TWI338535B - - Google Patents

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Publication number
TWI338535B
TWI338535B TW096116382A TW96116382A TWI338535B TW I338535 B TWI338535 B TW I338535B TW 096116382 A TW096116382 A TW 096116382A TW 96116382 A TW96116382 A TW 96116382A TW I338535 B TWI338535 B TW I338535B
Authority
TW
Taiwan
Application number
TW096116382A
Other versions
TW200812441A (en
Inventor
Hirotaka Nakashima
Taketo Yasuzumi
Kohei Tomita
Nobuharu Ishikawa
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Publication of TW200812441A publication Critical patent/TW200812441A/zh
Application granted granted Critical
Publication of TWI338535B publication Critical patent/TWI338535B/zh

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
TW096116382A 2006-05-10 2007-05-09 Ionizer, installing method of ionizer and clean-room system TW200812441A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006131267A JP4715626B2 (ja) 2006-05-10 2006-05-10 イオナイザ、イオナイザの取り付け方法およびクリーンルームシステム

Publications (2)

Publication Number Publication Date
TW200812441A TW200812441A (en) 2008-03-01
TWI338535B true TWI338535B (zh) 2011-03-01

Family

ID=38839134

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096116382A TW200812441A (en) 2006-05-10 2007-05-09 Ionizer, installing method of ionizer and clean-room system

Country Status (4)

Country Link
JP (1) JP4715626B2 (zh)
KR (1) KR100872670B1 (zh)
CN (1) CN201100934Y (zh)
TW (1) TW200812441A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5794897B2 (ja) * 2011-11-11 2015-10-14 シャープ株式会社 イオン発生ユニット及び電気機器
KR101368794B1 (ko) * 2012-08-30 2014-03-03 한국에너지기술연구원 냉동 사이클용 가변체적 리시버, 이를 포함하는 냉동 사이클 및 그의 제어방법
CN104197422B (zh) * 2014-08-06 2017-03-01 深圳易事关怀智能科技有限公司 负离子空气净化器
KR102358693B1 (ko) 2015-01-06 2022-02-04 삼성전자주식회사 매엽식 웨이퍼 세정 설비
CN105098545B (zh) * 2015-01-27 2019-03-26 青岛海尔空调器有限总公司 一种空气净化器、空气净化模块及其中心连接器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244322A (ja) * 2000-03-02 2001-09-07 Mitsubishi Electric Corp ウェハストッカー及びストック方法
JP4488608B2 (ja) * 2000-08-29 2010-06-23 住友スリーエム株式会社 静電気除去装置
JP2002151293A (ja) 2000-11-16 2002-05-24 Koganei Corp 静電気除去装置
JP2004136196A (ja) 2002-10-17 2004-05-13 Fujitsu General Ltd 空気清浄機
JP4317699B2 (ja) * 2003-02-18 2009-08-19 株式会社キーエンス 除電装置および除電装置用脱着ユニット
JP2005072374A (ja) 2003-08-26 2005-03-17 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4218757B2 (ja) * 2004-05-13 2009-02-04 旭平硝子加工株式会社 ガラス基板搬送用ボックスに用いる空気清浄具及びその使用方法

Also Published As

Publication number Publication date
KR20070109833A (ko) 2007-11-15
KR100872670B1 (ko) 2008-12-10
CN201100934Y (zh) 2008-08-13
TW200812441A (en) 2008-03-01
JP4715626B2 (ja) 2011-07-06
JP2007305366A (ja) 2007-11-22

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