TWI340163B - Chemical mechanical polishing method and slurry composition - Google Patents

Chemical mechanical polishing method and slurry composition

Info

Publication number
TWI340163B
TWI340163B TW095118822A TW95118822A TWI340163B TW I340163 B TWI340163 B TW I340163B TW 095118822 A TW095118822 A TW 095118822A TW 95118822 A TW95118822 A TW 95118822A TW I340163 B TWI340163 B TW I340163B
Authority
TW
Taiwan
Prior art keywords
mechanical polishing
chemical mechanical
polishing method
slurry composition
slurry
Prior art date
Application number
TW095118822A
Other languages
Chinese (zh)
Other versions
TW200743665A (en
Inventor
Andy Chun-Xiao Yang
Chris Chang Yu
Original Assignee
Anji Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anji Microelectronics Co Ltd filed Critical Anji Microelectronics Co Ltd
Priority to TW095118822A priority Critical patent/TWI340163B/en
Publication of TW200743665A publication Critical patent/TW200743665A/en
Application granted granted Critical
Publication of TWI340163B publication Critical patent/TWI340163B/en

Links

TW095118822A 2006-05-26 2006-05-26 Chemical mechanical polishing method and slurry composition TWI340163B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095118822A TWI340163B (en) 2006-05-26 2006-05-26 Chemical mechanical polishing method and slurry composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095118822A TWI340163B (en) 2006-05-26 2006-05-26 Chemical mechanical polishing method and slurry composition

Publications (2)

Publication Number Publication Date
TW200743665A TW200743665A (en) 2007-12-01
TWI340163B true TWI340163B (en) 2011-04-11

Family

ID=55855724

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095118822A TWI340163B (en) 2006-05-26 2006-05-26 Chemical mechanical polishing method and slurry composition

Country Status (1)

Country Link
TW (1) TWI340163B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11518913B2 (en) 2019-08-30 2022-12-06 Saint-Gobain Ceramics & Plastics, Inc. Fluid composition and method for conducting a material removing operation

Also Published As

Publication number Publication date
TW200743665A (en) 2007-12-01

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