TWI351322B - - Google Patents

Description

1351322 » · 6. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a coating apparatus, and more particularly to a coating of a substrate printing coating liquid applied to a platform. Cloth device. [Prior Art] The organic EL element is utilized in the active movement of the illumination and the display. When manufacturing these organic EL elements, it is necessary to coat the substrate with a large-sized film-like material «organic EL material, hole transport material, electron transport material, etc., or separately apply red, green, blue, and white. The organic EL material such as light is minutely striped. By repeating the coating operations and overlapping the layers, a light-emitting layer, a hole transport layer, an electron transport layer, and the like of the organic EL element can be formed. As for the organic EL material to be used as the light-emitting layer material, there are a polymer material and a low molecular material (hereinafter referred to as "organic EL material") which form a film by using Tu Wei, and 'a printing method or a special coating method has been tried, And a method of manufacturing an organic EL material thin film on a substrate. In general, in such a manufacturing method, an aromatic solvent is used as a main solvent in order to ink the organic EL material. For example, a method of printing and coating an organic EL material by using an elastic relief '' using an anilox roll method using inking is considered. However, when

- When the elastic relief is inked by the anilox roller method, the dried organic EL material remains in the cells (recesses) of the anilox roll because the printed organic EL material changes over time. Thus, the coated amount of the organic EL 098114679 1351322 coated material may be unstable, resulting in a decrease in quality. In order to prevent the residue of such an organic material, the following printing apparatus is disclosed in Japanese Patent Laid-Open Publication No. 2008-6705 (hereinafter referred to as Patent Document 1): a flat surface roller having a smooth circumferential surface, and an elastic relief plate Ink. In the printing apparatus disclosed in the above Patent Document, an organic EL material is printed and applied on a substrate by using a printing plate wound on a plate cylinder to form a film of an organic EL material. The film of the organic EL material is required to have film thickness uniformity to prevent uneven light emission or electric field gathers. In order to improve the uniformity, in the printing apparatus disclosed in the above-mentioned patent document, 'in order to perform the leveling of the organic EL material and the homogenization of the sentence, it is necessary to use a low viscosity (for example, tens of PCT). ; White) The following organic EL materials. Printing and coating the organic EL material @ ^ 守 with the printing apparatus disclosed in the above Patent Document 1 has two steps of transferring the elastic EL plate from the flat roller and the organic EL material from the elastic + soil plate. Further, in the above printing: a from the plane roller to the elastic relief printing organic EL material, the order of the organic EL material is increased toward the rear of the elastic relief, and the amount of the organic EL material retained tends to increase. ® pushes a step in which the transfer amount of the organic EL material is increased in the stage of the transfer from the elastic relief to the I7 organic BL material. tendency. This can be considered as a phenomenon in which the organic rainbow material is pressed toward the rear when the low-viscosity organic anal material is subjected to contact transfer. Therefore, in the above printing apparatus, since the amount of transfer of the organic EL material applied by printing on the base 098114679 1351322 is uneven, it is difficult to form a film having a high film thickness uniformity. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a coating apparatus which can improve film thickness uniformity when printing and coating a coating liquid containing a machine-like material. In order to achieve the above object, the present invention has the following features. The first aspect is a coating apparatus for printing a coating liquid of a hard-filled el material on a substrate. The coating device includes a cutting table, a plate cylinder, a printing plate, a coating liquid supply unit, and a relative moving means. The mounting table has a substrate placed thereon. The P-brush plate is wound on the printing plate; the outer peripheral surface of the outer surface is formed with a convex pattern according to the printed pattern and a dot-like uneven surface on which the coating liquid is held on the convex pattern. The coating liquid supply unit supplies a coating liquid to the surface of the printing plate. In the state in which the upper surface of the substrate is brought close to or abuts against the printing plate, the plate is rotated by the core, and the stage is moved relative to the plate cylinder. The uneven surface is formed such that the holding amount of the coating liquid is gradually decreased toward the relative moving hand, and the printed matter of the upper side (4) is gradually decreased. In the first aspect of the J2 aspect t, the plurality of convex portions and the domains having the dot-like arrangement in the concave-convex surface are gradually reduced in the printing direction in the concave portion of the convex portion, and the (4) uneven material is caused to be the third__ The above two holdings. w# (4) In the uneven surface, the size of the concave portion is in the printing direction _ by increasing the size of the a portion in the direction of the P brush. In the fourth aspect, in the second aspect, the uneven surface is gradually reduced in the printing direction by the arrangement of the 098114679 5 1351322 of the convex portions, and is reduced. (5) The material is small in the printing direction. The fifth aspect is the plural convex portion in which the concave-convex surface is arranged right and the peripheral portion of the convex portion is formed in the first or second embodiment. Μ ^ Shape By forming the depth of the recess in the printing direction, @, the surface is formed into a quantity. In the second aspect, the size is gradually decreased in the printing direction, and the linear error is caused by the seventh aspect of the concave portion in the second aspect. 'The amount of holding of the embossing cloth. The size is gradually reduced in the printing side (four) segment 4 is the wrong amount by the concave portion. 0# Further decreasing the retention of the coating liquid == (4) The printing is enhanced by using a printing plate having a gradual decrease in the amount of the coating liquid formed on the substrate to maintain the coating liquid. The coating liquid coated on the substrate by the ρ brush turns to a sentence, so that a film having a high film thickness can be formed. For example, the amount of the coating liquid held on the convex pattern is increased from t toward the front, and the amount of transfer I that is reduced by the coating liquid that is pressed upward from the front toward the rear is increased by the amount of retention. The amount of transfer that can be reduced by Shaw can prevent the phenomenon that the amount of coating liquid is transferred after the printing of the sin. According to the second aspect described above, when the coating liquid is supplied to the printing plate, the coating liquid is mainly applied to the concave portion of the concave surface. Therefore, the holding amount of the coating liquid can be easily maintained by gradually increasing the size of the concave portion in the printing direction. The printing direction is decreasing. 098114679 The size of the convex portion of the uneven surface is reduced in the printing direction by the size of the convex portion of the uneven surface in the printing direction. According to the fourth aspect described above, by gradually densifying the concave direction, the convex portion arrangement pitch of the convex surface is gradually reduced in the printing direction in accordance with m. Convex money, when the coating solution is supplied to the printing plate, the coating material is mainly used in the concave concave portion, and the holding amount of the coating liquid can be kept in the printing because the turning weight is gradually "in the printing direction" The direction is decreasing. According to the sixth aspect described above, the amount of the coating liquid to be held can be increased to replenish the amount of transfer which is linearly reduced by the coating liquid which is pressed from the front to the rear in the printing direction. According to the seventh aspect described above, the uneven surface can be easily formed on the convex pattern of the printing plate. The above and other objects, features, aspects and advantages of the present invention will become more apparent from [Embodiment] Hereinafter, a coating apparatus i according to an embodiment of the present invention will be described with reference to Fig. 1 . Specifically, the coating apparatus 1 for manufacturing an organic EL element using an organic EL material, a hole transporting material, and an electron transporting material as a coating liquid will be described as an example, and the following description will be made. The coating device 1 applies an organic EL material, a hole-carrying material, an electron-transporting material, and the like to a coated object placed on a platform by, for example, a film of 15 mm square or 3 mm square. For example, on a glass substrate, an organic EL element is manufactured. Further, as described above, the coating apparatus 1 can use a plurality of coating liquids such as an organic EL material, a hole transporting material, and an electron transporting material as described above to use a polymer material for forming an organic rainbow material which forms a light-emitting layer (hereinafter, The polymer organic EL material is exemplified as a coating liquid representing these. In addition, Figure 1 shows the coating device! A perspective view of an important part of the outline. In Fig. 1, the coating device 1 roughly includes a plate cylinder 11, a coating liquid supply unit 2, a substrate conveying mechanism 5G, and a lifting mechanism 60 in which a printing plate 12 is wound. In the configuration of the coating liquid supply unit 20, a coating liquid supply roller 2, a slit nozzle 22, a first motor 28, and a second motor 29 are shown. this

The outer substrate transfer mechanism 50 includes a base 51, a transfer guide member A transport drive unit 53, and a transfer platform 54. Further, the elevating mechanism (9) is provided with a lifting platform 6 for lifting and lowering guide members 62, a lifting and lowering driving portion, and a supporting side plate 64. - the conveying guide member 52 is extended toward the horizontal direction perpendicular to the n-axis of the plate cylinder and fixed to the upper surface of the base 51. The transport drive unit 构成 is constituted by, for example, a linear motor in which the direction in which the pair of transport guide members 52 are extended is the drive direction. The transport platform 54 is placed on the substrate as an object to be coated, and the transport platform 54 is coupled to the transport guide member 52 and the transport drive unit 53. The driving force of the transport drive unit 53 is received. In the horizontal direction of the core of the plate cylinder 11, the substrate is placed! > The support side plate 64 is configured to be fixed to the lift flat (four) with respect to the lift platform 61. On the other hand, in the base 51, respectively, the oil straight direction 098114679 8 1351322 set a pair of lifting guide?丨 member 62. The direction in which the lift is extended is the drive direction, and the J; 63 is used to lift the guide 62 and the ball is rotated (four); the square (four) ball screw plate roll 1 and the coating liquid supply unit 2 are provided. Composition. In the lift: the platform 61 is provided with a stamp ±. Moreover, the lift platform 61: the plate 64 is connected to the lift guides, and is lifted and lowered by the lift drive unit 62. Therefore, the lift is performed. The driving force of the crucible n ^ 滚筒 plate cylinder 11 and the coating liquid supply portion lowering driving portion 63 can be raised and lowered with the lifting platform 61. Further, the i-th riding 28 and the second motor 29 are coupled to the driving, The slit nozzle 22 is moved up and down. Next, the basic configuration of the plate cylinder 11 and the coating liquid supply unit 20 will be described with reference to Fig. 2. Fig. 2 is a schematic view showing an important part of the coating device! The printing plate n is wound and fixed on the outer circumference of the plate cylinder 11, and its core is disposed in the horizontal direction. In the printing plate 12, the coating liquid pattern (for example, 15Qmm square plane) transferred to the substrate ρ is convex (four). Specifically, the printing plate 12 has a base portion 121 and a pattern portion 122. The base portion 121 abuts against the outer circumference of the plate cylinder U and is supported by the plate cylinder 2. The pattern portion 122 abuts on the printing The outer side of the base portion i2i of the plate roller ^ is formed in a shape corresponding to the transfer The pattern shape of the substrate P. Further, fine irregularities are formed on the upper surface of the pattern portion !22 (i.e., the upper surface of the convex pattern). For example, the printing plate 12 is an elastic relief plate made of a soft material such as a photosensitive material. In addition, 098114679 9 ι Μ 322 will be described in detail with respect to the printing plate 12 described later. The plate cylinder 11 is rotated in the direction of the arrow A in the state in which the core 12 is cut on the outer circumference of the circumference, and is received from the unillustrated The driving force of the rotary drive mechanism is rotated at a predetermined rotational speed. The transfer platform 54 is disposed below the plate cylinder 11. As described above, the substrate P is placed on the transfer flat 54 to be horizontally movable and received. The conveyance drive unit 53_dynamically moves horizontally at a predetermined moving speed. Further, the conveyance flat σ 54 is horizontally moved in the direction of the arrow B (ie, the horizontal direction perpendicular to the axis of the plate cylinder 11), and passes through the plate cylinder. Below U, the position of the lifting platform 61 (refer to FIG. 1) is adjusted so that the substrate ρ previously placed on the conveying flat 54 and the solid printing plate 12 on the plate cylinder are placed. The generated gap or the amount of press-fitting of the substrate 在 is within a predetermined range. The control unit (not shown) of the coating device 1 controls the transport drive unit 53 to transport the transfer platform 54 on which the substrate 载 is placed. Moving horizontally in the direction of the arrow Β in the figure and passing through the lower space of the plate cylinder 11, at this time, by controlling the horizontal movement speed of the rotation driving mechanism 'cooperating with the conveying platform 54, the plate is rolled in the same direction as the η (4) Α direction. Rotate to prevent the difference in speed between the homes. In this way, the transporting flat (four) plate p and the printing ship 12 are rotated relative to each other, and the (four) liquid (polymer EL material) supplied with the uniformity is gradually transferred to In addition, in the following description, the printing plate (4) indicates that the arrow A yang is rotated (four) the polymer organic 098114679 1351322 = when the material is printed and applied on the substrate P, the pattern portion i22 of the printing plate 12 is initially opposed to the substrate P. To the part, #helter " η 丨 丨 is regarded as the printing front end of the pattern portion 122 2s". Further, the pattern portion 122 of the printing plate 12 and the substrate ρ are the most

The portion facing the rear portion is regarded as "the print rear end position of the pattern portion 122". (4) coated with pure 21 (4) in parallel with the axis of the printing plate η: the coating liquid supply light 21 is composed of a flat roller having a smooth circumferential surface, and the coating liquid is supplied with a light 21 to make the circumferential surface abut The printing plate 12, which is connected to the plate cylinder =, is placed in the opposite direction (in the direction of the arrow C in the figure), and is turned, whereby the printing plate 12 i I BL material). The surface of the '12 is supplied with the body fluid (polymer organic other 'coating liquid supply... left and right _ outside, the plate cylinder 1! Also by the left virginity, the support portion constitutes the support of the mr tube support portion. The coating liquid supply unit 2 is separated from the coating liquid supply unit 2 and the supply unit 24 is removed. The supply unit is supplied with the eight working nozzles and supplied to the substrate P. Quantitatively polymer the organic material to the narrow surface to give a coating liquid to the circumference of the light 21 ^ ^ spout ' and form a polymer organic ρτ 098114679 ^ on the circumferential surface _ 〇 another 'from the slit nozzle ^ The slit is separated from the circumferential surface of the coating liquid supply port by a predetermined distance, and the distance can be respectively driven by the motor 1351132 and the second motor 29 (refer to FIG. 。. Then, the polymer organic EL material is supplied to the printing) The circumferential surface of the coating liquid supply roller η after the surface of the plate 12 is washed by the cleaning mechanism 23. Further, an example of the structure of the cleaning mechanism 23 will be described later. Further, the polymer organic EL material is transferred onto the substrate P. After the 'printing plate 12 surface can also be carried out by a cleaning mechanism (not shown) In this manner, the coating apparatus 1 supplies the polymer organic material to the surface of the coating liquid supply 21 from the slit nozzle 22, and forms a thin film of the polymer organic EL material on the surface of the coating liquid supplied to the relative. After that, the polymer organic EL material is transferred onto the convex pattern formed on the printing plate 12, and a thin film pattern of the local molecular organic EL material is formed on the printing plate 12. Formed on the printing plate 12 The film pattern of the organic EL material is printed and coated; for example, by forming a convex planar pattern as the pattern portion 122' of the printing plate 12, the coating polymer can be printed on the substrate p in a film state in which the planar pattern is blended. An example of the structure of the cleaning mechanism 23 is shown in Fig. 3, and Fig. 3 is a schematic view showing an example of the cleaning mechanism 23. The surface of the coating liquid supply roller 21 remains high. The molecular organic matter is further advanced to supply the high-mole m material from the slit nozzle 22 from above. In this case, the film thickness of the high-division material on the surface of the coating liquid supply roller 21 is increased and uneven, and the result is a sub-organic EL material. Will be completely printed and coated On the substrate p. In order to prevent such high 098114679 12 丄:>:) 不 organic el germanium material unevenness, after the polymer organic material [the material is supplied to the surface of the printing plate 12, the surface of the (four) liquid supply pure 21 is The cleaning mechanism 23 is cleaned. The cleaning mechanism μ is provided with a cleaning liquid container n to the knife 232, the second doctor blade 233, and the recovery line 234. The first doctor blade 232 supplies the polymer organic rainbow material. To the surface of the printing plate 12, the two pieces of organic organic material of the first scraper 232 V are scraped off, and the recovery line 234 is recovered by the two molecules of the organic EL material of the first scraper 232 V. Before the EL material is supplied to the organic EL material, the surface of the polymer organic surface _ and the second P stencil 12 may be applied to the surface of the coating liquid supply roller 21 or the solvent of the polymer organic a material. In this case, the molecular ==2 is stored on the surface of the coating liquid supply 21, the main height is 1..1, the cleaning liquid is scraped off together, and the recovery line 234 will be & the first scraper 232 is falling. Shi w sigh (four) illusion 4 will be received. Thus, the solidification of the EL material and the cleaning liquid by the supply of the cleaning agent is carried out. In the month, the residual polymer organic EL material cleaning liquid container 231 is opened as a polymer organic EL material. The cleaning solution C (for example, will be from the first scraper 232 to the main: eight. Then the 'washing liquid container 231 is supplied to the surface of the pro-21' (the body/body ^ organic anal material after the coating liquid in the cleaning liquid C Inside. Then, 帛2 such as ° is the lowermost surface), impregnation

After the coating is applied to the pro- 21 3 (four), the scale H complex C is immersed on the surface of the cleaning liquid C to fall. 098114679 13 1351322 Next, the relevant shape of the printing plate 12 will be described with reference to Figs. 4 to 9'. Further, Fig. 4 is a side view showing an example of the shape of the printing plate 12 which is planarly developed. Fig. 5 is a plan view showing an example of the shape of the printing plate 12 which is developed in a planar shape. Fig. 6 is a plan view showing an example of a dot pattern IV formed on the surface of the pattern portion 122. Figure 7 is a cross-sectional view of the dot pattern of the section AA of Figure 6 as viewed from the B direction. Fig. 8 is a cross-sectional view of the dot pattern Μ viewed from the direction D in Fig. 6 to the other surface CC of Fig. 6. Fig. 9 shows an example of changing the halftone dot pattern 规格 specification by changing the halftone dot diameter Dm from the printing end position 122s to the printing rear end position 122e. In FIG. 4 and FIG. 5, the printing plate 12 has the base portion 121 and the pattern portion 122. Further, in FIGS. 4 and 5, the printing end position 122S of the pattern portion 122 is disposed on the left side, and the printing rear end position 122e is disposed. Right. Therefore, when the printing plate 12 is wound around the plate cylinder 11, the substrate P is sequentially opposed to the right side from the upper left side of the pattern portion 122 shown in Figs. 4 and 5 (the printing direction is shown). The lower surface of the base portion 121 abuts against the outer circumference of the plate cylinder 11 and is supported by the plate cylinder 11. Further, the pattern portion 122 is formed on the upper surface of the base portion 121 in a convex shape according to the pattern shape transferred to the substrate p. Further, on the upper surface of the pattern portion 122 (i.e., the surface facing the substrate P), a dot pattern 成为 which is a fine uneven shape is formed on the entire upper surface. Further, the base portion 12i and the pattern portion 122 may be integrally formed to be formed by being bonded to each other by adhesion or mechanical bonding. In Fig. 5 and Fig. 6, the dot pattern Μ is formed by fine bumps (hereinafter referred to as "mesh dots") 098114679 14 1351322. That is, the upper surface of the pattern portion m is not a smooth surface, and the ridges are formed with fine irregularities by the convex dot pattern. For example, the dot pattern m is finely processed on the pattern portion 122 by exposing the photosensitive material to the dot pattern. As shown in Fig. 7 and Fig. 8, the top surface of the Tt' convex net dot is formed into a circular plane whose diameter d is hereinafter referred to as "Dm"). Then, the halftone dot is formed in a circular shape in which the circular plane is gradually expanded toward the topmost portion and inclined toward the deepest portion of the concave portion R (the front end is formed with a conical shape having a flat portion). That is, a concave portion R is formed around the halftone dot. In the following description, the interval between adjacent dots is set to "the dot pitch Pm". Specifically, as shown in FIG. 6 and FIG. 7 , in the lattice dots arranged in a lattice shape, the vertical or horizontal adjacent dots on the lattice are in the closest state, and the distance between the topmost Mt centers adjacent to each other in the direction of the sea is set. Set to "Dot spacing

Pm". Further, in the following description, the deepest depth of the concave portion is set to "the depth Rd of the deepest relief_". Specifically, as shown in Fig. 6 and Fig. 8, in the lattice dots of the _ lattice shape, the intermediate position between the adjacent halftone dots in the oblique direction of the lattice is the concave portion R" which is deep. Therefore, the depth of the concave portion r at the intermediate position becomes "the deepest relief depth Rd". In the dot pattern M on the upper side of the pattern portion 122, the dot diameter Dm gradually changes from the -printing end position U2S to the printing rear end position 122e. As shown in Fig. 5 and Fig. 9, in the dot pattern pattern on the pattern portion i22, the diameter Dm is made from the minimum dot diameter 098114679 15 1351322 at a dot pitch Pm_1 from the printing front end position 122sjL__^i22e.

Dms linearly changes to the maximum dot diameter Dml. When the dot pitch pm is formed so as to change the dot Dm in the dot, the width of the recess R also changes in accordance with the change, and thus the depth of the deepest land depth Rd also changes. Specifically, as shown in FIG. 9, as the dot diameter Dm gradually increases from the minimum dot diameter Dms to the maximum dot diameter Dm1', the deepest relief depth Rd gradually decreases from the relatively deep ridged rdd. To a relatively shallow relief depth Rds. Therefore, the dot pattern 上 on the pattern portion 122 is between the printing front end position 122s and the printing rear end position 122e, and the deepest embossing depth Rd linearly changes from the embossing depth Rdd to the ridge depth Rds (Rdd > Rds). In this manner, by changing the size of the dot pattern formed on the pattern portion 122 from the printing front end position 122s to the printing rear end position 12 and the yield, the polymer can be held on the pattern portion 12 2 . The amount of retention of the organic EL material changes. Specifically, when the coating liquid supply roller 21 supplies the polymer organic EL material to the surface of the printing plate, the polymer organic EL material is held by the concave portion r of the halftone dot pattern M and the top portion Mt. In principle, since the concave portion R of the dot pattern can be maintained, the polymer organic anal material is maintained, so that the amount of the organic EL material retained in the gateway_concave portion R, _called r is also changed. many. Further, the deepest ridge depth Rd is gradually changed from the printing end position 122s of the pattern portion toward the printing rear end position. Therefore, the holding amount of the polymer organic material 098114679 1351322 is gradually reduced from the printing front end position 122s on the upper surface of the pattern portion 122 toward the printing rear end position. On the other hand, when the coating apparatus 1 performs contact transfer of the polymer organic EL material, the current organic EL material is pressed toward the rear. As an example, in the coating apparatus 1, after the printing liquid supply roller 21 is rotated, the stage of printing the high molecular organic EL material onto the printing plate 12 is further behind the printing plate 12 (that is, after printing on the upper surface of the pattern portion 122). At the end position 122e side), the amount of the polymer organic EL material retained tends to increase. As another example, in the Φ coating apparatus 1 , the stage of transferring the polymer organic material from the printing plate 12 to the substrate P is behind the printed substrate p (that is, after printing on the pattern portion 122) The end position 122e side) 'The amount of transfer of the polymer organic EL material will be more. However, this tendency can be offset by changing the dot pattern μ size formed on the pattern portion 122 from the printing leading end position 122s to the printing trailing end position 122e. For example, 'increasing the Φ from the rear toward the front of the pattern portion 122 and increasing the amount of the molecular organic EL material to compensate for the reduction in the amount of the transfer of the polymer organic EL material from the front side of the printing toward the rear side of the printing. . That is, the amount of the polymer organic E]L material is gradually reduced from the printing end position 122s on the upper surface of the pattern portion 122 toward the printing rear end position 122e, thereby preventing the polymer organic EL from being applied behind the printing coating. · The more the material transfer amount becomes ^. Therefore, since the transfer amount uniformity of the polymer organic EL material applied by printing to the substrate P is improved, a film having a high film thickness can be formed. Further, with respect to the end portion of the upper portion of the pattern portion 122, a halftone dot diameter D m formed on the inner side of the inner side of the 098114679 17 1351322 may be formed to form a halftone dot. Here, the case where the polymer organic EL material is printed and applied on the substrate P by a coating film 1 in a 15 〇 ππη square film shape is considered. Then, on the pattern portion 122, a certain dot pitch pm=85 pm (micrometer) (the number of mesh lines is 3〇〇1, a certain dot diameter Dm=66 gm, and a certain deepest relief depth Rd=2 (^m is formed). The dot pattern Μ. When the polymer organic EL material is printed and applied on the substrate by using the printing plate 12 prepared under such conditions, the average film thickness of the front portion of the printing coating is about 60 nm (nano), and the printing is applied. The average film thickness at the center of the cloth is about 80 nm. The average film thickness at the rear end portion of the printing coating is about 100 nm. That is, the rear side of the printed coated substrate P (that is, the printing rear end position 122e above the pattern portion 122). On the other hand, the film thickness of the polymer organic material tends to be thicker. On the other hand, on the pattern portion 122, a certain dot pitch is Ριη-85μιη (the number of screen lines is 3〇〇lpi), and the dot diameter Dm is printed. The front end position 122s is linearly changed from ό6μιη to 8〇μηη toward the printing rear end position i22e, and the deepest relief depth Rd is linearly changed from 20μηι to Ι2μηι from the printing front end position 122s toward the printing rear end position U2e to form the dot pattern M. Conditioned printing In version 12, when the organic molecular EL material is printed on the substrate P, the average film thickness of the front portion of the printing coating is about 60 nm, and the average film thickness of the central portion of the printing coating is about 60 nm. The average film thickness is about 60 mn. That is, the printed substrate can be printed by changing the size of the web 098114679 formed on the pattern portion 122 from the printing front end position f122s to the printing rear end position i22e. The entire surface of the p-coating is applied to the molecular organic EL material. In addition, in the above, the polymer organic EL on the pattern portion 122 is made by fixing the dot pitch pm to a dead point diameter Dm. The change in the amount of the material is changed, but the amount of the change may be changed by changing other ugly specifications. For example, the amount of the polymer organic EL material held on the pattern portion 122 may be changed by changing the dot diameter Dm while fixing the dot diameter Dm. The figure shows the specification of the dot pattern Pm which changes the dot pitch Pm from the printing leading end position 122s to the printing rear end position 122e. In Fig. 1A, the dot pattern ν on the pattern portion 122 [from the printing front end position i22s to Between the printing rear end positions 122e, the dot pitch Pm is gradually changed. For example, as shown in FIG. 10, the dot pattern V on the pattern portion 122 [between the printing end position 122s and the printing end position 122e, the dot diameter Dm is formed constant. The dot pitch Pm is linearly changed from the maximum dot pitch pmi to the minimum dot spacing 躁Pms. Thus, when the dot diameter Dm is kept fixed and the dot pitch Pm is changed, the width of the four portions R is also changed, so the deepest convex The depth of the grain depth Rd also changes. Specifically, as shown in FIG. 1A, as the dot pitch Pm changes from the maximum dot pitch P to the minimum dot pitch Pms, the deepest relief depth Rd gradually decreases from a relatively deep relief depth Rdd to a relative Lighter relief depth Rds. Therefore, the dot pattern 图案 of the pattern portion 122 097114679 19 1351322 is the same as that of FIG. 9 , and the deepest relief depth Rd is changed from the ridge depth Rdd line from the printing front end position 122s to the printing J rear k position I22e. To K depth Rds (Rdd > Rds). Thus, even if the dot pitch Pm is changed to change the size of the dot pattern ,, the amount of holding of the high molecular organic EL material can be gradually reduced from the printing end position 122s on the upper surface of the pattern portion 122 toward the printing rear end position me. Further, with respect to the end portion of the upper surface of the pattern portion 122, a halftone dot pitch Pm formed at a relatively short dot pitch Pm formed on the inner side may be formed. Furthermore, in addition to the change in the dot pitch, the change in the dot diameter Dm can also change the specification of the dot pattern. Specifically, from the printing front end position 122s to the printing rear end position 122e, the dot diameter Dm is gradually changed, and the dot pitch pm is also gradually changed. Thus, even if the halftone dot diameter Dm and the halftone dot pitch Pm are changed from the printing front end position 122s to the printing rear end position 122e, the deepest relief depth gauge (1 gradually decreases and thus the printing front end position 122s from the upper surface of the pattern portion 122 can be made. The printing amount of the polymer organic EL material can be gradually reduced toward the printing rear end position 122e. Further, in the above description, the halftone dot pattern M on the pattern portion 122 is from the printing front end position 122s to the printing rear end position 1226. The dot diameter D m and/or the dot pitch P m are linearly changed, but the dot pattern Μ can be formed by other variations. As a first example, between the printing front end position 122s and the printing rear end position 1226, The dot diameter Dm and/or the dot pitch Pm are changed stepwise to form a 098114679 20 丄 dot pattern Μ. As shown in Fig. 11, the dot is straightened from the printing front end position 122s to the printing rear end position 122e. From the minimum dot diameter Dms phase (5 stages) to the maximum dot diameter _, (4) the dot pattern is fortunate M. Thereby, the deepest relief depth Rd from the relatively deep ridge depth leg stage (5-stage) changes to a relatively shallow relief depth contact, that is, when the specifications of the copper formed on the pattern portion 122 are changed in stages, the specification of the circumferential pattern 阶段 is changed from the pattern portion 122. Ink 丨 a Α Ρ Ρ 则 则 则 则 则 则 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 122 The more the back of the printed coating, the more the organic EL material transfer amount of the guest's famous female back knife. As a second example, the dot is made from the printing front end position 'month position 122s to the printing rear end position i22e. The diameters Dm and _fj; and the pitch Pm nonlinearly change to form a dot pattern Μ 〇 for example, force you|; π El 在 is from the printing end position 122s to the printing rear end position φ 122e (f) The minimum dot diameter 〇(10) is linearized to the maximum dot diameter Dml by 2 or 3 people to form a dot pattern Μ. The above set values or relations are only examples, of course, other «also Values or relationships can also implement the invention. For example, if the dot diameter is added and/or, the relationship between the circumferential distance Pm and the minimum value/maximum value can be set, such as the properties of the coating liquid (material, solvent, viscosity, etc.), and the amount of printing coating ( k cloth / machine, target film thickness, printing coating area, etc.), printing coating speed, 098114679 21 1351322 Transfer conditions (coating solution supply roller 21, printing plate 12, and substrate P transfer interval, extrusion In the above description, the dot pattern is arranged in a square lattice to form a dot pattern Μ, but other materials may be used. Arrange the patterns to arrange the dots. For example, the dot arrangement line is arranged such that the dot arrangement position is shifted by 1/2 of the halftone dot pitch Pm in the arrangement direction, that is, a so-called honeycomb arrangement to form dot patterns. Further, in the above description, the dot pattern is formed using the topmost Mt to form a dot pattern of a circular plane, but dots of other shapes may be used. For example, the dot pattern of the elliptical or multi-negative plane may be formed using the topmost Mt to form a dot pattern. Further, it is also possible to form a dot pattern Μ using a topmost Mt non-planar dot such as a convex type or a conical type. In the above embodiment, a polymer organic EL material which forms a light-emitting layer is used as a coating liquid, and the coating apparatus 1 is applied to the substrate ρ. Of course, a red-emitting polymer organic EL may be used. The material, the green light-emitting molecular organic EL material, the blue-emitting high-molecular organic EL material, and the white-emitting south molecular organic EL material are used as a coating liquid for printing and coating. Further, the coating device of the present invention can also be used for printing and coating of other coating liquids such as a hole transporting material or an electron transporting material. Further, in the coating apparatus of the present invention, a low molecular material coating liquid can also be used as the organic EL material for forming the light-emitting layer. Specifically, in the case where the coating device of the above embodiment is used for printing and coating a hole to feed a material, the coating step is a step in the process of producing an organic EL device. When manufacturing an organic EL device, Gudan has a hole transporting material (for example, PEDOT, etc.), printing coating, red light-emitting 77 organic EL material printing coating, green light-emitting polymer organic EL material printing coating, and blue light emitting. A coating step of a polymer organic EL material printing coating, a white polyfluorene-emitting polymer organic EL material printing coating, an electron transporting material printing coating, or the like, but the coating device of the present invention can be used in any printing coating step. As the organic light-emitting material that emits strong, green, blue, and white light in the coating apparatus 1 of the above-described embodiment, for example, a metal-based complex, a benzo compound metal complex, or a benzotriazine can be used. Metal complex, phthalocyanine, porphyrin, ruthenium metal complex, morphine, styiyl and distyryl compounds, woo, red fluorescens Ethene, jin, chess, diphenyl ketone and other condensed aromatic compounds such as two-pin, pyrimidine, three-pin and other aromatic compounds; quinacridones, coumarins and other heterocyclic ring compounds; polyphenylene (polyphenylene), Polypyridyl, polythiophene 'p〇lyflu〇renylene', polyphenylene ethylene and other 7-inch compound compounds and so on. However, the organic luminescent material used in the coating device j is not limited to the exemplified materials, and other materials may be used. Further, as the hole transporting material used in the coating device 1 of the above embodiment, for example, polyvinylcarbazole and its derivatives, polythiophene and derivatives thereof, polyphenylene and derivatives thereof, polyphenylene ethylene can be used. And derivatives thereof, polyolefins having a triarylamine skeleton, polyacrylic acid, polyarylate, polycarbonate, polyacetate, polystyrene, polyurethane, styrene, etc. However, coating cracking 1 The hole transporting material used in 098114679 23 1351322 is not limited to such materials, and other materials may be used. Further, in the above embodiment, a glass substrate is used as an example of the object to be coated, but other members may be used as the object to be coated. For example, a substrate having flexibility made of polyethylene terephthalate (PET) or polycarbonate (such as ruthenium or the like) can be used as the object to be coated of the coating device 1. Further, in the above description, While the transfer plate 54 on which the substrate P is placed is horizontally moved, the plate cylinder u is rotated to perform printing and coating. However, the transfer table 54 may be fixed so that the plate cylinder u itself is opposite to the horizontal movement direction. The horizontal direction is moved and rotated. If at least one of the plate cylinder 11 and the transfer stage 54 is moved in the horizontal direction, the same printing can be performed. Of course, in the above embodiment, the coating is applied. The nozzle for supplying the coating liquid on the surface of the liquid supply roller 21 is a slit nozzle 22 having a slit in the longitudinal direction of the coating liquid supply roller 21, but other nozzles may be used. When the surface of the coating liquid supply roller 21 is supplied with a south molecular organic EL material having a predetermined flow rate in the axial direction of the coating liquid supply roller 21, a nozzle having a recirculation outlet may be used. For example, it may be used in the coating liquid supply roller 21. Axis The nozzle and the coating method of the present invention can increase the uniformity of the film thickness when printing and coating the coating liquid containing the EL material, and can be effectively used for manufacturing organic parts. Apparatus, method, etc. for illumination, display, etc. 疋098114679 24 1351322 FIG. 11 shows an example of changing the specification of the halftone dot pattern 阶段 by changing the dot diameter Dm from the printing end position 122s to the printing rear end position 122e stepwise.

[Main component code description] 1 Coating device 11 Plate cylinder 12 Printing plate 20 Coating liquid supply unit 21 Coating liquid supply roller 22 Slit nozzle 23 Cleaning mechanism 24 Supply source 28 First motor 29 Second motor 50 substrate Transport mechanism 51 Base 52 Transport guide member 53 Transport drive unit 54 Transport platform 60 Lift mechanism 61 Lift platform 62 Lift guide member 098114679 26 1351322

63 Lifting drive unit 64 Supporting side plate 121 Base portion 122 Pattern portion 122e Printing rear end position 122s Printing front end position 231 Washing liquid container 232 First to knife 233 Second to knife 234 Recovery line C Washing liquid Dm Dot diameter Dml Maximum dot diameter Dms Minimum dot diameter M Dot pattern Mt Top P Substrate Pm Dot spacing Pml Maximum dot spacing Pms Minimum dot spacing R Concave Rd Deepest relief depth 098114679 27 1351322

Rdd Rds relief depth relief depth 098114679

Claims (1)

1351322 VII. Patent application scope · Material coating device for printing and coating a coating liquid containing a machine on a substrate, comprising: a mounting table on which the substrate is placed; Plate roll; the printing plate is rolled on the outer surface of the above-mentioned plate cylinder, and the surface is formed with a convex pattern of the printed coating g and a dot-like uneven surface on which the coating liquid is held on the convex pattern; and a coating liquid supply unit that supplies the coating liquid to the surface of the printing plate; and a relative movement Means, in a state in which the upper surface of the upper wire plate and the upper material are in close contact with each other, the plate cylinder is rotated about the axis: the first stage is moved relative to the plate cylinder; and the phase is printed The uneven surface is formed so as to keep the amount of the coating liquid held, and the moving means gradually decreases the printing direction facing the upper surface of the substrate. 2. The coating device according to claim 1, wherein the uneven surface has a half dot (four) complex convex portion and a concave portion formed around the convex portion, and the concave and convex surface is formed by printing the size of the concave portion The direction is gradually decreased, and the holding amount of the above coating liquid is gradually reduced. . 3. The coating apparatus according to claim 2, wherein the size of the convex portion is gradually decreased in the printing direction by increasing the size of the convex portion in the printing direction. 4. The coating device according to the second aspect of the invention, wherein the concave-convex surface is gradually reduced in size in the printing direction by the arrangement interval of the convex portions, and the size of the concave portion is 5. The coating device of the first or second aspect of the invention, wherein the uneven surface has a plurality of convex portions arranged in a dot pattern and a concave portion formed around the convex portion, wherein the concave and convex surface is formed by The coating device of the second aspect of the invention, wherein the concave-convex surface is formed by making the concave portion have a size as described above, wherein the concave portion is gradually reduced in the printing direction. The printing direction is linearly decreased, and the linearly decreasing amount maintains the holding amount of the coating liquid. 7. The coating apparatus according to claim 2, wherein the uneven surface is formed by sizing the concave portion in the printing direction. Decreasing, while gradually decreasing the amount of the above coating liquid is maintained. 098114679 30