TWI304644B - A stack of flip chip packages - Google Patents

A stack of flip chip packages Download PDF

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Publication number
TWI304644B
TWI304644B TW093136671A TW93136671A TWI304644B TW I304644 B TWI304644 B TW I304644B TW 093136671 A TW093136671 A TW 093136671A TW 93136671 A TW93136671 A TW 93136671A TW I304644 B TWI304644 B TW I304644B
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Taiwan
Prior art keywords
substrate
flip chip
heat sink
stack structure
disposed
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TW093136671A
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Chinese (zh)
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TW200618211A (en
Inventor
Ming Hsiang Cheng
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Advanced Semiconductor Eng
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Priority to TW093136671A priority Critical patent/TWI304644B/en
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Publication of TWI304644B publication Critical patent/TWI304644B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Wire Bonding (AREA)

Description

13046441304644

【發明所屬之技術領域】[Technical field to which the invention pertains]

本發明係有關於一 package, 3D package) 電子元件堆疊以形成一 【先前技術】 種立體封裝構造(three dimensi〇n ’特別係有關於將具有覆晶晶片之 種覆晶封裝堆叠構造。 由於目刚之電子產品係朝向厚度薄、多功能性與極 效能等趨勢發展,因此,半導體封裝係被要求為系統封裝 (system ln package, SIp),通常係將多個晶片封裝構 造加以堆疊,以形成一立體封裝構造(3D package)。The present invention relates to a package, 3D package) electronic component stacking to form a [previously] three-dimensional package structure (three dimensi〇n 'specially related to a flip chip package stack structure having a flip chip. Just in the future, electronic products are trending toward thin thickness, versatility and extreme performance. Therefore, semiconductor packaging is required to be a system package (SIp), usually by stacking multiple chip package structures to form A three-dimensional package structure (3D package).

产請參閱第1圖,在一習知之立體封裝構造丨〇 〇,係包含 一第一電子元件110、一導接板120及一第二電子元件 130,其中該第一電子元件11〇係包含有一第一基板lu及 一第一晶片11 2,該第一晶片11 2係設置於該第一基板ii 之一上表面1 11 a ’並以複數個銲線1 1 3電性連接至該第一 基板11 1,一封膠體114係密封該第一晶片112與該些銲線 113 ’其中’該第一電子元件no另包含有複數個鋅球 11 5,其係設置於該第一基板111之一下表面丨丨丨b。該導接 板1 20係設置於該第一基板1 11之該上表面丨丨la,該導接板 120係藉由複數個銲球121電性連接至該第一基板丨丨1。該 第二電子元件1 3 0係設置於該導接板120上,該第二電子元 件1 3 0係包含有一第二基板1 31及複數個第二晶片1 3 2,該 些第二晶片132係設置於該第二基板131之一上表面131a, 複數個銲線133係電性連接該第二基板131與該些第二晶片 1 3 2,複數個封膠體1 3 4係密封該些第二晶片1 3 2與該些銲Referring to FIG. 1 , in a conventional three-dimensional package structure, a first electronic component 110, a guiding plate 120 and a second electronic component 130 are included, wherein the first electronic component 11 includes There is a first substrate lu and a first wafer 11 2 , the first wafer 11 2 is disposed on an upper surface 1 11 a ' of the first substrate ii and electrically connected to the first plurality of bonding wires 1 1 3 a substrate 11 1 , a gel 114 sealing the first wafer 112 and the bonding wires 113 ′′, wherein the first electronic component no further includes a plurality of zinc balls 11 5 , which are disposed on the first substrate 111 . One of the lower surfaces 丨丨丨b. The guiding plate 120 is disposed on the upper surface 丨丨1 of the first substrate 1 11 , and the guiding plate 120 is electrically connected to the first substrate 丨丨 1 by a plurality of solder balls 121 . The second electronic component 130 is disposed on the conductive board 120. The second electronic component 130 includes a second substrate 1 31 and a plurality of second wafers 132, and the second wafers 132. The plurality of bonding wires 133 are electrically connected to the second substrate 131 and the second wafers 133, and the plurality of sealing bodies 134 are sealed. Two wafers 1 3 2 and the soldering

第7頁 1304644 五、發明說明⑵ —' ------— 中,該導接板120係藉由複數個銲球122電性連 丧至该第二基板131。 丈 斑兮ΐ上;之該立體封裂構造1GG中,該第—電子元件110 的;:電子元件130係以堆疊之方式達到高功能性之S 式堆:*於邊第—電子元件13M系以該上表面131a向上方 該導接板12。上,因此,使得該第二電子元細 厂二第一晶片與該些封膠體係凸出於該第二基板 ^方,而造成該立體封裝結構100整體厚度較厚,其係 不利於電子產品之厚度薄化要求。 /、’、 f迭Π華=專利公告第589688號「多晶片封裝構造之 ii」 種覆晶封裝堆疊之立體封裝構造, ;立;;;構;!、包含—第一封裝體、—中間載板條二 第一封裝體,其中,在該第一封裝體中,—曰 晶接合於一第一載板之一表面,複數個第—導電=件係設 置於該第一載板之另一表面,用以電性連接該中間載板 條,該中間載板條係疊置於該第一封裝體上,複數個 導電元件係設置於該中間載板條之第二表面,用以^ 接該中間載板條與疊置於該中間載板條上之該第二封^遷 體’在該第二封裝體中’一第二晶片係覆晶結合於該^二 载板之一表面,該些第二導電元件係設置於該第二 另一表面,用以電性連接其他元件。上述該立體封裝 係具有多功能性之功效’但因該第二封裝體係正向堆聂於 該中間載板條上,導致該第一晶片係凸出於該立體封^結 構之下方,故造成该立體封裝結構係於整體上具有較^之Page 7 1304644 V. Inventive Note (2) - ' ------ - The conductive plate 120 is electrically connected to the second substrate 131 by a plurality of solder balls 122. In the three-dimensional sealing structure 1GG, the first electronic component 110; the electronic component 130 is stacked to achieve a highly functional S-type stack: * in the edge - electronic component 13M system The guide plate 12 is upward with the upper surface 131a. Therefore, the second wafer and the encapsulation system protrude from the second substrate, thereby causing the overall thickness of the three-dimensional package structure 100 to be thick, which is not conducive to electronic products. The thickness is required to be thinned. /, ', f Π Π = = Patent Announcement No. 589688 "Multi-chip package structure ii" a variety of flip-chip package stacking three-dimensional package structure; ;;; structure;!, including - first package, - middle a first package of the carrier strips, wherein, in the first package, the twin is bonded to one surface of a first carrier, and the plurality of first conductive members are disposed on the first carrier a surface for electrically connecting the intermediate carrier strips, the intermediate carrier strips are stacked on the first package body, and a plurality of conductive elements are disposed on the second surface of the intermediate carrier strips for Connecting the intermediate carrier strip and the second sealing body disposed on the intermediate carrier strip in the second package, a second wafer is bonded to one surface of the second carrier The second conductive elements are disposed on the second other surface for electrically connecting other components. The above-mentioned three-dimensional package has the function of versatility, but because the second package system is being stacked on the intermediate carrier strip, the first wafer system protrudes below the three-dimensional sealing structure, thereby causing The three-dimensional package structure has a better overall

1304644 五、發明說明(3) 厚度,而不利於電子產品之厚度薄化要求。 【發明内容】 本發明之主要目的係在於提供一種覆晶 其传肖令一繁_雷;;# _ 衣隹$構 ,、1乐^ 3 弟笔子兀件、一第二電子亓杜 ★ ▲ 丁 7L件、復數個 造 =導接元件及-散熱片,該第一電子元件係:含:J個 :第二電子元件係包含-第二基板與設置二該’ 下表面之一第二覆晶晶片,荜些電性導接元 ς之 第-基板與㈣二純,m 1接該 第二電子元件,該散熱片係設於該第一 右f!"耦合該第一覆晶晶片與該第二覆晶晶片,:達1304644 V. INSTRUCTIONS (3) Thickness, which is not conducive to the thinning requirements of electronic products. SUMMARY OF THE INVENTION The main object of the present invention is to provide a kind of crystal crystallization, which is transmitted by Xiao Ling, a complex _ ray;; # _ 隹 构 构 、, 1 music ^ 3 笔 笔 、 、, a second electronic 亓 Du ★ ▲ Ding 7L piece, a plurality of manufacturing = guiding elements and - heat sink, the first electronic component system: containing: J: the second electronic component comprising - the second substrate and the setting of the second surface of the 'the lower surface a flip chip, the first substrate of the electrically conductive vias and the (four) two pure, the m 1 is connected to the second electronic component, the heat sink is disposed on the first right f!" coupling the first flip chip Wafer and the second flip chip,

曰ΐΐϊ溥厚度之立體封裝堆疊,並且能增進對該第-ί 曰曰日日片與該第二覆晶晶片之散熱效率。 I 、-私ί Ϊ明之次了目的係在於提供—覆晶封裝堆疊構造, :電性連:::兀:係連接該第一基板與該第二基板,用 於件與該第二電子元件,並且,設 曰:片“溝Ϊ7基板之間的該散熱片係提供該第-覆 1曰I ΐ /、第一覆日日日日片間之電性屏障,降低電性干擾之發 生機率,進而提昇產品之電性效能。 依據本發明,一種覆晶封裝堆疊構造係包含有一第一 拥ϋ兀it二一第二電子元件、複數個電性導接元件及一散 ·:姑=第一電子元件係包含一第一基板與一索一覆晶晶 货二=7覆晶晶片係設置於該第一基板之一上表面,該 一·子兀件係包含一第二基板與一第二覆晶晶片,該第The three-dimensional package stack of germanium thickness can improve the heat dissipation efficiency of the first and second flip chip. The second purpose of the present invention is to provide a flip chip package stack structure: electrical connection:::: connecting the first substrate and the second substrate for the component and the second electronic component And, the 曰: piece "the heat sink between the sulcus 7 substrate provides the first -1 曰I ΐ /, the first electrical barrier between the day and the day, reducing the incidence of electrical interference According to the present invention, a flip chip package stack structure includes a first electronic component, a plurality of electrical conductive components, and a plurality of electrical conductive components. An electronic component comprises a first substrate and a wire-clad crystal chip 2=7 flip chip is disposed on an upper surface of the first substrate, the one-piece component comprises a second substrate and a first Two flip chip, the first

1304644 五 、發明說明(4) —覆晶晶片係設置於兮筮_甘t 接元件俨、t Λ 一 土板之一下表面,該些電性導 牧凡件i丁、連接該第_基板盥 私丨r 一電子元β π /、弟一基板,以電性導通該第 % 丁 7L 1午及该第二電子开杜 基板盥兮筮 ^, 件且该政熱片係設於該第一 二Ϊ晶:工;;=,並熱執合該第-覆晶晶片與該第 降n声 、覆晶封裝堆疊構造之散熱效率,並 奪低厚度,以利縮減產品之體積。 【實施方式】 、 f閱所附圖式,本發明將列舉以下之實施例說明。 ㈣祕,明之第一具體實施例,請參閱第2圖,-種覆晶 封凌堆®構造20 0係包含一第一電子元件21〇、一第二電子 兀件220、複數個電性導接元件23Q及一 smk) ^ 一覆晶,片212,該第一覆晶晶片212以複數個凸塊212a設 置1该第一基板21 1之一上表面2 11 a。較佳地,一底部填 充膠213 (underfilling material)係填充於該上表面 211 a與該第一覆晶晶片2 12之間,以密封保護該第一覆晶 晶片21 2之主動面與該些凸塊212 a。該覆晶封裝堆疊構造 200係可另包含有複數個銲球250,其係設置於該第一基板 211之一下表面21 lb,用以接合於印刷電路板上。 §亥第二電子元件220係包含^一第二基板221與一第二覆 晶晶片222,該第二覆晶晶片222係以複數個凸塊222a設置 於該第二基板221之一下表面221b。較佳地,一底部填充 膠223係填充於該下表面221b與該第二覆晶晶片222之間, 以密封保護該第二覆晶晶片222之主動面與該些凸塊1304644 V. INSTRUCTION DESCRIPTION (4) - The flip chip is disposed on the lower surface of one of the 土 甘 甘 俨 俨 t t t , , , , , , , , , , , , , , , , , , , , , , Private 丨r an electronic element β π /, a substrate, electrically conductive to the first% 7L 1 noon and the second electronic open do substrate, and the political hot film is set in the first The second crystal: work;; =, and heat the heat dissipation efficiency of the first flip-chip and the first n-sound, flip-chip package stack structure, and reduce the thickness to reduce the volume of the product. [Embodiment] The present invention will be described by way of the following examples. (4) The first specific embodiment of the invention, please refer to FIG. 2, a type of flip-chip Linger® structure 20 0 includes a first electronic component 21〇, a second electronic component 220, and a plurality of electrical leads. The bonding element 23Q and a smk) ^ a flip chip, the chip 212, the first flip chip 212 is provided with a plurality of bumps 212a 1 on an upper surface 2 11 a of the first substrate 21 1 . Preferably, an underfilling material 213 is filled between the upper surface 211 a and the first flip chip 2 12 to seal and protect the active surface of the first flip chip 21 2 . Bump 212 a. The flip chip package stack structure 200 can further include a plurality of solder balls 250 disposed on a lower surface 21 lb of the first substrate 211 for bonding to a printed circuit board. The second electronic component 220 includes a second substrate 221 and a second flip chip 222. The second flip chip 222 is disposed on the lower surface 221b of the second substrate 221 by a plurality of bumps 222a. Preferably, an underfill 223 is filled between the lower surface 221b and the second flip chip 222 to seal and protect the active surface of the second flip chip 222 and the bumps.

第10頁 1304644 五、發明說明(5) 222a。該些電性導接元件23 0係連接該第一基板2U與該第 二基板22 1,用以電性導通該第—電子元件2丨〇與該第二電 子元件220。該第一基板211之尺寸係可與該第二基板“I 之尺寸相同。該散熱片240係設置於該第一基板2Π與該第 二基板221之間,該散熱片240係雙面熱耦接合該第一覆晶 晶片2 1 2與該第二覆晶晶片2 2 2,以增進該第一覆晶晶片 21 2與該第二覆晶晶片222之散熱效率。 在本實施例中,該第一電子元件21 0係另包含一第一 加強材(first stiffener)214,其係設置於該第一基板 211之上表面211a,該第一加強材21 4係以一黏膠24 1·黏設 該散熱片240,該第一加強材2 1 4係為環狀、條狀或塊狀, 並且該第一加強材214係可環繞該第一覆晶晶片21 2,以加 強該第一電子元件210之結構強度與固定該散熱片240,避 免知壞该第一覆晶晶片2 1 2。此外,在本實施例中,該第 一電子元件220係包含一第二加強材(seconcj stiffener) 224,其係設置於該第二基板221之下表面221b,該第二加 強材224係同樣以一黏膠241黏設於該散熱片240,該第二 加強材2 2 4係為ί衣狀、條狀或塊狀’並且該第二加強材2 2 4 係可環繞該第二覆晶晶片21 2,以加強該第二電子元件2 2 0 之結構強度及保棱该苐一覆晶晶片2 2 2。較佳地,該覆晶 _ 封裝堆疊構造20 0係另包含一散熱元件260,該散熱元件 2 6 0係可為散熱板或散熱歸片,其係可設置於該第二基板 221之該上表面221a,該散熱元件26 0係藉由該第二基板 221與該第二加強材224熱耦合至該散熱片240,以利熱量Page 10 1304644 V. Description of the invention (5) 222a. The electrical conductive elements 230 are connected to the first substrate 2U and the second substrate 22 1 for electrically conducting the first electronic component 2 and the second electronic component 220. The size of the first substrate 211 is the same as the size of the second substrate “I. The heat sink 240 is disposed between the first substrate 2Π and the second substrate 221, and the heat sink 240 is double-sided thermocoupled. Bonding the first flip chip 2 1 2 and the second flip chip 2 22 to improve heat dissipation efficiency of the first flip chip 21 2 and the second flip chip 222. In this embodiment, The first electronic component 21 0 further includes a first stiffener 214 disposed on the upper surface 211 a of the first substrate 211 , and the first reinforcing material 21 4 is adhered by a glue 24 1· The heat sink 240 is disposed, the first reinforcing material 214 is annular, strip-shaped or block-shaped, and the first reinforcing material 214 can surround the first flip chip 21 2 to strengthen the first electron. The structural strength of the component 210 is fixed to the heat sink 240 to avoid damaging the first flip chip 2 1 2 . Further, in the embodiment, the first electronic component 220 includes a second reinforcing material (seconcj stiffener) 224, which is disposed on the lower surface 221b of the second substrate 221, and the second reinforcing member 224 is also a glue 241. The heat sink 240 is disposed on the second reinforcing material 2 2 4 in a shape of a strip, a strip or a block, and the second reinforcing material 2 2 4 surrounds the second flip chip 21 2 to strengthen The structure of the second electronic component 2 2 0 and the protective flip-chip wafer 2 2 2 . Preferably, the flip chip package stack structure 20 0 further includes a heat dissipating component 260 , the heat dissipating component 26 The 0-series can be a heat sink or a heat sink, which can be disposed on the upper surface 221a of the second substrate 221, and the heat dissipating component 260 is thermally coupled to the second reinforcement 224 by the second substrate 221 The heat sink 240 for heat

第11頁 1304644 五、發明說明(6) 之傳導。此外,在本實施例中,該些電性導接元件23〇為 在干球’其係¥繞该苐一覆晶晶片21 2、該第二覆晶晶片2 2 2 與該散熱片240。 % θθPage 11 1304644 V. Conduction of the invention (6). In addition, in the present embodiment, the electrical conductive elements 23 are wound around the wafer, the second flip chip 2 2 2 and the heat sink 240. % θθ

在該覆晶封裝堆疊構造200中,由於該散熱片240係設 於該第一基板211與該第二基板2 21之間,並熱耦合該第一 覆晶晶片21 2與該第二覆晶晶片2 2 2,故可提昇該第一覆晶 曰曰片212與4苐一覆晶晶片222之散熱效率,並且堆疊該第 一電子元件210與該第一電子元件220時,由於該第一覆晶 晶片21 2與該第二覆晶晶片2 2 2係位於該第一基板21 1與該 第一基板2 21之間,因此該覆晶封裝堆疊構造2 〇 〇係可具有 較4之立體封裝堆豐厚度,以利於電子產品之厚度薄化要 求’且該覆晶封裝堆疊構造200係具有較佳之散熱性。再 者,設於該第一基板211與第二基板221之間的該散熱片 240係能提供該第一覆晶晶片212與第二覆晶晶片222間之 電性屏障’以降低該第一覆晶晶片2 i 2與該第二覆晶晶片 222之發生電性干擾,進而提昇產品之電性效能。In the flip chip package stack structure 200, the heat sink 240 is disposed between the first substrate 211 and the second substrate 21, and thermally couples the first flip chip 21 2 and the second flip chip. The heat dissipation efficiency of the first flip chip 212 and the flip chip 222 is increased, and the first electronic component 210 and the first electronic component 220 are stacked, because the first The flip chip 210 2 and the second flip chip 2 2 2 are located between the first substrate 21 1 and the first substrate 2 21 , so the flip chip package stack structure 2 can have a stereoscopic shape of 4 The package thickness is packaged to facilitate the thinning of the thickness of the electronic product' and the flip chip package stack structure 200 has better heat dissipation. Furthermore, the heat sink 240 disposed between the first substrate 211 and the second substrate 221 can provide an electrical barrier between the first flip chip 212 and the second flip chip 222 to reduce the first The flip chip 2 i 2 and the second flip chip 222 are electrically disturbed, thereby improving the electrical performance of the product.

本發明之第二具體實施例,請參閱第3圖,一種覆晶 封裝堆疊構造30 0係包含一第一基板31()、一第一覆晶晶片 320、一第二基板3 30、一第二覆晶晶片34〇、一散熱片350 及複數個電性導接元件36〇,該第一基板31〇係具有一上表 面3 11 ’該第一覆晶晶片3 2 〇係以複數個凸塊3 2丨接合於該 上表面311。該第二覆晶晶片34〇係以複數個凸塊341接合 於该第二基板330之一下表面331。該散熱片350係設置於 該第一基板3 10之該上表面3 U上,並且設於該第一覆晶晶In a second embodiment of the present invention, referring to FIG. 3, a flip chip package stack structure 30 includes a first substrate 31 (), a first flip chip 320, a second substrate 3 30, and a first substrate. a first flip chip 34 〇, a heat sink 350 and a plurality of electrical conductive elements 36 〇, the first substrate 31 has an upper surface 3 11 'the first flip chip 3 2 〇 is a plurality of convex Block 3 2 is joined to the upper surface 311. The second flip chip 34 is bonded to the lower surface 331 of the second substrate 330 by a plurality of bumps 341. The heat sink 350 is disposed on the upper surface 3 U of the first substrate 3 10 and is disposed on the first flip chip

第12頁 1304644 '發明說明(7) 片3 2 0與該第二覆晶晶片3 4 〇之間。在本實施例中,該散熱 片350係具有一空腔351,以容置該第一覆晶晶片320。該 些電性導接元件36 0係連接該第一基板310與該第二基板 330,其中,該些電性導接元件3 60係環繞該第一覆晶晶片 320、該第二覆晶晶片34〇與該散熱片35〇之外周,在本實 施例中,該些電性導接元件3 6 〇係為銲球。 在該覆晶封装堆疊構造300中,由於該散熱片3 50係設Page 12 1304644 'Description of the invention (7) Between the sheet 3 2 0 and the second flip chip 34 4 。. In this embodiment, the heat sink 350 has a cavity 351 for receiving the first flip chip 320. The first conductive substrate 306 is connected to the first substrate 310 and the second substrate 330. The electrical conductive elements 306 surround the first flip chip 320 and the second flip chip. 34 〇 and the heat sink 35 〇 outside, in this embodiment, the electrical conductive elements 3 6 are solder balls. In the flip chip package stack structure 300, since the heat sink 3 50 is provided

於該第一基板31 0上,並設於該第一覆晶晶片320與該第二 覆晶晶片340之間,故可提昇該第一覆晶晶片32〇與該第二 覆晶晶片340之散熱效率,再者該第一覆晶晶片32〇係籍由 該散熱片3 5 0所提供之電性屏障,而預防該第一覆晶曰 32〇與該第二覆晶晶片34 〇之間發生、電性干擾之情況曰曰,曰曰 畀該覆晶封裝堆疊構造3 〇 〇之電性效能。 1提 在不脫離本發明之精神$ 均屬於本發明之4護範] 本發明之保護範圍當視後 為準,任何熟知此項技藝者, 園内所作之任何變化與修改,The first substrate 310 0 is disposed between the first flip chip 320 and the second flip chip 340, so that the first flip chip 32 and the second flip chip 340 can be lifted. The heat dissipation efficiency is further ensured by the first flip chip 32 between the first flip chip 32 〇 and the second flip chip 34 籍 by the electrical barrier provided by the heat sink 350 . In the case of occurrence or electrical interference, the electrical performance of the flip-chip package stack structure is 3 〇〇. 1 The present invention is not limited to the spirit of the present invention. The scope of protection of the present invention is subject to change, and any changes and modifications made in the garden are known to those skilled in the art.

1304644 圖式簡單說明 【圖式簡單說明】 第1圖··習知立體封裝堆疊構造之截面示意圖; 第2圖:依據本發明之第一具體實施例,一種覆晶封裝堆 疊構造之截面示意圖;及 第3圖:依據本發明之第二具體實施例,一種覆晶封裝堆 疊構造之截面示意圖。 元件符號簡單說明: 100 立 體 封 裝 構造 110 第 一 電 子 元 件 111 第 一 基 板 111a 上 表 面 111b 下 表 面 112 第 一 晶 片 113 銲 線 114 封 膠 體 115 鲜球 120 導 接 板 121 鲜球 122 銲 球 130 第 二 電 子 元 件 131 第 二 基 板 131a 上 表 面 131b 下 表 面 132 第 -— 晶 片 133 銲 線 134 封 膠 體 200 覆 晶 封 裝 堆 疊: 構造 210 第 一 電 子 元 件 211 第 -· 基 板 211a 上 表 面 211b 下 表 面 212 第 一 覆 晶 晶 片 212a 凸 塊 213 底 部 填 充 膠 214 第- -加強材 220 第 *---- 電 子 元 件 221 第 —_丨一 基 板 221a 上 表 面 221b 下 表 面BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing a conventional three-dimensional package stack structure; FIG. 2 is a cross-sectional view showing a flip chip package stack structure according to a first embodiment of the present invention; And FIG. 3 is a schematic cross-sectional view showing a stacked structure of a flip chip package according to a second embodiment of the present invention. Brief description of component symbols: 100-dimensional package structure 110 first electronic component 111 first substrate 111a upper surface 111b lower surface 112 first wafer 113 bonding wire 114 sealing body 115 fresh ball 120 guiding plate 121 fresh ball 122 solder ball 130 second Electronic component 131 second substrate 131a upper surface 131b lower surface 132 first - wafer 133 bonding wire 134 encapsulant 200 flip chip package stack: structure 210 first electronic component 211 - substrate 211a upper surface 211b lower surface 212 first Crystal chip 212a bump 213 underfill 214 first - reinforcing member 220 *---- electronic component 221 first - _ a substrate 221a upper surface 221b lower surface

第14頁 1304644 圖式簡單說明 222 第-—覆晶晶片 222a 凸塊 223 底部填充膠 224 第二加強 230 電性導接元件 240 散熱片 250 銲球 260 散熱元件 300 覆晶封裝堆疊構造 310 第一基板 311 上表面 320 第’一覆晶晶片 321 凸塊 33 0 第二基板 331 下表面 340 第二覆晶晶片 341 凸塊 350 散熱片 351 空腔 360 電性導接元件 241 黏膠Page 14 1304644 Brief description of the drawing 222 First-- flip chip 222a bump 223 underfill 224 second reinforcement 230 electrical conduction element 240 heat sink 250 solder ball 260 heat dissipation element 300 flip-chip package stack configuration 310 first The upper surface 320 of the substrate 311 is the first flip chip 321 bump 33 0 the second substrate 331 the lower surface 340 the second flip chip 341 the bump 350 the heat sink 351 the cavity 360 the electrical conductive element 241

第15頁Page 15

Claims (1)

1304644 ^·— τ、申請專利範圍 【申凊專利範 1、—種覆晶 一第一電 晶片,該第_ 一第二電 晶片,該第二 複數個電 基板;及 一散熱片 二基板之間, 片。 2、 如申請專 包含有複數個 3、 如申請專 中該第一電子 stiffener), 該散熱片。 4、 如申請專 中该第一加強 5、 如申請專 造,其中該第 stiffener), 該散熱片。 6、 如申請專 電 其係$又置於該第二基板之下表面,以黏接於 利範圍第5項所述之覆晶封裝堆疊構造,其 園】 封裝堆疊構造,包含: 子元件’其係包含一第一基板與一第一覆晶 覆晶晶片係設置於該第一基板之一上表面; 子元件,其係包含一第二基板與一第二覆晶 覆晶晶片係設置於該第二基板之一下表面; f生導接元件’其係連接該第一基板愈該第二 (heat sink),其係設於該第一基板與該第 並熱輕合该苐一覆晶晶片與該第二覆晶晶 利範圍弟1項所述之覆晶封裝堆疊構造另 銲球,其係設置於該第一基板之面另 利範圍第1項所述之覆晶封裝堆疊構造,其 元件係另包含一第一加強材(first 其係設置於該第一基板之上表面,以黏接於 利範圍第3項所述之覆晶封裝堆疊構造,其 材係為環狀。 / 利範圍第1或3項所述之覆晶封裝堆疊構 包έ 一第一加強材(second1304644 ^·— τ, the scope of application for patents [application of patent specification 1, a type of flip chip, a first electric wafer, the first second electric wafer, the second plurality of electric substrates; and a heat sink and two substrates Between, film. 2. If the application contains a plurality of 3, such as the application of the first electronic stiffener), the heat sink. 4. If the application is for the first reinforcement 5, such as applying for a specialization, the first stiffener), the heat sink. 6. If the application for the special power is placed on the lower surface of the second substrate to adhere to the flip chip package stack structure described in item 5 of the scope, the package structure includes: the sub-element The first substrate and the first flip-chip wafer are disposed on an upper surface of the first substrate; the sub-element includes a second substrate and a second flip-chip wafer system disposed thereon a lower surface of the second substrate; the first conductive substrate is connected to the first substrate, and the second substrate is coupled to the first substrate and the first thermal substrate And a flip chip package stack structure according to the second flip-chip range, wherein the solder ball is disposed on the first substrate, and the flip chip package stack structure according to claim 1 is The component further includes a first reinforcing material (first is disposed on the upper surface of the first substrate to adhere to the flip chip package stack structure according to item 3 of the benefit range, and the material is annular. The flip chip package stack structure described in the above item 1 or 3, a first reinforcing material (se Cond 第16頁 1304644Page 16 1304644 六、申請專利範圍 中7該加強材係為環狀。 中該第;二:範圍第1項所述之覆晶封一播 乐基板之尺寸與註篦-直化 > 展堆®構造, 8、如申請專利範圍^ 土 〈尺寸係為相同。 盆 其 !該些電性導接元件係環裝堆疊構造, 曰曰片與該散熱片之外周。、μ弟一伋曰曰曰曰片、該第二覆晶 9 如申凊專利範(fi笛1 s 二該些電性導接元件係為W述之覆晶封裝堆疊構造,其 另包含-散熱元件;^ : = ^裝堆叠構造,其 11、 如申請專利範固第/:δ;置所^ 其中該散熱元件俜Α 1 @、 復日日封裝堆疊構造, 12、 -種覆二^ 基板熱轉合於該散熱片。 裡伋日日封裝堆疊構造,包含: 二第一基板’其係具有一上表面; 面 第-覆晶晶片,其係設置於該第—基板之該上表 一第二基板;其係具有一下表面; 面 一第二覆晶晶片,其係設置於該第二基板之該下表 位於;Ϊ熱二(曰“Μ),其係設置於該第一基板上並 於3玄第—覆晶晶片與該第二覆晶晶片之間;及 複數個電性導接元件,其係連接該第一基板與該 基板。 13、 如申請專利範圍第12項所述之覆晶封裝堆疊構造,Sixth, the scope of application for patents 7 The reinforcement is a ring. In the second; the size and the filling of the wafer-sliding substrate described in the first item of the range and the straightening > the construction of the stack, 8. If the scope of the application is the same, the size is the same. The electrical conductive elements are in a ring-mounted stacked configuration, the gusset and the outer periphery of the heat sink. , μ 汲曰曰曰曰 汲曰曰曰曰 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Heat dissipating component; ^ : = ^ stacked structure, 11 , such as the patent application Fan Gu / / δ; set the ^ where the heat sink 俜Α 1 @, the day of the day package stack structure, 12, - kind of cover ^ The substrate is thermally coupled to the heat sink. The solar cell package stack structure comprises: two first substrate 'having an upper surface; a surface first-clad wafer disposed on the upper surface of the first substrate a second substrate; having a lower surface; a second flip chip, which is disposed on the lower surface of the second substrate; and a heat-dissipating layer disposed on the first substrate And a plurality of electrical conductive elements connected between the first substrate and the substrate; and 13, as claimed in claim 12 The flip chip package stack structure, 第17頁 1304644 六、申請專利範圍 覆 其中該散熱片係具有一空腔,以容置該第一覆晶晶片。 1 4、如申請專利範圍第1 2項所述之覆晶封裝堆疊構造 其中該些電性導接元件係環繞該第一覆晶晶片、該第二 晶晶片與該散熱片之外周。 1 5、如申請專利範圍第1 2項所述之覆晶封裝堆疊構造 其中該些電性導接元件係為銲球。Page 17 1304644 VI. Patent Application Coverage The heat sink has a cavity for receiving the first flip chip. The flip chip package stack structure of claim 12, wherein the electrical conductive elements surround the first flip chip, the second crystal wafer and the outer periphery of the heat sink. The flip chip package stack structure of claim 12, wherein the electrical conductive elements are solder balls. 第18頁Page 18
TW093136671A 2004-11-29 2004-11-29 A stack of flip chip packages TWI304644B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110600453A (en) * 2018-06-12 2019-12-20 欣兴电子股份有限公司 Package carrier

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Publication number Priority date Publication date Assignee Title
TWI467735B (en) * 2010-12-31 2015-01-01 矽品精密工業股份有限公司 Multi-chip stack package structure and fabrication method thereof
CN103000608B (en) * 2012-12-11 2014-11-05 矽力杰半导体技术(杭州)有限公司 Chip packaging structure of a plurality of assemblies

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110600453A (en) * 2018-06-12 2019-12-20 欣兴电子股份有限公司 Package carrier
CN110600453B (en) * 2018-06-12 2021-07-27 欣兴电子股份有限公司 Package carrier

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