TWI354099B - Unevenness inspecting apparatus and unevenness ins - Google Patents

Description

1354099 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a technique for inspecting unevenness of streaks formed on a film of a substrate. [Prior Art] In the prior art, when a predetermined pattern is formed on the main surface of a glass substrate for a display device (hereinafter simply referred to as "substrate"), the spin coater applies a resist liquid on the main surface of the substrate. The substrate is rotated around a rotation axis perpendicular to the main surface to form a resist film. The technique proposed in Japanese Laid-Open Patent Publication No. 2006-49630 is to obtain a resist by a spin coater. The image of the substrate after the liquid is used to check the uneven coating on the main surface of the substrate. In the image indicating the shadow mask, in the arrangement direction of the mutually orthogonal pixels, each position in one direction is arranged in the image of the shadow mask. In addition, the graph in the one direction is the cumulative data obtained by the cumulative yarn, and the value corresponding to the smoothed data after smoothing the accumulated data is obtained by the data obtained by the data of the accumulated data. The strips are ^:, in the patent case of Kaiping Ping, "Official No. 4,"; = the technique is taken in the image taken by the corneal endothelium, using the established (four) ==: Each radial direction variable is represented by the direction of the material (4) as the radial direction of the material, and is used to take the == differential filament symbol to change the shape of the intestinal endothelial cells. 312XP/Invention Manual (supplement)/96-08/96丨18935 6 When:================================================================================== The anti-prosthetic film is produced on the film, and the starting point of the grapefruit material is rotated along the axis of rotation. In this case, as in the literature, even if the accumulated values of the pixels are accumulated to obtain the accumulated data, it is difficult to confirm the existence of the unevenness of the stripes by the degree of accuracy. Therefore, it is necessary to confirm the film on the substrate with good precision, and to use the ^ axis as the middle μ in the strip of the heart [invention] (4) In the inspection device for the film thickness unevenness (mura), the coating liquid = To the main surface of the substrate 'and to rotate the substrate centering on the rotation axis perpendicular to the main surface' to check the stripes formed on the top surface of the main surface are not all = with good precision and easily confirmed on the substrate On the film, unevenness of streaks extending in the centrifugal direction with the rotation axis as the center exists. The film thickness unevenness inspection device of the present invention includes: a photographing unit that photographs a film of the substrate by the photographing device to obtain a multi-tone target image, and an evaluation value acquisition unit that uses a rotation axis as a starting point on the main surface A plurality of centrifugal directions are set to the outside. In the target image, the value of the pixels arranged in the direction corresponding to the plurality of centrifugal directions is integrated to obtain a plurality of evaluation values corresponding to the plurality of centrifugal directions. According to the present invention, the unevenness of the streaks extending in the centrifugal direction with the rotation axis as the center can be easily confirmed with good precision by referring to the evaluation value. In a preferred aspect of the present invention, 'the main surface is set with a rotating shaft as a plurality of annular regions of the center 312XP/invention specification (supplement)/96-08/9611893 5 7 ^34099, and the evaluation value is taken In the female object f image, the square value corresponding to the plurality of centrifugation directions is used to evaluate the value of the value of the pixel of the entire nucleus region and the value of the pixel of the nucleus region. y can suppress the length of the unevenness of stripes to the presence of stripes that are recognized as uneven. That is, the easiness: it is better to make the part of each annular region overlap with the other any-ring portion in the radial direction, and to set the μ to cross the other ring at the intersection of the mutually (four) regions. region. By using such a square, the presence of unevenness of the unevenness of the high unevenness can be confirmed with the accuracy of the goodness. In another preferred embodiment of the present invention, the arrangement direction of the pixels orthogonal to each other in the target image is &amp; In the two directions in which the main faces of the substrate are orthogonal to each other, and the ff-estimation acquisition unit converts the polar coordinate system centered on the position of the rotating vehicle/jins into a rectangular coordinate system, and generates By converting the image and obtaining a plurality of evaluation values from the transformed image, the evaluation value can be easily obtained. Further, it is preferable that the plurality of centrifugal directions are set at a certain angular distance. When one half of the number of pixels arranged on the long side of the target image is α, the pitch angle is equal to or less than arc tan (1 / α). In this way, the transformed image can be produced with good precision. The present invention also relates to a film thickness unevenness inspection method for inspecting unevenness of streaks formed on a film of a substrate. The above and other objects, features, aspects and advantages of the present invention will become apparent from the Detailed Description of the <RTIgt; </RTI> <RTIgt; </RTI> <RTIgt; </RTI> <RTIgt; [Embodiment] FIG. 1 shows a structure of a film thickness unevenness (MURA) inspection device 1 according to an embodiment of the present invention. The film thickness unevenness inspection device} is a rectangular glass substrate 9 used in a flat display device such as a liquid crystal display device, and obtains an image of a film 92 formed on one of the 'j faces 91 as a resist for pattern formation, according to This image is examined for unevenness of the stripes on the film 92 of the substrate 9. Here, the film 92 on the substrate 9 is formed by a spin coating method. Specifically, after the resist liquid is supplied to the stationary substrate, the substrate is rotated about the rotation axis perpendicular to the main surface ( Slightly static method), or after the resist liquid is supplied to the rotating substrate, the rotation speed of the substrate is increased (referred to as a dynamic method), whereby the formation of the film 9 2 on the substrate 9 is via external The spin coater applies a resist liquid to the main surface 91, and rotates the substrate 9 around a rotation axis perpendicular to the main surface 91. In addition, in the static method and the dynamic method, the resist liquid is supplied to the center of the main surface of the substrate, and in the static method, in addition to the central dropping method, so-called slit rotation (Slit and Spin) can also be used. In the method, the slit nozzle is relatively moved toward the substrate along the main surface of the substrate, and the layered resist liquid is discharged, and the resist liquid is supplied to the rectangular region outside the edge portion on the main surface, and then the substrate is rotated. As shown in FIG. 1, the film thickness unevenness inspection apparatus 丨 is provided with a carrier 2 for holding the substrate 9 so that the main surface 91 on which the film 92 is formed (hereinafter referred to as "upper surface 91") faces upward (Fig. The light irradiation unit 3 irradiates light onto the substrate 9 held by the stage 2 at a predetermined incident angle 312XP/Invention Manual (supplement)/96-08/96118935 9 1354099 92 The light receiving unit 4 receives light reflected from the film 92 of the substrate $=up 91 from the light irradiation unit 3; the moving mechanism 2 causes the stage 2 to relatively move the light irradiation unit 3 and the light receiving unit 4 And the computer 5, the redemption and the task as the control unit of the film thickness unevenness inspection device. /, •• The surface on the side of the stage 2 (6) is preferably black matte. The moving mechanism 2i is configured to be connected to the motor 211 by bolts (not shown), and the rotation of the motor 211 causes the stage 2 to follow the guide 212 along the upper surface 91 of the substrate 9 in FIG. Move in the X direction. The light-irradiating portion 3 includes a halogen lamp 31, and is a light source that emits white light (that is, light including the entire wavelength of the visible region); the cylindrical quartz rod 32 is perpendicular to the moving direction of the stage 2, that is, The y direction in Fig. i extends, and the cylindrical lens 33 extends in the 丫 direction. In the light-irradiating portion 3, the tooth lamp 31 is attached to the end portion of the quartz rod 32 on the (+γ) side, and the light incident from the tooth lamp 31 to the quartz rod 32 is converted into linear light extending in the γ direction. (that is, the linear light having a long beam cross section in the γ direction) is emitted from the side surface of the quartz rod 32, and is guided to the top surface 91 of the substrate g via the cylindrical lens 33. In other words, the quartz rod 32 and the cylindrical lens 33 are optical systems, and the light from the halogen lamp 31 is converted into linear light perpendicular to the moving direction of the stage 2, and guided to the upper surface 91 of the substrate 9. In Fig. 1, the optical path from the light-irradiating portion 3 to the substrate 9 is indicated by a one-dot chain line (the same applies to the optical path from the substrate 9 to the light-receiving unit 4). A portion of the light emitted from the light-irradiating portion 3 is reflected on the (+Ζ) side by the film 92 on the upper surface 91 of the substrate 9. The film 92 is light-transmitting to the light from the light-irradiating portion 3, and the light from the light-irradiating portion 3 is not reflected by the upper surface of the film 92, and is transmitted 312 ΧΡ / invention specification (supplement) / 96.08/96 丨丨 8935 1 〇 The film 92 is partially reflected on the upper surface 91 of the substrate 9 (i.e., below the film 92). In the film thickness unevenness inspection device 1, the light reflected by the upper surface of the film 92 of the substrate 9 and the light reflected by the upper surface 91 of the substrate 9 are incident on the light receiving unit 4 via the filter 43 and the lens 42. The predetermined wave length of the interference light is guided to the photographing unit 41. FIG. 2 shows the light receiving surface of the photographing unit 41. As shown in FIG. 2, the imaging unit 41 is provided with a line sensor 410' having a plurality of light receiving elements (for example, a CCD (Charge Coupled Device) 411 is arranged linearly in the Y direction. In the imaging unit 41, a line sense is utilized. The detector 410 receives the interference light from the substrate 9 for obtaining the intensity distribution of the interference light (that is, the distribution of the output values from the respective light-receiving elements 411 in the γ direction is actually, as the substrate 9 moves toward the X direction, The line sensor 41 of the photographing unit 41 repeatedly obtains the intensity distribution of the interference light for acquiring the binary image of the film 92 on the substrate 9. As shown in FIG. 3, the computer 5 includes a CPU 51 for Perform various calculations of φ; r〇M52 for memorizing the substrate program; and RAM53 for memorizing various information; constructing a general computer system structure connected to the busbar line. The bus line is more appropriately interfaced (I/F) 59a, 59b, 59c, etc. are connected: display 55 is used as a display portion for displaying various information; keyboard 56a and mouse 56b (hereinafter collectively referred to as "input portion 56") for accepting input from an operator; reading Device 57, The information of the recording medium 8 readable by a computer such as a disc, a disc, or a magneto-optical disc is read; and the communication unit 58' is connected to other constituent elements of the film thickness unevenness inspection device 1. The computer 5 is read beforehand. The device 57 reads the program 312XP/invention manual (supplement)/96·08/96118935 11 1^354099 from the recording medium 8 and memorizes it on the fixed disk 54', but n' 54ι is copied to the wide 53' and The cPU 51 performs calculation processing according to the program in _53 (also referred to as 'computer execution program), and is used to cause the computer 5 to perform an operation of checking the unevenness of the stripe on the substrate 9. Fig. 4 is a block diagram showing the cpu 51 according to the program. The μ is performed to realize the construction of the simple _52, _53, the fixed disk 54, etc. In Fig. 4, the calculation of the $ in the calculation unit 6 by the CPU 51 or the like is shown.

The image processing unit 6 evaluates the functions of the value acquisition unit 62 and the shape 63. ^External functions can also be implemented using dedicated circuits, or dedicated circuits can be used. Next, the flow rate unevenness inspection device i will be described to check the unevenness of the stripes. Fig. 5 shows a flow of processing in which the film thickness unevenness inspection device 1 inspects the unevenness of the stripes on the film 92 of the substrate 9. In the thickness unevenness inspection device, first, the substrate 9 on which the film 92 is formed on the upper surface 91 is held at the inspection start position shown by the solid line in the figure by the application of the resist liquid and the rotation of the substrate 9. After the load σ 2 is reached, the stage 2 starts moving in the direction of (). Then, the linear light that is emitted from the light irradiation unit 3 and incident on the upper surface 91 of the substrate 9 at a predetermined incident angle is irradiated onto the linear irradiation region on the upper surface 91 (hereinafter referred to as "linear irradiation region"). The linear irradiation region relatively moves the substrate 9. The light from the light-irradiating portion 3 is reflected by the upper surface 91 of the substrate 9, and the interference light is guided to the imaging unit 41, and is received by the line sensor 41, and the intensity distribution of the interference light in the linear irradiation region on the substrate 9 is obtained. The output of each illuminating element 4 ι 来自 from the line sensor = 10 is converted into a value of, for example, 8 bits (may be other than 8 bits) according to a predetermined conversion formula (pixel 312XP/^ra*(ffim/ 96. 〇 8/96118935 12 1354099 value), and then sent to the computer 5. In the film thickness unevenness inspection device, during the load period, synchronously repeated by the photographing unit 41; = + X) direction of the computer 5 rounds The pixel value, and the intensity distribution of the movement/dry//, when the table 2 moves to the inspection end position ^ ° Μ 'When the cutting object 2 moves, it also stops (4) _ Moves _ _ _ U to make the 'in the photography department (4) The second-order image of the quasi-tone on the substrate (as described later: two: obtaining the image of the multi-processing object, hereinafter referred to as "the right ^" into) the interpretation unit 6 - computer 5 calculation department 6 ((4) sn) / ~ like "), enter it into

Then, in the calculation section 6, the shadow is awkward. Here, the object image is located in the seatpost (/' the object image is compressed.

When expressed, the pixel values of the elements of the slanting gold stimuli, U, Y) are compressed by FXY and t are reduced by the range of the Sa pixel xSa pixels, in the resulting image (the compressed heart) The attention graph value f is located at coordinates 1 S.(y+1)-, Σ Σ Fxy/i χ== SX Υ== sy

Ax\

Cl) In the present embodiment, Sa A 4 Γ m I, π 0a horse 4 (pixel)', the S/N ratio of the target image compressed by the equation () is equal to the ratio of the sum of the ancient &amp; It is 4 times the original image. Then, after the compression of the # # 你 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ After the low-pass filtering process, you can see the image of you and β Jun. The window used to determine the calculation range of the low-pass filtering process is (the edge of the square, the length of the square (2S丨+ 1) is the square of the pixel, and after the low-pass filtering process, the object image is located at the coordinates. (xy) Note 312XP / Invention Manual (supplement) / 96*08/9611 35 13 1354099 The pixel value Lxy of the eye element, using the picture of each pixel near the pixel of interest in the compressed object image Prime value A (see equation (1)), using equation (2) to find x+si y+si

Lxy== Σ Σ Axy/(2S1 + 1)2 · . . h,

Then, the target image after the low-pass filter processing is subjected to high-pass filter processing, and the image of the target image after the low-pass filter processing is removed, and the image of the low-frequency density that hinders the subsequent emphasis on the contrast enhancement is removed (the target image after the high-pass filter processing) ). Here, the pixel value H of the target pixel located at the coordinate (X, y), and the pixel value L of the target image after the low pass filter processing using each pixel near the pixel of interest (refer to equation (2) ), obtained by using equation (3). (3)

Hacy==Lxy/ ( Σ Σ Lxy/(2s2+l)2) X=x—82 Y=y—S2 ' Equation (3) represents the use of a square with the pixel of interest as the center and the length of each side as the pixel The window is used as a window for determining the range of the calculation of the high pass filtering process. According to the above aspect, after the low-pass filtering process is applied to the target image compressed by the image processing unit after the original target image is compressed, the high-pass filtering process is applied to pass the filtering of the predetermined spatial frequency band (step S12). In the image processing unit 61, the contrast-improving process is performed on the object after the high-pass filter processing, and the emphasis/input SI3 after the emphasis processing is generated. It is located in the coordinate of the object image after the emphasis processing (χ, the pixel value Exy of the main source of the illusion, the pixel value H1 of the object image using the high pass filter, the contrast coefficient rc, and the background value) In the present invention, it is obtained by using the formula (4) 312XP/invention specification (supplement)/96·08/961! 8935 14 1354099. In the present embodiment, b is 127 r. It is 0. 01, 〇〇 2 〇 . 05 or 〇. • · · (4)

Exy-baHiy-D/rc+l) Fig. 6 shows an object image 7U that emphasizes the object after the processing, and is simply referred to as "^ where the image of the color tone is emphasized here, and the flat image 71 of the target image 71" becomes峨 is about the other figure of the heart, and the unevenness detected by the 11th extension of the 铋 rotation axis as the starting point), in Fig. 6 is not like the striped area, and the low concentration (white) Article: The pattern of the pattern is set to "the position corresponding to the rotation axis of the substrate 9," which extends radially, but in fact, the film is on the substrate::: The position is used as a starting point to generate unevenness of the stripes extending in the direction in which the centrifugal force acts. Then, in the target image η of the converted image generation unit 62 of the evaluation value acquisition unit 62, when the film 92 is formed, the corresponding position of the rotation of the substrate 9 (four) (referred to as the "rotation axis of the substrate 9") is used as the center coordinates. The Cartesian coordinate system 'is used to generate the transformed image (in the case of generating the transformed image, the object image 71 of FIG. 6 is first arranged in the X direction and the y direction in the pixel, and the rotation of the substrate 9 shown in FIG. 7 is specified. The coordinates (cx, cy) of the corresponding position of the axis J1 (hereinafter referred to as "center position"). Here, the 312XP/invention specification (supplement)/96·〇8/9611S935 is obtained by taking the rotation axis of the substrate 9 as the center. 15 The blouse is like 71', so the heart position is shown in Fig. 6. Bu Qiuide, 1 image 71 is the middle of the image, and the position and center position of the target image 71 are taken from the distance f to the position C1. The distance between the squares (hereinafter referred to as the "maximum length"). Because the center position is at the target image, the length of the target image 71 is at the length of x (four) - + ' in the X direction and the y direction. The longest XI and the use of the formula (5) to get the maximum Degree ^. ΰ prime number) Knax == i^^y^/2 · . · (5) In addition, 'in the position of the image of the transformation C1, Zhu Yanrusheng 621, in the object image 71 A plurality of -t are obtained in a plurality of radial directions toward the outside. In this case, the radial direction is y 沿着 along the long side of the target image 71, and the pitch angle P [degrees] is ... the number of the profit direction is the pitch angle p [the image generation unit 62 For example, the value of the difference is ^, b〇L degree]. In the transformation, the arrow of the symbol DO is added: the radial direction of the direction (the radial direction of Fig. 6 (hereinafter referred to as "the base is the reference, and the predetermined 〇 is positive, and the direction is the pitch P". "In the counterclockwise direction m (the ritual is, the 〇 〇 Γ Γ 向 向 向 向 向 向 , , , , , , , 角度 角度 角度 : : : : : : : : : : 角度 角度 角度 : 角度 : : : 角度 角度 角度 角度The image should be _7 as shown in the rotation axis of the substrate 9; 1. In the pair: set the direction of the pair of 312XP/invention manual (supplement)/96·〇8/96118935 the parent, because they correspond to the substrate 9 respectively. In the face 16 above, 354099 91 f is in the two directions of the parent, so on the upper surface 91 of the substrate 9, a plurality of centrifugal directions toward the outer side with the square rotation axis J1 as a starting point are in a plurality of radial directions of the target image 71, A plurality of two halves; η' is a value obtained by using arctan (l/a) in the case where the number of the prime numbers of the pixels arranged on the long side of the target image 71 becomes a value obtained by using arctan (l/a). In Fig. 7, the direction of the core is added with In Fig. 6, the arrows DO and Dm of the phase diameter are shown. The door is opposite to the payout mode, and when the target image ^ shown in Fig. 6 is set In the two-direction direction, the polar coordinate position defined by the angular position in the plurality of radial directions of the center position in the target image 71 and the distance n of the TM (the integer of 2: the integer below) is : The distance to the direction n, and the angular position: the right angle seat specified by the mouth only code m, use the step of the U direction of the image to change the image shear (four) image. Here in the support ~ image The value of the private (n, m) pixel (the value of U is substituted into the equation (8), which becomes the value of the element of the figure H 4 , the coordinate of the target shirt image 〇 ^), the heart position two V,: 7 is the X coordinate and the y coordinate of t in the target image 71, respectively, p is another 'for the angle between the flat and the B in the transformed image. ^ /mr is the coordinate (η, ιη), in the use of the request The coordinates (x, y) indicate that the object (6) is changed by the formula (6) (n, m) (4) like # = ' is located at the seat (background value) m. (4) The intermediate value of the additional object image 71 is 312 χίν invention Instruction manual (supplement)/96-〇8/961丨8935 (6) 1354099 =η · COS0m + cy =η · sin0m + where Θ m = (mxp) Figure 8 shows the object from Figure 6 Such as 71 The resulting transformed image 72. In the transformed image 72 of Fig. 8, the longitudinal direction knows that the gentleman's ^, + two turns, and the 杈 direction correspond to the numbered claws in the radial direction and the distance n in the radial direction, respectively. In the case of the conversion, the evaluation value acquisition unit 6 2 , &amp; _ Q &amp; , as shown in 72, in the converted image, the entire width direction of the culvert is fixed, and the width in the lateral direction is fixed to a plurality of rectangular regions. 73 (However, a plurality of rectangular regions 73 arranged in the horizontal direction in FIG. 9 are alternately arranged by a rectangle of a solid line and a rectangle of a new line), and are arranged at a pitch of half-w (w/2) of the twist W and set at Horizontal direction. Therefore, other rectangular regions (indicated by additional parallel oblique lines in FIG. 9) are set at the boundary between the two rectangular regions 73 (the rectangles of the dotted lines of the additional symbol shirts in FIG. 9) which are adjacent to each other, and each of the rectangular regions 73 and the other Rectangular area? The width in the lateral direction of the regions overlapping each other is one-half (w/2) of the width of the rectangular region 73. When a plurality of rectangular regions 73 are set in the converted image 72, the values of the pixels arranged in the horizontal direction are integrated in the respective rectangular regions 73, and the accumulated values are divided by the number of the pixels (ie, The average value is obtained, as shown in Fig. 用来, for obtaining the plurality of radial directions in the respective rectangular regions 73 = the evaluation value (step S15). In addition, in Fig. 10, the vertical axis represents the evaluation value, and the horizontal axis represents the number in the radial direction. Here, the horizontal direction of the converted image 72 corresponds to the upper surface 91 of the substrate 9, with the rotation axis J1 as the center of the radial direction (that is, leaving the rotation 312 ΧΡ / invention specification (supplement) / 96.08/96118935 18 丄 JJ Since the distance of the uyy bit is in the direction of the uyy position, a plurality of annular regions in the horizontal direction corresponding to the range of the occupied width w are alternately transformed in the transformed image 72, and a portion of the annular region 74 is displayed. That is, in the case of the rectangular region 73, there are other regions in which the other rings are connected to each other with parallel oblique lines, and the two annular regions 74 which are adjacent to each other are crossed (the dotted line in the figure) The part of each of the parent's annular regions 74 and the other part of the image 72 are in the radial direction by 4. In this case, the cooking is performed on the transformation of the shadows, and the isometric (four) image 71 In the direction of the (4) direction, the value of the pixel existing in the range corresponding to the texture of the evaluation value of each annular region is accumulated to obtain a plurality of evaluation values of the rectangular regions 73. When it is determined that the upper limit value and the lower threshold value which are higher than the background value of the target image 71 are compared with the respective evaluation values, the evaluation value is equal to or greater than the upper limit value, or becomes lower. When the value is less than or equal to the limit value, the film 92 of the determination plate 9 is extended in the centrifugal direction, and the unevenness of the plate 9 is obtained. For example, in the pattern shown in Fig. 1, the evaluation value becomes the upper limit value τι or more. Or the radial direction of the number below the threshold value of 72 or less corresponds to the unevenness of the stripe that becomes the defect. In this manner, in the determination of 6 3, the density of the pixel group corresponding to the image 71 and the target image 7 (average concentration) are detected from the unevenness of the stripe on the film 9 2 of the substrate 9. The absolute value of the difference (hereinafter also referred to as "uneven intensity" ^ large 312XP / invention manual (supplement) / 96-08/96118935 19 stripe unevenness as stripe unevenness 9 film 92 is present on the stripe = = 7 55 is displayed on the substrate report. In addition, on the substrate 9, hunting to the operator traps in it to confirm that there are more than two centrifugal directions, and the computer 5 will be displayed and displayed on the display, etc. The graph of the value (refer to FIG. 10) is exemplified by: a rectangular region 73 having an upper limit value or lower = "evaluation value" and an annular region on the substrate 9 corresponding to the radial field 73 are specifically obtained as needed. 74, and the direction of the centrifugal direction on the soil plate 9 which is relatively wide in the radial direction is used to obtain: on the substrate 9 having: (at least a part of) the uneven defect. Then 'representing the cause of the location of the consultation # (for example, a diagram specific to the defect on the specific stripe unevenness substrate 9) Shape caused by: cloth:) agent =; formed in the management of the influence of the unevenness of the unevenness on the product. In the middle::, the way of description, in the film thickness of Figure 1 * inspection device 1: 'with resist The application of the agent liquid and the rotation of the substrate form a film 92 on the substrate 9, and in the object image 71 obtained from the film 92, the pair is set on the upper surface 91 of the substrate 9 and arranged in a direction corresponding to the plurality of centrifugal directions, respectively. And the value of the pixel is cumulatively processed to obtain the estimate of the household relative to the plurality of centrifugal directions. The result is that the determination unit (6) (or the operator) can obtain the accuracy with reference to the evaluation value and It is easy to confirm that the film 92 on the substrate 9 has a streak unevenness extending in the centrifugal direction with the rotation axis J1 as a center. Article 312XP / Invention Manual (supplement) /96-08/96118935 20 丄f The average of all the pixels arranged in each radial direction of the stone; estimated when the value of Γ is taken: the uneven intensity is low and the long stripes Not &quot; σ unevenness intensity is high and the evaluation of the short streak unevenness is the same value. 'To detect only the unevenness of the unevenness of the unevenness is higher, in the evaluation value acquisition unit (10)' The image 71 has the entire width of each annular region 74 in the radial direction, and the value of the pixel in the == range, and the evaluation value is obtained, which is used to suppress the influence of the stripe 2 and the value of 5, and can be easily confirmed only. The presence of uneven streaks with higher unevenness. Further, by setting the other annular regions 74 crossing the boundary between the two annular regions 74, there are two strips that are short across the four (4) annular regions 74. At the same time, the presence of such streak unevenness can also be confirmed with good precision. In addition, in the above description, the intensity of the unevenness is only the concentration in the image of the image, but the general unevenness is expressed by the ease of identification as unevenness. Therefore, the length of the unevenness of the stripes may be added as the unevenness. factor. In the thickness unevenness inspection device ,, as shown in the figure, a photographing unit ο having a line sensor 41 is disposed above the upper surface 91 of the substrate 9, and the line is made with the rotation axis ji of the substrate 9 as a center. The sensor 41 摄影 takes a 360-degree rotation of the substrate 9 to take a picture, and can also acquire a target image. In this case, the target shirt is arranged such that the plurality of pixels in each column respectively represent the pixels of the column, and the substrate 9 corresponding to the rotation angle of the line sensor 410 is arranged on the substrate 312 ΧΡ / invention manual (supplement) /96-08/96118935 21 1354099 A plurality of positions in the direction of the heart' is integrated with the values of the column direction pixels arranged at the respective positions in the direction of the target image in the evaluation value acquisition unit, and can be easily obtained in a plurality of centrifugal directions. Corresponding multiple evaluation values. In addition, after the crucible 92 is formed on the substrate 9 by the spin coater, the line sensor is disposed above the substrate 9 mounted on the stage of the spin coater, and the stage is rotated. , using the line sensor to obtain the object image. In this manner, when the target image is obtained, the line sensor can be relatively rotated with respect to the film 92 on the substrate 9, and the function of the film thickness unevenness detecting device 1 can be combined in the computer. Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications are possible. For example, a plurality of angles between the plurality of centrifuging directions may be α or more, and if the number of pixels in the long side of the target image 71 is α, it may be other than arc tan (1/a). In this way, the transformed image can be produced with good precision. &lt; In the above embodiment, the other annular regions are disposed across the upper surface 91 of the substrate 9 at the boundary between the two annular regions 74 adjacent to each other. However, other annular regions 74 may be provided across the circumference. In the case where there are gaps and are arranged at the boundary of two annular regions adjacent to each other, in this case, the unevenness of the stripes near the boundary of the two annular regions can be present with good precision. Further, the plurality of annular regions may have different widths in the radial direction around the rotation axis J1. For example, a plurality of annular 312XP/invention specifications may be set so as to be wider as the outer width is wider. In the evaluation value acquisition unit 62, the value of the pixel is extracted along each of the plurality of radial directions in the target image 71, and the converted image 72 is generated, thereby easily converting the image 72 into the image 72. A plurality of evaluation values corresponding to a plurality of centrifugal directions are obtained, but a plurality of evaluation values corresponding to the plurality of centrifugal directions may be directly obtained from the target image 71 without generating the converted image 72. Further, in the target image 变换 or the transformed image 72, if the values of the pixels in the direction corresponding to the respective centrifugal directions are cumulatively accumulated, the value after the value of the pixel may be accumulated, or may be added A weighted average value obtained by the weight corresponding to the position of each pixel is used as an evaluation value. In the film thickness unevenness inspection device of the circle 1, the substrate sensor 19 is linearly moved to the line sensor 410 of the 丨-element imaging device for acquiring the target image, but the line sensor 41 can also be made straight to the substrate 9 Move to get the object image. That is, the line sensor 41 can also be relatively linearly moved to the substrate 9. Alternatively, the film 92 of the substrate 9 may be imaged by a two-dimensional imaging device in which the light receiving elements are arranged in a two-dimensional order to acquire a target image. When the film on the substrate 9 is formed by a spin coating method, the coating liquid other than the resist liquid may be supplied to the main surface of the substrate 9 at the time of rotating the substrate 9 or before starting to rotate the substrate 9. form. Further, the film thickness unevenness inspection device is particularly suitable for inspecting unevenness of stripes formed on a film of a glass substrate for a flat display device, but may be applied by application of a coating liquid on another substrate such as a semiconductor substrate or by using a rotating substrate. Inspection of uneven streaks on the formed film. The invention has been described in detail above, but the foregoing description is by way of example only, and is not intended to limit the invention. Thus, various changes or aspects are apparent to the 312XP/invention specification (supplement)/96-08/96118935 23 1354099 without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows the structure of a film thickness unevenness inspection device. Fig. 2 shows the light receiving surface of the photographing unit. Figure 3 shows the construction of a computer. Figure 4 is a block diagram showing the functional configuration implemented by the computer. Fig. 5 is a view showing a flow of processing for detecting unevenness of streaks on the film of the substrate by the film thickness unevenness inspection device. Fig. 6 shows an object image. Figure 7 is used to illustrate a plurality of centrifugal directions set on a substrate. Fig. 8 shows a transformed image. Fig. 9 shows a rectangular area in the object image. Figure 10 shows a plurality of evaluation values for a plurality of radial directions. FIG. 11 is a view for explaining another example of the operation of the image capturing unit by the photographing unit. [Main component symbol description]

1 Film thickness unevenness inspection device 2 Stage 3 Light irradiation unit 4 Light receiving unit 5 Computer 6 Calculation unit 8 Recording medium 9 Substrate 21 Moving mechanism 312XP/Invention manual (supplement)/96-08/96118935 24 1354099

31 Halogen lamp 32 Quartz rod 33 Cylindrical lens 41 Photographic unit 42 Lens 43 Filter 51 CPU 52 ROM 53 RAM 54 Fixed disk 55 Display 56 Input 56a Keyboard 56b Mouse 57 Reading device 58 Communication unit 59a, 59b, 59c Interface 61 image processing unit 62 evaluation value acquisition unit 63 determination unit 71 target image 72 conversion image 73 rectangular area 74 annular area 312XP / invention manual (supplement) / 96-08/96118935 1354099 91 main surface 92 film 211 motor 212 guidance 410 line sensor 411 light receiving element 541 program 621 conversion image generating unit C1 center position Dm centrifugal direction DO centrifugal direction Θ m angular position 312XP / invention manual (supplement) / 96-08/96118935 26

Claims (1)

U54099 X. Patent application scope: 1. A film thickness unevenness (mura) inspection device, which supplies a coating liquid to a main surface of a substrate, and rotates the substrate as a rotation axis perpendicular to the main surface. #, used to check the stripe unevenness formed on the film of the main surface; it is characterized by: I5, the film imaging of the substrate by the imaging device is used to obtain a multi-tone target image; and the sweat evaluation acquisition unit sets a plurality of centrifugal directions toward the outside on the main surface with the rotation axis as a starting point. The target image is cumulatively arranged in values corresponding to the plurality of directions of the plurality of centrifugal directions for obtaining a plurality of evaluation values corresponding to the plurality of deviation directions. [2] The film thickness unevenness inspection device of the third aspect of the invention, wherein the domain is provided with a plurality of annular regions having the rotation axis as a center in the main surface, and the evaluation acquisition unit is in the target image The corresponding directions and the direction of the centrifugal direction are respectively indicated, and the evaluation values of the Wang Xie people's minds are accumulated in the respective corresponding ranges. The value of the pixel of the range of 〇 is used to obtain 3, such as the film thickness unevenness inspection device of the second item of the application (4), in which the part of the c-ring area is part-and other-ring-shaped area One part is overlapped in the radial direction. The film thickness unevenness inspection device of the third item of the ttr patent range, wherein the annular region. Other 312XP/Invention Manual (supplement)/96^08/96118935 27 1354099 at the junction of the singular regions 5. The film thickness unevenness inspection device according to the patent application No. 1 瑁1, wherein the substrate is a flat surface A glass substrate for display devices. 6. For the H-thickness unevenness inspection device of the patent application range 1 to ^ b to 5, wherein the alignment directions of the mutually orthogonal pixels in the target image correspond to each other, the main faces of the substrate are orthogonal to each other. And the above-mentioned "flat evaluation" acquisition unit converts the polar coordinate system having the position corresponding to the rotation axis as a center to form a converted image, and converts the image from the above-mentioned target image The above multiple evaluation values are obtained. 7. In the film thickness unevenness inspection device of claim 6, wherein the plurality of centrifugal directions are set at a certain angular distance, and when one or a half of the number of pixels arranged on the long side of the target image becomes "the above, The pitch angle is equal to or less than arc tan (l/a). 8. A method for inspecting the film thickness unevenness (mura), supplying the coating liquid to the main surface of the substrate, and rotating the substrate perpendicular to the main surface The shaft is rotated as a center for inspecting unevenness of the stripes formed on the film of the main surface; and characterized in that: (a) a step of preparing a multi-tone object image obtained from the film of the substrate; and (b) a plurality of centrifugal directions that are outwardly directed by the rotation axis as a starting point are set on the main surface, and the values of the pixels arranged in the direction are integrated in the target image corresponding to the directions of the plurality of centrifugal directions. The step of obtaining a plurality of evaluation values corresponding to the plurality of centrifugal directions described above. 9. The film thickness unevenness inspection method according to item 8 of the patent application scope, wherein 312XP/invention specification (supplement)/96-08/96118935 28 In the above-mentioned main domain; and a plurality of annular regions having the above-mentioned rotation axis as the center are set in the above step (b), in the above-mentioned object, the ten-plus-plus ▲T pumping shirt image, respectively, along the corresponding ^ Λ ^ Α 冲 存在 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图^ Waist and uneven inspection method, one of the above-mentioned various ring-shaped areas of the bean, eight grasping the heart, one of the other ring areas of the other The wounds overlap in the radial direction. 11. If the method of inspecting the gamma thickness unevenness of the i-th item of the patent application scope, the method of the film thickness unevenness inspection of the middle of the boundary of the two ring-shaped regions adjacent to each other The above substrate in the basin is a glass substrate for a flat display device. 13• For example, the application of the material, the 8th illusion 2, the method of checking the thickness of the film, wherein #the direction of the pixels orthogonal to each other in the object image corresponds to the positive relationship on the main surface of the substrate In the above-mentioned step (b), the polar coordinate system having the position corresponding to the rotation axis in the target image is converted into a rectangular coordinate system for generating a transformed image, and the converted image is obtained from the converted image. The above multiple evaluation values are obtained. 14. The film thickness unevenness inspection method according to claim 13 wherein the plurality of centrifugal directions are set to a certain intermediate angle, and when the half of the number of pixels arranged on the long side of the object image is α The pitch angle is 312 ΧΡ / invention specification (supplement) / 96. 〇 8 / 96118935 29 1354099 is below arc tan (l / a). 312XP/Invention Manual (supplement)/96-08/96118935 30