TWI345632B - - Google Patents

Description

1345632 IX. Description of the Invention: [Technical Field] The present invention relates to a detecting method and apparatus, and more particularly to a method and apparatus for detecting contaminated impurities of a light sensing element. 5 [Prior Art] Light sensing components have become an indispensable core in most optical electronic devices, such as digital cameras, mobile phones with photography functions, interactive electronic toys, barcode readers, webcams, and security. Internally configured CMOS components (Complementary Metal-Oxide Semiconductor) or CCD (Electrically Coupled Components), such as systems, automotive electronics, and personal digital assistants (PDAs), by sensing optical signals Capture images and read them. If there is contamination or impurities in front of the photosensitive grains in the light sensing element, whether it is dust, package surface defects, or packaging surface contamination, any factor that affects the cleanliness of the photosensitive path will undoubtedly become the limit of sensing precision. Important level. In this example, a CMOS device is taken as an example. To clearly illustrate the component composition relationship and packaging process of the device, please refer to the exploded view of Fig. 1, and the dotted arrow is the combined direction. The substrate 10 of the circuit 20 is, for example, a printed circuit board, and the circuit board 10 is provided with a plurality of contacts 12 as electrical connection contacts for mounting applications; the circuit substrate 1 is provided with a die as the photo sensor 16 For fixing the photo sensor 16, it is fixed on the circuit substrate 10 with the heat-resistant colloid 14, and thus the structure of the photo-sensing element has been substantially completed; however, the photo-sensing device 16 is extremely fragile and vulnerable to external force and damage. The outer ring 1345632 is affected by humidity and pollutants. Therefore, the outer cover is sealed with a light-transmissive cover 2〇, so that the light can be incident on the light sensing H 16, and the crystal grains in the covered chamber are protected. Of course, the circuit substrate here does not have to be a hard circuit board or a soft board, or even a basic base (4) for electrically guiding the inner die to the outside.

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2 is a schematic diagram of a basic structure of a conventional light sensing element, that is, a combination of the drawings, the components are combined to form a light sensing element 彳, and a cavity 18 is formed between the light transmitting cover a 20 and the peripheral wall, usually a cavity The body is filled with a second gas, filled or filled with an inert gas to maintain the photosensor 16 from oxidation. The process of encapsulation, as is well known to those skilled in the art, is to be ordered in a clean room. However, the dust chamber is not really & "dust-free", i can be configured according to the ventilation of the clean room, and the amount of foreign matter that can be controlled. Wait to distinguish the level of the clean room, try to reduce the variation factor and have been 'normally clean room to be observed' - do not carry (need to maintain positive pressure, etc.), do not occur (need to wear work clothes, etc.), do not pile up (need to maintain cleaning Etc.) and exclusion (for ventilation, etc.) are to minimize the rate of defects in the product affected by foreign matter. Even if automated manufacturing equipment has been used for manufacturing and packaging operations, and various light-cleaning components are used to maintain the light-sensing components in a near-dust-free environment, but there is always a sparseness, due to the operator and the real environment, the impurities depend on 2〇 However, it may exist in the surface and structure of the light sensing element; as shown in FIG. 3, the light sensing element 1 may be subjected to a schematic diagram of a contaminated area, and there may still be a pollutant such as a worker's hair present in the light sensing element] The surface, or the dust-like contaminant 2 is left above the photo sensor 16; for the photo-sensing element 1, the contamination directly impairs the design performance and affects the carrying of the crucible: >4:)〇 :5:Ζ Sensing the subsequent use of 70 pieces of 1 product; of course, if the cleaning action is carried out, the contaminant-22 can be eliminated, but the contaminant 24 is packaged inside the light sensing element 1 and cannot be simply Removal and removal will cause adverse effects such as sensing errors and image capture. Of course, each device has different requirements for the accuracy of the light sensing 5C, or can accept different degrees of hysteria, and does not need to eliminate all light sensing components that are only slightly contaminated. 8. Therefore, if it is possible to provide a method and a device for detecting contamination impurities that can be automated and efficient, and the test data can be separately established and retained for use in light sensing (4), it is undoubtedly possible to find the aforementioned concerns in the detection stage. To influence the extent and extent of the effect, it is not necessary to kill all the light sensing elements with impurities and clean them up or classify them. It should be - the best solution [invention]] 15 Therefore, one of the objects of the present invention is to provide an accurate detection. The light sensing component polluting impurity detecting device for the relative position of the contaminated shells. The present invention further provides a light detecting component polluting impurity detecting device that simplifies the sensing performance of the light sensing component itself. Further, the present invention provides a contaminant impurity detecting device that can detect a contaminant or a light sensing element that is occluded by a photosensor itself by projecting a plurality of parallel solid-state parallel light sources at different times. The purpose of the present invention is to provide a method for detecting contamination of a light sensing component capable of accurately detecting the relative position of contaminated impurities. Still another object of the present invention is to provide a method for detecting a contaminated impurity of a light sensing element which can simultaneously perform a component performance test. The present invention is again and again aimed at providing a rapid detection and detection via 7 1345632 As a result, a method for detecting a contaminated impurity of a light sensing element classified by a defective product level is provided. Therefore, the present invention is a light sensing element for detecting a contaminated impurity, wherein the light sensing element has a light sensor, a circuit board having a plurality of contacts connecting the photosensors, and a light transmissive cover forming a cavity enclosing the photosensor together with the circuit substrate, the detecting device comprising: a power supply a test socket connecting the plurality of contacts of the light sensing component to be tested; a parallel light source for at least partially covering and illuminating the test seat position by a plurality of different solid angles; and controlling the parallel light source and electrically connecting the contacts And 10 receives the processing device from the photo sensing element detection signal; thereby obtaining the correct position of the contaminating impurity relative to the device to be tested. Parallel light is used as the light source, and the light sense to be measured is properly utilized; then the sensing work 35 of the component itself simplifies the detection of the device, reduces the manufacturing cost of the device, and improves the precision of the inspection; Immediately know where the impurity is located and the scope of influence 'When', depending on the test results, the patent can be used to classify the product, such as cleaning, stripping, and other software. It is to be compensated or used for products with different requirements. [Embodiment] The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments with reference to the drawings. Please refer to FIG. 4 , which is a perspective view of the first specific embodiment of the flute month of the present invention. The detecting device 3 of the present invention is combined with the power supply connection of the light sensing component to be tested “45632 . Hard contact Test stand 4; - a parallel light source 5 for at least partially covering and illuminating the test stand 4 at a plurality of different solid angles, and a control of the flat light source 5 and electrically connecting the same The processing device 6 from the photo sensing element ^ signal is received at a point. 5 further explaining the related structure of the parallel light source. In this embodiment, the parallel light source 5 mainly includes a laser element 52 (for example, a laser diode, hereinafter referred to as LD), and the light-emitting angle is extremely narrow and the wavelength is single. The feature is such that the illuminating beam of the laser element 52 passes through a diffusing lens group 54 before being irradiated to the test pedestal 4 to diffuse into a predetermined illuminating area, which can substantially cover a parallel beam of the entire component to be tested; In order to provide different stereo illumination angles, the detecting device 3 is further provided with a driving device for driving the laser element 52 to change the position. 56. However, as can be easily understood by those skilled in the optical engineering field, the above L 〇 can also be changed to emit light. a diode (hereinafter referred to as LED); and the above-mentioned driving device 15 is not necessary, as shown in the perspective view of the second embodiment of the present invention, the detecting device 3' includes the test stand 4' and the processing device 6, In addition, the parallel light source 5' in this example further includes a plurality of laser elements whose illumination illumination direction at least partially covers the position of the test stand 4'. In this embodiment, five sets of laser 20 elements 52a, 52b, 52c, 52d and 52e respectively having different beam angles from the test stand 4' are used, and the diffusing lens group of the enlarged image surface is correspondingly arranged. 54a, 54b, 54c, 54d, and 54e, to form a parallel light source 5, and FIG. 6 is a perspective view of a third embodiment of the present invention. The detecting device 3n includes a test stand 4" similar to the previous two embodiments; The 1345332 device 6", and the parallel light source 5" providing the vertical and oblique illumination angles, especially to illustrate the relative angle between the test stand and the light source, the position of the parallel light source 5" is unchanged in this example And the detecting device 3" includes a driving device 56", thereby driving the test seat 4" to rotate relative to the parallel light source 5" so that the test socket 4" can be illuminated by the parallel light source 5" at different relative solid angles. Whether the light source is moving, the test seat is moving, or both are relatively moving 'as long as the relative motion required by the present invention is achieved.

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Figure 7 shows the refraction and reflection after the incident light is irradiated to the active surface. The incident light originally passes through the first medium having a refractive index of ... and enters the second medium having the refractive index h after passing through the active surface, when the light u is at the normal line fl When the vertical line position is incident on the second medium na by the first medium, different degrees of reflected light L3 and refracted light L2 are generated, and the incident angles of the three paths of light with the normal line FL are respectively Θ1, the reflection angle Θ3, and the angle of refraction. Θ2; according to the law of reflection, θι = θ^. Further, since the object to be detected by the present invention is a light sensing element, the amount of reflected light is negligible, so that most of the light energy will be refracted along the L2 direction at the incident angle L 彳, ηθΐηθρί^ΐηθ2. When the medium is air, ~=1, that is,

SinG^r^SinGz. Regarding the actual application flow of the present invention, FIG. 8a is a key structure of a light sensing component 20, the transparent cover 20 has a thickness of %, the light sensor 16, and the space thickness of the light-transmissive cover is h, In 8b, 8c, 8d, the same number will be used to represent the relationship between the transparent cover 20, the photosensor 16, and the thickness % and value; the position of the contaminant 70 in Fig. 8a is above the light transmissive cover 20, If the size is d〇, if the parallel light source 照射 is irradiated in the direction perpendicular to the cover of the light-transmissive cover 1345263, the incident center θ=〇, that is, the position of the contaminant center is x' The width of the image is also d0; in Fig. 8b, if the parallel light source h is irradiated with the incident angle θ χ (θ χ off 0), the large j of the contaminant does not change, but the center point will fall on the photo sensor 16 'X1', the displacement value of ΔΧ1' is different from the in-situ 5' X' difference. △ XiMUsinexVv^r^-sinqxn+t^tanex··, (where η is transparent The refractive index of the light-sealing cover 20'. # In Figure 8c, the contaminant 74 is located below the light-transmissive cover 20', if illuminated by a parallel light source 11 at an angle of incidence θ χ (θ χ off 0) , the size of the contaminant 10 does not change, but the center point will fall at the X2 of the photosensor 16'. Compared with the original position X, the displacement value of the phase difference is Δ χ 2, which can be obtained: △ X2 = t2 * tan0x. ._ (Formula 2) In Figure 8d, 'contaminant 76 is located above the light sensor 16, if it is illuminated by a parallel light source 以! at an incident angle θ χ (θ χ off 0), the size of the contaminant 76 is unchanged. 'But the center point will fall at the X3 of the light sensor 16, compared to the Luyuan position X, the center point will not change, so the displacement value △ Χ3 =0.. (Expression 3) Thus, when from the light After obtaining the image data at the sensor, it can be judged whether the displacement value of the center point conforms to Equation 1, Equation 2, or Equation 3, thereby judging the location of the contaminant = 20. Of course, the above analysis assumes that the contaminant is highly distant. Less than the size of its cross-sectional area, so the shadow effect of the height is negligible; but if the height of the contaminant is equal or larger than its size and cannot be ignored, then the above conditions will have additional effects' and need to proceed as follows - 1345632

Figure 9a is a schematic diagram of the main structure of a light sensing element. The thickness of the light-transmissive cover 2〇 is %, the light sensor 16" is thicker than the space of the light-transmissive cover, and is still in 9b, 9c The same number will be used to represent the relationship between the light-transmissive cover 2〇, “photosensor 16” and the thickness I and h; the position of the contaminant 8〇 in FIG. 9a is above the light-transmissive cover 20”, and the size is d0. And the height is h. When the parallel light source 丨1 is at an incident angle θ = 0, that is, perpendicular to the light-transmitting cover 2 〇", the light is on the light sensor 16", and the center position of the pollutant is X. , a • v , S Another parallel light source 丨 1 is illuminated at an incident angle of 0 y (0 y off 0). The size of the 3 image of the pollutant 8 为 is dM = d 〇 + h * tan 0 y. (Expression 4) and the center The point will fall on the X1 of the photo sensor 16", and the displacement value of the difference from the original position X' ' is Δ X1 ·, and the optical theorem can be used to find Δ Xi-iti^sinGy)//· (n2 -sin2ey))+t2*tan0y+h/2*(tan0y). (^ 5) " where η is the refractive index of the light-transmissive cover 20", which can be obtained using Equation 4. h = (dM-cl〇) *cotey... (Formula 6) The height h of the contaminant can be determined so far. The position of the contaminant 82 in FIG. 9b is below the light-transmissive cover 2〇”, and the size is d〇 and the twist is h′. If the parallel light source 丨〇′ is irradiated in the direction of the incident angle 6=〇, the light is sensed. On the detector 16", the center of the contaminant is X, and the other parallel source 丨1' is illuminated by the incident angle of 6y (8y off 0). The image size of the contaminant 82 is 叱2=d〇+h*taney.. (Expression 7) 'And the center point will fall at X2" of the light or detector 16", and the displacement value △ X2' = t2 * (taney) - h / 2 * taney · ·. (Formula 8) 12 where η is the refractive index of the light-transmissive cover 20", and Equation 7 can be used to calculate h = (dj2-d〇)* cot0y... (Formula 9) In this example, the contaminant image becomes larger, The image center offset is reversed. The height of the contaminant can be obtained by using Equation 9. 5 In Figure 9c, the contaminant 84 is located just above the photosensor 16", the size is d〇 and the height is h. When the incident angle θ = 0, the contaminant center position on the photo sensor 16" For Χ, another parallel light source 丨彳I is illuminated at an incident angle θ y (θ y off 0), and the image size of the contaminant 84 is di3=d〇+h*taney (Formula 1 〇), and the image center point will fall on At the X3" of the photo sensor 16, the displacement value which is different from the in-situ 10 X' is Δx3' = h/2*taney·(.11) η is the refraction of the light-transmissive cover 20" The rate is obtained by using Equation 1 to obtain h = (di3-d〇)*cotey (Expression 12) to determine the height h of the contaminant 84. From the above analysis, it can be seen that, as one of the configurations of the present invention, : Set 5 * parallel light sources in the same direction, one of which is vertical illumination; the original 'the other two parallel light sources are X-axis direction, angle + Θ, - Θ angle direction, then two parallel light sources are Y axis Direction, in the direction of angle + Θ, - Θ angle 2 照射, the five parallel light sources are projected in sequence, using the light sensor sense 0 to measure the 5 different stain images, using the vertical illumination of the parallel light source The cross-sectional size of the surface contaminants is re-used by the two oblique directions in the X-axis direction, and the horizontal light source is used to obtain the projected image in the x-axis direction, and then the two oblique oblique light sources in the direction of the x-axis are used to obtain the Y-axis direction. By projecting the image, you can use the calculation of the two-angle function to push back the position and size of the contaminant 13 1345632 and the south degree, and then confirm the quality and contamination range of the light sensing component to be tested. 5 10 15 For example, no matter how the light is projected The sensory income is always a single line type =, it can be confirmed as a thief of the light sensor itself, that is, the physical detection of the desired boundary; if the contaminated area is pushed in the light-transmissive cover 2, 2 〇" at the upper surface, as long as it can be cleaned; if the contaminated area is on the light-transmissive cover n; side or the light sensor 16, 16, "the surface can not be removed, it must be classified according to quality requirements for compensation, as a secondary The grade is used or rejected as a defective product. The detection method of the present invention can be described in detail as shown in FIG. 1A. In the initial step 90, the test strip 4 is required to enable the light sensing element to be tested, so that the pot starts the sensing function; and in step 92, the parallel light source 5 is driven. Projecting a parallel beam to the light sensing element to be tested, for example, at a first-one-dimensional angle, directly above, with the light-transmissive cover 20 side; then, in step 94, the parallel light source 5 is driven to move relative to each other' Projecting a light beam to the light-measuring sensing element 1 ' at a first predetermined stereo angle (for example, a skewed X degree) is successively performed twice in step 96 to receive the light from the light-measuring element 1 through the test socket 4 The measured signal transmitted 'to obtain image information from different stereoscopic human eyes; using the above formula, the signal is processed in step 98 to obtain the relative position of the contaminated impurity relative to the light sensing component to be tested. Of course, the more the light source is projected, the data obtained by the sensing is more conducive to the operation = break. At this point, the contaminated area and degree of the contaminated component to be tested have been obtained, and most, in step 10G, the contaminated impurity is located in the transparent seal. Cover the outside, and the pollution: the miscellaneous shells are located in the cavity to distinguish, such as the surface of the polluted person to carry out the monthly ice, if the internal text is slightly polluted, according to the quality control requirements classification, for 14 1345632. And ° σ or the use of software compensation modification, as the measured light sensor damage or pollution is serious, that is, to retire to eliminate defective products. According to the above method, the sensing function of the component and the intrinsic sensing function can be activated when the test component of the light sensing component is tested by the present invention. At this time, the physical testing of the optical sensing component can be performed simultaneously; The steps of amplifying, projecting, and refracting the parallel light source, through the operation of the processing device, enable the manufacturing or packaging of the impurities in the private space, the shape, and the extent to which the impurity affects the light sensing component. With the option of cleaning up or not being cleaned but applicable to other products or even directly squeezing, each component can be built and used to the best of its ability, so that the above objects of the present invention can be effectively achieved by the present invention. The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All 15 should still be within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic exploded view of a conventional light sensing element; FIG. 2 is a schematic diagram of a basic structure of a light sensing element; 20 FIG. 3 is a schematic view of a light sensing element that may be contaminated; FIG. Figure 3 is a perspective view of a second embodiment of the present invention; Figure 6 is a perspective view of a third embodiment of the present invention; Figure 7 is a schematic diagram of optical refraction and reflection; ^45632 Figures 8a, 8b, 8c, and 8d are schematic views of the position of the present invention for obtaining contaminants; Figures 9a, 9b, and 9c are schematic diagrams showing the height of the contaminant of the present invention; and Figure 1 is a flow chart showing the operation of the detection method of the present invention. [Main component symbol description]

1...light sensing element 12...plural contacts 16,16',16"...light sensor 20,20',20"...transparent cover 10...circuit substrate 14...heat resistant colloid 18...cavity 22 ...contaminant - 10 24...contaminant two 4,4',4"·.. test socket 52, 52a, 52b, 52c, 52d '3'1, 3"···detection device 5 ' &, 5" Parallel light source 52e.·Laser element 54, 54a ' 54b, 54c ' 54d, 54e... diffusion lens group 15

56, 56 "... drive devices 6, 6, 6, 6, ..... processing devices 70, 72, 74, 76, 80, 82, 84.. Contaminants θι, θ2, θ3, Θ, θ χ, θ γ... Angle Πι, door 2·..media h...height L1, L2, L3, l〇, h, |0,, I,... light FI____ normal d〇, di1, d丨2, di3··· Width 20 X, X, X, X3, X, X!, x2', x3, ·.. Position I, t2 ··· Thickness 90~100··. Step 16

Claims (1)

X. Patent application scope: | 100#· March 24th Revision Replacement Page 1 · The light sensing component is dirty and must be · · ΒΙ St _ impurity detection device, wherein the light sensing component has a light a sensor, a circuit board for connecting a plurality of contacts of the photo sensor, and a light-transmissive seal formed together with the iC4+nw circuit substrate of the lightning path to encapsulate the cavity of the photo-sensing cavity Cover, the detecting device comprises: a test socket for supplying a plurality of contacts of the light sensing component to be tested; and a parallel light source for at least partially covering and illuminating the position of the test socket by a plurality of different relative solid angles, the parallel light source It is a parallel light source with five directions in the same direction. One of them is vertical illumination light, the other two parallel light sources are X-axis direction, and the angle is +0,·9 angle, and the two parallel light sources are the axis direction. An angle + Θ, - Θ angle direction illumination; and a processing device that controls the parallel light source and electrically connects the contacts to receive a detection signal from the light sensing element; thereby obtaining a contamination impurity relative to the device to be tested The correct location. 2. The contaminated impurity detecting device of the photo sensing element according to the above patent application, wherein the parallel light source comprises a laser element. 3. The contamination impurity detecting device of the photo sensing device according to claim 2, wherein the parallel light source further comprises a beam that causes the laser beam to be diffused into a beam before being irradiated to the test socket. A diffusing lens group with parallel beams of large illumination. 4) The contaminated impurity detecting device of the photo sensing element according to item 2 of the patent application scope further includes a driving device for driving the position of the laser element to be changed. 17 1345632 Revision No. 5 of March 24, 2014. 5. Contaminant impurity detecting device of the photo sensing element according to claim 1, wherein the parallel light source includes a plurality of light beam directions respectively and is opposite to the test socket Light-emitting elements of different stereo angles. 6 _ The contaminated impurity detecting device of the photo sensing element according to claim 1 further comprises: driving the test stand to move relative to the parallel light source, so that the parallel light source can be irradiated to the The drive of the test stand. 7. A method for detecting a contaminated impurity of a light sensing component, wherein a detecting device is used to detect a contaminating impurity located at the light sensing component, wherein the light sensing component has a light sensor and is provided a plurality of circuit substrates that are connected to the contacts of the photosensor, and a light transmissive cover that forms a cavity enclosing the photosensor together with the circuit substrate, and the detecting device includes: a power connection a test socket of a plurality of contacts of the light sensing component to be tested, a set of five parallel light sources of different directions, and a processing device, the detection method comprising the following steps: a) enabling the light sensing component to be tested via the test socket; b Driving the parallel light source to project a light beam at a first predetermined relative solid angle to the light sensing cover member having the light transmissive cover side; c) driving the parallel light source to be different from the first predetermined relative solid angle And (2) receiving, by the processing device, the measured signals transmitted from the light sensing component to be tested through the test socket in steps b) and c). 8. According to the method for detecting pollution impurities mentioned in item 7 of the patent application scope, further include 18 1345632 The step of dyeing impurities included in the step d) is opposite to the phase signal of the light sensing component to be measured. The pollution is obtained according to the eighth item of the patent application. (4) The method of checking money is included in the classification of the step _ In step f), the material is distinguished by the material: the dye is located outside the light-transmissive cover or in the cavity. 19