TW200810871A - A nano-grade 3-DOF micro platform mechanism - Google Patents
A nano-grade 3-DOF micro platform mechanism Download PDFInfo
- Publication number
- TW200810871A TW200810871A TW095130026A TW95130026A TW200810871A TW 200810871 A TW200810871 A TW 200810871A TW 095130026 A TW095130026 A TW 095130026A TW 95130026 A TW95130026 A TW 95130026A TW 200810871 A TW200810871 A TW 200810871A
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- axis
- platform
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- nano
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- 230000007246 mechanism Effects 0.000 title claims abstract description 17
- 230000009471 action Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 239000002699 waste material Substances 0.000 claims 1
- 238000013461 design Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 101100161935 Caenorhabditis elegans act-4 gene Proteins 0.000 description 1
- 206010011469 Crying Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095130026A TW200810871A (en) | 2006-08-16 | 2006-08-16 | A nano-grade 3-DOF micro platform mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095130026A TW200810871A (en) | 2006-08-16 | 2006-08-16 | A nano-grade 3-DOF micro platform mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200810871A true TW200810871A (en) | 2008-03-01 |
| TWI300733B TWI300733B (enrdf_load_stackoverflow) | 2008-09-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095130026A TW200810871A (en) | 2006-08-16 | 2006-08-16 | A nano-grade 3-DOF micro platform mechanism |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200810871A (enrdf_load_stackoverflow) |
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2006
- 2006-08-16 TW TW095130026A patent/TW200810871A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI300733B (enrdf_load_stackoverflow) | 2008-09-11 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |