TWI318420B - Lower temperature thermal chemical vapor deposition reactor - Google Patents
Lower temperature thermal chemical vapor deposition reactorInfo
- Publication number
- TWI318420B TWI318420B TW95140623A TW95140623A TWI318420B TW I318420 B TWI318420 B TW I318420B TW 95140623 A TW95140623 A TW 95140623A TW 95140623 A TW95140623 A TW 95140623A TW I318420 B TWI318420 B TW I318420B
- Authority
- TW
- Taiwan
- Prior art keywords
- vapor deposition
- chemical vapor
- lower temperature
- temperature thermal
- deposition reactor
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95140623A TWI318420B (en) | 2006-11-02 | 2006-11-02 | Lower temperature thermal chemical vapor deposition reactor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95140623A TWI318420B (en) | 2006-11-02 | 2006-11-02 | Lower temperature thermal chemical vapor deposition reactor |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200822187A TW200822187A (en) | 2008-05-16 |
TWI318420B true TWI318420B (en) | 2009-12-11 |
Family
ID=44770712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95140623A TWI318420B (en) | 2006-11-02 | 2006-11-02 | Lower temperature thermal chemical vapor deposition reactor |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI318420B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101559470B1 (en) * | 2009-06-04 | 2015-10-12 | 주성엔지니어링(주) | Chemical Vapor Deposition Apparatus |
CN105757363A (en) * | 2014-12-13 | 2016-07-13 | 天津威康医疗用品有限公司 | High-temperature resistant quartz container |
CN113981416B (en) * | 2021-12-29 | 2022-03-22 | 上海陛通半导体能源科技股份有限公司 | Multifunctional wafer pretreatment cavity and chemical vapor deposition equipment |
-
2006
- 2006-11-02 TW TW95140623A patent/TWI318420B/en active
Also Published As
Publication number | Publication date |
---|---|
TW200822187A (en) | 2008-05-16 |
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