1317141 九、發明說明 【發明所屬之技術領域】 且特別是有關於一 « 本發明是有關於一種電漿放電骏置， 可延長電極之使用壽命的電漿放電裝置1317141 IX. Description of the invention [Technical field to which the invention pertains] and particularly relates to a «The present invention relates to a plasma discharge device capable of extending the life of an electrode
前技術】 電水的組成包括有電子、離子以 中’正負雷丼沾奴n 電中性粒子。在電漿 止貞電何的數目大致相等，故—妒 κ 受電磁場影鲤。雷將从出又視為呈電中性’且 艰琢〜。電漿的形成可經由高量 宙射绫、呰λ綠 ν , 此里粒子、電磁波（如宇 由耵綠1外線、χ射線等）對氣體揸 于 5¾ fj- a* -, 擎或對氣體施予高溫， 次對乳體％予外加電場來形成。— 所需之务髀、S 〜 又電水產生的方式，是將 汁而之軋體通入一容器内，於某— A- r, 虱麼下，加入直流電源、 衬頻（Rad10 Frequency)或微波^ ^ ^ — 〇Wave)旎$來源，利用電 谷式（Capacuive)、電感式（Inducti ~ 4祖子與波交互作用的方 式，使氣體崩潰（Breakdown)游離，即為電漿。簡而言之，電 漿的產生乃是將能量施於氣體，使其受激電離。 電漿炬（Plasma Torch)是一種常見的常壓電漿，其原理係 將電漿此里聚集在一小的體積範圍内，將璇流工作氣體部分 離子化’使工作氣體能產生活化反應，提高反應性。應用電 水炬之電漿放電裝置中’工作氣體以旋渦流動（Swirling Flow) 的方式導入放電電極之間，以使電衆柱（Plasma Column)能穩 定在電漿通道的中央，進而減少能*散失到管壁，並能造成 電漿柱的收縮，以提高電漿溫度及工作氣體的游離程度。 由於放電電極為放射電漿柱之構件，因此在電漿放電裝 6 1317141 置運轉時’放電電極之溫度會大幅提升，而這樣的高溫衝擊 會致使放電電極劣化’嚴重影響放電電極之使用壽命。另一 方面’目前為了增強電場之強度，以使電漿容易解離，，般 j的設計係將放電電極變尖。然而，放電電極之直徑越細，會 •嚴重影響放電電極之使用壽命，進而導致電漿放電裝置之可 罪度與性此下降。有鑑於此，亟需一種電漿放電裝置，玎有 效延長放電電極之使用壽命。 |【發明内容】 因此’本發明之目的就是在提供一種電漿放電裝置，以 鉑金屬（Pt)合金來作為放電電極之材料，由於鉑合金既耐高溫 又抗氧化，因此可有效延長放電電極之使用壽命。 本發明之另一目的是在提供一種電漿放電裝置，以鉑與 铑（Rh)、铪（Ha)、錯（Zr)、鈀（pd)、金（Au)、銥（ir)、或鎢（w) 所开_·/成的&金來製作放電電極，由於銷與铑、給、錯、把、 金銥或鎢的合金不僅耐高溫又抗氧化，且硬度高，因此 可使放電電極之使用壽命大為延長。 本發明的又一目的是在提供一種電漿放電裝置，其放電 電極之直徑大於實質3mm，再搭配财高溫且抗氧化之電極材 料的選用，可更為有效地延長放電電極之使用壽+，而確保 電漿放電裝置之可靠度與效能。 根據本發明之上述目Μ，提出一種電裝放電裝置，至少 包括：-外電極，此外電極内具有一腔室，其中腔室之末端 0又有開σ，一絕緣層，位於上述腔室之内壁上丨以及一放 1317141 電電極’設於外電極内之腔室的前端，並相對於腔室之開口， 其中放電電極之材料為鉑金屬合金。 根據本發明之目的，提出一種電漿放電裝置，至少包括： 一外電極，外電極内具有一腔室，其中腔室之末端設有一開 口； 一絕緣層，位於腔室之内壁上；以及一放電電極，設於 外電極内之腔室的前端，並相對於腔室之開口，其中此放電 電極之直徑大於實質3mm。 依照本發明一較佳實施例，上述放電電極之材料為鉑合 金，杈佳為鉑與鍺、铪、錯、鈀、金、銥、或鎢之合金。 由於本發明係採用鉑合金來作為放電電極及外電極之開 口旁之材料’由於鉑合金耐高溫又抗氧化，且硬度高，因此 可有效延長放電電極之使用壽命，確保電漿放電裝置之操作 。口質另外，更可配合將放電電極之直徑擴大至實質3爪爪以 上’進一步延長放電電極之使用壽命。 【實施方式】 本發明揭露—種電漿放電裝置，係採用鉑合金來製作2 電電極，因此可延長放電電極之使用壽命，並大幅改善電姜 放電裝置之操作穩定性。為了使本發明之敘述更加詳盡與， 備，可筝照下列描述並配合第丨圖之圖示。 請參照第1圖，其繪示依照本發明一較佳實施例的一逢 電漿放電裝置之示意圖。此電漿放電裝置ι〇〇主要包括外$ 極102、放電電極1〇6、以及絕緣層1()4，其中放電電極μ 通常亦稱為内電極。外電極1〇2通常為管狀結帛，因此外$ 1317141 極102之内部具有腔室11〇。一般而言，腔室11〇之末端漸縮， 且腔室11 0之末端處設有開口丨丨8，以利電漿射出。絕緣層i 則批覆在外電極102之腔室110的前端内側管壁上。放電電 極106設於腔室11〇中，且通常位於腔室11〇之前端而與末端 處之開口 11 8相對，其中放電電極丨〇6通常係一柱狀體。放 電電極106可射出電漿柱1〇8通過腔室u〇而從腔室1〇8之 末端開口 118射出。電漿放電裝置1〇〇另外更具有平板ιΐ4 没置於外電極102之腔室110的前端，其中平板114穿過放電 電極106之根部’且平板114之兩端分別與絕緣層—相接 合，以將放電電極106固定在腔室11〇之内部。平板ιΐ4 一般 具有多個進氣口 116，經由這些進氣口 116，工作氣體112可 輸入腔室11 0中。 本發明之電漿放電裝置100在運作時’由放電電極106 射出電漿柱108,在此同時，由平板114之進氣口 116導入工 作氣體112。電漿柱108穿過外電極1〇2之腔冑11〇,而在外 電極102末端之開口 118的區域解離工作氣體ιΐ2，以活化工 作氣體112。工作氣體112 '經電聚解離活化後，經由外電極— 之末端開口 118而喷出電漿放電裝置1〇〇 ,以供應用。 由於在電漿放電裝置中’放電電極係用以放射電漿柱之 =件□此隨著裝置使用次數的增加，放電電極受到高溫衝 的影響也二為嚴重，導致放電電極劣化，進而縮減了放電 以°之使用可命。有鐘於此，在本發明中’放電電才虽1 之 =係採㈣金屬之合金。在本發明之較佳實施例中，放電 1〇6之材料及外電極102之開σ m旁之材料係採用始 1317141 與铑、铪、鍅、鈀、今、钬 .. 、 銀、或鎢的合金。鉑與铑、姶、锆、 纪、金、銀、或鶴的合今 金之材質除了具有同於鉑金屬之耐高 狐以及抗氧化的特性’更具有高硬度之優勢，其中鉑與铑、 給、錯·、名巴、金、銀、或隹^ ώΑ人人 a鹤的合金之硬度大於鉑金屬之硬度。 因此，相較於翻金屬，以銘與錢、給、錯、！巴、金、銥、或 鶴的合金來作為放電電極1〇6及開〇 ιΐ8旁之材料，在延長 放電電極1〇6及開口 118旁之材料的效果上，更具效用。放 電電極雨及開〇 118旁之材料的使用壽命獲得大幅提升， 可進一步提高電漿放電裝f 丄 裝置⑽之壽命。 。。之操作性成，延長電漿放電 在本發明中，放電電極1G6之直i 12G較佳係控制在實 質:士以上。由於放電電極1〇6的尺寸亦會影響放電電極⑽ 之使用哥命，因此除了採用始合金來製作放電電極106外， 本發明更可搭配將放雷雷#〗+ 士/ 于孜電電極106之直徑120控制在大於實質 mm’以更進一步地延長放電電極ι〇6之操作 放電裝置1〇〇之操作穩定度。 ¥保電水 值得注意的一點是，在本發 姑雷驻罢士甘个上述所提之延長電漿 放：裝置中之放電電極的使用壽命的兩種方式令，亦即採用 金材料來製作放電電極與使放電電極之直徑大於實質 一可單獨採用或兩種方式搭配使用，放= 極之使用壽命的功效。 』延長放電電 木本發明較佳實施例可知，本發明之優點就是因為 利』鈾合全置係以翻合金來作為放電電極之材料， 金兼，、耐南溫以及抗氧化的特性，因此可達到有效 10 1317141 延長放電電極之使用壽命的功效。 由上述本發明較佳實施例可知，本發明之另-優點就是 因為本發明之電漿放電裝置係採鉑與鍺、铪、錯、鈀、金、 銥、或鶴的合金來製作放電電極，由於翻與錄、給、錯、把、 金、銥、或鎢的合金不僅具有耐高溫又抗氧化的特性，更具 有硬度高的優勢，因此可使放電電極之使用壽命獲得更有效 地延長。 由上述本發明較佳實施例可知，本發明之又—優點就是 因為在本發明之電漿放電裝置中，放電電極之直徑大於實質 3mm’因此可延長放電電極對高溫之耐受力，而達到延長放電 電極之使用壽命的㈣。另外，再搭配时高溫 極材料，例如麵合金，的選用，可更為有效地延長；= 之使用哥命，進一步麵f衆放電裳置之運作卩靠度與操作 效能。 、” —雖然本發明已以—較佳實施例揭露如上，然其並非用以 限定本發明，任何在此技術領域中具有通常知識者，在不脫 離本發明之精神和範圍内，當可作各種之更動與潤飾，因此 本發明之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖係繪示依照本發明一較佳實施例的—種電漿放 裝置之示意圖。 【主要元件符號說明】 1317141 100 :電漿放電裝置 104 :絕緣層 I 0 8 :電漿柱 II 2 :工作氣體 116 :進氣口 120 :直徑 102 :外電極 I 0 6 :放電電極 II 0 :腔室 11 4 :平板 118 :開口Pre-Technology] The composition of electro-hydraulic water includes electrons, ions, and medium-positive-negative thunder. The number of plasma stops is roughly equal, so 妒 κ is affected by the electromagnetic field. The mine will be regarded as being electrically neutral and difficult. The formation of plasma can be carried out by high-volume 绫, 呰λ green ν, where particles, electromagnetic waves (such as yu 耵 green 1 outer line, xenon ray, etc.) gas 53 53 53⁄4 fj- a* -, or gas At high temperatures, the secondary emulsion is formed by applying an external electric field. — The required 髀, S 〜 又 又 又 又 又 又 又 又 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电Or microwave ^ ^ ^ — 〇 Wave) 旎 $ source, using the electric ceramic (Capacuive), inductive (Inducti ~ 4 progenitor and wave interaction, the gas collapse (Breakdown) free, that is, plasma. In other words, the plasma is generated by applying energy to the gas to be excited and ionized. Plasma Torch is a common normal piezoelectric slurry, and its principle is to collect the plasma in a small In the volume range, the turbulent working gas is partially ionized, so that the working gas can generate an activation reaction and improve the reactivity. In the plasma discharge device of the electric water torch, the working gas is introduced into the discharge by Swirling Flow. Between the electrodes, the Plasma Column can be stabilized in the center of the plasma channel, thereby reducing the energy loss to the tube wall and causing the plasma column to shrink, thereby increasing the plasma temperature and the separation of the working gas. Degree. Because the discharge electrode is placed The components of the plasma column, so when the plasma discharge device 6 1317141 is set to operate, the temperature of the discharge electrode will be greatly increased, and such high temperature impact will cause the discharge electrode to deteriorate, which seriously affects the service life of the discharge electrode. In order to enhance the strength of the electric field so that the plasma is easily dissociated, the design of the circuit is to sharpen the discharge electrode. However, the finer the diameter of the discharge electrode will seriously affect the service life of the discharge electrode, which in turn leads to the plasma discharge device. In view of the above, there is a need for a plasma discharge device that effectively extends the service life of the discharge electrode. [Invention] Therefore, the object of the present invention is to provide a plasma discharge device. Platinum metal (Pt) alloy is used as the material of the discharge electrode, and since the platinum alloy is resistant to high temperature and oxidation, the service life of the discharge electrode can be effectively extended. Another object of the present invention is to provide a plasma discharge device, Platinum and rhodium (Rh), hafnium (Ha), mal (Zr), palladium (pd), gold (Au), iridium (ir), or tungsten (w) The discharge electrode is fabricated, and since the alloy of the pin and the crucible, the feed, the wrong, the handle, the metal or the tungsten is not only resistant to high temperature and oxidation, but also has high hardness, the service life of the discharge electrode can be greatly prolonged. Is to provide a plasma discharge device, the diameter of the discharge electrode is greater than the substantial 3mm, and then with the choice of high temperature and anti-oxidation electrode material, can more effectively extend the life of the discharge electrode +, and ensure the plasma discharge device According to the above object of the present invention, an electrical discharge device is provided, which comprises at least: an external electrode, and further has a chamber in the electrode, wherein the end 0 of the chamber has an open σ, an insulating layer The inner wall of the chamber is disposed on the inner wall of the chamber and a 1317141 electric electrode is disposed at the front end of the chamber disposed in the outer electrode and opposite to the opening of the chamber, wherein the material of the discharge electrode is a platinum metal alloy. According to an object of the present invention, a plasma discharge device is provided, comprising: at least: an external electrode having a chamber therein, wherein an opening is provided at an end of the chamber; an insulating layer is located on an inner wall of the chamber; and The discharge electrode is disposed at a front end of the chamber in the outer electrode and opposite to the opening of the chamber, wherein the diameter of the discharge electrode is greater than substantially 3 mm. According to a preferred embodiment of the present invention, the material of the discharge electrode is a platinum alloy, preferably an alloy of platinum and rhodium, ruthenium, iridium, palladium, gold, rhodium, or tungsten. Since the present invention uses a platinum alloy as a material adjacent to the opening of the discharge electrode and the outer electrode, the platinum alloy is resistant to high temperature and oxidation, and has high hardness, thereby effectively extending the service life of the discharge electrode and ensuring the operation of the plasma discharge device. . In addition, the mouth can be further extended to extend the life of the discharge electrode by expanding the diameter of the discharge electrode to substantially 3 claws. [Embodiment] The present invention discloses a plasma discharge device which uses a platinum alloy to fabricate two electric electrodes, thereby prolonging the service life of the discharge electrode and greatly improving the operational stability of the electric ginger discharge device. In order to make the description of the present invention more detailed and versatile, the following description can be made in conjunction with the drawings of the drawings. Please refer to FIG. 1 , which is a schematic diagram of a plasma discharge device according to a preferred embodiment of the present invention. The plasma discharge device ι 〇〇 mainly includes an outer electrode 102, a discharge electrode 1 〇 6, and an insulating layer 1 () 4, wherein the discharge electrode μ is also commonly referred to as an internal electrode. The outer electrode 1〇2 is usually a tubular crucible, so that the inside of the outer $1317141 pole 102 has a chamber 11〇. Generally, the end of the chamber 11 is tapered, and an opening 丨丨 8 is provided at the end of the chamber 110 for the plasma to be ejected. The insulating layer i is then applied to the inner wall of the front end of the chamber 110 of the outer electrode 102. The discharge electrode 106 is disposed in the chamber 11A and is generally located at the front end of the chamber 11〇 opposite the opening 11 8 at the end, wherein the discharge electrode 6 is generally a columnar body. The discharge electrode 106 can be ejected from the plasma column 1〇8 through the chamber u〇 to exit from the end opening 118 of the chamber 1〇8. The plasma discharge device 1 further has a flat plate ι 4 which is not placed at the front end of the chamber 110 of the outer electrode 102, wherein the flat plate 114 passes through the root portion of the discharge electrode 106 and the two ends of the flat plate 114 are respectively joined to the insulating layer. The discharge electrode 106 is fixed inside the chamber 11A. The flat panel 4 generally has a plurality of air inlets 116 through which the working gas 112 can be input into the chamber 110. When the plasma discharge device 100 of the present invention is in operation, the discharge column 108 is ejected from the discharge electrode 106, and at the same time, the working gas 112 is introduced from the intake port 116 of the plate 114. The plasma column 108 passes through the cavity 11 of the outer electrode 1〇2, and the region of the opening 118 at the end of the outer electrode 102 dissociates the working gas ι2 to activate the working gas 112. After the working gas 112' is activated by electropolymerization, the plasma discharge device 1 is ejected through the end opening 118 of the outer electrode for supply. In the plasma discharge device, the 'discharge electrode is used to radiate the column of the plasma column. As the number of times of use of the device increases, the discharge electrode is also affected by the high temperature rush, which is also serious, resulting in deterioration of the discharge electrode and further reduction. Discharge can be used in °. In this case, in the present invention, the discharge electric power is only one of the alloys of the (four) metal. In a preferred embodiment of the present invention, the material of the discharge 1 〇 6 and the material adjacent to the opening σ m of the external electrode 102 are made of 1317141 and 铑, 铪, 鍅, palladium, yttrium, yttrium, silver, or tungsten. Alloy. Platinum and yttrium, lanthanum, zirconium, gold, silver, or cranes have the advantages of high hardness, such as platinum and rhodium, in addition to the high fox resistance and anti-oxidation properties of platinum metal. The hardness of the alloy of a given, wrong, and famous Ba, gold, silver, or 隹^ ώΑ人 a crane is greater than the hardness of the platinum metal. Therefore, compared with turning metal, with Ming, money, give, wrong! The alloy of bar, gold, bismuth, or crane is used as the material next to the discharge electrode 1〇6 and the opening ΐ8, which is more effective in extending the material of the discharge electrode 1〇6 and the opening 118. The life of the material next to the discharge electrode rain and the opening 118 is greatly improved, and the life of the plasma discharge device (10) can be further improved. . . The operability is to extend the plasma discharge. In the present invention, the direct i 12G of the discharge electrode 1G6 is preferably controlled to be substantially more than ±. Since the size of the discharge electrode 1〇6 also affects the use of the discharge electrode (10), in addition to using the initial alloy to form the discharge electrode 106, the present invention can be combined with the lightning discharge #〗+士/ 孜电电106 The diameter 120 is controlled to be greater than the substantial mm' to further extend the operational stability of the discharge electrode 1 of the discharge electrode ι6. The noteworthy point of the power-saving water is that in the above-mentioned extension of the plasma discharge, the two methods of the service life of the discharge electrode in the device, that is, the use of gold material The discharge electrode and the diameter of the discharge electrode are larger than the actual one, and can be used alone or in combination of two ways, and the effect of the life of the pole is greatly reduced. EXTENDED DISCHARGE BEILA According to a preferred embodiment of the present invention, the advantage of the present invention is that the uranium alloy is used as a material for the discharge electrode, the gold alloy, the south temperature resistance, and the oxidation resistance. It can achieve the effect of effectively extending the service life of the discharge electrode by 10 1317141. According to the preferred embodiment of the present invention described above, another advantage of the present invention is that the plasma discharge device of the present invention is formed by using an alloy of platinum and ruthenium, rhodium, ruthenium, palladium, gold, rhodium, or a crane to form a discharge electrode. Since the alloy of turning, feeding, wrong, putting, gold, tantalum, or tungsten not only has high temperature resistance and oxidation resistance, but also has the advantage of high hardness, the service life of the discharge electrode can be more effectively extended. According to the preferred embodiment of the present invention, the advantage of the present invention is that in the plasma discharge device of the present invention, the diameter of the discharge electrode is larger than substantially 3 mm, thereby prolonging the resistance of the discharge electrode to high temperature. Extend the service life of the discharge electrode (4). In addition, the selection of high-temperature materials, such as surface alloys, can be extended more effectively; = the use of sacred life, further surface f-discharge operation and reliability. The present invention has been disclosed in the above-described preferred embodiments, and is not intended to limit the invention, and any one of ordinary skill in the art can be made without departing from the spirit and scope of the invention. The scope of protection of the present invention is defined by the scope of the appended claims. [FIG. 1] FIG. 1 is a diagram showing a type of electricity according to a preferred embodiment of the present invention. Schematic diagram of the slurry discharge device. [Main component symbol description] 1317141 100 : Plasma discharge device 104 : Insulation layer I 0 8 : Plasma column II 2 : Working gas 116 : Air inlet 120 : Diameter 102 : External electrode I 0 6 : discharge electrode II 0 : chamber 11 4 : plate 118 : opening
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