TWI300733B - - Google Patents
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- TWI300733B TWI300733B TW095130026A TW95130026A TWI300733B TW I300733 B TWI300733 B TW I300733B TW 095130026 A TW095130026 A TW 095130026A TW 95130026 A TW95130026 A TW 95130026A TW I300733 B TWI300733 B TW I300733B
- Authority
- TW
- Taiwan
- Prior art keywords
- platform
- axis
- motion
- micro
- piezoelectric
- Prior art date
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- 230000007246 mechanism Effects 0.000 claims description 16
- 230000009471 action Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 7
- 238000012937 correction Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 2
- 238000003491 array Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000004804 winding Methods 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 206010011469 Crying Diseases 0.000 description 1
- 241000239226 Scorpiones Species 0.000 description 1
- 241000256247 Spodoptera exigua Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095130026A TW200810871A (en) | 2006-08-16 | 2006-08-16 | A nano-grade 3-DOF micro platform mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095130026A TW200810871A (en) | 2006-08-16 | 2006-08-16 | A nano-grade 3-DOF micro platform mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200810871A TW200810871A (en) | 2008-03-01 |
| TWI300733B true TWI300733B (enrdf_load_stackoverflow) | 2008-09-11 |
Family
ID=44767512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095130026A TW200810871A (en) | 2006-08-16 | 2006-08-16 | A nano-grade 3-DOF micro platform mechanism |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200810871A (enrdf_load_stackoverflow) |
-
2006
- 2006-08-16 TW TW095130026A patent/TW200810871A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200810871A (en) | 2008-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |