TWI358742B - Wafer container door with particulate collecting s - Google Patents

Description

1358742 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a substrate container. More specifically, the present invention relates to a substrate container door having a textured structure for trapping and preventing the circulation of particles or particles generated within the container. [Prior Art]

Substrate containers are used in the semiconductor processing industry to store and transport semiconductor wafers, flat flat substrates, and film frames. Examples of containers used in the semiconductor processing industry are F 0 U P s (front open unified pods), FOSBs (front open transport boxes), and SMIF (standardized mechanical interface) pods. Such containers typically have an open bottom or side outer casing that is hermetically closed by a door. The door often has an interior compartment with a latching mechanism that can be seen through a clear or transparent plastic door panel, which is typically formed from polycarbonate. The processing of semiconductor wafers into finished electronic components typically requires many processing steps during which wafers must be manipulated and processed. Wafers are very valuable, very fine, and easily damaged by physical and electrical shocks. In addition, successful high-volume processing requires maximum cleanliness and is free of particles or particulates and other contaminants. Because of this need, specialized containers or vehicles have been developed for use during processing, handling, and transport of wafers. These containers protect the wafer from physical and electrical hazards and are sealable to protect the wafer from contamination. Such wafer carriers or containers typically include a housing having a plurality of wafer holding spacers on the inside thereof. One side of the container is open for access and can be closed by a door. The door is usually 312XP / invention manual (supplement) /94-07/94112231 5 5

1358742 has a latching mechanism to hold and seal the door in place. The through 1 latch mechanism is wrapped around to protect it from damage and accidental actuation. Although the wafer housing is used in a clean environment, undesirable contaminants can accumulate on the housing and the housing after a period of time. Particle contaminants are produced by frictional contact between components of the outer casing and from the loading and unloading of wafers from the outer casing. Accordingly, an important feature of the wafer container is that it is completely cleanable to ensure that the processing remains clean. Cleaning is usually done in a one-solution solution and the parts are dried afterwards with compressed air or other gases. Semiconductor wafer fabrication processes are often very sensitive to any contamination system. Dyeing energy can be produced in a number of ways, for example, by sliding contact within a substrate container door via a member such as a latch mechanism assembly. When the substrate container is timed out, it can generate and accumulate particles. After timeout, particle formation can result in visible dirt, spots, and/or darkness of the visible plastic door panel. Although undesired aesthetic results occur, the contamination and particles or sub-entries also enter the outer casing. And the risk of polluting the crystal ring. Because the general problems described above cannot be solved by conventional wafer containers, there is a need for a wafer container that overcomes the problems and drawbacks inherent in conventional designs. SUMMARY OF THE INVENTION A wafer container of a specific example of the present invention provides collection and capture by providing The particle capture properties of the particles or microparticles substantially overcome the aforementioned problems of conventional design and substantially mitigate the negative visual effects of such particles and contamination. A wafer container having an outer casing having an access opening for inserting and removing the wafer into the interior of the outer casing, and a door bottom plate configured to selectively close the opening. In the S Μ IF pod configuration, the door pack is made up of a smear-preserving scorpion with a 312 ΧΡ / invention specification (supplement) / 94-07/94 丨 12231 6 8 1358742 The top wall of the perimeter wall from which it extends downward defines the interior of a door panel. The wafer container includes a latch mechanism operatively coupled to the bottom plate, the latch mechanism being configured to operatively secure the bottom plate to the opening. The wafer container also includes a flat plate having a particle trapping region defined on an inner surface of the flat plate, the flat plate being configured to detachably couple the bottom plate such that when the flat plate is coupled to the bottom plate, the inner surface is The bottom plate is defined as a bottom plate interior in which particles or particles produced by the latching mechanism are captured by the particle capture area.

The characteristics and advantages of the specific examples of the present invention are that the particles or particles are trapped by the isolated textured region and are prevented from circulating in the door and possibly in contact with the wafer. The characteristics and advantages of the specific examples of the present invention are such that the accumulation of particles exemplified by dirt or darkness on the transparent surface can be eliminated or reduced. [Embodiment] The substrate container 20 for carrying a substrate is shown in Fig. 1-3. Referring to Figure 2, the wafer container 20 generally includes a housing 22 having a door frame 24 defining an access opening 26 for accessing the interior 28 of the container 20, having a plurality of slots for receiving and holding wafers (not shown). The latch 3 0 of 3 2 and the door 40 for sealingly closing the access opening 26 . The door 40 generally includes a door bottom plate portion 40A and a flat plate portion 40B. Door 40 can include a plurality of kinematic coupling slots 41 for positioning and securing container 20 on a piece of processing equipment (not shown). The door 40 may also include a positioning structure 4 1 A for receiving and holding the cassette 30. Referring to Figure 3, the door 40 can include a top wall 42 and a peripheral wall 44 extending away from the top wall 42. The perimeter wall 44 and the top wall 42 define an interior space 46 of the door 40. Door 312XP/Invention Manual (Refill)/94-07/94112231 7 8 1358742 40 may include a gasket 46 for sealingly engaging the outer casing portion 22 along the door periphery 47A. A door guide 47B can be provided at each corner 47C to accurately position the door 40 in the door frame 24. The door 40 can also include at least one latch mechanism 50 mounted in the interior space 46 of the door 40 for securing the door 40 in the door frame 24 of the housing 22. The latch mechanism 50 can include a pair of latch arms 5 2 (A ), 5 2 (B) that are rotationally coupled to a lower surface (not shown) of the top wall 42. Each of the latch arms 5 2 ( A ), 5 2 ( B ) retractably extends through an opening 4 4 A in the peripheral wall 44 of the door 40 and is each configured to latch to the housing 2 2 The door frame 2 4 is used to fix the door 40 in the door frame 24. The cam 53 is rotatably coupled to the lower surface of the top wall 42 and coupled to each of the latch arms 5 2 ( A ), 5 2 ( B ) so that the rotation of the cam 5 simultaneously moves each latch An example of a wafer container in which the arms 5 2 ( A ), 5 2 ( B ) have a latch 43A laterally through the opening to engage the latch frame 24 or the door from which it is disengaged from the lock mechanism is disclosed in the applicant. U.S. Patent No. 6, 7 4 9 , 0,7, which is incorporated herein by reference. Although the actuating portion of the latch mechanism 50 is described herein and illustrated as a rotating cam, any other suitable member or mechanism that can apply a linear sliding action to the latch arms 5 2 (A), 5 2 (B) can be used. , including a rail and pinion mechanism such as that set forth in PCT Application No. W 0 0 1 / 0 4 0 2 2 A 1 , which will also be incorporated herein by reference. Further description of a cam-operated latching mechanism suitable for use with the various embodiments of the present invention is disclosed in U.S. Patent No. 6,7 1 2, 2 1 3 and the commonly-owned patent application 歹|J No. 10/317 Each of the aforementioned patents and applications are hereby incorporated by reference. 312XP/Invention Manual (supplement)/94-07/94112231 8 1358742

Referring to Figures 3 through 5, a plate 4 Ο B in the form of a transparent plate 70 is removably coupled to the peripheral wall 44 of the door 40 to enclose the interior 48. The clip 70A engages in the receiving structure 70B on the bottom plate 40A. Although the flat plate 70 is transparent in a specific example, the flat plate 70 may be non-transparent and does not depart from the scope of the present invention. The plate 70 has an upper or inner side surface 72 as shown in Figures 3 and 4 and a lower or outer side surface 74 as shown in Figures 1 and 2. When coupled to the peripheral wall 44 of the door 40, the upper surface 72 of the plate 70 faces the interior 46 of the door 40. In one embodiment of the invention, the plate 70 has an extension through which it passes through a pair of openings VII to provide access to the cam 53. As shown particularly in Figure 5, the pair of openings 76 can have a substantially oboval configuration, but can be other configurations as well. In one embodiment, the inner surface 72 of the transparent plate 70 may include a particle capture region 75 in the form of a discrete textured region 80 for capturing and preventing the application of particles or particles. It is produced by moving the components mounted in the interior 46 or any other part of the door 40 or the transparent plate 70 facing each other. Although the textured regions 80 are isolated in a particular embodiment, a majority of the textured regions 80 can be distributed over the interior surface 72 without departing from the scope of the present invention. The 'discrete textured portion 80 of the transparent plate 70 can be disposed anywhere on the interior surface 72 of the transparent plate 70. As particularly shown in Figures 4 through 7, the textured portion 80 is generally disposed adjacent to the cam 53 and the proximal opening 74». In a different embodiment, the textured region 80 can be configured to be substantially adjacent to any moving component such that The resulting particles or particles fall within the textured region 80 and are trapped therein. In another embodiment of the invention, the degree of change in the inner side surface 72 is textured. The textured region 80 having a textured group suitable for such a load-bearing surface can also function as a load bearing surface for the textured region of the state of the invention. Any mechanical, chemical or optical treatment can be used to apply a texture within the inside surface 7 2 of the transparent plate 70. For example, the textured region 80 is typically molded, but in some applications; such as etching or laser cutting may also be suitably employed. Also for example, a preform or film having suitable texture and surface properties can be insert molded into an outer cover. The pre-shaped web portion can also function as a load bearing surface. Other processing methods can also be used without departing from the scope of the invention.

Referring to Figures 6a through 9b, various textures can be used to create the textured regions 80. For example, as shown in Figures 6a, 6b, the inner side surface 72 of the transparent plate 70 can be constructed of a plurality of concentric ribs 73. As shown in Figure 6b, the concentric ribs 7 3 can have a substantially undulating cross-sectional geometry. In the different embodiments of Figures 7a, 7b, 8, the textured region 80 may comprise linear ribs 81. The linear ribs can have varying cross-sectional geometries. For example, as shown in Figure 7b, a V-notch lateral brake face geometry can be formed in the inside surface 72 to form the textured surface 80 of the particle capture zone 75. As shown in Figure 8, a square notch cross-sectional geometry can also be formed. In another embodiment, as shown in Figure 9a, cross-hat ribs 83 can be formed on the inner side surface 72 of the transparent plate 70 to form the textured surface 80 of the particle-trapping region 75. Irregular and/or composite cross-sectional geometries may also be formed on the inner side surface 72 to form the textured surface 80 of the particle capture region 75, as particularly shown in Figures 9b and 9c. Other cross-sectional geometries can be imagined within the scope of the present invention, and those discussions should not be considered as limiting. In other embodiments, the textured region 80 can be applied to the transparent plate 70 by bonding a thin 312XP/inventive specification (supplement)/94-07/941 2231 10 8 1358742 film having a textured upper surface. The inner side surface is 7 2 . The textured film allows a user to locate the textured area 80 wherever particles or particles are produced. In yet another embodiment, the adhesive can be disposed on the inside surface 72 of the transparent plate 70 to capture any particles produced. In operation, the textured region 80 is applied to or into the inside surface 72 of the transparent plate 70 at the time of manufacture. When the wafer container 20 is used, a plurality of moving members disposed in the interior 46 of the door 40 will produce particles or particles. Since the transparent plate 70 is mounted lower than the door 40, the particles will fall onto the inner side surface 72 of the transparent Φ plate 70. As the particles fall onto the inner side surface 72, they will be trapped in the textured region 80, thereby preventing the particles from circulating through the interior 46 of the door 40 and possibly contacting the coated wafer. When the user needs to remove the particles from the inner 4 6 of the door 40 and the textured area 80, the user only needs to detach the plate 70 from the door 40, remove the particles, and replace the plate 70 on the door 40. . Although the invention has been described with reference to the specific embodiments, it will be understood by those skilled in the art that modifications can be made in form and detail without departing from the spirit and scope of the invention. Thus, the specific examples shown should be considered as examples for display rather than

It is intended to limit the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a bottom perspective view of a wafer container having a gate according to an embodiment of the present invention; FIG. 2 is a wafer container having a gate and a wafer tray according to an embodiment of the present invention. 3 is an exploded view of a bottom of a wafer cassette according to a specific example of the present invention; 312 ΧΡ / invention specification (supplement) /94-07/94112231 Η8

1358742 is a perspective view of a flat plate of a door according to a specific example of the present invention. FIG. 5 is a close-up view of a flat plate according to a specific example of the present invention, the undulating geometry on the inner side surface of the display plate; A plan view of an inner side surface of a flat plate having a concentric rib particle capturing region; FIG. 6b is a cross-sectional view of the particle capturing region of FIG. 6a; FIG. 7a is a flat plate according to a specific example of the present invention. FIG. 7b is a cross-sectional view of a specific example of the particle capturing region of FIG. 7a. FIG. 8 is a cross-sectional view of a different specific example of the particle capturing region of FIG. 7a. 9a is a plan view of the inside surface portion of the flat plate according to a specific example of the present invention, the flat plate having a particle capturing region of the intersecting line rib; FIG. 9b is a plan view showing the geometry of the intersecting line rib of FIG. 9a; and FIG. 9c A cross-sectional view showing a particle capturing region having an arbitrary geometry generated by a cross rib according to a specific example of the present invention. [Main element symbol description] 20 crystal圆容益 2 2 The outer casing is not at the top of the top i 1 picture; the top cross section line 24 door frame 26 out into the opening 28 the inner part 30 card 匣 32 slot hole 312XP / invention manual (supplement) /94-07/94112231 12 1358742

40 Door 40A Door Base Plate 40B Flat Plate 4 1 Motion Coupling Slot 4 1 A Positioning Structure 42 Top Wall 43A Open D 44 Peripheral Wall 44A Open D 46 Interior Space 47 Pad 46A Door Surrounding 47B Door Guide 47C Corner 48 Internal 50 Latch mechanism 52 A Latch arm 52B Latch arm 53 Cam 70 Transparent plate 70A Clamp 70B Accepting structure 72 Upper surface 73 Concentric rib 312XP / Invention manual (supplement) /94-07/94112231 13 5 1358742 74 Lower Surface 75 particle capture area 76 open α 80 textured area 8 1 linear rib 83 cross line rib

312XP/Invention Manual (supplement)/94-07/9411223] 14 5

Claims (1)

1358742 X. Patent Application Range: 1. A sealable container for holding a plurality of wafers axially spaced apart in a line, the container comprising: a casing portion defining an interior space and having a defined a door frame that is inserted into the opening for inserting and removing the wafer from the outer casing portion; a door that is sealingly coupled to the door frame to close the access opening, the door including a door bottom plate and at least one operable latching mechanism operatively coupled to the door bottom plate for securing the door Positioning in the door frame; and a particle capture area defined on the door adjacent to the at least one latch mechanism, such that particles generated by the operation of the latch mechanism are captured by the particle capture area. 2. The sealable container of claim 1, wherein the door comprises a flat plate defining a bottom of the bottom plate on the door bottom, and wherein the particle capture area is mounted on the flat plate in the interior. 3. The sealable container of claim 1, wherein the particle capture region comprises a textured structure selected from the group consisting of: a concentric rib; a V-notch linear rib; a U-shaped notch linear rib Square notch linear rib; cross line rib; any geometric rib; and any combination of the above. 4. The sealable container of claim 1, wherein the particle capture 312XP/invention specification (supplement)/94-07/94112231 15 8 1358742 capture area comprises a film having a textured upper surface. 5. The sealable container of claim 1, wherein the particle capture zone comprises an adhesive. 6. The sealable container of claim 1, wherein the particle capture zone is positioned on the plate. 7. The sealable container of claim 1, wherein the plurality of particle capture regions are mounted on a flat plate. 8. The sealable container of claim 1, wherein the flat plate is sturdy. 9. A method of minimizing particle contamination in a substrate container, the method comprising: providing a housing having an access opening for inserting and removing a substrate into an interior of the housing, and a means for closing the opening a door for accessing the opening, the door including a bottom plate and a latching mechanism on the bottom plate for holding the door in the access opening; detachably coupling a flat plate to the bottom plate having an inner surface thereon The inner surface and the bottom plate define a bottom plate outer casing; and a particle capture region is disposed adjacent the bottom plate outer casing of the latch mechanism such that particles generated by the operation of the latch mechanism are captured within the particle capture region. 10. The method of claim 9, further comprising removing the flat from the bottom plate to remove any particles trapped therein. 1 1. The method of claim 9, further comprising installing a textured structure in the particle capturing region, the textured structure selected from the group consisting of 312XP/invention specification (supplement)/94- 07/94112231 16 8 1358742 In the group: concentric ribs; v-notch linear ribs; type II notch linear ribs; square notch linear ribs; cross-line ribs; arbitrary geometric ribs; and any combination of the above. 1 2 . The method of claim 9, further comprising: installing a textured structure in the particle capturing region, the textured structure comprising a film having an upper surface of the textured; removing the flat plate from the bottom plate to move In addition to the film and any particles captured thereon; and replacing the film with a second film. 1 3. The method of claim 9, further comprising: installing a textured structure in the particle capturing region, the textured structure comprising an adhesive; removing the flat plate from the bottom plate to remove the adhesive and being captured Any of the particles; and replacing the adhesive with a second adhesive. 14. A method of making a substrate container, the method comprising: providing a housing having an access opening for inserting and removing a substrate into an interior of the housing; providing a door for selectively closing the access opening, The door includes a 312XP/invention specification (supplement)/94-07/94112231 17 8 1358742 door bottom plate; coupled to a flat plate having an inner surface to the door bottom plate such that the inner surface and the bottom plate define a bottom plate outer casing; A particle capture region is mounted on the interior surface of the plate such that the particle capture region captures particles produced by the mechanism. The method of claim 14, wherein forming the particle capture region comprises molding the textured structure into the interior-surface. The method of claim 14, wherein forming the particle trapping region comprises etching the textured structure into the interior surface. The method of claim 14, wherein the forming the particle capture region comprises laser cutting the textured structure into the interior surface. The method of claim 14, wherein the forming the particle capture region comprises disposing a film having an upper surface of the mesh on the inner surface. The method of claim 14, wherein forming the particle capture zone comprises disposing an adhesive on the interior surface. The method of claim 11, wherein forming the particle capturing region comprises forming a textured structure on a local portion of the inner surface. The method of claim 14, wherein forming the particle capturing region comprises randomly forming a textured structure on the inner surface. 2 2. A sealable container for holding a plurality of wafers axially spaced apart in a line, the container comprising: a housing portion defining an interior space and having a door frame defining an access opening For inserting and removing wafers from the outer casing; 312XP/invention specification (supplement)/94-07/94112231 18 8 1358742, a door that can be sealingly fitted in the door frame to close the access opening, the door including a door bottom plate And at least one operable latching mechanism operatively coupled to the door panel for securing the positioning of the door in the door frame; and means on the door for capturing operation via the latching mechanism The particles produced. The sealable container of claim 22, wherein the means for capturing particles comprises a particle capture region of a textured structure. 312XP/Invention Manual (supplement)/94-07/94112231 19 8