1360624 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於將冷卻燈的冷卻風予以循環並進行紫外 線照射的紫外線照射裝置。 【先前技術】 將從高壓水銀燈或金屬鹵化物燈等的放電燈所射出的 紫外線，照射在具有感度於紫外線的黏接劑、塗料、油墨 '光阻劑等，進行硬化或乾燥，或是相反地，進行熔融或 軟化等的各種處理。 燈是爲了防止點燈中的加熱，藉由冷卻風被冷卻，惟 最近’提案爲了減低冷卻風的消耗，提案循環冷卻風的裝 置’例如眾知有專利文獻1、專利文獻2所記載者。 在專利文獻1的第1圖，揭示著經冷卻光源燈1 1或反射 鏡12等的冷卻風，在冷卻機20被冷卻之後，藉由排氣鼓風 機22被供給到循環風路，並作成流進筐體17的光照射器的 循環空冷系統（參照例如段落[0023]的記載等）。 在專利文獻2的第1圖，表示著在燈室50，化學過濾風 扇單元12及軟管14' 16所構成的循環路徑內，循環著冷卻 水銀燈56的冷卻風的燈裝置[參照例如段落[〇〇28]的記載等 ]。在上述化學過濾風扇單元12，包含著送風部22與冷卻 機（冷卻部）2 0。 在第6圖表示記載於上述專利文獻1的紫外線照射裝置 的槪略構成，說明其動作。又，第6(a)圖是表示對於下 -4- (2) (2)1360624 述的棒狀燈的長度方向呈正交的方向的斷面圖；第6(b) 圖是表示從上方觀看第6(a)圖的裝置的圖式。 紫外線照射裝置是由：內設由燈la或反射鏡lb所構成 的光源部1的燈室10 (光照射部），及內設送風機21或冷 卻機22的副機20，及連接光照射部1〇與副機20的導管30a 、30b’及將電力供給於光照射部10與副機20的電源裝置 所構成。又，在第6圖中，爲了避免圖式變煩雜，省略了 電源裝置，而僅表示光照射部與副機。 在光照射部1 0設有：放射高壓水銀燈或金屬鹵化物燈 等紫外線的棒狀燈la，及因應於棒狀燈la的長度，反射來 自燈的紫外線的槽狀反射鏡lb所構成的光源部1。又，在 射出光照射部10的光線的一邊，設有透射來自燈la與反射 鏡1 b的紫外線的透射窗1 〇 a (例如石英窗）^ 在副機20，內設有發生燈或反射鏡lb的冷卻風的送風 機（鼓風機）21，及將冷卻燈或反射鏡而使溫度變高的冷 卻風予以冷卻冷卻機（散熱器）22，冷卻機22與送風機21 是藉由導管20a所連接。 在光照射部10與副機20，分別設有排氣口 l〇b、20b與 吸氣口 10c、20c，光照射部10的排氣口 l〇b與副機20的吸 氣口 20c是藉由導管30a所連接，又，光照射部的吸氣口 l〇c與副機20的排氣口 20b是藉由導管30b所連接。 當點亮燈1 a，則旋轉用以冷卻燈1 a及反射鏡1 b以及光 照射部10整體的送風機21，而發生冷卻風。冷卻風是從送 風機21被推出，從副機20的排氣口 20b經導管30b，之後被 (3) 1360624 送進光照射部10的吸氣口 10c。 進入光照射部10的冷卻風，是冷卻燈la與反射鏡lb及 光照射部10整體，成爲80 °C至1〇〇 °C的溫度，而從光照射 部1〇的排氣口 10b被排出。 從光照射部10所排出的冷卻風，是經導管30a，被送 到副機20的吸氣口 20c。進入副機20的冷卻風，是進入流 有冷卻水的冷卻機22而被冷卻至約40 °C。.被冷卻的冷卻風 是進入送風機21，再經導管30b之後被送進光照射部1〇。 作成如此，冷卻風是循環光照射部1 0與副機20之間。 因此，光照射裝置放在潔淨室時，作爲冷卻風，可防止大 量地消耗溫度濕度塵埃的量嚴密地被管理的洗淨空氣。 專利文獻1 :日本特開2002-235942號 專利文獻2 :日本特開平09-106076號 【發明內容】 # 在上述的第6圖的裝置中，有以下問題。 (i )在連接光照射部10與副機20的導管30a，流著將 冷卻燈la或反射鏡lb予以冷卻，而溫度上昇至80 t至1〇〇 .* °C的冷卻風之故，因而導管30a也被加熱而溫度變高。 所以’爲了防止作業人員會接觸到而成爲需要蓋體等 ，成爲裝置大型化的原因。 (ii )對於每一台光照射部，需要一台副機。副機所 需分量，會使紫外線照射裝置佔有的地板面積（足跡（ foot print))變大。又’也可考慮以—台大型副機來冷卻 (4) 1360624 複數光照射部，惟這時候，成爲需要各光照射部分配冷卻 風所用的控制機構等，而使裝置變複雜。 (iii )光照射部10與副機20是藉由兩支導管所連接， 該導管趴在空間之故，因而裝置整體變大型化而觀感也不 .· 好。 • 尤其是針對於上述（ii ) 、（ iii )，如第7圖所示地， ’在排列光照射部而將紫外線照射在大面積的領域的裝置成 φ 爲問題。 第7圖是表示從上方觀看將內設約1公尺（m)的棒狀 燈的光照射部10排列8台，並將紫外線照射在2m至2.5m四 方的領域的裝置的圖式。此種裝置，例如使用作爲黏貼大 畫面的液晶面板所用的裝置。 在8台光照射部1〇的周圍，配置有8台副機20，其中間 是藉由16支導管所連接。由同圖也可知，裝置整體變大型 化而觀感也不好。 # 本發明是爲了解決上述問題而創作者，本發明的目的 是在於提供藉由溫度上昇的冷卻風變熱的部分不會露出到 外部’又’裝置不會大型化，可減小裝置所佔有的地板面 積的紫外線照射裝置。 在本發明中’如以下地在收納光源部的筐體內，收納 送風機與冷卻機’而作成不需要副機及副機與光照射部的 導管，來解決上述課題。 (1)具透射紫外線的透射窗的筐體內，設置具有燈 ’與反射來自該燈的紫外線的反射鏡的光源部，在該筐體 (5) (5)1360624 內，設置發生將上述燈與反射鏡予以冷卻的冷卻風的送風 機，及將該冷卻風予以冷卻的冷卻機。 在上述光源部的反射鏡的頂部，設有流動冷卻風的開 口部；上述冷卻機是配置於上述燈與上述反射鏡的開口部 上方；從上述送風機所送出的冷卻風是經形成於上述光源 部與上述筐體之間的通風路，被導入至光源部內而冷卻光 源部內；從該光源部所出來的冷卻風是從上述開口部被導 入到冷卻機，在冷卻機被冷卻，之後被送回上述送風機。 (2) 在上述（1)中，在上述筐體內，設有複數上述 光源部，在各光源部分別設有送風機與冷卻機。 (3) 在上述（1) 、（2)中，在上述反射鏡的開口 部與上述冷卻機之間，設有對應於冷卻機的大小的承盤兼 遮光板。 在本發明中，可得到以下的效果。 (1 )由燈與反射鏡所構成的光源部，與冷卻機或送 風機一起被設在筐體中，因在光源部內上昇溫度的冷卻風 ，是經反射鏡的開口部被導入至冷卻機而被冷卻，因此， 上昇溫度的冷卻風不會沿著筐體的外壁流動的情形。 所以，筐體的外壁溫度是被保持在較低溫度，不必使 用特別的冷卻機構或防熱蓋體。 (2)送風機或冷卻機是與光源部一起被收納在筐體 中，而不需副機。所以連接光照射部與副機的導管成爲不 需要，觀感變好。又，裝置所佔有的地板面積也變小，而 可謀求裝置的小型化。 (6) (6)1360624 (3) 因冷卻風循環筐體內，因此光照射裝置放在潔 淨室時與設在副機的習知例的裝置同樣，可防止爲了供給 冷卻風而大量地消耗嚴密地被管理溫度濕度塵埃之量的清 淨空氣的情形。 (4) 於一個筐體中設置複數光源部，若於各光源部 分別設置送風機與冷卻機，也可容易地適用排列複數光照 射部而將紫外線照射在大面積的領域的裝置，也不會使裝 置成爲大型化。 (5) 藉由在反射鏡的開口與冷卻機之間，設置對應 於冷卻機大小的承盤兼遮光板，即使被冷卻而冷卻風結露 時，或是從冷卻機漏出冷卻水時，也不會在燈上有水滴的 情形。 - 又，來自燈的光線是在承盤兼遮光板被遮光。所以， 可防止來自燈的光經反射鏡的開口部與冷卻機的間隙而洩 漏在筐體內，作爲迷光而對於設在筐體內的電纜、機器類 等於予不良影響的情形。 【實施方式】 第1圖及第2圖是表示本發明的第1實施例的紫外線照 射裝置的構成的圖式。第1圖是表示正交於燈的長度方向 的方向的斷面圖；第2圖是表示沿著燈的長度方向的方向 的斷面圖。又’第1圖及第2圖都省略表示電源裝置。 如第1圖及第2圖所示地，本實施例的紫外線照射裝置 是設置：具有燈la與反射來自燈la的紫外線的反射鏡115的 (7) (7)1360624 光源部1，及將冷卻風予以冷卻的冷卻機2(散熱器），及 圍繞發生冷卻風的送風機3 (鼓風機）的三個單元方式， 具有透射從光源部1所射出的紫外線的透射窗6a的筐體6。 在筐體6與光源部1之間設有間隙，此爲構成通風路。 設於光源部1的燈1 a，是例如有效率地放射紫外線的 棒狀高壓水銀燈或金屬鹵化物燈。反射鏡lb是如第1圖及 第2圖所示地朝與棒狀燈的長度方向相同方向延伸的斷面 呈橢圓形狀的槽狀反射鏡，形成有效率優異地反射從燈la 所放射的紫外線的多層膜》 在反射鏡1 b的頂部，形成有朝與棒狀燈的長度方向相 同方向延伸的開口（冷卻風通風孔）lc，而在冷卻風通風 孔lc的上部，設有用以冷卻將燈la或反射鏡lb予以冷卻而 溫度變高的冷卻風的冷卻機（散熱器）2。亦即，燈1 a與 設於上述反射鏡lb的冷卻風通風孔lc與冷卻機是配置在一 直線上。 在上述冷卻機2流著冷卻水，若溫度變高的冷卻風通 過內部，則藉由熱交換被冷卻。 在散熱器2，及燈1 a與反射鏡1 b所構成的光源部1之間 ，設有承盤兼遮光板5。 承盤兼遮光板5是具有藉由散熱器使冷卻風結露時， 或散熱器2漏水時用以接受水的承盤的功能，而且具有用 以防止來自燈la的光線洩漏至筐體6內的遮光板的功能。 亦即，若沒有承盤兼遮光板5，則來自燈1 a的光線是 如第3圖所示地經上述冷卻風通風孔1 c及冷卻機2的散熱片 -10- (8) 1360624 2a的間隙而洩漏到筐體6內成爲迷光，而有給予配線在筐 體6內的電纜類或機器不良影響的可能性，惟設置承盤兼 遮光板5，就可防止漏光。 上述承盤兼遮光板5是具有對應於冷卻機的大小成爲 ' 水滴不會沾於燈，又，來自燈1 a的光線不會洩漏到筐體6 . 內方式設成覆蓋反射鏡lb的開口部》 又，在承盤兼遮光板5，安裝有漏水感測器（未圖示 φ )，若檢測漏水，則裝置是熄滅燈之同時，停止對於散熱 器2的供水。又，承盤兼遮光板5是即使散熱器內的冷卻水 全部漏掉也能接住的容量方式，計算出其深度。 在散熱器2的更上方，設有發生將燈ia或反射鏡^等 的冷卻風的送風機（鼓風機）3。 光源部1，冷卻機2(散熱器），送風機3(鼓風機） 的3件單元，是藉由筐體6所圍繞。在光源部1與筐體6有間 隙，而該間隙成爲冷卻風通風孔4。 φ 又在筐體6的射出光源部1的紫外線之一邊，設有透 射紫外線的光透射窗6a。光透射窗6a是例如石英窗，或是 形成有僅透射時定波長的多層膜的波長選擇濾波器，例如 / 紅外線截止濾波器所構成。 來自光線部1的燈la的紫外線，或是藉由反射鏡lb所 反射的紫外線是經由該光透射窗6&而由紫外線照射裝置射 出’而被照射在進行紫外線處理的工件W。 藉由第1圖及第2圖，針對於冷卻風的流動加以說明。 燈1a被點亮之同時，旋轉鼓風機3，藉由此，發生將 -11 - (9) 1360624 燈la或反射鏡ib等予以冷卻的冷卻風。 冷卻風是從光源部1的光射出側，亦即從 方的開口部吹進，而冷卻燈la及反射鏡lb等。 度上昇至約80°C至l〇〇°C，而流進設於反射鏡 卻風通風孔1 c。 流進冷卻風通風孔lc的冷卻風，迂迴承盘 後進入散熱器2。在散熱器7中，溫度變高的冷 交換被冷卻，降低至大約40 °C。 降低溫度的冷卻風，是藉由鼓風機3從筐f ，經形成於光源部1與筐體6之間的通風路，從 爲冷卻風再被送進光源部1內。 從光源部1的燈至散熱器2爲止的連接部分 承盤兼遮光板的部分）的外壁，是溫度上昇的 內部之故，因而溫度變高。 但是，流在光源部1與筐體6之間的冷卻風 2被冷卻的冷卻風，沿著該部分的外壁而流動 有降低該部分的溫度的作用。藉由此，可降售 〇 又，冷卻風經常地流在光源部1與筐體6之 而使得光源部1的溫度高部分的熱’不容易傳3 可防止筐體6的溫度變高的情形。 如上述地，可將筐體6的外側’亦即可將 裝置的外側溫度抑制較低，而於筐體6的外側 特別的冷卻機構或防熱蓋體。 反射鏡lb下 冷卻風是溫 lb頂部的冷 i兼遮光板5 卻風藉由熱 I 6內被送出 光射出側作 (於內部設 冷卻風流在 是在冷卻機 之故，因而 【體6的溫度 間之故，因 ill筐體6，而 紫外線照射 ’不必使用 -12- (11) 1360624 的斷面圖。又，沿著燈的長度方向的方向的斷面圖是與上 述第2圖同樣。 將紫外線照射在廣泛領域時，排列複數如第1圖及第2 圖所示的裝置也可以，惟如第4圖所示地，將複數光源部 \ ’以及將對於各光源部1所設置的散熱器2與鼓風機3—起 • ，被收納在一個筐體6內也可以。這時候，筐體6內的空氣 ，是具有作爲冷卻複數光源部1的冷卻風。 φ 在第5圖中，從各鼓風機3所送出的冷卻風，是通過光 源部1與筐體6之間隙，或是光源部1彼此間的間隙（通風 路4)，之後從光源部1的光射出側被送進複數光源部1， 進行冷卻燈1 a及反射鏡1 b等。冷卻風是從冷卻風通風孔1 c 迂迴承盤兼遮光板5而進入散熱器2,藉由熱交換被冷卻。 降低溫度的冷卻風，是藉由鼓風機3從筐體6內被送出 ，經形成於光源部1與筐體6之間的通風路，從光射出側作 爲冷卻風再被送進光源部1內。 • 在本實施例中，如上述地，因將複數光源部1收納在 一個筐體內’因此可減少筐體6的數量，可將裝置整體作 ' 成小型化而可降低成本》 【圖式簡單說明】 第1圖是表示本發明的第1實施例的紫外線照射裝置的 構成圖式（1 )。 第2圖是表示本發明的第1實施例的紫外線照射裝置的 構成圖式（2 )。 -14- (12) (12)1360624 第3圖是表示來自燈的光線洩漏到筐體內的情形的圖 式。 第4圖是表示第1實施例的變形例的圖式。 第5圖是表示本發明的第1實施例的紫外線照射裝置的 構成圖式。 第6 (a)圖及第6(b)圖是表不由光照射部與副機所 構成的習知例的圖式。 弟7圖是表不排列複數習知的光照射部的情形的構成 例的圖式。 【主要元件符號說明】 1 :光源部 1 a :燈 1 b :反射鏡 2 :冷卻機（散熱器） 3 :送風機（鼓風機） 、 5 :承盤兼遮光板 6 :筐體 6 a :光透射窗 -15-1360624 (1) Description of the Invention [Technical Field of the Invention] The present invention relates to an ultraviolet irradiation device that circulates a cooling air of a cooling lamp and performs ultraviolet irradiation. [Prior Art] Ultraviolet rays emitted from a discharge lamp such as a high-pressure mercury lamp or a metal halide lamp are irradiated to an adhesive having a sensitivity to ultraviolet rays, a paint, an ink, a photoresist, etc., to be hardened or dried, or vice versa. Various treatments such as melting or softening are performed. In order to prevent the heating in the lighting, the lamp is cooled by the cooling air. Recently, it has been proposed to disclose the cooling air in order to reduce the consumption of the cooling air. For example, Patent Document 1 and Patent Document 2 are known. In the first drawing of Patent Document 1, the cooling air that has been cooled by the light source lamp 11 or the mirror 12 is cooled, and after the cooler 20 is cooled, it is supplied to the circulation air path by the exhaust blower 22, and is made into a flow. The circulating air cooling system of the light illuminator that enters the casing 17 (see, for example, the description of paragraph [0023]). In the first diagram of Patent Document 2, a lamp device for cooling the cooling wind of the mercury lamp 56 is circulated in the circulation path formed by the lamp chamber 50, the chemical filter fan unit 12, and the hose 14'16 [see, for example, paragraph [ 〇〇28] record, etc.]. The chemical filter fan unit 12 includes a blower unit 22 and a cooler (cooling unit) 20 . The schematic configuration of the ultraviolet irradiation device described in Patent Document 1 is shown in Fig. 6, and the operation thereof will be described. Further, Fig. 6(a) is a cross-sectional view showing a direction in which the longitudinal direction of the rod-shaped lamp described in the following -4-(2) (2) 1360624 is orthogonal; and Fig. 6(b) is a view from above Look at the diagram of the device in Figure 6(a). The ultraviolet irradiation device is composed of a lamp chamber 10 (light irradiation portion) in which the light source unit 1 composed of the lamp la or the mirror lb is housed, a sub unit 20 in which the blower 21 or the cooler 22 is provided, and a connection light irradiation unit. The ducts 30a and 30b' of the sub unit 20 and the power supply unit that supplies electric power to the light irradiating unit 10 and the sub unit 20 are configured. Further, in Fig. 6, in order to prevent the drawing from becoming cumbersome, the power supply unit is omitted, and only the light irradiation unit and the slave unit are shown. The light-irradiating portion 10 is provided with a rod-shaped lamp 1a that emits ultraviolet rays such as a high-pressure mercury lamp or a metal halide lamp, and a light source formed by a groove-shaped mirror lb that reflects ultraviolet rays from the lamp in accordance with the length of the rod-shaped lamp 1a. Department 1. Further, a transmissive window 1 〇a (for example, a quartz window) that transmits ultraviolet rays from the lamp 1a and the mirror 1b is provided on one side of the light that is emitted from the light-irradiating portion 10, and the sub-machine 20 is provided with a lamp or reflection. The blower (blower) 21 of the cooling air of the mirror lb and the cooling wind which raises the temperature by cooling the lamp or the mirror are cooled by the cooler (heat sink) 22, and the cooler 22 and the blower 21 are connected by the duct 20a. . The light irradiation unit 10 and the sub unit 20 are provided with exhaust ports l〇b and 20b and intake ports 10c and 20c, respectively, and the exhaust port l〇b of the light irradiation unit 10 and the intake port 20c of the sub unit 20 are The suction port 10c of the light irradiation unit and the exhaust port 20b of the sub unit 20 are connected by the duct 30b by being connected by the duct 30a. When the lamp 1a is lit, the blower 21 for cooling the lamp 1a, the mirror 1b, and the entire light-irradiating portion 10 is rotated to generate a cooling air. The cooling air is pushed out from the blower 21, passes through the duct 30b from the exhaust port 20b of the sub unit 20, and is then sent to the intake port 10c of the light irradiating portion 10 by (3) 1360624. The cooling air entering the light irradiation unit 10 is the temperature of the cooling lamp 1a, the mirror lb, and the light irradiation unit 10, and is at a temperature of 80 ° C to 1 ° C, and is exhausted from the exhaust port 10 b of the light irradiation unit 1 . discharge. The cooling air discharged from the light irradiation unit 10 is sent to the intake port 20c of the sub unit 20 via the duct 30a. The cooling air entering the sub-machine 20 is cooled to about 40 ° C by entering the cooler 22 in which the cooling water flows. The cooled cooling air enters the blower 21 and is sent to the light irradiation unit 1 via the duct 30b. In this manner, the cooling air is between the circulating light irradiation unit 10 and the sub unit 20. Therefore, when the light irradiation device is placed in the clean room, as the cooling air, it is possible to prevent the consumption of the clean air in which the amount of temperature and humidity dust is consumed in a large amount. Patent Document 1: JP-A-2002-235942 Patent Document 2: Japanese Laid-Open Patent Publication No. Hei No. 09-106076. The invention has the following problems. (i) in the duct 30a connecting the light-irradiating portion 10 and the sub-machine 20, the cooling lamp la or the mirror lb is cooled, and the temperature rises to a cooling wind of 80 t to 1 〇〇.* °C. Therefore, the duct 30a is also heated and the temperature becomes high. Therefore, in order to prevent the operator from coming into contact, it is necessary to cover the body, which causes a large size of the device. (ii) For each light irradiation unit, one auxiliary machine is required. The required amount of the auxiliary machine will increase the floor area (foot print) occupied by the ultraviolet ray irradiation device. Further, it is also conceivable to cool the (4) 1360624 plural light-irradiating portion by a large-scale auxiliary machine. However, at this time, a control mechanism or the like for the cooling portion of each light-irradiating portion is required, and the device is complicated. (iii) The light-irradiating portion 10 and the sub-machine 20 are connected by two conduits, and the conduit is in a space, so that the entire apparatus is enlarged and the look is not good. In particular, in the above (ii) and (iii), as shown in Fig. 7, the device in which the ultraviolet ray is irradiated to the large-area area is a problem. Fig. 7 is a view showing a device in which eight light-emitting portions 10 each having a rod-shaped lamp of about 1 m (m) are arranged in a row and ultraviolet rays are irradiated in a region of 2 m to 2.5 m. Such a device is used, for example, as a device for a liquid crystal panel to which a large screen is pasted. Eight sub-machines 20 are disposed around the eight light-irradiating portions 1A, and the middle portion thereof is connected by 16 ducts. As can be seen from the same figure, the overall size of the device is increased and the look and feel is not good. The present invention has been made to solve the above problems, and an object of the present invention is to provide a portion in which a cooling air heated by an increase in temperature does not be exposed to the outside, and the device does not become large, and the device can be reduced. The floor area of the UV irradiation device. In the present invention, the above-described problem is solved by arranging a blower and a cooling machine in a casing accommodating the light source unit, and forming a duct that does not require a sub-machine and a sub-machine and a light-irradiating portion. (1) A light source portion having a lamp 'and a mirror that reflects ultraviolet rays from the lamp is provided in a casing having a transmission window that transmits ultraviolet rays, and the lamp is disposed in the casing (5) (5) 1360624 A blower for cooling the cooling air cooled by the mirror, and a cooler for cooling the cooling air. An opening for flowing a cooling air is provided at a top of the mirror of the light source unit; the cooler is disposed above the lamp and the opening of the mirror; and the cooling air sent from the blower is formed on the light source The air passage between the portion and the casing is introduced into the light source unit to cool the inside of the light source unit, and the cooling air from the light source unit is introduced into the cooler from the opening, cooled by the cooler, and then sent. Go back to the above blower. (2) In the above (1), the plurality of light source units are provided in the casing, and a blower and a cooler are provided in each of the light source units. (3) In the above (1) and (2), between the opening portion of the mirror and the cooler, a retainer and a light blocking plate corresponding to the size of the cooler are provided. In the present invention, the following effects can be obtained. (1) The light source unit including the lamp and the mirror is provided in the casing together with the cooler or the blower, and the cooling air that rises in temperature in the light source unit is introduced into the cooler through the opening of the mirror. It is cooled, and therefore, the cooling air of the rising temperature does not flow along the outer wall of the casing. Therefore, the outer wall temperature of the casing is kept at a lower temperature, and it is not necessary to use a special cooling mechanism or a heat-resistant cover. (2) The blower or the cooler is housed in the casing together with the light source unit without the need for an auxiliary machine. Therefore, it is not necessary to connect the light-irradiating portion and the catheter of the auxiliary machine, and the look and feel is improved. Further, the floor area occupied by the apparatus is also reduced, and the size of the apparatus can be reduced. (6) (6) 1360624 (3) Since the cooling air circulates in the casing, when the light-irradiating device is placed in the clean room, the device can be prevented from being consumed in a large amount in order to supply the cooling air, as in the conventional device provided in the auxiliary machine. The situation where the ground is managed by the amount of clean air of temperature and humidity. (4) A plurality of light source units are provided in one housing, and if a blower and a cooler are provided in each of the light source units, it is also possible to easily apply a device in which a plurality of light irradiation units are arranged to irradiate ultraviolet rays in a large area. The device is enlarged. (5) By placing a retainer and a visor corresponding to the size of the cooler between the opening of the mirror and the cooler, even if the cooling air is dew condensation while being cooled, or when the cooling water leaks from the cooler, There will be water droplets on the lamp. - Again, the light from the lamp is blocked by the platter and the visor. Therefore, it is possible to prevent light from the lamp from leaking into the casing through the gap between the opening of the mirror and the cooler, and it is a case where the cable or the device provided in the casing is adversely affected as a flare. [Embodiment] Figs. 1 and 2 are views showing the configuration of an ultraviolet ray irradiation apparatus according to a first embodiment of the present invention. Fig. 1 is a cross-sectional view showing a direction orthogonal to the longitudinal direction of the lamp, and Fig. 2 is a cross-sectional view showing a direction along the longitudinal direction of the lamp. Further, the first and second figures are omitted to show the power supply device. As shown in Fig. 1 and Fig. 2, the ultraviolet irradiation device of the present embodiment is provided with (7) (7) 1360624 light source unit 1 having a lamp la and a mirror 115 that reflects ultraviolet rays from the lamp 1a, and The cooling unit 2 (heat sink) that cools the cooling air and the three-unit unit that surrounds the blower 3 (blower) that generates the cooling air have a casing 6 that transmits the transmission window 6a of the ultraviolet light emitted from the light source unit 1. A gap is provided between the casing 6 and the light source unit 1, which constitutes a ventilation path. The lamp 1a provided in the light source unit 1 is, for example, a rod-shaped high-pressure mercury lamp or a metal halide lamp that emits ultraviolet rays efficiently. The mirror lb is a groove-shaped mirror having an elliptical cross section extending in the same direction as the longitudinal direction of the rod lamp as shown in Figs. 1 and 2, and is highly efficiently reflected from the lamp la. Ultraviolet multilayer film>> At the top of the mirror 1b, an opening (cooling air vent) lc extending in the same direction as the longitudinal direction of the rod lamp is formed, and at the upper portion of the cooling air vent lc is provided for cooling A cooling fan (heat sink) 2 that cools the lamp la or the mirror lb to a high temperature. That is, the lamp 1 a and the cooling air vent lc provided in the above-mentioned mirror lb are arranged in a line with the cooler. Cooling water flows through the cooler 2, and if the cooling air having a high temperature passes through the inside, it is cooled by heat exchange. A heat retaining plate 5 is provided between the heat sink 2 and the light source unit 1 including the lamp 1 a and the mirror 1 b. The platter and the visor 5 are functions for receiving the water when the cooling air is dew condensation by the radiator or for receiving the water when the radiator 2 leaks, and for preventing the light from the lamp la from leaking into the casing 6. The function of the visor. That is, if there is no platter and visor 5, the light from the lamp 1a is through the cooling vent vent 1c and the heat sink of the chiller 2 as shown in Fig. 3 (8) 1360624 2a The gap leaks into the casing 6 to become lost, and there is a possibility that the wiring or the machine in the casing 6 is adversely affected. However, if the retainer and the light shielding plate 5 are provided, light leakage can be prevented. The above-mentioned retainer and visor 5 has a size corresponding to the size of the cooler, so that the water droplets do not stick to the lamp, and the light from the lamp 1a does not leak to the casing 6. The internal mode is set to cover the opening of the mirror lb. Further, a water leakage sensor (not shown as φ) is attached to the retainer and the light shielding plate 5. When the water leakage is detected, the device turns off the light and stops the water supply to the heat sink 2. Further, the retainer and the visor 5 is a capacity type that can be caught even if all the cooling water in the radiator is leaked, and the depth is calculated. Further, above the radiator 2, a blower (blower) 3 that generates cooling air such as a lamp ia or a mirror is provided. The three units of the light source unit 1, the cooler 2 (heat sink), and the blower 3 (blower) are surrounded by the casing 6. The light source unit 1 has a gap with the casing 6, and the gap serves as the cooling air vent hole 4. Further, φ is provided with a light transmission window 6a for transmitting ultraviolet rays on one side of the ultraviolet light emitted from the light source unit 1 of the casing 6. The light transmission window 6a is, for example, a quartz window or a wavelength selective filter formed of a multilayer film of a fixed wavelength only, for example, an infrared cut filter. The ultraviolet rays from the lamp 1a of the light unit 1 or the ultraviolet rays reflected by the mirror lb are emitted through the light transmission window 6& and are irradiated by the ultraviolet irradiation device to be irradiated onto the workpiece W subjected to the ultraviolet treatment. The flow of the cooling air will be described with reference to Figs. 1 and 2 . While the lamp 1a is turned on, the blower 3 is rotated, whereby the cooling air for cooling the -11 - (9) 1360624 lamp or the mirror ib or the like occurs. The cooling air is blown from the light emitting side of the light source unit 1, that is, from the opening of the side, and the cooling lamp la and the mirror lb are cooled. The degree rises to about 80 ° C to l 〇〇 ° C, and flows into the mirror ventilating hole 1 c. The cooling air flowing into the cooling air vent lc enters the radiator 2 after being returned to the retainer. In the radiator 7, the cold exchange in which the temperature becomes high is cooled to about 40 °C. The cooling air having a reduced temperature is sent from the basket f through the air passage portion 1 to the air passage portion 1 and the casing 6 through the air passage portion 3, and is again sent into the light source portion 1 as cooling air. The outer wall of the portion from the lamp of the light source unit 1 to the heat sink 2 to the portion of the heat retaining plate and the light shielding plate is inside the temperature rise, so that the temperature is increased. However, the cooling air which is cooled by the cooling air 2 flowing between the light source unit 1 and the casing 6 flows along the outer wall of the portion to lower the temperature of the portion. By this, it is possible to reduce the sales of the casing, and the cooling air often flows through the light source unit 1 and the casing 6 so that the heat of the high temperature portion of the light source unit 1 is not easily transmitted, and the temperature of the casing 6 can be prevented from becoming high. situation. As described above, the outer side of the casing 6 can suppress the temperature of the outer side of the apparatus to a low level, and a special cooling mechanism or a heat-resistant cover on the outer side of the casing 6. The cooling air under the mirror lb is the cold i and the visor 5 at the top of the temperature lb. However, the wind is sent out from the side of the light I 6 through the heat I 6 (the cooling air flow inside is in the cooler, so the body 6 Between the temperatures, the illuminate of the il case 6 does not require the use of the cross-sectional view of -12-(11) 1360624. The cross-sectional view along the longitudinal direction of the lamp is the same as that of the second figure. When ultraviolet rays are irradiated in a wide range of fields, a plurality of devices as shown in Figs. 1 and 2 may be arranged. However, as shown in Fig. 4, the plurality of light source sections \ ' and the light source section 1 will be provided. The heat sink 2 and the blower 3 may be housed in one of the casings 6. At this time, the air in the casing 6 has cooling air as the cooling of the plurality of light source units 1. φ In Fig. 5 The cooling air sent from each of the air blowers 3 is a gap between the light source unit 1 and the casing 6, or a gap between the light source units 1 (ventilation path 4), and then is sent from the light exit side of the light source unit 1. The plurality of light source units 1 perform cooling lamps 1 a, mirrors 1 b, etc. The cooling air is from the cooling air. The air hole 1 c is returned to the heat retaining plate 5 and enters the heat sink 2, and is cooled by heat exchange. The cooling air whose temperature is lowered is sent out from the casing 6 by the blower 3, and is formed in the light source unit 1 and The air passage between the casings 6 is sent to the light source unit 1 as a cooling air from the light exit side. • In the present embodiment, as described above, the plurality of light source units 1 are housed in one casing. The number of the casings 6 can be reduced, and the entire device can be reduced in size and cost can be reduced. [Brief Description] FIG. 1 is a view showing the configuration of the ultraviolet irradiation device according to the first embodiment of the present invention (1). Fig. 2 is a view showing a configuration (2) of the ultraviolet irradiation device according to the first embodiment of the present invention. -14- (12) (12) 1360624 Fig. 3 is a view showing a case where light from a lamp leaks into the casing. Fig. 4 is a view showing a modification of the first embodiment. Fig. 5 is a view showing a configuration of an ultraviolet irradiation device according to a first embodiment of the present invention. Fig. 6(a) and 6 (b) The figure is a diagram showing a conventional example in which the light irradiation unit and the sub unit are not formed. A diagram showing a configuration example of a case where a plurality of conventional light irradiation units are not arranged. [Description of main element symbols] 1 : Light source unit 1 a : Lamp 1 b : Mirror 2 : Cooler (heat sink) 3 : Air blower (blower) ) , 5 : retainer and visor 6 : housing 6 a : light transmission window - 15 -