TWI319731B - Polishing pad, the use thereof and the method for manufacturing the same - Google Patents

Polishing pad, the use thereof and the method for manufacturing the same

Info

Publication number
TWI319731B
TWI319731B TW96119161A TW96119161A TWI319731B TW I319731 B TWI319731 B TW I319731B TW 96119161 A TW96119161 A TW 96119161A TW 96119161 A TW96119161 A TW 96119161A TW I319731 B TWI319731 B TW I319731B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
polishing pad
polishing
pad
Prior art date
Application number
TW96119161A
Other languages
Chinese (zh)
Other versions
TW200846132A (en
Inventor
Chung Chih Feng
I Peng Yao
Lyang Gung Wang
Yung Chang Hung
Kun Cheng Sung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW96119161A priority Critical patent/TWI319731B/en
Publication of TW200846132A publication Critical patent/TW200846132A/en
Application granted granted Critical
Publication of TWI319731B publication Critical patent/TWI319731B/en

Links

TW96119161A 2007-05-29 2007-05-29 Polishing pad, the use thereof and the method for manufacturing the same TWI319731B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96119161A TWI319731B (en) 2007-05-29 2007-05-29 Polishing pad, the use thereof and the method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96119161A TWI319731B (en) 2007-05-29 2007-05-29 Polishing pad, the use thereof and the method for manufacturing the same

Publications (2)

Publication Number Publication Date
TW200846132A TW200846132A (en) 2008-12-01
TWI319731B true TWI319731B (en) 2010-01-21

Family

ID=44823058

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96119161A TWI319731B (en) 2007-05-29 2007-05-29 Polishing pad, the use thereof and the method for manufacturing the same

Country Status (1)

Country Link
TW (1) TWI319731B (en)

Also Published As

Publication number Publication date
TW200846132A (en) 2008-12-01

Similar Documents

Publication Publication Date Title
IL211092A0 (en) Polishing pad and method for manufacturing the same
TWI349596B (en) Cushion for polishing pad and polishing pad using the same
TWI372093B (en) Radial-biased polishing pad
EP2042267A4 (en) Carrier for double side polishing device, and double side polishing device and double side polishing method using the carrier
EP2151500A4 (en) Branched -glucan, -glucosyltransferase producing the same, method for producing the same and use thereof
EP2095742A4 (en) Detachable seat pad, method of manufacturing the same, and seat using detachable seat pad
EP2447004A4 (en) Polishing pad, manufacturing method therefor, and polishing method
TWI365791B (en) Abrasive cleaning agent, method for manufacturing the same, and method for polishing using abrasive cleaning agent
IL200099A0 (en) A polishing pad and method of producing the same
SG10201605686XA (en) Polishing Composition And Polishing Method Using The Same
ZA200804724B (en) Absorbent breast pad and manufacturing method for the same
PL1954745T3 (en) Adhesive formulation, method for the production thereof, and use thereof
EP2193010A4 (en) Polishing pad
EP1975985A4 (en) Chemical mechanical polishing pad and method for manufacturing same
EP2219491A4 (en) Clamp braces and methods for manufacturing, selling, and using the same
EP1800800A4 (en) Abrasive pad
EP2168677A4 (en) Ferrimanganic composite oxide absorbent, method for preparing the same, and method for utilizing the same
TWI370039B (en) Polishing pad with window having multiple portions
EP2084745A4 (en) Device, and method for manufacturing the same
EP2324956A4 (en) Polishing composition and polishing method using the same
EP2083027B8 (en) Mechanical polishing pad and chemical mechanical polishing method
IL201028A0 (en) Metal film polishing pad and method for polishing metal film using the same
MX289418B (en) Absorptive wearing good and method for manufacturing the same.
EP2169594A4 (en) Wireless ic device and method for manufacturing the same
EP1943053A4 (en) Grinding and/or polishing tool, and use and manufacturing thereof

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees