1362993 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於加熱壓輥，特別是關於被使用在適於做 爲通過加熱壓輥時不會產生皺褶，且不會品質參差不齊的 輥筒捲製品，而可安定生產的金屬箔等之雙面導體聚醯亞 胺層合體等的連續製造用之加熱壓輥。 ® 【先前技術】 近年來’隨著高功能化的行動電話、數位相機、導航 器及其他的各種電子機器類的小型化、輕量化之進展，對 做爲使用於此等的電子配線·材料之易彎印刷基板（印刷電 路基板）的小型高密度化之要求越來越高。關於此易彎印 刷基板’被提出的有製造在銅箔等的導電性金屬箱（Ml) 之一面具有至少三層的聚醯亞胺樹脂層之單面導體層合 體’加熱加壓下且層合導電性.金屬涪（μ2)於該樹脂層的 雙面導體聚醯亞胺層合體之製造方法（參考例如專利文獻 1) °此種雙面導體層合體尤其是可以在基板的兩面形成 電路’爲了高密度安裝’已全部被實用化，而於近年來在 各種技術領域被大量採用。 在上述專利文獻1的雙面導體聚醯亞胺層合體之製造 方法’揭示有利用熱壓裝置等的分批交換法之具體例。在 此分批交換法的熱壓裝置等’係在被稱爲熱板的底座之 上’同時地安裝複數層的單面導體層合體及導電性金屬箱 而加熱壓著者。一般的加熱，係藉由配置於熱板內的電氣 -5 - (2) (2)1362993 加熱器來進行，壓力係藉由油壓，押壓底座而透過薄膜使 壓力傳達至上部底座，而維持規定壓力。但是，因爲在此 種熱板，加熱器的溫度偏差程度大，所以即使進行種種的 修正，還是會有由於加熱不足及加熱過剩，而發生部份的 不良處之情形。 而且在同時地處理複數層時，由於長時間的加熱，會 促進層合樹脂層的劣化，係爲每一產品的最佳條件差且非 常不安定的製程。更且，因爲層合基材係爲反覆從常溫過 熱加壓到達一定溫度後再冷卻的分批交換法之循環而被生 產，所以不僅僅是生產效率低，也必須有層合基材的切斷 作業，在此時，會容易捲入異物，異物附著時，在全部層 合的物體大多會產生轉印異物形狀的外觀不良。因此更加 強烈需求利用連續方式的品質安定之雙面導體聚醯亞胺層 合體的製造方法。 專利文獻1:日本特開平10-323935號公報 【發明內容】 〔發明的開示〕 本發明人們，取代利用專利文獻I的雙面導體聚醯亞 胺層合體之製造方法的熱壓裝置等之分批交換法，而針對 藉由利用一對的加熱壓輥之加熱壓著，來連續製造雙面導 體聚醯亞胺層合體的方法’進行硏究之結果，得知會有在 使用一般的均一加熱方式之壓輥的情形，在移動被配置於 上下的一對之壓輥而縮小兩者的間隙來進行壓著時：，即使 -6- (3) 1362993 僅僅是任一個的輥筒傾斜數微米，也會有由於在與基材的 接觸面之一部份產生縫隙，使壓力不均，而在通過輥筒之 間時的層合體之表面產生多數的縱紋之皺褶等所引起的外 觀不良之情事，以及根據輥筒面的狀態，由於基材與輥筒 面的貼合度之不同，而大多容易發生在運轉中，由於捲繞 所引起的複雜之皺褶（以下稱爲線紋）及凹坑（在製品表 面數十微米的瑕疵）之情事等的種種應解決之課題。 ί 因此，本發明的目的，爲提供一種適於連續地製造在 聚醯亞胺系樹脂層的兩面，不須介由接著劑，而不會有層 合導電性金屬層時的縱紋皺褶等之外觀不良的品質安定之 雙面導體聚醯亞胺系層合體的加熱壓輥。 本發明人們，專心致力硏究有關上述課題的結果，藉 由設置壓輥表面溫度的均一化手段、及來自使在壓輥的中 央區域部及該兩側區域部產生不同的熱膨脹之輥筒內部的 加熱控制手段之構成，發現可達成上述目的而完成本發 鲁明。 亦即本發明係： (1 ) 一種加熱壓輥’其特徵爲：係爲使中心軸爲水 平且被配置於上下的至少一方之壓輥，藉由油壓式或齒輪 式的間隙調整機構’往另一方的壓輕頂出，而縮小兩者的 間隙來進行壓著之構成，在此等一對的加熱壓輥.，具備藉 由埋入於壓輥的表面附近之熱導管的表面溫度均一化手 段、及來自使在壓輥的中央區域部及該兩側區域部產生不 同的熱膨脹之輥筒內部的加熱控制手段。 1362993 中筒在置中 的輥，設的 轉動段，圈 旋驅手方線 不轉制地熱 在旋控個加 爲來熱三等 好件 加的此 最構的部朝 ，持部側大 輕支內兩增 壓承筒及由 罾軸輥部藉 加的自央， Μ 端來中圈 BJ兩且成線 y由，分熱 J介式區加 is，型周的 K';圍空外熱 } 周中的加 2)之之心電 ί 心部軸誘 軸周心用 '心外中利 央部流動之電流的比例，使壓輥的內壁面之中央部保持於 高溫，以控制中央區域部的熱膨脹比兩側區域部大者。 B (3)上述本發明的加熱壓輥，最好爲被使用於在聚 醯亞胺系樹脂層的兩面，不須介由接著劑，而層合導電性 金屬層者，而且最好一對的加熱壓輥之平均表面粗糙度 (R )，被粗糙面化處理至〇.〇1〜5μηι，而壓輥表面的粗 糙面化處理爲陶瓷皮膜的被溶射而形成表面粗糖度 (R )。 若根據此種本發明的加熱壓輥，藉由在表面附近配置 利用熱導管的熱媒體元件，則表面溫度精確度高，且幾乎 # 不會產生軸方向的溫度差及偏差。而且因爲藉由使壓輥的 中央區域部保持於高溫，以使中央部熱膨脹至冕形狀態，. 一方面自動地修正壓輥些許傾斜造成的壓力不均，一方面 保持在與基材的接觸面之沒有間隙的理想接觸狀態，所以 可以防止在加熱壓著時的層合體之表面的縱紋.皺褶等之外 觀不良。而且藉由使加熱壓輥的表面粗糙度保持於特定條 件，以減少基材與輥筒面的貼合度，也可以防止在運轉 中，由於捲繞所引起的複雜之皺褶（以下稱爲線紋）及凹 坑（在製品表面數十微米的瑕疵）等之發生。 (5) (5)1362993 【實施方式】 [發明之最佳實施形態〕 以下’詳細地說明實施發明用的最佳形態。首先，本 發明的加熱壓輥，係被使用於在塑膠的薄膜及薄片彼此、 或者布、紙、金屬箔等的表面，連續地加熱壓著下且貼合 熱可塑性樹脂 '熱硬化性塑膠薄膜類者。尤其最好是適於 連續地加熱壓著下且貼合事先使做爲絕緣體層而被使用的 聚醯亞胺系樹脂層，不介由接著劑，而使加熱硬化接著於 導電性金屬薄片的表面之單面導體層合體與導電性金屬 箔’而可得雙面導體層合體》以下，以此種雙面導體層合 體爲主體來說明。 做爲在雙面導體層合體被使用的導電性金屬箔，可以 例舉出厚度爲 5〜1 50μηι的銅、鋁、鐵、銀、鈀、鎳、 鉻、鉬、錳、鋅及此等的合金等，最理想爲銅。特別是， 剛性低且壓力控制困難而不被考慮使用的壓延銅箔品也可 適用。而且以接著力的提昇爲目的，亦可在該表面施行藉 由外壁板、鍍鎳、鍍銅一鋅合金、烷氧基鋁鹽、鋁螯合 物 '有機矽烷偶合劑等的化學或機械之表面處理。做爲當 做絕緣體層的聚醯亞胺系樹脂，不介由接著劑，而使加熱 硬化接著於此種導電性金屬箔（JVh)的一面之單面導體層 合體，可以利用以在上述專利文獻1被揭示的製造方法所 得者。 在此所謂做爲絕緣體層而被使用的聚醯亞胺系樹脂’ -9- (6) (6)1362993 係爲具有醯亞胺環構 1造的樹脂之總稱，可以舉出例如聚醯 亞胺、聚醯胺醯亞胺、聚酯醯亞胺等。然後，做爲聚醯亞 胺系樹脂層，可以利用低熱膨脹性者、及加熱就融化或軟 化的熱可塑性聚醯亞胺等’並無特別限定。最理想的絕緣 體層，最好是由用記載於專利文獻1的聚醯亞胺前驅物樹 脂溶液之加熱硬化所得的熱可塑性聚醯亞胺系樹脂所組成 的基層、及低熱膨脹性聚醯亞胺系樹脂所組成的主體層、 及熱可塑性聚醯亞胺系樹脂所組成的上層之至少三層的聚 醯亞胺系樹脂層所組成者。 而且，上述一對的加熱壓輥在氮氣的空氣中，最好是 使被配置於上下的一對之壓輥的至少一方之壓輥移動至規 定的位置，兩者的被配置於上下之一對的壓輥間之面壓， 係使至少一方的壓輥移動至規定的位置，縮小兩者的間 隙，透過被導入的基材，將壓力傳達至壓輥之間，壓輥間 的線壓係爲 50 〜500Kg/cm( 490N/cm 〜4900N/cm)， 最理想爲 1 00 〜300Kg/ cm ( 9 8 0N/ cm 〜2940N/ cm )， 以通過時間2〜5秒之間的條件而加熱壓著。 更且一對的加熱壓輥，最好爲壓輥的表面粗糙度 (R)被處理至0·0〗〜5μιη，最理想爲0.1〜3μηι的粗糙面 化狀態者。在壓輥的表面粗糙度（R)爲0.01 μιη以下時， 會從加熱輥筒之間，發生由導出的雙面導體聚醯亞胺層合 體的輥筒緊貼所造成的線紋，而在運轉中產生皺摺。爲 5μιη以上時，因爲輥筒表面的凹凸會被轉印至層合體表 面’所以不甚理想。·在將輥筒表面做粗糙面化狀態處理 -10- (7) 1362993 時，可以藉由溶射氮化矽等的陶瓷皮膜來 面粗糙度（Ra)可以藉由鑽石針的觸針式 得。 以下’根據附加實施發明用的最佳形 地說明。第1圖，爲顯示將本發明的單面 電性金屬箔導入於一對的加熱壓輥間，藉 合一體化的雙面導體聚醯亞胺層合體之製 程圖。第2圖的（a)爲顯示基材爲理想 態、（b)爲顯示壓輥傾斜且接觸不良而 狀態之說明圖。第3圖，爲顯示本發明的 的槪略縱剖面圖。第4圖（a )〜（d )爲 中央區域部產生冕形形狀，而與使壓輥間 基材的接觸狀態之說明圖。 在第1圖，來自使加熱硬化且接著由 組成的絕緣體層於導電性金屬箔（M,)的 態的單面導體層合體1、及來自輥筒捲狀 箔（Μ 2 )，一起從輥筒捲狀態連續地拉 的導引輥筒3、3’、4、4’，而被導入於有 之加熱壓輥5、6之間.，成爲藉由在上述 加熱壓著導電性金屬箔（Μ 2)而使層合 體聚醯亞胺層合體7，之後經過以下複數 8 ’並冷卻而成爲輥筒捲製品9。在此，爲 屬箔的氧化，複數的導引輥筒3、3 ’、4 一對的加熱壓輥5、6，被配置於大氣壓以 調整。再者，表 ，表面粗糙度計求 態之圖面來詳細 ί導體層合體及導 由加熱壓著使.層 造方法的槪略流 的接觸壓輥之狀 產生壓力不均的 1加熱壓輥之一例 ，顯示使在壓輥的 的加壓變化時之 聚醯亞胺樹脂所 一面之輥筒捲狀 態的導電性金屬 出，並經過複數 關本發明的一對 絕緣體層的上層 一體化之雙面導 的導引輥筒8、 了防止導電性金 、4, 、 8 、 8’等及 上的氮氣空氣的 -11 - (8) (8)1362993 處理室10內，而且在基材導入口及層合體的排出口最好 設置氮密封機構（曲折密封）II。 在此加熱壓輥5、6，雖未圖示，但藉由將使中心軸 爲水平而被配置於上下的至少一方之壓輥保持在中心軸的 兩側，以利用油壓或齒輪的加壓手段，使往另一方移動至 規定位置，而進行兩者的間隙調整，針對於被導入的基材 1、2相互地從壓輥傳達最合適的加壓力。在此使用一般的 加熱方式之壓輥時，在縮小兩者的間隙時，理想地進行間 隙調整的情況之一方的壓輥與基材係成爲第2圖（a)的 理想之接觸狀態（但省略另一方的壓輥）。但是實際上移 動的輥筒會發生由於兩端保持所造成的彎曲、及因爲機械 精確度的界限，而被保持在間隙調整作業時的兩端高度位 置不平均狀態等，輥筒中心軸會左右不平均地傾斜數微米 左右係無可避免。 結果，在與基材的接觸面之一部份容易產生如第2圖 (b)般的縫隙s (但省略另一方的壓輥）。若有此縫隙部 份’則會加壓力不均，特別是厚度非常薄的金屬箔在通過 輥筒之間時，在層合體的表面，會因產生多數的縱紋、橫 摺及集結皺摺等而外觀不良。數微米左右的傾斜超過了加 壓手段及周邊接觸零件彼此的檄械精確度之界限，操作者 要將此保持於一定的間隙狀態，係不可能的。爲了解決此 問題’本發明爲藉由作爲在輥筒中央區域部，產生利用熱 膨脹的冕形狀態之構成，使輥筒的中心軸吸收由於以細微 的數微米單位傾斜所造成的縫隙者。 -12- (9) (9)1362993 在此，以顯示適於在輥筒的中央區域部’產生利用熱 膨脹的冕形狀態之本發明的加熱壓輥之一例的第3圖來說 明。壓輥5(6)，係內部介由中空的外周部、及從兩端突 出而被固定的中心軸12被配置於輥筒外周部的兩端內部 之軸承等的旋轉支持構件13，而被一體化者。再者，壓輥 5(6)由未圖示的旋轉驅動源，介由適當的齒輪等之傳達 手段，在中心軸1 2的周圍，利用旋轉支持構件1 3，只強 制旋轉壓輥外周部。而且在中心軸1 2，固定有利用區分成 中央區域部及該兩端區域部的三個地方之誘電加熱的加熱 線圈、紅外線加熱器等的熱放射、幅射等之加熱手段14、 1 5、1 6，藉由改變朝此等加熱手段流動的電流之比例（.整 體爲一定的電流値），來控制往壓輥的內壁面之熱放射或 照射的熱能源。 此時，藉由將中央區域部的內壁面加熱至比兩側區域 部的內壁面高5〜20 °C，最好是7〜15 °C的溫度，中央區 域部會熱膨脹，可以使自動地修正由於壓輥的間隙調整時 之細微的傾斜所造成之加壓力的不均一。在此溫度差爲5 °C以下時’熱膨脹會非常小，在2 0 °C以上時，輥筒表面溫 度的均一化會變得困難而並不理想。而且，在輥筒外表面 附近’埋入有少量裝入排氣且熱傳導性良好的有·機熱媒體 或揮發性的液體（動作液）之稱爲套管或熱導管17的均 一化表面溫度的熱傳導元件。此種熱導管，因爲可以用來 自上述的中心軸1 2之加熱手段1 4、1 5 ' 1.6的熱傳導瞬間 地傳達至輥筒外表面整體，所以表面溫度精確.度高.，幾乎 -13- (10) (10)1362993 不會產生軸方向的溫度差。再者輥筒表面溫度，最好爲熱 可塑性聚醯亞胺系樹脂的玻璃轉移點以上，更理想爲控制 加熱溫度至3 5 0〜390°C。此種加熱溫度的控制最好是以埋 入於輥筒表面的溫度感測器監視，而控制供給往加熱手段 的電流値。 而且，上述一對的加熱壓輥在氮氣的空氣中，最好是 使被配置於上下的一對之壓輥的至少一方之壓輥移動至規 定的位置，兩者的被配置於上下之一對的壓輥間之面壓， 係使至少一方的壓輥移動至規定的位置，縮小兩者的間 隙，透過被導入的基材，使加壓力傳達至壓輥之間。此時 壓輥間的線壓係爲50〜500〖£/(^( 49 01<[/(：111〜490(^/ cm)，最理想爲 100 〜300Kg/cm(980N/cm 〜2940N/ cm)，以通過時間2〜5秒之間的條件加熱壓著。 更且被使用的一對之加熱壓輥，最好使用壓輥的表面 粗糙度（R)在0.01〜5μηι，最理想爲0.1〜3μπι的粗糙面 化狀態。在壓輥的表面粗糙度（R)爲Ο.ΟΙμίΏ以下時，會 從加熱輥筒之間，發生由導出的雙面導體聚醯亞胺層合體 的輥筒緊貼所造成的線紋，而在運轉中產生皺摺。爲5μηι 以上時，因爲輥筒表面的凹凸會被轉印至層合體表面，所 以不甚理想。在使輥筒表面爲上述範圍內的粗糙面時，可 以藉由溶射陶瓷皮膜來調整。 〔實施例〕 以下，說明使用顯示於上述第3圖的剖面構造之上下 -14 - (11) (11)1362993 (1) Nine, the invention belongs to the technical field of the invention. The present invention relates to a heated press roll, and in particular to a wrinkle that is used when it is suitable for use as a heated press roll, and does not suffer from quality variations. A heated roll for continuous manufacture of a double-sided conductive polyimide laminate such as a metal foil which can be stably produced. ® [Prior Art] In recent years, with the development of miniaturization and weight reduction of high-performance mobile phones, digital cameras, navigators, and other electronic devices, electronic wiring and materials have been used as such. The demand for compact and high-density printed circuit boards (printed circuit boards) is increasing. A single-sided conductor laminate having a polyimine resin layer having at least three layers on one side of a conductive metal case (M1) made of copper foil or the like is proposed, and the layer is heated and pressurized. A method for producing a double-sided conductor polyimide laminate having a metal iridium (μ2) on the resin layer (refer to, for example, Patent Document 1). Such a double-sided conductor laminate can form a circuit on both sides of the substrate. The 'high-density mounting' has been put into practical use, and has been widely used in various technical fields in recent years. A method for producing a double-sided conductive polyimide film of the above-mentioned Patent Document 1 discloses a specific example of a batch exchange method using a hot press device or the like. In the hot press apparatus or the like of the batch exchange method, a plurality of single-sided conductor laminates and a conductive metal case are simultaneously mounted on a base called a hot plate to heat the presser. The general heating is performed by an electric -5 - (2) (2) 1362993 heater disposed in the hot plate. The pressure is pressed by the base by the hydraulic pressure, and the pressure is transmitted to the upper base through the film. Maintain the prescribed pressure. However, since the temperature deviation of the heater is large in such a hot plate, even if various corrections are made, there is a possibility that some of the defects occur due to insufficient heating and excessive heating. Further, when the plurality of layers are simultaneously treated, deterioration of the laminated resin layer is promoted due to prolonged heating, which is a process which is poor in optimum conditions for each product and which is extremely unstable. Moreover, since the laminated substrate is produced by repeating the cycle of the batch exchange method from the normal temperature superheating and pressing to a certain temperature and then cooling, it is not only the production efficiency is low, but also the cutting of the laminated substrate is required. At the time of this, the foreign matter is easily caught in the work, and when the foreign matter adheres, the appearance of the transferred foreign matter is often poor in all the laminated objects. Therefore, there is a strong demand for a method for producing a double-sided conductor polyimine laminate using a continuous quality and stability. [Explanation of the Invention] The inventors of the present invention have replaced the hot-pressing device or the like using the method for producing a double-sided conductor polyimine laminate of Patent Document 1. In the batch exchange method, the method of continuously producing a double-sided conductive polyimide film by heating and pressing with a pair of heated press rolls is carried out, and it is found that general uniform heating is used. In the case of the pressure roller of the embodiment, when a pair of pressure rollers disposed on the upper and lower sides are moved to narrow the gap therebetween, the pressing is performed: even if -6-(3) 1362993 is only one of the rollers is inclined by several micrometers. There is also a possibility that a gap is formed in one of the contact faces with the substrate to make the pressure uneven, and a large number of longitudinal wrinkles are generated on the surface of the laminate when passing between the rolls. The bad situation, and depending on the state of the roll surface, due to the difference in the degree of adhesion between the substrate and the roll surface, it is likely to occur during operation, due to the complicated wrinkles caused by the winding (hereinafter referred to as the line pattern). ) and pits ( Products tens of microns surface defects) and other violations of all sorts of issues to be resolved. Accordingly, it is an object of the present invention to provide a longitudinal pleat that is suitable for continuous production on both sides of a polyimide film without the need for an adhesive, without a conductive metal layer being laminated. A heated press roll of a double-sided conductor polyimide-based laminate having a poor quality appearance and the like. The present inventors focused on the results of the above-mentioned problems, by providing a uniformizing means for the surface temperature of the press roll, and from the inside of the roll for causing different thermal expansion in the central portion of the press roll and the both side portions. The composition of the heating control means found that the above purpose can be achieved to complete the present invention. That is, the present invention is: (1) A heating press roll which is characterized in that it is a press roll in which at least one of the center axes is horizontal and is disposed on the upper and lower sides, and a hydraulic pressure type or a gear type gap adjusting mechanism' The pressure is applied to the other side, and the gap between the two is narrowed to perform the pressing, and the pair of heated pressing rolls are provided with the surface temperature of the heat pipe buried near the surface of the pressure roller. The homogenization means and the heating control means from the inside of the roll which causes different thermal expansion in the central portion of the pressure roller and the both side regions. 1362993 The middle cylinder is in the middle of the roller, the rotation section is set, the circle rotation driver's square line is not converted to the geothermal heat, and the rotation control is added to the heat, and the third part is added. The inner two pressurized cylinders and the self-centered by the yoke roller part, the Μ end to the middle circle BJ two and the line y, the heat J medium zone plus is, the type of K'; } In the middle of the week, add 2) to the heart of the heart. The center of the heart axis is used to control the central area of the inner wall of the pressure roller. The thermal expansion of the part is larger than that of the two sides. B (3) The above-mentioned heating press roll of the present invention is preferably used for laminating conductive metal layers on both sides of a polyimide-based resin layer without using an adhesive, and preferably a pair The average surface roughness (R) of the heated press roll is roughened to 〇1 5 1 to 5 μm, and the rough surface treatment of the surface of the press roll is such that the ceramic film is sprayed to form a surface roughness (R). According to the heating roller of the present invention, by arranging the heat medium element using the heat pipe in the vicinity of the surface, the surface temperature accuracy is high, and the temperature difference and variation in the axial direction are hardly generated. Moreover, since the central portion of the pressure roller is maintained at a high temperature to thermally expand the central portion to the 冕-shaped state, on the one hand, the pressure unevenness caused by the slight inclination of the pressure roller is automatically corrected, and on the other hand, the contact with the substrate is maintained. Since the surface has an ideal contact state without a gap, it is possible to prevent the appearance of the longitudinal stripes, wrinkles, and the like on the surface of the laminate at the time of heating and pressing. Further, by maintaining the surface roughness of the heating roller under specific conditions to reduce the degree of adhesion between the substrate and the roll surface, it is possible to prevent complicated wrinkles caused by winding during operation (hereinafter referred to as Lines) and pits (tens of micrometers on the surface of the product) occur. (5) (5) 1362993 [Embodiment] [Best Embodiment of the Invention] Hereinafter, the best mode for carrying out the invention will be described in detail. First, the heating roller of the present invention is used for continuously heating and pressing a film and a sheet of plastic, or a surface of cloth, paper, metal foil, etc., and bonding a thermoplastic resin 'thermosetting plastic film. Class. In particular, it is preferably a polyimine-based resin layer which is preferably used for continuous heating under pressure and bonded to be used as an insulator layer in advance, and is heat-hardened to be followed by a conductive metal foil without using an adhesive. The single-sided conductor laminate on the surface and the conductive metal foil 'to obtain a double-sided conductor laminate>> will be described below with the double-sided conductor laminate as a main body. Examples of the conductive metal foil to be used in the double-sided conductor laminate include copper, aluminum, iron, silver, palladium, nickel, chromium, molybdenum, manganese, zinc, and the like having a thickness of 5 to 150 μm. Alloys, etc., are most preferably copper. In particular, a rolled copper foil which is low in rigidity and difficult in pressure control and is not considered for use is also applicable. Further, for the purpose of improving the adhesion force, chemical or mechanical means such as an outer wall plate, a nickel plating, a copper-plating-zinc alloy, an alkoxy aluminum salt, an aluminum chelate compound, an organic decane coupling agent, or the like may be applied to the surface. Surface treatment. As the polyimide-based resin which is an insulator layer, a single-sided conductor laminate which is heat-hardened and adhered to one side of such a conductive metal foil (JVh) without using an adhesive can be utilized in the above-mentioned patent document. 1 The winner of the disclosed manufacturing method. Here, the polyimine-based resin '-9-(6)(6)1362993 which is used as an insulator layer is a general term for a resin having a quinone ring structure, and for example, polyruthenium Amine, polyamidoximine, polyester quinone, and the like. In addition, the polyamidene-based resin layer is not particularly limited as long as it can be melted or softened by heating with a low thermal expansion property. The most preferable insulator layer is preferably a base layer composed of a thermoplastic polyimine resin obtained by heat-hardening a polyimine precursor resin solution described in Patent Document 1, and a low thermal expansion polysiloxane. It is composed of a main layer composed of an amine resin and a polyimine-based resin layer of at least three layers of an upper layer composed of a thermoplastic polyimine resin. Further, in the pair of hot press rolls, it is preferable that at least one of the pair of press rolls disposed on the upper and lower sides is moved to a predetermined position in the air of nitrogen gas, and both of them are disposed on the upper and lower sides. The surface pressure between the pair of pressure rollers is such that at least one of the pressure rollers is moved to a predetermined position, the gap between the two is reduced, and the introduced substrate is transmitted through the introduced substrate, and the pressure is transmitted between the pressure rollers and the line pressure between the pressure rollers. It is 50 to 500 Kg/cm (490 N/cm to 4900 N/cm), and most preferably 100 to 300 Kg/cm (98 0 N/cm to 2940 N/cm), with a pass time of 2 to 5 seconds. Heated and pressed. Further, the pair of heated press rolls is preferably one in which the surface roughness (R) of the press rolls is treated to 0. 0 to 5 μm, and most preferably 0.1 to 3 μm. When the surface roughness (R) of the pressure roller is 0.01 μm or less, a line pattern caused by the roller of the drawn double-sided conductor polyimide laminate is generated from between the heating rolls, and Wrinkles occur during operation. When it is 5 μm or more, since the unevenness of the surface of the roll is transferred to the surface of the laminate, it is not preferable. - When the surface of the roll is roughened, -10- (7) 1362993, the surface roughness (Ra) of the ceramic film by spraying a tantalum nitride or the like can be obtained by the stylus of the diamond needle. The following is a description of the best form for use in accordance with the additional embodiments of the invention. Fig. 1 is a process diagram showing the introduction of an integrated double-sided conductive polyimide film laminate by introducing a single-sided electrical metal foil of the present invention between a pair of heated press rolls. Fig. 2(a) is an explanatory view showing a state in which the substrate is in an ideal state, and (b) is a state in which the pressing roller is tilted and the contact is poor. Fig. 3 is a schematic longitudinal sectional view showing the present invention. Fig. 4 (a) to (d) are explanatory views showing a state in which a central portion has a meandering shape and is in contact with a substrate between press rolls. In Fig. 1, a single-sided conductor laminate 1 from a state in which a heat-hardened and then composed insulator layer is formed on a conductive metal foil (M,), and a roll-like foil (Μ 2 ) are taken together from a roll. The guide rolls 3, 3', 4, 4' continuously pulled in the state of the roll are introduced between the heated press rolls 5, 6. The conductive metal foil is pressed by the heating (层 2) The laminate polyimine laminate 7 is passed through the following plural 8' and cooled to form a roll product 9. Here, in the oxidation of the foil, the pair of heating rollers 5, 6 of the plurality of guide rolls 3, 3', and 4 are disposed at atmospheric pressure to be adjusted. In addition, the surface roughness of the surface is calculated in detail. The conductor laminate and the heating press are used to form a pressure roller with a pressure unevenness in the shape of the contact pressure roller. In one example, the conductive metal in the roll state of one side of the polyimine resin when the pressurization of the press roll is changed is shown, and the upper layer of the pair of insulator layers of the present invention is doubled. The guide roller 8 of the surface guide prevents the conductive gold, 4, 8, 8 and 8' and the nitrogen gas on the -11 - (8) (8) 1362993 processing chamber 10, and at the substrate introduction port Preferably, the discharge port of the laminate is provided with a nitrogen sealing mechanism (zigzag seal) II. Here, the heating rollers 5 and 6 are not shown, but are held on both sides of the center shaft by at least one of the pressure rollers that are disposed on the upper and lower sides with the center axis being horizontal, so as to use oil pressure or gear addition. The pressing means moves the other side to a predetermined position to adjust the gap between the two, and the most suitable pressing force is transmitted from the pressing rolls to the substrates 1 and 2 to be introduced. When a press roll of a general heating method is used here, when the gap between the two is narrowed, the pressure roller and the base material which are ideally one of the gap adjustments are in an ideal contact state of FIG. 2(a) (but Omit the other press roller). However, in actuality, the moving roller may have a bending due to the both ends and a limit of the mechanical accuracy, and the height position of the both ends of the roller is kept uneven during the gap adjusting operation, and the center axis of the roller will be left and right. Unevenly tilting a few microns or so is unavoidable. As a result, a slit s as in Fig. 2(b) is easily generated in one portion of the contact surface with the substrate (but the other press roller is omitted). If there is such a gap portion, the pressure will be uneven, especially when the metal foil with a very thin thickness passes between the rollers, on the surface of the laminate, a large number of vertical stripes, cross-folds and agglomerated wrinkles are generated. Wait and look bad. The inclination of a few micrometers or more exceeds the limit of the mechanical accuracy of the pressing means and the peripheral contact parts, and it is impossible for the operator to maintain this in a certain gap state. In order to solve this problem, the present invention has a configuration in which a central portion of the roll is formed in a state of being in a state of being expanded by thermal expansion, and the center axis of the roll is absorbed by a tilt caused by a slight number of micrometers. -12- (9) (9) 1362993 Here, a third view showing an example of the heating press roll of the present invention which is suitable for generating a heat-expanded crucible state in the central portion of the roll is shown. The pressure roller 5 (6) is internally provided with a hollow outer peripheral portion and a rotation support member 13 such as a bearing disposed at both ends of the outer peripheral portion of the roller through the central shaft 12 that is fixed from both ends and fixed. Integrator. Further, the pressure roller 5 (6) is rotated by a rotation drive source (not shown), and the rotation support member 13 is used around the center shaft 12 to forcibly rotate only the outer circumference of the pressure roller. . Further, in the central axis 12, heating means 14 such as heat radiation or radiation such as a heating coil or an infrared heater which are divided into three places which are divided into a central portion and the both end portions are fixed. 16. The thermal energy of the heat radiation or irradiation to the inner wall surface of the pressure roller is controlled by changing the ratio of the current flowing through the heating means (the total current is 値). At this time, by heating the inner wall surface of the central portion to be higher than the inner wall surface of the both side portions by 5 to 20 ° C, preferably at a temperature of 7 to 15 ° C, the central portion is thermally expanded, so that it can be automatically Correct the unevenness of the pressing force caused by the slight inclination of the gap adjustment of the pressure roller. When the temperature difference is 5 °C or less, the thermal expansion is very small. When the temperature is above 20 °C, the uniformity of the surface temperature of the roll becomes difficult and is not preferable. Further, in the vicinity of the outer surface of the drum, a uniform surface temperature called a casing or a heat pipe 17 in which a small amount of an organic heat medium or a volatile liquid (activating liquid) having a good heat conductivity is incorporated is known. Thermal conduction element. Such a heat pipe can be instantaneously transmitted to the entire outer surface of the roll by the heat conduction from the heating means 14 and 15' 1.6 of the central axis 1 2 described above, so that the surface temperature is accurate. The degree is high. (10) (10) 1362993 Does not produce a temperature difference in the axial direction. Further, the surface temperature of the roll is preferably a glass transition point of the thermoplastic polyimide-based resin, and more preferably, the heating temperature is controlled to 305 to 390 °C. The control of such heating temperature is preferably monitored by a temperature sensor embedded in the surface of the roll to control the current enthalpy supplied to the heating means. Further, in the pair of hot press rolls, it is preferable that at least one of the pair of press rolls disposed on the upper and lower sides is moved to a predetermined position in the air of nitrogen gas, and both of them are disposed on the upper and lower sides. The surface pressure between the pair of press rolls is such that at least one of the press rolls is moved to a predetermined position, and the gap between the two is narrowed, and the introduced substrate is transmitted through the introduced substrate to transfer the pressing force between the press rolls. At this time, the line pressure between the pressure rolls is 50 to 500 [£/(^( 49 01<[/(:111~490(^/cm), most preferably 100 to 300 Kg/cm (980 N/cm to 2940 N/ Cm), heating and pressing under the condition of a time of 2 to 5 seconds. Further, the pair of heated press rolls, preferably using a press roll, has a surface roughness (R) of 0.01 to 5 μm, most preferably A rough surface state of 0.1 to 3 μm. When the surface roughness (R) of the pressure roller is Ο.ΟΙμίΏ, a roller of the double-sided conductor polyimide laminate which is derived from the heated roller occurs It is close to the line pattern caused by it, and wrinkles are generated during operation. When it is 5 μηι or more, since the unevenness of the surface of the roll is transferred to the surface of the laminate, it is not preferable. The rough surface can be adjusted by the molten ceramic film. [Embodiment] Hereinafter, the use of the cross-sectional structure shown in Fig. 3 above will be described. -14 - (11) (11)
1362993 —對的加熱壓輥（輥筒直徑3 00mm<D、長 實施例。在使中心軸爲水平而被配置於i 表面附近，埋入有裝入萘的熱導管，控希 度36(TC，且做爲來自內部的加熱手段而 熱線圈，藉由整體的輸出（熱量）係爲-電流的比例（相對於中央部的加熱線圈 3 0% )，使實際上在中央區域部與該兩側 的溫度差。在此狀態於無加壓狀態下，瓦 會產生冕形狀態的熱膨脹。成爲將下方音丨 心軸的兩側，對上部壓輥以藉由可加壓至 方式之加壓手段壓著，而使進行兩者的間 將在使由來自加熱硬化且接著以聚酸 的絕緣體層於厚度2 0 μιη的壓延銅箔品（ 輥筒捲狀態的厚度 45mm、寬度 5 00mm 體、及來自輥筒捲狀態的厚度20μιη、寬j 銅箔品（Μ 2 )所組成的二層之基材，通 層合一體化時的縱軸，施加壓輥間的間 力，與基材的上部壓輥面的接觸狀態顯示 圖（a )係顯示在加壓力低的狀態時，因 冕形狀態，在基材的兩端產生縫滕之接觸 圖（b )及（c )，係顯示上下壓輥之間保 狀態且相互地按壓而平坦化之最合適的g 第4圖（d)係顯示上下壓輥之間的加逼 輥的中心部，在與基材之間產生縫隙的狀 度 800mm)時的 :下的加熱壓輥之 J至表面的設定溫 ί三分中心軸的加 -定，而改變流動 1 0 0 %，兩端線圈 區域部產生1 0 °c 「以確認在中央部 5的壓輥保持在中 最高25t的油壓 隙調整之構成。 【亞胺樹脂所組成 )的一面上之 之單面導體層合 荽5 00mm的壓延 [過加熱壓輥間而 隙調整時的加壓 於第4圖。第4 爲由於熱膨脹的 丨初期階段。第4 :持適當且爲冕形 觸狀態之階段， 力過剩時，於壓 亩巨。 -15- (12) (12)1362993 保持最合適的接觸狀態之階段（b)及（c)的油壓係 各5〜1 Ot，可以確認在以此條件下所得的層合一體化品的 表面不會發生皺摺，而且可做爲不會品質參差不齊的輥筒 捲製品，並且可安定生產。階段（a)係油壓爲各It以下 的情形，可得知在層合一體化品的表面會發生多數的皴 摺。階段（d)係油壓爲各2 Ot以上的情形，可得知在表 面會發生多數的縱紋。 而且，在上下一對的加熱壓輥之表面粗糙度Ra爲 〇.〇1以下的狀態，大多數會發生特別是在輥筒運轉中由於 捲繞所引起的複雜之皺褶（以下稱爲線紋）、及突起物堆 積於輥筒表面，因爲這些轉印往製品而引起的凹坑（在製 品表面數十徴米的瑕疵）等，但是在將表面粗糙度Ra變 更爲0.05〜5μιη之後，也可以確認不會發生線紋及凹坑。 因此爲了在壓輥之間保持最合適的接觸狀態，而使在中央 部產生冕形狀態的熱膨脹係爲有效，而且，可得知在加熱 壓輥的表面粗糙度Ra及施加於基材的加壓力係存在有理 想的範圍。 以上說明的本發明之加熱壓輥，亦適合被使用於在塑 膠的薄膜及薄片彼此、或布、紙、金屬箔等的表面，.連續 地加熱壓著下且貼合熱可塑性樹脂、熱硬化性塑膠薄膜 類。特別理想的是使用在雙面導體型聚醯亞胺層合體的連 續製造方法’所得的層合體在做爲絕緣體的聚醯亞胺系樹 脂層之兩面，具有做爲導體的導電性金屬層，係爲外觀良 好、沒有發生皴摺而且不會品質參差不齊的輥筒捲製品， -16* (13) (13)1362993 隨著餘刻處理且高功能化的行動電話、數位相機、_航^器 及其他的各種電子機器類的小型化、輕量化之進展，而適 於做爲被使用的電子配線材料。 (產業上的利用可能性〕 本發明的雙面導體聚醯亞胺層合體之製造方法，係爲 使沒有縱紋等的外觀不良之品質安定的雙面導體聚_$胺 層合體爲輥筒捲狀態，而可連續地製造雙面導體聚醯亞胺 層合體的產業上可利用性高之製造方法。 【圖式簡單說明】 第1圖，爲顯示本發明的雙面導體聚醯亞胺層合體之 製造方法的槪略流程圖。 第2圖的（a)爲顯示加熱壓輥與基材的理想之接觸 狀態、第2圖的（b )爲顯示加熱壓輥傾斜而與基材的接 觸不良狀態之說明圖。 第3圖，爲顯示加熱壓輥的一例之槪略縱剖面圖。 第4圖（a)〜（d)爲顯示加熱壓輥的中央區域部之 冕形形狀與使輥筒間的加壓力變化時之基材的接觸狀態之 說明圖。 . ’ 【主要元件符號說明】 1 單面導體層合體 2 導電性金屬箔 -17- (14) (14)1362993 3 導引輥筒 4 導引輥筒 5 加熱壓輥 6 加熱壓輥 7 雙面導體聚醯亞胺層合體 8 導引輥筒 9 輥筒捲製品 10 氮氣空氣的處理室 11 氮密封機構 12 中心軸 13 旋轉支持構件（軸承） 14 單側加熱手段 15 中央部加熱手段 16 單側加熱手段 17 熱導管 -18-1362993 - Pair of heated press rolls (roller diameter of 300 mm < D, long example. Placed near the surface of i with the center axis horizontal, buried with heat pipe loaded with naphthalene, controlled by 36 (TC And as a heating coil from the internal heating means, the overall output (heat) is the ratio of -current (relative to the central heating coil 30%), so that the central region and the two The temperature difference on the side. In this state, in the non-pressurized state, the tile will generate thermal expansion in the shape of the crucible. It will become the lower side of the lower mandrel and pressurize the upper press roller. The method is pressed, and a rolled copper foil having a thickness of 20 μm from an insulator layer which is hardened by heating and then a polyacid is placed between the two (a thickness of 45 mm in a roll state, a width of 500 mm, And a substrate of two layers consisting of a thickness of 20 μm and a wide j copper foil (Μ 2 ) from the roll state, the vertical axis when the lamination is integrated, the inter-force force between the press rolls, and the substrate The contact state of the upper pressure roller surface shows that the figure (a) shows that the pressure is low. In the state of the crucible, the contact diagrams (b) and (c) of the seams are formed at both ends of the substrate, and the most suitable g is shown in the state in which the upper and lower pressure rollers are held together and pressed against each other. 4 (d) shows the center of the urging roller between the upper and lower pressure rollers, and the gap between the base and the substrate is 800 mm): the setting temperature of the lower heating roller J to the surface The center axis is added and set, and the flow is changed to 100%, and the coil region at both ends generates 10 °c "to confirm that the pressure roller in the center portion 5 is maintained at a medium pressure of up to 25t. The single-sided conductor layer on one side of the imine resin is rolled by 荽500 mm [pressure between the overheating rolls and the gap adjustment is shown in Fig. 4. The fourth stage is the initial stage of thermal expansion. 4: At the stage of proper and squatting, when the force is excessive, the pressure is huge. -15- (12) (12) 1362993 Maintaining the most suitable contact state (b) and (c) For each of 5 to 1 Ot, it can be confirmed that the surface of the laminated integrated product obtained under such conditions does not wrinkle, and can be used as Rolled products with uneven quality and stable production. Stage (a) is the case where the oil pressure is below each It, and it can be seen that most of the collapses occur on the surface of the laminated integrated product. d) When the oil pressure is 2 Ot or more, it is known that a large number of longitudinal stripes occur on the surface. Moreover, the surface roughness Ra of the pair of upper and lower heating rolls is 〇.〇1 or less. Most of the occurrence of complicated wrinkles (hereinafter referred to as line patterns) caused by winding, particularly in the operation of the rolls, and the accumulation of protrusions on the surface of the rolls, because of the pits caused by the transfer to the product (in Although the surface roughness Ra of the product was changed to 0.05 to 5 μm, it was confirmed that no lines and pits were formed. Therefore, in order to maintain the most suitable contact state between the press rolls, it is effective to cause the thermal expansion in the crotch state at the center portion, and the surface roughness Ra of the heated press roll and the addition to the substrate can be known. There is an ideal range for the pressure system. The heating press roll of the present invention described above is also suitably used for the surface of a plastic film and a sheet, or a cloth, a paper, a metal foil, etc., which is continuously heated and pressed, and is bonded to a thermoplastic resin, and is thermally hardened. Plastic film type. It is particularly preferable that the laminate obtained by the continuous production method of the double-sided conductor type polyimide polyimide laminate has a conductive metal layer as a conductor on both sides of the polyimide-based resin layer as an insulator. It is a roll product that looks good, does not collapse, and does not have uneven quality. -16* (13) (13) 1362993 Mobile phone, digital camera, _ navigation with high-function processing The progress of miniaturization and weight reduction of various devices and other electronic devices is suitable as an electronic wiring material to be used. (Industrial Applicability) The method for producing a double-sided conductive polyimine laminate of the present invention is a double-sided conductor poly-amine laminate having a stable appearance without longitudinal appearance or the like. In the rolled state, a manufacturing method with high industrial applicability for continuously producing a double-sided conductive polyimide film laminate can be continuously produced. [Schematic Description] FIG. 1 is a view showing a double-sided conductor polyimide of the present invention. A schematic flow chart of a method for producing a laminate. Fig. 2(a) is a view showing an ideal contact state between a heated press roll and a substrate, and Fig. 2(b) is a view showing a tilt of the heated press roll and a substrate. Fig. 3 is a schematic longitudinal cross-sectional view showing an example of a heated press roll. Fig. 4 (a) to (d) are views showing a meandering shape of a central portion of a heated press roll and Explanation of the contact state of the substrate when the pressing force between the rolls is changed. . ' [Main component symbol description] 1 Single-sided conductor laminate 2 Conductive metal foil-17- (14) (14) 1362993 3 Guidance Roller 4 Guide Roller 5 Heated Roller 6 Heated Roller 7 Double-sided Conductor Amine laminate 8 Guide roller 9 Roller product 10 Nitrogen air treatment chamber 11 Nitrogen sealing mechanism 12 Central shaft 13 Rotary support member (bearing) 14 Single-sided heating means 15 Central heating means 16 Single-sided heating means 17 Heat Catheter-18-