TWI318815B - Multiwavelength semiconductor laser array and method of manufacturing the same - Google Patents
Multiwavelength semiconductor laser array and method of manufacturing the sameInfo
- Publication number
- TWI318815B TWI318815B TW095148051A TW95148051A TWI318815B TW I318815 B TWI318815 B TW I318815B TW 095148051 A TW095148051 A TW 095148051A TW 95148051 A TW95148051 A TW 95148051A TW I318815 B TWI318815 B TW I318815B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- same
- semiconductor laser
- laser array
- multiwavelength semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1025—Extended cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1039—Details on the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/16—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/341—Structures having reduced dimensionality, e.g. quantum wires
- H01S5/3412—Structures having reduced dimensionality, e.g. quantum wires quantum box or quantum dash
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095148051A TWI318815B (en) | 2006-12-20 | 2006-12-20 | Multiwavelength semiconductor laser array and method of manufacturing the same |
US11/803,583 US7558301B2 (en) | 2006-12-20 | 2007-05-15 | Multiwavelength semiconductor laser array and method of fabricating the same |
JP2007135351A JP2008160054A (ja) | 2006-12-20 | 2007-05-22 | 多波長半導体レーザアレイ及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095148051A TWI318815B (en) | 2006-12-20 | 2006-12-20 | Multiwavelength semiconductor laser array and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200828707A TW200828707A (en) | 2008-07-01 |
TWI318815B true TWI318815B (en) | 2009-12-21 |
Family
ID=39542732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095148051A TWI318815B (en) | 2006-12-20 | 2006-12-20 | Multiwavelength semiconductor laser array and method of manufacturing the same |
Country Status (3)
Country | Link |
---|---|
US (1) | US7558301B2 (zh) |
JP (1) | JP2008160054A (zh) |
TW (1) | TWI318815B (zh) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
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US7835408B2 (en) * | 2005-12-07 | 2010-11-16 | Innolume Gmbh | Optical transmission system |
US8411711B2 (en) | 2005-12-07 | 2013-04-02 | Innolume Gmbh | Semiconductor laser with low relative intensity noise of individual longitudinal modes and optical transmission system incorporating the laser |
TWI364892B (en) * | 2007-01-10 | 2012-05-21 | Ind Tech Res Inst | Multiwavelength quantum dot laser device |
US8059443B2 (en) * | 2007-10-23 | 2011-11-15 | Hewlett-Packard Development Company, L.P. | Three-dimensional memory module architectures |
US8064739B2 (en) * | 2007-10-23 | 2011-11-22 | Hewlett-Packard Development Company, L.P. | Three-dimensional die stacks with inter-device and intra-device optical interconnect |
US7532785B1 (en) * | 2007-10-23 | 2009-05-12 | Hewlett-Packard Development Company, L.P. | Photonic interconnects for computer system devices |
US20110313407A1 (en) * | 2010-06-18 | 2011-12-22 | Rafailov Edik U | Quantum-dot laser diode |
RU2582302C1 (ru) * | 2015-03-25 | 2016-04-20 | федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский ядерный университет МИФИ" (НИЯУ МИФИ) | Полупроводниковый лазер на основе эпитаксиальной гетероструктуры |
US11552454B1 (en) | 2017-09-28 | 2023-01-10 | Apple Inc. | Integrated laser source |
US11158996B2 (en) | 2017-09-28 | 2021-10-26 | Apple Inc. | Laser architectures using quantum well intermixing techniques |
CN111164393A (zh) | 2017-09-29 | 2020-05-15 | 苹果公司 | 连接的外延光学感测系统 |
CN111164415A (zh) | 2017-09-29 | 2020-05-15 | 苹果公司 | 路径解析的光学采样架构 |
EP3752873A1 (en) | 2018-02-13 | 2020-12-23 | Apple Inc. | Integrated photonics device having integrated edge outcouplers |
US10168537B1 (en) * | 2018-03-16 | 2019-01-01 | Facebook Technologies, Llc | Single chip superluminous light emitting diode array for waveguide displays |
US11644618B2 (en) | 2018-06-22 | 2023-05-09 | Apple Inc. | Discrete optical unit on a substrate of an integrated photonics chip |
CN109273566B (zh) * | 2018-08-01 | 2020-05-05 | 太原理工大学 | 一种含有应变调制结构的多层InGaN量子点结构 |
US11525967B1 (en) | 2018-09-28 | 2022-12-13 | Apple Inc. | Photonics integrated circuit architecture |
US11171464B1 (en) | 2018-12-14 | 2021-11-09 | Apple Inc. | Laser integration techniques |
US11231319B1 (en) | 2019-09-09 | 2022-01-25 | Apple Inc. | Athermal wavelength stability monitor using a detraction grating |
US11525958B1 (en) | 2019-09-09 | 2022-12-13 | Apple Inc. | Off-cut wafer with a supported outcoupler |
US11835836B1 (en) | 2019-09-09 | 2023-12-05 | Apple Inc. | Mach-Zehnder interferometer device for wavelength locking |
US11506535B1 (en) | 2019-09-09 | 2022-11-22 | Apple Inc. | Diffraction grating design |
US11881678B1 (en) | 2019-09-09 | 2024-01-23 | Apple Inc. | Photonics assembly with a photonics die stack |
US11320718B1 (en) | 2019-09-26 | 2022-05-03 | Apple Inc. | Cantilever beam waveguide for silicon photonics device |
US11500154B1 (en) | 2019-10-18 | 2022-11-15 | Apple Inc. | Asymmetric optical power splitting system and method |
JP2021118308A (ja) * | 2020-01-28 | 2021-08-10 | パナソニックIpマネジメント株式会社 | レーザーダイオードバー及び波長ビーム結合システム |
US11852318B2 (en) | 2020-09-09 | 2023-12-26 | Apple Inc. | Optical system for noise mitigation |
CN112072470B (zh) * | 2020-09-14 | 2022-09-13 | 中国科学院半导体研究所 | 多波长激光器阵列及其制作方法 |
US11852865B2 (en) | 2020-09-24 | 2023-12-26 | Apple Inc. | Optical system with phase shifting elements |
US11561346B2 (en) | 2020-09-24 | 2023-01-24 | Apple Inc. | Tunable echelle grating |
US11906778B2 (en) | 2020-09-25 | 2024-02-20 | Apple Inc. | Achromatic light splitting device with a high V number and a low V number waveguide |
US11815719B2 (en) | 2020-09-25 | 2023-11-14 | Apple Inc. | Wavelength agile multiplexing |
JP2022078795A (ja) * | 2020-11-13 | 2022-05-25 | 株式会社デンソー | 半導体レーザ装置 |
CN118117440A (zh) * | 2024-04-22 | 2024-05-31 | 苏州矩阵光电有限公司 | 一种激光器结构及多波长激光器阵列 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS63213384A (ja) * | 1987-02-27 | 1988-09-06 | Nec Corp | 多波長半導体レ−ザ |
JPH02260482A (ja) * | 1989-03-31 | 1990-10-23 | Canon Inc | 半導体レーザ装置 |
JPH05198888A (ja) * | 1992-01-20 | 1993-08-06 | Sanyo Electric Co Ltd | 半導体レーザアレイ装置 |
JP3660801B2 (ja) * | 1998-06-04 | 2005-06-15 | 三菱電線工業株式会社 | GaN系半導体発光素子 |
JP2000340883A (ja) | 1999-05-27 | 2000-12-08 | Fujitsu Ltd | 多波長発振光半導体装置 |
JP2001244570A (ja) * | 2000-02-29 | 2001-09-07 | Sony Corp | 半導体レーザ、レーザカプラおよびデータ再生装置、データ記録装置ならびに半導体レーザの製造方法 |
US6816525B2 (en) | 2000-09-22 | 2004-11-09 | Andreas Stintz | Quantum dot lasers |
US6600169B2 (en) | 2000-09-22 | 2003-07-29 | Andreas Stintz | Quantum dash device |
EP1354380A2 (en) * | 2000-10-06 | 2003-10-22 | Science & Technology Corporation UNM | Quantum dot lasers |
KR101015499B1 (ko) * | 2004-06-19 | 2011-02-16 | 삼성전자주식회사 | 복수의 파장을 발생시키는 반도체 레이저 소자 및 상기반도체 레이저 소자용 레이저 펌핑부 |
JP2006093466A (ja) * | 2004-09-24 | 2006-04-06 | Toshiba Corp | 多波長半導体レーザ素子および多波長半導体レーザ装置 |
US7358523B2 (en) * | 2004-10-20 | 2008-04-15 | Avago Technologies Fiber Ip Pte Ltd | Method and structure for deep well structures for long wavelength active regions |
US7795609B2 (en) * | 2005-08-05 | 2010-09-14 | Stc.Unm | Densely stacked and strain-compensated quantum dot active regions |
US7403552B2 (en) * | 2006-03-10 | 2008-07-22 | Wisconsin Alumni Research Foundation | High efficiency intersubband semiconductor lasers |
US7408966B2 (en) * | 2006-08-18 | 2008-08-05 | Wisconsin Alumni Research Foundation | Intersubband quantum box stack lasers |
-
2006
- 2006-12-20 TW TW095148051A patent/TWI318815B/zh not_active IP Right Cessation
-
2007
- 2007-05-15 US US11/803,583 patent/US7558301B2/en not_active Expired - Fee Related
- 2007-05-22 JP JP2007135351A patent/JP2008160054A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US20080151950A1 (en) | 2008-06-26 |
TW200828707A (en) | 2008-07-01 |
JP2008160054A (ja) | 2008-07-10 |
US7558301B2 (en) | 2009-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |