1310231 . 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種半導體製造設備之改良，特別是有關於 在定位卡栓(Kinematic Coupling pin或稱KC pin)頂端加裝滾珠機 構，降低摩擦力，進而降低微粒污染及F〇uP晶圓傳送各底座損 傷的設計。 、 【先别技術】 如熟習該項技藝者所知，在300mm晶圓廠中，具有3〇〇mm 晶圓傳送盒(Front Opening Unified P〇d，F〇up)、晶圓栽人機 Port Umt，LPU)及微環境(Minienvi_ent，臟）的晶圓載卸模 組（Material Loading Module)為目前主要的晶圓载卸設備，其中 FOUP晶圓傳送盒專作晶圓儲存及傳輸之用，而咖邮載入機 則是用來開啟FOUP關傳送対門職置，使得齡於咖^ 籲曰曰曰圓傳送盒内之晶圓得以經由一機械手臂而載入製程機台。 FOUP晶_送盒是儲存和傳送過程巾械晶圓的密封容 器，主要用來隔離晶圓及晶圓架與周圍環境接觸，以避免存於内 部之晶圓遭受污染。通常_晶圓傳送盒内存有25片晶圓’其 編號方式乃由下往上’最下方為位置卜而最上方為位置乃，各 位置的晶®皆會被架設於微魏内之機械手敎賴人製程 ;隹分制叙。 1310231 LPU晶圓載入機乃是用來開啟FOUP晶圓傳送盒：的邊門的機 構，使儲存於FOUP晶圓傳送盒内之晶圓得以載入製程機台，其 主要由FOUP置放台(FOUP Stage)及前開機械介面(Fr〇nt_〇pening Interface Mechanism)所組成。 然而，在習知技藝中，機台loadport的定位卡栓(KCpin)容易 與FOUP晶圓傳送盒的底座產生摩擦，長久下來定位卡栓及機台 loadport容易產生微粒污染且FOUP晶圓傳送盒的底座也容易因此 損傷。 【發明内容】 因此，本發明之目的即在提供一種改良的LPU晶圓載入機上 的定位卡栓(KC Pin)設計’以改善前述習知技藝中所產生的微粒污 染等問題。 根據本發明之較佳實施例，本發明提供一種具有改良定位卡 栓的晶圓載入設備，包含有一 FOUP置放台(F〇up stage);以及至 少一凸出於該FOUP置放台的定位卡栓(kc pin);其中該定位卡栓 具有一滾珠機構，設置於該定位卡栓的頂部位置，並由一軸承(ball bearing)配合支撐該滾珠機構，使其可以自由滾動。 為了使貴審查委員能更進一步了解本發明之特徵及技術内 容，請參閱以下有關本發明之詳細說明與附圖。然而所附圖式僅 6 1310231 供參考與說明用，並非用來對本發明加以限制者。 【實施方式】</ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> < Desc/Clms Page number> Friction, which in turn reduces particulate contamination and the design of the F〇uP wafer to transport the various bases. [Before Technology] As known to those skilled in the art, in the 300mm fab, there are 3〇〇mm wafer transfer boxes (Front Opening Unified P〇d, F〇up), wafer planting port Umt, LPU) and microenvironment (Minienvi_ent, dirty) wafer loading module (Material Loading Module) is currently the main wafer loading and unloading equipment, of which FOUP wafer cassette is used for wafer storage and transmission, and The coffee mail loader is used to open the FOUP transfer transfer door, so that the wafers in the color transfer box can be loaded into the process machine via a robot arm. The FOUP crystal cassette is a sealed container for storing and transporting process wafers. It is mainly used to isolate the wafer and wafer holder from contact with the surrounding environment to avoid contamination of the internal wafer. Usually, there are 25 wafers in the wafer transfer box. The numbering method is from bottom to top. The bottom position is the position and the top position is the position. The crystals of each position are installed in the micro-wei robot.敎 人 制 制 隹 隹; The 1310231 LPU Wafer Loader is the mechanism for opening the side door of the FOUP wafer cassette: the wafers stored in the FOUP wafer cassette are loaded into the processing machine, which is mainly used by the FOUP placement table ( FOUP Stage) and the front-opening mechanical interface (Fr〇nt_〇pening Interface Mechanism). However, in the prior art, the positioning pin (KCpin) of the loadport of the machine is easy to generate friction with the base of the FOUP wafer transfer box, and the positioning pin and the loadport of the machine are prone to particle contamination and the FOUP wafer transfer box for a long time. The base is also susceptible to damage. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an improved positioning pin (KC Pin) design on an LPU wafer loader to improve problems such as particulate contamination generated in the prior art. According to a preferred embodiment of the present invention, there is provided a wafer loading apparatus having an improved positioning clip, comprising a FOUP stage; and at least one protruding from the FOUP stage The positioning card plug has a ball mechanism, and is disposed at a top position of the positioning card pin, and is supported by a ball bearing to support the ball mechanism so as to be freely rollable. In order to provide a further understanding of the features and technical aspects of the present invention, the following detailed description of the invention and the accompanying drawings. However, the drawings are only for the purpose of reference and description, and are not intended to limit the invention. [Embodiment]
請參閱第1圖，其繪示的是本發明具有改良之定位卡栓(Kc Pm)設計的LPU晶圓載入設備的示意圖。如第i圖所示，LPlease refer to FIG. 1 , which is a schematic diagram of an LPU wafer loading device with an improved positioning card plug (Kc Pm ) design according to the present invention. As shown in Figure i, L
日Q 圓載入設備1包括有一 FOUP置放台(FOUP Stage)2、三個凸出於 FOUP置放台2的定位卡栓(KC pin)3以及設於定位卡栓3 一侧的 鲁感應裝置4。其中，定位卡栓3係鎖死固定在F〇up置放台2上， 不會移動，感應裝置4係用來確定foup晶圓傳送盒以經定位在 FOUP置放台2上。LPU關載人設備丨可以是機台的晶圓載入 界面，例如，蝕刻機台、沈積機台等，但亦可以是晶圓儲存設備 的晶圓載入界面。 儲存於FOUP晶圓傳送盒(圖未示)内之晶圓載入製程機台，主 要就疋由FOUP置放台2及前開機械介面(Front-opening Interface 馨 Mechanism)來完成。基本上’整個啟門過程可由四個過程來說明， 首先，工作人員會將裝滿晶圓之FOUP晶圓傳送盒置於F〇up置 放台2上，並利用定位卡栓3將F〇UP晶圓傳送盒固定，接著， FOUP置放台2會帶動FOUP晶圓傳送盒往前移動，直到F〇UP 曰曰圓傳送孟邊門上之卡检與前開機械界面5之卡检緊密連结為 止，再來，前開機械界面旋轉卡栓開啟FOUP晶圓傳送盒邊門， 並開始往後移動至定位，使得F〇UP晶圓傳送盒之邊門被帶開， 最後則是整個前開機械介面往下收進LPU晶圓載入機内。 7 1310231 在習知技藝中，工作人員會將裝滿晶圓之F〇up晶圓傳送盒 置於FOUP置放台2時，常常不能一次到位，而需要以人力稍^ 挪動FOUP晶圓傳送盒，使定位卡栓3插入F〇up晶圓傳送盒底 座上相對應的粒孔巾，但如此—來，機# 的定位卡检容 易與FOUP _傳妙的底麵生雜，長灯蚊斜检及機 台badport容易產生微粒污染且F〇up曰曰曰圓傳送盒的底座也容易 因為與定位卡栓3撞擊而損傷。 為解決上述習知技藝的問題，本發明提出一種新颖的定位卡 栓設計。請參閱第2圖及第3圖，其中第2 _示的是本發明改 良之定位卡栓_，第3 _補是本發微良之定位卡检 的剖面示意圖。如第2圖及第3圖所示，本發明改良之雜卡检3 具有-滾珠機構3卜設置於定位卡栓3的頂部位置，並由一抽承 _bearing)34配合支躲珠機㈣，使其可以自由滾動。 如第3騎示，本發贼良之定位卡栓3料⑽兩個部位， 栓32係鎖關定在赚置放台2上，具有螺紋，而外 縣件33係套鎖袖侧定栓32上，喊珠 =在外懈33财。若有魏，物縣㈣拆下更 根據本發明之較佳實施例，為了避免產生微㈣染，滾珠機 8 1310231 構31係以耐磨陶瓷材料或其它同等堅硬耐耗損之材料製作而成 的，軸承34亦為非金屬材質。内部固定栓32與外部套件幻可以 是由不鏽鋼材料所製成。 經過這樣的改良，當工作人員將裝滿晶圓之F〇up晶圓傳送 益置於FOUP置放台2時，即使不能一次到位，此時僅需以滑動 方式使FOUP晶圓傳送盒稍微移動，就可以讓定位卡栓3插入 FOUP晶圓傳送盒絲上姉朗定位财，而機纟1轉加的定 位卡栓不會與FOUP晶_送盒魏誠生縣，定位卡检及機 台loadport不會產生微粒肖染，且F⑽）晶麟送盒的底座也不 會再與定位卡栓3撞擊而損傷。 以上所述僅為本發明之較佳實關，凡依本發明申請專利範 圍所做之鱗變化與修飾，皆應屬本發明之涵蓋範圍。 【圖式簡單說明】 第！圖繪示的是本發明具有改良之定位卡雖c pin)設計的咖 晶圓載入設備的示意圖。 第2圖繪補是本發敝良之定位卡栓_視圖。 第3圖纷示的是本發明改良之定位卡栓的剖面示意圖。 【主要元件符號說明】 LPU晶圓載入設備 2 F0UP置放台 9 1310231 3 定位卡栓 4 感應裝置 5 前開機械界面 31 滾珠機構 32 内部固定栓 33 外部套件 34 轴承 10The day Q circular loading device 1 includes a FOUP stage 2, three positioning card pins (KC pin) 3 protruding from the FOUP setting table 2, and a lu sensor provided on the side of the positioning card pin 3. Device 4. The positioning clip 3 is locked and fixed on the F〇up placement table 2 and does not move. The sensing device 4 is used to determine the foup wafer transfer cassette to be positioned on the FOUP placement table 2. The LPU off-loader device can be the wafer loading interface of the machine, for example, an etching machine, a deposition machine, etc., but can also be a wafer loading interface of the wafer storage device. The wafer loading process machine stored in the FOUP wafer transfer cassette (not shown) is mainly completed by the FOUP placement table 2 and the front-opening interface (Front-opening Interface). Basically, the whole process of opening the door can be explained by four processes. First, the staff will place the FOUP wafer transfer cassette filled with wafers on the F〇up placement table 2, and use the positioning card pin 3 to The UP wafer transfer cassette is fixed, and then, the FOUP placement table 2 will drive the FOUP wafer transfer cassette to move forward until the card check on the F〇UP round transfer door and the front open mechanical interface 5 are closely linked. So far, the front opening mechanical interface rotary latch opens the FOUP wafer transfer box side door and starts moving backwards to the positioning, so that the side door of the F〇UP wafer transfer box is brought open, and finally the entire front opening mechanical interface is down. Into the LPU wafer loader. 7 1310231 In the prior art, when the F会将up wafer transfer cassette filled with wafers is placed on the FOUP placement table 2, the staff often cannot be in place at one time, and it is necessary to manually move the FOUP wafer transfer cassette. , the positioning card plug 3 is inserted into the corresponding granule towel on the base of the F〇up wafer transfer box, but so - the positioning card check of the machine # is easy to be mixed with the FOUP _ Chuan Miao, the long light mosquito The inspection and the station badport are prone to particulate contamination and the base of the F〇up曰曰曰 round transfer box is also easily damaged by the impact with the positioning clip 3. In order to solve the above problems of the prior art, the present invention proposes a novel positioning latch design. Please refer to Fig. 2 and Fig. 3, wherein the second _ shows the locating pin _ improved by the present invention, and the third _ complement is a schematic cross-sectional view of the positioning card of the present invention. As shown in FIG. 2 and FIG. 3, the improved card check 3 of the present invention has a ball mechanism 3 disposed at the top position of the positioning pin 3, and is supported by a _bearing 34 to support the dowel machine (4). So that it can roll freely. For example, the third ride shows that the thief's positioning card plug 3 material (10) two parts, the bolt 32 series lock is set on the earning table 2, with thread, and the outer county piece 33 series sleeve lock sleeve side pin 32 On, shouting beads = 33 yuan outside. If there is Wei, the county (four) is removed according to the preferred embodiment of the present invention, in order to avoid micro (four) dyeing, the ball machine 8 1310231 structure 31 is made of wear-resistant ceramic material or other equally hard and wear-resistant materials. The bearing 34 is also made of a non-metallic material. The inner fixing bolt 32 and the outer kit can be made of stainless steel. With this improvement, when the staff puts the F〇up wafer transfer benefit of filling the wafer on the FOUP placement table 2, even if it cannot be placed once, it is only necessary to slide the FOUP wafer transfer cassette slightly. , the positioning card plug 3 can be inserted into the FOUP wafer transfer box wire to locate the wealth, and the positioning card plug of the machine 1 turn plus will not be with the FOUP crystal _ send box Wei Chengsheng County, positioning card inspection and machine loadport not The particle smear is generated, and the base of the F(10)) crystal splicing box is no longer damaged by the impact of the positioning clip 3. The above description is only the preferred embodiment of the present invention, and all scale changes and modifications made in accordance with the scope of the present invention should be covered by the present invention. [Simple illustration] The first! The figure shows a schematic diagram of a coffee wafer loading device with an improved positioning card of the present invention. The picture in Fig. 2 is the positioning card plug _ view of this hair. Figure 3 is a schematic cross-sectional view of the improved positioning card plug of the present invention. [Main component symbol description] LPU wafer loading device 2 F0UP placement table 9 1310231 3 Positioning clamp 4 Induction device 5 Front opening mechanical interface 31 Ball mechanism 32 Internal fixing bolt 33 External kit 34 Bearing 10