1317143 九、發明說明： 【發明所屬之技術領域】 尤其涉及一種採用奈米碳管 本發明涉及-種場發射裝置及其製備方法 線作發射體之場發射裝置及其製備方法。 【先前技徇^ 子源之職絲碳細銜最爲深入研 之,1、端表面⑼具有極優異之導電性能，以及幾乎接近理雜限 面積^表面積越小，其局部電場越集中），同時還具有化學性質 穩疋、機械強度南以及導熱性能好等許多優異 理想場發射材料f 、 TT以係目前敢 厗ΐίΓ官場發射I置至少包括—陰極支律體及作爲發射體之奈米碳管 f，該奈練管祕成縫極續m絲錄職赠極支撑體 α成好u碳管’絲米綠祕轉目定败胤^，驗方法簡單， 准雜作不易且費時.’尤其係操縱直徑約lnm左右之奈米碳管幾乎係不 可能的，故’此種方法較複雜，不易操作。 原位生長法係献支樓體上鍵上金屬催化劑，然後通過化學氣相雜或 電_電#方法於支樓體上直接生長出奈米碳管，離方法雖然操作簡單， 奈米碳管鼓碰n；接職好，惟，絲料與續體之結合能力較 弱’使用時奈米碳管易脫落或被電場力拔出，從而導致發射體損壞。 有n於此，提供-種易於操作且發射體與支樓體結合牢固之場發射裝置 及其製備方法實爲必要。 【發明内容】 下面將以若干實施例說明一種易於操作且發射體與支撲體結合牢固之 場發射裝置及其製備方法。 一種場發射裝置，其包括一支撲體，導電漿料，以及至少一段奈米碳管 線，其中’該導電漿料將奈米碳管線固定在支撑體上。 以及，一種場發射裝置之製備方法，其包括以下步驟： 提供—支撐體； -1317143 用導電漿料將至少—段奈米碳; 燒結’使奈米碳管線近—步固定於支撑體上。 道較於先前技術，所述場發射裝置及其製備方法，藉由於-支擇體上用 ’料粘住再燒結之方式固定至少一段奈米碳管線，其方法簡單、操作性 ί ’且所得場發射裝置之奈米碳管線發射體與支撐體之間結合牢固，於較大 電場力作用下也不易被拔出。 【實施方式】 增強Γ"操作性’本實施例考慮採用具有宏之奈米碳管結構作爲1317143 IX. Description of the invention: [Technical field to which the invention pertains] In particular, the invention relates to a field emission device using a carbon nanotube. The invention relates to a field emission device and a preparation method thereof. [The previous technical 徇 ^ 源 source of the job silk carbon fine-grained the most in-depth study, 1, the end surface (9) has excellent electrical conductivity, and almost close to the area of the control area ^ surface area is smaller, the local electric field is more concentrated) At the same time, it has many excellent ideal field emission materials such as chemical stability, mechanical strength and good thermal conductivity. f, TT is currently used to carry out at least the cathode-cathed body and the nanocarbon as the emitter. Tube f, the nai training tube secret into the seam is extremely continuous m silk recording job to support the pole support α into a good u carbon tube 'Si rice green secret turn to defeat 胤 ^, the test method is simple, quasi-mixed is not easy and time-consuming. In particular, it is almost impossible to manipulate a carbon nanotube having a diameter of about 1 nm, so this method is complicated and difficult to handle. The in-situ growth method is to support the metal catalyst on the upper body of the building, and then directly grow the carbon nanotubes on the support body by chemical gas heterogeneous or electric_electric# method. Although the method is simple, the carbon nanotubes are simple to operate. Drum touch n; pick up, but the combination of silk and continuation is weaker. 'When using, the carbon nanotubes are easy to fall off or are pulled out by electric force, which causes the emitter to be damaged. In view of this, it is necessary to provide a field emission device which is easy to handle and which is firmly combined with the support body and a preparation method thereof. SUMMARY OF THE INVENTION A field emission device that is easy to handle and has a strong combination of an emitter and a baffle body and a method of fabricating the same will be described below with reference to a number of embodiments. A field emission device comprising a bump body, a conductive paste, and at least one piece of carbon nanotube wire, wherein the conductive paste fixes the nanocarbon line to the support. And a method of fabricating a field emission device comprising the steps of: providing a support; -1317143 using at least a portion of nanocarbon with a conductive paste; sintering ' fixing the nanocarbon line to the support. Compared with the prior art, the field emission device and the preparation method thereof have the advantages of simple method and operability by fixing the at least one nano carbon line by means of material sticking and re-sintering. The nano-carbon line emitter of the field emission device is firmly bonded to the support body, and is not easily pulled out under the action of a large electric field force. [Embodiment] Enhanced Γ "Operationality" This embodiment considers the use of a carbon nanotube structure having a macro as
3。將不米碳管組裝成宏崎之結構對於奈米碳管之宏咖具有重 要思義。 、… __二守善等从版响2002,419:801，SpinninS Sinuous CNT Yams 二文^露了從-個超順排奈米碳管陣列中可以拉出一根連績純奈杀碳管 ώ 種'^ ^轉由很拜行的奸絲紐之細賴1成，這些細絲由藉 如紗瓦爾力…於一起之奈米碳管組成。奈米碳管線之直徑大小取決於其 之數目，其可以由拉出奈米碳管線工具⑽尺寸決定，端部越尖拉 出=_田。例如’從一個高度爲1〇〇㈣、面積爲—超順排奈米碳管陣 产根1〇m長、直徑爲2〇〇Mm的奈米碳管線，從而使得對奈米 碳官進行宏觀操作成爲可能β 提供之場發射裝置包括一支樓體，導電漿料，以及一段奈米 太官、、中’該導電漿料將奈米碳管線固定於所述支律體上。上述之一段 管線係將-根由超順排奈来碳管陣列拉出之奈米碳管線用 成複數段中之一段。 該場發雜置之具體實施方式爲：請參見第一圖，一場發射裝置10，包 ^一支撐體12 ’固定於該支樓體12頂部表面上之一段奈米碳管線14，以及 料卿_後將 所述支微12可選軸、錄、辨金屬材料，本實施例巾，支律體12 選用銅；該支樓體12可爲圓柱翁 ' 庀方种弋且士姊.. 12爲圓柱體。 舄圓枉體正方體或長方體，本實施例中，支撐體3. The assembly of the non-carbon tubes into the structure of Hongsaki has important implications for the macro-carbon of the carbon nanotubes. , __二守善等 from the version of 2002, 419: 801, SpinninS Sinuous CNT Yams Erwen ^ exposed from a super-shun tanned carbon nanotube array can pull out a continuous performance pure carbon killing tube ώ The kind of '^ ^ turns to the very fine of the wicked New Zealand, which is made up of the carbon nanotubes. The diameter of the nanocarbon pipeline depends on its number, which can be determined by the size of the pull-out nanocarbon line tool (10), and the tip is pulled out sharply = _ field. For example, 'from a height of 1 〇〇 (four), the area is - super-sequential carbon nanotubes, the length of 1 〇 m long, the diameter of 2 〇〇 Mm of the nano carbon pipeline, so that the nano carbon official macro Operation becomes possible. The field-providing device provided by β includes a building body, a conductive paste, and a section of the conductive paste that fixes the nanocarbon line to the branch body. One of the above-mentioned pipelines uses one of a plurality of sections of the nanocarbon line from which the root is pulled out of the super-shunned carbon nanotube array. The specific implementation manner of the field is as follows: Please refer to the first figure, a launching device 10, a support body 12' fixed to a section of the nano-carbon pipeline 14 on the top surface of the branch body 12, and After the _, the micro 12 can select the shaft, record, and discriminate the metal material. In this embodiment, the support body 12 is made of copper; the support body 12 can be a column 翁 ' 庀 弋 弋 弋 姊 姊 . . . . 12 12 It is a cylinder. a round body or a rectangular parallelepiped, in this embodiment, a support
1317143 所述-段絲碳餘14之 igg 例φ，太半妒其城，， 且^馬200μπι，本實施 J中不』反官線14的長度爲60mm，直徑爲1〇〇帅。〜 所述導電漿料爲一層銀衆料。 H將具體描述該場發射裝置1G之製備方法，其包括以下步驟： ⑴k供一支樓體12 〇 踹：ΓΓ:高度爲10〇Mm、積爲lcm2之超順排奈米碳管陣列，利用-1R° η师⑼子’從上物噴排奈米碳管陣列中拉出一根長度爲 m、直Τ〇0吨之奈米碳管線，並用刀片將該根奈米碳管 60mm之複數段。 ⑶將步驟⑵所切得之複數段奈米碳管線中乏一段奈米碳管線14之一 端垂直於支樓體12之頂部表面用銀漿料預先枯住。 (4)將步驟(3)所得找有奈米碳管線14之支標體12於· 55阢下燒 結30分鐘’進而獲得奈米碳管線u固定於支撐體12上之場發射裝置. 其中’燒結過程應避免於氧氣含量過高之氣氛中進行，因於純氧氣氣氛 中奈米碳管線即使於室溫下也易概#，故，選擇於空氣、氮氣、氣氣以及 細5分氧氣的氣體之-種或其多種混合氣體中進斤燒結為佳。 該場發射裝置10，於與陽碰離爲10咖、電壓在50(H000V的條件下， 發射電流可達50mA 〇 當然’可以理解’於同樣條件下’若需要大電流，可以採用複數段奈米 碳官線作爲發射體’如第二圖所示’本發明之第二實施例採用複數段奈米碳 管線24用一層導電銀漿料26固定於支撐體22上，並於同樣條件下燒結固 定，得到一場發射裝置20» ° 第三實施例中也係採用複數段奈米碳管線作爲發射體，請參見第三圖， 將複數長度爲100麵、直徑爲200μιη奈米碳管線34之一端用一層導電銀漿 料36粘於一支擇體32靠近頂部之側表面上，並燒結固定，得到一場發射裝 置30。這種方式可充分利用支揮體32側表面之表面積，從而提高奈米碳管 線34與支撲體32之接觸面積，使其固定更牢固，電接觸性更好。 相較於先前技術，所述場發射裝置及其製備方法，藉由於一支撑體上用 導電漿料粘住再燒結之方式固定至少一段奈米碳管線，其方法簡單、操作性 J317143 · 強；且所得場發射裝置之奈米碳管線發射體與支撐體之間結合牢固 電場力作用下也不易被拔出。 、 綜上所述，本發明確已符合發a月專利要件，爰依法提出專利中請。惟， 以上所述者僅為本發明之較佳實施例，舉凡熟悉本案技藝之人士，於援依本 案發明精神所作之等效修飾或變化，皆應包含於以下之申請專利範圍内。 【圖式簡單說明】 第一圖係本發明第一實施例中採用一段奈米碳管線作爲發射體之場發 射裝置立體結構示意圖。 第二圖係本發明第一實施例中製備之採用若干段奈米碳管線作爲發射 胃夂場發射裝置立體結構示意圖。 、 第三圖係本發明第三實施例中製備之場發射裝置立體結構示意圖。 【主要元件符號說明】 場發射裝置 10、20、30 支撐趙 12、22、32 奈米碳管線 14、24、34 導電漿料 16、26、361317143 The segment of the carbon residue of the igg case of φ, too half 妒 妒, , and ^ horse 200μπι, this implementation of J in the anti-official line 14 length of 60mm, the diameter of 1 handsome. ~ The conductive paste is a layer of silver. H will specifically describe the preparation method of the field emission device 1G, which includes the following steps: (1) k for a building body 12 〇踹: ΓΓ: a super-shoring carbon nanotube array having a height of 10 〇Mm and a product of 1 cm 2 -1R° η师(9)子' Pull out a nano carbon line of length m and straight Τ〇0 from the array of carbon nanotubes, and use a blade to make the carbon nanotube 60mm segment. (3) One end of the defective carbon nanotube line 14 in the plurality of sections of the carbon nanotube line cut in the step (2) is perpendicular to the top surface of the branch body 12 and preliminarily dried with silver paste. (4) The holder 12 of the nanocarbon-purified pipeline 14 obtained in the step (3) is sintered at 55 阢 for 30 minutes to obtain a field emission device in which the nano carbon line u is fixed on the support 12. The sintering process should be avoided in an atmosphere with too high oxygen content. Because the carbon nanotubes in pure oxygen atmosphere are easy to be used at room temperature, they are selected from air, nitrogen, gas and fine 5 oxygen. It is preferred that the gas is sintered in a variety of gases or a plurality of mixed gases thereof. The field emission device 10 can be used for a range of 10 mA and a voltage of 50 (H000V, the emission current can reach 50 mA. Of course, 'under the same conditions', if a large current is required, a plurality of segments can be used. The carbon carbon official line is used as an emitter as shown in the second figure. The second embodiment of the present invention uses a plurality of nanocarbon lines 24 to be fixed to the support 22 with a layer of conductive silver paste 26, and is sintered under the same conditions. Fixing, obtaining a launching device 20» ° In the third embodiment, a plurality of nano carbon pipelines are also used as the emitter. Please refer to the third figure, which has a length of 100 faces and a diameter of 200 μm n carbon carbon line 34. A layer of conductive silver paste 36 is adhered to the side surface of a body 32 near the top, and sintered to obtain a field emission device 30. This way, the surface area of the side surface of the body 32 can be fully utilized, thereby enhancing the nanometer. The contact area of the carbon line 34 and the baffle body 32 makes the fixing more firm and the electrical contact is better. Compared with the prior art, the field emission device and the preparation method thereof are provided by using a conductive paste on a support body. The method of re-sintering fixes at least one section of the nanocarbon pipeline, and the method is simple and the operation is J317143 · strong; and the nano-carbon pipeline emitter of the obtained field emission device and the support body are not easily pulled out under the strong electric force. In summary, the present invention has indeed met the requirements for the issuance of a month patent, and the patent is filed according to law. However, the above is only a preferred embodiment of the present invention, and those who are familiar with the skill of the present invention Equivalent modifications or variations made in accordance with the spirit of the present invention should be included in the following patent application. [Simplified Description of the Drawings] The first figure is a first embodiment of the present invention using a section of nanocarbon pipeline as an emitter. A schematic diagram of a three-dimensional structure of a field emission device is used in the first embodiment of the present invention. The third embodiment is a three-dimensional structure of the field emission field device. Schematic diagram of the three-dimensional structure of the field emission device prepared in the middle. [Description of main component symbols] Field emission devices 10, 20, 30 support Zhao 12, 22, 32 nano carbon pipelines 1 4, 24, 34 conductive paste 16, 26, 36
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