1365010 九、發明說明： 【發明所屬之技術領域】 本發明係有關大氣電漿產生裝置的創新，尤指一種具有雙接地電極，内置 有導流板及凹凸表面的電極，可產生良好之低溫電漿效果，以供大面積清潔之 寬幅大氣電漿結構者。 【先前技術】 按’電漿（Plasma)是一種由自由電子和帶電離子為主要成分的物質形態， 廣泛存在於字宙中’常被視為除了固態、液態、氣態之外，存在物質的第四種 形態，亦被稱為電漿態’或者「等離子態」。 在地球表面上，雖然存有自然的電漿態，如閃電、極光…等，但不多。我 們接觸到的大多數是人工製造的電漿，比如常見的日級、霓虹燈、弧焊、及 現在最熱⑽電漿電視...等。隨著科學技術的發展和社會的進步，人類對電漿 瞭解越來越纽賴也就越來紙，人造電漿在實驗室和王祕被大量廣泛地應 用，而呈現出更為廣闊的前景。 伴Ik有化學反應的電漿放電，已被廣泛地用來改變材料表面的性質，對全 世界若干大材料處理工業而言，電漿處理技術至關重要 ，對航空、汽車、鋼鐵 和生物醫學業也有決定性的侧。在電子產業採㈣超大型顏電路的處理 而口以電漿進订表面處理更是不可缺少，利用這種技術製造出的材料和表面 構疋用，、他生產方式無達到的，同時，材料的表面可以用很獨特的方式加以 1365010 改進。 唯’目㈣知咖電漿在_上，綱嫌_管式的她且合來 達成有一不同結構雖設有長條隙縫喷出設計但結構技術上還非完善 一歩改善。 ·進 因此如何提供一種具有雙接地電極，内置有導流板及凹凸表面的電極， 可產生良好之低溫電漿效果，以供大面積清潔之寬幅大氣電浆結構即是本發 明之技術重點之所在。 【發明内容】 為達前述目的，本發明所設之一種寬幅大氣電漿結構，其主要包括：一組 合式腔體及其内置之—長條電極，其巾；該組合式腔體，係由左右對置之兩金 屬半體，上方結合設有一非金屬蓋板所構成，其組合成的腔道與内置長條電極 設有凹凸表面，而兩金屬半體及長條電極中可設置冷卻管，且於組合式腔體内 • 部之進氣通道上並可增設多孔性導流板，藉此，應用時其兩金屬半體可作為雙 接地電極，而腔體内與電極間因設有凹凸表面及導流板，故可有效加強放電效 應，並形成均壓穩定之低溫大氣電漿之效果，此發明產生之大氣電漿方式有別 於介電質屏障放電方式，其優點為對於高頻使用下無網路匹配對於電源供應器 之規格要求。 【實施方式】 1365010 為使貴審查委員方便瞭解本發明之其他特徵内容與優點，及其所達成之 功效能夠更為顯現，兹將本發明配合附圖，詳細說明如下： 如第一〜六圖所示，本發明一種寬幅大氣電槳結構，其主要包括：—組人 式腔體1及其内置之一長條電極2，其中； 該組合式腔體1，係由左右對置之兩金屬半體u、12，上方結合設有—非 金屬蓋板13所構成’該兩金屬半體u、12呈長條形，其内側各開設一平行貫 體之半槽19，其半槽19上間隔設有複數平行凹溝191而形成利於放電的凹凸表 面15。而該蓋板13内側對應於進氣通道17則設有一内槽道ΐ3ι，於内槽道⑶ 的兩端再貫體設有進氣孔132以供外通接管133。 對組時，兩金屬半體…12下方留有窄縮之出氣狹縫18，其縫寬大約為 1咖’中間形成-腔道14 ’而上方呈一較寬之進氣通道17。於兩金屬半體u、 12上方可對設有_平台172，使組合時可供―多孔酬絲成之導流板7置 放，及在階梯平台172邊並設有溝道m以供糾71置放增加氣密。 而該長條電極2 ’係短賴隔穿設在腔道14巾，其電極2顧設有複數間 隔平行之凹溝21，使電極2上也具有凹凸表面25 ; 另外因為其H電雜作上需要較大的功率，故兩半體丨卜丨2及長條電 極2上可配⑶冷射4卜42 ’其中該長條電極2的冷卻管42可貫穿中心而設； 而該兩半體11 12的冷部管41可平行埋設在體側，其冷卻管41的兩端並向外 設有接管43。 藉此如第四，、圖所示’組合應用時，其兩金屬半體^可作為雙接 1365010 地電極’且腔體1内部之進氣通道17上設有多孔性導流板7，加上腔道14與内 置長條電極2間有凹凸表面15及25，故可有效加強放電效應(如第五圖所示， 其中線條健者）’而能產生良好崎離絲，持續供麟壓获之低溫大氣電 裝。同時又可藉由兩金屬半體u、12及長條電極2中所設置冷卻f 4卜42，來 達到良好的降溫效果，使裝置在運作時不致過熱。 另外’晴參第七圖所示，為本發明之另一實施例，其兩長條形金屬半體u、 鲁12製造時’内側可各具有一斜削面10，使對組時；制金屬半體1卜12上方 呈現-較寬之進氣通道17 ’中間則形成一三角形腔道14，下方同樣留有窄縮之 .出氣狭縫18 ’·而内置之長條電極2則可改呈三角柱體，並於向下的一角設有凹 屢21以構成前述之凹凸表面25’如此相同也可達職續提供均壓歡低溫大氣 電漿之效果。 由上可知本發明所具之優點如下： 1.其組合具有雙接地電極，加上腔道與長條電極間均設有凹凸表面，故可 ® 有效加強放電效應，產生良好的解離效果。 2·其腔_部之錢通道上設有纽轉敵，故使製出之低溫大氣電浆 能在均壓穩定狀態下持續供應。 3.其組合式顧及長條電財均設有冷卻管，故可達到良好的降溫效果， 使裝置在運作時不致過熱。 以上實施例僅為方便說明而揭露，並非用以限定本發明，任何熟習此應用 者，當可做各種更動與不同的應用，其本質未脫離本發明之精神範嘴者，皆當 1365010 包含在本發明專利範圍保護中。 综上所述’本發明在突破先前之技術下，確實已達到所欲增進之功效足供 產業上利用，再者，本發明申請前未曾公開，且也非熟悉該項技藝者所易於思 及，其所具之新雛 '進步性顯已符合發明專利之”要件纽法提出發明 申請。 【圖式簡單說明】 第一圖：本發明之立體分解圖。 第二圖：本發明半組合狀態之示意圖。 第二圖：本發明之立體組合圖。 第四圖：本發明之組合平面圖。 第五圖··本發明之組合剖面圖。 第六圖：本發料產生加強電場之示意圖。 第七圖：本發明另—實施例之組合平面圖。 【主要元件符號說明】 腔體…1 斜削面…1〇 半體…11 半體…12 蓋板…13 内槽道…131 進氣孔“.132 接管…133 9 < S ) 1365010 腔道…14 通道…17 階梯平台"·172 半槽…19 電極…2 凹凸表面“·25 冷卻管…42 導流板…7 凹凸表面…15 溝道…171 狹縫…18 凹溝…191 凹溝…21 冷卻管…41 接管…43 墊片…711365010 IX. Description of the Invention: [Technical Field] The present invention relates to an innovation of an atmospheric plasma generating device, and more particularly to an electrode having a double grounding electrode, a baffle plate and a concave-convex surface, which can generate good low temperature electricity. Pulp effect, for wide-area plasma structure for large area cleaning. [Prior Art] According to 'Plasma' is a form of matter mainly composed of free electrons and charged ions, which is widely found in the zucquard. It is often regarded as the first in addition to solid, liquid, and gaseous states. The four forms are also known as the plasma state or the "plasma state". On the surface of the earth, although there are natural plasma states, such as lightning, aurora, etc., there are not many. Most of the exposure we have is artificially made plasma, such as the common day, neon, arc welding, and now the hottest (10) plasma TV...etc. With the development of science and technology and the advancement of society, human beings are becoming more and more aware of the importance of plasma, and artificial plasma is widely used in laboratories and secretaries, showing a broader prospect. . Plasma discharges with chemical reactions in Ik have been widely used to alter the properties of material surfaces. For many large material processing industries around the world, plasma processing technology is essential for aerospace, automotive, steel and biomedical applications. The industry also has a decisive side. In the electronics industry, (4) the processing of ultra-large-scale color circuits and the surface treatment of plasma paste are indispensable. The materials and surface structures used in this technology are not used, and the materials are not available. The surface can be improved in a very unique way with 1365010. Only the head (four) knows that the coffee is on the _, the outline _ tube type and she came together to achieve a different structure, although there is a long slit slit spray design, but the structural technology is still not perfect. ·How to provide a double-grounded electrode with a baffle and a concave-convex surface, which can produce a good low-temperature plasma effect, and a wide-area plasma structure for large-area cleaning is the technical focus of the present invention. Where it is. SUMMARY OF THE INVENTION In order to achieve the foregoing objective, the present invention provides a wide-format atmospheric plasma structure, which mainly comprises: a combined cavity and a built-in long strip electrode thereof; the combined cavity; The two metal half bodies which are opposite to each other are formed by a non-metal cover plate, and the combined cavity and the built-in long electrode are provided with concave and convex surfaces, and the two metal half bodies and the long electrodes can be cooled. a tube, and a porous baffle plate can be added to the inlet passage of the combined cavity body, thereby, when applied, the two metal half bodies can be used as double ground electrodes, and the cavity and the electrode are arranged. The surface has a concave-convex surface and a baffle plate, so that the discharge effect can be effectively enhanced, and the effect of the low-temperature atmospheric plasma with uniform pressure is formed. The atmospheric plasma mode produced by the invention is different from the dielectric barrier discharge mode, and the advantage is that There is no network matching under high frequency use for the specifications of the power supply. [Embodiment] 1365010 In order to make the members of the present invention more convenient to understand the other features and advantages of the present invention, and the effects achieved thereby, the present invention can be more clearly described as follows: As shown, the invention provides a wide-width atmospheric electric paddle structure, which mainly comprises: a group of human cavity 1 and a built-in one of the elongated electrodes 2, wherein the combined cavity 1 is composed of two opposite sides The metal half bodies u and 12 are integrally formed with a non-metal cover plate 13. The two metal half bodies u and 12 have an elongated shape, and a half-slot 19 of a parallel body is formed on the inner side thereof, and a half groove 19 is formed therein. A plurality of parallel grooves 191 are formed in the upper space to form an uneven surface 15 for facilitating discharge. An inner channel ΐ3ι is disposed on the inner side of the cover plate 13 corresponding to the air inlet passage 17, and an air inlet hole 132 is formed in the inner side of the inner channel (3) for the outer passage pipe 133. In the case of the pair, a narrowed outlet slit 18 is left under the two metal halves...12, and has a slit width of about 1 coffee' intermediate forming-channel 14' and a wider inlet passage 17 above. The platform 172 can be disposed above the two metal half bodies u and 12, so that the baffle plate 7 can be placed in the combination, and the channel m can be arranged on the step platform 172 for correction. 71 placement increases air tightness. The long electrode 2' is shortly disposed in the channel 14 and the electrode 2 is provided with a plurality of parallel grooves 21 so that the electrode 2 also has an uneven surface 25; A large power is required, so that the two halves of the body 2 and the long electrode 2 can be equipped with (3) a cold shot 4b 42 'where the cooling tube 42 of the strip electrode 2 can be arranged through the center; and the two halves The cold tube 41 of the body 11 12 can be embedded in parallel on the body side, and both ends of the cooling tube 41 are provided with a connecting tube 43 outward. Therefore, as shown in the fourth and the figure, when the combination is applied, the two metal halves can be used as the double-connected electrode 1365010, and the porous air deflector 7 is provided on the inlet passage 17 inside the cavity 1. There are concave and convex surfaces 15 and 25 between the upper channel 14 and the built-in long electrode 2, so that the discharge effect can be effectively enhanced (as shown in the fifth figure, wherein the line is strong), and a good smear can be produced, and the lining is continued. Obtained low temperature atmospheric electricity. At the same time, the cooling effect can be achieved by the cooling of the two metal half bodies u, 12 and the long electrode 2, so that the device does not overheat when it is in operation. In addition, as shown in the seventh embodiment of the present invention, in the other embodiment of the present invention, the two elongated metal halves u and Lu 12 can have a beveled surface 10 on the inner side when manufacturing, so that the metal is formed; The upper half of the body 1 12 is present - a wide triangular channel 14 is formed in the middle of the wide inlet channel 17 ', and the lower portion is also narrowed. The outlet slit 18 '· and the built-in long electrode 2 can be changed The triangular cylinder and the concave corner 21 at the downward corner to constitute the aforementioned concave-convex surface 25' are also the same to provide the effect of equalizing the low-temperature atmospheric plasma. It can be seen from the above that the advantages of the present invention are as follows: 1. The combination has a double ground electrode, and the concave and convex surfaces are provided between the cavity and the long electrode, so that the discharge effect can be effectively enhanced, and a good dissociation effect is produced. 2. The money channel on the cavity of the chamber is equipped with a new enemy, so that the low-temperature atmospheric plasma produced can be continuously supplied under the condition of constant pressure. 3. The combination of the strips and the long-term electricity is equipped with a cooling tube, so that a good cooling effect can be achieved, so that the device does not overheat when it is in operation. The above embodiments are disclosed for convenience of description, and are not intended to limit the present invention. Anyone who is familiar with the application can make various changes and different applications, and the essence thereof is not deviated from the spirit of the present invention, and is included in 1365010. The scope of the patent of the present invention is protected. In summary, the present invention has achieved the desired effect for industrial use under the breakthrough of the prior art. Moreover, the present invention has not been disclosed before the application, and it is not easy for those skilled in the art to think about it. The new chick 'progressiveness has been in line with the invention patent's requirements. The invention is filed. The first figure: the perspective view of the present invention. The second figure: the semi-combined state of the present invention Fig. 2 is a perspective view of the combination of the present invention. Fig. 4 is a sectional view of the combination of the present invention. Fig. 5 is a sectional view showing the combination of the present invention. Figure 7: Combination plan view of another embodiment of the present invention. [Description of main component symbols] Cavity...1 Oblique cut surface...1〇 half body...11 Half body...12 Cover plate...13 Inner channel...131 Air intake hole. 132 take over...133 9 < S ) 1365010 cavity...14 channel...17 ladder platform"·172 half slot...19 electrode...2 concave and convex surface "·25 cooling tube...42 deflector...7 concave surface...15 channel ...171 slit...18 groove...191 ... condenser 21 ... groove 41 ... spacer 43 ... 71 takeover