1327154 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種分解高分子材料及再回收的方法和 裝置’尤其是有關於一種利用水電漿分解高分子材料及再 回收的之方法和裝置。 # 【先前技術】 • 界每年排出魔大數量之廢棄塑膠，傳、统處理方法 多半為填埋土中或當作熱能焚化，回收利用者極為有限。 ^目前’有關廢棄塑膠之再利用方法包括藉由熱分解來油化 的方法外，投入高爐、氣化等方法的開發也正積極進行之 中。但是，因4塑膠之生產量及回收率之快速成長，必須 找尋更有效且更經濟、環保的再回收方法。 由都市垃圾加以分類，一般所謂廢棄塑膠之組成種類 包括：泛用樹脂之3P (PE、PP、pS)約77%，剩下的是氣 φ 系樹脂（pVC、PVDC)約6〜7%與pet樹脂約8%，而其 他塑膠以外之清洗劑容器之金屬彈簧或紹箱、玻璃、砂等 雜物約8%。近幾年來’雖然氯系樹脂已漸漸減少，但是除 了寶特瓶外，一般塑膠成型製品，大多使用PET樹脂，因 此使得再回收處理技術更趨複雜。 近幾年’利用電漿來處理塑膠廢棄物（以高分子材料為 例）之方法已被廣泛之研究與應用。電漿處理為一種具有高 能量且可處理多種有毒廢棄物之工程，利用電漿所產生之 高溫可用在具有危險性廢棄物之處理中。 5 叫/154 在高分子材料之分解方法，可利用光分解、熱分解、 化學及物理處理之分解等方法。而可以兼具有上述各種分 解效果之方法，則只有利用電漿方式之分解才可達成。電 裝技術用於分解高分子材料，在過程中會產生大量之離子 ，活性粒子’特別是在處理環境中利用具有如OH、Η及0 等自由基之反應性電漿時，可藉這些自由基來促進化學反 應之進行。而如果能夠有效地控制這些粒子，可期待其反 應成為各種具有高附加價值之工業原料並加以回收利用。 過去電漿放電源曾使用2.45GHz微波放電(Microwave Discharge)之水蒸氣電聚(h2〇 piasma，以下簡稱水電聚）， 在軋壓1 ·6托爾（Torr)範圍内分解聚乙婦(Polyethylene, PE) 材料再合成為酒精(Alcohol)、醋醛(Aldehyde)、Keton等工 業用原料’水蒸氣容易吸收微波能量，溫度可自動提昇至 1000°K以上。令PE材料蒸發分解，極為方便，又因能量 密集可產生大量之活性粒子，有助於再合成。目前合成物 質為含碳原子1至5之曱醇(Methanol)、戊醇(Pentanol)等原 料。為提高合成物質之選擇性’以加強其附加價值，有需 要控制電漿内之溫度’亦即大幅改變放電之氣壓範圍 (10_3〜10托爾）以及試行混合不同氣體於水蒸氣内。 但因微波放電所產生之電漿體積不大，以致於可處理 咼分子材料之體積有限，因此，實在有必要提供一種可處 理大量高分子材料之方法及裝置。 【發明内容】 鑑於先前技術所存在的問題，本發明乃提供一種分解 6 1327154 高分子材料之方法及裝置。本發明之主要目的係提供一種 關於利用水電漿分解高分子材料之方法和裝置。本發明之 另一目的係提供一種可回收氣體之分解高分子材料之方法 和裝置。 本發明首先提供一種分解高分子材料之裝置。該裝置 具有以下幾個主要單元：一腔體、一上電極、一下電極、 一加熱器、一水蒸氣輸入端、一氮氣輸入端、一1電力供應 器以及一幫浦。 在本發明之一實施例中，電力供應器提供一 13.56MHz 之高週波射頻電聚（Radio Frequency Plasmas，RF Plasma) 放電。由於RF電漿放電較容易於較廣之氣壓範圍内產生 大容積之電漿，因此可解決微波放電所產生之電漿體積有 限之問題。 本發明之分解高分子材料之裝置可進一步包括一回收 槽，用以回收該高分子材料分解後之氣態回收物質。本發 明可有效地將高分子材料轉換成高附加價值之原料並加以 回收利用，可降低生產成本，不僅有助於解決環保之問題， 從節省資源之觀點來看亦極為重要。 本發明另提供提供一種分解高分子材料之方法，其包 含以下步驟：1.提供高分子材料置於一腔體中；2.將腔體抽 成真空；3.提供一水蒸氣進入該腔體；4 :調整該腔體内之 各種變數；5.提供一電漿與該水蒸氣反應而形成一水電漿 放電，致使高分子材料被分解成為一氣態物質以及一固態 剩餘物質；6.使氣態物質與水電漿進行反應而放電分解成 7 1327154 為氣態回收物質；7.回收氣態回收物質；8.將腔體通入 之IS該固態剩餘物f取出;以及9,該氣態: 【實施方式】 為讓本發明之上述和其他目的、特徵和優點能更 ，下文特舉出較佳實施例，並配合所附圖武， ’、 說明如下。 、作衅細1327154 IX. Description of the Invention: [Technical Field] The present invention relates to a method and a device for decomposing a polymer material and recycling thereof, in particular, a method and a device for decomposing a polymer material using a water plasma and recycling it . # [Prior Art] • The waste plastics are discharged from the world every year. The methods of transmission and processing are mostly in the landfill or incinerated as heat, and the recycling is extremely limited. ^ At present, the method of recycling waste plastics includes oiling by thermal decomposition, and the development of methods such as blast furnace and gasification are actively underway. However, due to the rapid growth of the production and recycling rate of 4 plastics, it is necessary to find a more efficient and economical and environmentally friendly recycling method. Classified by municipal waste, the general composition of waste plastics includes: 3P (PE, PP, pS) of general-purpose resin is about 77%, and the remaining gas-based resin (pVC, PVDC) is about 6 to 7%. The pet resin is about 8%, and the metal springs of the cleaning agent containers other than plastics or the containers, glass, sand and the like are about 8%. In recent years, although chlorine-based resins have gradually decreased, in addition to PET bottles, most of the plastic molded products use PET resin, which makes the recycling technology more complicated. In recent years, the method of using plasma to treat plastic waste (taking polymer materials as an example) has been widely studied and applied. Plasma treatment is a process that has high energy and can handle a variety of toxic wastes. The high temperatures generated by the use of plasma can be used in the treatment of hazardous waste. 5 called / 154 In the decomposition method of polymer materials, the decomposition of photolysis, thermal decomposition, chemical and physical treatment can be utilized. Further, the method which can achieve the above various decomposition effects can be achieved only by the decomposition of the plasma method. Denso technology is used to decompose polymer materials, and a large amount of ions are generated in the process. The active particles can borrow these free radicals, especially when using reactive plasmas with free radicals such as OH, hydrazine and zero in the processing environment. Base to promote the progress of chemical reactions. However, if these particles can be effectively controlled, the reaction can be expected to be various industrial materials with high added value and recycled. In the past, the plasma discharge power source used a 2.45 GHz microwave discharge (microwave Discharge) for steam electropolymerization (h2〇piasma, hereinafter referred to as hydroelectric polymerization), and decomposed polyethylene in the range of 1 · 6 torr (Torr). , PE) The material is re-synthesized into alcohol (Alcohol), acetaldehyde (Aldehyde), Keton and other industrial raw materials. 'Water vapor easily absorbs microwave energy, and the temperature can be automatically increased to above 1000 °K. It is extremely convenient to evaporate and decompose PE materials, and it can generate a large amount of active particles due to energy intensive, which is helpful for re-synthesis. At present, the synthetic substance is a raw material such as Methanol or Pentanol having a carbon atom of 1 to 5. In order to increase the selectivity of the synthetic material to enhance its added value, it is necessary to control the temperature in the plasma, that is, to greatly change the pressure range of the discharge (10_3 to 10 Torr) and to try to mix different gases in the water vapor. However, the volume of the plasma generated by the microwave discharge is not so large that the volume of the molecular material that can be processed is limited. Therefore, it is necessary to provide a method and apparatus for processing a large amount of polymer materials. SUMMARY OF THE INVENTION In view of the problems of the prior art, the present invention provides a method and apparatus for decomposing 6 1327154 polymer materials. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a method and apparatus for decomposing a polymeric material using a hydrous slurry. Another object of the present invention is to provide a method and apparatus for decomposing a polymer material which can recover a gas. The present invention first provides an apparatus for decomposing a polymer material. The apparatus has the following main units: a chamber, an upper electrode, a lower electrode, a heater, a water vapor input, a nitrogen input, a power supply, and a pump. In one embodiment of the invention, the power supply provides a 13.56 MHz high frequency radio frequency (RF) discharge. Since the RF plasma discharge is easier to generate a large volume of plasma in a wider gas pressure range, the problem of limited plasma volume generated by microwave discharge can be solved. The apparatus for decomposing a polymer material of the present invention may further comprise a recovery tank for recovering the gaseous recovered material after decomposition of the polymer material. The present invention can effectively convert and convert high-molecular materials into high-value-added raw materials, thereby reducing production costs, and not only helping to solve environmental problems, but also from the viewpoint of resource conservation. The present invention further provides a method for decomposing a polymer material, comprising the steps of: 1. providing a polymer material in a cavity; 2. drawing a cavity into a vacuum; 3. providing a water vapor into the cavity ; 4: adjusting various variables in the cavity; 5. providing a plasma to react with the water vapor to form a water plasma discharge, causing the polymer material to be decomposed into a gaseous substance and a solid residual substance; The substance reacts with the water plasma to discharge and decompose into 7 1327154 as a gaseous recovered substance; 7. recovers the gaseous recovered substance; 8. takes the cavity into which IS the solid residue f is taken out; and 9, the gaseous state: [Embodiment] The above and other objects, features and advantages of the present invention will become more <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Fine
1下知一併參考圖1〜2關於本發明之分解高分子材料 :當置之結構示意圖以及分解高分子材料之方法之步驟流 請參考圖1關於依據本發明之分解高分子材料30之裝 置之結構示意圖，其具有以下幾個主要單元：一腔體2〇 : 山上電極下電極22、一加熱器23、一水蒸氣輪人 端24、一氮氣輪入端乃、液態氮氣輸入端26、一電力供 應器40、一回收槽50以及一幫浦Μ。 如圖1所示’在本發明之實施例中，上電極21與下電 極22係為平行配置於該腔體2〇内部的一對上下電極，而 在該上電極21與該下電極22中間以一電力供應器40在腔 體20之外側電性連接，且該下電極22内具有一加熱器23, 可將放置在其上之高分子材料30加熱。本發明之高分子材 料30之材質不以pe材質為限，還包括pp、pS、pVC、pVDC 與PET等材質。 幫浦51係與腔體2〇連接，可將該腔體2〇抽高真空至1 hereinafter referred to FIG. 1 to 2 for the decomposition of the polymer material of the present invention: a schematic diagram of the structure and a method for decomposing the polymer material. Please refer to FIG. 1 for the apparatus for decomposing the polymer material 30 according to the present invention. Schematic diagram of the structure, which has the following main units: a cavity 2〇: a mountain electrode lower electrode 22, a heater 23, a water vapor wheel human end 24, a nitrogen gas inlet end, a liquid nitrogen input end 26, A power supply 40, a recovery tank 50, and a gang. As shown in FIG. 1 , in the embodiment of the present invention, the upper electrode 21 and the lower electrode 22 are a pair of upper and lower electrodes arranged in parallel inside the cavity 2 , and between the upper electrode 21 and the lower electrode 22 . The power supply 40 is electrically connected to the outside of the cavity 20, and the lower electrode 22 has a heater 23 therein to heat the polymer material 30 placed thereon. The material of the polymer material 30 of the present invention is not limited to the pe material, and includes materials such as pp, pS, pVC, pVDC, and PET. The pump 51 series is connected to the cavity 2〇, and the cavity 2 can be evacuated to a high vacuum until
S 1327154 約3.ΟχΗΤ5托爾。水蒸氣輸入端24係設置於腔體20之外 侧，並可輸入一水蒸氣從該輸入端24進入該腔體20之内 部。藉由該電力供應器40於腔體20内產生之電漿與該水 蒸氣可形成一水電漿。在本發明之實施例中，電力供應器 40可提供一高週波13.56MHz之放電電漿或一 2.45GHz之 微波放電電漿，但本發明並不以此為限。 位於腔體20内之水電漿與高分子材料30反應後，會 使得高分子材料30被分解形成固態剩餘物質與氣態回收 •物質。 . 氮氣輸入端25係設置於腔體20之上端，可從該氮氣 輸入端25灌入氮氣致使該腔體20破真空，以便順利取出 經水電漿處理過之固態剩餘物質。 另外，回收槽50係設置於腔體20之上端，並可由液 態氮氣輸入端26加入液態氮進入該回收槽50，以回收高 分子材料30經水電漿分解後之氣態回收物質。 • 本發明還包括可設置於腔體20外側之一光譜分析儀 45，用以檢測腔體20内之水電漿分解高分子材料30之情 形。 此外，本發明除提供上述之分解高分子材料30之裝置 外，尚提供一種分解高分子材料30及回收該材料30被水 電漿分解後所產生之氣態回收物質之方法。 以下請參考圖2關於本發明之步驟流程圖。此處需注 意的是，以下實施例將應用本發明之分解高分子材料之裝 9 1327154 置作說明，並以一高週波13.56MHz之放電電漿電源以及 重量為200毫克之PE材質試片為例，但本發明並不以此為 限。同時，以下實施例所提出之材質、大小、溫度、壓力 或各樣變數等等皆為舉例說明，本發明並不以此為限。 如圖2所示，該方法包含以下步驟： 步驟101 :提供高分子材料置於一腔體中。首先，在 進行步驟101前，先預先準備一 PE材質顆粒狀試片，以精 φ 密天秤秤取重量為200毫克之該材料作為實驗用試片。 接著，利用丙酮將該腔體20内部擦拭清潔，此時因擦 ' 拭清潔後的腔體20會殘留丙酮揮發之氣體，所以將腔體 . 20抽真空，使腔體20内部殘留氣體抽乾淨，再把該試片 放入如圖1所示，可當作試片台之下電極22上面。 步驟102 :將腔體抽成真空。此時，利用位於腔體20 上端之幫浦51(如圖1所示）將該腔體20抽高真空至 3.0x10-5托爾以下。 * 步驟103 :提供一水蒸氣進入該腔體。接著，利用連 接於腔體20之水蒸氣輸入端24(如圖1所示）通入水蒸氣進 入該腔體20内側。 步驟104 :調整該腔體内之各種變數。在步驟104中， 係將腔體20加溫至150°C，並調整該腔體20内之壓力為1 托爾，並設定該水蒸氣之流量為60毫升/每分鐘，以及將 高週波電漿功率調為250W之情況下進行分解實驗。 步驟105:提供一電漿與該水蒸氣反應而形成一水電 1327154 漿放電，致使高分子材料被分解成為一氣態回收物質以及 一固態剩餘物質。在步驟105中，本發明係藉由電力供應 器40所提供之一電漿與腔體20内之水蒸氣反應形成水電 漿，當水電漿放電可使該試片分解成為一粉末狀物質。 接著，利用加熱器23將粉末狀物質加熱至450°C，使 該粉末狀物質汽化後，同時水電漿放電使汽化後之物質加 以分解而變成氣態物質。 φ 步驟106 :使氣態物質與水電漿進行反應而放電分解 成為氣態回收物質。接著，使氣態物質與水電漿進行反應 - 而放電分解成為氣態回收物質。其中氣態回收物質包括丙 酮、曱醇、乙醇與乙醛等。此外，以上步驟105至步驟106， 其反應時間可設定為1、2、5、10以及15分鐘不等。 步驟107 :回收氣態回收物質。接著，將回收槽50加 入液態氮以回收該試片分解後之氣態回收物質，並做實驗 後之分析。以上步驟103〜步驟105，可同時使用一光譜分 φ 析儀45檢測腔體内之水電漿以及水電漿分解該試片之情 形。 步驟108 :將腔體通入氮氣破真空，以將該試片之固 態剩餘物質取出。接著，由氮氣輸入口 25灌入氮氣，使該 腔體20破真空，並確認顆粒狀試片是否完全已經分解。 步驟109 :檢測該氣態回收物質之成份。接著，由光 譜分析儀45所測得之基礎之光譜圖與分解時實際測得之 光譜圖加以比對，以確認分解與再合成反應之進行狀況。 將回收槽50内之氣態回收物質，以一 GC-Mass儀器做檢 1327154 測，檢測該氣態回收物質之成分及含量。 以下請一併參考圖3〜5關於本發明之實施例透過光譜 分析儀45與MS-GC儀器所檢測之結果。 請參考圖3係為通水蒸氣在腔體20内，但還未放進試 片情況下，所測得的基礎光譜，橫軸為電漿瓦數、縱軸為 光譜強度。如圖3所示，電漿將能量施於氣體使其受激電 離，可以發現氣體受電離而產生H、0帶電離子，而瓦數 φ 越高可以發現所測得H、0帶電離子能量變化也跟著升高， 但除了 Η離子變化較大外，Ο離子則變化較小。 • 圖4係為通水蒸氣在腔體20内，並將試片放進腔體 . 20情況下，所測得的分解發光光譜圖，橫軸為波長、縱軸 為光譜強度。如圖4所示，本實施例使用水電漿供應大量 之ΟΗ活性粒子與試片中之C及Η原子反應結合，而形成 不同之新物質，本實施例所適用之汽化一般稱為「水汽化 反應」（C+H20 - CO+H2)。由圖4可發現CH、CO、C2 φ 這三種分子的光譜強度，表示試片被分解且再合成所形成 之氣態回收物質，強度有非常明顯的變化，分解中強度大 小由 C2 > CO > CH。 圖5係為顯示CH、CO、C2之光譜強度在不同時間對 強度的變化，橫抽為反應時間、縱韩為光譜強度。如圖5 所示，在最初的階段CH、CO、C2的強度變化不大，但到 開始放電2160秒後，CH、CO、C2的強度有增加的趨勢， 到開始放電2700秒後，CH、CO、C2降為最初階段強度。 依據本實施例，由於微波放電所產生之電漿體積有 1327154 限，且為顧及今後實用化之目的，本發明提出以一高週波 電漿放電替代傳統方式，高週波電漿放電較容易於較廣之 氣壓範圍内產生大容積之電漿，而其分解的時間與反應後 產生之氣態回收物質之種類與密度亦與微波放電所產生之 物質十分相似。此外，此種方式只需小規模之裝置，投資 容易，如能分置於鄉鎮村里，可解決廢棄物處理之問題， 同時亦有節省資源之效果，一舉數得，如能實用化對國家 社會之貢獻極大無疑。 ® * 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1為依據本發明之分解高分子材料之裝置之結構示 意圖。 • 圖2為依據本發明之分解高分子材料之方法之步驟流 程圖。 圖3係為依據本發明實施例之通水蒸氣在腔體内，但 逛未放進P E材質試片情況下’所測得的基礎光譜。 圖4係為依據本發明實施例之通水蒸氣在腔體内，並 將PE材質試片放進腔體情況下，所測得的分解發光光譜 圖。 圖5係為依據本發明實施例之顯示CH、CO、C2之光 譜強度在不同時間對強度的變化圖。 13 1327154 【元件代表符號說明】 腔體20 上電極21 下電極22 加熱器23 水蒸氣輸入端24 氮氣輸入端25 • 液態氮氣輸入端26 高分子材料30 電力供應器40 • 光譜分析儀45 回收槽50 幫浦51S 1327154 About 3. ΟχΗΤ 5 Thor. The water vapor input end 24 is disposed on the outside of the cavity 20 and can be supplied with a water vapor from the input end 24 into the interior of the cavity 20. The plasma generated by the power supply 40 in the cavity 20 and the water vapor can form a water plasma. In the embodiment of the present invention, the power supply 40 can provide a high-frequency 13.56 MHz discharge plasma or a 2.45 GHz microwave discharge plasma, but the invention is not limited thereto. After the water plasma located in the cavity 20 reacts with the polymer material 30, the polymer material 30 is decomposed to form a solid residual substance and a gaseous recovery substance. The nitrogen input end 25 is disposed at the upper end of the cavity 20, and nitrogen gas can be injected from the nitrogen input end 25 to cause the cavity 20 to be vacuumed to smoothly take out the solid residue treated by the water plasma. In addition, the recovery tank 50 is disposed at the upper end of the cavity 20, and liquid nitrogen can be introduced into the recovery tank 50 from the liquid nitrogen input end 26 to recover the gaseous recovered material after the high molecular material 30 is decomposed by the hydroelectric slurry. • The present invention also includes a spectral analyzer 45 that can be disposed outside of the cavity 20 for detecting the formation of the water plasma decomposing polymer material 30 in the cavity 20. Further, in addition to the above-described apparatus for decomposing the polymer material 30, the present invention provides a method of decomposing the polymer material 30 and recovering the gaseous recovered material produced by decomposing the material 30 by the water plasma. Please refer to FIG. 2 for a flow chart of the steps of the present invention. It should be noted here that the following examples illustrate the application of the disassembled polymer material of the present invention 9 1327154, and a high-frequency 13.56 MHz discharge plasma power supply and a 200 mg weight PE test piece. For example, the invention is not limited thereto. In the meantime, the materials, the sizes, the temperatures, the pressures, the various variables, and the like set forth in the following embodiments are exemplified, and the present invention is not limited thereto. As shown in FIG. 2, the method comprises the following steps: Step 101: Providing a polymer material in a cavity. First, before proceeding to step 101, a pellet sample of PE material is prepared in advance, and the material having a weight of 200 mg is weighed as a test piece by a precision φ. Then, the inside of the cavity 20 is wiped and cleaned with acetone. At this time, the cavity 20 which is wiped and cleaned will leave the volatilized gas of the acetone, so the cavity 20 is evacuated, and the residual gas inside the cavity 20 is cleaned. Then, the test piece is placed as shown in FIG. 1 and can be used as the electrode 22 under the test piece. Step 102: The chamber is evacuated. At this time, the cavity 20 is evacuated to a depth of 3.0 x 10 -5 Torr or less by the pump 51 (shown in Fig. 1) located at the upper end of the cavity 20. * Step 103: Provide a water vapor into the chamber. Next, water vapor is introduced into the interior of the chamber 20 by means of a water vapor input 24 (shown in Figure 1) connected to the chamber 20. Step 104: Adjust various variables in the cavity. In step 104, the chamber 20 is warmed to 150 ° C, and the pressure in the chamber 20 is adjusted to 1 Torr, and the flow rate of the water vapor is set to 60 cc / min, and the high frequency is charged. The decomposition experiment was carried out with the slurry power adjusted to 250 W. Step 105: Providing a plasma to react with the water vapor to form a hydroelectric 1327154 slurry discharge, causing the polymer material to be decomposed into a gaseous recovered material and a solid residual material. In the step 105, the present invention forms a water plasma by reacting one of the plasmas supplied from the power supply 40 with the water vapor in the cavity 20. When the water plasma is discharged, the test piece is decomposed into a powdery substance. Next, the powdery substance is heated to 450 °C by the heater 23, and after the powdery substance is vaporized, the water plasma is discharged, and the vaporized substance is decomposed to become a gaseous substance. φ Step 106: The gaseous substance is reacted with the water plasma to be decomposed into a gaseous recovered substance. Next, the gaseous substance is reacted with the water plasma - and the discharge is decomposed into a gaseous recovered substance. Among them, the gaseous recovery materials include acetone, decyl alcohol, ethanol and acetaldehyde. Further, in the above steps 105 to 106, the reaction time may be set to 1, 2, 5, 10, and 15 minutes. Step 107: recovering the gaseous recovered material. Next, the recovery tank 50 was charged with liquid nitrogen to recover the gaseous recovered matter after the decomposition of the test piece, and the analysis was carried out after the experiment. In the above steps 103 to 105, a spectral φ analyzer 45 can be used to simultaneously detect the water plasma in the cavity and the water plasma to decompose the test piece. Step 108: The chamber is evacuated by nitrogen gas to remove the solid residual material of the test piece. Next, nitrogen gas was poured from the nitrogen inlet port 25 to break the vacuum of the chamber 20, and it was confirmed whether or not the granular test piece was completely decomposed. Step 109: Detect the components of the gaseous recovered material. Next, the basic spectrum measured by the spectrum analyzer 45 is compared with the actually measured spectrum at the time of decomposition to confirm the progress of the decomposition and resynthesis reaction. The gaseous recovered material in the recovery tank 50 is measured by a GC-Mass instrument for detection of 1327154, and the composition and content of the gaseous recovered material are detected. Hereinafter, the results of the detection by the spectrum analyzer 45 and the MS-GC apparatus with respect to the embodiment of the present invention will be described with reference to Figs. Please refer to Fig. 3 for the measured basic spectrum when the water vapor is in the cavity 20 but has not been placed in the test piece. The horizontal axis is the plasma wattage and the vertical axis is the spectral intensity. As shown in Fig. 3, the plasma applies energy to the gas to be excited and ionized. It can be found that the gas is ionized to generate H, 0 charged ions, and the higher the wattage φ, the measured H, 0 charged ion energy changes can be found. It also rises, but in addition to the large change in strontium ions, strontium ions change less. • Figure 4 shows the water vapor in the cavity 20 and the test piece placed in the cavity. In the case of 20, the measured decomposition luminescence spectrum shows the wavelength on the horizontal axis and the spectral intensity on the vertical axis. As shown in FIG. 4, this embodiment uses a water plasma to supply a large amount of ruthenium active particles to react with C and ruthenium atoms in the test piece to form different new substances. The vaporization applicable in this embodiment is generally referred to as "water vaporization". Reaction" (C+H20 - CO+H2). From Fig. 4, the spectral intensities of the three molecules CH, CO, and C2 φ can be found, indicating that the test piece is decomposed and recombined to form a gaseous recovered substance. The intensity has a very significant change, and the intensity of decomposition is determined by C2 > CO > ; CH. Fig. 5 is a graph showing changes in the intensity of CH, CO, and C2 at different times, and the transverse pumping is the reaction time and the vertical is the spectral intensity. As shown in Fig. 5, the intensity of CH, CO, and C2 did not change much in the initial stage, but the intensity of CH, CO, and C2 increased after 2160 seconds of discharge, and after 2700 seconds of discharge, CH, CO and C2 are reduced to the initial stage strength. According to the embodiment, the volume of the plasma generated by the microwave discharge has a limit of 1327154, and for the purpose of practical use in the future, the present invention proposes to replace the conventional method with a high-frequency plasma discharge, and the high-frequency plasma discharge is easier to compare. A large volume of plasma is produced in a wide range of pressures, and the decomposition time and the type and density of the gaseous recovered material produced after the reaction are also very similar to those produced by microwave discharge. In addition, this method requires only a small-scale installation, and it is easy to invest. If it can be placed in a township and village, it can solve the problem of waste disposal, and at the same time, it also has the effect of saving resources. If it can be practical, it can be applied to the national society. The contribution is enormous. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and it is to be understood that those skilled in the art may make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of an apparatus for decomposing a polymer material according to the present invention. Fig. 2 is a flow chart showing the steps of the method for decomposing a polymer material according to the present invention. Fig. 3 is a diagram showing the basic spectrum measured by the fact that water vapor is passed through the cavity in the case of the P E material test piece according to an embodiment of the present invention. Fig. 4 is a view showing the decomposition luminescence spectrum measured by passing water vapor in a cavity and placing a PE material test piece into a cavity according to an embodiment of the present invention. Figure 5 is a graph showing the change in intensity of the spectral intensity of CH, CO, C2 at different times in accordance with an embodiment of the present invention. 13 1327154 [Description of component symbols] Cavity 20 Upper electrode 21 Lower electrode 22 Heater 23 Water vapor input terminal 24 Nitrogen input terminal 25 • Liquid nitrogen input terminal 26 Polymer material 30 Power supply 40 • Spectrum analyzer 45 Recovery tank 50 pumps 51