TWI328623B - - Google Patents

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TWI328623B
TWI328623B TW95140188A TW95140188A TWI328623B TW I328623 B TWI328623 B TW I328623B TW 95140188 A TW95140188 A TW 95140188A TW 95140188 A TW95140188 A TW 95140188A TW I328623 B TWI328623 B TW I328623B
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Taiwan
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copper
electrolytic
electrolytic copper
copper foil
sulfuric acid
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TW95140188A
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Chinese (zh)
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TW200728515A (en
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Makoto Dobashi
Mitsuyoshi Matsuda
Tomohiro Sakata
Junshi Yoshioka
Taguchi Takeo
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Mitsui Mining & Smelting Co
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1328623 九、發明說明: 【發明所屬之技術領域】 本發明係關於電解銅箔 之電解銅箔,使用該電解銅 使用該電解銅箔或該表面處 特別是,關於以該析出面側 製造方法。 之製造方法,由該方法所製造 箔所獲致之表面處理銅箔以及 理鋼笛所獲致之銅覆層積板。 為低輪廓為特徵之電解鋼箱之 【先前技術】 從以往,電解銅络係作為印刷配線板之基礎材料而被 廣泛使用。㈣,對於多使用印刷配線板之電子機写 氣機器’要求小型化、輕量化等之所謂的輕薄短小。以往 為實現如此之電子機器及電氣機器之輕薄短“匕,所使用 之印刷配線板之信號回路需要儘可能的細間距化。因此 在印刷配線板之製造時,縮短藉由料來形成㈣時 度餘刻的設定時間,為使所形成< ° I〜风之回路蝕刻因子提高, 由採用更薄之銅箔來對應。 s 然後,同時,對於小型化 '輕量 化之電子機器及電氣 機器也要求高機能化。因此,在右印沾, 在有限的印刷配線板之面積 中,為儘可能的確保零件實裝面積,也以使回路形成時之 蝕刻參數良好來對應。特別是’對於直接搭载π 帶狀自動化黏合構裝(ΤΑΒ)基板或是 ΒΒ 之 w Λ ^ f式溥膜覆晶(COF) 基板用途,為使蝕刻因子更加良好,要灰 ^权逋常印刷配線 板還低的輪廓電解銅落。又,低給虛,# 低輪廓係用於指銅落之與 2213-8439-PF;Ahddub 5 1328623 基材樹脂之接合界面之凹凸很低的意思。 為解決如此之問題,在專利文獻i(日本國專利申請 特開2004-3591 8號公報)中,開示:在藉由硫酸酸性銅電 鍍液之電氣分解之電解銅绪之製造方法中,以使用含有二 烯丙基二烷基銨鹽與二氧化硫之共聚物之硫酸酸性銅電鍍 液為特徵之電解銅箱之製造方法。在該硫酸酸性銅電鍍液 中,以含有聚乙二醇與氣與3_锍基-卜磺酸為佳。然後, _ 藉由此製造方法所得到之電解銅箔與絕緣基材之貼合面的 表面粗度(析出面粗度)小,厚1 〇 " m之電解銅箔之情況,, 為Rz = l. 0±0. 5# m程度之低輪廓(粗度)。 又’在專利文獻2(日本國專利申請特開2〇〇4-1 62144 號公報)中,開示著即使不使用明膠或膠等,也可製造析出 面之表面粗度小,伸縮率優良之電解銅箔,在藉由硫酸酸 性銅電鍍液之電氣分解之電解銅箔之製造方法中,使用含 有歜乙一醇與氣與3 -疏基-1-續酸為特徵之硫酸酸性銅電 φ 鍍液。然後,藉由此製造方法所得到之電解銅箔之與絕緣 基材之貼合面的表面粗度(析出面粗度)小,厚1〇ym之電 解銅羯之情況,為Rz = l. 5±〇. 5/z m程度之低輪廓(粗度)。 在專利文獻3(曰本國專利申請特開2004-1 07786號 公報)中’開示:藉由使1分子中含有1個以上之環氧基的 化合物與胺化合物附加反應後所得到之具有特定骨路之胺 化合物與含有有機硫化合物作為添加劑之銅電解液用於電 解銅箔之製造之方法。然後,藉由此製造方法所得到之電 解銅箔,由該實施例的記述,表面粗度在0.90〜1.20/ΖΠ1之 2213-8439-PF;Ahddub 6 1328623 範圍’常溫伸縮率為6.62〜8· 9〇%,常溫抗張力為 3〇·5〜37.9kgf/mm2,高溫伸縮率為12.卜18 2%,高溫抗張 力為 20·卜22. 3kgf/mm2 。[Technical Field] The present invention relates to an electrolytic copper foil of an electrolytic copper foil, which is used in the electrolytic copper foil or on the surface, in particular, a method for producing the deposition surface side. The manufacturing method, the surface-treated copper foil obtained by the foil produced by the method, and the copper-clad laminate obtained by the steel flute. Electrolytic steel box characterized by low profile [Prior Art] Electrolytic copper is widely used as a base material for printed wiring boards. (4) For the electronic machine writing machine that uses a printed wiring board, it is required to be lightweight, short, and so on. In the past, in order to realize the lightness and thinness of such electronic equipment and electrical equipment, the signal circuit of the printed wiring board to be used needs to be as fine as possible. Therefore, when manufacturing a printed wiring board, shortening the formation by the material (4) The set time of the remaining time is increased by the use of a thinner copper foil in order to improve the etching factor of the formed < ° I ~ wind. s Then, at the same time, for miniaturized 'lightweight electronic and electrical machines Therefore, it is required to be highly functional. Therefore, in the area of the limited printed wiring board, in order to ensure the mounting area of the part as much as possible, the etching parameters at the time of circuit formation are also good. Directly mounted on a π-belt automated bonding structure (ΤΑΒ) substrate or a w Λ f f-type 溥 film flip-chip (COF) substrate, in order to make the etch factor better, the ash is too low, and the printed wiring board is low. The outline of the electrolytic copper drop. Also, low to the virtual, #low profile is used to refer to the copper drop with 2213-8439-PF; Ahddub 5 1328623 substrate resin has a very low bump at the joint interface. In the patent document i (Japanese Patent Application Laid-Open No. 2004-3591-8), it is shown that in the method of manufacturing electrolytic copper by electrolysis of an acid copper plating solution, A method for producing an electrolytic copper box characterized by a sulfuric acid acidic copper plating solution of a copolymer of allyl dialkyl ammonium salt and sulfur dioxide. The sulfuric acid copper plating solution contains polyethylene glycol and gas and 3_锍Preferably, the surface roughness (precipitation surface roughness) of the bonding surface of the electrolytic copper foil obtained by the manufacturing method and the insulating substrate is small, and the thickness is 1 〇" In the case of the copper foil, it is a low profile (thickness) of the degree of Rz = 1.00 ± 0. 5# m. In the patent document 2 (Japanese Patent Application Laid-Open No. Hei 2 4-1 62144) In the method of manufacturing an electrolytic copper foil which is electrically decomposed by a sulfuric acid acidic copper plating solution, it is possible to produce an electrolytic copper foil having a small surface roughness and a high expansion ratio without using gelatin or glue. Characterized by the use of benzylidene alcohol and gas and 3-sulfenyl-1-supply acid Acidic acid copper electroplating liquid. Then, the surface roughness (precipitation surface roughness) of the bonding surface of the electrolytic copper foil obtained by the manufacturing method and the insulating substrate is small, and the electrolytic copper crucible is 1 μm thick. In the case of Rz = 1.5±5. 5/zm, the low profile (thickness). In the patent document 3 (Japanese Patent Application Laid-Open No. 2004-1 07786), the disclosure is made by making 1 A method in which an amine compound having a specific bone path and a copper electrolyte containing an organic sulfur compound as an additive obtained by additionally reacting a compound having one or more epoxy groups in a molecule with an amine compound is used for the production of an electrolytic copper foil. The electrolytic copper foil obtained by the manufacturing method has a surface roughness of from 0.90 to 1.20/ΖΠ1 of 2213-8439-PF and Ahddub 6 1328623 range of normal temperature expansion ratio of 6.62 to 8. 9 by the description of the embodiment. 〇%, normal temperature tensile resistance is 3〇·5~37.9kgf/mm2, high temperature expansion ratio is 12.b 18 2%, high temperature tensile resistance is 20·b 22. 3kgf/mm2.

在專利文獻4(日本國專利申請特開2004437588號 公報)中,開示:藉由使i分子中含有i個以上之環氧基的 化合物與胺化合物附加反應後,藉由使氮4級化來得到之 具有特定骨路之4級胺化合物與含有有機硫化合物作為添 加劑之銅電解液用於電解銅箔之製造之方法。然後,藉由 此製造方法所得到之電解銅羯,由該實施例的記述,表面 粗度在0.94〜1.23/zm之範圍,常溫伸縮率為6 72〜9 2〇%, 常溫抗張力為30.5〜37.21^以咖2,高溫伸縮率為 11.9〜18.2%,高溫抗張力為199〜23.41^【/1111112。 另一方面,在專利文獻5(日本國專利申請特開平 9-143785號公報)中,開示著:未處理電解銅@之析出面 的表面粗度Rz,雖與該未處理電解銅荡之光澤面之表面粗 度Rz相同,或是在較其小之箔的析出面上施以粗化處理, 來作為接著面為特徵之表面處理電解銅箔。然後,前述 處理電解銅箱之製造,係㈣具有疏基之化合物,2 = 氣化物離子、分子量1 0000以下之低分子量膠以及古八 子多聽類之電解液。具體而言,具有疏基之化合物為二: 基-1-丙烷磺酸鹽、低分子量膠之分子量在3〇〇〇以下秋 後高分子多醣類為羥乙基纖維素。 ,確實形 顯不極 然後,使用這些製造方法,來製作電解鋼箔 成優良之低輪廓的析出面,作為低輪廓電解鋼落 7 2213-8439-PF;Ahddub 1328623 為優良之性質。 然而,電子機器或電氣機器的代 頻率數也急劇上升,演算速声飛躍^個人電腦之時脈 角异迓度飛躍的變快。然後,不僅為 以往電腦中本來之角色的單純的資料 貝付慝理,電腦本身也附 加了同樣於AV機器來使用之機能。 , j卩除了音樂播放機 …附加了 MD之錄影播放機能、n受像錄影機能、電 視電話機能等多種的機能。In the patent document 4 (Japanese Laid-Open Patent Publication No. 2004437588), it is shown that by reacting a compound containing i or more epoxy groups in the i molecule with an amine compound, the nitrogen is 4-staged. A method of obtaining a copper-based electrolyte having a specific bone path and a copper electrolyte containing an organic sulfur compound as an additive for producing an electrolytic copper foil. Then, the electrolytic copper crucible obtained by the production method has a surface roughness of 0.94 to 1.23/zm in the range of 0.94 to 1.23/zm, a room temperature expansion ratio of 6 72 to 9 2 %, and a normal temperature tensile strength of 30.5. 37.21^Caf 2, the high temperature expansion ratio is 11.9~18.2%, and the high temperature tensile resistance is 199~23.41^[/1111112. On the other hand, in the patent document 5 (Japanese Laid-Open Patent Publication No. Hei 9-143785), the surface roughness Rz of the untreated electrolytic copper surface is revealed, and the gloss of the untreated electrolytic copper is smeared. The surface roughness Rz of the surface is the same, or a roughening treatment is applied to the deposition surface of the smaller foil to provide a surface-treated electrolytic copper foil characterized by a bonding surface. Then, the above-mentioned electrolytic copper box is manufactured by (4) a compound having a sulfhydryl group, 2 = a vaporized ion, a low molecular weight gel having a molecular weight of 1,000,000 or less, and an electrolyte of an ancient octahole. Specifically, the compound having a thiol group is a ketone group, and the molecular weight of the low molecular weight gum is 3 Å or less, and the polymer polysaccharide is hydroxyethyl cellulose. It is indeed inconspicuous. Then, using these manufacturing methods, an electrolytic steel foil is produced into an excellent low-profile precipitation surface as a low-profile electrolytic steel falling 7 2213-8439-PF; Ahddub 1328623 is an excellent property. However, the number of generation frequencies of electronic equipment or electrical equipment has also risen sharply, and the calculation speed has leaped. The clock of the personal computer has become faster and faster. Then, not only is the simple data of the original role in the computer, but the computer itself also has the same function as the AV machine. , j卩 In addition to the music player ... attached to the MD video player, n by the video recorder, TV phone functions and other functions.

伴隨此,個人電腦之螢幕也不是單純的資料螢幕,也 要求即使投射電影的晝像’也可以忍受長時間的視聽之畫 質。更且,要求廉價且大量的供給如此品質之螢幕。然後, 現在之該螢幕多使用液晶螢幕,此液晶面板之驅動器,一 般使用前述帶狀自動化黏合構裝⑽)基板或是捲帶式薄 膜覆晶(⑽)基板。因此,為使螢幕對應高晝質映像,前述 驅動器也要求形成更微細的回路。 又,作為鋰離子電池用之集電體來使用之銅箔,也以 #表面平滑為佳。亦即,在銅箔上塗布活性物質時,為使含 有活性物質之懸浮液以均一的塗膜厚來塗布在銅箔上以 表面平滑之銅箔作為集電體來使用是有利的。然後,該負 極活性物質,由於在充放電時會反覆膨脹收縮,所以作為 集電材追隨該膨脹收縮之銅箔之尺寸變動也變大,有發生 無法追隨而斷裂的現象。因此,集電材之銅箔之機械物性, 為^义反覆之膨脹收縮舉動’要求良好之拉伸強度與伸縮 率。更且,在銅箔上以溶膠-凝膠法形成電容用介電體層 時’使用平滑之銅箔也是同樣有利的。 2213-8439-PF;Ahddub 相較於以往所供給 ’且機械強度優良 之低輪廓 之對於電 由以上可知,在市場上, 電解鋼绪,古+ β 子在著之更低輪廓 解銅箔的要求。 【發明内容】 為解決上述課題’本發明者,精心研究:使用 添加具有環狀構造之4 4級銨鹽聚合物所得到之硫酸系銅電 心、由電解此,而得到電解銅箔。其結果,想到藉由 私用以下所示之製造條件,而可安定的進行超越以往之低 輪廓銅㈣之低輪廓電解㈣之製造,所得到之電解銅羯之 輪廓品質也為差異小之物。本發明,係如下述。 、低輪廓電解銅落之製造方法:此電解銅落之製造方 法係電解包含具有環狀構造之4級銨鹽聚合物與氣之硫 酸土銅電解液來得到電解銅領之製造方法,其特徵在於: 在刖述硫酸系銅電解液中所含有t 4級銨鹽聚合物中,係 使用2量體以上之二烯丙基二甲基氣化銨聚合物之電解銅 箔之製造方法。 在與本發明有關之電解銅洛之製造方法中,前述硫酸 系銅電解液所包含之4級銨鹽聚合物,使用數量平均分子 量30(M〇〇〇〇之二烯丙基二甲基氣化銨聚合物為佳。 又’在與本發明有關之電解銅箔之製造方法中,前述 疏酸系銅電解液,係包含從雙(3_磺丙基)二硫化物或是具 有織基之化合物之3-巯基-卜丙烷磺酸選擇丨種以上溶 液’其濃度以0. 5ppm~200ppni為佳。 2213-8439-PF;Ahddub 9 1328623 又’在與本發明有關之電解銅箔之製造方法中,前述 瓜&L系銅電解液中之4級鍵鹽聚合物濃度以1 ppm〜1 5 〇ppm 為佳。 更且’在與本發明有關之電解銅箔之製造方法中,前 述硫酸銅系電解液中之氣濃度以5_.卿為佳。 然後’在與本發明有關之電解銅箔之製造方法中之前 述爪奴系鋼電解液,液溫為2 0 t〜6 0 °C ,電流密度 15A/dm2〜9GA/dra2來電解,用於低輪廓之電解㈣之製造為 佳。 =由/、本發明有關之電解銅箔之製造方法所獲致之電 〃藉由與本發明有關之電解鋼箔之製造方法所獲致 電:銅泊係、藉由電解上述硫酸系銅電解液所獲致之電 解銅、治’其特徵在於:該電解_ # 銅V白’其析出面側之表面粗 度(Rzjis)為i.〇em以下低 輪廓’且該析出面之光澤度 (Gs(60 ))為 4〇〇 以上。 與本發明有關之表面處理 老细^ # 銅';自:與本發明有關之表面 在上述電解銅箱析出面上進行粗化處理、防 2理、有機W合劑處理之任丨種或是2種以上之處 然後,具備與前述表 人而*主 处理鋼治之絕緣樹脂基材之貼 合面之表面粗度(1?2^3)為2 孖4站 下之低輪廓為特徵。 與本發明有關之銅覆層積 a ^ 9 * _ . •错由使用.上述之電解銅Along with this, the screen of the personal computer is not a simple data screen, and it is required that the image of the movie can be tolerated for a long time. Moreover, it is required to supply such a quality screen at a low cost and in a large amount. Then, nowadays, the screen uses a liquid crystal screen. The driver of the liquid crystal panel generally uses the above-mentioned strip-shaped automatic bonding structure (10) substrate or a tape-type film flip-chip ((10)) substrate. Therefore, in order for the screen to correspond to a high-quality image, the aforementioned driver is also required to form a finer circuit. Further, the copper foil used as the current collector for a lithium ion battery is preferably smoothed with #surface. That is, when the active material is coated on the copper foil, it is advantageous to apply the suspension containing the active material to the copper foil with a uniform coating film thickness to use a copper foil having a smooth surface as a current collector. Then, since the negative electrode active material reversibly expands and contracts during charge and discharge, the dimensional variation of the copper foil which follows the expansion and contraction as the current collector is also large, and there is a phenomenon in which it is impossible to follow and break. Therefore, the mechanical properties of the copper foil of the current collector are required to have a good tensile strength and expansion ratio for the expansion and contraction behavior. Further, when a dielectric layer for a capacitor is formed by a sol-gel method on a copper foil, it is also advantageous to use a smooth copper foil. 2213-8439-PF; Ahddub is lower than the conventionally supplied 'low-profile with good mechanical strength. From the above, in the market, electrolytic steel, the ancient + β is in the lower profile of copper foil Claim. In order to solve the above problems, the present inventors have intensively studied to obtain an electrolytic copper foil by electrolysis using a sulfuric acid-based copper core obtained by adding a tetra-ammonium salt polymer having a cyclic structure. As a result, it is thought that the production of the low profile copper (4) which is superior to the conventional low profile copper (4) can be stably carried out by privately using the manufacturing conditions shown below, and the obtained profile quality of the electrolytic copper crucible is also small. . The present invention is as follows. Method for producing low-profile electrolytic copper drop: The method for producing electrolytic copper drop is to produce a method for producing an electrolytic copper collar by electrolyzing a copper sulfate electrolyte having a cyclic structure of a 4-stage ammonium salt polymer and gas. In the t 4 -type ammonium salt polymer contained in the sulfuric acid-based copper electrolytic solution, a method for producing an electrolytic copper foil of a dimer dimethyl dimethyl vaporized ammonium polymer having a volume of 2 or more is used. In the method for producing an electrolytic copper according to the present invention, the fourth-order ammonium salt polymer contained in the sulfuric acid-based copper electrolyte uses a number average molecular weight of 30 (M〇〇〇〇 of diallyldimethyl gas). In the method for producing an electrolytic copper foil according to the present invention, the acid-based copper electrolyte contains bis(3-sulfopropyl)disulfide or has a woven group. The compound 3-mercapto-propane sulfonic acid is selected from the above solution. The concentration thereof is preferably 0.5 ppm to 200 ppni. 2213-8439-PF; Ahddub 9 1328623 and 'Manufacture of electrolytic copper foil related to the present invention. In the method, the concentration of the 4-stage bond salt polymer in the melon & L-based copper electrolyte is preferably 1 ppm to 15 〇 ppm. Further, in the method for producing an electrolytic copper foil according to the present invention, the foregoing The gas concentration in the copper sulfate-based electrolyte is preferably 5 _. qing. Then, in the method for producing an electrolytic copper foil according to the present invention, the above-mentioned claw-stained steel electrolyte has a liquid temperature of 20 to 600 °. C, current density 15A/dm2~9GA/dra2 for electrolysis, for low profile electrolysis (4) = The electricity obtained by the method for producing an electrolytic copper foil according to the present invention is obtained by the method for producing an electrolytic steel foil according to the present invention: copper mooring, by electrolysis of the above-mentioned copper sulfate electrolyte The electrolytic copper obtained by the treatment is characterized in that the surface roughness (Rzjis) of the surface of the electrolysis_# copper V white is i.〇em below the low profile' and the gloss of the precipitation surface (Gs( 60)) is 4 〇〇 or more. The surface treatment of the present invention is related to the surface of the copper (2); since: the surface related to the present invention is roughened, prevented, and organically deposited on the surface of the electrolytic copper box. Any two or more types of the mixture treatment, and then the surface roughness (1?2^3) of the bonding surface of the insulating resin substrate with the above-mentioned person and the main treatment steel is 2 孖4 stations. The lower profile is characterized by a copper cladding layer a ^ 9 * _ .

>白或疋表面處理銅箔,而 所妒J 夕古σ特別適於印刷線路板製造 之尚品質之銅覆層積板。 攸教故 2213-8439-PF;Ahddub 10 1328623 【發明效果】 根據與本發明有關之電解銅箱 ^ 眾1^方法,相較於w 往供給於市場之低輪廓電解鋼 、 β 」从口口貝差異小且有 率地製造具備更低輪廓,且高強度機械特性之電解政 又,與本發明有關之電解鋼箱之製造方法所使 之組成,係不同於以往之低輪廓電解銅羯之製造 物’為溶液安定性優良’可安定使用於長期電解,即使考 慮廢液處理也不會造成成本上升之物。 又’以此製造方法所得到之低輪廓之電解銅箱,在該 析出面上施以表面處理來作為表面處理銅箔,也維持低輪 摩及優良之機械特性。因此,對於㈣之低輪靡的要求很 強,適合作為帶狀自動化黏合構裝(TAB)基板或是捲帶式薄 膜覆晶(COF)基板之微細間距回路之形成。又,也適合在構 成裡離子二次電池之負極之極電材等分野之使用。 【實施方式】 與本發明有關之電解銅箱之製造形態:與本發明有關 之低輪廓電解銅箱之製造方法,係使用包含具有環狀構造 之4級銨鹽聚合物與氣之硫酸系銅電解液之製造方法,在 前述4級銨鹽聚合物中,係使用2量體以上之二烯丙基二 甲基氣化銨(以下,稱為「DDAC」)聚合物之製造方法。亦 即,上述形態,係將DDAC單量體(單體)除外之概念,而選 擇地使用2量體以上之DDAC聚合物。又,作為4級錢鹽聚 2213-8439-PF;Ahddub 11 1328623 二=c在成為聚合物構造時會成環狀構造,環狀構造 二;广級錄鹽之氮原子所構成。然後,c聚合物 被〜為為則述環狀構造為4貞環〜7 :::所以在此聚合物以5員環構造之化合物:::其: :::以下。此陳聚合物如化i所明顯表示 為2里體以上之聚合物構造。亦即 ώ2 Λρ, Λ* * ^ 干里賤,對於電 解銅"表面之低輪廓化沒有貢獻。㈣,此DDAC聚合物之 主鏈,係僅以碳與氫來構成為佳❺ 化1.> White or tantalum surface treated copper foil, and the J 夕 古 σ is particularly suitable for the quality of copper clad laminates for printed circuit board manufacturing.攸教故2213-8439-PF; Ahddub 10 1328623 [Effect of the Invention] According to the electrolytic copper box of the present invention, the low-profile electrolytic steel supplied to the market, β 从 from the mouth The composition of the electrolytic steel box related to the present invention is small and has a small difference in the production of a low profile and high-strength mechanical characteristics, and is different from the conventional low-profile electrolytic copper enamel. The manufactured product 'is excellent in solution stability' and can be safely used for long-term electrolysis, and it does not cause cost increase even if it is treated with waste liquid. Further, the low-profile electrolytic copper box obtained by the above-described production method is subjected to surface treatment on the deposition surface as a surface-treated copper foil, and also maintains low roundness and excellent mechanical properties. Therefore, the requirements for the low rim of (4) are strong, and it is suitable for the formation of a fine pitch circuit of a strip-shaped automated bonding (TAB) substrate or a tape-type film-coated (COF) substrate. Further, it is also suitable for use in the field of electric materials such as the anode of the ion secondary battery. [Embodiment] The manufacturing method of the electrolytic copper box according to the present invention: the method for manufacturing the low profile electrolytic copper box according to the present invention is to use a sulfuric acid based copper containing a 4-stage ammonium salt polymer and a gas having a ring structure. In the method for producing an electrolytic solution, a method of producing a dimer dimethyl dimethyl vaporized ammonium (hereinafter referred to as "DDAC") polymer having a volume of two or more is used in the above-described fourth-order ammonium salt polymer. That is, the above-described form is a concept in which a DDAC single body (monomer) is excluded, and a DDAC polymer of 2 or more bodies is selectively used. Further, as a 4th grade salt, it is composed of 2213-8439-PF; Ahddub 11 1328623, 2 = c, when it is a polymer structure, it has a ring structure, a ring structure 2; and a nitrogen atom of a wide-range salt. Then, the c-polymer is made up of a ring structure of 4 贞 ring ~7 ::: Therefore, the compound in this polymer is a 5-membered ring structure::::::: or less. This polymer is clearly expressed as a polymer structure of 2 or more linings. That is, ώ2 Λρ, Λ* * ^ 贱 贱, does not contribute to the low profile of the electrolytic copper " surface. (4) The main chain of this DDAC polymer is composed of only carbon and hydrogen.

然後,藉由使用包含此2量體以上之職聚合物之电 成的硫酸系銅電解液,具備較以往之低輪廓電 低 輪廓表面之電解銅羯之安定製造為可能。 定低 丄 < ⑽队永合物,右分子量過 大,則該低輪廓電解銅箔之劁、生At ^ 冶之製造旎力低下。以多量 來說,為2量體〜150量體,& , U θ 偁k 里體,而以4〜14量體為佳。單 之情況以及超過150量體之蜱v 士 似 里® 、 粒之情況中,對於電解銅箱表面之 低輪廟化沒有貢獻,而在輪厳¥田 任輪廓產生差異。然後,若在較 之多量體範圍來使用,則可县—— J了最女定而沒有差異的達成電解 2213-8439-PF;Ahddub 鋼箔之表面低輪廓化。 又,從數量平均分子量之觀點來看,最適合 =上之職聚合物為以之範圍者為佳。眶 率::之數量平均分子量若在300以下’單量體之存在比 則如後述之比較例所示,低輪廓化有變的困難的 乂。但是,與本發明有關之電解㈣之低輪廓化,並非 早意指以觸針式的粗度計來測定時之輪廊良好。而是相較 於以彺之電解法所得到之低輪廓銅箔,該析出面之光澤度 明顯不同,且平面的來看平坦性也飛躍地提高的意思:: 後’若_c聚合物之數量平均分子量超過,則即使 調整共存之其他添加劑濃度’也無法對於 廟化有所貢獻,所得到之電解㈣之析出面之輪2= 變大。又,即使該數量平均分子量為1 0000以下若超過 7「〇〇〇,則例如’共存之雙(3_續丙基)二硫化物(以下,稱為 「sps」)濃度若不在100ppm以上’則所得到之電解銅结析 出面之輪廓的差異顯著變大。因此,若考慮一般管理程度 之進行電解操作時之液溫、濃度等諸條件之差異,則以使 用數量平均分子量3〇〇,〇〇之職聚合物為佳而以使 用數量平均分子量600~2500之DDAC聚合物更佳。但是, 即使欲製造DDAC聚合物,仍有無法避免的單量體之卯 殘留之情況。在此情況,由於殘留之單量體DMC為微量, 所以在此明記其排除並不是必要的。 又,上述數量平均分子量,係藉由以下之測定方法測 定所得之值。亦即,使試料溶解於溶劑中,在以下所示之 2213-8439-PF;Ahddub 13 1328623 條件下,以膠體色層分析儀(GPC)來測定。檢出器係使用多 角度雷射光散亂光度計(MALS)。又,「第2維里係數X濃度」 之值假設為Omol/g,對於屈折率濃度變化(dn/dc)計算用 之標準試料,使用聚乙烯氧化物(SRM1924) ; NIST。 [GPC測定條件] 管柱:TKKgel α -4000 ' a -2500( 0 7. 8mmx30cm); Tosoh股份公司製 溶劑:水系:甲醇=50 : 50(體積比)Then, by using a sulfuric acid-based copper electrolytic solution containing the above-mentioned polymer of the above-mentioned two-component or more, it is possible to stably manufacture the electrolytic copper crucible having a lower profile electric low profile surface. Set low 丄 < (10) The team's permanent compound, if the right molecular weight is too large, the manufacturing of the low-profile electrolytic copper foil and the raw At ^ smelting are low. In many cases, it is a body of 2 to 150, a body of & U θ 偁k, and a body of 4 to 14 is preferred. In the case of a single case and in the case of more than 150 parts of the body, there is no contribution to the low-round templeization of the surface of the electrolytic copper box, and the contour of the rim is different. Then, if it is used in a more extensive range, then the county - J has the most determined and no difference to achieve the electrolysis 2213-8439-PF; the surface of the Ahddub steel foil is low profiled. Further, from the viewpoint of the number average molecular weight, it is preferable that the polymer suitable for the upper part is in the range of the above.眶 Rate: The number average molecular weight is 300 or less. The existence ratio of the single body is as shown in the comparative example described later, and the low profile is difficult to change. However, the low profile of the electrolysis (4) relating to the present invention is not intended to mean that the turret is good when measured by a stylus type roughness meter. Rather, the gloss of the precipitated surface is significantly different compared to the low profile copper foil obtained by the electrolytic method of bismuth, and the flatness of the flat surface is also greatly improved:: after 'if _c polymer If the number average molecular weight exceeds, even if the concentration of other additives coexisting is adjusted, it cannot contribute to the formation of the temple, and the wheel 2 of the deposition surface of the obtained electrolysis (4) becomes large. In addition, even if the number average molecular weight is 1,000,000 or more, if it exceeds 7 "〇〇〇, for example, the concentration of the coexisting double (3_propyl) disulfide (hereinafter referred to as "sps") is not 100 ppm or more. Then, the difference in the profile of the deposited surface of the obtained electrolytic copper junction is remarkably large. Therefore, if the difference in conditions such as the liquid temperature and concentration during the electrolysis operation in the general management degree is considered, the number average molecular weight is 3 〇〇, and the polymer of the 〇〇 is better, and the average molecular weight is 600 to 2500. The DDAC polymer is better. However, even if a DDAC polymer is to be produced, there is an unavoidable residual amount of a single body. In this case, since the residual single-body DMC is a trace amount, it is not necessary to explicitly exclude it here. Further, the above number average molecular weight is determined by the following measurement method. Namely, the sample was dissolved in a solvent and measured by a colloidal color layer analyzer (GPC) under the conditions of 2213-8439-PF and Ahddub 13 1328623 shown below. The detector uses a multi-angle laser light scattered luminometer (MALS). Further, the value of "the second dimensional coefficient X concentration" is assumed to be Omol/g, and for the standard sample for calculating the inflection rate concentration change (dn/dc), polyethylene oxide (SRM1924); NIST is used. [GPC measurement conditions] Column: TKKgel α -4000 ' a -2500 ( 0 7. 8mm x 30cm); manufactured by Tosoh Co., Ltd. Solvent: water system: methanol = 50: 50 (volume ratio)

流速:0. 504mL/min 溫度:23°C ±2°CFlow rate: 0. 504mL/min Temperature: 23°C ±2°C

檢出器:MALS(DAWN-EOS 型);Wyatt Technology 波長:690nm 溫度:23°C ±2°C 更且,作為與本發明有關之電解銅箔之製造方法所使 用之硫酸系銅電解液中之4級銨鹽聚合體之DDAC聚合物之 濃度’係考慮與SPS或3-疏基-1-丙烧續酸(以下,稱為 「MPS」)之濃度的關係來決定。DDAC聚合物之濃度以 lppm〜150ppm 為佳,2ppm~100ppm 較佳,而以 3ppm〜80ppm 更佳。在此,DDAC聚合物之硫酸系銅電解液中之濃度未滿 1 ppm之情況中,即使無論如何提高SPS或MPS之濃度,電 解銅羯之析出面變粗,而變的難以得到低輪廓化之電解銅 箔。DDAC聚合物之硫酸系銅電解液中之濃度超過15 〇ρριη, 鋼析出狀態也變的不安定,而難以得到低輪廓電解銅箔。 然後,用於與本發明有關之電解銅笛之製造方法之硫 2213-8439-PF;Ahddub 14 1328623 酸系銅電解液,雜士—么 错由包含選擇SPS或是具有毓基之化合物 的MPS中選擇至少!猫、 乂 1種以上,而可更精度良好地得到低輪 廓電解銅落,其遺片w Λ 、 ^ υ· 5ppm〜2〇〇ppm 為佳,4ppm〜150ρρπι 較佳而以4pPm〜50ppm更佳。sps或mps的濃度若未滿 0. 5ppm之清況’電解銅箔之析出面變粗,變的難以得到低 輪靡電解銅箔。另—方而 ο ^ ’右SPS或MPS濃度超過200ppm, 所得到之電解銅结#山I L > I斤出面也無法提高平滑化的效果,反 而電析狀態不安定化。又,在本發明中所說SPS或MPS, 係表示也分別包含其鹽的意思’濃度記載值為作為鋼鹽之 3-巯基-1-丙烷磺酸鈉(以下,稱為「Mps_Na」)之換算值。 然後,MPS係藉由在硫酸系銅電解液中2量體化而成為sm 構造。因此’ SPS或是MPS的濃度,係'包含作為sps來添 加之物以及作為其他MPS之MPS單體或MPS-Na堂邮 _ .., 寻風類來添 加於電解液中之後多量體化成SPS等之變性私| &Detector: MALS (DAWN-EOS type); Wyatt Technology Wavelength: 690 nm Temperature: 23 ° C ± 2 ° C Further, as a sulfuric acid-based copper electrolyte used in the method for producing an electrolytic copper foil according to the present invention The concentration of the DDAC polymer of the fourth-order ammonium salt polymer is determined in consideration of the relationship between the concentration of SPS or 3-sulfo-1-propionic acid (hereinafter referred to as "MPS"). The concentration of the DDAC polymer is preferably from 1 ppm to 150 ppm, more preferably from 2 ppm to 100 ppm, more preferably from 3 ppm to 80 ppm. Here, in the case where the concentration of the DDAC polymer in the sulfuric acid-based copper electrolytic solution is less than 1 ppm, even if the concentration of SPS or MPS is increased anyway, the precipitation surface of the electrolytic copper crucible becomes thick, and it becomes difficult to obtain low profile. Electrolytic copper foil. When the concentration of the DDAC polymer in the sulfuric acid-based copper electrolytic solution exceeds 15 〇ρριη, the steel precipitation state is also unstable, and it is difficult to obtain a low-profile electrolytic copper foil. Then, the sulfur copper 2213-8439-PF used in the manufacturing method of the electrolytic copper flute relating to the present invention; the Ahddub 14 1328623 acid copper electrolytic solution, the miscellaneous-missing MPS containing the compound selected from SPS or having a mercapto group Choose at least! More than one type of cat and cockroach, and a low profile electrolytic copper drop can be obtained with higher precision, and the slabs w Λ , ^ υ · 5 ppm 〜 2 〇〇 ppm are preferable, and 4 ppm 〜 150 ρρπι is preferable, and 4 pPm 〜 50 ppm is preferable. . If the concentration of sps or mps is less than 0.5 ppm, the precipitation surface of the electrolytic copper foil becomes thick, and it becomes difficult to obtain a low rim electrolytic copper foil. On the other hand, ο ^ ’ right SPS or MPS concentration exceeds 200ppm, and the obtained electrolytic copper knot #山I L > I can not improve the smoothing effect, but the electrolysis state is not stable. In addition, in the present invention, SPS or MPS means that the salt is also contained in the meaning of the salt. The concentration is described as the sodium 3-mercapto-1-propanesulfonate (hereinafter referred to as "Mps_Na") as the steel salt. Conversion value. Then, the MPS is formed into an sm structure by being subjected to two-dimensionalization in a sulfuric acid-based copper electrolytic solution. Therefore, the concentration of 'SPS or MPS' is included as a substance added by sps and as an MPS monomer of other MPS or MPS-Natang_.., the wind-seeking type is added to the electrolyte and then mass-produced into SPS. Transgender private | &

瓦丨王物的濃度^ MPS 之構造式示於以下化2,SPS之構造式示於以γ '卜化3。從這 些構造式的比較,可知SPS構造體為MPS的9 θ 化2. 夏體。The concentration of the corrugated material ^ The structural formula of the MPS is shown in the following 2, and the structural formula of the SPS is shown in γ '3. From the comparison of these structural formulas, it is known that the SPS structure is the 9 θ of the MPS 2. The Xia body.

2213-8439-PF;Ahddub 15 1328623 化3.2213-8439-PF; Ahddub 15 1328623 3.

更且’前述硫酸系銅電解液中之傘增 .^ 平,農度,以5ppm〜120 之情 馬佳,而以lOppm〜50ppm更佳。此氯濃声〜 又右未滿5ppm 況’電解銅箔之析出面變粗而變的無法維持低於廊Further, the umbrella of the above-mentioned sulfuric acid-based copper electrolyte is increased, and the agricultural degree is 5 ppm to 120, and more preferably 10 ppm to 50 ppm. This chlorine thick sound ~ and the right is less than 5ppm. The precipitation surface of the electrolytic copper foil becomes thicker and cannot be maintained below the gallery.

方面,若氯濃度超過12 Oppm,則電解鋼笮 』治之析出面變粗 電析狀態無法穩定,變的無法形成低輪廓之析出面。 如上述,前述硫酸系銅電解液中之sps或仙5與ddac 聚合物與氣之成分平衡是最重要的,這些量的平衡若超出 上述範圍,則結果為電解銅箔之析出面變粗,變的無法維 持低輪靡。 又’在本發明所說之硫酸系銅電解液’想定銅濃度為 5〇g/l〜120g/l、自由硫酸濃度為6〇g/卜25〇g/1程度之溶 液。 然後’使用上述硫酸系銅電解液來製造電解銅箱之情 況時’以液溫2〇°C〜6(TC,電流密度15A/dm2〜90A/dm2來電 解為佳。液溫未滿2(TC之情況則析出速度低下,伸縮率及 拉伸強度等機械物性差異變大。另一方面,若液溫超過6〇 C則蒸發水分量增加,液濃度的變動變快,所得到之電解 銅4之析出面無法維持良好的平滑性。然後,液溫之更佳 範圍為40。(:〜55T:。又,電流密度若未滿之1 5A/dm2之情況 時銅的析出速度小工業生產性差。另一方面,若電流密度 2213-8439-PF;Ahddub 16 1328623 超過90A/dm2之情況,則所得 之電解銅治析出面的表面 粗度變大,無法維持低輪廊。 …、後,電流密度之更佳範圍 為 40A/dm 〜70A/dm2 。 <以與本發明有關之製造方法所得到之電解鋼馆〉 ,以與本發明有關之製造方法所得到之電解銅羯,其特 徵在於.該析出面側之表面粗 义、wjis)為以下之 :輪廓,且該析出面之光澤度(Gs(6〇。))為4〇〇以上。以嚴 密的意義來說,電解銅箔之杯_ + 白之析出面的表面粗度,為隨著電 解銅羯之厚度而變動之概念 '然而,根據與本發明有關之 電解銅羯之製造方法,所得到之電解銅落之表面粗度及光 澤度’在可作為電解銅箱來生產之45〇"厚以下之電解銅 ^全部的厚度之羯’該析出面側之表面粗度(Rzjis)為在 1. 0 β m以下之低輪廓,而且,該析出面之光澤度(Gs(6〇。)) 為滿足4 0 0以上之條件。 本發明所說之「電解銅箱」,由於為沒有進行任何表 面處理之狀態,所以有時也被稱為「未處理銅箔」、「析 離羯」等。在本說明書中,單純以「電解銅落」來稱呼。 此電解鋼箔之製造中,一般而言採用連續生產法、在滾輪 形狀之回轉陰極與沿著該回轉陰極的形狀而對向配置之鉍 系陽極或是尺寸安定性陽極(DSA)之間,留過硫酸銅系溶 液’利用電解反應來使銅在回轉陰極之滾輪表面析出。此 析出之鋼成為箔狀,藉由從回轉陰極連續剝離捲取,生產 電解銅箔。在此階段中,沒有進行任何防鏽處理等表面處 理’電析不久後之銅為活性化之狀態,為容易由於空氣中 2213^8439-PF;Ahddub 17 1328623 之氧而被氧化之狀態。 此剝離之電解銅羯之與回轉陰極接觸側之表面形狀, 具有複寫鏡面加工處理之回轉陰極表面之形狀之形狀,由 於為具有光澤之平滑表面,所以將此面稱為光澤面。相對 於此,析出側之表面形狀,-般而言由於所析出之銅之結 晶成長速度會由於不同結晶面而不同,結果成為顯示山形 之凹凸形狀之物,所以將此面稱為粗面或是析出面。通常, 此析出面為製作銅霜屏藉始ώ 户坰復層積板時之與絕緣層之張貼面。然 !,此析出面之表面粗度愈小’為愈優良之低輪廟電解銅 、泊。更且,在與本發明有關之電解銅羯中,此析出面的表 面粗度較-般使用電解滾輪來製造之銅羯之光澤面還平 滑,所以不使用粗面之用言吾,僅稱為「析出面」。 然後,在此電解㈣上,在表面處理製程」中,通常會 對於析出面施以粗化處理與防鏽處理。對於析出面之粗化 處理’係在硫酸銅溶液甲以所謂的燒電鑛條件來電解,使 微細銅粒析出附著於析出面上,再馬上施以藉由平滑電, 的條件來電解藉由被覆電鐘來防止微細鋼粒脫落之處置等又 處理。因此,使微細銅粒析出附著之析出面稱為「粗化處 理面」。接著,在表面處理製程中’在電解銅落之表面與 :面中’藉由辞、辞合金、絡系之電鐘等來進行防鐵處理: 進订捲取等之操作’而完成作為製品之電解銅落。 如此所付到之製品。一般稱為「表面處理箔」。 與本發/有關之電解㈣,具備其析出㈣之表面粗 度(⑴)未滿且光澤度[Gs(60。)]為4〇〇以上之 2213-84 39-PF;Ahddub 18 1328623On the other hand, if the chlorine concentration exceeds 12 Oppm, the precipitation surface of the electrolytic steel crucible is coarse and the electrolysis state cannot be stabilized, and the low-profile deposition surface cannot be formed. As described above, in the above-mentioned sulfuric acid-based copper electrolytic solution, the balance of sps or scent 5 and ddac polymer and gas is the most important. If the balance of these amounts exceeds the above range, the precipitation surface of the electrolytic copper foil becomes thick. It is impossible to maintain a low rim. Further, in the sulfuric acid-based copper electrolytic solution of the present invention, a solution having a copper concentration of 5 〇g/l to 120 g/l and a free sulfuric acid concentration of 6 〇g/b 25 〇g/1 is considered. Then, when using the above-mentioned sulfuric acid-based copper electrolyte to produce an electrolytic copper box, it is preferable to use a liquid temperature of 2 〇 ° C to 6 (TC, current density of 15 A/dm 2 to 90 A/dm 2 for electrolysis. The liquid temperature is less than 2 ( In the case of TC, the precipitation speed is low, and the difference in mechanical properties such as the expansion ratio and the tensile strength becomes large. On the other hand, if the liquid temperature exceeds 6 〇C, the amount of evaporated water increases, and the fluctuation of the liquid concentration becomes fast, and the obtained electrolytic copper is obtained. The precipitation surface of 4 cannot maintain good smoothness. Then, the liquid temperature is better in the range of 40. (: ~55T:. Moreover, if the current density is less than 15 A/dm2, the precipitation rate of copper is small. On the other hand, if the current density is 2213-8439-PF and the Ahddub 16 1328623 exceeds 90 A/dm2, the surface roughness of the obtained electrolytic copper treatment surface becomes large, and the low corridor cannot be maintained. More preferably, the current density is in the range of 40 A/dm to 70 A/dm 2 . <Electrolysis steel column obtained by the manufacturing method according to the present invention, the electrolytic copper crucible obtained by the manufacturing method according to the present invention, characterized The surface roughness of the deposition surface side, wjis) is as follows : contour, and the glossiness (Gs (6 〇.)) of the precipitation surface is 4 〇〇 or more. In a strict sense, the surface roughness of the cup of the electrolytic copper foil _ + white is as follows The concept of the thickness of the electrolytic copper crucible varies. However, according to the manufacturing method of the electrolytic copper crucible according to the present invention, the surface roughness and gloss of the obtained electrolytic copper drop are 45 可 which can be produced as an electrolytic copper box. "The thickness of the entire thickness of the electrolytic copper below the thickness 羯' The surface roughness (Rzjis) on the side of the precipitated surface is a low profile of 1. 0 β m or less, and the gloss of the precipitated surface (Gs (6〇) .)) In order to satisfy the conditions of 400 or more, the "electrolytic copper box" referred to in the present invention is sometimes referred to as "untreated copper foil" and "dissociated" because it does not have any surface treatment.羯", etc. In this specification, it is simply referred to as "electrolytic copper drop." In the manufacture of the electrolytic steel foil, a continuous production method, a rotary cathode in the shape of a roller, and a shape along the rotary cathode are generally used. Oppositely configured tantalum anode or dimensionally stable anode (DSA) Between the two, the copper sulfate-based solution was used to precipitate copper on the surface of the roller of the rotary cathode by electrolytic reaction. The precipitated steel was in the form of a foil, and the electrolytic copper foil was produced by continuous stripping from the rotary cathode. In the stage, there is no surface treatment such as rust-preventing treatment. The state of copper after activation is electrolyzed, and it is in a state of being easily oxidized by oxygen in the air of 2213^8439-PF; Ahddub 17 1328623. The surface shape of the contact side of the electrolytic copper crucible with the rotary cathode has the shape of the shape of the surface of the rotary cathode which is subjected to the mirror processing, and since it is a smooth surface having a gloss, this surface is referred to as a glossy surface. On the other hand, the surface shape of the precipitation side is generally different because the crystal growth rate of the precipitated copper differs depending on the crystal surface, and as a result, the surface of the mountain shape is displayed as a rough surface or It is the precipitation surface. Usually, the deposition surface is a laminate surface of the insulating layer when the copper frost screen is used. However, the smaller the surface roughness of this precipitation surface, the better the low-voltage temple electrolysis copper and mooring. Furthermore, in the electrolytic copper crucible according to the present invention, the surface roughness of the precipitation surface is smoother than that of the copper crucible which is generally produced by using an electrolytic roller, so that the use of the rough surface is not used. It is the "precipitation surface". Then, in the electrolysis (4), in the surface treatment process, the precipitation surface is usually subjected to roughening treatment and rust prevention treatment. The roughening treatment of the precipitation surface is performed by electrolyzing a copper sulfate solution in a so-called pyroelectric condition, depositing fine copper particles on the deposition surface, and immediately applying electrolysis by smoothing electricity. The electric clock is covered to prevent the disposal of fine steel particles from falling off and the like. Therefore, the deposition surface on which the fine copper particles are deposited and adhered is referred to as a "roughening surface". Then, in the surface treatment process, 'in the surface of the electrolytic copper falling surface: in the surface, the 'iron-proofing, alloying, electric clock, etc.' is used for the anti-iron treatment: the operation of ordering the winding, etc. The electrolytic copper falls. The product so paid for. Generally referred to as "surface treatment foil." Electrolysis (4) related to this issue/(4) has 2213-84 39-PF whose surface roughness ((1)) is not full and gloss [Gs(60.)] is 4〇〇 or more; Ahddub 18 1328623

特性。然後’更佳的是’表面粗度(㈤⑷未㈤〇 m, 且光澤度[Gs(6G。)]為6Q〇以上。首先,說明關於光澤度。 在此’ [Gs⑽。)]之光澤度係在電解㈣之表面以入射角 6(Γ來照射測定光,在反射角6〇。測定彈回光之強度。在此 所說之入射角’係以對於光之照射面垂直之方向為〇β。然 後’根據JIS Ζ 8741-1 997,記載著入射角之不同的5個 鏡面光澤度測定方法’應該根據試枓之光澤度來選擇最適 虽之入射角。其中’又以藉由以入射角為6〇β為可測定從 低光澤度之試料至高光澤度之試料之廣泛幅度。因此,與 本發明有關之電解銅箔等之光澤度測定主要採用6〇。。 一般而言,對於電解銅羯之析出面之平滑性之評價係 以表面粗度Rzjis為參數來使用。然而,僅以Rzjis則只 能得到高度方向之凹凸情報’而無法得到凹凸之周期或是 璇渦等情報。光澤度係反映了兩者之參數,所以藉由與 Rzjis並用,而可綜合表面粗度周期、璇滿、在他們之面 内之均一性等各種參數來判斷。 與本發明有關之電解銅笛之情況,析出面側之表面粗 度(Rzjis)滿足未滿1.0“,且該析出面之光澤度[Gs(6()。)] 為400以上之條件。亦即,在此範圍而可保證品質也可供 給於市場之電解銅绪,纟以往並不從在。然後,藉由使用 適當之後述方法,也可提供具備表面粗度(Rzjis)滿足未滿 0.6/zm’且該析出面之光澤度[Gs(6〇e)]為7〇〇以上之析出 面之電解銅^又’在此,光澤度之上限值雖沒有限定, 但從經驗來判斷[Gs(60。)]以8〇〇左右為上限。又,在本發 2213-8439-PF;Ahddub 19 16characteristic. Then 'better' is the surface roughness ((5)(4) not (five) 〇m, and the gloss [Gs(6G.)] is above 6Q〇. First, the gloss is explained. Here the gloss of '[Gs(10).)] The measurement light is irradiated on the surface of the electrolysis (4) at an incident angle of 6 (Γ, at a reflection angle of 6 〇. The intensity of the rebound light is measured. The incident angle here is a direction perpendicular to the illumination surface of the light 〇 β. Then, according to JIS 874 8741-1 997, the five specular gloss measurement methods describing the difference in incident angles should be selected according to the gloss of the test, and the angle of incidence should be selected. The angle of 6 〇 β is a wide range of samples which can be measured from a low gloss sample to a high gloss. Therefore, the glossiness of an electrolytic copper foil or the like according to the present invention is mainly measured by 6 Å. In general, for electrolysis The smoothness of the precipitation surface of the matte is evaluated by using the surface roughness Rzjis as a parameter. However, only Rzjis can obtain the information of the height direction and the information of the unevenness or the vortex. The degree reflects the parameters of the two Therefore, by using Rzjis in combination, it is possible to judge various parameters such as the surface roughness cycle, the fullness, and the uniformity in their faces. In the case of the electrolytic copper flute relating to the present invention, the surface roughness of the precipitated surface side. (Rzjis) satisfies less than 1.0", and the gloss of the precipitate (Gs(6().)) is 400 or more. That is, in this range, the quality can be supplied to the market.纟 纟 纟 纟 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后 然后The electrolytic copper of the deposition surface of 7 〇〇 or more is not limited here, but it is judged from experience that [Gs(60.)] is about 8 为 as the upper limit.本发2213-8439-PF;Ahddub 19 16

明中之光澤度,係估用g太φ A 宁便用曰本電色工業股份公 ㈣。型’根據光澤度之測定方法之JISZ 8741_ = 測定。 术 然後,關於在此所說之電解鋼落,並不進行厚度的限 定。這是由於,愈厚則該析出面之粗度愈小光澤度也上 升之較佳的傾向之故。若硬是要訂定上限,則以工業 電解銅fl也不會鼓本之程度t 45()“m之厚度以下之 銅箔為對象。 又,在此並沒有訂定析出面側之表面粗度(Rzjis)之下 限值。雖然根據測定器之感度而有所不同,但以經驗來看, 表面粗度之下限值4 程度。然而,在實際之測定 中,可見到差異,所以可保證之測定值之下限為〇 2ym 度。 士於如此之平滑的析出面,即使施以粗化處理或是防 鑛處理等表‘面處理,當然也可得料有較以往之低輪靡表 面處理銅箱還低輪廓之粗化處理面之表面處理銅落。然 後,若將此表面處理銅猪貼合於絕緣樹脂基材,則可得到 適度之物理的固定效果,由於接著界面之凹凸也變小所 以在該界面上之蝕刻液等藥液之滲入小,顯示良好之耐藥 品性。 ' 作為與本發明有關之電解銅箔之機械特性,在常態之 拉伸強度為33kgf/mm2以上,伸縮率為5%以上。然後,在 加熱後(18(TCx60分,大氣氣氛)伸張強度以在3〇kgf/mm2 以上,伸縮率為8%以上為佳。 20 2213*8439-PF;Ahddub 然後’在本發明中,藉由將製造條件最適化,使常態 之拉伸強度為38kgf/mm2以上,在加熱後(18(rCx6〇分,大 氣氣氛)伸張強度在33kgf/mm2以上,可具備更優良之機械 特丨生。因此,此良好之機械特性,不僅可以充分承受軟性 電路板之折彎使用,也適合構成受到膨脹收縮舉動之鋰二 -人電池等之負極之集電材用途。 </、本發明有關之表面處理銅箱〉The glossiness in the Ming Dynasty is estimated to be g φ A. The type 'measured according to the JISZ 8741_ = method for measuring the glossiness. Then, regarding the electrolytic steel falling here, the thickness is not limited. This is because, as the thickness is thicker, the smaller the thickness of the precipitated surface, the better the glossiness is also increased. If it is hard to set the upper limit, the industrial electrolytic copper fl will not be the extent of the copper foil of the thickness t 45 () "m". Further, the surface roughness of the precipitation side is not set here. The lower limit of (Rzjis). Although it varies according to the sensitivity of the measuring device, empirically, the lower limit of the surface roughness is about 4. However, in the actual measurement, the difference is seen, so it is guaranteed The lower limit of the measured value is 〇2ym. On such a smooth deposition surface, even if it is subjected to roughening treatment or anti-mine treatment, it is of course possible to obtain a lower rim surface treatment than before. The copper box is also treated with a copper surface on the surface of the roughened surface of the low profile. Then, if the surface treated copper pig is attached to the insulating resin substrate, a moderate physical fixing effect can be obtained, and the unevenness of the interface is also changed. When the chemical solution such as the etching solution on the interface is small, the chemical penetration of the chemical liquid is small, and the mechanical properties of the electrolytic copper foil according to the present invention are 33 kgf/mm 2 or more in the normal state. The rate is 5% or more. After heating (18 (TC x 60 minutes, atmospheric atmosphere) tensile strength is above 3〇kgf/mm2, and the expansion ratio is preferably 8% or more. 20 2213*8439-PF; Ahddub then 'in the present invention, by The production conditions are optimized so that the normal tensile strength is 38 kgf/mm 2 or more, and after heating (18 (rC x 6 ,, atmospheric atmosphere) tensile strength is 33 kgf/mm 2 or more, a more excellent mechanical characteristic can be obtained. This good mechanical property can not only fully withstand the bending of the flexible circuit board, but also is suitable for the use of the current collector of the negative electrode of a lithium-human battery or the like which is subjected to expansion and contraction behavior. </, the surface treatment of the present invention Copper box〉

與本發明有關之表面處理銅箔,係對於前述電解銅箔 之析出面進行粗化處理、防鏽處理、矽烷偶合劑處理之任 1種或2種以上者。亦即,在此所使用之電解銅箔為「該 斤出面之表面粗度(叫18)為1〇"m以下之低輪廓,且, :析出面之光澤度(Gs⑽。))為_以上」、「使用添加了 具有環狀構造之4級銨鹽聚合物所得到之硫酸系銅電解液 所得到之電解銅箱」。 狄在& &化處理係使附微細金屬/粒附著形成於電解銅The surface-treated copper foil according to the present invention is one or more selected from the group consisting of a roughening treatment, a rust-preventing treatment, and a decane coupling agent treatment on the deposition surface of the electrolytic copper foil. That is, the electrolytic copper foil used herein has a low profile of a surface roughness (referred to as 18) of 1 〇"m or less, and a glossiness (Gs(10).) of the deposition surface is _ The above-mentioned "electrolytic copper box obtained by using a sulfuric acid-based copper electrolytic solution obtained by adding a 4-stage ammonium salt polymer having a cyclic structure". Di && treatment system makes the attachment of fine metal/particles to electrolytic copper

/析出面上’或是以鞋刻法形成粗化表面之任一種方 、、在此作為將則者之微細金屬粒附著形成之方法,舉 例說明使銅微細粒附著形成於狀φ & 町者办成於析出面之方法。此粗化處理 製程’係以在電解銅·落之批ψ 屯听剠泊(析出面上使銅微細粒析出附著之 燒電鑛製程,與為防止此微+ 做:、,田銅粒脫洛之破覆電鑛製程來 在錯由電解法來使電解鋼落之析出面上析出附著微細 銅粒之製料,㈣燒電鍍之條件作為電解條件。因此、, 一般而言在使微細銅粒析出附著之製程中所使用之溶液組 21 2213-8439-PF;Ahddub 成’為使容易做出燒電鑛條件,為銅離子濃度低之設定。 :燒電錄條件’並沒有特別限定,而是考慮生產線的特質 -¾.。彳 歹’如,若是使用硫酸銅系容液,則可為濃度為銅 5 20g/l、硫酸5〇 2〇〇g/i、其他根據必要之添加劑(α _萘 西昆糊精、勝、硫腺等)、液溫b〜4(TC、電流密度10〜50A/dm2 之條件。 然後,Ά. 马防止微細銅粒之脫落的被覆電鍍製程,係為 防止析出附著之微細銅粒之脫落,而以平滑電鍍條件來使 如被覆微細鋼粒般使銅均—析出之製程。因此,在此製程 〇同於則述之塊體銅之形成槽所使用之同樣的溶液 作為銅離子之供給源來❹。此平滑電鍰條件,並沒有: 職定,而是考慮生產線的特質而訂定。例如,若使用硫 =系溶液,則可為濃度為銅5Q~8()g/卜硫酸.bo的、 液溫4〇〜5〇t:、電流密度l〇〜50A/dm2之條件。 接著,說明關於防鏽處理層之形成方法。 :中,使鋼覆層積板之製造過程及印刷配線板之製= 飯用不阻礙…防止電解銅箱層之表面氧化或是腐 ^㈣處理所使用之手法,㈣使用笨幷 oik 〇4t ^ . r 7T —里、 機防鏽,或是使用鋅、鍍鉻、辞合金等| _ —種都沒有問一電解㈣之使用目的;:: =劑、喷洛塗布、電鍵法等手法。—: 夷’可以適用藉由電解來使防鐘元素析出於電解銅落層之 之方法,或使用其他所謂置換析出法等。例如,在 22l3-8439-PF;Ahddub 22 〜辛防鏽處理之情况時,可使用焦磷酸鋅電鍍浴、氰化 辛電鍍/合、硫酸鋅電鍍浴等方法。例如,若為焦磷酸鋅電 又合則可為鋅濃度為5〜30g/l '焦磷酸鉀濃度為 5〇〇g/卜液溫 20〜50°C、pH9〜12、電流密度 〇. 3~l〇A/dm2 之條件。 j後矽烷偶合劑處理,係在粗化處理、防鏽處理等 束後實轭之使與絕緣層構成材之化學上之密著性提高之 處理。在此所說之用於矽烷偶合劑處理之矽烷偶合劑,並 不而要特別限疋’而考慮所使用m緣層構成材或是印刷 配線板製造卫程所使用之電鍵液等之性狀,而可從環氧系 夕烷偶合劑、⑯系矽烷偶合劑、巯系矽烷偶合劑等任意選 更具體而言,以與印刷配線板用之用於預浸之玻璃纖 維織布相同的偶合劑為中心來選擇為佳,例如可使用:二 乙稀三甲氧基钱、二乙烯苯基三甲氧基钱、r-曱基丙 乳稀丙基三甲氧基钱、厂環氧丙氧基丙基三曱氧基石夕 烧、4-¾氧丙基丁基二甲办 土』丞一甲虱基矽烷、r —胺丙基三乙氧基矽 烧、η (胺乙基)厂胺丙基三甲氧基石m3_(4魯 胺丙氧基)丁氧基)丙基_3_胺丙基三甲基钱、咪唾石夕燒、 二嗪矽烷、7*-巯丙基三甲氧基矽烷等。 然後,使用與本發明有關之電解銅落,在該表面上施 :上述所希望之表面處理之表面處理鋼落,具備其絕緣層 構成材料與貼合面之表面粗度(Rzjis)4 以下之低輪 廊之特徵。藉由具備如此之低輪靡之粗化處理面貼合於 23 2213-8439-PF;Ahddub 1328623 絕緣層構成材料時,可確保在實用上沒有妨礙之密著性。 •二後可得到作為基板,實用上沒有妨礙之耐熱特性 '耐 藥品性、剝離強度。 與本發明有關之銅覆層積板之形態··上述電解鋼箔, 係沒有施以粗化處理、防鏽處理等之物,將此電解鋼箔與 玻璃-環氧基材、玻璃-聚亞氨基基材等之丙階酚醛樹脂系 預浸材、聚亞氨基樹脂等薄膜等之代表軟性系基材之^種 絕緣層構成材料,藉由既定法以熱壓加工等來貼合而可得 到銅覆層積板。又,在製造軟性銅覆層積板時,也可以鑄 塑法來形成聚亞氨積樹脂基材層。 然而,為確保電解銅箔與絕緣層構成材料之密著性, 夕在該電解銅箔之接著面上,適當施以可使密著性提高之 粗化處理、防鏽處理、石夕烧偶合劑處理等,來使此面與絕 緣層構成材料貼合。此時之低輪廓接著面之選擇時,在與 本發明有關之電解銅羯之情況,由於析出面較光澤面還光 鲁 α ’所以選擇任一種面來作為貼合面皆可。 然後’在此所說之銅覆層積板,係包含所謂的剛性銅 覆層積板,COF捲帶等之軟性銅覆層積板等。然後,關於 其製造方法,在此明記可使用任一種已知之方法皆可。以 下’說明關於本發明之實施例。 【實施例] 電解銅络之製造:再此實施例中,為硫酸系銅電解液, 係調製銅濃度80g/l、自由硫酸濃度i4〇g/1、表i所記載 之SPS或是MPS的濃度、既定之數量平均分子量(3〇9、 2213-8439-PF;Ahddub 24 1328623 1120、2170、7250)之DDAC聚合物濃度、氣濃度之溶液。 又,數量平均分子量為309之DDAC聚合物,係意味著DDAC 之2量體而記載。又,SPS及MPS係以鈉鹽來添加。 表1 SPS或MPS之 濃度(ppm) 4級銨鹽聚合物 (DDAC聚合物) 氣 濃度(I)pn〇 MPS SPS 濃度(ppm) 數量平均分子量 實施例1、2 7 . — 5 309(2量體) 10 實施例3、4 1220 實施例5、6 2170 實施例7 — 120· 7250 實施例8 — 200 71 40 比較例1 7 · — 150 SPS 或 MPS 之 1度:3-魏基-1- -丙烧續酸之鈉鹽換算值 DMC聚合物:二烯丙基二甲基氯化銨聚合物_ 然後,對於使用陰極表面用#2000之研磨紙來進行研 磨表面粗度Ra調整至0. 2 y m之鈦板電極,陽極使用DSA, 液溫為50°C,在實施例卜實施例6以電流密度60A/dm2之 條件,在實施例7及實施例8以電流密度52A/dm2來電解。 如此,製造在實施例1、3、5、7、.8之12//m厚之電解銅 箔5種,然後,製造在實施例2、4、6之210 " m厚之電解 銅箔3種。得到共8種之電解銅箔。又,這些電解銅箔之 結晶構造,係在厚度方向全體實質上為隨機配向。 此電解銅箔之表面粗度及光澤度等之測定係如以下來 進行。析出面之評價結果如表2所示。又,前述之鈦板電 及之表面粗度(Ra為0. 20 // m),係評價所得到之電解銅箔 之光澤面而確認到之值。 · 表面粗度:使用小坂研究所(股份公司)製表面粗度計 25 2213-8439-PF;Ahddub 1328623 SE-3500,根據jiS b 〇6(Π-1 994來測定,將所得到之Rz 作為Rz j i s之值。 光澤度:使用曰本電色工業股份公司製光澤計VG-2Ο00 型’根據光澤度之測定方法之JIS ζ 8741-1 997來測定。 表2 電解銅箔 析出面粗度(um) 光澤度 拉伸強度 伸缩率 表面處理銅 試料 之厚度 Rzjis Ra Gs(60°) (kgf/mrn2) (%) 箔表面粗度 (jt/ra) Ave. S, D. Ave. S. D. Ave. S.D 常態 加熱後 常態 加熱後 Rzjis (/im) 實施例1 12 0.41 0.02 0.09 0.01 721 7.1 38.5 35.6 7.8 11.1 幺2 實施例2 210 0.48 0.03 0.11 0.01 715 7.2 一 — 幺2 霣施例3 12 ϋ. 53 0.01 0.15 0.01 710 7.5 37. 7| 33. 2 7.0| 9.5 <2 實施例4 210 0.68 0.03 0.17 0.02 677 6.3 . <2 實施例5 12 0.49 0.02 0.11 0.01 689 7.0 40.0 36.0 8.2 12.5 <2 貧施例6 210 U.61 0.04 0.16 0. 02 680 7.2 一 — <2 貫施例7 12 ϋ. 54 0.03 0.17 0.04 683 8.1 34.9 31.1 5.5 8.8 <2 夏她例8 12 ϋ. 50 0.04 0.19 0.05 686 12.5 34.3 30.6 R.2 8.2 <9 比較例1 12 1.01 0.05 0.24 0. 02 293 7.8 37.2 35.5 5.3 6.8 3 Z1U --- 1. Ιϋ Μ7 0.31 0. 03 233 8. 1 3 比較例2 12 ΟΙ η 0.85 0.16 0.18 F〇3 ~283 TT 36^ 32.4 To] 5.6 ώΐϋ U. Ιΰ 0. 11 0.14 0. 04 221 2.8 3 比較例3 12 0.83 0.12 "〇. 17 0.04 丽 Τβ" 3ΐΤ4ί 26.8 3.5l 5.8 210 1. 22 0.38 0.31 0.05 386 3.1 ...— 3 表2所5己載之析出面表面粗度之平均值及標準差,係 3 0點之測定值之平只1 θ @、、佐μ α 一 十均值及私準差。然後,關於光澤度也表 不30點之測定值之平均值及標準差。j,表面處理銅羯之 表面粗度’係表示粗化處理後之表面之30點之測定值之平 均值。 表面處理銅箔之製造:然 落之表面處理’使微細銅粒析 化處理面,施以防鏽處理。在 該電解銅箔之表面酸洗處理, 後’作為上述各種之電解銅 出附著於該析出面來形成粗 此粗化處理面之形成前,將 進行清淨化。此酸洗處理條 26 2213-8439-PF;AhddubAnd a method of forming a roughened surface by a shoe engraving method, and forming a fine metal particle to be adhered thereto, and exemplifying the adhesion of copper fine particles in the form of φ & The method of doing things in the face of precipitation. This roughening process is based on the electrolysis of copper, the batch of sputum, and the smashing of the copper slag (the precipitation of the copper fine particles deposited on the precipitation surface, and to prevent this micro+:, Luo's broken electric ore process is to make the deposition of fine copper particles by the electrolysis method on the precipitation surface of the electrolytic steel, and (4) the conditions of the electroplating are used as the electrolysis conditions. Therefore, in general, the fine copper is made. The solution group 21 2213-8439-PF used in the process of particle precipitation and attachment; Ahddub is set to be a setting for low concentration of copper ions in order to make it easy to make a burning condition. The condition for burning electricity is not particularly limited. Instead, consider the characteristics of the production line -3'. If you use copper sulphate, you can concentrate copper 5 20g / l, sulfuric acid 5 〇 2 〇〇 g / i, other additives according to the necessary α _ naphthylquinone dextrin, win, sulfur gland, etc.), liquid temperature b~4 (TC, current density 10~50A/dm2 conditions. Then, Ά. Horse prevents the peeling of fine copper particles from the plating process, In order to prevent the precipitation of the adhered fine copper particles, the coating is smoothed to make the coating The method of making a copper-to-precipitation as a fine steel grain. Therefore, the same solution used in the process of forming a groove of the bulk copper described above is used as a supply source of copper ions. There is no: the appointment, but the characteristics of the production line are set. For example, if the sulfur = system solution is used, the concentration can be copper 5Q~8()g/b sulfuric acid.bo, liquid temperature 4〇~5 〇t: The condition of the current density of 〇~50A/dm2. Next, the method of forming the rust-preventing layer will be described. In the manufacturing process of the steel-clad laminate and the manufacturing of the printed wiring board, the use of the printed wiring board is not hindered. ...to prevent the oxidation of the surface of the electrolytic copper box layer or the method used for the treatment of the rot (4), (4) use the clumsy oik 〇4t ^ . r 7T - rust, machine rust, or use zinc, chrome, alloy, etc. | - Do not ask for the purpose of electrolysis (4);:: = agent, spray coating, electric button method, etc. -: Yi can apply the method of electrolysis to prevent the anti-clock element from falling out of the electrolytic copper layer. Or use other so-called displacement precipitation methods, etc. For example, at 22l3-8439-PF; Ahddub 22 ~ Xin In the case of treatment, a zinc pyrophosphate plating bath, a cyanide octane plating/combination, a zinc sulfate plating bath, etc. may be used. For example, if the zinc pyrophosphate is combined, the zinc concentration may be 5 to 30 g/l 'focal The concentration of potassium phosphate is 5〇〇g/bu liquid temperature 20~50°C, pH 9~12, current density 〇. 3~l〇A/dm2. After j decane coupling agent treatment, it is roughened and treated. The rust treatment is used to improve the chemical adhesion between the yoke and the insulating layer. The decane coupling agent used for the treatment of the decane coupling agent is not particularly limited. It can be selected from the epoxy-based cyclane coupling agent, the 16-based decane coupling agent, the fluorene-based decane coupling agent, etc., in consideration of the properties of the m-edge layer constituent material or the printed wiring board used in the manufacture of the printed wiring board. More specifically, it is preferably selected from the same coupler as the glass fiber woven fabric for prepreg used for the printed wiring board, and for example, diethylenetrimethoxymethane or divinylphenyltrimethoxy can be used. Base money, r-mercaptopropyl propyl propyl trimethoxy money, plant glycidoxypropyl trioxane基石夕烧, 4-3⁄4 oxypropylbutyl dimethyl sulphate 丞 虱 虱 虱 矽 、 、 r r r r 、 、 、 、 、 r r r r 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺 胺(4-luamine propoxy)butoxy)propyl_3_aminopropyltrimethylhydrazine, imidazolium, diazinoxane, 7*-mercaptopropyltrimethoxydecane, and the like. Then, using the electrolytic copper drop according to the present invention, the surface treatment steel having the desired surface treatment described above is applied to the surface, and the surface roughness (Rzjis) of the insulating layer constituent material and the bonding surface is less than or equal to 4 The characteristics of the low wheel gallery. When the roughened surface having such a low rim is attached to the 23 2213-8439-PF; Ahddub 1328623 insulating layer constituting material, it is possible to ensure the practically unobstructed adhesion. • After the second, it is possible to obtain a heat-resistant property that is not impeded as a substrate, and it is resistant to chemicals and peeling strength. In the form of a copper-clad laminate according to the present invention, the electrolytic steel foil is not subjected to roughening treatment or rust-preventing treatment, and the electrolytic steel foil and the glass-epoxy base material and the glass-poly are laminated. A material for forming an insulating layer of a soft base material such as a film of a phenol-based phenol resin-based prepreg or a polyimide film such as an imino substrate, which can be bonded by hot pressing or the like by a predetermined method. A copper clad laminate was obtained. Further, in the case of producing a soft copper clad laminate, a polyurethane resin base material layer may be formed by a casting method. However, in order to ensure the adhesion between the electrodeposited copper foil and the insulating layer constituting material, a roughening treatment, a rustproofing treatment, and a shovel smear can be appropriately applied to the contiguous surface of the electrolytic copper foil. The mixture treatment or the like is used to bond the surface to the insulating layer constituent material. In the case of the selection of the low profile follower at this time, in the case of the electrolytic copper ruthenium according to the present invention, since the deposition surface is more glossy than the glossy surface, any one of the faces can be selected as the bonding surface. Then, the copper clad laminate as used herein includes a so-called rigid copper clad laminate, a soft copper clad laminate such as a COF tape, and the like. Then, as for the manufacturing method thereof, it is expressly possible to use any of the known methods. The following is a description of embodiments of the invention. [Examples] Production of Electrolytic Copper Complex: In this example, a sulfuric acid-based copper electrolytic solution was prepared by preparing a copper concentration of 80 g/l, a free sulfuric acid concentration of i4〇g/1, and an SPS or MPS described in Table i. A solution of DDAC polymer concentration and gas concentration at a concentration, a predetermined number average molecular weight (3〇9, 2213-8439-PF; Ahddub 24 1328623 1120, 2170, 7250). Further, the DDAC polymer having a number average molecular weight of 309 is described as a quantity of DDAC. Further, SPS and MPS are added as a sodium salt. Table 1 SPS or MPS concentration (ppm) Grade 4 ammonium salt polymer (DDAC polymer) Gas concentration (I) pn 〇 MPS SPS concentration (ppm) Number average molecular weight Example 1, 2 7 . — 5 309 (2 amount 10) Example 3, 4 1220 Example 5, 6 2170 Example 7 - 120· 7250 Example 8 - 200 71 40 Comparative Example 1 7 · 150 SPS or MPS 1 degree: 3-Weiyl-1- - Sodium citrate sodium salt conversion value DMC polymer: diallyl dimethyl ammonium chloride polymer _ Then, for the use of the cathode surface with #2000 of abrasive paper for the grinding surface roughness Ra is adjusted to 0. 2 ym of titanium plate electrode, anode using DSA, liquid temperature of 50 ° C, in the example of Example 6 at a current density of 60 A / dm 2 , in Example 7 and Example 8 at a current density of 52 A / dm2 . Thus, five kinds of electrolytic copper foils having a thickness of 12/m thick in Examples 1, 3, 5, 7, and 8 were produced, and then, 210 " m thick electrolytic copper foils of Examples 2, 4, and 6 were produced. 3 types. A total of 8 kinds of electrolytic copper foils were obtained. Further, the crystal structure of these electrolytic copper foils is substantially randomly aligned in the entire thickness direction. The measurement of the surface roughness and gloss of the electrodeposited copper foil was carried out as follows. The evaluation results of the precipitation surface are shown in Table 2. Further, the surface of the titanium plate and the surface roughness (Ra of 0.20 // m) were evaluated by evaluating the shiny side of the obtained electrolytic copper foil. · Surface roughness: Surface roughness meter 25 2213-8439-PF, Ahddub 1328623 SE-3500, manufactured by Otaru Research Institute Co., Ltd., measured according to jiS b 〇6 (Π-1 994, the obtained Rz is taken as The value of Rz jis. Gloss: It is measured by JIS ζ 8741-1 997, which is based on the method for measuring glossiness, using the gloss meter VG-2Ο00 type manufactured by 电本电色工业股份有限公司. Table 2 Thickness of the surface of the electrolytic copper foil ( Um) Gloss Tensile Strength Scaling Surface Treatment Thickness of Copper Sample Rzjis Ra Gs (60°) (kgf/mrn2) (%) Foil Surface Thickness (jt/ra) Ave. S, D. Ave. SD Ave. Rzjis (/im) after normal heating of SD after normal heating Example 1 12 0.41 0.02 0.09 0.01 721 7.1 38.5 35.6 7.8 11.1 幺2 Example 2 210 0.48 0.03 0.11 0.01 715 7.2 I—幺2 霣Example 3 12 ϋ. 53 0.01 0.15 0.01 710 7.5 37. 7| 33. 2 7.0| 9.5 < 2 Example 4 210 0.68 0.03 0.17 0.02 677 6.3 . < 2 Example 5 12 0.49 0.02 0.11 0.01 689 7.0 40.0 36.0 8.2 12.5 < 2 Poor Example 6 210 U.61 0.04 0.16 0. 02 680 7.2 I - <2 Example 7 12 ϋ. 54 0.03 0.17 0.04 683 8. 1 34.9 31.1 5.5 8.8 <2 Summer Her Case 8 12 ϋ. 50 0.04 0.19 0.05 686 12.5 34.3 30.6 R.2 8.2 <9 Comparative Example 1 12 1.01 0.05 0.24 0. 02 293 7.8 37.2 35.5 5.3 6.8 3 Z1U -- - 1. Ιϋ Μ7 0.31 0. 03 233 8. 1 3 Comparative Example 2 12 ΟΙ η 0.85 0.16 0.18 F〇3 ~283 TT 36^ 32.4 To] 5.6 ώΐϋ U. Ιΰ 0. 11 0.14 0. 04 221 2.8 3 Compare Example 3 12 0.83 0.12 "〇. 17 0.04 丽Τβ" 3ΐΤ4ί 26.8 3.5l 5.8 210 1. 22 0.38 0.31 0.05 386 3.1 ...- 3 Table 2 The average value and standard of the surface roughness of the deposited surface Poor, the measured value of the 30 points is only 1 θ @, 佐 α α 十 mean and private standard deviation. Then, the gloss and the average value and standard deviation of the measured values of 30 points are also shown. j, the surface roughness of the surface-treated copper matte' indicates the average value of the measured values of 30 points on the surface after the roughening treatment. Production of surface-treated copper foil: surface treatment of the subsequent treatment of the fine copper particles, and rust-preventing treatment. The surface of the electrodeposited copper foil is pickled, and then cleaned before the formation of the roughened surface as the above-mentioned various kinds of electrolytic copper adhered to the deposition surface. This pickling strip 26 2213-8439-PF; Ahddub

L 件,為使用濃度100g/卜液溫3(rc之稀硫酸溶液,浸潰時 間為3 0秒。 酸洗處理結束後’作為在電解銅箔之析出面形成微細 寿立 , ^ 她以為在析出面上使微細銅粒析出附著之燒 ' 及為防止此微細銅粒之脫落之被覆電鍍製程。 在則者之為使微細銅粒析出附著之燒電鍍製程中,使用銅 農又為15/g、自由硫酸濃度為14〇g/i之硫酸銅系溶液, 將電解銅4作為陰極,陽極使用DsA,以液溫25、電流 逾度25A/dm2之條件,電解5秒鐘。 然後,作為在析出面上附著形成微細銅粒後,為微細 銅粒之脫落之被覆電鑛,而以平滑電鐘條件來使如被覆微 、田銅粒I使銅均-析出。此時之電解條件為平滑電鍵條 件使用銅濃度為70g/1、自由硫酸濃度為之硫酸 銅溶液,以電解銅落為陰極,陽極使用DSA,以液溫45。〇、 電仙·达度25A/dm2之條件,電解1〇秒鐘。 • i述之粗化處理製程結束後,接著在該銅落之兩面施 以防鏽處理,在此係採用以下所述條件之無機防鐘。使用 硫酸濃度為7〇g/卜鋅濃度為2〇g/1之硫酸辞浴以電解 銅羯為陰極’陽極使用鋅板,以液溫4(TC、電流密度 15A/dm2’電解5秒鐘,施以鋅防鏽處理。 更且,在本實施例之情況,在前述辞防鐵層上,以電 解來形成鐘絡層。此時之電解條件為,使用絡酸5〇g/i、 pHl 1_ 5之冷液,以電解銅箔為陰極,陽極使用別$,以液 溫35 C、電流密度8A/dm2,電解5秒鐘。 2213-8439-PF;Ahddub 27 1328623 以上之防鏽處理結束後,水洗,立即在矽烷偶合劑處 理槽中’在粗化處理面之防鏽處理層上進行矽烷偶合劑之 吸著。此時所使用之溶液組成,係以離子交換水作為溶劑, 使γ -環氧丙氧基丙基三甲氧基矽烷成為5g/1之濃度來添 加。然後’藉由將此溶液以喷浴吹附來吸著處理。 矽烷偶合劑處理結束後,藉由電熱器使箔溫度成為1 4〇 。(:,以4秒鐘通過調整加熱了氣氛溫度之爐内,使水分汽 化,促進矽烷偶合劑之縮合反應,最終得到厚度丨2以m之 笛5種與厚度為21〇#m之表面處理銅箔3種。此表面處理 後之粗化處理面之表面粗度,係分為12ym厚之箔與21〇 μ m箔來併記於表2。 [比較例1 ] 在此比較例中,除了使用單量體之DDAC來取代實施例 中所用之銅電解液中之DDAC聚合體的點不同以外,其餘使 用同於實施例1〜6之條件來得到電解銅箔。此電解銅箔之 φ 析出面之表面粗度及光澤度等之測定結果係與實施例一起 示於表2。之後,同於實施例丨得到表面處理銅箔,該粗 化處理面之表面粗度與實施例一起示於表2。 [比較例2 ] 本比較例,係專利文獻1所開示之實施例1之追蹤實 驗。將硫酸銅(試藥)與硫酸(試藥)溶解於純水,調製硫酸 銅(5水合物換算)280g/l、自由硫酸濃度9〇g/1之水溶液。 在此’添加二烯丙基二烧基敍鹽與二氧化硫之共聚物(曰東 纺績股份公司製’商品名PAS-A-5,重量平均分子量4〇〇〇: 28 2213-8439-PF;Ahddub 1328623 4ppm)與聚乙二醇(平均分子量1〇〇〇 : ι〇卯心,與 MPS(lppm),更使用氣化鈉將氣濃度調整為2〇ppm,調製硫 酸酸性銅電鍍液。 然後’對於陰極使用表面用#2000之研磨紙來進行研 磨之表面粗度Ra調整至〇 . 2〇 &quot; m之鈦板電極,陽極使用鉛 板’將上述之電解液以液溫4〇〇c,電流密度5〇A/dm2來進 行電解,而得到12 # m厚及210 y m厚之電解銅箔。此電解 銅箱之析出面之表面粗度及光澤度等之測定結果與實施例 鲁一起示於表2。 之後’將此電解銅箔同於實施例1來處理而得到表面 處理銅猪。該粗化處理面之表面粗度與實施例一起示於表 2 ° [比較例3 ] 調製銅濃度90g/l ’自由硫酸濃度ii〇g/i之硫酸系銅 電解液,通過活性炭過濾器來清淨處理。接著,在此電解 φ 液中,使氣濃度能成為30ppm ,而分別添加MPS-Na(lppm)、 作為咼分子多醣類之經乙基纖維素(5ppm)及低分子量膠 (數量平均分子量1560: 4ppm)來調製電解液。使用此電解 液。對於陰極使用表面用#2000之研磨紙來進行研磨之表 面粗度Ra調整至〇. 2以m之鈦板電極,陽極使用DSA,以 液溫58°C,電流密度50A/dm2來進行電解,而得到12/ζηι 厚及210#m厚之電解銅箔。此電解銅箔之析出面之表面粗 度及光澤度等之測定結果與實施例一起示於表2。 之後’將此電解銅箔同於實施例1來處理而得到表面 2213-8439-PF;Ahddub 29 1328623 處理銅箔。該粗化處理面之表面粗度與實施例一起示於表 1。 &lt;實施例1、3、5與實施例7、8之.對比〉 在此,比較使用具有酼基化合物之MPS之情況與使用 SPS之情況。從表2可明顯可知’所得到之電解銅箔之析 出面表面粗度、光澤度、拉伸強度之常態及加熱後,伸縮 率之常態及加熱後,以及表面處理銅箔之表面粗度也幾乎 同等。因此,調製銅電解液所使用之sps或Mps,即使添 加MPS單體或MPS-Na等鹽類之其他SPS,也可確認到可得 到同等效果。 〈實施例與比較例之對比〉 析出面之表面粗度:以Ra來對比表面粗度之情況中, 在實施例卜實施例8所得到之與本發明有關之電解銅落之 析出面,與在比較例1〜比較例3所得到之電解銅箔之析出 面的差,平均值及標準差都不大。然而,若以Rzjis來對 比表面粗度,則相較於比較例所得到之電解銅箱實施例 所得到之電解銅笛,從平均值之比較來看,具有更低輪廓 之二出面。然、後’從比較例!與實施例之比較來看,職 之單里II,右相杈於DDAC聚合體,則很明顯的平滑化效果 差°又’從標準差(及㈣係數)之比較,實施例所得到之 電解銅fl析“,顯示差異少之安定的 -性優良。然後,此與落之厚度無關而有同樣的:向表” 亦即,若僅以使用觸針式的粗度計來測定之析出面的 輪廊(RZjiS)來判斷’則比較例卜比較例3所得到之電解 2213-8439-PF;Ahddub 30 1328623 銅羯也在電解銅箱良好之低輪廓電解銅箔之範圍内,但與 實施例1〜實施例8有關之電解銅箔,更達成均一且優良2 輪廓。又,從比較W 2與實施例之對比來看,即使為^鹽 之聚合物,主鏈為僅以炭及氫所構成之DDAC聚合體,可達 成均一且優良之低輪廓。For the L piece, the concentration is 100g/bu liquid temperature 3 (diluted sulfuric acid solution of rc, the dipping time is 30 seconds. After the pickling process is finished, 'as a fine standing on the deposition surface of the electrolytic copper foil, ^ she thinks that The coating process for depositing fine copper particles on the deposition surface and the coating plating process for preventing the fine copper particles from falling off. In the case of the electroplating process in which fine copper particles are deposited and adhered, the use of copper farmers is 15/ g. A copper sulfate-based solution having a free sulfuric acid concentration of 14 〇g/i, using electrolytic copper 4 as a cathode, and an anode using DsA, and electrolyzing for 5 seconds under the conditions of a liquid temperature of 25 and a current exceeding degree of 25 A/dm 2 . After the fine copper particles are deposited on the deposition surface, the fine copper particles are detached from the coated electric ore, and the copper is uniformly precipitated by coating the micro and copper particles I under a smooth electric clock condition. For the smoothing of the key conditions, a copper sulfate solution having a copper concentration of 70 g/1 and a free sulfuric acid concentration is used, and the electrolytic copper is used as a cathode, and the anode is used as a liquid, and the liquid temperature is 45. The conditions of the liquid temperature are 45. 〇, electric sensation, degree 25A/dm2, electrolysis 1 〇 second. • After the end of the roughening process, An anti-rust treatment is applied to both sides of the copper drop, and an inorganic anti-clock is used here. The sulfuric acid has a sulfuric acid concentration of 7〇g/b zinc concentration of 2〇g/1 to electrolyze the copper crucible. A zinc plate was used for the cathode 'anode, and electrolysis was performed at a liquid temperature of 4 (TC, current density of 15 A/dm 2 ' for 5 seconds, and zinc rust treatment was applied. Further, in the case of the present embodiment, on the aforementioned iron layer The electrolysis is used to form the bell layer. The electrolysis conditions at this time are: using a cold solution of 5 〇g/i of complex acid and pH 1-5, using the electrolytic copper foil as the cathode, and using the anode for another $, at a liquid temperature of 35 C. Current density 8A/dm2, electrolysis for 5 seconds. 2213-8439-PF; Ahddub 27 1328623 After the above rust-preventing treatment is completed, it is washed with water and immediately in the decane coupling agent treatment tank 'on the rust-preventing treatment layer of the roughened surface The decane coupling agent is sorbed. The composition of the solution used at this time is added by using ion-exchanged water as a solvent, and γ-glycidoxypropyltrimethoxy decane is added at a concentration of 5 g/1. The solution is sorbed by blowing it in a spray bath. After the treatment of the decane coupling agent, it is made by an electric heater. The foil temperature is 14 〇. (:, in 4 seconds, the furnace is heated to adjust the temperature of the atmosphere to vaporize the water to promote the condensation reaction of the decane coupling agent, and finally obtain a thickness of 丨2 in m of 5 and a thickness of There are three kinds of surface-treated copper foils of 21〇#m. The surface roughness of the roughened surface after this surface treatment is divided into 12ym thick foil and 21〇μm foil and is shown in Table 2. [Comparative Example 1] In this comparative example, an electrolytic copper foil was obtained using the same conditions as in Examples 1 to 6 except that a single-draw DDAC was used instead of the DDAC polymer in the copper electrolytic solution used in the examples. The measurement results of the surface roughness and gloss of the φ precipitation surface of the electrolytic copper foil are shown in Table 2 together with the examples. Thereafter, a surface-treated copper foil was obtained in the same manner as in the example, and the surface roughness of the roughened surface was shown in Table 2 together with the examples. [Comparative Example 2] This comparative example is a tracking experiment of Example 1 shown in Patent Document 1. Copper sulfate (test drug) and sulfuric acid (test drug) were dissolved in pure water to prepare an aqueous solution of copper sulfate (5 hydrate conversion) of 280 g/l and free sulfuric acid concentration of 9 〇g/1. Here, 'addition of a copolymer of diallyl dialkyl sulphate and sulphur dioxide (manufactured by Mindong Textile Co., Ltd.) under the trade name PAS-A-5, weight average molecular weight 4 〇〇〇: 28 2213-8439-PF; Ahddub 1328623 4ppm) and polyethylene glycol (average molecular weight 1〇〇〇: ι〇卯心, with MPS (lppm), use gasification sodium to adjust the gas concentration to 2〇ppm, prepare sulfuric acid acid copper plating solution. Then 'The surface roughness Ra of the surface of the cathode using the #2000 abrasive paper is adjusted to 〇. 2〇&quot; m of the titanium plate electrode, the anode uses the lead plate 'the above electrolyte is the liquid temperature 4 〇〇 c The current density is 5 〇A/dm2 for electrolysis, and an electrolytic copper foil having a thickness of 12 #m and a thickness of 210 ym is obtained. The measurement results of the surface roughness and gloss of the precipitation surface of the electrolytic copper box are together with the example The results are shown in Table 2. Thereafter, the electrolytic copper foil was treated in the same manner as in Example 1 to obtain a surface-treated copper pig. The surface roughness of the roughened surface was shown in Table 2 with the example [Comparative Example 3] Copper concentration 90g / l 'free sulfuric acid concentration ii 〇 g / i of sulfuric acid copper electrolyte, through activated carbon The filter was cleaned, and then, in the electrolytic φ liquid, the gas concentration was 30 ppm, and MPS-Na (1 ppm), ethyl cellulose (5 ppm) as a ruthenium molecular polysaccharide, and low molecular weight were added. Glue (quantitative average molecular weight: 1560: 4 ppm) to prepare an electrolyte. This electrolyte was used. For the cathode, the surface roughness Ra of the surface was polished with #2000 of abrasive paper to 〇. 2 m of titanium plate electrode, anode Electrolysis was carried out using a DSA at a liquid temperature of 58 ° C and a current density of 50 A/dm 2 to obtain an electrolytic copper foil having a thickness of 12/ζηι and a thickness of 210 °m. The surface roughness and gloss of the precipitated surface of the electrolytic copper foil were The measurement results are shown in Table 2 together with the examples. Then, this electrolytic copper foil was treated in the same manner as in Example 1 to obtain a surface 2213-8439-PF; Ahddub 29 1328623 treated copper foil. The roughened surface was rough. The degree is shown in Table 1 together with the examples. <Examples 1, 3, 5 and Examples 7 and 8. Comparison> Here, the case of using MPS having a mercapto compound and the case of using SPS are compared. 2 It can be clearly seen that the surface roughness of the deposited surface of the obtained electrolytic copper foil After the normal state of gloss, tensile strength, and heating, the normal state of the expansion ratio and the surface roughness of the surface-treated copper foil are almost the same. Therefore, the sps or Mps used for preparing the copper electrolyte is added even if MPS is added. It is also confirmed that other SPSs such as a monomer or an MPS-Na salt can obtain the same effect. <Comparison of Examples and Comparative Examples> Surface roughness of the precipitation surface: In the case of comparing the surface roughness with Ra, EXAMPLES The difference between the precipitation surface of the electrolytic copper drop obtained in Example 8 and the deposition surface of the electrolytic copper foil obtained in Comparative Example 1 to Comparative Example 3 was small, and the average value and standard deviation were not large. . However, if Rzjis is used to compare the surface roughness, the electrolytic copper flute obtained in the electrolytic copper box example obtained in the comparative example has a lower profile of the two sides as compared with the average value. However, after the 'from the comparative example! Compared with the examples, the single-phase II, right-hand side of the DDAC polymer, the obvious smoothing effect is poor, and the comparison from the standard deviation (and (four) coefficient), the electrolysis obtained in the example The copper fl is "expressed, and it shows that the difference is small and the stability is excellent. Then, this is the same as the thickness of the falling layer: the same direction: the table", that is, the precipitation surface measured only by the stylus type roughness meter The wheel corridor (RZjiS) to judge 'the comparative example of the electrolytic method 2213-8439-PF obtained in Comparative Example 3; Ahddub 30 1328623 copper enamel is also in the range of the low-profile electrolytic copper foil of the electrolytic copper box, but with the implementation The electrolytic copper foils of Examples 1 to 8 achieved a uniform and excellent 2 profile. Further, from the comparison of W 2 and the examples, even if the polymer is a salt, the main chain is a DDAC polymer composed only of carbon and hydrogen, and a uniform and excellent low profile can be obtained.

然後,即使以表面處理銅箱來比較,電解銅馆之表面 粗度(Rzjis)之對比也可得到同樣的結果。亦即,相對於使 用以比較例所得狀電解銅羯Μ面處軸^粗化處理 面的表面粗度(Rzjis)顯示3//ra程度,使用以實施例卜實 施例8所得到之電解銅羯之表面處理銅羯之粗化處理面, 表面粗度(Rzjis)皆在2“以下,可得到更優良之低輪磨 之物。 光澤度:相對於比較例所得到之電解銅箔之各光澤度 之平均值,實施例1〜實施例8所得到之電解銅笛之光澤度 為相當高之值,顯示完全不同之範圍。由此來看,相較於 比較例卜比較例3所得到之各電解銅绪,實施例卜實施例 8所得到之各電解銅羯更接近於平坦之鏡面,可說是具備 均一的析出面。 拉伸強度及伸縮率:將使用較佳製造條件所得到之實 施例的各電解銅箔,與比較例所得到之電解銅箔相比,拉 伸強度在常態及加熱後皆與比較例及比較例2所得到之電 解銅箱差不多U,比較W 3所得到之電解㈣,關於 拉伸強度有明確的差異,具有在常態之拉伸強度小,由於 加熱而低下之特徵。然後,關於拉伸強度,在與各比較例 2213-84 39-PF;Ahddub 31 1328623 之對比,具有優良之特性。特 差異變的龜基_ 藉由對比加熱後,其 、 者。因此,與本發明有關 合用於桩成盘® 句關又電解銅箔,可很適 D用於接跫熱履歷之用途。 【產業上之利用可能性】 使用與本發明有關之製造電 電解㈣,可效率良好地供給相較二:=製造 蚣廒番姑加妒 体供、给於市場之低 銅、泊,品質更安定之低輪靡電解銅落。而且 所㈣之電解㈣,具備遠較以往供給^ 低輪廓電解㈣還平坦之表面。因 之 志;^於該析出面施以 表面處理’即使在施以粗化處理之情況 i± W ^ -tr J令易付到以 彺從未有之荨級的低輪廓表面處理銅箱。因t卜、*人^ ^ ϋ,. ώ ., Α 因此’適合作為 帶狀自動化黏合構裝(TAB)基板或是揲| 其埜 疋捲帶式薄膜覆晶(COF) 土板專之微細間距回路之形成用途。又,盥 電解鋼箔,其析出面之表面粗度為 之 下,兩面皆為有光澤之平滑面。而且=之於表面粗度以 Λ 相%c於以往之低銓 廓電解鋼羯,由於兼具優良之拉伸 _ 、*人AU Α 又z、評縮率’所以也 適合作為構成鋰二次電池之負極之集 ^ 、屯何t使用。 【圖式簡單說明】 無0 【主要元件符號說明】 叙0 2213-8439-PF;Ahddub 32Then, even if compared with a surface treated copper box, the same result can be obtained by comparing the surface roughness (Rzjis) of the electrolytic copper pavilion. That is, the electrolytic copper obtained in Example 8 was used with respect to the surface roughness (Rzjis) of the surface of the electrolytically roughened copper surface obtained by the comparative example. The surface of the crucible is treated with a roughened surface of the crucible, and the surface roughness (Rzjis) is 2" or less, and a more excellent low-rotation material can be obtained. Gloss: Each of the electrolytic copper foils obtained in comparison with the comparative examples The average glossiness, the gloss of the electrolytic copper flute obtained in Examples 1 to 8 was a relatively high value, showing a completely different range. From this point of view, compared with Comparative Example 3 Each of the electrolytic copper crucibles obtained in Example 8 is closer to a flat mirror surface, and can be said to have a uniform deposition surface. Tensile strength and expansion ratio: obtained by using preferred manufacturing conditions In each of the electrolytic copper foils of the examples, the tensile strength was almost the same as that of the electrolytic copper cases obtained in Comparative Example and Comparative Example 2, compared with the electrolytic copper foil obtained in the comparative example, and compared with W 3 The electrolysis obtained (IV), regarding the tensile strength The difference is that it has a characteristic that the tensile strength in the normal state is small and is lowered due to heating. Then, regarding the tensile strength, it has excellent characteristics in comparison with each of Comparative Examples 2231-84 39-PF; Ahddub 31 1328623. Turtle base with special difference _ by contrast heating, it is used. Therefore, it is suitable for the use of the invention in the form of a pile into a plate and an electrolytic copper foil, which can be suitably used for the purpose of the heat history. Industrial Applicability] The use of the electro-electrolysis (4) related to the present invention can be efficiently supplied to the second: = manufacturing 蚣廒 姑 姑 妒 妒 、 、 、 、 、 、 、 、 、 给 给 给 给 给 给 给The low rim is electrolyzed by copper, and the electrolysis (4) of (4) has a surface that is farther than the previous supply of low profile electrolysis (4). The reason is that the surface is treated on the precipitation surface, even if roughening is applied. The case of processing i± W ^ -tr J makes it easy to pay for the low-profile surface treatment copper box that has never been graded. Because of t, *人^^ ϋ,. ώ ., Α Therefore 'suitable as a belt Automated Adhesive (TAB) substrate or 揲 | The film-coated (COF) earth plate is specially formed for the fine pitch circuit. Further, the tantalum-electrolytic steel foil has a surface roughness of the surface of the precipitate, and both surfaces are glossy smooth surfaces. It is also suitable for use as a negative electrode of a lithium secondary battery because it has excellent tensile strength _, *human AU Α and z, and the evaluation rate is the same as the conventional low-profile electrolytic steel crucible. , why use t. [Simple description of the diagram] No 0 [Description of main components] Description 0 2213-8439-PF; Ahddub 32

Claims (1)

i;52^b25 &quot; 第9514〇188號申請專利範圍修正本 ·. 十、申請專利範圍: 修正日期:99.5.4 獅&lt;月令修正替觀 1. 一種電解銅箔之製造方法, 电解包含具有環妝! 之4級銨鹽聚合物盥氣之护缺傅^ 咏 風之硫酸糸銅電解液來得到電解銅 '/§ * 其特徵在於: 中所含有之4級銨鹽聚合 烯丙基二甲基氣化銨聚合物 物 之i;52^b25 &quot; No. 9514〇188 Application for revision of patent scope. X. Patent application scope: Revision date: 99.5.4 Lions &lt;Monthly amendments 1. A method for manufacturing electrolytic copper foil, electrolysis Contains a ring makeup! The 4th grade ammonium salt polymer 盥 之 傅 Fu Fu ^ 咏 之 糸 糸 糸 糸 得到 得到 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' Ammonium phosphate polymer 在前述硫酸系銅電解液 中’係使用2量體以上之二 電解銅箔之製造方法, 其中,前述硫酸系銅電解液中之4級敍鹽聚合物濃度 為1卿〜15。卿1述硫酸銅系電解液中之氣濃度為 5ppm〜120ΡΡΙΠ,及前述硫酸系銅電解液包含選自雙(3—磺丙 基)二硫化物及具有㈣之化合物之3_聽_卜丙烧續酸之 1種以上,其濃度為0.5ppm〜200ppm。 2.如申請專利範圍帛丄項之電解銅箔之製造方法,其 中’刖述硫酸系銅電解液所包含之4級銨鹽聚合物,為數In the above-described sulfuric acid-based copper electrolytic solution, a method for producing a two-electrolytic copper foil having a volume of two or more is used, wherein the concentration of the fourth-order salt-salt polymer in the sulfuric acid-based copper electrolytic solution is from 1 to 15. The gas concentration in the copper sulfate-based electrolyte is 5 ppm to 120 Å, and the sulfuric acid-based copper electrolyte contains a compound selected from the group consisting of bis(3-sulfopropyl)disulfide and the compound having (4) One or more types of acid are burned, and the concentration thereof is from 0.5 ppm to 200 ppm. 2. The method for producing an electrolytic copper foil according to the scope of the patent application, wherein the fourth-order ammonium salt polymer contained in the sulfuric acid-based copper electrolyte is recited 3:平均分子量30(M〇〇〇0之二烯丙基二甲基氣化銨聚合 物。 3. 如申請專利範圍第丨項之電解銅箔之製造方法,其 中’將則述硫酸系銅電解液,在液溫2〇。〇 ~6〇。〇,電流密 度15A/dm2〜90A/dm2來電解。 4. 一種電解銅箔’藉由申請專利範圍第1項之製造方 法所獲致, 其特徵在於: 該析出面側之表面粗度(Rz j i s)為1. 〇 // m以下之低輪 33 2213-8439-PF;Ahddub 廓,且該析出而 月}日修正 析出面之先澤度(Gs⑽。))為4^_ 種鋼覆層積极,其特徵在於•·使 項之電解銅箔所獲致。 。月專利第4 6.種表面處理銅箔, 第4項右· 〃特徵在於··在申請專利範圍 理、有機:二&quot;析出面上進行粗化處理、防鏽處 7=貌偶合劑處理之任1種或是2種以上之處理。3: a method for producing an electrolytic copper foil having an average molecular weight of 30 (M 〇〇〇 0). 3. The method for producing an electrolytic copper foil according to the above application, wherein 'the sulfuric acid copper will be described The electrolyte is obtained at a liquid temperature of 2 〇 〇 〇 〇 〇 〇 电流 电流 电流 电流 电流 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. 4. The surface roughness (Rz jis) of the deposition surface side is 1. 低// m lower wheel 33 2213-8439-PF; Ahddub profile, and the precipitation and the date of the correction of the precipitation surface (Gs(10).)) is positive for 4^_ steel coating, which is characterized by • • • • • • • • • • . Month Patent No. 4 6. Surface-treated copper foil, Item 4 of the right-hand side is characterized by · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · One or two or more types of processing. …·如申請專利範圍第6項之表面處理鋼[㈠,虫 刖述表面處理銅落 八 脂基材之貼合面之表面粗度 (RzJis)為2#m以下之低輪廓。 銅覆層積板’其特徵在於:使用申請專利範圍 第b項之表面處理銅箔所獲致。.... For surface treated steel according to item 6 of the patent application [(1), the surface roughness of the surface of the surface treated copper octabase substrate (RzJis) is a low profile of 2#m or less. The copper clad laminate ' is characterized by the use of the surface treated copper foil of the scope of claim b. 2213-84 39-pp;Ahciciub 342213-84 39-pp;Ahciciub 34
TW095140188A 2005-10-31 2006-10-31 Method for manufacture of electrolytic copper foil, electrolytic copper foil manufactured by the method, surface-treated copper foil manufactured using the electrolytic copper foil, and copper-clad laminate manufactured using the electrolytic copper TW200728515A (en)

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