TWI318436B - Method of manufacturing nano-crystalline silicon dot layer - Google Patents
Method of manufacturing nano-crystalline silicon dot layerInfo
- Publication number
- TWI318436B TWI318436B TW95129180A TW95129180A TWI318436B TW I318436 B TWI318436 B TW I318436B TW 95129180 A TW95129180 A TW 95129180A TW 95129180 A TW95129180 A TW 95129180A TW I318436 B TWI318436 B TW I318436B
- Authority
- TW
- Taiwan
- Prior art keywords
- crystalline silicon
- dot layer
- silicon dot
- manufacturing nano
- nano
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95129180A TWI318436B (en) | 2006-08-09 | 2006-08-09 | Method of manufacturing nano-crystalline silicon dot layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95129180A TWI318436B (en) | 2006-08-09 | 2006-08-09 | Method of manufacturing nano-crystalline silicon dot layer |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200810024A TW200810024A (en) | 2008-02-16 |
TWI318436B true TWI318436B (en) | 2009-12-11 |
Family
ID=44767283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95129180A TWI318436B (en) | 2006-08-09 | 2006-08-09 | Method of manufacturing nano-crystalline silicon dot layer |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI318436B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104517903B (en) * | 2013-09-27 | 2017-07-14 | 台湾积体电路制造股份有限公司 | memory device and forming method thereof |
US9978603B2 (en) | 2013-09-27 | 2018-05-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory devices and method of fabricating same |
US10665600B2 (en) | 2013-12-03 | 2020-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory devices and method of fabricating same |
-
2006
- 2006-08-09 TW TW95129180A patent/TWI318436B/en active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104517903B (en) * | 2013-09-27 | 2017-07-14 | 台湾积体电路制造股份有限公司 | memory device and forming method thereof |
US9978603B2 (en) | 2013-09-27 | 2018-05-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory devices and method of fabricating same |
US9978759B2 (en) | 2013-09-27 | 2018-05-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory devices and method of forming same |
US10665600B2 (en) | 2013-12-03 | 2020-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory devices and method of fabricating same |
US11348935B2 (en) | 2013-12-03 | 2022-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory devices and method of fabricating same |
Also Published As
Publication number | Publication date |
---|---|
TW200810024A (en) | 2008-02-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL197430A0 (en) | Method of doping surfaces | |
EP2133908A4 (en) | Method for manufacturing deformation silicon substrate | |
TWI365508B (en) | Manufacturing method of semiconductor device | |
EP1950799A4 (en) | Method for production of nano-porous substrate | |
ZA200900445B (en) | Method of manufacturing containers | |
GB2436461B (en) | Method of producing member having face-geared surface | |
EP2059946A4 (en) | Micropipe-free silicon carbide and related method of manufacture | |
EP1986219A4 (en) | Soi substrate and method for manufacturing soi substrate | |
EP1986218A4 (en) | Method for manufacturing soi substrate | |
EP2021280A4 (en) | Method for the manufacture of silicon tetrachloride | |
EP2232528A4 (en) | Methods for formation of substrate elements | |
GB0605360D0 (en) | Method of manufacture | |
EP2012347A4 (en) | Soi wafer manufacturing method | |
EP1983553A4 (en) | Method for manufacturing soi substrate | |
EP2056340A4 (en) | Method for producing silicon carbide substrate and silicon carbide substrate | |
EP2174357A4 (en) | Method of producing large area sic substrates | |
TWI319212B (en) | Method of chip manufacturing | |
EP2352164A4 (en) | Soi substrate manufacturing method | |
TWI347379B (en) | Silicon wafer and method for producing same | |
EP2033739A4 (en) | Method for producing wafer | |
EP2261954A4 (en) | Method for producing soi substrate | |
EP2012346A4 (en) | Soi wafer manufacturing method | |
GB0705604D0 (en) | Method for fabrication of photonic biosensor arrays | |
EP2172424A4 (en) | Method of solidifying metallic silicon | |
TWI372007B (en) | Method for fabricating blind via structure of substrate |