TW200743665A - Chemical mechanical polishing method and slurry composition - Google Patents
Chemical mechanical polishing method and slurry compositionInfo
- Publication number
- TW200743665A TW200743665A TW095118822A TW95118822A TW200743665A TW 200743665 A TW200743665 A TW 200743665A TW 095118822 A TW095118822 A TW 095118822A TW 95118822 A TW95118822 A TW 95118822A TW 200743665 A TW200743665 A TW 200743665A
- Authority
- TW
- Taiwan
- Prior art keywords
- particle
- chemical mechanical
- mechanical polishing
- polishing method
- slurry composition
- Prior art date
Links
Abstract
The invention discloses a chemical mechanical polishing slurry including at least one kind of abrasive particle, at least one kind of oxidant and at least one kind of carrier. The abrasive particle comprises one selected from the following group consisting of soft particle, particle with soft outside and tough inside, charged particle, magnetized particle and hollow particle. The base for polishing is one selected from the following group consisting of aluminum, copper, titanium, nitride titanium, silver, tungsten, alloy of the aforesaid metals, oxide, nickel-phosphorous or Si3N4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095118822A TWI340163B (en) | 2006-05-26 | 2006-05-26 | Chemical mechanical polishing method and slurry composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095118822A TWI340163B (en) | 2006-05-26 | 2006-05-26 | Chemical mechanical polishing method and slurry composition |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200743665A true TW200743665A (en) | 2007-12-01 |
TWI340163B TWI340163B (en) | 2011-04-11 |
Family
ID=55855724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095118822A TWI340163B (en) | 2006-05-26 | 2006-05-26 | Chemical mechanical polishing method and slurry composition |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI340163B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114286846A (en) * | 2019-08-30 | 2022-04-05 | 圣戈本陶瓷及塑料股份有限公司 | Fluid compositions and methods for performing material removal operations |
-
2006
- 2006-05-26 TW TW095118822A patent/TWI340163B/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114286846A (en) * | 2019-08-30 | 2022-04-05 | 圣戈本陶瓷及塑料股份有限公司 | Fluid compositions and methods for performing material removal operations |
US11518913B2 (en) | 2019-08-30 | 2022-12-06 | Saint-Gobain Ceramics & Plastics, Inc. | Fluid composition and method for conducting a material removing operation |
CN114286846B (en) * | 2019-08-30 | 2023-06-06 | 圣戈本陶瓷及塑料股份有限公司 | Fluid compositions and methods for performing material removal operations |
Also Published As
Publication number | Publication date |
---|---|
TWI340163B (en) | 2011-04-11 |
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