1306089 18lI6twf.doc/g 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種模仁及其去除此模仁之保護層 的方法，且特別是有關於一種模造玻璃的模仁以 θ 模仁之保護層的方法。 承 【先前技術】1306089 18lI6twf.doc/g IX. Description of the Invention: [Technical Field] The present invention relates to a mold core and a method for removing the protective layer of the mold core, and in particular to a mold for molding a glass with θ The method of protecting the layer of the mold. [Prior Art]
近年來數位相機等光學產品的市場迅速發展，客戶 成像品質的要求也逐漸提高，300萬以上晝素已是必備的 需求，而預計手機相機對晝素的要求也將提高至百萬書 以上。-般塑膠射出的光學鏡片無法達到所需的^品 質:必須使用玻璃鏡片。然而，由於產品的發展趨 輕薄短小，相對地對鏡片的尺寸要求也很小。對於非球面 的小^寸玻璃鏡片而言’以抛光研磨的加卫方式製造不 難度南且速度慢’而且不符合經濟效益，因此以模 式生產非球面的小尺寸玻璃鏡片已七見在及未來必_ _勢。而模造玻璃（ρ職·lding細）技術中壯= 哥命的長短_著-對模仁可壓鑄的鏡片數目多寡 玻璃鏡片的成本是否能降低的關鍵就在於此。巧、化 習知提升模仁壽命主要的方法就是採用在模仁 面進打硬膜（ha—ng)披覆的表面改f技術。各 時間之後，表面的硬臈損壞時，僅需將硬膜U 再重新覆上另-層新的硬膜，即可繼續使用之。云除 以貴金屬合金為主的硬膜，在高溫時不 學反應、具有極錢抗氧化性及耐練，且具有^ = 5 1306089 I8116twf.doc/g 所形成之合金所組成之族 化石夕及碳偏I。 、鮮。底材之㈣包括不銹鋼、碳 依照本發明實施例 包括-中間層，其位於保:層，:==卜 之材質係選自於Si、Ir、ft 〃月層間且此中間層In recent years, the market for optical products such as digital cameras has developed rapidly, and the requirements for image quality of customers have gradually increased. More than 3 million elements are necessary requirements, and the demand for mobile phones for mobile phones is expected to increase to more than one million books. - Optical lenses from plastics do not meet the required quality: glass lenses must be used. However, as the development of the product tends to be thin and light, the size requirements of the lens are relatively small. For aspherical small-sized glass lenses, 'the process of polishing and grinding is not difficult to make and the speed is slow' and it is not economical. Therefore, the production of aspherical small-sized glass lenses in the pattern has been seen and will be in the future. Must _ _ potential. And the mold glass (ρ · lding fine) technology in the strong = the length of the life of the _ _ - the number of lenses can be die-cast die can be the key to the cost of glass lenses can be reduced here. The main method of improving the life of the mold is to use the surface modification technique of the hard film (ha-ng) on the surface of the mold. After each time, when the hard surface of the surface is damaged, it is only necessary to re-attach the hard film U to another new layer of the hard film, and then continue to use it. The cloud is divided into a hard film mainly composed of a precious metal alloy, which does not learn reaction at high temperature, has excellent oxidation resistance and resistance, and has a family of fossils composed of an alloy formed by ^ 5 1306089 I8116twf.doc/g. Carbon offset I. ,fresh. The substrate (4) comprises stainless steel, carbon, according to an embodiment of the invention, including an intermediate layer, which is located on the layer::==b, the material is selected from the Si, Ir, ft layer and the intermediate layer
Ta中二種或二種以上之材 本發明又提出成之合金所組成之族群。 護層的方法，此方法是進述拉造玻璃之模仁中的保 同時剝除保護層。若二=去膜層之製程’藉以 的同時去除之。、彳'具有巾間層’則可在㈣去膜層 濕式’上_㈣層之製程為一 二以疋―乾式餘刻製程。濕式餘刻製程可使用 液可以是氫氧化鉀水溶液；而酸液可以是 :刻I?及硫酸Ϊ*合液或是氫氟酸及硝酸混合液。乾式Two or more materials in Ta The present invention further proposes a group of alloys. A method of covering a layer in which the protective layer is simultaneously removed in the mold of the drawn glass. If the process of the second = de-filming layer is removed, it can be removed at the same time. , 彳 'with a towel layer' can be used in the (four) de-filming layer wet _ _ (four) layer process is a two-to-dry-dry process. The wet residual engraving process can be a potassium hydroxide aqueous solution; and the acid solution can be: encapsulating I? and barium sulfate* or a mixture of hydrofluoric acid and nitric acid. Dry
正離心内通人惰性氣體，使惰性氣體解離成 、’ ^、轟擊妹，錄刻保護層及去膜層。在另一 和乾式綱製程可在腔室通人惰性氣體以及可以 和去肤層產生化學反應的氣體。 本發明在模仁的底材和保護層之間增加的一層去膜 i =此去膜層可以藉由餘刻的方式來去除之，因此，覆 =，a膜層上方的保護層可以祕刻去膜層的同時剝除， 与鄉模彳+底材成乎不會損傷，且其表面的粗糙度不會有所 、r :膜仁的哥命較長。另一方面，由於本發明可採用鹼 ^酉夂液或是乾式㈣)法來達到去除保護層的目的，因 7 1306089 18116twf.doc/g 此’不需要專業切削的人士來實施’且具有方便快速以及 成本低的優點。 為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂，下文特舉較佳實施例，並配合所附圖式，作詳細說 明如下。 【實施方式】 請參照圖1 ’本發明之模造玻璃之膜仁10 ’其包括底 材100去膜層102與保護層106。此膜仁10的底材1〇〇 ，材質耐熱且在模製玻璃時具有足夠的強度，其材質例如 是以碳化鎢（WC)或碳化矽為主成分的超硬合金或是不 銹鋼。膜仁10的製造方法是先將底材100的表面研磨拋 光。接著，在底材1〇〇表面形成去膜層102。去膜層1〇2 可利用蝕刻方式來去除之，而且可以增加底材1〇〇與後續 形成之保護層1〇6之間的附著性。去膜層102的材質例如 是矽、碳化矽或氮化矽，形成的方法例如是濺鍍法、蒸鍍、 電鍍或化學氣相沈積法。之後，在去膜層102上形成保護 層106，其具有模造面，以作為模造玻璃之用。保護層106 為一層貴金屬合金薄膜’例如是Si、ir、Re、pt、pd、Rh、The inert gas is passed through the centrifuge to dissociate the inert gas into , ^ ^, bombard the sister, record the protective layer and remove the film. In another and dry process, an inert gas can be introduced into the chamber and a gas that can chemically react with the skin layer. The invention adds a layer of film removal between the substrate and the protective layer of the mold core. i = the film removal layer can be removed by means of a residual method. Therefore, the cover layer above the film layer can be secretly engraved. Stripping at the same time as the film is removed, and the mold is not damaged, and the roughness of the surface is not changed. r: The fat of the film kernel is longer. On the other hand, since the present invention can be used for the purpose of removing the protective layer by using an alkali sputum liquid or a dry type (four)) method, it is convenient for the person who does not need professional cutting to perform it according to 7 1306089 18116 twf.doc/g. Fast and low cost advantages. The above and other objects, features and advantages of the present invention will become more <RTIgt; [Embodiment] Referring to Fig. 1 'the molded glass core 10' of the present invention comprises a substrate 100, a film removing layer 102 and a protective layer 106. The film of the film core 10 is made of a heat-resistant material and has sufficient strength in molding glass, and the material thereof is, for example, a cemented carbide mainly composed of tungsten carbide (WC) or tantalum carbide or stainless steel. The film core 10 is produced by first polishing the surface of the substrate 100. Next, a film removing layer 102 is formed on the surface of the substrate 1 . The stripping layer 1〇2 can be removed by etching, and the adhesion between the substrate 1〇〇 and the subsequently formed protective layer 1〇6 can be increased. The material of the film removing layer 102 is, for example, tantalum, tantalum carbide or tantalum nitride, and is formed by, for example, sputtering, evaporation, electroplating or chemical vapor deposition. Thereafter, a protective layer 106 having a molded face for molding the glass is formed on the film-removed layer 102. The protective layer 106 is a layer of a noble metal alloy film, for example, Si, ir, Re, pt, pd, Rh,
Os'Ru'W及Ta中二種或二種以上之材料所形成之合金， 形成的方法例如是濺鍍法。 為了增加保護層106與去膜層102之間的附著性，並 阻擋模仁的底材100 &分中易擴散的物質擴散到表面而影 響模造玻璃的品質，可以在保護層1〇6與去膜層ι〇2之間 增加一層中間層104。中間層104之材質係選自KSi、k、 8 1306089 18116twf.doc/g 光，並斗r為模仁的底材，將底材的表面研磨抛 二:π形撕層以及銥銶合金層，以形成 測試玻璃，在鮮控制下，以為 璃隨著壓模時間物所壓模出來的玻 壓槿時Η太ί 杻糙度的改變。結果顯示： 人模^_ ’ ★内’玻璃表面粗财皆小於1Gnm，符 秒寸开杈造次數大於14000次。 實例二 提供一模仁底材，其表面粗糙度 =:r_，然後’在底材上= <f、二 ㈢，、保濩層，以形成一模仁。接著，以μ的 ⑹混合液浸泡模仁。在模仁底材上 ，層、中間層與保護層被完全去除後，測量模 度’所測得的模仁底材的表面粗键度平均值 酸、、曰：! r、Rt=0·0888,。此結果顯示，以氣氣酸及硫 此曰液去除去膜層、中間層與保護層並不會 的表面粗罐成損傷，表面精度仍符合規格。=底:才匕 ^法可作為去除貴金屬保護層之用，取代傳統鑽石切削方 雖然本發明已以實施例揭露如上，然其並非用以限定 本發明，任何熟習此技藝者，在不脫離本發明之精神^範 =内，當可作些許之更動與潤飾，因此本發明之保護範圍 虽視後附之申請專利範圍所界定者為準。 & 1306089 18116twf.doc/g 【圖式簡單說明】 10 : 模仁 100 :底材 102 :去膜層 104 :中間層 106 :保護層 圖1繪示為本發明之模造玻璃之模仁。 【主要元件符號說明】An alloy formed of two or more materials of Os'Ru'W and Ta is formed by sputtering, for example. In order to increase the adhesion between the protective layer 106 and the film-removing layer 102, and to block the diffusion of the substrate 100 & the diffusible material to the surface and affect the quality of the molded glass, it can be in the protective layer 1〇6 An intermediate layer 104 is added between the delamination layers ι〇2. The material of the intermediate layer 104 is selected from the group consisting of KSi, k, 8 1306089 18116twf.doc/g light, and the bucket r is the substrate of the mold core, and the surface of the substrate is ground and polished: a π-shaped tear layer and a bismuth alloy layer. In order to form the test glass, under the fresh control, the change of the roughness of the glass when the glass is pressed out with the time of the stamper is changed. The results show that: the human model ^_ ’ ★ inner glass surface is less than 1Gnm, and the number of seconds is more than 14,000. Example 2 A mold base material was provided having a surface roughness =: r_, and then 'on the substrate = <f, two (three), and a protective layer to form a mold. Next, the mold kernel was soaked in a mixture of (6) μ. On the substrate of the mold, after the layer, the intermediate layer and the protective layer are completely removed, the average thickness of the surface of the mold substrate measured by the modulus 'is measured as acid, 曰:! r, Rt=0· 0888,. This result shows that the surface of the de-filming layer, the intermediate layer and the protective layer is not damaged by the gas, acid and sulfur, and the surface precision is still in conformity with the specifications. = bottom: the method can be used as a protective layer for the removal of the precious metal, instead of the conventional diamond cutting side. Although the invention has been disclosed in the above embodiments, it is not intended to limit the invention, and anyone skilled in the art does not deviate from the present invention. The spirit of the invention is within the scope of the invention, and the scope of protection of the invention is defined by the scope of the appended claims. & 1306089 18116twf.doc/g [Simplified illustration] 10: Mold 100: Substrate 102: De-filming layer 104: Intermediate layer 106: Protective layer Figure 1 shows the mold of the molded glass of the present invention. [Main component symbol description]