200905006 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種旋轉裝置，尤指—種用於連續式真 空鍍膜機被鍍物之旋轉裝置，其概隸屬於真空鍍膜機之技 術領域範疇。 【先前技術】 隨著科技的進步與發展，電子產業的產品日新月異， 近年來真空鍍膜技術已逐漸取代傳統喷導電漆或電解電鍍 ( 的鍍膜方式，而廣泛地應用於半導體製程、光電和3C產 業中’成為重要的鑑膜生產技術； 目前業界所使用的鍍膜設備大多為連續式（) 多腔體（multi-chambers)的作業流程，與傳統批次式（batch type )或晶圓式（wafer type )生產方式比較，可大幅降低 6又備成本及腐：房空間，極具量產經濟價值及產業競爭性· 連續式真空鍍膜的作業流程係可參考如公告第 # M258 1 0 1號「自動化潛入式内部迴流裝置」新型專利一案， I其主要可分為下列三個主要區域：進料腔體區、鍍膜腔 體區及出料腔體區，因應不同基材（substrate )及鍍材 (target )的作業製程、以及鍍膜品質與腔體真空潔淨 度需求，可適度地增加低、中 '高真空腔體數目，以逐 段漸進式地達到作業所要求的真空度及潔淨度標準。 然而，在既有鍍膜腔體區中對於被鍍物進行真空鍍膜 時，因受限於濺鍍源與被鍍物間的距離以及被鍍物擺設的 方式，故一般只能對於被鍍物之單一正面進行鍍膜，不僅 5 200905006 無法均勻地對於非規則形狀或具曲面之被鑛物進行鑛膜 外:且僅能於平面之被鍍物上鐘上一淺層鍍膜’因此對於 錄膜品質’誠有加以改進之處。 【發明内容】 為了改善上述既有鑛膜腔體區僅能對於被鑛物進行單 -平面錄膜之缺失及不足，本發明之主要目的在於提供— 種連續式真空鐘膜機被鑛物之旋轉裝置，主要係藉由旋 的方式對於被鍍物進行轉動， ^ v ^ 以k供一可多面鍍膜且方便 刼作並可改善鍍膜品質之旋轉裝置者。 基於上述目的，本發明夕；鱼έ* 4·、古★ ^ M ^ ^ ± . 月之連續式真空鍍膜機被鍍物之 轉裝置主要係包含有有一讲胺映姊 邻之動力於山 鍍肤脛脰、一設於鍍膜腔體底 載具，其中· .力知出，、且及鍍膜腔體移動之 δ亥 (^月空 _ > # .. 租之則、後端係各呈一開 部兩側係各机古一、首 開口狀，且於腔體内 …兩¥軌的内側係各設有—輪軸固定座； 動力輪出組係與鍍膜腔體相結人， 排列且可相對兩輪轴二站'、=“固間隔 兩動軸相連結之傳動元件及=二動二數個分別與傳 動馬達；以及 中轉動桿相結合之驅 載具係藉由重力+ 動，其設有—各邮/出，，且的傳動而可相對鍍膜腔體移 皿肪·及數個可錢說η σ ηΒ 結合並與齒條相嚙合之 王間隔排列地與盒體相 軸的轉動而相對鍍 ：’其中該盒體係隨著各傳動 肢私動，而各轉動桿係設於盒體内 200905006 σΡ，且各轉動桿的一端係伸設出盒體並套設有一可與齒條 相。齒合之齒輪。 較佳地，該齒條係設於其中—導軌之頂部，而各轉動 桿係平行地設於盒體内部並設有一插入端及一結合端，另 各轉動杯在盒體與^輪軸固定座相平行之兩侧面上係各設 f軸承座，亚於其中一側之轴承座中套設有一朝盒體内 亀之方形套柱’使各轉動桿的插入端設於軸承座中而 結合端係套設; v 套柱上，其中§亥齒輪係套設於靠近齒條一 側之套柱上。 較佳地，各轉動桿與套柱相卡設的結合端 :設=另設有一套管及一彈性元件…各套管係藉 槽相卡合之卡柱而結合於轉動桿之結合端 管相抵 Υ 係分別套設於該轉動桿的結合端上且與套 較佳地，各傳動轴係平行地設於 分別呈可轉動地設於兩鈐軸固體中且兩蝠 兩輪軸固定座内側係專力軸在罪近 停的一姓仫油山 有—滾輪’又各傳動軸異於齒 保的^係伸出輪轴固定座且 ω 動元件係套抓於+」釉套6又有兩傳動輪，各傳 動馬達係裝設於鍍膜r-貴 #動輪上’该驅 傳動軸里於… 端之外侧面上，其係與- t却和呉於傳動輪的—士 一 雲夕#A I 、、.口 5 ’藉以提供傳動轴韓動所 二之動力’使各傳動轴可藉“傳 == 轉動，其中螻各；曰]運動而呈同向 中Μ底部係與各傳動 兩導軌之間。 ^各9相貼靠而介於 7 200905006 孝父佳地，該皆 定座之門曰夂“糸設置於鍍膜腔體内而介於兩輪軸固 s , σ轉動桿係垂直地設於盒體内，且各轉叙户 μ盒體相結合的底端係設干 於轉動桿伸設出盒體之底端上。 上“輪係套設 車乂佳地’兩導軌係略呈- υ形且開口相向。 鏈條佳地’該傳動輪係為-鏈輪’且各傳動元件係為一 一皮㊁“也’该傳動輪係為一皮帶輪’且各傳動元件係為 至少=述技術手段以後，本發明可獲得之優點及功效 轉裝置：本發明連續式真空錢膜機被鑛物之旋 產生\/^ 膜腔體移動時，使各齒輪相對齒條 產生=’進而使結合於轉動桿上的被鑛物相對鑛膜腔體 產生轉動，可對被鍍物的各面進行鍍膜。 物之：轉:力:鍍膜物:本發明連續式真空《機被鐘 疋衣置’係將破鍍物裝設於轉動桿上旋轉進行鍍 的膜：其是對高度較厚的被鑛物’可於各平面鍍上較均勻 的膑層，增加鍍膜均勾性’可有效改善鍍膜品質。 轉壯ΐ、Γ更=作：本發明連續式真空錢膜機被鑛物之旋 ::::猎由套管與套柱卡設的方式，使轉動桿可方便地 =墙拆卸及組裝’以進行被錄物的裝設與取出’ 大幅提南其操作之便利性。 【實施方式】 200905006 為靶4細瞭解本發明的技術特徵及實 ag兮昍查从〜& 巾力效’亚可依 施例，詳細說明如后： …圖式所示的較佳實 轉裝主：係提r種連續式真空鍍膜機被鑛物之旋 明連碑式1==“—至三圖所示’由圖中可看出本發 —鍍膜腔體（10)、_設 有200905006 IX. Description of the Invention: [Technical Field] The present invention relates to a rotating device, and more particularly to a rotating device for a continuous vacuum coating machine to be coated, which belongs to the technical field of vacuum coating machine . [Prior Art] With the advancement and development of science and technology, the products of the electronics industry are changing with each passing day. In recent years, vacuum coating technology has gradually replaced the traditional spray coating or electrolytic plating (coating method, and is widely used in semiconductor manufacturing, optoelectronics and 3C industry). In the 'become an important film production technology; currently the coating equipment used in the industry is mostly continuous () multi-chambers of the work process, and the traditional batch type (batch type) or wafer type (wafer Type ) Comparison of production methods can significantly reduce the cost of 6 and the cost of rot: room space, economical value of mass production and industrial competitiveness. The operation process of continuous vacuum coating can refer to the announcement ##258# 0 1 The new patent for the automatic submersible internal recirculation device, I can be divided into the following three main areas: the feed cavity area, the coating cavity area and the discharge cavity area, in response to different substrates and plating The target process, as well as the coating quality and cavity vacuum cleanliness requirements, can moderately increase the number of low and medium 'high vacuum chambers, step by step progressive To achieve the vacuum and cleanliness standards required for the operation. However, when vacuum coating the object to be plated in the existing coating chamber area, it is limited by the distance between the sputtering source and the object to be plated and the object to be plated. In the way, it is generally only possible to coat a single front side of the object to be plated, not only 5 200905006, it is not possible to uniformly carry out the mineral film on irregularly shaped or curved minerals: and only on the plane of the object to be plated A shallow coating "is therefore an improvement to the quality of the recording film". [Invention] In order to improve the above-mentioned existing mineral film cavity region, only the single-plane recording film is missing and insufficient for minerals, the present invention The main purpose of the invention is to provide a rotary device for a continuous vacuum bell film machine, which mainly rotates the object to be plated by means of a spinning method, and is capable of multi-face coating and facilitating the coating and improving the coating. The rotating device of the quality. Based on the above purpose, the invention of the present invention; the fishing rod*4·, the ancient ★ ^ M ^ ^ ±. The continuous vacuum coating machine of the month is mainly composed of a rotating device. The power of Yingying is in the mountain, and one is placed in the bottom of the coating chamber. Among them, the force is known, and the movement of the coating cavity is δhai (^月空_ _ ># .. rent Then, the back end of each of the open sides is on both sides of the machine, the first one, the first opening, and in the cavity ... the inner side of the two fly rails are respectively provided - the axle fixing seat; the power wheel out of the group and the coating The cavity is connected to the person, arranged and can be driven relative to the two axles two stations, = "fixed transmission two moving shafts connected to the transmission element and = two movements and two respectively with the transmission motor; and the middle rotating rod combined with the drive The system is provided by gravity + movement, which is provided with - each mail/out, and the transmission can be moved relative to the coating chamber, and several kings can be said to combine with the rack and mesh with the rack. Rotating and aligning with the axis of the box body and opposite plating: 'The box system is privately moved with each transmission limb, and each rotating rod is disposed in the casing 200905006 σΡ, and one end of each rotating rod is extended and set out The body is sleeved with a rack. Gears with teeth. Preferably, the rack is disposed on the top of the guide rail, and each of the rotating rods is disposed in parallel inside the box body and is provided with an insertion end and a joint end, and the other rotating cups are fixed on the box body and the axle shaft. The two sides of the parallel side are respectively provided with f bearing seats, and the bearing seat of one side of the bearing sleeve is sleeved with a square sleeve which is facing the inside of the box body, so that the insertion end of each rotating rod is arranged in the bearing seat and the joint end The sleeve is set on the v-pillar, wherein the §-heavy gear system is sleeved on the sleeve near the side of the rack. Preferably, the connecting end of each of the rotating rods and the sleeve is provided with: a sleeve and an elastic element are provided. The sleeves are coupled to the joint end of the rotating rod by the latches of the slots. The yokes are respectively sleeved on the joint ends of the rotating rods and are preferably arranged in parallel with the sleeves. The transmission shafts are respectively disposed in parallel with the two shafts of the two bat shafts. The special axis of the sin near the stop of the surname of the oil mountain has a roller - and each drive shaft is different from the tooth protection ^ system extends the axle fixed seat and the ω dynamic component is caught in the +" glaze sleeve 6 has two transmissions Wheels, each drive motor is installed on the coating r-贵#动轮', the drive drive shaft is on the outer side of the end of the drive shaft, and it is tied to the drive wheel - Shiyi Yunxi #AI, , port 5 'by providing the power of the drive shaft Han moving two' so that each drive shaft can be transferred by "pass == turn, which 蝼 each; 曰] movement between the bottom of the same direction and between the two guide rails ^ Each 9-phase is close to 7 200905006 孝父佳地, the threshold of the fixed seat 曰夂 "糸 set in the coating cavity and between two rounds The shaft fixing s, the σ rotating rod is vertically disposed in the casing, and the bottom end of each of the revolving households is connected to the bottom end of the rotating rod to extend out of the casing. The two rails of the "wheel-wheel-set locomotive" are slightly - υ-shaped and open to each other. The chain is good - the transmission wheel is a sprocket and the transmission elements are one-two-two "also" The transmission wheel train is a pulley wheel and each transmission component is at least the technical means, and the advantages and functions of the invention can be obtained. The continuous vacuum film machine of the invention is produced by the spin of minerals. During the movement, each gear is caused to generate a rotation relative to the rack with respect to the rack. Further, the mineral-bonded cavity bonded to the rotating rod is rotated, and each surface of the object to be plated can be coated. Object: Turn: Force: Coating: The continuous vacuum of the present invention is a film that is mounted on a rotating rod to rotate the plating: it is a thicker mineral. A uniform layer of ruthenium can be plated on each plane to increase the coating properties of the coating to improve the coating quality. Turning the ΐ ΐ, Γ = = =: The continuous vacuum film machine of the present invention is rotated by the mineral:::: hunting by the sleeve and the set of the column, so that the rotating rod can be easily = wall disassembly and assembly ' Carrying out the installation and removal of the recorded objects' greatly facilitates the operation of the South. [Embodiment] 200905006 For the target 4, a detailed understanding of the technical features of the present invention and a real ag check from the ~& towel effect "Asian" example, the detailed description is as follows: ... the preferred implementation shown in the figure Owner: The R-type continuous vacuum coating machine is made of the mineral spine. 1== “- to the three figures”. It can be seen from the figure that the hair-coating cavity (10), _ is provided.
力輸出組（2〇)、-可：;=:)底部之動 2〇) 了相對動力輸出組（20)及鍍膜 月工肚>(10)移動之載具（3〇)，其中： 鍍膜腔體（10)係為一略呈長方形之中空腔體，該 鑛膜腔體（i 〇 )之前、後端係各呈一開口狀，且於腔體 内部兩側係各設有一略呈U形且開口相向之導軌（…， 2其中一導軌（1 1 )頂部係設有一齒條（} 2 )，另於 f近兩導軌（1 1 )之開口處係各設有一長條形之輪轴固 定座（13)，並於兩輪軸固定座（13)上裝設有複數 個相向之軸承（圖未示）； 動力輸出組（2 0 )係與鍍膜腔體（丄〇 )相結合， 其係設有數個間隔排列且可相對兩輪軸固定座（丄3 )轉 動之傳動軸（2 1 )、數個分別與兩傳動軸（2 j )相連 結之傳動元件（2 2 )及一與其中一傳動桿（2丄）相結 合之驅動馬達（2 3 )，其中各傳動軸（2丄）係平行地 設於鍍膜腔體（1 0 )中，且兩端分別呈可轉動地設於兩 輪軸固定座（1 3 )的軸承間，各傳動軸（2丄）在靠近 兩輪軸固定座（1 3 )内側係各套設有一滾輪（2 4 )， 9 200905006 又^傳動轴（2 1 )異於齒條（1 2 )的-端係伸出輪軸 固定座（13)且同軸套設有兩傳動輪、（25),上述之 各傳動元件（2 2 )係套設於兩相鄰傳動轴（2工）之相 平行的傳動輪（2 5)上，較佳地，各傳動輪（Η)係 可為-鏈輪或皮帶輪’而各傳動元件（2 2 )可為一鍵條 或皮帶，該驅動馬if f 、a y+ ，逹（2 3 )係裝設於鍍膜腔體（丄◦) 靠近前端之外側面上，甘在& ^ ^ f 其係與一傳動軸（2 1 )異於傳動 輪（2 5 )的一端招 4士人，μ I” ω 4 1 而々日…σ ，糟以提供傳動軸（2丄）轉動 所需之動力’使各傳動轴 予勒釉1 )可精由各傳動元件（2 2 )的連動而呈同向轉動；以及 載具（3 0 )係藉由動力輸出組（2 〇 )的傳動而可The force output group (2〇), - can be:; =:) the bottom of the movement 2〇) relative power output group (20) and coated moon work belly > (10) mobile vehicle (3〇), where: The coating cavity (10) is a slightly rectangular hollow cavity, and the front and back ends of the film cavity (i 〇) are open, and each side of the cavity is provided with a slightly U-shaped and open-facing guide rails (..., 2 one of the guide rails (1 1 ) is provided with a rack (} 2 ) at the top, and at the opening of the near-two guide rails (1 1 ), each has a long strip shape. The axle fixing seat (13) is provided with a plurality of opposing bearings (not shown) on the two axle fixing seats (13); the power output group (20) is combined with the coating cavity (丄〇) The utility model is provided with a plurality of transmission shafts (2 1 ) arranged at intervals and rotatable relative to the two axle fixing seats (丄3), and a plurality of transmission components (2 2 ) respectively coupled to the two transmission shafts (2 j ) and a a driving motor (23) combined with one of the transmission rods (2丄), wherein each of the transmission shafts (2丄) is disposed in parallel in the coating chamber (10), and the two ends are rotatably respectively It is arranged between the bearings of the two-axle fixing seat (1 3 ), and each transmission shaft (2丄) is provided with a roller (2 4 ) in the inner side of the two-wheel axle fixing seat (1 3 ), 9 200905006 and the transmission shaft ( 2 1) The end of the rack (1 2 ) protrudes from the axle fixing seat (13) and the coaxial sleeve is provided with two transmission wheels, (25), and the above-mentioned transmission components (2 2 ) are sleeved on the two Preferably, each of the transmission wheels (Η) can be a sprocket or a pulley, and each transmission element (2 2 ) can be one on the parallel transmission wheels (25) of the adjacent transmission shafts. a key strip or a belt, the driving horse if f , a y + , 逹 (2 3 ) is installed on the side of the coating chamber (丄◦) near the front end, and is in the & ^ ^ f system and a transmission shaft (2 1 ) Different from the end of the transmission wheel (2 5 ), 4 people, μ I” ω 4 1 and the next day...σ, to provide the power required to rotate the drive shaft (2丄) The glaze 1) can be rotated in the same direction by the linkage of the transmission elements (2 2 ); and the carrier (30) can be driven by the power output group (2 〇).
相對鍍膜腔體（1 〇 )銘& < π Λ A 、丄u )私動，凊配合參考第四及五圖所示， 該載具（3 0 )係設有一合於f ^ 1( 3 1 )及數個呈可棘動地 與盒體（31)相处人廿盥在攸/ 得動 Μ ” “ °亚與齒條（1 2 )相°齒合之轉動桿 2) ’/、中該盒體（31)係為—方形盒體， 係與各傳動軸（？ $ ±Λ , /、履4 kh ( Λ Λ \ 相貼靠而介於兩 執（11)之間，使合 n, 使ο (31)可藉由動力輸出組（p 〇)的作動而相對鍍膜腔體 2Relative to the coating chamber (1 〇) Ming &< π Λ A , 丄 u ) private movement, 凊 with reference to the fourth and fifth figures, the vehicle (30) is provided with a combination of f ^ 1 ( 3 1 ) and a number of people who are swayingly engaged with the box body (31) in the 攸 / 得 ” ” ” ° ° and the rack (1 2) phase gears of the rotating rod 2) '/, The box body (31) is a square box body, which is connected with each transmission shaft (? $±Λ, /, 4 kh ( Λ Λ 相 而 而 而 而 介于 介于 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 n, so that ο (31) can be opposed to the coating chamber by the action of the power output group (p 〇) 2
2)係平行地設於，（”(：〇)移動’各轉動桿（3 一 於孤體（3 1 )内部並設有-插入妒B ，名口 &端，另各轉動桿（ 而及一 定座（1 3 )相平 在盒體（3 1 )與兩輪輛固 面上係各設有-軸承座（3 η 並於其中一側之軸承座 3 } 52) are set in parallel, (" (: 〇) move 'the respective rotating rods (3 one inside the orphan (3 1) and set - insert 妒 B, name mouth & end, and each of the rotating rods (and And a certain seat (1 3 ) is leveled on the box body (3 1 ) and the two wheel solid surfaces are respectively provided with a bearing seat (3 η and a bearing seat 3 on one side thereof) 5
内部伸設之方形套柱（34))/套設有—日朝盒體（3U 入端設於軸承座（ 使各轉動桿（3 2 )的插 )中而結合端係套設於套柱（3 4 】0 200905006 上，其中靠近齒條（ι_ 2 ) -側之套柱（3 4 )係伸設出 盒體（3 1 )且套設有-可議条（丄2 )相嚙合之齒輪 (35); 較佳地，各轉動桿（3 2 )與套杈（3 4 )相卡設的 結合端係凹設有一卡設槽（3 2 1 )，且另設有—套管（3 6 )及-彈性元件（3 7 ) ’其中各套管（3 6 )係藉由 -可與卡設槽（321)相卡合之卡(361)而結合 於轉動桿（3 2 )之結合端X ’該彈性元件（3 7 )係套 設於該轉動桿（3 2 )的結合端上且與套f ( 3 6 )相抵 靠。 本發明於操作時請配合參考第五圖所示，其主要係推 動套” 3 6 )使轉動桿（3 2 )能從套柱（3 4 ):取 出’並藉由套設或其他固^方式將如滑鼠外殼等非規則形 狀或具曲面高度較厚的被鍍物（5 〇 )與轉動# ( 3 2 ) 相結合’再將轉動桿（3 2)卡設於套柱（3 4)及軸承The inner square sleeve (34)/set is provided with a Japanese-made box (the 3U inlet is set in the bearing housing (the insertion of each rotating rod (3 2 )) and the end sleeve is sleeved on the sleeve ( 3 4 】0 200905006, in which the sleeve (3 4 ) near the rack (ι_ 2 ) - side is extended to form the box body ( 3 1 ) and the sleeve is provided with a - can be negotiated (丄 2 ) meshing gear (35); Preferably, the engaging end of each of the rotating rods (32) and the sleeve (34) is recessed with a clamping groove (3 2 1 ), and another sleeve is provided (3) 6) and - elastic member (3 7 ) ' wherein each sleeve (36) is coupled to the rotating rod (32) by a card (361) engageable with the engaging groove (321) The end portion X' of the elastic member (37) is sleeved on the joint end of the rotating rod (32) and abuts against the sleeve f(36). The invention is in operation as shown in the fifth figure. It is mainly used to push the sleeve "3 6" so that the rotating rod (3 2 ) can be taken out from the sleeve (3 4 ): and can be irregularly shaped or curved with a curved surface such as a mouse shell by a sleeve or other fixing method. Thicker plated object (5 〇) combined with rotation # ( 3 2 ) 'will turn again Lever (32) provided in the card quill (34) and bearing
座（3 3 )之間’並將盒體（3丄）平放於鍍膜腔體（1 〇 )中使各齒輪（3 5 )與齒條（！ 2 )相喻合；： 驅動馬達（2 3 ) a夺’各傳動桿（2丄 ： 件曰由各傳動元 生同向轉動，進而使盒體（3丄 滾輪（“）而相對鑛膜腔體（1〇)移動 二亡 =各齒輪(35)會相對齒條(12)產: 使轉動桿（⑴及被鑛物（5〇)相對 二進 鍍膜腔體（i 〇)轉動，即可 1 3 1 )及 P了對被鍍物（5 0)之各平面 200905006 進行鍍膜。 中考如第八及九圖所示’本發明之另-實施例 八、中回條（1 2Α)係設置於鑛膜腔體（工〇α =tnr)(21A)的兩滾輪（24Α)之間，且各轉 =(32Α)係垂直地設於盒體（31Α)内，且各轉動 杯（32α)與盒體（3ια)相έ士八沾广山 ^ 合的底端係設有兩軸承 上（33Α) ’其中各轉動桿底端係伸設出盒體（31幻Between the seats (3 3 ) and placing the box (3 丄) flat in the coating chamber (1 〇), the gears (3 5 ) are matched with the rack (! 2);: drive motor (2 3) a wins each of the transmission rods (2丄: the pieces are rotated in the same direction by the respective transmission elements, so that the box body (3 turns of the roller (") and the relative movement of the mineral membrane cavity (1〇) = two gears (35) Relative to the rack (12): The rotating rod ((1) and the mineral (5〇) are rotated relative to the two-injection chamber (i 〇), ie, 1 3 1 ) and P are applied to the object to be plated ( 5 0) Each plane 200905006 is coated. The middle test is as shown in the eighth and ninth diagrams. 'The other embodiment of the present invention - the eighth (1 2 Α) is set in the mineral film cavity (worker α = tnr) (21A) between the two rollers (24Α), and each rotation = (32Α) is vertically disposed in the casing (31Α), and each rotating cup (32α) and the casing (3ια) are gentleman The bottom end of the mountain is equipped with two bearings (33Α) 'where the bottom end of each rotating rod is extended to form a box (31 magic
C 且套設有一可與齒條（12Α)相喃合之酱輪㈡“）。 藉由上述之技術手段，本發明可當盒體（3 i ，3工 A)_㈣腔體（1 Π0Α)移動時，使各童輪（3 5，3 5 Α)相對齒條（1 2，1 2Α)產生轉動，進而使 結合於轉動桿（32 ’ 32Α)上的被鍍物（5〇，5〇α) 相對鐘膜腔體（丄〇 ’ i 〇Α)產生轉動，不僅可對被鑑 物（5 0，5 0 A)各面進行錄膜，且藉由將被鐘物（5 〇 ’ 5 0A)冑設於轉動桿（3 2，3 2A)上旋轉進行鍍 膜，尤其是對高度較厚的被鍍物，可於各平面鍍上較均勻 的膜層，增加鍍膜均勻性，可有效改善鑛膜品質； 再則，本發明之第一實施例可藉由套管（3 6 )與套 柱（3 4 )卡設的方式’使轉動桿（3 2 )可方便地從盒 體（3 1 )上進行拆卸及組裝，以進行被鍍物（5 〇 )的 裝設與取出’大幅提高其操作之便利性，進而提供一可多 面鍍膜且方便操作並可改善鍍膜品質之旋轉裝置者。 【圖式簡單說明】 第一圖係本發明之外觀立體圖。 200905006 第二圖係本發明之側視示意圖。 第三圖係本發明之俯視示意圖。 第四圖係本發明之局部立體分解圖。 第五圖係本發明之局部放大立體圖。 第六圖係本發明之操作局部剖面側視圖。 第七圖係、本發明之操作時另—局部側視示意圖。 第八圖係本發明之另—實施例之側視示意圖。 第九圖係本發明之另一實施例之俯視示意圖。 【主要元件符號說明】 (1〇) (10a)鍍膜腔體 (1 1 )導軌 (1 2 ) ( 1 2 A)齒條 (13)輪軸固定座 (2 0 )動力輸出組 (21) ( 2 1 a)傳動軸 (2 2 )傳動元件 (2 3 )驅動馬達 (2 4 ) ( 2 4 A)滾輪 (2 5 )傳動輪 (3 0 )載具 (31) ( 3 1 a)盒體 (32) (32A)轉動桿 (3 2 1 )卡設槽 (3 3) (3 3A)軸承座 13 200905006 (3 4 )套柱 ( 3 5 ) ( 3 5 A)齒輪 (3 6 )套管 (3 6 1 )卡柱 (3 7 )彈性元件 ( 5 0 ) (50A)被鍍物C and sleeved with a sauce wheel (2) ") which can be squashed with the rack (12 Α). By the above technical means, the invention can be used as a box (3 i , 3 work A) _ (four) cavity (1 Π 0 Α) When moving, each child wheel (3 5, 3 5 Α) is rotated relative to the rack (1 2, 1 2 Α), so that the object to be plated (5 〇, 5 结合) is coupled to the rotating rod (32 ' 32 Α). α) Relative to the clock cavity (丄〇' i 〇Α) produces rotation, not only for the surface of the object (5 0, 50 A), but also by the object (5 〇 ' 5 0A) The coating is rotated on the rotating rod (3 2, 3 2A) for coating, especially for the thicker object to be plated, which can be coated with a uniform film on each plane to increase the uniformity of the coating and improve the coating. The film quality; further, the first embodiment of the present invention can facilitate the rotation of the rotating rod (3 2 ) from the casing by means of the sleeve (36) and the sleeve (34). 1) Disassembly and assembly for the installation and removal of the object to be plated (5 〇) greatly improves the convenience of its operation, thereby providing a multi-face coating and easy operation and improved coating quality. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a perspective view of the present invention. 200905006 The second drawing is a schematic side view of the present invention. The third drawing is a schematic view of the present invention. The fourth drawing is a partial three-dimensional view of the present invention. The fifth drawing is a partially enlarged side view of the present invention. The sixth drawing is a partial cross-sectional side view of the operation of the present invention. The seventh drawing is a schematic view of another part of the operation of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS The ninth drawing is a schematic plan view of another embodiment of the present invention. [Main component symbol description] (1〇) (10a) Coating cavity (1 1 ) Guide rail (1 2 ) ( 1 2 A) Rack (13) Axle mount (20) PTO (21) ( 2 1 a) Drive shaft (2 2 ) Drive element (2 3 ) Drive motor (2 4 ) ( 2 4 A ) Roller (2 5 ) Transmission wheel (3 0 ) Carrier (31) ( 3 1 a) Case (32) (32A) Rotating lever (3 2 1 ) Snap groove (3 3) (3 3A) Housing 13 200905006 (3 4 ) Set of rods ( 3 5 ) ( 3 5 A) Gears (3 6 ) Bushings ( 3 6 1 ) Cartridges (3 7 ) Elastic components ( 5 0 ) (50A)
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