1317407 九、發明說明： 【發明所屬之技術領域】 本發明係關於熱傳導領域，特別涉及一種可用于熱管工作流體填充 之真空充液裝置及使用該裝置之真空充液方法。 ' 【先前技術】 近年來’ f子技術迅速發展’電子n件之高頻、高速以及積體電路 密集及微型化’使得單位面積電子器件發熱量劇增。而熱管技術以其高 效、緊凑及靈活可靠料點，適合解決當前電子器件雖能提升所衍生 之散熱問題，逐漸成爲當前電子器件之主流散熱方式。 熱官係-中空後封官體，通常包括管殼、緊靠管殼内壁之吸液芯(毛 細結構)以及密册紐内之卫作猶，其-端爲蒸發端(受熱端），另一 端,冷疑端(冷㈣，根據應”要可於蒸發端與冷凝端之間佈置絕緣 段。工作時’綠在蒸發端藉由内部讀流體相變化吸收潛熱，並透過 蒸氣流迅速地將熱量輸送至遠離熱之冷凝端，從而造成前後兩端溫 差小’又達至快速傳送大量熱能之目的。熱管之導熱能力已超過目前所 知導熱性金屬’且可達良好金属熱傳導係數之7(M⑻倍。因而，熱管 利用兩端溫差’即可完成整個傳熱過程而無料加，可減少額外電 =擔。其中，工作流體於整個傳熱過程充當傳熱媒介，其性能以及填 充量對熱管之熱傳效率影響極大。 通常’工作流體選用純水或甲醇，其填充量需結合熱管内壁之毛乡 2液之毛細結f孔隙率大小而定，且毛細結構孔隙率越大 ，工作流費 =讀大，熱管熱傳效率越高，反之亦然。因而，對於選定之毛細口』 =液歧體之量不壯高，·會加重毛細結構負擔 =液，會局。邮於冷凝端’形成局部液體阻塞，使該部位之冷凝其 太作流體填充量，於冷凝端凝結之液體流束會分1 :之:工作流體無法完全將毛細結構内孔隙填滿，造成， g之瘵發鳊局。Ρ乾燥，降低熱管傳熱能力。 先前技術提供-種熱管工作流體定量填充裝置，主要由一空氣渺 1317407 ： 間、一冷凝器、一凝結液收集瓶、一假鎖緊閥、一凝結液排放閥及一排 汽導管所構成。其中冷凝器上端爲空氣排泄閥，供空氣或不凝結氣從中 排出，冷凝器下端爲凝結液收集瓶，_供工作流體蒸汽凝結後集結之瓶 體，表面有刻度，下方有凝結液排放閥，使該工作流體能從凝結液收集 瓶中排出供回收利用於前述結構中，於冷凝器與凝結液收集瓶之間，還 設有一排汽導管，其一端通入冷凝器内，另一端與假鎖緊閥相接，使由 . 假鎖緊閥下方填充管排出之蒸汽或氣體可流入冷凝器内。操作時，先將 熱管容器内預注略多於設計量之工作流體後，將假鎖緊閥微開，以瓦斯 火焰或電熱器將熱管容器加熱’使容器内之工作流體沸騰，並排放蒸 汽；以假鎖緊閥調節蒸汽之排放量，蒸汽與空氣經排汽導管進入冷凝器 • 後蒸汽凝結成液體，沿冷凝器内壁流下聚集於收集瓶中；空氣聚集於冷 凝器頂端，並由頂端之排泄閥排放；由前述凝結液收集瓶之量度讀出凝 結液之體積，以決定何時封斷熱管容器之填充管，從而實現工作流體定 量填充。然而，當停止液體填充時，於熱管充液口至收集瓶之間之通道 管内將殘留較多工作流體蒸汽，而熱管填充液量通常爲幾毫升’使得熱 管實際填充量與預計填充量誤差較大，因而，該裝置難以實現工作流體 填充量之精確控制。 有鑒於此’提供一種可精確控制液體填充量之真空充液裝置實爲必 要。、 • 【發明内容】 以下，將以實施例說明一種可精確控制液體填充量之真空充液 置。 以及通過實施例來說明一種真空充液方法。 爲實現上述内容，提供-種真空充液裝置，其包括：一液體輸送系 統，其與待充液容器相連通，用於輸送液體至待充液容器内；一抽真空 系統’其與待充液容器相連通，用於將待充液容器内部抽成真空；以及1317407 IX. Description of the Invention: [Technical Field] The present invention relates to the field of heat conduction, and more particularly to a vacuum filling device that can be used for filling a heat pipe working fluid and a vacuum filling method using the same. [Prior Art] In recent years, the 'f sub-technology has developed rapidly'. The high-frequency, high-speed and intensive circuits of electronic components have become denser and miniaturized, causing a sharp increase in the heat generation per unit area of electronic devices. The heat pipe technology is suitable for solving the heat dissipation problem of the current electronic devices because of its high efficiency, compactness, flexibility and reliable material. It has gradually become the mainstream heat dissipation method of current electronic devices. The thermal official system - hollow back seal body, usually including the shell, the wick (fine structure) close to the inner wall of the shell, and the Guardian of the seal, the end is the evaporation end (heated end), and the other At one end, the cold suspect (cold (four), according to the response) should be able to arrange an insulating section between the evaporation end and the condensation end. During operation, the green absorbs latent heat at the evaporation end by internal reading fluid phase change, and rapidly passes through the vapor flow. The heat is transported away from the condensation end of the heat, resulting in a small temperature difference between the front and rear ends, and the purpose of rapidly transferring a large amount of heat energy. The heat transfer capacity of the heat pipe has exceeded the current known thermal conductivity metal' and can reach 7 of the good metal heat transfer coefficient ( M (8) times. Therefore, the heat pipe can use the temperature difference between the two ends to complete the whole heat transfer process without adding material, which can reduce the additional electricity. Among them, the working fluid acts as a heat transfer medium throughout the heat transfer process, and its performance and filling amount on the heat pipe The heat transfer efficiency has a great influence. Usually, the working fluid is pure water or methanol, and the filling amount needs to be combined with the capillary ratio of the capillary of the inner wall of the heat pipe, and the porosity of the capillary structure is larger. Flow rate = read large, heat pipe heat transfer efficiency is higher, and vice versa. Therefore, for the selected capillary mouth 』 = the amount of liquid body is not strong, · will increase the capillary structure burden = liquid, will be in the mail. The condensing end 'forms a partial liquid blockage, so that the condensation of the part is too much fluid filling, and the liquid stream condensed at the condensation end will be divided into 1: the working fluid cannot completely fill the pores in the capillary structure, resulting in g The drying process reduces the heat transfer capacity of the heat pipe. The prior art provides a quantitative filling device for the heat pipe working fluid, mainly consisting of an air enthalpy 1317407: a condenser, a condensate collection bottle, and a false lock valve. A condensate discharge valve and a row of steam conduits are formed. The upper end of the condenser is an air discharge valve for discharging air or non-condensable gas, and the lower end of the condenser is a condensate collection bottle, _ for the working fluid vapor to be condensed and assembled. The bottle body has a scale on the surface and a condensate discharge valve below, so that the working fluid can be discharged from the condensate collection bottle for recycling in the above structure, between the condenser and the condensate collection bottle, There is a row of steam conduits, one end of which is connected into the condenser, and the other end is connected with the false lock valve, so that the steam or gas discharged from the filling tube under the false lock valve can flow into the condenser. After the preheating of the heat pipe container is slightly more than the designed working fluid, the dummy locking valve is slightly opened, and the heat pipe container is heated by a gas flame or an electric heater to boil the working fluid in the container and discharge the steam; The valve regulates the discharge of steam, and the steam and air enter the condenser through the exhaust conduit. • The steam condenses into a liquid, which flows down the inner wall of the condenser and collects in the collecting bottle; the air collects at the top of the condenser and is discharged by the top drain valve; The volume of the condensate is read by the measurement of the condensate collection bottle to determine when to close the filling tube of the heat pipe container, thereby achieving quantitative filling of the working fluid. However, when the liquid filling is stopped, the liquid filling port of the heat pipe to the collecting bottle There will be more working fluid vapor remaining in the channel tube, and the amount of heat pipe filling liquid is usually a few milliliters, so that the actual filling amount of the heat pipe and the expected filling amount are greatly different. The device is difficult to achieve precise control of the filling quantity of working fluid. In view of this, it is necessary to provide a vacuum filling device capable of accurately controlling the amount of liquid filled. [Explanation] Hereinafter, a vacuum filling liquid which can precisely control the liquid filling amount will be described by way of examples. And a vacuum filling method will be described by way of examples. In order to achieve the above, a vacuum filling device is provided, comprising: a liquid conveying system communicating with a container to be filled for conveying liquid into a container to be filled; a vacuuming system 'which is to be charged The liquid container is in communication for drawing a vacuum inside the container to be filled;
-貼靠駐液容ϋ外殼設置之冷衫統，驗賴填充至待充液容器之 液體。 D 其中’所述真空充液裝置進-步包括一三通閥，其分別與待充液容 6 1317407 還可進一步包括一與抽真空系 器、液體輪送系統以及抽真空系統相通； 統相並聯之施壓裝置。 所述真空充液裝置之管道系統設置成“H”轨道型。 所述=輸送^、待紐容^ '抛”統物赚置分脉 軌^之四角位置’且所述液體輸送系統與待充液容器位於同一 軌3^ ’抽真空系統與施壓裝置位於同一軌道上。 所述三通閥設置於液體輸Κ贿待歧容^之間之軌道上。 所述真空充液裝置進-步包括-加熱裝置，給鮮加熱。 所述抽真空系統包括一真空泵以及一真空計量儀。- A cold shirt attached to the housing of the liquid holding chamber is used to check the liquid filled into the container to be filled. D wherein the vacuum filling device further comprises a three-way valve, and the liquid filling capacity 6 1317407 respectively may further comprise a vacuum system, a liquid transfer system and a vacuum system; Parallel pressure device. The piping system of the vacuum filling device is set to an "H" rail type. The = transport ^, to be filled ^ ^ "throw" to earn the position of the four corners of the sub-track ^ and the liquid delivery system and the container to be filled in the same rail 3 ^ 'vacuum system and pressure device located On the same track, the three-way valve is disposed on a track between the liquid supply and the bribe. The vacuum filling device further includes a heating device for fresh heating. The vacuuming system includes a Vacuum pump and a vacuum meter.
所述液體輸送系統包括-儲液容器、—微刻度毛細管以及一微閱。 所述微刻度毛細管最小刻度範圍爲0.(^4毫升。 所述冷衫統之致冷介質翻乾冰、液氮、Μ昂或鹽水。 所述待充液容器選用熱管。 以及，一種真空充液方法，其包括以下步驟： 通過一液體輸送系統將預填充液體注入待充液容器内； 利用一冷凍系統來凍結輸入待充液容器内之液體； 通過-抽真空系統將待充液容器抽成真S，織將其密封。 優選地，於待充液容器内通入液體之前，對其進行預熱。 ，將滯 優選地，於將預填充液體輸入待充液容器内之後，鼓入氣黯 留於管勒奴奴縣雜_。 孔體 所述待充液容器選用熱管。 、與先前技術相比，本實_之真空充液裝置可適用於各種熱管裝置 或''他真工待充液谷Θ充液，以熱管爲例，由於液體充人熱管後被 ’ 當，熱管抽真空時。東結之工作流體凝固於待充液容11内，可避 ^，排氣時液體揮發而造成之誤差，從而固歧體輸人量，使得液體 填充量可精確地控制^ μ另外:液體輸送系統包括一具有定量刻度或微刻度之毛細管，通過 °又置毛細㈣度之精確性，以便更加精確地控制統容量；而管道系統 1317407 =置成“Η”執道型’使真空充液裝置結構優化，操作簡便能避免管 逼内殘留祕，減少綠量轉，從而提高控麵管綠容量之精確性。 現有真空統方法多制填充紐 '減及密封兩段式處理狹 而，在抽氣過程中，已填充之液體容易揮發，導致液體填充量難以控制 本實施例提供之真找液方法可祕工t上各種熱管裝置或其他真空 待充液容器之充液，以熱管爲例，在熱管内輸入液體後，通過冷;東系統 將其减結’可避免抽真空操作時卫作流體揮發而造成之誤差，從而 現液體填充量之精確控制。 ' 【實施方式】 下面結合附圖對本實施例作進一步詳細說明。 請參閲第-圖，爲本實施例提供之真空充液裝置結構示意圖。真空 充液裝置1包括-液體輸送系統1G，其與待充液容㈣接通，以輪^ 液體至待充液容器20内；-抽真空系統3〇，用於待充液容器2〇内部 抽真空H貼靠待充液容糾殼設置之冷衫統⑼，床結填 充至待充液容S 2G之工作流體22。其中，所述真空充液裝置丨還包括 -三通閥5〇 ’其分雛與㈣輸送线1G、抽真^ 3g以及待充液 容器20相導通。另外’待充液容器2〇可包括各種熱管裝置或其他真处 充液之裝置’而鮮可爲單管賴管、平板雜管、循環回路型献， 分離式熱管與Μ熱”㈣形絲麵之歸。本實關·單管型 所述液體輸送系統10包括-儲液容器u ; 一毛細管12，作 輸送系統10之輸出管道；以及一位於儲液容器u與毛細管12之間之 微閥13 ’作爲液體輸送系、统10之輸&管道之控制開關。其巾，毛細其 12 -端與微心3相接’另一端與三通閥5〇相接；從而使儲液容器^ =之液體可由關13控繼人毛細管12，然後毛細管12内液體°可 三通閥50控制進入熱管μ。毛細管12管壁標有微刻冑，翔 由上至下，最小刻度範圍爲αοΜ毫升，此方法優點在於;;適=各種 谷里液體之觀：也可採狀量毛細管之方式，此時毛崎Η 端-個刻麟，需將三關50至刻度賴之㈣容量設成職 1317407The liquid delivery system includes a reservoir, a microscale capillary, and a micro-read. The minimum scale range of the micro-scale capillary is 0. (^4 ml. The cold medium of the cold-shirt is turned over ice, liquid nitrogen, sputum or salt water. The liquid to be filled container is selected as a heat pipe. a liquid method comprising the steps of: injecting a pre-filled liquid into a liquid to be filled container by a liquid delivery system; freezing a liquid input into the liquid to be filled container by using a freezing system; and drawing the liquid filling container by a vacuuming system It is formed into a seal S. Preferably, it is preheated before the liquid is introduced into the liquid filling container. Preferably, after the pre-filled liquid is introduced into the liquid filling container, the drum is swelled. The gas is retained in the tube of the Lenus County. The hole body is selected from the heat pipe. Compared with the prior art, the vacuum filling device of the present invention can be applied to various heat pipe devices or '' For example, the liquid pipe is filled with liquid, taking the heat pipe as an example, because the liquid is filled with the heat pipe, when the heat pipe is evacuated, the working fluid of the east knot is solidified in the liquid to be filled 11 to avoid the liquid during the exhaust. Solidification caused by volatilization The amount of liquid is such that the liquid filling amount can be accurately controlled. In addition, the liquid delivery system includes a capillary tube having a quantitative scale or a micro scale, and the capillary (four degrees) precision is adopted by ° to more precisely control the system capacity; System 1317407 = set to "Η" obscured type 'to optimize the structure of the vacuum filling device, easy to operate can avoid the residual force in the tube, reduce the green volume, and thus improve the accuracy of the green volume of the control tube. Existing vacuum method The multi-filled filling 'supplement and sealing two-stage treatment is narrow. In the process of pumping, the filled liquid is easily volatilized, which makes it difficult to control the liquid filling amount. The true liquid seeking method provided in this embodiment can be used for various heat pipes. The liquid filling of the device or other vacuum filling liquid container, taking the heat pipe as an example, after the liquid is input into the heat pipe, passing through the cold; the east system reduces the knot to avoid the error caused by the volatilization of the fluid during the vacuum operation, thereby The precise control of the liquid filling amount is now given. [Embodiment] The present embodiment will be further described in detail below with reference to the accompanying drawings. Please refer to the figure, which is provided for the embodiment. Schematic diagram of the empty liquid filling device 1. The vacuum filling device 1 comprises a liquid delivery system 1G which is connected to the liquid to be filled (4) to turn the liquid into the container 20 to be filled; the vacuuming system 3 is used for The inside of the liquid filling container 2 is evacuated to the cold shirt system (9) provided by the liquid filling chamber, and the bed is filled to the working fluid 22 to be filled with the liquid capacity S 2G. The three-way valve 5〇' is divided into (4) conveying line 1G, pumping true 3g, and the liquid to be filled container 20. The 'liquid filling container 2' may include various heat pipe devices or other true liquid filling. The device can be used as a single tube, a flat tube, a circulation circuit type, a separate heat pipe and a heat (4). The liquid delivery system 10 of the present and single tube type includes a liquid container u; a capillary tube 12 as an output conduit for the delivery system 10; and a microvalve 13' between the reservoir container u and the capillary tube 12 as a control switch for the liquid delivery system, the system 10 and the conduit. The towel has a capillary end 12-end connected to the micro-center 3, and the other end is connected to the three-way valve 5〇; so that the liquid of the liquid storage container can be controlled by the closing capillary 13 and then the liquid in the capillary 12 The three-way valve 50 can be controlled to enter the heat pipe μ. The wall of the capillary tube 12 is marked with micro-engraved 胄, from top to bottom, the minimum scale range is αοΜ ml, the advantage of this method is;; suitable = the view of various liquids in the valley: the shape of the capillary can also be used, at this time Rugged end - a carved, need to set the three off 50 to the scale of the (four) capacity set to serve 1317407
可’或者將定量毛細管設置於三通閥5〇與熱管 操作較爲簡便，但填充量單一。 21間之通道上，此方法 所述抽真空系統30包括-真空泵31以及_真 ㈣與三通閥50相連，真空計量儀32設於真 義〇' = 通道上任意位置。另外，於真空泵31與三通間5Q _道； 施壓裝置60，其可向三通閥5G至熱管21之間之導管峨 因 而可採Ml«航_裝置，靖朗於轉之液 内，減少充液誤差。 *' 爲使整個系統結構優化’本實施例將真空充液 置成“H”執道型’即將液體輸送系統1〇、熱管21、抽真空系統 三通閥5G以及施壓裝置60兩兩之_互連接m統^置成“h” 轨道型，且使液體輸送系統10、熱管21、抽真空系統3〇、施壓裝置6〇 分別位於“H”軌道型之四角位置’如第一圖所示，液體輸送系統ι〇、 熱管21錄Η Μ-軌道上，減短液體輸送路程；而將施壓裝置 6〇位於“Η”型另一軌道上，使該軌道上之導管與中 純氣體通道，而進入施壓裝置60之管道與進入抽真空系統％之^管相 並聯。通職“η”軌道型管道祕，好道之總通道與氣體通道相 互獨立，僅於通往熱管-通道可切換通人液趙或氣體或抽氣，能避免管 道内殘留液體’減少統#誤差，以更精確地控雜管充液容量。It is easy to set the quantitative capillary to the three-way valve 5〇 and the heat pipe, but the filling amount is single. In the 21 passages, the vacuuming system 30 includes a vacuum pump 31 and a _ true (four) connected to the three-way valve 50, and the vacuum gauge 32 is disposed at any position on the true 〇' = channel. In addition, between the vacuum pump 31 and the tee 5Q _ channel; the pressure device 60, which can be connected to the conduit between the three-way valve 5G and the heat pipe 21, and thus can be used for the Ml «air_device, Jing Lang in the liquid, Reduce the filling error. *' In order to optimize the overall system structure', the vacuum filling is set to "H". The liquid delivery system 1〇, the heat pipe 21, the vacuum system three-way valve 5G, and the pressure applying device 60 are used. _ Interconnecting m system ^ is set to "h" orbital type, and the liquid conveying system 10, the heat pipe 21, the vacuuming system 3〇, and the pressing device 6〇 are respectively located at the four corners of the "H" orbital type as shown in the first figure. As shown, the liquid transport system ι〇, the heat pipe 21 is recorded on the Μ-track, and the liquid transport path is shortened; and the pressure device 6 is placed on the other track of the “Η” type, so that the duct on the track and the medium pure The gas passage, and the pipe entering the pressure applying device 60 is connected in parallel with the tube entering the vacuuming system. The "η" orbital type of pipeline is the same as the gas channel. The total channel and the gas channel are independent of each other. Only the heat pipe-channel can be switched to pass the liquid or gas or pumping, which can avoid residual liquid in the pipe. Error to more accurately control the filling capacity of the pipe.
所述冷凍系統40採用介質冷凍系統，致冷介質可選用乾冰液氮、 氟利昂或鹽水等’本實施例採用—液氮冷;東槽41 ^冷;東時至少將熱 管21 —端置於該液氮冷凍槽41之液氮42部分；由於熱管21管殼爲熱 導體，因而，即使液氮42僅作用於熱管21—端(通常爲熱管蒸發端）， 液氮42也能凍結積於該端以及吸納於熱管21之毛細吸液芯幻内之工 作流韹22。優選地’於熱管21外殼還設有一加熱裝置7〇，如可採用纏 繞於熱管21外殼局部之加熱絲，其於熱管21内輸入工作流體22之前 對熱管21預先加熱’以排除熱管21内之水蒸汽以及吸附於毛細吸液芯 23内之液體，從而避免因爲這些雜質之存在，佔用工作流體22之預填 空間，從而造成工作流體22之過量’降低熱管21之熱傳效率。 1317407The freezing system 40 adopts a medium freezing system, and the cooling medium may be selected from dry ice liquid nitrogen, freon or brine, etc. 'This embodiment adopts liquid nitrogen cooling; the east tank is 41 ^ cold; at the east, at least the heat pipe 21 is placed at the end. The liquid nitrogen 42 of the liquid nitrogen freezing tank 41; since the heat pipe 21 is a heat conductor, even if the liquid nitrogen 42 acts only on the end of the heat pipe 21 (usually the heat pipe evaporation end), the liquid nitrogen 42 can be frozen and accumulated. The end and the working flow 22 absorbed by the capillary wick in the heat pipe 21. Preferably, a heating device 7 is further disposed on the outer casing of the heat pipe 21. For example, a heating wire wound around a portion of the outer casing of the heat pipe 21 may be used, and the heat pipe 21 is preheated before the working fluid 22 is input into the heat pipe 21 to exclude the heat pipe 21. The water vapor and the liquid adsorbed in the capillary wick 23 avoid the pre-filling space of the working fluid 22 due to the presence of these impurities, thereby causing an excess of the working fluid 22 to reduce the heat transfer efficiency of the heat pipe 21. 1317407
請—併參閱第_圖與第二圖，說明本實施例提供之真空充液方法， 其包括以下具體操作過程：輸液過程，即通過-液體輸送系統將預填充 液體/主入>f寺充液谷益内，即利用一冷床系統來康結輪入待充液容器内之 液體；真空密封過程’即通過—抽真空系統將待充液容器抽成真空狄 後將其密封。 ⑴注液過程：輸送預填充液體至待充液容器内^通過液體輸送系統 1^將預填充液體輸入熱管21 N，往熱管21㈣入液體之前，可對熱 =21預熱，以排除熱管21内，尤其係毛細吸液芯23内之液體或水蒸 汽丄再將微閥13打開，使儲液容器11中液體輸入毛細管12内，直^ 預定刻度；然後開通三通閥50 ’使液體緩緩流入熱管21内同時注意 下降之刻度’達到預填充量即截斷三通閥50與毛細管12内之導通，完 成年液過程。另外，於輸人雜至熱f 21之後，糊-賊裝置6〇 ^ -通閥5G至熱管21之間之導管内鼓人氣體’以將滞留於管道内辟之液 體吹入熱管21内。施壓裝置6。可採用空氣果或鼓風機等裝置。土 (2)康結過程：；東結輸人待充液容器内之液鱧。液體輸人敎管21内 後，即成爲熱管21内之工作流體22。通過冷康槽41 0之液 輸入熱管21内之工作流體，將其凍結凝固於熱管21內。 ⑶真空密封過程：將練容^減真空，紐將其密封 真空泵31 ’將熱管21抽成真空，其真空度低於齡a，一 1.33xl〇.3Pa ;然後將熱管21開口端密封，使熱管2 端:導 熱管體’即完雜管21之真技液操作。 ％㈣之導 上述操作過程可廣泛應用於工業上各種真空待充液容器之真㈡ 液，尤其適合於熱管内填充讀流體。以熱管21真空綠爲…由方 液體充入熱管21後財結，當對熱管21抽真辦，雜之工作产葡 22凝固於熱管21内，可避免其於真空排氣時揮發而產生之 二 可對液體填充量進行精確控制。同時，液體輸送系統1()採用―且文 量刻度或微财之毛細管，通過設置毛細管刻度之精確性以更_ 地控制級容量。糾，通聯“H”軌道型管道纽，使真 置結構優化，操作簡便，並能避免管道内殘留液體，減少充液量誤差'， 1317407 以更精確地控制熱管充液容量。 【圖式簡單說明】 第一圖係本實施例之真空充液裝置結構示意圖。 第二圖係本實施例之真空充液方法操作流程圖。 【主要元件符號說明】 充液裝置 1 液體輸送系統 10 儲液容器 11 毛細管. 12 微閥 13 待充液容器 20 熱管 21 工作流體 22 毛細吸液芯 23 抽真空系統 30 真空泵 31 真空計量儀 32 冷;東系統 40 液氮冷凍槽 41 液氮 42 三通閥 50 施壓裝置 60 加熱裝置 70 11Please - and refer to the first and second figures, to illustrate the vacuum filling method provided by the embodiment, which comprises the following specific operation process: the infusion process, that is, the pre-filled liquid / main entrance > through the liquid delivery system In the liquid-filled valley, a cold bed system is used to join the liquid in the liquid to be filled; the vacuum sealing process 'that is, through the vacuum system, draws the liquid filling container into a vacuum and seals it. (1) Injecting process: conveying the pre-filled liquid into the liquid to be filled container, and inputting the pre-filled liquid into the heat pipe 21 N through the liquid conveying system 1 to preheat the heat = 21 to remove the heat pipe 21 before the heat pipe 21 (four) enters the liquid. Inside, especially the liquid or water vapor in the capillary wick 23, the microvalve 13 is opened, so that the liquid in the liquid storage container 11 is input into the capillary 12, and is straightened to a predetermined scale; then the three-way valve 50' is opened to slow the liquid. Slowly flow into the heat pipe 21 while paying attention to the descending scale 'to reach the pre-filling amount, that is, to cut off the conduction between the three-way valve 50 and the capillary 12 to complete the annual liquid process. Further, after the input to the heat f 21 , the paste-thief device 6 〇 ^ - the valve gas 5G between the valve 5G and the heat pipe 21 is blown into the heat pipe 21 by the liquid retained in the pipe. Pressure device 6. A device such as an air fruit or a blower can be used. Soil (2) Kang Jie process:; East knot loses liquid helium in the liquid container. After the liquid is introduced into the manifold 21, it becomes the working fluid 22 in the heat pipe 21. The working fluid in the heat pipe 21 is input through the liquid of the cold bath 41 0, and is frozen and solidified in the heat pipe 21. (3) Vacuum sealing process: the vacuuming force will be reduced, and the vacuum pump 31' will be used to vacuum the heat pipe 21, and the vacuum degree is lower than the age a, 1.33xl 〇.3Pa; then the open end of the heat pipe 21 is sealed, so that The end of the heat pipe 2: the heat pipe body 'that is the real skill liquid operation of the pipe 21 . The guidance of the above (4) can be widely applied to the real (two) liquid of various vacuum filling containers in the industry, especially suitable for filling the reading fluid in the heat pipe. The heat pipe 21 is vacuum green...the liquid is filled into the heat pipe 21 and then the fuel is solidified. When the heat pipe 21 is pumped, the miscellaneous work product 22 is solidified in the heat pipe 21 to avoid the volatilization during vacuum evacuation. Second, the liquid filling amount can be precisely controlled. At the same time, the liquid delivery system 1() uses a capillary of the “quantity scale” or “micro-capacity” to control the stage capacity by setting the accuracy of the capillary scale. Correction, communication "H" orbital type pipe, optimize the real structure, easy to operate, and can avoid residual liquid in the pipe, reduce the error of liquid filling ', 1317407 to more accurately control the heat filling capacity of the heat pipe. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic view showing the structure of a vacuum filling device of this embodiment. The second drawing is a flow chart of the operation of the vacuum filling method of the present embodiment. [Main component symbol description] Liquid filling device 1 Liquid delivery system 10 Liquid storage container 11 Capillary. 12 Micro valve 13 Liquid filling container 20 Heat pipe 21 Working fluid 22 Capillary fluid core 23 Vacuum system 30 Vacuum pump 31 Vacuum gauge 32 Cold East system 40 liquid nitrogen freezing tank 41 liquid nitrogen 42 three-way valve 50 pressure device 60 heating device 70 11