TWI319730B - Complex polishing pad and method for making the same - Google Patents

Complex polishing pad and method for making the same

Info

Publication number
TWI319730B
TWI319730B TW96115356A TW96115356A TWI319730B TW I319730 B TWI319730 B TW I319730B TW 96115356 A TW96115356 A TW 96115356A TW 96115356 A TW96115356 A TW 96115356A TW I319730 B TWI319730 B TW I319730B
Authority
TW
Taiwan
Prior art keywords
making
same
polishing pad
complex polishing
complex
Prior art date
Application number
TW96115356A
Other languages
Chinese (zh)
Other versions
TW200841997A (en
Inventor
Chung Chih Feng
I Peng Yao
Lyang Gung Wang
Yung Chang Hung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW96115356A priority Critical patent/TWI319730B/en
Publication of TW200841997A publication Critical patent/TW200841997A/en
Application granted granted Critical
Publication of TWI319730B publication Critical patent/TWI319730B/en

Links

TW96115356A 2007-04-30 2007-04-30 Complex polishing pad and method for making the same TWI319730B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96115356A TWI319730B (en) 2007-04-30 2007-04-30 Complex polishing pad and method for making the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96115356A TWI319730B (en) 2007-04-30 2007-04-30 Complex polishing pad and method for making the same

Publications (2)

Publication Number Publication Date
TW200841997A TW200841997A (en) 2008-11-01
TWI319730B true TWI319730B (en) 2010-01-21

Family

ID=44821773

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96115356A TWI319730B (en) 2007-04-30 2007-04-30 Complex polishing pad and method for making the same

Country Status (1)

Country Link
TW (1) TWI319730B (en)

Also Published As

Publication number Publication date
TW200841997A (en) 2008-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees