TWI339134B - Liquid material applying apparatus and liquid material applying method - Google Patents

Description

1339134 IX. Description of the invention: Coating a flow containing a volatile solvent [Technical Field of the Invention] The present invention relates to a technique for a dynamic material on a substrate. [Prior Art] Conventionally, a device for applying a fluid material such as a resist liquid to a semi-conducting plate (hereinafter referred to as "substrate") is known as Japanese Patent No. 2_-1 7402 and Japanese Patent Laid-Open No. 13-87 discloses that the nozzles for continuously discharging the fluid material are scanned on the substrate, and the main surface of the substrate is coated with a plurality of parallel linear coatings for the flow of the movable material. Cloth device. Such a coating device has various technical proposals for improving the uniformity of the film thickness of the fluid material. For example, Japanese Laid-Open Patent Publication No. Hei. No. 2-174-2 discloses that a substrate coated with a coating liquid by a resist coating apparatus is separately provided in a solvent environment apparatus other than the resist coating apparatus. Exposed to the solvent environment of the coating liquid, thereby allowing the solvent to adhere to the surface of the coating liquid and reducing the viscosity of the surface of the coating liquid, and then forming a gas (7)I·' in the container in which the substrate is housed. This gas flow is a technique for flattening the surface of the coating liquid. A technique for suppressing volatilization of a coating liquid by pressurizing a container in which a substrate coated with a coating liquid is applied is disclosed in Japanese Laid-Open Patent Publication No. 2003-1 7402. . In the coating film forming apparatus of Japanese Laid-Open Patent Publication No. 2005-13787, a drying prevention plate covering almost the entire substrate is provided at a position within 2 mm above the substrate, and a linear shape formed in the drying prevention plate is provided. In the gap, the 97100529 6 spit out the insulating coating liquid (four) nozzle to scan the substrate, thereby applying the coating liquid on the substrate = uniform. Thus, in the substrate and the anti-drying plate: forming the I agricultural solvent The dry coating of the coating liquid applied on the substrate of the environmentally-friendly substrate. In addition, the coating of the coating of the Japanese Patent Laid-Open No. 20-53-1787 is set to prevent the sponge member which has been infiltrated with the solvent. The drying plate is supplied with a solvent vapor evaporated from the sponge member from a supply hole formed in the drying prevention plate to the substrate and the drying preventing plate, thereby further increasing the solvent concentration between the substrate and the drying preventing plate. However, a coating device that applies a fluid material to a substrate by scanning a nozzle that discharges a fluid material is also used for applying a fluid material containing a pixel forming material to a substrate for a flat display device. This For example, the scanning of the plurality of nozzles arranged at a predetermined pitch and the stepwise movement of the substrate in the vertical direction of the sweeping direction are repeated to form a plurality of grooves between the partition walls formed on the substrate, and the stripe coating flow is performed. On the substrate, the film forming material is fixed on the substrate by evaporating the solvent component from the respective lines of the fluid material, thereby forming a film of the pixel forming material by making the pixel during the period until the solvent evaporates. The forming material is sufficiently dispersed in each line of the fluid material to make the film thickness of the pixel forming material uniform. However, when the fluid material is coated by the plurality of nozzles, the back side of the substrate is moved in the stepwise direction. The fluid material is not coated, and thus the plurality of nozzles are surrounded by the flow material line coated by the nozzle on the last side in the step movement direction, and the step movement direction of the line is 97100529 1339134. The concentration of the solvent component in the side environment is lower than the concentration on the front side. Therefore, the line of the fluid material coated by the nozzle The portion located on the rear side in the step of moving in the direction is dried earlier than the front side portion, and in the film of the pixel forming material formed on the substrate, the film thickness of the rear side portion is larger than the film thickness of the front side portion. When the substrate is coated, it does not appear: Sentence: The display quality of the flat display device after the product is reduced. The content of the display: The _ ^ ^ . '" of the flowable material of the cloth is placed in the plural to spit out In the mouth, the sub-sweeping is the dryness of the material after the relative movement direction of the substrate, and the homogenization is achieved in the sub-scanning direction. The coating device is provided with a substrate holding portion and a =::: portion holding substrate; The discharge mechanism is directed toward the soil-moving material; the main plate of the moving machine plate (four) main sweeping is upwardly aligned parallel to each m sweeping while the mechanism is parallel to the main surface and perpendicular to the above Main = 土述田1j know the direction of the opposite direction # # . & ^ i In the direction of the privilege, the plurals are arranged at equal intervals: =: = the scanning direction is supplied to the material on the substrate. Agent and Lift: Top: Coating area coated above! Flow: ·: = The above-mentioned base system is disposed on the rear side of the relative movement direction of the substrate in the direction of the relative movement of 97100529 ^ 1339134 of the second discharge portion of the second discharge portion in the sub-sweeping direction The second fluid material of the first fluid material or the second fluid material of the volatile material equal to the solvent, and the second fluid material is applied to the coating region on the substrate. According to the present day and the circumstance, the plurality of alumina outlets + can be formed in the sub-scanning direction from the drying speed of the first fluid material discharged from the discharge port on the rear side in the direction in which the substrate is moved in the direction of the sub-sweeping field. It is roughly uniform. According to a preferred embodiment of the present invention, in the discharge mechanism, the relative position of the second discharge portion with respect to the third earthing portion is fixed. By this, the structure of the discharge mechanism and the moving mechanism can be simplified. Further, it is preferable that the first discharge portion continuously discharges the first fluid material, and the second discharge portion continuously discharges the second fluid material. Further, in the second discharge unit, the second fluid material is discharged from the plurality of discharge ports at different positions in the sub-scanning direction. In another preferred embodiment of the present invention, the discharge mechanism further includes a second discharge portion that is opposite to the substrate disposed in the sub-sweep direction with respect to the discharge portion (4) the second fluid material is discharged from the front side, and when the first fluid material is applied by the first discharge unit, the other second discharge unit moves in the main scanning direction. And discharging the second fluidity material, and applying the second fluid material to the non-coating region outside the coating region of the substrate. In this way, the first side of the coating area can be painted on the front side of the opposite direction! The drying speed of the fluid material is substantially uniform in the sub-scanning direction. (S > 97100529 9 1339134 a further embodiment of the present invention - the coating I system is further advanced = step == in the sub-scanning direction of the substrate: the substrate is relatively fixed and supplied as Flow == The second solvent of the solvent or the volatile material equivalent to the above solvent is applied to the front side of the coating region in the direction of relative movement, and the drying speed of the claw-moving material is formed in the sub-scanning direction. The coating device of the machine-like aspect includes a substrate holding portion, a discharge unit, a moving mechanism, and a gas supply unit; the substrate holding portion holds the base 2: the discharge mechanism is a parallel sub-scan from the main surface of the substrate Direction: a plurality of intermittent discharge ports, discharging a flow of material containing a volatile solvent and a material supplied to the substrate toward a coating area on the substrate; the moving mechanism is such that the discharge mechanism is perpendicular to the pair Sweeping in the direction of the parallel direction of the main surface and moving relative to the substrate, and simultaneously moving each time toward the main scanning direction, the substrate is facing the discharge mechanism toward The sub-scanning direction is relatively moved, and the gas supply unit is fixed to the rear side in the relative movement direction of the substrate in the sub-scanning direction of the discharge mechanism, and the relative position of the upper-phase scanning direction of the discharge mechanism is fixed. The gas of the fluidity material or the gas of a volatile material equivalent to the solvent. Preferably, the gas supply unit has a total length in the main scanning direction that covers the coating region, and the main surface of the substrate is simultaneously facing the main surface. Preferably, the coating device has a discharge port for the gas. Further, the coating device is further provided with a further gas supply portion in the direction of the sub-sweeping finger of the substrate.

c S 97100529 10 I339l34 The front side in the relative movement direction is relatively fixed to the substrate, and the solvent of the fluid material or the gas of the volatile material such as the above-mentioned solvent is supplied. The present invention is directed to a coating method for a sheet-coated fluid material. The above and other objects, features, aspects and advantages of the invention will be apparent from [Embodiment] A top view of a coating apparatus according to a first embodiment of the present invention, which is consumed by Figure 1, is shown in Fig. 2 as a coating apparatus! Right side view. On the glass substrate 9 for display device (hereinafter referred to as "substrate 9"), == a fluid material f having a flat surface for displaying a pixel forming material for agricultural use. In the present embodiment, the coating apparatus 1 is provided on an active matrix drive type substrate 9 for EL (Electr® LUminescence) display device, and contains a volatile solvent [for example, one of the aromatic organic solvents

Cniesitylene; I) (1, 3, 5- f ^ ) ] . g A fluid material of an organic EL material (hereinafter referred to as "organic el liquid"). = device as shown in Fig. 2 'provided with a substrate holding the substrate 9

The second substrate is provided with a substrate moving mechanism H as shown in FIG. 2, and the substrate moving mechanism 12 is configured such that the substrate holding portion 11 faces the main surface of the substrate 9 in a predetermined direction (that is, in a circular shape). "Sub-scan: '»,": water, moves 'and rotates in the direction of the vertical direction (i.e., the z direction). The substrate holding portion u is provided with an additional heating mechanism (not shown). The coating device 1 is provided with: alignment mark detection 3313, coating head 14, 97100529 I339134 coating head moving mechanism 15, two, six & portion 18; the pair ... / portion 16, and flow The material supply X lamp + the detection unit 13 is an alignment mark (the holding portion 丨u formed on the substrate 9 is not shown in the drawing), and the coating head moving mechanism is: : material spit machine

+ r 3 guarantees that the head 14 is oriented parallel to the main surface of the 扨Q and perpendicular to the sub-scanning direction (that is, the figure is set to "% of the main scanning direction" of the substrate 9), and the movement of the cloth head 14 is performed. The direction (ie, the heart liquid portion is "on the two sides of the coating", and is received at the substrate holding portion 11 and the material supply portion 18 is attached to the coating machine EL liquid; the fluid material 1 is dried, and the special etching I should flow. In addition, as shown in Fig. =. Controlling the composition of the material is controlled. In the coating device 1, the coating head is moved 12 to turn the coating head 14 on the main scanning machine 415 and the substrate moving mechanism and The substrate 9 (four) is moved and the mechanism is applied as described later, and the substrate is placed on the substrate 9 in the sub-scanning direction from the (9) side in FIG. 1 toward the upper side in the sub-scanning direction :::::1:-^ ^ , i #^ ^9 ^ 5, in the (+ γ) side of the Figure 1, the beauty cup, the swimming side 'and the (-) side substrate 9; the moving upper coating head 14 is equipped with: plural number 1 Spray - set to 3), the second nozzle 142, and the nozzle in the form of a 'corner 143; the first nozzle 97100529

The 12th type of ... is sprayed... The substrate ^41 in the scanning direction is disposed on the (_γ) side and the (+γ) side (that is, the second one, and the continuous discharge has the eyes on the rear side and the front side in the moving direction). (1) The solvent of the liquid in the nozzle holder 143 (hereinafter referred to as "solvent"); the + nozzle of the nozzle 142, and the discharge portion holding portion for holding the three first nozzles 141 and the two second nozzles 142. Coating device 1 Φ , ΐϊ For the i-th bracket 143, the second nozzle 142 structure 15 is moved and fixed to the substrate, and the coating head is moved by the coating head. Head 14 on the base 9 in the main broom with 3 first! Mouth mouth (4) relative movement 'Through the two second nozzles 14 2 in the direction 2 = : TM 5 nozzles (ie, the first nozzle 141 and the second nozzle 142), in the X direction of the figure _ (ie, the main The scanning direction is arranged in a substantially linear shape, and is only slightly deviated from the ❸Y direction (ie, the sub-scanning direction) in FIG. The spouts and outlets of the five nozzles are arranged at equal intervals in the sub-scanning direction, and the distance between the discharge ports adjacent to the two nozzles in the sub-scanning direction is equal to the coating area 91 of the substrate 9 (in FIG. 1 The distance between the partition walls which are formed in advance and which extend in the main scanning direction (hereinafter referred to as "partition pitch") is three times. In the coating device 1, from the 3rd! The nozzle 141 discharges the organic EL liquid into the three grooves formed between the partition walls of the coating region Μ and applies the coating. Between the two grooves in which the organic EL liquid is applied by the coating method, two grooves which are coated with other types of organic EL liquid by another coating device or the like are held. In the substrate 9, because the region 92 outside the coating region 91, Lee 97100529 13 1339134 is used for the assembly of the driving circuit, or the sealing step using the insulating film in the subsequent steps, etc., and thus belongs to the region where the organic EL liquid should not be applied, hereinafter referred to as "Non-coated area 92". Further, a partition wall is not formed in the non-coating region 92. Next, the application of the organic EL liquid by the coating device 1 will be described. The coating flow chart of the organic EL liquid is shown in Item 3. When the organic EL liquid coating is applied by the coating device 1 , first, the substrate 9 is placed and held on the substrate holding portion 11 'by driving the substrate moving mechanism 12 from the alignment mark detecting portion 13 ' The movement and rotation of the substrate 9 are performed at the coating start position shown by the line in Fig. 1 (step S11). In other words, the coating head 14 is located on the opposite substrate 9 for relative movement in the sub-scanning direction = the coating head 14 is located in advance! The (-X) side liquid receiving portion 16 is placed at the standby position ^ =1 command shown by the solid line in FIG. 2 . At this time, the coating (4) of the substrate 9 is located on the (+Y) side in FIG. 1 (that is, the substrate in the sub-scanning direction) on the side opposite to the moving direction, and is located on the coating head 14 (the second side on the +1 side). The bucket of the first nozzle 141 adjacent to the second nozzle 142 is connected to the coating unit 4 by the control unit 2, and the first nozzle 141 is discharged to discharge the organic (3) liquid, and the first nozzle is used to sweep the cat. The second nozzle 142 door on the two sides of the direction (ie, the (9) side and the (-Ό side), and controls the coating head moving mechanism 15, starting: two = movement in the drawing direction (ie, from the coating device 1 in the drawing) When the coating head 14 is facing the main sweeper, the organic liquid: 97100529 solvent is made toward the substrate 9 from the first nozzle 141 and the second nozzle 142, respectively, and the organic sputum is on the substrate 9 in the groove. In the three rows of the coating region 91, the solvent is applied in stripes, and the solvent is applied to one groove in which the organic sputum is applied and drawn. The rear side is in the line of the coating region 91. In the region 91, the coating of the organic & liquid and the solvent is applied, and the substrate 9 on the (+Υ) side of the groove (ie, the non-coated region 92 front side of the sub-sweeping direction side) is applied to the coating region. 91 by (9) The substrate 9 is coated with a solvent adjacent to the substrate (the step is called 'the distance between the two lines of the adjacent organic EL liquid line j^ and the distance between the two lines. In addition, the distance between the lines of the two agent lines is equal to the next wall. The non-coated region 92 on the intermediate side is not: the coating region 91 is on the (9) side and the ") machine EL liquid and solvent. The saponin is therefore not coated with 4t:; = EL liquid and solvent are set to be the first The flowable material Ί 2 w the movable material, the coating head t dynamic material and the second fluid material discharge mechanism are output = U1 becomes the first liquid material from the 4 喷嘴 4 (4) nozzle (-Υ) of the second nozzle 142 in the first jetting and the second jetting in the first and second jets of the second and second rows The side region 9 is applied with the second spun (four) second fluid material applied, and the second nozzle 142n disposed on the coating (9) side is coated with the first non-coating region 92 of the first nozzle 141: 2 The fluid material is a brother Z spit out. 97100529

<S 1339134 The field coating head 14 moves to the position shown in Fig. 2 and the two positions in Fig. 2 (i.e., the liquid receiving portion on the (9) side of the figure is moved in the main scanning direction, By controlling the coating head to control, the substrate on the second nozzle 14° from the (+ γ) side (ie, the front side of the coating relative movement direction) is stopped.

Sl3). Then, the substrate moving mechanism is driven to remove the solvent by 12° (the step holding portion U- moves toward the (8) side in the drawing (that is, the side; the square=the substrate spacer wall spacing is 9 pieces away from the f bucket·lock Q1 /1, °) (4) At this time, the coating head 14 continuously discharges the organic EL liquid and the solvent from the three magic nozzles 141 and the (-Y) side second nozzles 142 4 . The HP 16 is a solvent for the organic (10). The quick-drying material is used, and the material that is moved by the first nozzle 141 on the coating region 91 after the organic coating is applied to the substrate 9 in the sub-scanning direction in step S14 is dried (ie, the solvent is from the solvent). The organic layer is evaporated in a liquid, and the organic cerium 7 remains on the substrate 9 in a semi-dry state (that is, supplied) to form a ruthenium of an organic material. Further, from the second nozzle 142 in the coated region w and the uncoated region (4) coated on 92, all (or except for some traces), almost all of the evaporation "does not remain in the coated region 91 and the uncoated region 9 2 . When the substrate 9 in the sub-scanning direction When the movement is completed, the coating head 14 continuously ejects the organic EL liquid from the third nozzle 141 and the (_¥) side second nozzle ι42. In the case of a solvent, the organic EL liquid and the solvent are applied to the groove of the coating region 9 of the substrate 9 by moving from the (+X) side in FIG. 1 toward the (χ) side (ie, the main scanning direction). Coating (step S15). At this time, three

97100529 In the squirt 141, the substrate 9 from the (i γ;) side (that is, the front side in the sub-scanning direction) is upwardly opposed to the second nozzle in the step S12. The coating is described as "the dissolution of the coating by the second nozzle 142" is as follows. When the movement of the coating head U of the second main product is mixed with the solvent to be applied, the substrate 9 is moved toward the nail (ie, the sub-scanning direction) by a distance equal to the distance of the partition wall 9 (step S16). . Then, by controlling whether the W gate '" and the substrate 9 have been moved to the figure: 2, confirming the substrate holding portion η (step (4) υ, when not moving to the C coating end position, the mouth U2 respectively discharges the organic EL When the nozzle 141 and the (-Υ) side are 2^ Ί and the solvent is applied, the coating of the organic square 1 is applied to the groove of the application region 9 of the substrate 9 toward the main scanning (step S15). (4) The substrate 9 is moved in the sub-scanning direction, and the confirmation of whether or not the movement has been moved to the coating end position has been performed (in the step J cloth device 1, the substrate holding portion U and the substrate 9 are located in the coating). Cloth: the position of the beam is repeated 'the movement of the coating head 14 in the main scanning direction and the stepping movement of the substrate 9 toward the (+γ) side are repeated (that is, each coating head is applied to the substrate 9 in the main sweeping direction (four) movement) At this time, the substrate 9 is relatively moved toward the sub-scanning direction of the coating head 14, whereby the organic EL liquid is applied at a predetermined pitch (i.e., equal to 3 times the spacing of the partition walls) in the coating region 91 of the substrate 9. The pitch is arranged in a stripe shape (steps si5 to si7). In the coating device 97100529 17 1^39134, the relevant sub-scan The organic rainbow on the substrate 9 is coated in the direction of the weir (ie, the direction in which the coating head 14 is opposite to the direction in which the substrate 9 moves relative to the substrate 9 in the direction of movement of the substrate 9). After the position, the organic sputum > sputum discharge is performed from the "spray 141 and the (-γ) side second nozzle 142, and the organic enamel cloth head applied to the substrate 9 by the coating E is finished. The solvent discharged from the last main sweep 2 nozzle 142 is applied to one of the substrates 9 and applied to the side non-coating region 92 in the region 91 of Fig. 1. The coating device 1 is transported to another coating device or the like. And coating: two coating device 1 coated

liquid. The two-color organic EL other than the organic EL liquid is applied as described above, and the movement of the coating direction is applied from the three ^1's to the coating head 14 on the main sweeping eight w 対 141 and (―Y) sides. The organic el liquid spot which is ejected from the second nozzle 142 is strip-shaped in the middle. At this time, 3:2 is applied to the first nozzle 141 on the application region side of the wire 9 and the nozzle 41 is used in the nozzle 41 by the (-γ) 1 nozzle U1 π 'organic EL liquid line. The jf liquid line in which the second nozzles 142 are applied in parallel and the side of the first nozzle 141 on the side of the (9) side are immersed in the same manner. Therefore, in the vicinity of the two-lift line that is evaporated by the (Y) side line, by the concentration from the binary. In the case of the solvent of the organic EL liquid in the singer's brother, the organic liquid el (the squirting of the (1) side and the (-Υ) side of the central sneeze is used. £ 97100529 liquid line wrap, while the liquid line on the (+Y) side is used by the organic rainbow line of the central Λ mouth, and the previously coated organic: L!=:: organic EL liquid; bL The liquid line group is included in the center. Even in the center and the (8) side of the day!, the surrounding is also coated with the (_γ) side nozzle] i4i: the same line, the right Μ ^ ti ^ organic EL liquid in the environment The concentration of the solvent component is increased.

In the case where the coating head is provided with only the coating device for discharging the organic EL liquid 1 nozzle, the coating device of the comparative example has 4 = mouth and center number in the coating device of the comparative example! Around the line of the organic EL liquid applied to the mouth, as in the above, the concentration of the solvent component of the organic EL liquid in the '% brother' will increase.

The (9) side of the line of the organic EL liquid applied to the first nozzle via the (-Y) side (that is, the rear side in the direction in which the substrate is moved in the sub-scanning direction) is not applied by line coating of other organic EL liquid and solvent. On the (8) side, only the organic EL liquid lines coated in parallel by the central first nozzle were arranged. So, on the (-Y) side! The nozzle is coated with organic EL liquid around the line, compared to the (9) side and the center! Below the line of the organic sputum coated by the nozzle, the concentration of the solvent component of the organic EL liquid is lowered, and the drying speed of the organic EL liquid on the (-Y) side is higher than the two organic sputum lines on the (+ γ) side. 2, outside the (-Υ) side of the organic EL liquid line, the concentration of the organic EL liquid solvent concentration of the line on the (_γ) side t is lower than the concentration on the (+γ) side of the line, resulting in the line The portion on the (_γ) side is dried earlier than the portion on the (+γ) side. As shown by the circle 4, the solvent was evaporated from the three first sprays 97100529 < £1339134: coated organic EL liquid of the coating apparatus of the comparative example, and the organic layer was formed in the coating of the substrate = 91a. A cross-sectional view of three films of EL material. Figure: Match. The illustration is convenient, and the illustration of the partition wall in the application region 9a of the substrate 9a is omitted. Further, the height of the film 93a is drawn to be larger than the actual twist (the same applies in Fig. 4B). In the coating apparatus of the comparative example, as described above, the portion on the (-Υ) side of the (_γ) side is dried earlier than the portion on the (+γ) side, and thus the port 4' is shown. In the film 93 on the γ) side, the film thickness on the (_γ) side portion is larger than the film thickness on the (9) side portion. Further, the organic tantalum material film 93a having the thickness variation may be unevenly applied in the coating region... periodically (i.e., every three sheets), resulting in a possibility that the quality of the flat display device after the product is lowered. In contrast, in the coating apparatus i of the present embodiment, the concentration of the solvent component of the organic EL liquid in the periphery of the three organic EL liquid lines applied by the three first nozzles 141 is improved. Further, in the three 141st, the organic liquid strip coated on the (jm) side j-th nozzle 141 is on the (-Y) side (that is, the rear side of the substrate 9 in the sub-scanning direction). In the region where the organic EL liquid has not been applied, the solvent coated by the two nozzles 142 is evaporated, and the concentration of the solvent component of the organic EL liquid in the environment of the organic γ υ side and the (-Y) side is reduced. The drying speed of the EL liquid discharged from the discharge ports of the three second nozzles 141 is made uniform, and the ejection of the i-th nozzle ΐ4ι from the (_γ) side (that is, the rear side of the substrate 9 in the direction of the moving direction) can be made. Two 97100529 20 1339134 The drying speed of the organic EL liquid spit out, evenly. The knots, such as the web, are approximately 93 in the engraved scanning direction. The three sheets of the film 93 adjacent to the organic 11 material can form substantially the same shape. The three film regions 91 are unevenly coated. The surface of the coating pair on the substrate 9 is placed on the surface of the coating material 2, and the liquid material of the pixel forming material is used as a (four) cloth. The coating surface of the coating surface display device can be lowered in quality. After the flat setting... As mentioned above, because it can prevent I;: the coating of the non-state is not uniform, so the coating is particularly suitable for coatings containing flat display materials and fluid materials. cloth. In the case where the pixel forming material is used, the first nozzle 141 of the # coating head 开始 starts to be the organic EL liquid, and the second nozzle 142 is aligned from the (9) side. == The substrate 9 placed (that is, the solvent ejected from the coating head (4) in the sub-scanning direction to the moving region, and the region on the front side of the relative movement direction of the substrate 9 in the (10) side non-coating region region 91 of the coating region 91, Evaporation in the area of the EL liquid of the coating machine. Thereby, in the coating region (4) ^ coating region 92, the organic EL liquid solvent component in the environment is concentrated south, and the coating area 91 is applied to the (10) side and the (-) side of the organic EL on the (9) side. In the environment, the organic & liquid solvent component ft U ' can make the coating area 91 the most (+ Ό side of the organic EL liquid line drying speed, forming a substantially uniform sentence in the sub-scanning direction, which can more reliably prevent the substrate 9 from being on the substrate 9 The coating area 91 is unevenly coated. In the coating head 14, the third nozzle 142 and the two second nozzles 142 are held together by a single nozzle holder 铛, and the second nozzle 142 97100529 is used. 21 1339134 The relative position of the first nozzle 141 is fixed, so that the coating head i4 and the coating head moving mechanism 15 belonging to a part of the moving mechanism that relatively moves the coating head 14 to the substrate 9 can be simplified. The distance between the second nozzle 142 on the '(-Y) side in the sub-scanning direction and the first nozzle 141 adjacent to the second nozzle 142 is not necessarily equal to the pitch of the second nozzle 141 (in the present embodiment) , set to be equal to three times the pitch of the partitions) (second and third embodiments) In addition, the distance between the second nozzle 142 on the (+ γ) side and the first nozzle 141 adjacent to the second nozzle 142 in the sub-scanning direction is not necessarily equal to the pitch of the first nozzle 141. Next, a coating apparatus according to a second embodiment of the present invention will be described. Fig. 5 is a plan view showing a coating apparatus 1a according to a second embodiment. As shown in Fig. 5, a coating head 14 of the coating apparatus 1a is shown. In the (-Y) side of the three first nozzles 41 that discharge the organic liquid (that is, the back side of the substrate g in the sub-scanning direction with respect to the moving direction), two second nozzles 1 & 2, but the second nozzle 142 is not provided on the (+Y) side. Further, the coating device is provided on the (+Y) side of the substrate 9: fixed on the substrate holding portion n, and will contain the machine The gas of the solvent component of the EL liquid (in the present embodiment, the organic E/liquid solvent is vaporized, hereinafter referred to as "solvent gas") is supplied to the gas supply portion 19 of the substrate 9. The remaining structures are as shown in Figs. 1 and 2 The coating device 1' is given the same reference numerals in the following description. As shown in Fig. 5, the five nozzles of the coating head 14 ( That is, the second nozzle 141 and the second nozzle 142) are arranged in a straight line in the x direction (ie, the main scanning direction) in FIG. 5, and are only slightly deviated from the γ direction (ie, the sub-scanning direction) in FIG. 97100529 22 丄丄出:2=中啧, 1 embodiment is similarly arranged as the first spit (that is, the partition wall # distance #41 has the same interval in the sub-scanning direction) 2:9::UI) The third nozzle is the organic fluid of the first fluidity material, and the second nozzles 142 of the second discharge portion are separated by two distances from the two partition walls by a distance of three times. Two discharge ports of the open arrangement: Two discharge ports are discharged as the second fluid material: the second outer '(one)) side first nozzles (4) and (9) and ^

The distance in the % drawing direction is also set to be three times the spacing of the partition walls. S (1 Vtt" EL ^#J ^ ^ ^ scanning direction) in the X direction of the coating area 91 of the second board 9 (i.e., main field, king, and the main surface of the substrate holding portion 11) The moving mechanism 12 moves the substrate holding portion u by two, and (7) moves in the J body = ^ scanning direction in a state of being fixed with respect to the substrate 9. Further, by evaporating the solvent of the paste in the _19 The solvent gas is supplied to the coating region of the substrate 9. 4 Next, the organic coating is applied to the coating device la = Fig. 6: The process of coating the organic EL solution by the coating When using the coating of the coating, the first (the first cattle H9 is secured on the substrate holding portion 11 and located at the coating start position (乂,· When the organic EL liquid and the solvent are continuously ejected from the second nozzle 141 ,, the coating head W moves from the (9) side to the (9) side (that is, the main sweep direction) in FIG. (s 97100529 23 1339134 Three grooves of the cloth region 91 # Strip-shaped coated organic EL liquid, on the (I) side of the same groove, the step S22) is applied to the two grooves of the coating region 91. When the side portion of the coating region 91 (i.e., the portion near the edge of the side) is used by the gas supply unit, the substrate moving mechanism 丨2 is used, and the substrate 9 is turned toward (+ y) in the direction of Fig. 5; Moving (step (10). On the substrate 9, on the substrate, SI: sample, the solvent is supplied from the first nozzle 141 under the coating region 91 to evaporate the EL liquid therein, and the organic EL material is in the semi-dry state 9 Further, a film of an organic EL material is formed. Further, all of the solvent applied from the first coating region 91 is evaporated (or almost entirely, except for a very small amount), and does not remain on the coating region 91. The substrate 9 in the direction is moved. Then, the control unit 2 confirms that ==11 and whether the substrate 9 has moved to the position of the two-point chain bundle in Fig. 5 (the step is called when it has not moved to the coating condition) and then returns to the step to execute the coating head 14 The movement in the direction of the main field, the movement of the substrate 9 in the sub-scanning direction, and the position of the substrate 9 are confirmed (steps S22 to S24). In the coating device la, as of Fu; fe/brother 4dt*rr 1 Or, when the portion 1 and the substrate 9 are in the application movement; the coating of the mother-to-substituting coating head 14 in the main scanning direction Two stepping movement toward the sub-scanning direction, whereby the cloth in the substrate 9 t 91 domain S 'will be applied to the organic EL liquid according to a predetermined pitch (i.e.

St) niches " (four) spacing) ... 22 ~ S24). Then, when the substrate 9 moves to the coating end position, it stops.

(S97100529 24 1339134) The organic EL liquid and the solvent are discharged from the three first nozzles 141 and the two second nozzles 142, and the organic EL liquid coating is finished on the substrate 9. As described, the coating device 1a and the coating device 1a In the same manner as in the first embodiment, in the vicinity of the three organic sputum lines applied by the second solid first nozzle 141, the organic EL liquid solvent component concentration in the brother is improved, and the organic substance applied to the second nozzle 141 is applied. Around the EL liquid line, the difference in concentration of the organic EL liquid solvent component in the environment of the (9) shell 1 and the (-Y) side is small and small, and the discharge port from the three nozzles 141 can be made. The drying rate of the organic EL liquid to be discharged is uniform, and the drying speed of the organic EL liquid discharged from the discharge port of the first spray = (1) side can be sub-scanned. 'The formation is roughly hooked. As a result, uneven coating can be prevented from occurring in the coating region 91 on the substrate 9. In the coating device 1 of the second embodiment, in particular, by the first! By providing two second nozzles 142 on the (9) side of the nozzle (4), the amount of solvent discharged from each of the first nozzles 142 and applied to the coating region 91 can be reduced, and the Y side can be reduced and the (-Y) can be reduced. The concentration of the solvent component of the organic EL liquid in the side environment is poor. As a result, the time required for the evaporation of the coating line in the coating region 91 by each of the second nozzles 142 can be shortened, and the mixing of the organic EL liquid applied thereafter with the previously applied solvent can be more surely prevented. Further, the discharge ports of the two second nozzles 142 are not necessarily arranged at a distance of three times the distance between the partition walls in the sub-scanning direction, and may be arranged at different positions in the sub-scanning direction. Thereby, in the same manner as described above, it is possible to shorten the time required for evaporation of the solvent line applied by the respective nozzles 142 in the coating region 91 by 97100529 25 (1) 9134, and it is possible to more surely prevent the organic EL liquid applied later from the previous The applied solvent is mixed. Further, in the coating apparatus 1a, by providing the gas supply portion 19 on the (+¥) side of the substrate 9, the coating region 91 can be raised in the environment on the (+Y) side of the non-coating region j 92. Organic EL liquid solvent component concentration. As a result, in the same manner as the ugly embodiment, the drying speed of the organic sputum line on the (+γ) side of the application region 91 can be made substantially uniform in the sub-scanning direction, and the substrate 9 can be prevented more reliably. Coating unevenness occurs in the coating region 91. Further, the gas ejected from the gas supply unit 19 may be stopped after the j-th main scan of the coating head 14 is completed. In the application of the organic EL liquid applied by the coating device 1a, the solvent supply gas is supplied from the gas supply unit 19, and thus the second nozzle 142 can be omitted as compared with the case where the second nozzle 142 is provided on the Gy' side of the second nozzle ΐ4 In the organic sputum coating operation, the discharge stop operation from the (+Y)-side second nozzle 142 can simplify the application of the organic fL liquid. Further, since the discharge of the two nozzles 142 can be started and stopped at the same time, the structure of the coating crucible 14 can be simplified. On the other hand, in the coating apparatus of the first embodiment, since it is not necessary to provide the gas supply portion 19 (see Fig. 5) in the substrate holding portion 1b, the structure of the substrate holding portion n can be simplified. /... Next, the coating|disconnection of the 3rd implementation of this invention is demonstrated. Fig. 7 is a plan view showing the coating apparatus of the third embodiment. As shown in Fig. 7, in the coating head of the coating device 1b, the (9) side of the first nozzle 141 is discharged (that is, the rear side of the substrate 9 in the sub-scanning direction with respect to the moving direction), and only one of the discharge solvents is provided. 2 nozzle 97100529 26 ^^ 134 142, and on the (+ γ) side, the second nozzle 142 is provided. The rest of the structure ', Fig. 1 and Fig. 2 are the same as the non-coating device 1, and the same reference numerals will be given in the following description. Fig. 8 is a flow chart showing the application of the organic EL liquid by the coating device 1b. When the organic sputum coating is performed by the coating device 11}, first, the substrate 9 is held by the substrate holding portion 11 (see Fig. 2) and positioned at the coating start position (step S31). At this time, the four nozzles of the coating head 4 (that is, the three ejector % 141 and one second nozzle 142) are located on the substrate 9 in the γ direction (ie, the sub-scanning direction) in FIG. 7 . (+γ) side (ie, the front side of the substrate 9 in the sub-scanning direction with respect to the moving direction), and the (+γ) side of the coated area μ of the substrate 9, that is, between the side of the coated area 91 (+ Υ) The side non-coated region 92 corresponds to the position. Then, the coating head moving mechanism 15 is controlled by the control unit 2, whereby the coating head 14 continuously ejects the organic EL liquid and the solvent from the second nozzle 141 and the second nozzle 142, respectively, from FIG. The (one X) side moves toward the (+χ) _ side (ie, the main scanning direction). Thereby, the organic EL liquid and the solvent are applied in a stripe shape on the (+Υ) side (i.e., the outer side) non-coating region 92 of the application region 91 of the substrate 9 (step S32). Then, the substrate moving mechanism 12 is controlled by the control unit 2, whereby the substrate 9 and the substrate holding portion 11 are moved together toward the (+ Υ) side (i.e., the sub-scanning direction) in Fig. 7 (step S33). On the substrate 9, the solvent evaporates from the organic EL liquid applied in the uncoated region 92 via the first nozzle 41, and the organic EL material remains in the uncoated region 92 in a semi-dry state. Further, all of the solvent applied to the non-coating region 92 from the second nozzle 142 (or almost the other than a very small amount of almost 97100529 27 U39134) is evaporated, and does not remain on the non-coating region 92. In the coating apparatus 1A, the substrate 9 is moved in the sub-scanning direction in step S33, and the first nozzle 141 on the (+Y) side in Fig. 7 of the coating head 14 is located in the coating area 91 (one + Υ^) The side of the side edge (-Υ). In other words, the four nozzles of the coating head 14 are located at positions corresponding to the (+丫) side portion of the coating region 9丨 in the wJ scanning direction. Tian Tian] After the movement of the substrate 9 in the broom direction is completed, the control unit 2 is controlled. • The coating head moving mechanism 15 and the substrate moving mechanism 12 are controlled, and the coating head 14 is placed on the side of the (+ χ) side in FIG. 7 (_χ The side (ie, the main scanning direction) is moved, whereby the organic EL liquid and the solvent are applied to the groove of the coating region 91 of the substrate 9, and then the substrate 9 is directed to the (+γ) side (ie, the sub-scanning direction). Moving (step s 3 4), after the movement of the substrate 9 in the sub-scanning direction is completed, the control unit 25 forbeares whether or not the substrate holding portion 11 and the substrate 9 have moved to the two-point chain=(four) end position in the step 7 (step S36). ) ## has not moved to the end of coating = ^ return step, for example, the coating head Η is moved toward the main scanning direction, == 彳 scanning direction movement, and the position of the substrate 9 (four) moving 'ΐ L mother: human coating In the coating area 91 in which the head 14 is in the direction of the main scanning finger, the substrate 9 is formed in the scanning direction stepped by the scanning direction, and the organic straw is arranged at a pitch of three times the spacing of the substrate at a predetermined interval (4). After the substrate 9 is moved to the uncoated position, the organic EL liquid and the solvent are discharged from the three 97100529 28 1 _ 141 XI 1 second nozzles 142. In the same manner as in the third embodiment, the application of the three organic EL liquid lines applied to the m first nozzles 141 is as described above. The concentration of the solvent component of the organic EL liquid is increased, and the organic EL liquid solvent component in the environment on the side of the (8) side and the side of the line on the (8) side and the side of the organic EL liquid coated on the (_γ) side first nozzle 141 The concentration difference is reduced. By this, the dry 33 speed of the organic EL liquid discharged from the discharge ports of the three first nozzles 141 can be made uniform, and the organic EL discharged from the discharge port of the (_γ)-side second nozzle 141 can be made. The drying speed of the liquid 'forms a substantially uniform sentence in the sub-scanning direction. As a result, uneven coating can be prevented from occurring in the coating region 91 on the substrate 9. In the coating device 1b, in particular, the organic liquid and the solvent are applied in the (+γ) side non-coating region 92 of the coating region 91, and the solvent is evaporated from the organic liquid and the agent line. The concentration of the organic EL liquid solvent component in the environment on the (+":non-coated region 92 in the coating region 9i can be made the same as in the first and second embodiments, and the coating region 91 can be made the most. The drying speed of the organic sputum line on the burial (+γ) side forms a substantially uniform sentence in the sub-scanning direction, and the coating area 91 on the base & 9 can be more reliably prevented from being unevenly coated. The film of the #EL material formed by the organic EL liquid applied on the application region 92 is removed after the application of the organic EL liquid to the substrate is completed. In the coating device lb, since the coating is applied It is not necessary to provide the second nozzle 142 on the (+Y) side of the second nozzle 141 in the head 14, and it is not necessary to provide the gas supply portion 19 on the substrate holding 97100529 29 1339134:11, so that the configuration of the coating device can be On the other hand, in the coating apparatuses of the first and second embodiments, it is not necessary to perform the non-coating. In the field 92, the operation of removing the organic EU material can be simplified. Therefore, the application of the organic EL liquid can be simplified. Next, the coating device according to the fourth embodiment of the present invention will be described. Fig. 9 and Fig. 1G show the fourth. The plan view and the right side view of the embodiment of the coating apparatus are provided. As shown in FIG. 9 and FIG. 10, the first nozzles 141 for discharging the organic sputum are provided in the coating head 14 of the coating device ic, but are not provided. The second nozzle that discharges the solvent. The coating device lc is provided on the (-Y) side of the coating head 14 (that is, the side opposite to the movement direction of the substrate 9 in the sub-scanning direction), and is provided with the spanning substrate holding portion 11 With the arrangement of the substrate moving mechanism 12, the gas supply portion 19& which continuously supplies the solvent gas to the substrate 9 at the same time. Further, similarly to the coating device 1a shown in Fig. 5, the substrate 9 shown in Fig. 9 (+ The Y) side (that is, the relative movement of the substrate 9 in the sub-scanning direction = the front side) is provided with another gas supply portion 19b that is fixed to the upper surface of the substrate holding portion n while supplying the solvent gas to the substrate 9. Other structures and Figure 1 is the same as the coating device shown in Figure 2, in the following description In the following description, the gas supply units 19a and 19b' are referred to as the "i-th gas supply unit 19a" and the "second gas supply unit 19b", respectively. Fig. 9 and Fig. 10 The first gas supply unit 丨9a is a gas discharge mechanism that continuously discharges solvent gas from the discharge port 19丄 toward the main surface of the substrate 9, and is fixed to the substrate moving mechanism 12 and the coating head moving mechanism 15 together. Therefore, the relative position of the coating head 97100529 30 1339134 14 ' with respect to the second gas supply portion 19a in the direction of the main scanning direction is kept constant. The discharge port l9l of the upper portion is longer than the entire length of the base coating region 91 (see FIG. 9) in the x direction, and covers the entire length of the X direction (ie, the main scanning direction) of the 二q2'1. The main surface of the substrate 9 is oriented. In the same manner as the gas supply unit 19 (see FIG. 5) of the second embodiment, the second gas supply unit (10) is a rod-shaped porous resin (for example, a sponge or the like) of the organic EL liquid solvent. The culvert = the entire length of the coating region 91 of the plate 9 is mounted on the substrate to be coated on the main surface of the substrate, and the substrate 9 is relatively fixed. In the coating apparatus 1C, the agent gas is supplied to the (+γ) side portion of the coating region 91 of the substrate 9 by the supply of the second gas supply unit 19b. In the case where n is applied by the coating device lc, the flow-through coating device 1 is applied to the organic liquid solution. When the organic EL liquid is applied, first, the ::re 9 is held on the substrate holding portion " The starting position of the cloth (the step of the step r follows the 'coating head 14 when the liquid is continuously discharged from the first nozzle 141' moves from the (_χ) side to the (10) side in FIG. 9 (ie, the main scanning direction), Thereby, the organic liquid is applied to the three grooves of the application region 91 of the substrate 9 (step S42). At this time, the first gas: = 19a is ejected toward the application region 91 of the substrate 9. In the (-γ) side of the three grooves of the solvent-containing organic EL liquid, the solvent gas is supplied from the second emulsion supply portion 19b to the (9) side portion of the coating region 91. 97100529 1339134 Next, after the substrate 9 is moved toward the (+γ) side (ie, the sub-scan # direction) in FIG. 9 by the substrate moving mechanism 12, it is confirmed by the control unit 2 whether or not the substrate holding 4 U and the substrate 9 have moved to the figure. 9 at the coating end position shown by the two-dot chain line (steps S43, S44). Then, when the substrate holding portion u invites the substrate 9 not to move to the coating junction In the case of the position, the process returns to step S42' and the movement of the coating head 14 in the main scanning direction, the movement of the substrate 9 in the sub-scanning direction, and the position of the substrate 9 are confirmed (steps S42 to s44). +, the substrate holding portion is located at the application end position, and the substrate 14 is stepped in the sub-scanning direction every time (4) the movement of the head 14 toward the main scanning direction is performed, thereby being on the substrate 9 In the k-cloth region 91, 'the organic EL liquid is applied in a stripe shape arranged at a predetermined pitch (that is, equal to the partition wall = a pitch of 3 Å) (steps s42 to s44). Then: when the substrate 9 has moved to the coating end position Then, the discharge of the organic EL liquid from the three '1st nozzles 141' is stopped, and the coating of the substrate machine EL liquid is completed. As described in the above, the coating device lc is applied to the coating head 14 (-Y). The first chaotic body supply portion 19a' is provided on the side, and in the sub-scanning direction, when the substrate 9 is relatively moved together with the coating head 14, the coating gas is supplied to the coating region 91 of the substrate 9, thereby being coated. The organic EL liquid applied by the i-th nozzle on the γ) side of the cloth head 4 is on the (-Y) side region (ie, the vice The concentration of the solvent component of the organic EL liquid in the area where the soil plate 9 in the drawing direction is on the rear side of the moving direction is not coated with the organic EL liquid = region. As a result, in the same manner as in the first embodiment, the coating head can be used. (-Y) side of 14 (that is, the back side of the substrate 9 in the sub-scanning direction with respect to the moving direction). The discharge port of the first nozzle 141 is 97100529 32 1339134 = the drying speed is formed, and a large coating is formed in the sub-scanning direction: Γ Coating unevenness occurs in the coating region 91. The first nozzle 141 is coated by the first outlet of the first gas supply unit 191, and the first nozzle 141 is provided in the main scanning direction. The applied organic EL liquid in the sub-scanning machine EL two V: the uniformity J covers the extension in the main scanning direction

Apply your t, ', and full length. Thereby, it is possible to more reliably prevent coating unevenness from occurring in the coating region 91 on the substrate 9. By providing the second gas supply portion 19b on the (+Y) side of the substrate 9, in the second embodiment, the application region 9i can be closest (+ side = organic EL (four) drying speed, In the sub-scanning direction, it is possible to prevent the coating region 91 on the substrate 9 from being coated more than once, and the embodiment of the present invention will be described. However, the present invention is not limited to the above embodiment, and various types of the present invention can be used. change.

For example, in the coating device 1 of the first embodiment, the second nozzle 142 provided on the (+ γ) side of the first sputum 141 may be replaced with the (+ 在) in the coating region 91. A solvent nozzle that is mounted on the substrate holding portion 41 above the side non-coating region 92 and continuously discharges the solvent and is movable in the main scanning direction (that is, relatively fixed to the substrate 9 in the direction in which the field J is swept). In this case, in parallel with the movement of the coating head 14 in the main scanning direction for the first time, the solvent nozzles 'on the substrate holding portion 11 are moved in the same direction as the moving direction of the coating head 14'. The (+γ) side non-coating region 92 of the region 91 is coated with a solvent, and the organic EL 97100529 33 1339134 = line drying speed of the coating region 91 on the (+γ;) side is formed to be substantially uniform in the sub-sweep (four) direction. In addition, the application of the organic EL liquid applied by the coating device 1 may be performed in parallel with the organic mash liquid from the (9)-side second nozzle 142 (step (10)," movement of the substrate 9 in the (6) direction (step) Su), step S14 may be performed before step si3. In the coating device 1a of the second embodiment, the two second nozzles 142 may be independent of the coating head 14 having the P nozzle 141, and may be provided separately. The main coating head is moved on the other coating head in the direction of the cat. The solvent application by the second nozzle 142 is not necessarily carried out in parallel with the application of the organic EL liquid applied by the nozzle No. 4 It is used before the application of the organic EL liquid in the i-th nozzle i4i (preferably in the middle) In the coating apparatus la, the gas supply unit 19 does not necessarily have to use the organic-containing organic EL liquid. The porous resin of the solvent may be, for example, a fiber such as a cotton-containing absorbent or a gas discharge mechanism similar to the first gas supply unit 19a of the fourth embodiment, or a gas supply unit; 19 is fixed to the substrate holding portion u on the (·····) side of the substrate 9, or may be formed on the (+Y) side of the substrate 9 on the substrate holding portion u and extending in the main scanning direction. The groove portion is a gas nozzle that supplies a solvent gas and supplies a solvent gas to the (+Y) side portion of the substrate 9 to move the solvent gas in the main scanning direction, or may be attached to the substrate. On the holding portion U (that is, the relative position to the substrate 9), the solvent gas is ejected by the gas nozzle and moved in the main scanning direction, and the solvent gas is supplied to the (+Y) side portion of the substrate 9 (coating device 1〇) 97100529 34 ^39134 中中同). 3rd form In the coating apparatus 1b, the organic EL liquid is not discharged from the second nozzle U1, and only the second nozzle 142 is used to discharge the solvent, and the coating head 14 is applied to the main scanning direction for the first time. The movement is thereby applied to the (^) side non-coating area of the coating region 91 to apply only the "grain." Further, at the coating start position, the second nozzle 142 is placed corresponding to the coating region 91. At the position, by adjusting the position of the substrate 9 in the movement of the coating head 14 toward the main sweeping direction, the (+Y) side non-coating region 92 of the region 91 is only subjected to the organic sputum u. Further, it is also possible to apply a line to the non-coating region 92 by scanning only one of the J-th nozzles on the (+Υ) side. In any case, the drying speed of the E L liquid line in the direction of the coating zone can be made unevenly applied to the secondary finger 91. The spoon is applied to prevent the coating area on the substrate 9 from being sprayed on the substrate of the fourth embodiment, and the outlet may be sprayed from the first gas supply and outlet 191 to the intermittent nozzle supply body supply portion 19a. Exit ^ Γ 虱 1 虱 虱 虱 虱 虱 ( ( 四 ( ( ( 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四▲The main body trr of the main scanning direction of the product 91 can be moved in the main scanning direction and the gas of the solvent gas is sprayed, or can be set in the rolling holding portion 11 of the coating head 14 (10). H==9 and the relative position of the substrate head 14 on the substrate head 97100529 1339134

Set to a fixed state, M moves in the main scanning direction., = '2 = 2;; solvent gas and supply solvent gas. On the (y) side, the substrate 9 is coated with ^Ic: t, and the village is replaced by the gas supply portion 19a, for example, the first latex or fiber which has been constructed, and the porous material in the sub-sweeping machine. In the state in which the coating head 14 is fixed in the direction in which the coating is applied, the setting of the coating head 14 is preferably set to cover the entire length of the coating region 91 in the main scanning direction from the first to the third embodiment. In the coating apparatus of the form, the solvent discharged from the first embodiment is not necessarily a solvent of the organic EL liquid, and may be a fluid material of a disk-nozzle movement. Similarly to the f device lc of the fourth embodiment, the volatile material gas "equivalent to the organic EL liquid solvent" can be ejected from the first gas supply portion 19a and supplied to the substrate 9. The "volatile material equivalent to the organic EL liquid solvent" means a volatile material which can be delayed in drying the organic EL liquid, and preferably contains a common component or a similar component with an organic solvent. In the above embodiment, when the organic solvent is used in a solvent-based manner, the volatile material equivalent to the organic EL solvent may be, for example, anisole (methoxy phenyl), methylamine, and toluene. Aromatic organic solvents. Further, in the coating apparatus according to the second and fourth embodiments, the gas supply unit 19 and the second gas supply unit 19b fixed to the substrate holding portion u on the (+Y) side of the substrate 9 may be supplied. A volatile material gas equal to the solvent of the organic EL solution. In addition, the coating device la of the second embodiment, 97100529 36 1339134, the fluid material discharged from the gas supplied from the gas supply unit 19, 142 is different from the coating device of the fourth embodiment of the second nozzle. Volatile material gas. The gas or disk supplied from the body supply unit W may be of a different type from the gas supplied from the first gas. In the coating apparatus of the above-described lean mode of the second gas supply unit 19b, the movement of the substrate moving plate holding portion 11 may be replaced by the coating plate 9 instead of the cooling system 4°. The relative movement of the substrate 9 to the coating head 14 in the sub-scanning direction is performed by the upper movement. The coating head to be applied by the head moving mechanism 15: instead of the relative movement of the substrate 9 by the substrate 9 and the upper coating head U by the movement of the coated substrate holding portion U in the main scanning direction. In the coating apparatus described above, three kinds of organic EL materials each containing red (8), green (6), blue (8), and the like: different colors may be simultaneously ejected from the coating head 14 141. This situation, Ge down cold: organic this liquid, and on the substrate 9 _ on the Deputy Ah? Two first nozzles are adjacent to each other. Further, the coating system 距离 ° and the distance ' are set to be equal to the distance between the partition walls. The number of the first nozzles (4) of the organic EL material is not limited to three, and the organic nozzles discharged from the first nozzles provided on the coating head 14 Z may be used in the first nozzles 141. The stripe-like coating may also be an organic EL liquid line continuously ejected on the coated area 91 and the substrate 9 which are not provided with the partition walls, and the organic EL material in the main scanning direction is easily moved to: 97100529

37 S 1339134 Depending on the difference in drying time, the deviation of the organic material becomes large, and the film thickness difference as shown in Fig. 4A easily occurs. Since the coating apparatus of the above-described embodiment can improve the drying time uniformity of the organic EL liquid as described above, it is particularly suitable for a device which continuously ejects the organic EL liquid and applies the substrate, and is also suitable for fluidity such as an ink jet method. In the coating device of the field embodiment, a fluid material containing a volatile solvent (for example, a magical and hole transporting material may be applied to the substrate 9), so-called "hole". The conveying material "" refers to a material in which a (four) display hole transport layer is formed, and the so-called "hole transport layer" is not a narrow hole transport layer of an organic EL layer transport hole formed only by an EL material, and also covers an execution hole. The injection hole is injected into the layer. The case where the substrate substrate is manufactured to make a plurality of money EL display \ α 夕 面). Further, the above-mentioned coating device=(4) material or hole transporting material for the organic EL display device is coated with a movable material, and may be used, for example, for coating a substrate for a flat display device such as a liquid crystal display device. :,. Flow material of other kinds of pixel forming materials such as Rongxian material = : 2 cloth? : It is possible to prevent the coating area on the substrate 9 from being (4) "thus (4) is suitable for a flat display device machine EL material which is suitable for containing a display material which is more susceptible to coating, and is not organic (in the above embodiment, organic The EL display device is coated with a fluid material of the material, but the above-mentioned coating device can also be used for applying various fluid materials to various substrates such as a substrate for a flat display device and a semiconductor substrate. The description of the present invention has been described in detail, but the foregoing description is only illustrative and not limiting. Therefore, many variations and aspects may be present without departing from the scope of the invention. [Simplified illustration] 1 is a plan view of the coating apparatus of the first embodiment. Fig. 2 is a right side view of the coating apparatus, Fig. 3 is a flow chart of coating of an organic EL liquid, and Fig. 4A is a substrate formed by a coating apparatus of a comparative example. A cross-sectional view of a film of an EL material formed on a substrate by the coating apparatus of the present embodiment. Fig. 5 is a plan view of the coating apparatus of the second embodiment. FIG 6 is a flowchart illustrating an organic EL coating liquid.

9a is a plan view of a coating apparatus according to a third embodiment. Fig. 8 is a flow chart showing the application of an organic EL liquid. Fig. 9 is a plan view of a coating apparatus according to a fourth embodiment. Fig. 10 is a right side view of the coating apparatus. 51 11 is a coating flow chart of the organic EL liquid. [Main component symbol description] la ' lb, lc coating device Control unit Substrate 97100529 39 1339134

11 substrate holding portion 12 substrate moving mechanism 13 alignment mark detecting portion 14 coating head 15 coating head moving mechanism 16 liquid receiving portion 18 fluid material supply 19 gas supply portion 19a first gas supply portion 19b second gas supply portion 91 91a coating area 92 uncoated area 93, 93a film 141 first nozzle 142 second nozzle 143 nozzle holder 191 discharge port 97100529 40

Claims (1)

1339134 X. Patent Application Range: 1. A coating device for applying a fluid material to a substrate; the device comprising: a substrate holding portion for holding the substrate; a discharge mechanism for discharging a fluid material toward the substrate; and a *moving mechanism And causing the discharge mechanism to relatively move the substrate in a main scanning direction parallel to the main surface of the substrate, and moving the substrate toward the discharge main body in parallel with the main surface in the main scanning direction. And moving in a sub-scanning direction perpendicular to the main scanning direction; and the discharging mechanism is provided with: a first soil discharge, and a re-discharging outlet arranged at equal intervals in the sub-scanning direction, and discharging a volatile solvent and providing a first fluid material of the material on the substrate, wherein the first fluid material is applied to the application region on the substrate; and the second discharge portion is disposed on the first discharge portion * The solvent or the solvent described above for discharging the first fluid material by the back side of the relative movement direction of the substrate in the drawing direction T test materials flowable material 2 'in the coating on the substrate region e applying the second fluid material. 2. In the case of the coating device of the scope of the patent application, the sputum, the sputum, the sputum, the sputum, the sputum, the second squirting portion, the first squirting portion, the squirting portion The apparatus of the present invention, further comprising: disposed on the front side of the first discharge unit 97100529 41 in the sub-scanning direction, and spits the second fluid material cloth: on the top: another The second material is applied to the non-coating region of the coating region J of the substrate by the first coating material of the first fluid material. The coating apparatus according to the second aspect of the invention, wherein the second supply unit is the solvent of the phase=material when the substrate is facing the moving direction, and the solvent is The coating apparatus according to the first aspect of the invention, wherein the second discharge unit discharges the second fluid material from a plurality of different positions in the sub-scanning direction. 6. The coating apparatus according to the invention of claim 1, wherein the apparatus further includes: the first discharge unit is disposed on the front side of the substrate in the direction of the movement direction of the substrate, and the discharge is performed 2 another second discharge part of fluidity; / while using the above mentioned! When the discharge portion starts the application of the first fluid material, the other second discharge portion moves in the main scanning direction and discharges the second fluid material, whereby the outer side of the coating region of the substrate is not The second fluid material is applied to the coating region. 97100529 42 7· If the scope of application for patent application is: 1. The coating device of item 1. Among them, the more advanced pair:::::' is the phase flow electrode/the side of the substrate in the above-mentioned sub-scanning direction' The substrate is relatively fixed and the first gas is supplied. The above-mentioned solvent of the material or the volatile material equivalent to the above-mentioned solvent, such as the coating device of any one of the items of the patent of the fourth of The fluidity material includes a coating formation in a pixel for a flat display device, and a coating cracking according to any one of the above-mentioned items, in the seventh aspect of the invention, wherein the discharge portion continuously discharges the first fluid material; The second fluid material is continuously discharged. 10. The coating apparatus according to claim 9 of the invention, wherein the first fluid material comprises a coating device for forming a pixel for a flat display device, and the substrate is coated with a fluid material. a substrate holding portion for holding the substrate; Η:: 'from the parallel sub-scanning direction of the main surface of the substrate; a solvent and a flow material for the material on the substrate 97100529 43 (3) 9134 flat = 2, make the above spit! When the mechanism moves in the main scanning direction while moving in the main scanning direction perpendicular to the sub-scanning direction, the mechanism causes the base gas 2 out mechanism to relatively move in the sub-scanning direction; The body supply portion is fixed to the upper side relative position of the discharge mechanism after the upper (4) sweeping direction of the upper take-up mechanism, and is supplied with the above-mentioned fluid material or the same solvent as the solvent. Material gas. 2. The coating apparatus according to claim 2, wherein the lanthanide has the main scanning side covering the coating area == the main surface of the substrate is simultaneously ejected toward the main surface. 13 The coating apparatus of the 12th item is provided in the following steps: the other gas supply unit' is attached to the other side of the substrate in the scanning direction of the substrate, and the substrate is relatively fixed, and the solvent or the material of the == material is supplied or And a coating device according to the above aspect of the invention, wherein the coating device of the first aspect of the invention has: a gas supply portion, which is in the direction of the sub-blessing of the substrate; In the front side of the moving direction, the substrate is relatively fixed, and the solvent of the fluid material or the volatile material equivalent to the solvent is supplied. <S97100529, pp. 339,134, the disclosure of which is incorporated herein by reference. a coating method for applying a fluid material to a substrate; the method comprising: discharging a fluid material to the substrate by the discharge mechanism; and moving the substrate relative to the substrate in a main scanning direction of the main surface of the substrate; b a step of: relatively moving the substrate relative to the ejection mechanism in a direction parallel to the main surface of the substrate and perpendicular to the direction of the main scanning finger; and c) repeating the steps of the steps a) and b) above; The step a) includes: c〇=the third discharge material of the discharge mechanism is discharged from the plurality of discharge ports of the sub-sweep, and the first fluid material containing the volatile solvent and the material on the substrate is discharged. The step of applying the first fluid material to the coating region above; and the step of applying the first flow applied in step = d) in parallel with step d) or before step d) The material is discharged from the second discharge portion to the rear side of the substrate in the relative movement direction, and the (4) or the movable material of the pure material is discharged from the second discharge portion, whereby the coating is performed. The step of moving material. 17. The coating method of claim 16, wherein 97100529 45 1339134 In the above step d), the second fluid material is continuously discharged; and in the step e), the second fluid material is continuously discharged. 18. The coating method according to claim 16 or 17, wherein before the step a), the method comprises: ??? immersing the substrate on the side of the sub-scanning direction, and discharging the second portion from the plurality of discharge ports The two pairs of moving directions are different from each other. 4 The first stream is pure material and the above-mentioned σ 4 is relatively moved in the above-mentioned main scanning direction, whereby the above-mentioned (four) region is outside the non-(four) region on the board material step; or the division (1) fluidity g) the substrate is ejected from the second discharge unit on the sub-scanning side, and the second discharge unit is moved in the main scanning direction before the moving direction, and the material is placed on the sub-scanning unit. a step of applying the second fluid material described above 97100529 46 < S