TWI365112B - Apparatus for treating a substrate - Google Patents
Apparatus for treating a substrateInfo
- Publication number
- TWI365112B TWI365112B TW098130893A TW98130893A TWI365112B TW I365112 B TWI365112 B TW I365112B TW 098130893 A TW098130893 A TW 098130893A TW 98130893 A TW98130893 A TW 98130893A TW I365112 B TWI365112 B TW I365112B
- Authority
- TW
- Taiwan
- Prior art keywords
- treating
- substrate
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008265847 | 2008-10-15 | ||
JP2009178644A JP5290081B2 (en) | 2008-10-15 | 2009-07-31 | Substrate processing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201026405A TW201026405A (en) | 2010-07-16 |
TWI365112B true TWI365112B (en) | 2012-06-01 |
Family
ID=42306083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098130893A TWI365112B (en) | 2008-10-15 | 2009-09-14 | Apparatus for treating a substrate |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5290081B2 (en) |
TW (1) | TWI365112B (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6133120B2 (en) | 2012-05-17 | 2017-05-24 | 株式会社荏原製作所 | Substrate cleaning device |
KR101341937B1 (en) * | 2012-05-30 | 2013-12-17 | 엑스탈테크놀로지 주식회사 | Apparatus to clean GaAs polycrystalline by chemical etching |
CN102825108A (en) * | 2012-09-04 | 2012-12-19 | 无锡金龙川村精管有限公司 | On-line cleaning and finishing device |
JP6317941B2 (en) * | 2014-02-07 | 2018-04-25 | 株式会社ディスコ | Cutting equipment |
JP6367763B2 (en) | 2015-06-22 | 2018-08-01 | 株式会社荏原製作所 | Wafer drying apparatus and wafer drying method |
TWI629116B (en) | 2016-06-28 | 2018-07-11 | 荏原製作所股份有限公司 | Cleaning apparatus, plating apparatus using the same, and cleaning method |
JP6088099B1 (en) * | 2016-07-06 | 2017-03-01 | 株式会社荏原製作所 | Cleaning apparatus, plating apparatus including the same, and cleaning method |
JP2018065109A (en) * | 2016-10-20 | 2018-04-26 | 東京応化工業株式会社 | Washing equipment and washing method |
KR102176209B1 (en) * | 2018-12-13 | 2020-11-09 | 주식회사 제우스 | Substrate processing device for foreign matter removal |
CN112696908B (en) * | 2020-12-25 | 2023-06-23 | 苏州市康普来新材料有限公司 | Metal work washs stoving integration equipment |
CN114985349B (en) * | 2022-05-26 | 2023-06-02 | 梁锋 | Flushing device for mining drill bit |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0982678A (en) * | 1995-09-13 | 1997-03-28 | Dainippon Screen Mfg Co Ltd | Substrate treating system |
JP2004095926A (en) * | 2002-09-02 | 2004-03-25 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment |
JP2004273984A (en) * | 2003-03-12 | 2004-09-30 | Dainippon Screen Mfg Co Ltd | Method and device for substrate processing |
JP4997080B2 (en) * | 2007-11-28 | 2012-08-08 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
-
2009
- 2009-07-31 JP JP2009178644A patent/JP5290081B2/en active Active
- 2009-09-14 TW TW098130893A patent/TWI365112B/en active
Also Published As
Publication number | Publication date |
---|---|
JP2010118644A (en) | 2010-05-27 |
JP5290081B2 (en) | 2013-09-18 |
TW201026405A (en) | 2010-07-16 |
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