TWI301441B - Wireless 3d position auto-offset system for robot arms - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a corrector, and more particularly to a wireless three-dimensional (3D) displacement correction system for a mechanical arm. [Previous technical standards] Semiconductor manufacturers use the robot arm (Robot Arm) that conforms to the Mechanical Standard Interface (SMIF) to automatically wafer the wafer from the wafer box (Front 〇pening unified Pod') F0UP) is taken out and sent to the machine to prevent contamination of the wafer. However, the mechanical arm of the machine often deforms the Pincette at the front end of the arm due to different abnormal conditions. Therefore, the equipment personnel must adjust the robot arm according to different abnormal conditions at any time to improve product quality and production efficiency. The current adjustment method is based on people's subjective judgment, but often different quality of the machine is produced because of the different quality and identification. Secondly, the space of the machine is so small that it cannot accommodate the taller equipment personnel. In summary, the subjective judgment and body of the staff will indirectly affect the quality and timeliness of the machine. Therefore, the present invention provides a wireless three-dimensional displacement correction system for a robot arm, which can effectively improve the quality of the adjustment machine. SUMMARY OF THE INVENTION Based on the above objects, an embodiment of the present invention discloses a wireless two-dimensional displacement correction system for a robot arm, including a wireless three-dimensional displacement monitoring sensor.

Clienfs Docket No. : PT.AP-604 TT^s Docket No : 0532-A40757-.TW/Final/Alex Chen c 1301441 - With a righteous descent. The wireless two-dimensional displacement monitoring sensor includes an electronic level sensing device. The electronic level sensor has an arcuate space and a sensor. The interior of the arcuate space is filled with a liquid substance and has a bubble. The sensor is used to sense the position of the bubble. The corrector obtains the position of the bubble from the sensing and displays it on the display screen, determines whether a process device presents a horizontal state according to a preset standard range, and calculates an offset of the process device if it is not a horizontal state. the amount. Embodiments of the present invention further disclose a wireless three-dimensional displacement correction system for a robot arm, including a three-leg process board, a wireless three-dimensional displacement monitoring sensor, and a corrector. The three-legged process board has three legs. The wireless two-dimensional displacement monitoring sensing state has an optical scale disposed above the tripod processing board, wherein when the optical scale is a pair of optical scales, one of the optical scales is used as a transmitting end to emit a fine parallel beam Another optical tape acts as a receiving end to receive the beam signal. The corrector receives the state in which the light beam is blocked from the wireless three-dimensional displacement monitoring sensor and displays it on the display screen thereof, and determines whether the z-axis gap of each foot of the three-legged processing board is rushed after the operation is recognized. • A default value is given. The embodiment of the present invention further discloses a wireless three-dimensional tilting correction system for a robot arm, which includes a processing board, a wireless two-dimensional displacement monitoring sensor, and a corrector. The process board has a central mark. The wireless three-dimensional displacement monitoring sensor is disposed above the processing board and has an x_Yi CCD monitoring sensor sensor. A standard mark is defined on the X-Y axis CCD monitor sensor, which compares the center position of the center mark with the center position of the standard mark. The corrector obtains the central control from the sensor

Client's Docket No. · PT.AP-604 TT5s Docket No : 0532-A40757-TW/Final/Alex Chen 1301441 , the relative position information of the center position and the center position of the standard mark, and judged according to the relative position information Whether the process board is offset, and the offset of the process board is calculated when an offset occurs. DETAILED DESCRIPTION OF THE INVENTION In order to make the objects, features, and advantages of the present invention more comprehensible, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings Figures 1 through 10C. The present specification provides various embodiments to illustrate the technical features of various embodiments of the present invention. The arrangement of the various elements in the embodiments is for illustrative purposes and is not intended to limit the invention. The repeated repetition of the drawings in the embodiments is intended to simplify the description and does not mean the relationship between the different embodiments. Embodiments of the present invention disclose a wireless three-dimensional displacement correction system for a robot arm. The wireless three-dimensional displacement correction system of the embodiment of the present invention utilizes a 3D displacement corrector of a wireless mechanical arm and a wireless 3D displacement monitoring sensor, which can effectively reduce the adjustment error caused by subjective consciousness. The wireless 3D displacement monitoring sensor includes an electronic level sensor (Leveiing Sensor) and an optical scale (Optical Scale). The electronic level sensor provides a more accurate understanding of the level of the Process Plate or the Pincette. The optical scale detects the safe height of the tweezers and the process plate on the z-axis. Fig. 1 is a schematic view showing the appearance of a corrector according to an embodiment of the present invention. The corrector 100 of the embodiment of the present invention is a low power signal receiver having a display and X_Y axis offset sensing (xY_axes Shift)

Client's Docket No. : ΡΤ.ΑΡ-604 TT5s Docket No : 0532-A40757-TW/Final/Alex Chen 1301441 .Judgment), Z-axis Gap Judgment, Leveling Judgment, etc. Features. 2 is a schematic diagram showing the appearance of a wireless 3 d displacement monitor sensor (200) according to an embodiment of the present invention. The wireless 3D displacement monitoring sensor 2 of the embodiment of the present invention is a low-power signal transmitter, which includes an electronic level sensor (Electric Leveling Sensor), a Z-axis optical scale (〇pticai Scale), and a χ_γ Axis electronic charge coupled device monitor sensor (XY-axes CCD Monitor Sensor). The X-Y axis electronic CCD monitoring sensor is used to monitor the instantaneous state of the χ-γ axis offset. The 光学-axis optical ruler is used to monitor the gap between the foot of the 3-Pin Process Plate and the gap between the wafers (Gap). Electronic level sensing is used to monitor the horizontal sadness of the wireless 3D displacement monitoring sensor. Further, the corrector 1 and the wireless displacement monitoring sensor 200 are wirelessly coupled to each other. Figure 3 is a schematic cross-sectional view showing the structure of the wireless 3D displacement monitoring sensor 200 of the embodiment of the present invention. As described above, the wireless 3D displacement monitoring sensor 2 includes an electronic level sensor 210 (as shown in the top view of the wireless 3D displacement monitoring sensor), and an optical scale 220 (such as a wireless 3D displacement monitoring sense). Side view 200" and bottom view 200 of the detector) and χ-γ axis CCD monitor sensor 230 (such as the side view of the wireless 3D displacement monitoring sensor 2, and the bottom view 200'' As shown in Fig. 4, the electronic level sensor 21 is divided into two parts, one of which is an arc-shaped space, in which a liquid substance is injected and has a bubble

Client’s Docket No··· PTAP-604 TT5s Docket No · 0532-A40757-TW / Final / Alex Chen 1301441 Another CCD sensor steals 2150. From Fig. 21G of the electronic level sensor 210, and the side view 21G, it can be clearly seen that the bubble 215 is located at the center of the center of the electronic level sensor 2i when it is horizontally sad. According to the position of the bubble 215, the position of the front end of the robot arm, the position of the three-pin position (3 Pm) process board, and the horizontal state of the process board can be judged. Referring to Fig. 5A, the wireless 3J) displacement monitoring sensor 2 is clamped by the tweezers of the front end of the robot arm, and the position of the bubble 215 of the electric + level sensor 210 can be observed. The horizontal state of the cockroach, so as to know the horizontal state of the robot arm. Referring to FIG. 5B, the wireless guilt is monitored, and the detector 200 is placed on the foot of the three-pin (3_pin) process board 4 ,, and then the position of the air bubble 215 is observed, and the horizontal state of the foot position can be known. . Referring to Fig. 5C, the wireless 3D displacement monitoring sensor 2 is placed on the process board 5 ,, and then the position of the bubble 215 is observed, and the horizontal state of the process board 5 即可 can be known. In addition, the size of the z-axis gap between the wireless 3D displacement monitoring sensor 200 and the process board (three-leg process board 4 〇〇 or process board 5 〇〇) can be known by using the optical scale 220 as shown in FIG. 6A. The optical scale 220 has at least two optical scales, wherein one optical scale is used as a transmitting end for emitting a fine parallel beam signal, and the other optical scale is used as a receiving end for receiving a beam signal, and then the beam is blocked. The state is passed back to the corrector 100 to determine the size of the Z-axis gap. In addition, when the parallel beam emitted by the optical scale 220 does not contact the foot on the process board, the wireless 3D displacement monitoring sensor 200 can be moved back and forth on the processing board by the dice 300 to make the parallel beam contact the foot position. The size of the Z-axis gap.

Client's Docket No. · PT.AP-604 TT5s Docket No · 0532-A40757-TW / Final / Alex Chen 9 1301441 , X_Y Axis CCD Surveillance Sensor 230 is mainly used to capture the central mark of the process board 500 (Center Mark), and the image is passed back to the corrector 100 and compared with a standard mark to determine whether the process plate 500 or the robot arm is offset on the XY axis. As shown in FIG. 7A, the wireless 3D displacement monitoring sensor 200 is disposed above the process board .500 to detect the central mark 550 of the processing board 500. Referring again to FIG. 7B, the standard mark 235 is marked on the process board 500. When the χ-γ axis CCd monitor sensor detects the central mark 550, the relative position between the central mark 550 and the standard mark 235 is obtained, and Whether the offset of the process board 500 occurs is determined based on the relative position, and if an offset occurs, whether the offset distance is within a predetermined range, that is, the offset of the robot arm on the XY axis is obtained. The corrector 100 can obtain the sensed value returned by the wireless 3D displacement monitor sensor 200, and display the sensed result after the operation. As described above, the corrector 1 of the embodiment of the present invention is a low-power signal receiver capable of displaying XY-axis offset sensing, Z-axis gap sensing, and sensing results of horizontal sensing, such as the first The figure shows. The operation of the electronic level sensor, the z-axis optical scale, and the X-Y axis electronic charge coupled device monitoring sensor will be described in more detail below. Referring to FIG. 8A, the electronic level sensor 21 判断 can determine the dice 300 of the front end of the robot arm, the foot of the three-leg process board 4 and the horizontal state of the processing board 500 according to the bubble 215 thereof, and determine whether the bubble 215 is Within the standard range (StandardRange, SR) (as shown in Figure 8B). The operation flow is as follows. First, the CCD sensor in the electronic level sensor 210 senses the bubble

Client’s Docket No. : PT.AP-604 TT’s Docket No : 0532-A40757-TW/Final/Alex Chen 1301441, 215 position. Then, the position is transmitted to the corrector 1〇〇, so that the correcting person 100 displays the position of the bubble 215 on the screen, and judges the position of the dice 300 and the three-leg process board 4 according to the above-mentioned standard range (SR). And the horizontal state of the process board 500, that is, whether the offset is normal and how many angles are offset. The flow of the net J light 4* rule 220 to sense the size of the z-axis gap is as follows. Referring to FIG. 9A, one of the optical scales 220 serves as a transmitting end to emit a fine parallel beam, and the other optical tape serves as a receiving end to receive the beam signal '' and then returns the state of the beam to the corrector. 100 to determine the size of the z-axis gap. Referring to Fig. 9B, the wireless 3D displacement monitoring sensing state 200 is clamped by the dice 3, and then positioned above the three-leg process board 4〇〇. Then, the wireless 3D displacement monitoring sensor 2 is forwarded and retracted by the dice 300 to pass through each pin of the three-leg process board 400 by the single optical scale 225 disposed thereon to detect the foot. The size of the gap between the bit and the wafer in the z-axis direction. The gap value sensed by the optical scale 220 or the single optical scale 225 is transmitted back to the corrector 1〇〇, so that the corrector 1〇〇 displays the gap value of each of the feet on the honor screen (as shown in FIG. 9C). ), and after the operation, it is judged whether the gap value of each pin exceeds a preset value. The electronic level sensing 210 converts the offset of the robot arm on the X-Y axis by the _¥ axis CCD monitoring sensor 23 〇 comparing the center positions of the standard mark 235 and the center mark 55 。. The operation process is as follows.

Referring to Fig. 10A, first, the central mark 550 of the process board 5 is obtained, and then the center position 555 of the central mark 550 is compared with the center position 2355 of the standard mark 235 of the χ-γ axis CCD monitor sensor 230.

Client's Docket No. : PT.AP-604 TT5s Docket No : 0532-A40757-TW / Final / Alex Chen 11 1301441 * (as shown in Figure 10B), return the relative position information between the two to the corrector 100 In order to calculate the offset of the process board 500, the offset of the robot arm on the XY axis is known. The three-dimensional displacement correction system of the embodiment of the invention adopts a wireless design, so it is convenient to use and has no physical body and environmental space limitation. In addition, it can avoid the error of subjective judgment and affect the quality of the machine and automatically display the sensing and judgment results. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and any skilled person can make various changes and modifications without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the appearance of a corrector according to an embodiment of the present invention. Figure 2 is a schematic diagram showing the appearance of a wireless 3D displacement monitoring sensor according to an embodiment of the present invention. Fig. 3 is a schematic cross-sectional view showing the structure of a wireless 3D displacement monitoring sensor according to an embodiment of the present invention. Fig. 4 is a view showing the structural analysis of the electronic level sensor of the embodiment of the present invention. Fig. 5A is a view showing the horizontal state of the tweezer for detecting the front end of the robot arm according to the embodiment of the present invention. Fig. 5B is a view showing the state of detecting the horizontal state of the three-foot process board in the embodiment of the present invention. The 5C diagram shows the horizontal shape of the test process board of the embodiment of the present invention.

Client’s Docket No. : PT.AP-604 TT^ Docket No : 0532-A40757-TW / Final / Alex Chen 1301441 • Schematic diagram of the state. 6A and 6B are views showing the intention of detecting the Z-axis gap by the optical scale in the embodiment of the present invention. 7A and 7B are diagrams showing the intention of detecting the X-Y axis shift by the X-Y axis CCD monitoring in the embodiment of the present invention. 8A and 8B are diagrams showing the use of the electronic level sensor to detect the horizontal state of the apparatus and the display of the horizontal state information by the corrector according to the embodiment of the present invention. 10A to 9C are diagrams showing the Z-axis gap of the optical scale detecting device of the embodiment of the present invention and the gap information displayed by the corrector. 10A to 10C are diagrams showing the X-Y axis offset of the sensor detecting device using the X-Y axis CCD and the offset information displayed by the corrector using the X-Y axis CCD according to the embodiment of the present invention. [Main component symbol description] 100~corrector φ 200~ wireless 3D displacement monitoring sensor 2 0 05~ wireless 3 D displacement monitoring sensor top view 200''~ wireless 3D displacement monitoring sensor side view 200' ''~Bottom view of wireless 3D displacement monitoring sensor 210~electronic level sensor 215~bubble 2150~CCD sensor 220~optical scale 230~XY axis CCD monitoring sensor

Client's Docket No. : PT.AP-604 TT^ Docket No : 0532-A40757-TW / Final / Alex Chen 13 1301441 , 235 ~ standard mark 2355 ~ standard mark center position 300 ~ mechanical arm front end of the dice 400 ~ three Center position of the foot processing board 500 to the processing board 550 to the central mark 555 to the central mark

Client’s Docket No. : PT.AP-604 TT’s Docket No : 0532-A40757-TW/Final/Alex Chen 14

Claims (1)

1301441 卞, A research patent scope: Arm wireless three-dimensional displacement correction system, including: Wireless two-dimensional displacement monitoring sensor, including: - electronic level sensor, including: - bubble arc = between 'the inside of the liquid The material is filled and knows the corrector's display on the screen, the current state, the offset. a device for sensing the position of the bubble; and the position of the bubble obtained by the sensor and displayed in the \ + pre-aligned range - whether the process device is right or not The wireless three-dimensional displacement correction system CCD sensor according to the item 1 is for sensing the bubble. The method is the same as the patent application scope, wherein the sensor is a three-dimensional position. The wireless three-dimensional displacement correction system described in item 1 of the bread H application range is the front of the robot arm, the foot of the three-leg process board, and the process board. 4. A wireless three-dimensional displacement correction system for a branch arm, comprising: a three-legged process board having three exercises; a wireless three-dimensional displacement monitoring sensor having an optical scale disposed above the three-leg process board Wherein the optical ruler is a pair of optical scales, wherein the optical scale is used as a - transmitting end to emit a fine parallel beam, the other optical tape is used as a receiving end to receive a beam signal; and a corrector 'from the wireless The three-dimensional displacement monitoring sensor receives the light beam by Client's Docket No. ·· PT.AP-604 TT^ Docket No : 0532-A40757-TW/Final/Alex Chen 1301441 = the state of the break and is displayed on the money screen, and After the calculation, it is judged whether the 2-axis gap of each-pin position of the three-legged processing board exceeds - pre-read. ^ The wireless three-dimensional displacement correction system described in Patent No. 4, first of all, further includes a front-end tweezers of the Xiang-manipulator f to clamp the wireless three-dimensional displacement monitoring sensing H and move back and forth to make the optical ruler pass Each pin of the three-leg process board. 6. A wireless three-dimensional displacement correction system for a robotic arm, comprising: a processing board having a central mark thereon; a wireless two-dimensional displacement monitoring sensor disposed above the processing board, having a sensor, wherein the sensor defines a standard mark, wherein the sensor Comparing the towel of the towel to the center of the standard mark; and the parent of the parent's position from the sensing|§ obtaining the relative position of the center position of the central mark and the center position of the standard mark Information, and determining whether the process board is offset according to the relative position information, and calculating an offset of the processing board when an offset occurs. T7. The wireless three-dimensional displacement correction system of claim 6, wherein the sensor is an X-Y axis CCD monitor sensor. μ Client’s Docket No. : ΡΤ.ΑΡ-604 TT5s Docket No : 0532-A40757-TW/Final/Alex Chen 16