1363029 六.、發明說明： . ： 【發明所屬之技術領域】 . 本發明係有關一種藥液供給用有襯裏液箱及藥液供給 用有襯裏液箱之藥液洩漏偵測方法。 【先前技術】 以往，半導體製造之藥液供給系統等中所使用之藥液 供給用有襯裏液箱係外面為金屬罐體、内面為樹脂之2層 • - . ·' 構造，前述由樹脂組成之内面之襯裏層宜使用耐藥品性與 • 純度優良之絕緣性之氟樹脂。在此，所謂純度，係意指在 液箱内面之襯裏層中實質上不含雜質或塗膜形成用單體 等，因而在液箱内之藥液中即無此等成分溶出之情形，而 不會污染儲存於液箱内，之藥液。 通常，當於半導體工廠設置有如此之藥液供給用有襯 裏液箱時，首先，為了清洗有襯裏液箱及管線内部，而先 洗淨一段時間，.之後在夜箱内投入使用藥液。然後，為了 _ 防止污染，而在不開啟液箱之狀態下持績使用此藥液。 此外，液箱内之藥液之殘量，即使不開啟液箱也可經 由測量導出至液面測量用之管線内之藥液殘量而從外部確 • · · - . 認。 ： 因此，若藥液液量減少，則由外部將藥液導入至有襯 裏液箱_内，而可在不開啟液箱之狀態下持續使用。. ' · · · ' 然而，如同上述，即使液箱完全由财钱性材料形成襯 裏，經長年使用，藥液也會慢慢渗透而滲透襯裏詹，結果 會有使金屬罐體之内面腐蝕的情形。如此，當藥液滲透至 320801 觀裏層的情形發生時，該藥液會使黏接金屬罐體與襯裏層 .之接著劑劣化，而使觀裏層從罐體表面浮起、或使邊緣附 近之金屬罐體腐蝕，而在此因產生之氣體使襯裏層與金屬 罐體之間發生氣體積存 ，結果襯裏層膨脹，最糟的情形可 預測概裏層受到破壞，而使所儲存之藥液受到污染之情 开夕。如此之情形，必須大規模地停止半導體之生產線而進 行維修。做為避免此情形之對策，.已知有經由測定絕緣電 阻確認藥液滲透至襯裏層之程度之檢查方法（專利文獻 -1) °然而’專利文獻1中之測定絕緣電阻之對象只限定於 以耐蝕性材料形成襯裏之金屬性機器。 然而’如上所述，通常藥液供給用有襯裏液箱係2重 構造，而由外面為SUS(不鏽鋼）等金屬罐體、内面為由經 使用接著劑而與金屬罐體一體化之氟樹脂薄片組成之襯裏 層所構成。另—方面，從液面測量用之管線也防腐蝕之觀 .”來看.為.2重構造，而由外面為金屬製管.、.内面.為被覆 有蚵蝕性材料之襯裏層所構成。而且，此液箱與上述管線 之接頭。卩係哆著墊片經金屬製之螺检所連接。 此狀態，亦即當以金屬製之嫘栓連接液箱與液面測量. 之疒線之間時，即使為了檢查洩漏而琪!J定液箱之絕緣電1363029 VI. Invention Description: The present invention relates to a liquid chemical leak detection method for a lining liquid tank for supplying a chemical liquid and a lining liquid tank for supplying a chemical liquid. [Prior Art] Conventionally, the lining liquid tank for chemical liquid supply used in the supply of chemical liquids for semiconductor manufacturing is a metal can body and the inner surface is a resin. The structure is composed of a resin. The inner lining layer should be made of an insulating fluororesin which is excellent in chemical resistance and purity. Here, the term "purity" means that the liner layer on the inner surface of the liquid tank contains substantially no impurities or a monomer for forming a coating film, and thus the chemical liquid in the liquid tank does not elute. It will not contaminate the liquid stored in the tank. Usually, when a lining tank for supplying a chemical liquid is provided in a semiconductor factory, first, in order to clean the lining tank and the inside of the pipeline, it is washed for a while, and then the medicinal solution is put into use in the night tank. Then, in order to prevent contamination, the liquid is used in a state where the tank is not opened. In addition, the residual amount of the liquid medicine in the liquid tank can be confirmed from the outside by the measurement to the residual amount of the liquid in the pipeline for liquid level measurement without opening the liquid tank. Therefore, if the amount of liquid medicine is reduced, the liquid medicine is introduced into the lined tank _ from the outside, and can be continuously used without opening the tank. ' · · · ' However, as mentioned above, even if the tank is completely lined with rich materials, after a long period of use, the liquid will slowly penetrate and penetrate the lining, resulting in corrosion of the inner surface of the metal tank. situation. Thus, when the liquid penetrates into the 320801 inner layer, the liquid solution will deteriorate the adhesion between the metal can and the backing layer, and the inner layer will float from the surface of the can or make the edge The nearby metal can is corroded, and the gas generated between the lining layer and the metal can is caused by the gas generated. As a result, the lining layer expands, and in the worst case, the inner layer is destroyed, and the stored drug is destroyed. The liquid is contaminated. In such a case, the semiconductor production line must be stopped on a large scale for maintenance. In order to avoid this problem, an inspection method for confirming the penetration of the chemical liquid into the backing layer by measuring the insulation resistance is known (Patent Document-1). However, the object of measuring the insulation resistance in Patent Document 1 is limited to A metal machine that is lined with a corrosion resistant material. However, as described above, in general, the lining liquid tank for the supply of the chemical liquid has a double structure, and the outer surface is a metal can body such as SUS (stainless steel), and the inner surface is a fluororesin which is integrated with the metal can body by using an adhesive. The lining layer consisting of a sheet consists of a layer. On the other hand, the pipeline used for liquid level measurement is also anti-corrosion. "Look at the .2 heavy structure, and the metal pipe is made from the outside. The inner surface is the lining layer covered with the etchable material." Moreover, the tank is connected to the above-mentioned pipeline. The crucible is connected by a metal screw inspection. This state, that is, when the metal tank is connected to the liquid tank and the liquid level is measured. Between the lines, even for the purpose of checking for leaks, the insulation of the liquid tank
阻’也無法判斷是在液箱發生洩漏、或是在液面測量用之 管線發生洩漏。 VIt is also impossible to judge whether a leak occurs in the tank or a leak occurs in the line for liquid level measurement. V
[專利文獻1]日本專利第2836〇97號公報 【發明内容】 (發明欲解決的課題） 320801 1363029 ν' 本發明有鑒於如此之以往之情形，目在 液供給用有襯裏液箱呈現非開放狀態（將藥液保持 狀態）時，可輕易_液箱本體或是液面測量用之 處發生魏料、料藥岭Μ祕輯= ==襯裏液箱及藥液供給用有襯裏液箱之藥液J偵 (解決課題的手段）. . 用以連成上述目的之太獻ηη ^ 箱，係具有：Κ本發明之藥液供給用有襯裏液 ίΐ晨2本體’係_面被覆_性材料而成； 管線，係液面測量用.；及 其中Λ漏檢查裝置’缝由測量絕緣電阻而偵測藥液渗透， . ·. 將前述液面測量用之管 _ : 絕緣螺检連接，以❹有襯錢箱本體藉这 旦 負有無由於前述有襯裏液箱本體 =線中之藥液滲透所造㈣漏 測方法:係藥她用有襯裏液箱 本體與於内面被覆:::耐蝕性射料而成之有襯裏液I 用以偵測前線連接之狀態下， 茂漏偵測方法，ϋ 或心請中之藥液滲透戈 =連接， 將前述絕緣電阻;Π插入:前述管線之-部分， 驗奴n子ϋ雜频接於前述液 • ' 320801 6 1363029 ；* *' •‘箱本體之外面或前述管線之外面之任一者， 經由絕緣電阻的測量，以偵測有無由於前述有襯裏液 ' 箱本體或前述管線中之藥液滲透所造成之洩漏。 ~ .根據如此之本發明，經由測量電阻值，而可輕易判斷 … 有無因藥液滲透所造成之洩漏，以及滲透是在液箱本體發 生、或是在管線發生，同時可調查其進展程度。 • . - . (發明的效果） 如依本發明之藥液供給用有襯裏液箱及藥液供給用有 * 襯裏液箱之藥液洩漏偵測方法，即無須停止生產線，僅使 藥液供給用有襯裏液箱呈現非開放狀態（將藥液保持乾淨 之狀態），即可特定出發生藥液滲透之部分是在液箱本體或 是管線。 並且，經由持續調查絕緣電阻值，也可調查滲透之進 .展程度。 【實施方式】 φ 第1圖係表示依本發明之一實施例實施洩漏偵測方法 之藥液供給用有襯裏液箱2及與其連接之附屬之管線者。 此藥液供給用有襯裏液箱2係由上部開口所形成之有 襯裏液箱本體2a、與被覆該開口之蓋體2b所構成。 於有襯裏液箱本體2a，設置用以投入藥液之短的管線 .14,並且設置有用以取出儲存於有襯裏夜箱本體2a内之藥 • - 液之長的管線16 〇 藥液供給用之管線、14之ΙεΗ系Γ以不接觸有襯裏液箱 本體2a之液體之方式配置於液面上方之位置，另一方面， 320801 1363029 •'用以取出藥液之管線16係以沒入液體内之方式配置。此 外，藥液供給用之管線14及藥液送出用之管線.16係由具 有優秀之财餘性之氟樹脂管所形成。 、 _ .· ♦ · 此外，於有襯裏液箱本體2a之下面，設置兼汲取用之 · 開口 10，並連結有液面測量用之管線12。 本實施例之藥液供給用有襯裏液箱2由於因經常保持 閉鎮狀態而防止污染所儲存之藥液，故藉由觀察液箱而確 認藥液之殘量。因此，為了從外部確認殘量，而另外設置 •有液面測量用管線12 〇 夜管線U2係以沿著有襯裏液箱本體2a之側 . - 面之方式配置，且由I：樹管 及與有襯裏液箱本體2a 連結之一般的管線22, 24所構成。再者，於此管線22, 24 内也經以氣樹.脂等耐腐姓性材料形成概長.。 在以沿著有襯裏液箱本體2a之侧面之方式配置之氟 樹脂管17中，透過開口 10供給有襯裏液箱本體2a内之藥 .， φ 液，並以與有襯裏液箱本體2a内相同之液位Η表示。經由 確認此液位Η，而確認有襯裏液箱本體2a内之藥液殘量。 於從有襯裏液箱本體2a至氟樹脂管17之管線22之 間，設置有接頭26、開關閥20等。此外，使藥液從氟樹 脂管17回到有襯裏液箱本體2a之上方用之配管24係與有 •襯裏液箱本體2a内導通。.： 另一方面，接頭26係與有襯裏液箱本體2a之開口 10 連接，且下游侧分成兩條，在液面測量用之管線12之相反 側連接有液體排出管線25。於液體排出管線.2 5設置有開 320801 1363029 •、關閥28, 30、及用以接收所排出之藥液之容器32。並且， 開關閥28與開關閥30之間設置有洩漏檢查裝置36。接頭_ 2 6、戌漏檢查裝置3 6之内周面等也經以财钱f生材'调7彩成襯 裏。此外，在洩漏檢查裝置36中，插有測定用電極34之 一端部。此測定用電極34係連接於絕緣電阻計5.2。 本發明中，在接頭26與有襯裏液箱本體2a之開口 10 之連接部18使用有如第2圖及第3圖所示之絕緣螺栓40。 此絕緣螺栓40之由SUS304等組成之轴部分42之外表 ® 面係經PVDF(聚偏二氟乙烯）等絕緣性、耐蝕性優良之氟樹 脂43所被覆。而且，此絕緣螺栓40係隔著由SUS304等組 成之整片 44, 4β、由 FRP(Fiber Reinforced Plastics，纖 維強化塑膠）等組成之絕緣墊圈50, 51、由SUS304等組成 之六角螺帽48, 49而使用於連接部。 如圖示，連接部18係經由組裝絕緣螺栓40，並且在 一對凸緣41a，41b之間組裝絕緣性之墊片53,而焚其上游_ •侧與下游側之間形成電性絕緣。 經由將如此所形成之絕緣螺栓40使用於連接部18， 而使連接部18之下游側與有襯裏液箱本體2a形成電性絕 緣。 • .· 目前，使開關閥28關閉、開關閥20開啟，在有襯裏 液箱本體2a内裝滿藥液L。此時，有襯裏液箱本體2a内 之藥液L之液位Η於液面測量用之管線12内呈示，而可由 此確認。 在從液箱2取出藥液時，若從未圖示之其他上部開口 9 320801 13-63029 • 、·噴嘴，例如將氮氣以高壓送入有襯裏液箱本體2a内，則該.： 壓力會壓迫液面，藉此藥液從液送出用之管線16之下端開 口上升\而將藥液排出液箱外側。#此，可僅送出所需量 之藥液。 ， •: 以下，說明關於此藥液供給用有襯裏液箱之藥液洩漏 偵測方法。 .首先，說明關於有襯裏液箱本體2a之洩漏偵測。 ％ 目前，有襯裏液箱本體2a及液面測量用之管線12内， 鲁裝滿爭液，且開關閥2〇、開關閥28 .開啟。 另一方甸，如上所述，絕緣電阻計52之一端子連接於 凸緣飧漏檢查裝置36内之測定用電極34，但絕緣電阻計./ 52之另一端子35連接於例如：如第.1圖所示之有襯裏液 箱/本體2a之外面。再者，開關閥20、開關閥28開啟。藉 ' 此，有襯裏、液箱本體2a内之藥液L係透ϋ開口 10、接頭 26、開關閥28、閥30導出至夢器32内。而且，從此狀態， φ 在連接於洩漏檢查裝置36内之測定用電極34、與選擇性 地連接於有襯裏液箱本體2a之外面之測定用電極35之間 測定絕緣電阻。若在此絕緣電阻也(襯裏材料本身之電阻值） 下，則視為在有襯裏液箱本體2a中藥液不會滲透至襯裏 • · . * · · • . . '' 層。 • : 此外，確認若有襯裏液箱本體2a内之藥液L滲透至有 襯裏液箱本體2a之内側層4 ’内，則導通至藥液L之端子 34、與有襯裏液箱本體2a之外面之電阻值通常更為降低。 藉此而可偵測有襯裏液箱本體2a中之藥液滲透至襯裏. 10 320801 1363029 ‘層。再者，當在有襯裏液箱本體2a内發生滲透時，此時之 電阻值之臨界值係lxl09D。若低於此，則可視為藥液滲透 襯裏層並滲透至金屬層而發生洩漏。 另一方面，若將絕緣電阻計52之另一端子.35選擇性 地連接於液面測量用管線12 <外面，而將藥液L導出至容 器32，並同時測定與端子34之間之電阻，即可以液面測 量用管線12進行浪漏檢查。若此電阻值低於一般值，則可 在液面測量用管線12偵測到藥液滲透襯裏層並滲透至金 屬層之浪漏。 在本實施例中，由於如此可選擇性地進行在有襯裏液 箱本體2 a之泡漏檢查、與在液面測量用.管線12之泡漏檢 查，故可偵測有襯裏液箱本體2a與液面測量用管線12之 滲透。 再者，也可於絕緣電阻器52之另一端子35設置開關 S，並經由切換此開關S進行測定。 如此，根據本發明，即使不中斷有襯裏液箱本體2a内 之藥液之使用，也可實施有襯裏液箱本體2a之洩漏、或液 面測量用管線12之茂漏檢查。並且，也可經由持續地進行 檢查.，而調查洩漏之進展程度。入 以上，雖說明關於本發明之一實施例，但本發明係不 受上述實施例之任何限定。 例如：在上述實施例中，雖於連接部18使用絕緣螺栓 - · · . 40，但若於連接部18以外之位置設屋絕緣螺栓，即可在更 細微的部位彳貞測汽漏。 11 320801 1363029 此外，當氟樹脂管π由外面為金屬製管、内面為被覆 有耐蝕性材料之襯裏層之2層構造所構成時，只要在連接 部55插入絕緣螺栓即可。 並且，用以設置洩漏檢查裝置36之管線路徑係不受上 述實施例任何限定。 也可例如：如第4圖所示，預先於設置於有襯裏液箱 • . 本體2a之下面之開口部10，設置朝三方向開口之Τ字形 之連接部38，於由此T字形之三路徑中之自直線部分支且. 朝側方開口之管路連接、;电漏檢查裝置36後，在此插入測定 用電極34。 並且，也可如第5圖所示，預先於開關閥20與構成液 面測量用管線12之一部分之氟樹脂管17之間，設置朝三 方向開口之T字形之連接部54，由此T字形之三路徑中朝 側方開口之管路與洩漏檢查裝置36連接後，在此插入測定 用電極34， 如此用以設置測定用電極34之譏漏檢查裝置36之設 置位置係不受第1圖之例子所限定·。當於第4圖、第5圖 所示之設置位置裝設洩漏檢查裝置36時，可持續地進行檢 - · . · 查.。 . .此外，在上述實施例中，雖說明關於連接有液面測量 用之管線12之藥液供給用有襯裏液箱，但本發明於未設置 液面測，量用之管線12之液箱中也有效。 【圖式簡單說明】 第1圖係表示依本發明之一實施例實施藥液洩漏偵測 12 320801 1363029 方法之藥液供給用有襯裏液箱及附屬之管線之剖面圖。 苐2圖係表.示第1圖之一部分中所採用之絕緣螺栓之 說明圖。 第3圖係表示第2圖所示之絕緣螺栓之使用例之接頭 之剖®圖。 第4圖係表示本發明之另一實施例之藥液供給用有桃 晨液箱之一部分之示意圖。[Patent Document 1] Japanese Patent No. 2836〇97 SUMMARY OF INVENTION [Problem to be Solved by the Invention] 320801 1363029 ν' In view of such a conventional situation, the lining liquid tank for liquid supply is not open. State (when the liquid is kept in the state), it can be easily used in the tank body or in the measurement of the liquid surface, and the material is used in the lining tank and the liquid supply tank. The liquid medicine J-detection (the means to solve the problem). The 献η^ box for the purpose of the above-mentioned purpose is: ΚThe liquid supply for the supply of the invention is lining liquid ίΐ晨2 body 'system _ face coverage _ sex Material; pipeline, for liquid level measurement.; and its leak detection device 'slot is used to measure the insulation resistance to detect the penetration of liquid, ..... Connect the above-mentioned liquid level measurement tube _: insulated screw test, ❹ 衬 衬 钱 本体 本体 这 这 这 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于a lining liquid I made of a sexual shot to detect the front line connection Leak detection method, ϋ or the heart of the drug solution penetration = connection, the aforementioned insulation resistance; Π inserted: the above-mentioned part of the pipeline, the test slave n sub-frequency is connected to the above liquid • ' 320801 6 1363029; * * ' • The outside of the box body or any of the outside of the pipeline is measured by insulation resistance to detect the presence or absence of leakage due to the penetration of the lining liquid 'box body or the liquid in the pipeline. According to the present invention, by measuring the resistance value, it is easy to judge whether or not there is leakage due to the penetration of the chemical liquid, and the penetration occurs in the tank body or in the pipeline, and the degree of progress can be investigated. • The effect of the invention is as follows: The liquid medicine tank for the supply of the liquid medicine according to the present invention and the chemical liquid leakage detection method using the *lining liquid tank for supplying the liquid medicine, that is, the liquid supply is not required to be stopped, and only the liquid supply is supplied When the lining tank is in a non-open state (the state in which the liquid is kept clean), the part in which the penetration of the liquid is specified is in the tank body or the pipeline. Moreover, by continuously investigating the value of the insulation resistance, it is also possible to investigate the degree of penetration. [Embodiment] φ Fig. 1 is a view showing a lining liquid tank 2 for supplying a chemical liquid according to a leak detecting method according to an embodiment of the present invention, and an associated pipeline connected thereto. The medicated liquid supply lining tank 2 is composed of a lining tank body 2a formed by an upper opening and a lid body 2b covering the opening. The lined tank body 2a is provided with a short line 14 for introducing the chemical liquid, and is provided with a line for the purpose of taking out the medicine stored in the lined night box body 2a. The pipeline and the 14 Ι Η Η system are disposed at a position above the liquid surface without contacting the liquid of the lining tank body 2a. On the other hand, 320801 1363029 • The line 16 for taking out the liquid medicine is immersed in the liquid Configuration in the way. Further, the line 14 for supplying the chemical liquid and the line 16 for supplying the chemical liquid are formed of a fluororesin tube having excellent financial properties. Further, _.. ♦ Further, an opening 10 for both sides of the lining tank body 2a is provided, and a line 12 for liquid level measurement is connected. In the lining liquid tank 2 for supplying the chemical liquid of the present embodiment, since the stored chemical liquid is prevented from being contaminated by the state of being kept closed, the residual amount of the chemical liquid is confirmed by observing the liquid tank. Therefore, in order to confirm the residual amount from the outside, a liquid level measuring line 12 is provided separately, and the day and night line U2 is disposed along the side of the lined tank body 2a, and is arranged by the I: tree tube and It is composed of general lines 22, 24 connected to the lined tank body 2a. Furthermore, the pipelines 22, 24 are also formed by the corrosion-resistant material such as gas tree and fat. In the fluororesin tube 17 disposed along the side of the liner tank body 2a, the medicine, the φ liquid in the lining tank body 2a is supplied through the opening 10, and is in the lining tank body 2a. The same level is indicated by Η. By confirming this liquid level 确认, it is confirmed that the residual amount of the liquid in the lining tank body 2a is confirmed. A joint 26, an on-off valve 20, and the like are provided between the lined tank body 2a and the line 22 of the fluororesin tube 17. Further, the inside of the lining liquid tank main body 2a is electrically connected to the piping 24 for returning the chemical liquid from the fluororesin tube 17 to the upper side of the lining liquid tank main body 2a. On the other hand, the joint 26 is connected to the opening 10 of the liner tank body 2a, and the downstream side is divided into two, and the liquid discharge line 25 is connected to the opposite side of the line 12 for liquid level measurement. The liquid discharge line .2 5 is provided with an opening 320801 1363029, a closing valve 28, 30, and a container 32 for receiving the discharged chemical liquid. Further, a leak check device 36 is provided between the on-off valve 28 and the on-off valve 30. Connector _ 2 6, the inner peripheral surface of the leak check device 3 6 is also lining up with the money. Further, in the leak detecting device 36, one end portion of the measuring electrode 34 is inserted. This measuring electrode 34 is connected to an insulation resistance meter 5.2. In the present invention, the insulating bolts 40 as shown in Figs. 2 and 3 are used in the joint portion 18 of the joint 26 and the opening 10 of the liner tank body 2a. The surface of the shaft portion 42 of the insulating bolt 40 made of SUS304 or the like is covered with a fluorine resin 43 having excellent insulating properties and corrosion resistance such as PVDF (polyvinylidene fluoride). Further, the insulating bolt 40 is provided with a whole piece 44, 4β composed of SUS304 or the like, an insulating gasket 50, 51 composed of FRP (Fiber Reinforced Plastics), and a hex nut 48 composed of SUS304 or the like. 49 is used in the connection section. As shown, the connecting portion 18 is assembled with an insulating bolt 40, and an insulating spacer 53 is assembled between the pair of flanges 41a, 41b to form an electrical insulation between the upstream side and the downstream side. By using the insulating bolt 40 thus formed for the connecting portion 18, the downstream side of the connecting portion 18 is electrically insulated from the liner tank body 2a. • At present, the on-off valve 28 is closed, the on-off valve 20 is opened, and the lining tank body 2a is filled with the chemical liquid L. At this time, the liquid level of the chemical liquid L in the lining tank body 2a is presented in the line 12 for liquid level measurement, and can be confirmed. When the liquid medicine is taken out from the liquid tank 2, if the other upper opening 9 320801 13-63029 • nozzle is used, for example, nitrogen gas is supplied to the lined liquid tank main body 2a at a high pressure, the pressure will be The liquid level is pressed, whereby the chemical liquid rises from the lower end opening of the line 16 for liquid delivery, and the liquid medicine is discharged to the outside of the liquid tank. #此, You can send only the required amount of liquid. , •: The following describes the method for detecting the leakage of the liquid in the lined tank for the supply of the liquid. First, the leak detection of the liner tank body 2a will be described. % At present, there is a lining tank body 2a and a pipeline 12 for liquid level measurement, and the tank is filled with liquid, and the on-off valve 2 〇 and the on-off valve 28 are opened. In the other side, as described above, one terminal of the insulation resistance meter 52 is connected to the measurement electrode 34 in the flange leak check device 36, but the other terminal 35 of the insulation resistance meter / 52 is connected to, for example, the first. Figure 1 shows the outside of the lined tank/body 2a. Furthermore, the on-off valve 20 and the on-off valve 28 are opened. By this, the medicated liquid L in the lining, the tank body 2a is through the opening 10, the joint 26, the on-off valve 28, and the valve 30 are led out into the dreamer 32. Further, from this state, φ is measured between the measuring electrode 34 connected to the leak detecting device 36 and the measuring electrode 35 selectively connected to the outside of the liner tank main body 2a. If the insulation resistance is also (resistance value of the lining material itself), it is considered that the liquid does not penetrate into the lining in the lined tank body 2a. • . . . . . . . . . • In addition, it is confirmed that if the chemical liquid L in the lining tank body 2a penetrates into the inner layer 4' of the lining tank body 2a, it is conducted to the terminal 34 of the medicinal liquid L and the lining tank body 2a. The resistance value outside is usually lower. Thereby, the liquid medicine in the liner tank body 2a can be detected to penetrate into the lining. 10 320801 1363029 ‘Layer. Further, when infiltration occurs in the liner tank body 2a, the critical value of the resistance value at this time is lxl09D. If it is lower than this, it can be considered that the chemical penetrates the lining layer and penetrates into the metal layer to cause leakage. On the other hand, if the other terminal .35 of the insulation resistance meter 52 is selectively connected to the liquid level measuring line 12 < outside, the chemical liquid L is led to the container 32, and simultaneously measured between the terminal 34 and the terminal 34 The resistance, that is, the liquid level measurement pipeline 12 can be used for the leak detection. If the resistance value is lower than the normal value, the liquid level measuring line 12 can detect the leakage of the liquid permeating the backing layer and the metal layer. In this embodiment, since the bubble inspection of the liner tank body 2a and the bubble inspection of the pipeline 12 for liquid level measurement can be selectively performed, the liner tank body 2a can be detected. Infiltration with the liquid level measuring line 12. Further, the switch S may be provided at the other terminal 35 of the insulation resistor 52, and the measurement may be performed by switching the switch S. As described above, according to the present invention, leakage of the liner tank body 2a or leak detection of the liquid level measuring line 12 can be performed without interrupting the use of the chemical liquid in the liner tank body 2a. Also, the progress of the leak can be investigated by continuously checking. Although an embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, in the above embodiment, the insulating bolts - . . . 40 are used in the connecting portion 18. However, if the insulating bolts are provided at positions other than the connecting portion 18, the steam leakage can be detected at a finer portion. Further, when the fluororesin tube π is composed of a two-layer structure in which the outer surface is a metal tube and the inner surface is a lining layer coated with a corrosion-resistant material, an insulating bolt may be inserted into the connection portion 55. Also, the pipeline path for setting the leak check device 36 is not limited to the above embodiments. For example, as shown in Fig. 4, a U-shaped connecting portion 38 that is opened in three directions is provided in advance in the opening portion 10 provided on the lower surface of the lining liquid tank. In the path, the straight line portion is branched and connected to the side opening, and after the electric leakage detecting device 36, the measuring electrode 34 is inserted therein. Further, as shown in Fig. 5, a T-shaped connecting portion 54 that opens in three directions is provided between the switching valve 20 and the fluororesin tube 17 constituting one of the liquid level measuring lines 12 in advance, whereby T In the third path of the glyph, the pipe opening to the side is connected to the leak detecting device 36, and the measuring electrode 34 is inserted therein. The position of the leak detecting device 36 for providing the measuring electrode 34 is not subject to the first position. The example of the figure is limited. When the leak check device 36 is installed at the installation position shown in Figs. 4 and 5, the inspection is continuously performed. Further, in the above embodiment, the lining liquid tank for supplying the chemical liquid to which the liquid level measuring line 12 is connected is described. However, the present invention is not provided with the liquid level measuring, and the liquid tank for the measuring line 12 It is also effective. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a lining tank and an attached line for supplying a liquid medicine according to an embodiment of the present invention. 12 320801 1363029苐 2 diagram. Show an illustration of the insulating bolt used in one of the first figures. Fig. 3 is a cross-sectional view showing the joint of the use example of the insulating bolt shown in Fig. 2. Fig. 4 is a view showing a part of a peach liquid tank for supplying a chemical liquid according to another embodiment of the present invention.
第5圖係表示本發明之其他實施例之藥液供給用有襯 長液箱之一部分之示意圖 〇 【主要元件符號說明】 2 藥液供給用有襯裏液箱 .· ^ ' 2 a 液箱本體 2b 蓋體 4 内侧層 10 兼沒取用之開口 12 液面測量用之管線 14 用以投入藥液之管線 16 用以取出藥液之管線 17 '氣樹腸.管. 18, 38, 54, 55 連接部 20, 28, 30開關閥 22, 24 管線 25 液體排出管線 26 接頭 32 .容器 34 測定用電極 35 絕緣電阻計之端子 36' 泡漏.檢查裝置 40 絕緣性螺栓' 、 41a，41b 凸緣 42 軸部分 43 氟樹脂 44, 46 墊片 48, 49 六角螺帽 50, 51 絕緣墊圈 52 絕緣電阻器 13 320801 1363029 、53 墊片 L 藥液 Η 液位 S 開關Fig. 5 is a view showing a portion of a liquid-filled liquid tank for supplying a liquid medicine according to another embodiment of the present invention. [Main element symbol description] 2 A liquid tank for lining liquid supply. · ^ ' 2 a Liquid tank body 2b Cover 4 Inner layer 10 Unused opening 12 Line 14 for liquid level measurement Line 16 for liquid medicine 16 Line for removing liquid medicine 17 'Gas intestine. Tube. 18, 38, 54, 55 Connections 20, 28, 30 Switching valves 22, 24 Line 25 Liquid discharge line 26 Connection 32. Container 34 Measuring electrode 35 Terminal 36' of the insulation resistance meter Bubble leakage. Inspection device 40 Insulating bolts ', 41a, 41b convex Edge 42 Shaft section 43 Fluororesin 44, 46 Gasket 48, 49 Hex nut 50, 51 Insulation washer 52 Insulation resistor 13 320801 1363029, 53 Shim L Liquid Η Liquid level S switch
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