TWI363809B - - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotating device, and more particularly to a rotating device for a continuous vacuum coating machine to be coated, which belongs to the technical field of vacuum coating machines. [Prior Art]

With the advancement and development of science and technology, the products of the electronics industry are changing with each passing day. In recent years, vacuum coating technology has gradually replaced the traditional coating method of conductive paint or electrolytic plating, and is widely used in semiconductor process, photoelectric and 3C industries. It has become an important coating production technology; most of the coating equipment used in the industry is continuous (In_Line) multi-chambers, with traditional batch type or wafer type. The comparison of production methods can greatly reduce the equipment cost and plant space, and has great economic value and industrial competitiveness. The continuous vacuum coating operation process can refer to the new patent of “Automatic Submersible Internal Reflow Device” as announced in Announcement No. M258101. In the case, it can be mainly divided into the following two main areas: the feed cavity area, the coating cavity area and the discharge cavity area, in response to the operation process of different substrates (substme) and plating (target), and coating The quality and cavity vacuum cleanliness requirements can appropriately increase the number of low, medium and high vacuum chambers to gradually achieve the requirements of the operation step by step. Vacuum and cleanliness standards. However, when vacuum coating is applied to the object to be plated in the existing coating cavity region, it is generally limited to the object to be plated due to the limitation of the distance between the sputtering source and the object to be plated and the manner in which the object to be plated is placed. Single-front coating, not only 1363809 can not evenly apply irregular coatings or curved coatings, and only cover the surface of a mineral film on a shallow film, so the quality of coating is sincere Improvements. [Summary of the Invention]

In order to improve the above-mentioned existing coating cavity region, only a single planar coating can be omitted and insufficient for the object to be plated, and the main object of the present invention is to provide a rotating device for the continuous vacuum coating machine to be plated, mainly by rotating The method is to rotate the object to be plated to provide a multi-faceted coating that is easy to handle and can improve the quality of the coating. Based on the above object, the rotating device of the continuous vacuum coating machine of the present invention mainly comprises a coating cavity, a power output group disposed on the bottom of the coating cavity, and a relative power output group and a coating cavity. The moving carrier, wherein: the front and rear ends of the film cavity are open, and a guide rail is arranged on both sides of the cavity, and a rack is arranged in the coating cavity, and the other is close to the carrier. The inner side of the two guides is provided with a wheel axle fixing seat; the power output group is combined with the clock cavity; the system is provided with a plurality of transmission shafts arranged at intervals and rotatable relative to the two wheel axle fixing seats, and several respectively a drive shaft coupled to the moving shaft and a drive motor coupled to one of the rotating rods; and the carrier is movable relative to the coating chamber by transmission of the power take-off group, and is provided with a box and a plurality of rotatable and a rotating rod that is arranged in a spaced relationship with the casing and meshes with the rack, wherein the box system moves relative to the coating chamber as the respective driving shaft rotates, and each rotating rod is disposed in the casing 1363809 P and each One end of the rod is provided extending & gear engaged the jet. The body is sleeved and can be coupled with a rack: a good rack, the rack is disposed therein - the top of the guide and each of the rotating cups is disposed in parallel inside the box body and is provided with a load and a joint The rotating rods are arranged on the sides of the box body and the two wheel axles, and the σ has m cliffs, and the square sleeves are arranged on each side of the frame to make each rotation... The insertion end of the buckle is arranged in the bearing housing and on the side of the sleeve. The gear system is sleeved near the rack one=goodly, the rotating end of each rotating rod and the sleeve is engaged with the recessed card slot, and another sleeve and elastic element are provided. The column of the groove phase is engaged by the sleeve, and the elastic elements are respectively set to the clock. The combined end of the rotating shaft abuts. Preferably, the transmission shafts are arranged in parallel with the sleeves, and the transmission shafts are arranged in parallel in the ore chamber to be rotatably disposed between the two ends of the two axles, each of which drives the two axles The inner side of the fixed seat is provided with a roller, and the end of each of the two adjacent transmission belts extends out of the axle fixing seat " the toothed component is sleeved on two adjacent transmission shafts i / two transmission wheels, each The transmission motor that is parallel to the transmission is installed in the side of the ore chamber near the front end. The drive shaft is different from the end of the transmission wheel, and the power is required. It can be rotated by the transmission of '= = = rotation, wherein the bottom of the box is placed in the same direction as the rollers of the respective transmission shafts. % is attached to 7 1363809 - compared to the n 6 hai rack system is disposed in the coating chamber and is located between the two axles and the rotating rods are vertically disposed in the casing, and each rotating rod is viewed twice The bottom end of the body phase, .·σ σ is provided with two bearing seats, wherein the gear system is sleeved on the bottom end of the rotating rod extending out of the box body. Preferably, the two rails are slightly - shaped and the openings are facing each other. Preferably, the 's drive train is a key wheel, and each of the transmission elements is a key strip.

Preferably, the drive train is a pulley-belt. After the transmission components are implemented to implement the above technical means, the advantages and effects obtainable by the present invention include at least: - a multi-face coating: a rotating device of the continuous vacuum coating machine of the present invention, when the casing is opposite to the money chamber When the body moves, the gears are rotated relative to the rack, and the object to be plated coupled to the rotating rod is rotated relative to the coating chamber, and each surface of the object to be plated can be coated. Second, increase the "synchronous sentence: the continuous type of real film machine of the present invention is rotated by a mineral device, which is mounted on a rotating rod for rotation to carry out coating", especially for a relatively high thickness of the object to be plated, Each layer is plated with a relatively uniform film layer' to increase the uniformity of the coating, which can effectively improve the coating quality. 3. Convenient operation: The continuous vacuum film machine of the present invention is easily disassembled and assembled from the box by the rotating device of the mineral 'H by the sleeve and the sleeve column' to be plated. The installation and removal of the object greatly enhances the convenience of its operation. [Embodiment] 8 1363809 Details: The technical features and practical effects of the present invention can be applied according to the inner valley of the present invention, and further detailed description of the more detailed examples as shown in the following figure: Provide a continuous vacuum coating machine by the shovel rotation =, please refer to the first to third figures, as can be seen from the figure, the hair amine vacuum coating machine is (4) rotating device, which mainly includes The cavity (10), the movable cavity at the bottom of the coating chamber force output, 丄υ): 2, a carrier that can move relative to the power output group (2〇) and the coating cavity (10) ( 3 〇),1 中. The coating cavity (丄(八)系为—Slightly rectangular coating cavity/heart-shaped jade cavity, the inner two are =: the door that is wide and close to the two rails (1)): rack (12 ), in addition to the fixed seat (1 3 1 % at the mouth of each * is provided with a long strip of axles ~ reverse 1 丄〇 5), and in two opposite bearings (not shown); 13) The upper part is provided with a plurality of straight # = out group (2〇) and a coating chamber (1 〇), which is provided with a plurality of spaced-apart phase-moving drive shafts ( 2丄) _ The transmission component (2 2 ) of the two-axle fixed seat (1 3 ) and the drive motor (23) connected to the two transmission shafts (2 1 ) respectively, = one of the transmission rods ( 21) The phase is disposed in the coating cavity (i 〇) "the middle transmission shaft (2 1 ) is a parallel axle fixing seat (Ί and the two bearings are respectively rotatably provided on the two sides; Between the fixed seat amp &, each transmission shaft (21) is close to the mad, 丄 J; each set of internal system is provided with a roller (2 4 ), 丄 363809 and each transmission shaft (2 1 ) is different from the rack (work) 2) one end is m ^ ώ (Λ 〇χ ^ 13) and the coaxial sleeve is provided with two transmission wheels (25). In the above, the transmission component (2 2) is sleeved on two adjacent transmission shafts (2) Preferably, each of the transmission wheels (25) is a two-sprocket or a pulley, and each transmission element (22) can be a chain 1 skin ▼ 4 drive motor (23) is installed in the ore chamber (丄〇)

On the side of the sin near the front end, it is combined with a drive shaft (2 work) different from the end of the drive wheel (25) to provide the drive shaft (2 i required power, so that each drive shaft (21) It can be rotated in the same direction by the linkage of the transmission elements (2 2); and the carrier (3 〇) can be driven by the power output group (2 〇)::: The diaphragm cavity (i 〇) moves Please refer to the fourth and fifth figures, = there is a box (31) and a plurality of rotating rods that are rotatably combined with the rack (1 2), and the box The body (3 1 ) is a square box, and the j: the bottom 邛 is made between the rollers of the respective transmission shafts (21) (the uranium ri1, 匕4j are sinned and the two guides are between the two) The box body (31) can be moved relative to the coating chamber (丄2) # , ) by the action of the power wheel out group (2), and each of the rotating rods (3 J) is arranged in the box body (3丄) It is difficult for a person to have a 姑 姑 卩 杈 杈 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入 插入Each side of the two sides is provided with a bearing and The bearing block on one side (the square sleeve that extends inside 3 3) is sleeved - in the insert (33) of the box body (through the bearing housing) and the end sleeve is sleeved on the sleeve (34) 1363809) The sleeve (3 4 ) on one side is extended on a gear that can mesh with the rack (12), which is adjacent to the rack (12 box (3 1 ) and is provided with a (35); preferably The joint end of each of the rotating rods (32) and the sleeve (34) is recessed with a clamping groove (3 2 1 ) and a sleeve (3 ϋ = sexual element (37) , wherein each of the sleeves (36) is formed by: a slap (321) engaging the post (36 1)

It is arranged on the rotating rod (3==, the elastic element (") is sleeved on the 5th end and is opposite to the sleeve (36). In the invention, please cooperate with the reference movable sleeve (3μ to rotate) The rod (n figure is not mainly introduced, and is taken from the end of the sleeve (34) by the set clock.) • The 疋 method combines the irregular shape such as the slip shell, and then = mineral (5 〇) With the rotating rod (... seat 〇 3), the moving rod (32) is clamped on the sleeve (34) and the bearing ◦)... Place the box (31) flat on the ore chamber (1 drive motor (23) / Article (12) shouts; when the starting piece (22) and the same direction of rotation, into the body (; two! - roller (2 4) and "suitable to the body - (3 1) with each ... While moving relative to the coating chamber (1 〇), as shown in Figure VII, 'with each movement, each gear (3; body 2 31) moves the rotating rod relative to the ore chamber (10) (32) The rack (12) is rotated, and the coating chamber (10):: clock: Do not (50) rotate relative to the box (31) and 丄υ), then each of the objects to be plated (5 〇) Plane 1363809 for coating. Please refer to Figures 8 and 9 again. , in the middle of the government, « another embodiment of the present invention /, the middle slip (1 2 A) is set in the plating & vacancy chamber (ιηΑ) and between the two transmission shafts (21A) Between the roll (10A) and the move 24A), and each of the rotating cups (3 2 A) is vertically disposed in the box body rod (31α), and each of the rotating cups (3 2 Α) and the box body (3 i Α ( 〇. Α. # ^ , 'Ό s The bottom end of the system is equipped with two bearings, each of which rotates to select the temple and signs the μ k rpm ® ^ dry bottom to know the extension of the box (3 ΙΑ) and the sleeve 5 There is a wheel (3 5Α) which can be combined with the rack (1 2Α). The wrong way is the above technical means, the hairpin, when the box A) is opposite to the coating cavity (i 〇, 〗 5... 1 〇A) When moving, make each gear (3 ^ 35A) rotate relative to the rack (12, 1 9 , 纴 仏 12a), so that it is combined with the rotating lever (3 2, 3 A A) ί * from 1 ) The plated material (5〇, 5〇A) is rotated relative to the coating chamber, and the material r R η 〇), not only for the surface of the object to be plated (50, 5 〇A), but also for coating. And the fine is to be rotated by the plated object (5 (4) rotating rod (32'32a), especially the 局The thick quilt can be used on the flat layer of each flat ore to increase the coating uniformity, which can effectively improve the coating quality. · Further, the first embodiment of the present invention can be used for the casing (3 6盥 ° 又 ° ° way 'to make the rotating rod (3 2) can be easily removed from the box and assembled to carry out the object to be plated (5 〇 installed and removed, Dagu Gu Gan J's large k between The convenience of knowing, in turn, provides a rotating device that is coated on the surface and that is easy to handle and improves the quality of the coating. [Circular Simple Description] The first circle is an external perspective view of the present invention. 1363809 The second drawing is a side view of the invention. The third figure is a top plan view of the present invention. The fourth figure is a partial exploded view of the present invention. The fifth drawing is a partially enlarged perspective view of the present invention. Figure 6 is a partial cross-sectional side view of the operation of the present invention.

The seventh drawing is another partial side view of the operation of the present invention. Figure 8 is a side elevational view of another embodiment of the present invention. Figure 9 is a top plan view of another embodiment of the present invention. [Explanation of main component symbols] (1 0 ) ( 1 0 A) coating cavity (11) Guide rail (12) (12A) rack (13) Axle mount (20) Power output group (21) ( 2 1 A Drive shaft (2 2 ) transmission component

(2 3 ) Drive motor ( 2 4 ) ( 2 4 A) Roller (2 5 ) Drive wheel (3 0 ) Carrier (31) ( 3 1 A) Case ( 3 2 ) (32A) Rotating lever (3 2 1) Snap groove ( 3 3 ) ( 3 3 A) bearing housing 13 1363809

(3 4 ) Set of posts (3 5 ) ( 3 5 A) Gears (3 6 ) Bushings (3 6 1 ) Cartridges (3 7 ) Elastic components ( 5 0 ) ( 5 0 A) Plated objects 14

Claims (1)

ι / buckle year 丨 / off the day to modify this ten, the scope of application for patents: including a continuous vacuum coating machine is rotated by the plating device, the package can be phase f. coating cavity, a power placed at the bottom of the coating cavity The output group and the vehicle for moving the power output group and the coating cavity, wherein: the two portions of the coating chamber have an opening & and the racks in the cavity: each has one The guide 'in the rhodium-plated cavity is equipped with a rack, the each: the broad guide of the eleventh guide (four), and the inner side of the two guides are abruptly - the axle mount; the power output group and The coating cavity is combined with a plurality of transmission shafts which are spaced apart and rotatable relative to the two wheel axle fixing seats, and the two moving shafts are distantly connected to each other. # a L 1 ', w is connected, the transmission component and one of them rotates The combination of the rods and the horses is broken; and the movements are movable relative to the coating chamber by the transmission of the power output group, and are provided with a box body and a plurality of rotatably and spacedly arranged body phases: = rack (four) combined with the rotating rod ... the box system moves with each: :: each body = relative to the mine cavity And each of the rotating rods is arranged in parallel: two in the thin two - the insertion end and a combined end 'the other rotating rods are respectively provided on the two sides parallel to the box body 2, the 疋 * 疋 seat - bearing seat, And in the housing of the /, the Detective Detector - a square sleeve extending inside the box body = the insertion end of each rotating rod is arranged in the bearing seat' and the end is sleeved; The gear train is sleeved on the sleeve near the side of the rack, 1 = the end of the moving rod is extended from the box body and is sleeved with _ to be able to respond to the rack 2 as in the patent application scope i The continuous vacuum film machine 15 1363809 佑 札 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中- an elastic member, wherein the sleeve S is coupled to the rotating rod, ..., by a person who can be engaged with the card slot, and the elastic member is respectively sleeved thereon Abutting against the sleeve. Dry, mouth. 鸲3················································· The moving shaft of the ore chamber is rotatably disposed between the two axle fixing seats, and each of the driving shafts protrudes from the inner side of the rack to the inner side of the rack. = again = moving wheel, each transmission component is sleeved on two-phase and special wheels, and the parallel transmission drive motor of the adjacent drive shaft is mounted on the rhodium-plated cavity, which is coupled with the drive shaft... The power required for the rotation of the outer side drive shaft is: the end of the moving wheel is combined to provide linkage, and the second = two transmission shaft can be rotated by the rotation of each transmission element, wherein the bottom of the box is attached to the bottom Between the two guides. 滚轮 Roller 4, as described in the third paragraph of the patent application scope of the continuous ★ acres of plated rotating device, 1, .., "" Wang coating machine 5. Such as the application of the guide rail system - U-shaped and open to each other. The rotary 奘^β-type true two-plating machine described in the fourth paragraph of the patent scope is claimed as a shovel, wherein the transmission wheel component is a chain. The wheel and the transmission 6 are the rotating device of the mineral as described in the fourth item of the Shenqi patent range, wherein the 222 membrane mechanical component is a belt. , for a skin ▼ round, and each pass 1363809 • November 30, 100 correction replacement Η—, schema: such as the next page 1363809 1363809 1363809 1363809 Φ m 1363809 Co CO 1363809 ,AVr r . r〇·弟/, s s ) 1363809 1363809 < s ) 1363809 Ninth