TWI313891B - - Google Patents

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Publication number
TWI313891B
TWI313891B TW92114690A TW92114690A TWI313891B TW I313891 B TWI313891 B TW I313891B TW 92114690 A TW92114690 A TW 92114690A TW 92114690 A TW92114690 A TW 92114690A TW I313891 B TWI313891 B TW I313891B
Authority
TW
Taiwan
Prior art keywords
layer
dielectric layer
bump
ion
rewinding
Prior art date
Application number
TW92114690A
Other languages
English (en)
Chinese (zh)
Other versions
TW200426923A (en
Inventor
Yu Hsin-Mei
Chou Ken-Shen
Hsu Shun-Liang
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW92114690A priority Critical patent/TW200426923A/zh
Publication of TW200426923A publication Critical patent/TW200426923A/zh
Application granted granted Critical
Publication of TWI313891B publication Critical patent/TWI313891B/zh

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW92114690A 2003-05-30 2003-05-30 Method for recovering surface characteristics of polymer dielectric and bump re-distribution process TW200426923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92114690A TW200426923A (en) 2003-05-30 2003-05-30 Method for recovering surface characteristics of polymer dielectric and bump re-distribution process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92114690A TW200426923A (en) 2003-05-30 2003-05-30 Method for recovering surface characteristics of polymer dielectric and bump re-distribution process

Publications (2)

Publication Number Publication Date
TW200426923A TW200426923A (en) 2004-12-01
TWI313891B true TWI313891B (ja) 2009-08-21

Family

ID=45072855

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92114690A TW200426923A (en) 2003-05-30 2003-05-30 Method for recovering surface characteristics of polymer dielectric and bump re-distribution process

Country Status (1)

Country Link
TW (1) TW200426923A (ja)

Also Published As

Publication number Publication date
TW200426923A (en) 2004-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees