW94124324 A TW 94124324A TW I365777 B TWI365777 B TW I365777B
Authority
TW
Taiwan
Prior art keywords
same
ultrasonic transducer
transducer
ultrasonic
Prior art date
Application number
TW094124324A
Other languages
English (en)
Other versions
TW200610588A (en
Inventor
Hans-Jurgen Hesse
Jorg Wallaschek
Piotr Vasicjev
Original Assignee
Hesse & Knipps Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hesse & Knipps Gmbh filed Critical Hesse & Knipps Gmbh
Publication of TW200610588A publication Critical patent/TW200610588A/zh
Application granted granted Critical
Publication of TWI365777B publication Critical patent/TWI365777B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
TW094124324A 2004-09-17 2005-07-19 Ultrasonic transducer and method of operation the same TWI365777B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004045575A DE102004045575A1 (de) 2004-09-17 2004-09-17 Ultraschalltransducer mit einem in der Lagerung angeordneten Sensor

Publications (2)

Publication Number Publication Date
TW200610588A TW200610588A (en) 2006-04-01
TWI365777B true TWI365777B (en) 2012-06-11

Family

ID=34977058

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094124324A TWI365777B (en) 2004-09-17 2005-07-19 Ultrasonic transducer and method of operation the same

Country Status (7)

Country Link
US (1) US7611039B2 (zh)
EP (1) EP1789226B1 (zh)
JP (1) JP4958305B2 (zh)
CN (1) CN100594088C (zh)
DE (1) DE102004045575A1 (zh)
TW (1) TWI365777B (zh)
WO (1) WO2006032316A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007054626A1 (de) * 2007-11-12 2009-05-14 Hesse & Knipps Gmbh Verfahren und Vorrichtung zum Ultraschallbonden
CH700729B1 (de) * 2008-02-29 2010-10-15 Oerlikon Assembly Equipment Ag Wire Bonder.
US7810699B1 (en) * 2009-04-22 2010-10-12 Gm Global Technology Operations, Inc. Method and system for optimized vibration welding
US9038688B2 (en) 2009-04-29 2015-05-26 Covidien Lp System and method for making tapered looped suture
CN102473658B (zh) * 2009-08-12 2014-11-26 库利克和索夫工业公司 用于引线接合的超声波换能器与使用超声波换能器形成引线接合的方法
CN102820205B (zh) * 2011-06-09 2015-02-11 北京中电科电子装备有限公司 键合机上的力传感器的安装结构及键合机
US8919631B2 (en) * 2012-03-15 2014-12-30 Asm Technology Singapore Pte Ltd Wire bonder including a transducer, a bond head, and a mounting apparatus
DE102015101524A1 (de) * 2015-02-03 2016-08-18 Infineon Technologies Ag Kraftmessung und -regelung bei US-basierenden Prozessen
DE102018120124A1 (de) * 2018-08-17 2020-02-20 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultraschallschwingeinrichtung mit Piezosensor
US11691214B2 (en) * 2021-10-17 2023-07-04 Shinkawa Ltd. Ultrasound horn

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1506164A (en) * 1974-07-09 1978-04-05 Mullard Ltd Ultrasonic bonding apparatus
DE3701652A1 (de) * 1987-01-21 1988-08-04 Siemens Ag Ueberwachung von bondparametern waehrend des bondvorganges
JPH0659604B2 (ja) * 1989-05-25 1994-08-10 株式会社ソノテック 超音波加工装置
JP3138973B2 (ja) * 1992-12-24 2001-02-26 株式会社新川 ボンデイング装置
JP3172901B2 (ja) * 1993-11-30 2001-06-04 株式会社新川 ボンデイング装置
US5603445A (en) * 1994-02-24 1997-02-18 Hill; William H. Ultrasonic wire bonder and transducer improvements
DE4417625C2 (de) * 1994-05-19 1999-05-20 Amatech Gmbh & Co Kg Vorrichtung zur Aufnahme und Führung einer Verbindungseinrichtung
US5595328A (en) * 1994-12-23 1997-01-21 Kulicke And Soffa Investments, Inc. Self isolating ultrasonic transducer
JP3078231B2 (ja) * 1995-08-22 2000-08-21 株式会社アルテクス 超音波振動接合装置
US5607096A (en) * 1996-03-11 1997-03-04 National Semiconductor Corporation Apparatus and method for ultrasonic bonding lead frames and bonding wires in semiconductor packaging applications
US5890643A (en) * 1996-11-15 1999-04-06 Kulicke And Soffa Investments, Inc. Low mass ultrasonic bonding tool
US6279810B1 (en) * 2000-02-23 2001-08-28 Asm Assembly Automation Ltd Piezoelectric sensor for measuring bonding parameters
US6286747B1 (en) * 2000-03-24 2001-09-11 Hong Kong Polytechnic University Ultrasonic transducer
JP2002362723A (ja) * 2001-06-04 2002-12-18 Ykk Corp パーツフィーダの制御方法
US6644533B2 (en) * 2001-07-03 2003-11-11 Asm Technology Singapore Pte. Ltd. Force sensing apparatus
US6766936B2 (en) * 2001-09-07 2004-07-27 Kabushiki Kaisha Shinkawa Transducer and a bonding apparatus using the same
JP2004047944A (ja) * 2002-05-22 2004-02-12 Nec Corp 接合装置および接合の良否判別方法を有する接合方法
JP4002170B2 (ja) * 2002-11-21 2007-10-31 株式会社カイジョー ボンディング用超音波ホーン及びこれを備えたボンディング装置

Also Published As

Publication number Publication date
CN100594088C (zh) 2010-03-17
JP2008513217A (ja) 2008-05-01
EP1789226B1 (de) 2014-09-10
CN101039774A (zh) 2007-09-19
TW200610588A (en) 2006-04-01
US20070152021A1 (en) 2007-07-05
JP4958305B2 (ja) 2012-06-20
EP1789226A1 (de) 2007-05-30
WO2006032316A1 (de) 2006-03-30
US7611039B2 (en) 2009-11-03
DE102004045575A1 (de) 2006-04-06

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