1300669 Μ对說明 【發明所屬之技術領域】 >本發明係關於一種朝玻璃基板等的基板喷出有機電場 發光（eleCtr〇-luminescence)材料的有機電場發光材料塗布 裝置及方法。 【先前技術】 該種的有機電場發光材料塗布裝置，係包含有將貯存 於供給源内的有機電場發光材料抽出的幫浦、及將從上述 t、、。源透過配管而利用幫浦壓送而來的有機電場發光材料 朝向形成於基板的溝吐出的噴嘴，以構成從噴嘴朝向基板 噴出有機電場發光材科者。 【發明内容】 曼JL所欲解決之問·§!_ 然*，线電場發光材料係將高分子的溶質溶解於有 機冷:丨中I，且具有由於壓力上升而使有機電場發光材料 中之南分子溶質凝膠化的特性。因此，有引起喷嘴堵塞， 且無法從喷嘴穩定地噴出有機電場發光材料的情況。並 且，使喷出之穩定性降你沾七π π 降低的主要原因，不只是壓力而已，1300669 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] The organic electroluminescent material coating device of the present invention includes a pump for extracting an organic electroluminescent material stored in a supply source, and the above t, . The source of the organic electroluminescent material that is pumped by the pump through the pipe is directed toward the nozzle formed in the groove of the substrate to form an organic electric field luminescent material from the nozzle toward the substrate. SUMMARY OF THE INVENTION Man JL wants to solve the problem §!_ 然*, the line electric field luminescent material dissolves the solute of the polymer in the organic cold: 丨 I, and has the organic electric field luminescent material due to the pressure rise The characteristics of gelation of southern molecular solute. Therefore, there is a case where the nozzle is clogged and the organic electroluminescent material cannot be stably ejected from the nozzle. And, the main reason for reducing the stability of the spray is that you are not only under pressure.
亦有有機電場發光枯粗夕、、六I 材料之机Ϊ或黏度等的塗布條件，且使 用以往習知的喷嘴時，合 ^ θ因塗布條件而有無法使有機電場 舍光材料從噴嘴穩定地喑ψ 也噴出的情況。因而，雖期望一種適 於有機電場發光材料之 、 寻丨生或塗布條件的喷嘴構成，但是 在習知技術中’對於嗜ΦThere are also coating conditions for the organic electric field to emit light, the enthalpy of the six-I material, or the viscosity. When a conventional nozzle is used, the organic electro-optic material cannot be stabilized from the nozzle due to the coating conditions. The cellar is also ejected. Therefore, although a nozzle configuration suitable for the organic electroluminescent material, the seeking condition or the coating condition is desired, in the prior art,
、噴出有機電場發光材料之喷嘴並未做 特別的考2：，而有盈法获A 、、法％疋地噴出有機電場發光材料，且 314633修正本 1300669 良好地塗布有機電場發光材料的問題。 本發明係有鑑於上述問題點而開發完成者，其目的在 於提供一種可從噴嘴將有機電場發光材料經常穩定地朝向 基板噴出的有機電場發光材料塗布裝置及方法。 解決問題之丰is： 本發明之有機電場發光材料塗布裝置，係具備有從設 於其前端部之孔口朝向基板喷出含有機電場發光材料之塗 布液的噴嘴者，為了達成上述目的，在上述噴嘴之内部， 於連通上述孔口使上述塗布液流通至上述孔口的流路上設 有過濾器。 在如此所構成的有機電場發光材料塗布裝置中，因在 喷嘴内内藏有過濾器，故即使異物與有機電場發光材料同 時流入噴嘴内，該異物亦可在到達孔口之前由過濾器所捕 集而去除。如此可依内藏過濾器而防止噴嘴前端部之噴嘴 堵塞。 、 在該有機電場發光材料塗布裝置中，為了使含有機電 場發光材料之塗布液從噴嘴喷出，乃將塗布液壓送至喷 嘴，而過濾器會接受該壓力而朝孔口側撓曲。因而，藉將 過濾器配置在離開孔口之内部位置的近旁相當於撓曲量的 距離，即可防止撓曲的過濾器與孔口密接。再且，從如下 觀點來看，配置於内部位置之近旁亦有其優點。亦即，當 過渡器與孔口之離開距離變長時，成為溶質的有機電場ς 光材料會在塗布液壓送於其間的期間凝膠化，而當該凝膠 化溶質之尺寸大於孔口時，就會因塞住孔口而發生堵塞。 314633修正本 7The nozzle for ejecting the organic electroluminescent material has not been specially tested 2:, and the method of absorbing the organic electroluminescent material by A, method, and 314633 corrects the problem of well coated organic electroluminescent material. The present invention has been made in view of the above problems, and an object thereof is to provide an organic electroluminescent material coating apparatus and method which can stably eject an organic electroluminescent material from a nozzle toward a substrate. The organic electroluminescent material coating device of the present invention includes a nozzle that ejects a coating liquid containing an organic electroluminescence material from an orifice provided at a tip end portion thereof toward the substrate, and in order to achieve the above object, Inside the nozzle, a filter is provided in a flow path that communicates with the orifice to allow the coating liquid to flow to the orifice. In the organic electroluminescent material coating apparatus configured as described above, since the filter is contained in the nozzle, even if the foreign matter and the organic electroluminescent material simultaneously flow into the nozzle, the foreign matter can be caught by the filter before reaching the orifice. Set and remove. This prevents nozzle clogging at the tip end of the nozzle depending on the built-in filter. In the organic electroluminescent material coating device, in order to eject the coating liquid containing the electroluminescent field luminescent material from the nozzle, the coating hydraulic pressure is sent to the nozzle, and the filter receives the pressure and deflects toward the orifice side. Therefore, by arranging the filter in the vicinity of the inner position away from the orifice corresponding to the distance of the deflection amount, the deflected filter can be prevented from being in close contact with the orifice. Further, from the following point of view, there is an advantage in being placed near the internal position. That is, when the distance between the transition vessel and the orifice becomes longer, the organic electric field phosphor material that becomes a solute gels during the application of the hydraulic pressure therebetween, and when the size of the gelled solute is larger than the orifice , it will block due to plugging the orifice. Amendment 314633 7
l3〇〇669 :對於此，將過遽器配置於内部位置之過減 盗與孔口之離開距離設定在過濾器之撓曲量程度，則在这 :器與孔口之間發生溶質之凝膠化的可能性就幾乎會變 無，而可消除上述問題。 關於過據器安裝在噴嘴上，雖非被特別限定者 ^過濾 'f設計成相對於喷嘴為可|卸式時，則即使例Γ 過滤益中捕集多數的異物而需要交換過濾器 過遽器而可重新開始塗布處理，比起為了要重：開 布處理而經常需要進行八 ’ 高保養性。 1 除的情況還能提 在此’可將職IM目料㈣為可㈣ 成，例如只要料㈣作 /、體構 過滤器的噴嘴本體、及了 匕3有在其内部空間可内藏 本體、i可配置於喷嘴本 其大致中央部形成有孔口的前 ，，卩而且在 本體之内部空間設置成為可，、’且將：據器在噴嘴 相對於噴嘴本體為可裝卸式即、可:’進而將前端構件作成 滤器與孔口之離開距離 $ 了正確地设定過 空間為可插脫式，而且在二在喷嘴本… 件之間，而用以規定過遽器與前=於過》慮器與前端構 在此，關於嗔嘴，例如可構出構件之間隔的間隔物。 構成，係包含有在其内部空下亦即，過濾、器之 及可配置於噴嘴本體之前藏過Ml噴嘴本體、 孔口的前端構件，且將過據器，1在其Μ中央部形成有 流入噴嘴本體之内部空間：士配置於離開孔口相當於以 、之液所造成的過濾器之撓曲 314633修正頁 8 工3〇〇669 量之距離之内部位置的近旁。 再且，將過濾器作成在噴嘴本體之内部空間為可插脫 式’且前端構件相對於喷嘴本體為可裝卸式時，就可容易 進行過濾器交換，且可更加提高保養性。 再且’為了正確地設定過濾器與孔口的離開距離，例 如亦可具備有在喷嘴本體之内部空間為可插脫式而且在内 部空間插於過濾器與前端構件之間用以規定過濾器與前端 構件之間隔的間隔物。 為了達成上述目的，本發明有機電場發光材料塗布裝 置’係朝向形成於基板之指定寬度的溝將含有機電場發光 材料之塗布液從喷嘴之噴嘴孔連續形成液柱並且吐出者， 其特徵為：形成於基板之溝寬為100//m以下；噴嘴孔之直 徑為16至3 5 // m之範圍内的指定值。 若依據如此所構成的有機電場發光材料塗布裝置，則 例如將溝寬設為1〇〇 Am以下，喷嘴孔之直徑設為35#m# 下時’由於對準寬度方向之兩側至少有65 # m之邊限，所 以會成為喷嘴裝置内之定位精度的邊限，同時亦成為基板 或溝等之機械定位精度的裕度，故無塗布液自溝溢出之 虞’且可較佳地對基板之溝噴出塗布液。並且，當將噴嘴 孔之直徑设為1 6 # m以上時，則無流量過小而使產量降低 之虞。如此’藉由將噴嘴孔之直徑設為“至”以㈤之範圍 的指定值，則無關於溝之寬度尺寸等的塗布條件，而可將 塗布液經常地噴出成連續的液柱狀。 假設上述噴嘴為具備有喷嘴本體；及在該噴嘴本體之 9 314633修正頁 1300669 月ίι端P為可裊卸式’且於其大致中央部穿設有孔口以作為 喷似的前端構件時，藉由事先準備穿設有直徑互異之孔 :的複^個前端構件，則僅以替換前端構件，即可例如按 照溝之寬度尺寸而輕易地變更噴嘴孔之直徑。 、、再且，當喷嘴本體可在其内部空間内藏過濾、器；且在 連k孔冑塗布液流通至孔口的流路上設置過濾器時，則 即使異物與有機電場發光材料同時流入喷嘴内，該異物亦 /達孔口之4由過濾器捕集並予以去除。如此依内藏 過濾器即可防止噴嘴前端部之噴嘴堵塞。 π再且，當以相當於流入流路中之塗布液所造成的過濾、 器之撓曲量之距離來配置在離開孔口之内部位置的近旁 牯’則即使接受將塗布液壓送至噴嘴的壓力而使過渡器朝 孔口側撓曲，亦可防止撓曲的過濾器與孔口密#。；且， 將過濾器配置於内部位置的近旁，即將過濾器與孔口之離 開=離σ又疋在過濾器之撓曲量程度，則在過滤器與孔口之 間發生成為溶質的有機電場發光材料之凝膠化的可能性幾 乎會變無。 、士再且，將過濾器設成在喷嘴本體之内部空間為可插脫 ^彳】如即使在過濾益中捕集多數的異物而需要交換過 濾器時，只交換該過濾器即可重新開始塗布處理，比起為 了重新開始塗布處理而經常需要進行噴嘴之分解婦除的情 況更可提高保養性。 再2 ’可在喷嘴本體之内部空間，過濾器與前端構件 之間’设成為可插脫式之間隔物以規定過濾器與前端構件 314633修正頁 10 1300669 之間隔日寺，就可正喊地設定過濾器與孔口之離開距離。 再且，為了達成上述目的，本發明之有機 料塗布奘罢j么士 雷m 形成於基板之減寬度的溝將含有機 + 4切料之塗布液從㈣之㈣孔連續形成液柱並且 I出者，其特徵為：上述噴嘴孔之直徑，係根據至少包含 月ίι述溝之寬度尺寸之塗布條件而決定者。 、〜依據該構成，則藉由噴嘴孔之直徑可根據塗布條件來 决疋，則無關於塗布條件即可將塗布液經常地噴出成連續 的液柱狀。 ' ’ “上述塗布條件，係包含塗布液之流量、塗布液中之有機 電場發光材料的濃度、塗布液之黏度及溝之寬度尺寸中之至 個則可按照上述流量、濃度、黏度、寬度尺寸等的大 小來決定喷嘴孔之直徑，而可進行相應於塗布條件的噴出。 再且，亦可更包含有··輸入上述塗布條件用的輸入機 構；及用以顯示指定資訊用的顯示機構；其中，根據上述 輪入機構所輪入的上述塗布條件來決定上述噴嘴孔之適當 直徑，且將該適當直徑顯示，在上述顯示機構。 若依據該構成，則由於可按照各自的塗布條件來決定噴 萬孔之適§直徑並予以顯示，所以可提高操作性及便利性。' 在此开y下，右更具備有用以記憶上述塗布條件與上 述噴嘴孔之適當直徑之對應關係的記憶機構，其中根據記 憶於上述記憶機構中之上述對應關係以選擇對應上述輸入 機構所輸入之上述塗布條件的適當直徑，且將該選擇之適 當直徑顯示在上述顯示機構上時，即可輕易地進行適當直 11 314633修正頁 UUU069 徑之決定。 再且，若上述噴嘴係包含 本體之前端部為可裝卸^且以及在該噴嘴 以作為上述噴嘴孔之前端 中央部穿設有孔口 徑互異之孔口的複數個前端構件從:有事先準備之直 件而決定之適當直徑對庫 /、根據上述塗布條 述喷嘴本體上時，則只㈣換::::前:構件㈣^ 適當直徑之噴嘴孔。另外，在二件，即可輕易地變更 直徑相同直徑的孔σ時， 備與經決定之適當 應適當直捏的孔口即可。將直㈣接近的孔口當作對 器二可在其内部空間内藏過遽 哭時，則g 土液，瓜通至孔口的流路上設置過濾 二、：使有異物與有機電場發光材料同時流入噴嘴 二二異物等亦可在到達孔口之前由過遽器捕集並予以去 于、此由内藏過遽器P方ϋ嘴前端部之噴嘴堵塞。 w 、以相當於流入流路中之塗布液所造成的過濾 為曲量之距離將過濾器配置在離開孔口之内部位置的 Μ方恰則即使接受將塗布液壓送至噴嘴的壓力而使過濾 器朝孔口側彎曲，亦可防止彎曲的過濾器與孔口密接。並 由於將過濾态配置於内部位置的近旁，而將過滤器與 孔口之離開距離設定在過濾器之撓曲量程度，則在過濾器 /、孔口之間發生作為溶質的有機電場發光材料之凝膠化的 可能性幾乎會變無。 並且’將過濾器設在噴嘴本體之内部空間成為可插脫 12 314633修正頁 1300669 j時，則即使在過濾器中捕集多數的異物而需要交換過濾 盗，只交換該過濾器即可重新開始塗布處理，比起為了重 新開始塗布處理而經常需要進行噴嘴之分解掃除的情況更 可提南保養性。 ϋ且’若在喷嘴本體之内部空間於過濾器與前端構件 之間插没間隔物成為可插脫式，以規定過濾器與前端構件 之間隔時，就可正確地設定過濾器與孔口之離開距離。 並且，為了達成上述目的，本發明之有機電場發光材 料塗布方法，係朝向形成於基板之指定寬度的溝將含有機 電場發光材料之塗布液從噴嘴之噴嘴孔連續噴出者，其特 徵為：朝向寬度為l〇0/zm以下的溝而從直徑為16至35#功 之噴嘴孔連續形成液柱並且噴出塗布液。 若依據該構成，則例如溝寬為1〇〇//111時，則當將噴嘴 孔之直徑設為35 # m以下時，由於對準寬度方向之兩側至 少有65# m之邊限，所以會成為喷嘴裝置内之定位着度的 邊限’同％亦成為基板或溝等之機械定位精度的裕度，故 無塗布液自溝溢出之虞，且可較佳地對基板之溝噴出塗布 液。再且，當將噴嘴孔之直徑設為16# m以上時，則無流 里過小而使產篁降低之虞。如此，藉由將喷嘴孔之直徑設 為1 6至3 5 // m之範圍的指定值，則無關於溝之寬度尺寸等 的塗布條件，可將塗布液經常地喷出成連續的液柱狀。 再且，為了達成上述目的，本發明之有機電場發光材 料塗布方法，係朝向形成於基板之指定寬度的溝將含有機 電％發光材料之塗布液從噴嘴之喷嘴孔連續形成液柱並且 13 314633修正頁 1300669 尺=者其特徵為··噴嘴孔之直徑係僅根據前述溝之寬度 料的濃度根^布液之流量、塗布液中之有機電場發光材 寸所決土液之黏度中之至少—個與前述溝之寬度尺 =依據該構成，噴嘴孔之直徑，係由根據包含塗布液 ^、塗布液中之有機電場發光材料的濃度、塗布液之 4度及溝之寬度尺寸中之至少―個的塗布條件來決定，所 ::如可按照上述流量、濃度、黏度、寬度尺寸的大小來 二疋噴嘴孔之直徑’即可無關於塗布條件而可將塗布液經 吊地噴出連續的液柱狀。 【實施方式】 (第1實施形態） 首先就本發明之有機電場發光材料塗布裝置的第1 =施形態加以說明。該第〗實施形態，係在噴嘴上設有過濾 器，藉由有效果地抑制噴嘴之堵塞，即可將指定溶劑中混 合有機電場發光材料以作為溶質的塗布液（以下，亦簡稱為 「有機EL材料」）經常穩定地吐出者。 第1圖係本發明有機電場發光材料塗布裝置之第1實施 开> 怨的示意圖。該有機電場發光材料塗布裝置，係如圖所 示，包含有··載置台1，用以載置接受紅、綠、藍色之有機 電場發光材料l〇a至l〇c之塗布的玻璃基板s ;使該載置台2 朝指定方向移動的載置台移動機構部2;位置對準標記檢測 部3，用以檢測形成於玻璃基板s上之位置對準標記（圖示省 略）之位置；將紅色之有機電場發光材料1 〇a供至紅色用之 314633修正頁 14 1300669 噴嘴4a的第1供給部5;將綠色之有機電場發光材料10b供至 綠色用之噴嘴4b的第2供給部6;將藍色之有機電場發 料10c供至藍色用之噴嘴4c的第3供給部7;使各色之喷嘴4狂 至4c朝指定方向移動的喷嘴移動機構部8，·以及控制部9 / 用^控制载置台移動機構部2、位置對準標記檢測部3、第1 至第3供給部5至7、及噴嘴移動機構部 該等構成要素之中，帛！供給部5，係例如包含有：紅 色之有機電場發光材料10a的供給源⑽；從該供給源 中抽出紅色之有機f場發光材料】〇 a的幫浦2 ι ;用以檢測紅 色之有機電場發光材料〗0a之流量的流量計22 ;及用以去除 紅色之有機電場發光材料1〇a中之異物的過濾器Μ。 第2供給部6包含有：綠色之有機電場發光材料丨〇 b的供 給源20b ;從該供給源20b中抽出綠色之有機電場發光材料 l〇b的幫浦21 ;用以檢測綠色之有機電場發光材料丨⑽之流 量的流量計22;及用以去除綠色之有機電場發光材料i〇b 中之異物的過濾器23。 第3供給部7包含有：藍色之有機電場發光材料i 的供 、、’e源20c，從該供給源2〇c中取出藍色之有機電場發光材料 1 〇c的幫浦2 1 ;用以檢測藍色之有機電場發光材料丨〇c之流 量的流量計22;及用以去除藍色之有機電場發光材料1〇e 中之異物的過濾器23。 然後，控制部9係以指定量使載置台丨朝指定方向移動 的方式來控制載置台移動機構部2，且以指定量使噴嘴4a 至4c朝指定方向移動的方式來控制噴嘴移動機構部8，同時 314633修正本 15 1300669 以按照來自第1至第3供給部5至7之各流量計2 2的檢測值a 至c而從喷嘴4a至4c流出指定流量之有機電場發光材料1⑹ 至l〇c的方式’對第1至第3供給部5至7之各幫浦21輸出指令 d至f。具體而$，控制部9係將裳置各部控制如下且將有機 電場發光材料在玻璃基板S上塗布成條狀。 當喷嘴4a至4c位於玻璃基板S之塗布開始位置時，控制 部9就以對各幫浦21指示開始從各喷嘴乜至4c將有機電場 發光材料10a至l〇c朝玻璃基板s喷出，同時使噴嘴乜至扑 移動成大致直線狀的方式加以控制。藉此，紅、綠、藍色 之有機電場發光材料10a至10c就會同時以條狀塗布在玻璃 基板S上。 ▲然後，控制部9，係當喷嘴4a至4c位於玻璃基板s之塗 布停止位置時，就對各幫浦21指示使有機電場發光材料⑺& 至l〇c彳τ止從各噴嘴牦至扑朝玻璃基板§噴出，同時停止噴 嘴4a至4c之移動。 、 上述構成的有機電場發光材料塗布裝置 中一口各喷嘴乜至4c中内藏有過濾器而可有效地防止喷i =。以T ’係邊參照第2圖而邊詳述喷嘴構成。另外，」 以：：至4c:構成由於相同，所以就喷嘴4a之噴嘴構成i \ ’而省略其他的喷嘴4b、4c之構成說明。 喷嘴ΓΛ係組入第1圖之有機電場發光材料塗布裝置中々 賀為的不思圖；间屑j γ 該噴嘴4“系1借古’（ 圖；同圖(b)為分解組裝圖 Μ +趣"#有其前端部為開口的喷嘴本體41。然後， 的嘴本體41之内部空_，朗序插人間隔物42、過 314633修正本 16 1300669 滤器43、間隔物44及前端構件45，同時藉由從喷嘴本㈣ 之別知側（同圖之下側）將固定蓋46自外部裝設在前端部上 即可在:部空間SP内保持。再且，當將固定蓋46從喷嘴本 體41之前端部拆除時’就可將前端構件45從喷嘴本體41拆 $ ’進而從喷嘴本體41之内部空間sp取出間隔物料及過滤 43另外，亦可在固定蓋46及噴嘴本體“之前端部分別 刻上母螺紋及公螺紋，而使固定蓋46螺合固定在喷嘴本體 41之前端部’藉此即可提高固定力，同時可容易進行固定 盖4 6之裳卸。 在如上述方式組裝的喷嘴“中，以從噴嘴本體〇之後 端側（同圖之上側）連通内部空間sp的方式在喷嘴本體41上 設有貫穿孔41a’有機電場發光材料1()係從第2供給部$透過 該貫穿孔41a而壓送至内部空間sp。又，壓送至喷嘴乜的有 機電場發光材料1(^，係在以内部空間卯為流路而流至喷 嘴前端側，且透過過濾器43之後，通過設於前端構件化之 大致中央部的孔口 45a再予以噴出。如此在本實施形態中喷 嘴本體之内部空間SP係具有連通孔口45&並使有機電場 發光材料1 0a流通之流路的功能。 然後，在該流路（喷嘴本體41之内部空間sp)上，以二 個間隔物42、44夾住過濾器43之外周緣並保持固定於内部 空間SP之指定位置。該位置係相當於本發明之「内部位置 者’其成為從前端構件45之孔口 45a至内部空間sp側（同圖 之上側）只離開間隔物44之厚度D的位置。如此藉由使用間 隔物44即可正確地設定過濾器43與孔口 45a之離開距離 314633修正本 17 1300669 D。在此’在本實施形態中，係使該厚度D，與因流至流路 (内部空間SP)之有機電場發光材料1 〇a而造成的過濾器43 之撓曲量大致一致。該理由如下所述。 該過濾器43係為了在從第1供給部5壓送至喷嘴4a之有 機電％發光材料1 0 a内去除異物或凝膠化溶質等而設在流 路上者’在本實施形態中例如係使用聚四氟乙烯樹脂 (PTFE)以作為過濾器材質，且採用過濾精度為1〇# m者。 該「過濾精度」，係表示過濾效率達99.9%以上時的粒子直 徑之意。因而，在該實施形態中，將上述過濾器43配置在 孔口 45a之上游側，即可從有機電場發光材料1〇a中去除具 有10// m以上之粒子尺寸的異物或凝膠化溶質等，且可防 止因該專異物等而發生孔口 4 5 a之堵塞於未然。 另外’如此構成的過濾器43係具有可撓性，而且供至 噴嘴4a之有機電場發光材料1〇a由於係被壓送而來，所以過 濾器43之中央部會由於有機電場發光材料14&之壓力而朝 噴嘴前端側（同圖之下方侧）而撓曲。因此，孔口 45a與過濾 器43之離開間隔就成為有機電場發光材料i〇a之最大噴出 壓力時的過濾器43之撓曲量以上。 另一方面，有關間隔物44之厚度D，係大於過濾器杓 之撓曲1較佳’但並非無論多少只要大即可。如此說，係 因當過濾、器43與孔口 45a之離開距離D變長時，會有在有機 電場發光材料10a壓送至其間的期間發生作為溶質的有機 電場發光材料10a之凝膠化並發生與先前技術同樣的問題 之虞所致。相對於此，將過濾器43配置於内部位置之近旁， 314633修正本 18 1300669 即將^慮㈣與孔D45a之離開距離D設定在過滤器似 凡曲里釭纟則在過濾43與孔口 45a之間發生溶質之凝膠 化的可能性就會幾乎變無，且可消除上述問題。因此，考 慮該等點之後在本實施形態中，由於最大噴出力 (=3.5kgf/cm2)之過遽器43的撓曲量係為0 6_，所以將離 開距離D設為〇.6至〇8顏。但是，該等的值係其一例，由 广濾„ 43之撓曲$會依過濾器43之材質或過濾精度等或 是吐出力等而變動’所以較佳者係在正確地把握過滤㈣ 之撓曲量後再設定離開距離D。 乂上所述’若依據該第1實施形態，則由於係使各噴 嘴4a至4c内藏過濾器43以阻止具有i〇#茁以上之粒子尺寸 的，物或凝膠化溶f等到達孔口 45a，所以可確實地防止因 該等異物等造成孔σ 45a之堵塞。結果，可穩定地進行對玻 璃基板S噴出有機電場發光材料心至…，且可提高製品良 率。再且，藉由抑制噴嘴之堵塞而可更加降低有機電場發 光材料塗布裝置之運轉停止頻率，且可提高裝置之運轉效 率。 k濾器43之大致中央部雖會因接受流至喷嘴本體* 1之 内部空間SP的有機電場發光材料1〇a至1〇。之壓力而朝孔口 45a側撓曲’但是過濾器43由於係以相當於該撓曲量之距離 而配置在離開孔口 45a之内部位置的近旁，所以即使過濾器 ^3因壓送的有機電場發光材料i〇a至而撓曲，亦可防止 與孔口 45a密接，同時由於過濾器43與孔口 45a之離開距離 D車父短於撓曲量程度（上述實施形態中為0.6mm)，所以該等 314633修正本 19 1300669 並不會在過濾器43與孔口 45a之間發生溶質的凝膠化，而可 將良好的有機電場發光材料10a至1〇c透過孔口 45a而朝向 玻璃基板S喷出。 更且，在上述所構成的有機電場發光材料塗布裝置 中，雖與裝置運轉，同時因異物或凝膠化溶質等在過濾器 43被捕集而需要進行過濾器交換，但是由於過濾器43係相 對於喷嘴本體41之内部空間sp呈插脫自如’所以可輕易地 進行過濾器交換，且可更加提高保養性。 又，由於没置介插於過濾器43與孔口 45a之間的間隔物 44，所以可正確地設定離開距離d。 然而，習知有機電場發光材料塗布裝置之喷嘴堵塞的 主要原因，除了溶質之凝膠化以外，還可考慮以下因素。 亦即’一般在該種的有機電場發光材料塗布裝置中，雖在 裝置上升時於配管内進行晃動以去除異物，但是僅利用該 晃動事實上並無法全部去除滯留在配管接頭部分等之積液 處的異物，有日寸該積液處的異物在晃動後隨著時間經過會 送至喷嘴側。然後，具有尺寸大於孔口的異物會塞住喷嘴 之孔口並產生堵塞的情形。 更且，即使異物或凝膠化溶質的尺寸小於孔口，有時 該等的複數個亦會同時送至孔口，且在該孔口附近使複數 ^異物等因互㈣受橫向壓力無法獲得活動而發生滞留狀 態。結果，該等複數個異物等就會塞住孔口而引起噴嘴堵 塞° 如此在g知有機電場發光材料塗布裝置中當發生喷嘴 20 314633修正本 1300669 堵塞時’就無法穩定地將液體朝向基板噴出，且會招致製 品良率之降低。更且當噴嘴堵塞持續進行時，液體本身就 無法從噴嘴噴出，且必須暫時中斷塗布處理，以進行嘴嘴 之分解掃除，造成使塗布裝置之運轉效率降低的主要原因 之一。再且，在進行噴嘴之分解掃除時有必要去除塞住孔 口之異物或凝膠化溶質等物質，且在保養性之方面亦有改 善的餘地。 相對於此，若依據上述第1實施形態，則如上所述，可 解決該等習知有機電場發光材料塗布裝置所具有的問題 另外，本發明並非被限定於上述第1實施形態，只要未 脫離其意旨除了上面所述以外仍可進行各種的變更。例 如，雖係採用過濾精度為1 〇 A m者以作為過濾器43，但是 此只要採用適於每一有機電場發光材料塗布裝置、或是I -各喷嘴的過遽器即可'然後，較佳者係按照各過滤器而 使離開距離D最適當化。此點在上述第i實施形態中，由於 係構^可利用間隔物4 4而正確地設定離開距離D，所以只 要在每-個噴嘴上將對應最佳離開距離的間隔物介插於過 遽為4 3與也端構件4 5之間即可。 再且，在上述第！實施形態中，雖本發明適用於在前端 構件45上形成單-孔σ 45a的噴嘴，但是孔口之個數、配置 及形狀等係任意的，且本發明可適用於從噴嘴前端部吐出 有機電場發光材料的有機電場發光材料塗布裝置全面中。 再且，在上述第1實施形態中雖具備有間隔物44，但是 314633修正本 21 1300669 本發明並非被限定於此’其亦可不具備有間隔物。惟如上 述第1實施形態所示’較佳者係以具備間隔物44者，較能正 確地設定離開距離D。 (第2實施形態） 其次’就本發明之有機電場發光材料塗布裝置的第2 實施形態加以說明。該第2實施形態，係藉由根據塗布條件 來決定設於喷嘴之噴嘴孔的直徑，即可將有機電場發光材 料經常穩定地喷出者。另外，在與上述第丨實施形態相同構 成上附註相同的元件符號，並省略其說明。 第3圖係本發明有機電場發光材料塗布裝置之第2實施 形態的示意圖。第4圖係顯示第3圖之有機電場發光材料塗 布裝置之基板與噴嘴之位置關係的立體模式圖。 如第4圖所示，該有機電場發光材料塗布裝置，係將有 機電場發光材料10a從喷嘴朝形成於基板s上的溝1〇1噴出 者，且在基板S之溝ιοί上形成有例如由IT〇(IndiumTin Oxide ;銦錫氧化物）所構成的透明電極。溝l〇i之寬度尺 寸，在本實施形態中例如為L ^ j 〇〇 # m之指定值。 如第3圖所不，該有機電場發光材料塗布裝置，雖係與 第1實施形態（第1圖）大致相同的構成，但是其在控制部9中 設有記憶體11，進而由控制部9所控制，且由液晶顯示器及 觸摸板所構成’並具備有兼做輸入部及顯示部的操作顯示 面= 12。然後，控制部9係控制載置台移動機構部2俾使載 置口 1以私定里朝γ方向移動，且控制喷嘴移動機構部8俾 使喷f 4a至4c以指定量朝又方向移動，同時與第工實施形態 22 314633修正本 1300669 同樣地控制裝置各部，並將有機電場發光材料10a至l〇c在 玻璃基板S上沿著溝丨〇丨而塗布成條狀。 然而’如上述所構成的有機電場發光材料塗布裝置的 各喷嘴4a至4c，基本上係與第2圖中所說明之第1實施形態 為同一構成。亦即，如第2圖所示，將穿設有相當於本發明 之「喷嘴孔」之孔口 45a的前端構件45構成可在噴嘴本體41 上裝卸自如。因而，若事先準備穿設有直徑互異之孔口 45a 的複數個前端構件45，則可輕易變更喷嘴4a之噴嘴孔的直 徑0 其次，參照第5、6圖，就變更喷嘴孔之直徑的優點加 以說明。第5、6圖係用以計測變更對幫浦u之指令d並以各 種的喷出壓力噴出塗布液時之流量（每一單位時間的噴出 量）的結果示意圖；第5圖係顯示從同一直徑之孔口喷出不 同濃度之塗布液的結果；而第6圖係顯示從不同直徑之孔口 噴出相同濃度之塗布液的結果。另外，第3圖之第1至第3 供給部5至7中的配管系之耐壓為〇35驗，在第5、6圖中 係將喷出壓力之最大值設為〇.3MPa。 第5圖中所用之塗布液中的有機電場發光材料之濃度 係為D1 > D2 > D3 > D4。例如在濃度D4之低濃度時則喷出 壓力約〇.12MPa而流量約⑵心分，而在濃度⑴之高濃产 時則喷出壓力約0.2MPa且為同一流量之約125//]1/分 濃度中之喷出Μ力的最小值(例如濃度D4中之G•嶋叫， 係形成有連讀的液柱之最小值，且在此未滿之喷出壓力下 未形成有連續的液柱而會變成液滴。從第5圖可明白，隨著 314633修正本 23 1300669 有機電場發光濃度變高，為了獲得同一流量所需的喷出麼 力亦會變高。 第6圖中所用的喷嘴孔之直徑係i 6、j 8、2〇、22 # m。 即使在第6圖中，亦與第5圖同樣，喷出壓力之最小值（例如 直徑22/zm中之021MPa)，係形成有連續的液柱之最小值， 且在此未滿之喷出壓力下未形成有連續的液柱而會變成液 滴。 從第6圖可明白，當噴嘴孔之直徑較大且非為大流量時 就未形成有液柱，而在形成液柱並連續欲以小流量吐出時 就有必要縮小噴嘴孔之直徑。又反之，#喷嘴孔之直徑較 小時，則即使將吐出壓力提高至上限（〇.3MPa)亦只能獲得 小流量（例如直徑16//01中可獲得流量13〇#17分），且為了 獲得大流量就必須增大噴嘴孔之直徑。 另外，雖在第5、6圖中，有機電場發光材料係使用作 如聚乙烯咔唑（PVK)系，而溶劑係使用例如菜 (mesitylene)，但是並非被限定於該#，有機電場發光材料 亦可為聚苯系、聚芴系、聚苯乙烯系(PPV)、氰λ =叫-PPV系—、贿(Μ Ε Η)_ρρν系等，而溶㈣可為甲 本、一甲苯、奈滿、苯連四甲基、菌香驗等。 並且’在第5时係將噴嘴孔之直徑設為18/zm，而在 第6圖中係將有機電場發光材料之濃度設為D1。 在使用第3圖之有機電場發光材料塗布裝置以製造有 機電場發光顯示裝置的情況， ，、愛布液之黏度（即流動性） 係隨著使料有機電場發光 1 先材科、洛劑之種類或濃度而變 314633修正本 24 ϊ3〇〇669 匕再且，所需的流量亦隨著所需要的塗布液之膜厚或基 板S之溝1〇1的寬度尺寸等而變化。 土 /目對於此，若依第5、6圖，則可知不會變成過大的噴 出[力而在從配官系之耐壓中具有裕度之適當的噴出壓力 下為了邊形成連續的液柱而邊進行塗布液之喷出，按照 f布條件(例如塗布液中之有機電場發光材料的濃度、依： /辰度而變化的塗布之黏度、基板§之溝的寬度尺寸L、 所需的塗布液之流量等），來變更噴嘴孔之直徑是有效的。 例如，若溝101之寬度尺寸L=1〇〇 Am，則當將噴嘴孔 之直徑設為35 // m以下時，由於對準寬度方向之兩側至少 具有65/zm之邊限，所以會成為喷嘴钧至軋之機械定位精 度的邊限，同時亦成為基板s(溝1〇1)之機械定位精度的裕 度，所以沒有塗布液從溝101溢出之虞，且可對基板s之溝 ιοί較佳地噴出塗布液。而且，當將喷嘴孔之直徑設為16 “以上時’就沒有流量過小而降低產量之虞，且可對基 板S之溝ιοί較佳地喷出塗布液。 如此，第2實施形態之有機電場發光材料塗布裝置，其 邊形成液柱而邊連續地將有機電場發光材料l〇a、i〇b、 從噴嘴孔朝向溝101吐出，係因當變成液滴狀時就會使噴出 對象不穩定之故。 其次’參照第3圖說明噴嘴孔之適當直徑的決定。控制 部9，係由CPU等所構成，且具有記憶體丨丨。在記憶體U 中，亦可事錢存有例如塗布液中之有機電場發光材料的 濃度、依該濃度而變化的塗布液之黏度、基板s之溝ι〇ι的 314633修正本 25 1300669 I度尺寸L、所需塗布液之流量等的塗布條件、與噴嘴孔 之適當直徑間的對應關係，以作為函數式。然後，控制部9， 係在操作顯示面板12中依序顯示塗布條件，當操作者輸入 所對應的資料時，從該輸人值中根據上述對應關係而決定 適當直徑’且顯示在操作顯示面板12上。 此時，當輸入溝101之寬度尺寸L及塗布液之膜厚以作 為塗布條件時，亦可利用控制部9算出所需流量，且按照該 結果決定適當直徑。而且，當輸人溝m之寬度尺寸l及所 需流量以作為塗布條件時，亦可按照該輸入資料決定適當 直徑。再且，當輸入溝1()1之寬度尺寸L及塗布液之黏度以 作為塗布條件時，亦可按照該輸入資料決定適當直徑。另 外，例如^先將上面所述作為代表性之有機電場發光材料 及溶劑之黏度等的特性儲存在記憶體丨丨中，且輸入所使用 之有機電場發光材料及溶劑之種類'濃度以作為塗布條件 時’亦可按照該輸人資料決定適當直徑。如此在本實施形 態中，操作顯示面板12係相當於輸入機構、顯示機構，而 記憶體11係相當於記憶機構。 如此’若依據第2實施形態，則由於係將噴出含有機電 場發光材料We之塗布液的喷料之喷嘴孔的直徑設 為1 6至3 5 // m之範圍的指企枯 _ V靶国^日疋值，所以對於為了實現高解像 度而形成於基板S上之寬度設為窄於1〇 —以下的溝 10W尤會成為喷嘴4a之機械定位精度的邊限，同時亦成為 基板S(溝m)之機械定位精度的裕度，所以塗布液不會溢 出更且里不曰心生不足，故而可良好地進行塗布液之 314633修正本 26 l3〇〇669 塗布。 然而，作為習知有機電場發光材料塗布裝置，雖例如 在曰本專利特開2000_202357號公報中有揭示一種將有機 材料從噴嘴孔中連續噴出的裝置’其中該裝置之喷嘴孔的 士徑設定成大於5〇"m，較佳為設定成大於2〇”m。但是 :由使用該種具有較大噴嘴直徑之噴嘴的《置，很難朝向 寬度尺寸為100# m以下的溝良好地喷出塗布液。亦即，對 於塗布寬度會隨著有機電場發光顯示裝置之解像度的提昇 而變窄的現狀而言在上述習知裝置中很難柔軟性地對應， 但是若依據上述第2實施形態，則可消除該種問題。 若依據第2實施形態，由於構成使穿設有孔口 45&之前 端構件45相對於噴嘴本體41可裝卸自如的各噴嘴枱至4c， 所以可輕易地變更噴嘴孔之直徑。因而，藉由事先準備穿 叹有直徑互異之孔口 45a的複數個前端構件，且按照塗布 條件裝設具有適當直徑之孔口的前端構件，即可事先將噴 备孔經㊉地设為適當直徑者，且藉此可實現通用性高的裝 置。結果，無關於塗布條件且可確實地形成液柱並連續穩 定地將有機電場發光材料朝玻璃基板8喷出，而且，不會 降低產率而可效率佳地進行噴出。 再且，若依據第2實施形態，則由於根據輪入至操作顯 示面板12之塗布條件決定適當直徑，所以可將孔口（喷嘴 孔）45a經常地設在適當直徑，且可良好地將塗布液塗布在 基板S之溝101上。 若依據第2實施形態，則由於將已決定之適當直徑顯示 27 314633修正本 1300669 在操作顯示面板12上，所以可輕易地知道適當直徑，且可 提高操作性及便利性。 若依據第2實施形態’則由於使用噴嘴4a、4b、4C，所 以在喷嘴孔之堵塞防止、製品良率之提昇、裝置之運轉效 率的提昇、過濾器43與孔口 45a之密接防止等，均可獲得與 第1實施形態相同的效果。 另外，本發明並非被限定於上述第2實施形態者，只要 在未脫離其意旨則除了上面所述者以外仍可進行各種的變 更。例如，在上述第2實施形態中，雖係在前端構件45上形 成單一的孔口，但是孔口之個數、配置及形狀等均可為任 意的，且就各塗布條件而言，只要事先計測對喷出壓力之 流量等即可。 在第1至第3供給部5至7中，係在幫浦21與流量計22之 間或在喷嘴之正前方介設壓力計，且亦可監視幫浦21的吐 出能力。 在上述第2實施形態中，雖係將塗布條件與喷嘴孔之適 當直徑的對應關係當作表資料而儲存在記憶體，但是 並非被限定於此。例如，亦可在記憶體丨丨中事先儲存塗布 液冬黏度、喷嘴孔之直徑、幫浦21之噴出壓力或流量等的 關係，且根據由操作顯示面板12所輸入的資料，利用控制 口P 9异出上述對應關係，再根據此而求出適當直徑。 亦可事先準備穿設有直徑互異之孔口 45a的複數個前 湍構件45,且將與控制部9所決定之喷嘴孔之適當直徑對應 之具有孔口 45a的前端構件45裝設在噴嘴本體“上。該情 28 314633修正本 1300669 況田未事先準備具有與已決定之喷嘴孔之適當直徑一致 之孔口 45a的前端構件45時，只要將直徑最接近的孔口 45a 口又為對應適當直徑的孔口即可。 亦可事先準備穿設有直徑互異之孔口 45a的複數個前 端構件45，同時事先將該準備之各直徑資料記憶在記憶體 11中，而控制部9,從已準備的直徑中選擇對應塗布條件者 以作為噴嘴孔的適當直徑。 —在上述第2實施形態中，雖係利用控制部9而自動地決 定噴嘴孔之適當直徑，但是並未被限定於此，例如亦可事 =準備噴嘴孔之適當直徑與塗布條件之對應關係以作為表 貝料，且操作者根據塗布條件以從該表資料中求出適當直 在上述第2實施形態中喷嘴4a、4b、4c雖具備有過濾器 43 ’但是本發明並未被限定於此，亦可不具 :且，在上述第2實施形態中喷嘴4a、4b、4c雖具備 =隔 :二，是本發明並未被限定於此，亦可不具備間隔 施形態所示較佳者係具備有« 益43或間隔物42、44。 (發明效果） ^上所述，若依據本發明1由於4嘴之内部設 置過據器’所以可利用過據器捕集流入噴嘴内 可有效防止噴嘴之堵塞。結果，可鞾 /、 發光材料的塗布液，同時可提高裝;之有機電場 而且，由於將過滤器相對於喷嘴而設計=裝卸自 314633修正本 29 1300669 所以藉由依需要而只交換過濾、器即可重新開始進行塗 所以比起為了重新開始塗布處理而經常需要進行 嘴曾之分解掃除的先前技術還更提高保養性。 由於設置介插於形成有孔口之前端構件與過濾器之間 的間隔物，所以可正確地設定過濾器與孔口之離開距離。 ^若依據本發明，則由於形成於基板上的溝寬為l00/zm 、下且喷嘴孔之直徑設為16至35 # m之範圍的指定值， 斤^ 3有機電~發光材料之塗布液不會從溝溢出，且不會 ^流量過小而降低產量，而可對寬幅形成較窄之基板的溝 乂佳地噴出塗布液’且可使機械的定位精度具有餘裕。而 2無關於溝寬尺寸等的塗布條件而可將塗布液經常地吐 出成連續的液柱狀並可良好地將塗布液塗布在基板上。 〜上述噴嘴，由於包含有噴嘴本體；及在該噴嘴本體之 月j端柯裝卸自如，且於其大致巾央部穿設有孔口以作為 前端構件’·所以藉由事Μ備穿設有直徑互 ;之㈣“复數個前端構件，則只要替換前端構件，即可 歹1如按照溝寬尺寸而輕易地變更噴嘴孔之直徑，且可現 通用性高的裝置。 、見 若依據本發明，則由於係根據塗布條件來決定噴嘴孔 所以無關於塗布條件而可將含有機電場發光材料 :=:Γ喷出成連續的液柱狀，藉此即可良好地將 塗布液塗布在基板上。 τ 藉由塗布條件，係包含塗布液之流量、汾 機電場發光材料的濃度、 ^ ' 辰度塗布液之黏度、溝寬尺寸中之至 314633修正本 30 UW669 個’則按照上述流量 來決定噴嘴孔之直徑，即：、黏度、寬度尺寸的大小 且藉此可纟好+ 仃相應於塗布條件的吐出， 7良好地將塗布液塗布在基板上。 於係根據輸入機構所輪 之適當直徑，且將該適當❹^布條件來決定喷嘴孔 照各自的塗布條件來決定顯示機構上，而可按 所以可提高操作性及便_。孔之適當直徑並予以顯示， 對應根布條件與喷嘴孔之適當直徑之 所輸入之塗布 示在顯示機構上，即可車 μ選擇的適當直徑顯 將在且古吉，進行適當直徑之決定。 將在具有事先準備之 件之中，與根據塗布條件而決定二：二的複數個前端構 口的前端構件裝設在嘖 =田仅對應之具有孔 即可輕易地變更適當直徑的喷嘴孔。警換心構件’ 【圖式簡單說明】 第ϊ圖係本發明有機雷！ 形態的示意圖。電场發先材料塗布裝置之第1實施 /二圖+(:至(b)係組入第1圖之有機電場發光材料塗布 裝置中之噴嘴的示意圖。 Tt "圖係本發明有機電場發光材料 形態的示意圖。 叩哀罝之弟2貫施 第4圖係顯示第3圖之右避 板盥嘖嘴之位署有枝電豕务光材料塗布裝置之基 板…贺鳴之位置關係的立體模式圖。 314633修正本 31 1300669 第5圖係用以計測變更對幫浦之指令並以各種的吐出 壓力吐出塗布液時之流罝的結果不意圖’且顯不從同一直 徑之孔口吐出不同濃度之塗布液的結果。 第6圖係用以計測變更對幫浦之指令並以各種的吐出 壓力吐出塗布液時之流量的結果示意圖，且顯示從不同直 徑之孔口吐出相同濃度之塗布液的結果。 【主要元件符號說明】 1 載置台 2 載置台移動機構部 3 位置對準標記檢測部 4a至4c 喷嘴 5 第1供給部 6 第2供給部 7 第3供給部 8 喷嘴移動機構部 9 控制部 10a至10c 有機電場發光材料 11 記憶體（記憶機構） 12 操作顯示面板（輸入機構、顯示機構） 21 幫浦 23 過濾器 41a貫穿孔 43 過濾器 45a 孔口 101溝 20a、20b、20c 供給源 22 流量計 41 喷嘴本體 42、44 間隔物 45 前端構件 46 固定蓋 D 離開距離 S 玻璃基板 SP 内部空間 32 314633修正本L3〇〇669: For this reason, if the distance between the thief and the orifice is set to the extent of the deflection of the filter, the solute condensation occurs between the device and the orifice. The possibility of gelation will almost disappear, and the above problems can be eliminated. When the filter is mounted on the nozzle, although it is not particularly limited, the filter 'f is designed to be detachable with respect to the nozzle, even if the filter is used to capture a large amount of foreign matter, the filter needs to be exchanged. The coating process can be restarted, and it is often necessary to perform eight' high maintenance properties in order to be heavy: the cloth is processed. 1 In addition, the situation can also be mentioned here. The 'IM' can be used for (4), for example, as long as the material (4) is used as the body of the nozzle, and the body of the body can be built into the body. I can be disposed in front of the nozzle in which the opening is formed at a substantially central portion thereof, and can be disposed in the internal space of the body, and the instrument can be detachable with respect to the nozzle body. : 'In turn, the front end member is made into a filter and the aperture is separated by a distance of $. The space is correctly set to be pluggable, and between the two parts of the nozzle, and used to define the filter and the front = Here, with regard to the mouthpiece, for example, a spacer which can form a space between the members. The structure includes a front end member that is vacant inside, that is, a filter, a device, and an M1 nozzle body and an orifice that can be disposed before the nozzle body, and the instrument is formed in the center of the crucible. The inner space flowing into the nozzle body is disposed near the inner position of the distance from the orifice which is equivalent to the deflection of the filter caused by the liquid 314633. Further, when the filter is made detachable from the internal space of the nozzle body and the front end member is detachable with respect to the nozzle body, the filter exchange can be easily performed, and the maintainability can be further improved. Further, in order to correctly set the distance between the filter and the orifice, for example, the inner space of the nozzle body may be inserted and removed, and the inner space may be inserted between the filter and the front end member to define the filter. A spacer spaced from the front end member. In order to achieve the above object, the organic electroluminescent material coating apparatus of the present invention continuously forms a liquid column and discharges a coating liquid containing an organic electroluminescent material from a nozzle hole of a nozzle toward a groove of a predetermined width formed on a substrate, and is characterized in that: The groove width formed on the substrate is 100//m or less; the diameter of the nozzle hole is a specified value in the range of 16 to 35 // m. According to the organic electroluminescent material coating apparatus configured as described above, for example, when the groove width is 1 〇〇 Am or less, and the diameter of the nozzle hole is 35#m#, there are at least 65 sides on both sides in the alignment width direction. The margin of #m is the margin of the positioning accuracy in the nozzle device, and also becomes the margin of mechanical positioning accuracy of the substrate or the groove, so that no coating liquid overflows from the groove' and can be preferably The coating liquid is ejected from the groove of the substrate. Further, when the diameter of the nozzle hole is set to 16 6 m or more, the flow rate is too small and the yield is lowered. By setting the diameter of the nozzle hole to a predetermined value in the range of (5), the coating liquid can be continuously ejected into a continuous liquid column shape regardless of the coating conditions such as the width dimension of the groove. It is assumed that the nozzle is provided with a nozzle body; and when the nozzle body of the nozzle body 9 314633 corrects the page 1300669 ίι end P is a detachable type and a hole is formed at a substantially central portion thereof as a spray-like front end member, By preparing a plurality of front end members that are provided with holes having mutually different diameters, it is possible to easily change the diameter of the nozzle holes, for example, in accordance with the width of the groove, by merely replacing the front end members. Further, when the nozzle body can house a filter in the internal space thereof; and when a filter is provided on the flow path through which the k-hole coating liquid flows to the orifice, even if the foreign matter and the organic electroluminescent material simultaneously flow into the nozzle Inside, the foreign matter/to the orifice 4 is captured by the filter and removed. In this way, the filter at the front end of the nozzle can be prevented from being clogged by the built-in filter. Further, when π is disposed at a position close to the inner position of the orifice by a distance corresponding to the amount of deflection of the filter caused by the coating liquid flowing into the flow path, even if the application hydraulic pressure is sent to the nozzle The pressure causes the transition to flex toward the orifice side, and also prevents the deflected filter from being dense with the orifice. And, the filter is placed near the internal position, that is, the separation of the filter from the orifice = the degree of deflection from the σ and the enthalpy of the filter, and an organic electric field that becomes a solute occurs between the filter and the orifice. The possibility of gelation of the luminescent material is almost non-existent. In addition, the filter is set to be insertable and detachable in the internal space of the nozzle body. If the filter needs to be exchanged even if a large amount of foreign matter is trapped in the filter, the filter can be restarted only by exchanging the filter. The coating treatment can improve the maintainability as compared with the case where it is often necessary to perform the decomposition of the nozzle in order to restart the coating treatment. Then 2' can be placed in the inner space of the nozzle body, and the gap between the filter and the front end member is set to be a pluggable spacer to define the interval between the filter and the front end member 314633 to modify the page 10 1300669. Set the separation distance between the filter and the orifice. Further, in order to achieve the above object, the organic material of the present invention is coated with a coating of a machine having a machined + 4 cut material to form a liquid column continuously from the (four) hole of the (4) hole and I The method is characterized in that the diameter of the nozzle hole is determined according to the coating condition including at least the width dimension of the groove. According to this configuration, since the diameter of the nozzle hole can be determined according to the coating conditions, the coating liquid can be continuously ejected into a continuous liquid column shape regardless of the coating conditions. ''The above coating conditions, including the flow rate of the coating liquid, the concentration of the organic electroluminescent material in the coating liquid, the viscosity of the coating liquid, and the width of the groove, may be in accordance with the above flow rate, concentration, viscosity, and width. The size of the nozzle hole determines the diameter of the nozzle hole, and the discharge can be performed according to the coating condition. Further, the input mechanism for inputting the coating condition and the display mechanism for displaying the designated information may be further included; The appropriate diameter of the nozzle hole is determined according to the coating condition that is rotated by the wheel-in mechanism, and the appropriate diameter is displayed on the display means. According to the configuration, the coating condition can be determined according to the respective coating conditions. The diameter of the 10,000 hole is displayed and displayed, so that the operability and convenience can be improved. 'In this case, the right side has a memory mechanism for storing the correspondence between the above coating conditions and the appropriate diameter of the nozzle hole. Wherein the above-mentioned coating input corresponding to the input mechanism is selected according to the above correspondence relationship stored in the memory mechanism When the appropriate diameter of the member is displayed and the appropriate diameter of the selection is displayed on the display mechanism, the determination of the diameter of the appropriate correction sheet UUU069 can be easily performed. Further, if the nozzle system includes the front end of the body, the front end portion of the body can be easily And a plurality of front end members through which the nozzles are provided with the apertures having different aperture diameters at the center of the nozzle at the front end of the nozzle hole, and the appropriate diameter pair is determined by a straight piece prepared in advance, according to the above When coating the nozzle body, only (four) change:::: front: member (four) ^ nozzle hole of appropriate diameter. In addition, in two pieces, the hole σ of the same diameter can be easily changed, and it is determined Appropriate should be properly pinched the orifice. When the straight (four) approaching orifice is used as the opposite of the device, you can hide the crying in the internal space, then the g soil, the melon to the orifice flow path is set to filter. Second, the foreign matter and the organic electric field luminescent material can be simultaneously flowed into the nozzle, and the foreign matter can be collected and removed by the filter before reaching the orifice, and the front end of the nozzle of the P-side is built therein. The nozzle is clogged. w, The filtration caused by the coating liquid flowing into the flow path is a distance of the curvature, and the filter is disposed at the inner position away from the orifice, even if the pressure of the coating hydraulic pressure is sent to the nozzle, the filter is directed toward the hole. Bending the mouth side also prevents the curved filter from being in close contact with the orifice. Since the filter state is placed near the internal position, and the distance between the filter and the orifice is set to the degree of deflection of the filter, There is almost no possibility of gelation of the organic electroluminescent material that acts as a solute between the filter and the orifice. And 'the filter is placed in the internal space of the nozzle body to become pluggable. 12 314633 Correction Page 1300669 j In this case, even if a large amount of foreign matter is trapped in the filter and it is necessary to exchange filter thieves, the coating process can be restarted only by exchanging the filter, and it is often necessary to perform the decomposition cleaning of the nozzle in order to restart the coating process. Timan maintainability. ' and 'If the space between the filter and the front end member is inserted into the space inside the nozzle body, the spacer can be inserted and removed, and the filter and the orifice can be correctly set when the distance between the filter and the front end member is specified. Leave the distance. Further, in order to achieve the above object, the method for coating an organic electroluminescent material according to the present invention is characterized in that a coating liquid containing an organic electroluminescence material is continuously ejected from a nozzle hole of a nozzle toward a groove formed in a predetermined width of a substrate, and is characterized in that: A groove having a width of l〇0/zm or less is continuously formed from a nozzle hole having a diameter of 16 to 35#, and a coating liquid is ejected. According to this configuration, for example, when the groove width is 1 〇〇//111, when the diameter of the nozzle hole is 35 # m or less, since both sides of the alignment width direction have at least 65# m margin, Therefore, the margin of the positioning degree in the nozzle device is the same as the margin of mechanical positioning accuracy of the substrate or the groove, so that no coating liquid overflows from the groove, and the groove of the substrate can be preferably ejected. Coating solution. Further, when the diameter of the nozzle hole is 16 or more, the flow is too small and the calving is lowered. By setting the diameter of the nozzle hole to a predetermined value in the range of 16 to 35 // m, the coating liquid can be continuously ejected into a continuous liquid column regardless of the coating conditions such as the width dimension of the groove. shape. Further, in order to achieve the above object, the method for coating an organic electroluminescent material according to the present invention is to continuously form a liquid column from a nozzle hole of a nozzle toward a groove of a specified width formed on a substrate, and correct the 13 314633 correction. Page 1300669 The ruler is characterized in that the diameter of the nozzle hole is only based on the concentration of the width of the groove, the flow rate of the liquid, and the viscosity of the soil of the organic light-emitting material in the coating liquid. According to this configuration, the diameter of the nozzle hole is based on at least one of the coating liquid, the concentration of the organic electroluminescent material in the coating liquid, the coating liquid of 4 degrees, and the width of the groove. According to the coating conditions, the diameter of the nozzle hole can be determined according to the flow rate, concentration, viscosity, and width size. The coating liquid can be sprayed out of the continuous liquid regardless of the coating conditions. Columnar. [Embodiment] (First Embodiment) First, a first embodiment of an organic electroluminescent material coating device of the present invention will be described. In the above-described embodiment, a filter is provided in the nozzle, and the organic electroluminescent material is mixed in the specified solvent as a coating liquid for the solute by the effect of suppressing the clogging of the nozzle (hereinafter, also referred to as "organic" EL material") often spit out stably. Fig. 1 is a schematic view showing the first embodiment of the apparatus for coating an organic electroluminescent material of the present invention. The organic electroluminescent material coating device includes a mounting table 1 for mounting a glass substrate coated with red, green, and blue organic electroluminescent materials l〇a to l〇c as shown in the drawing. s; the stage moving mechanism portion 2 for moving the mounting table 2 in the specified direction; the position mark detecting portion 3 for detecting the position of the position alignment mark (not shown) formed on the glass substrate s; The red organic electric field luminescent material 1 〇a is supplied to the red 314633 correction page 14 1300669 the first supply portion 5 of the nozzle 4a; the green organic electric field luminescent material 10b is supplied to the second supply portion 6 of the green nozzle 4b; The blue organic electric field discharge 10c is supplied to the third supply unit 7 of the nozzle 4c for blue, and the nozzle moving mechanism unit 8 and the control unit 9 for moving the nozzles 4 of the respective colors to the predetermined direction 4c ^ Among the components such as the control stage moving mechanism unit 2, the position registration mark detecting unit 3, the first to third supply units 5 to 7, and the nozzle moving mechanism unit, 帛! The supply unit 5 is, for example, a supply source (10) including a red organic electric field light-emitting material 10a; a red organic f-field light-emitting material from the supply source; a pump 2 ι of 〇a; and an organic electric field for detecting red a flow meter 22 for the flow rate of the luminescent material 0a; and a filter 用以 for removing the foreign matter in the red organic electric field luminescent material 1〇a. The second supply unit 6 includes a supply source 20b for the green organic electroluminescent material 丨〇b, and a pump 21 for extracting the green organic electroluminescent material 10b from the supply 20b; a flow meter 22 for the flow rate of the luminescent material 丨 (10); and a filter 23 for removing foreign matter in the green organic electroluminescent material i 〇 b. The third supply unit 7 includes a supply of blue organic electroluminescent material i, an 'e source 20c, and a pump 2 1 for taking out the blue organic electroluminescent material 1 〇c from the supply source 2〇c; a flow meter 22 for detecting the flow rate of the blue organic electroluminescent material 丨〇c; and a filter 23 for removing foreign matter in the blue organic electroluminescent material 1〇e. Then, the control unit 9 controls the stage moving mechanism unit 2 so that the mounting table moves in the predetermined direction by a predetermined amount, and controls the nozzle moving mechanism unit 8 so that the nozzles 4a to 4c move in the predetermined direction by a predetermined amount. At the same time, 314633 corrects the 15 1300669 to flow out the specified electric field of the organic electroluminescent material 1 (6) to l from the nozzles 4a to 4c in accordance with the detected values a to c of the flow meters 2 from the first to third supply portions 5 to 7. The mode of c' outputs the commands d to f to the respective pumps 21 of the first to third supply sections 5 to 7. Specifically, the control unit 9 controls the respective portions of the skirting unit to apply the organic electroluminescent material to the glass substrate S in a strip shape as follows. When the nozzles 4a to 4c are located at the application start position of the glass substrate S, the control unit 9 instructs the respective pumps 21 to start ejecting the organic electroluminescent materials 10a to 10c from the respective nozzles 4 to 4c toward the glass substrate s. At the same time, the nozzle is controlled to move in a substantially linear manner. Thereby, the red, green, and blue organic electroluminescent materials 10a to 10c are simultaneously coated on the glass substrate S in a strip shape. ▲ Then, the control unit 9 instructs each of the pumps 21 to stop the organic electroluminescent materials (7) & The glass substrate § is ejected while stopping the movement of the nozzles 4a to 4c. In the organic electroluminescent material coating apparatus of the above configuration, a filter is incorporated in each of the nozzles 乜 to 4c to effectively prevent the ejection i =. The nozzle configuration will be described in detail with reference to Fig. 2 in the T' side. In addition, the structure of the nozzles 4a is i \ ', and the configuration of the other nozzles 4b and 4c is omitted. The nozzle lanthanum is incorporated into the organic electroluminescent material coating device of Fig. 1 in the Sihewei figure; the intergranular j γ is the nozzle 4 "system 1 borrows the ancient" (figure; the same figure (b) is the decomposition assembly diagram Μ + Interest "# has a nozzle body 41 whose front end portion is open. Then, the internal body of the nozzle body 41 is empty, and the spacer 42 is inserted, and the 314633 is modified. The 16 1300669 filter 43, the spacer 44 and the front end member 45 At the same time, by fixing the fixing cover 46 from the outside to the front end portion from the other side of the nozzle (4), it can be held in the space SP. Further, when the fixing cover 46 is removed from When the front end portion of the nozzle body 41 is removed, the front end member 45 can be removed from the nozzle body 41 and the spacer material and the filter 43 can be taken out from the internal space sp of the nozzle body 41. Alternatively, the fixed cover 46 and the nozzle body can be The front end portion is respectively engraved with the female thread and the male thread, and the fixing cover 46 is screwed and fixed to the front end portion of the nozzle body 41, whereby the fixing force can be improved, and the fixing cover 46 can be easily removed. Method of assembling the nozzle "in the rear end of the nozzle body In the nozzle body 41, the through-hole 41a is provided with a through-hole 41a. The organic electroluminescent material 1 () is transmitted from the second supply unit $ through the through-hole 41a to the internal space sp. In addition, the organic electroluminescent material 1 (^) which is sent to the nozzle 流 flows to the tip end side of the nozzle by the internal space ,, passes through the filter 43, and is provided at the substantially central portion of the distal end member. In the present embodiment, the internal space SP of the nozzle body has a function of connecting the orifice 45& and a flow path through which the organic electroluminescent material 10a flows. Then, in the flow path (nozzle body) In the internal space sp) of 41, the outer periphery of the filter 43 is sandwiched by the two spacers 42, 44 and held at a predetermined position of the internal space SP. This position corresponds to the "internal position" of the present invention. From the opening 45a of the front end member 45 to the side of the internal space sp (on the upper side of the same drawing), it is only away from the position of the thickness D of the spacer 44. Thus, by using the spacer 44, the filter 43 and the opening 45a can be correctly set. Leave distance 314633 modifies this paragraph 17 1300669 D. Here, in the present embodiment, the thickness D and the deflection of the filter 43 caused by the organic electroluminescent material 1 〇a flowing to the flow path (internal space SP) are caused. The reason is as follows: The filter 43 is provided in the flow for removing foreign matter or gelled solute in the organic electro-light-emitting material 10 a that is fed from the first supply unit 5 to the nozzle 4a. In the present embodiment, for example, a polytetrafluoroethylene resin (PTFE) is used as a filter material, and a filtration accuracy of 1 〇 #m is used. The "filtering accuracy" means that the filtration efficiency is 99. The particle diameter is more than 9%. Therefore, in the embodiment, the filter 43 is disposed on the upstream side of the orifice 45a, and the foreign matter or gelled solute having a particle size of 10/m or more can be removed from the organic electroluminescent material 1A. In addition, it is possible to prevent the clogging of the orifices 4 5 a due to the special foreign matter or the like. Further, the filter 43 thus constructed is flexible, and the organic electroluminescent material 1〇a supplied to the nozzle 4a is pressure-fed, so that the central portion of the filter 43 is due to the organic electroluminescent material 14& The pressure is deflected toward the tip end side of the nozzle (the lower side of the same figure). Therefore, the distance between the orifice 45a and the filter 43 is equal to or greater than the deflection of the filter 43 when the maximum discharge pressure of the organic electroluminescent material i〇a is reached. On the other hand, the thickness D of the spacer 44 is greater than the deflection 1 of the filter 较佳, but it is not necessarily as large as large. In this case, when the distance D between the filter 43 and the orifice 45a becomes long, gelation of the organic electroluminescent material 10a as a solute occurs during the pressurization of the organic electroluminescent material 10a therebetween. This is caused by the same problem as the prior art. On the other hand, the filter 43 is disposed near the internal position, and the 314633 corrects the 18 1300669. The distance D from the hole D45a is set in the filter, and the filter 43 and the hole 45a are The possibility of gelation of the solute occurs almost no, and the above problem can be eliminated. Therefore, considering the points, in the present embodiment, due to the maximum ejection force (=3. The deflection amount of the 5kgf/cm2) filter 43 is 0 6_, so the separation distance D is set to 〇. 6 to 8 colors. However, these values are an example, and the deflection of the GF 43 may vary depending on the material of the filter 43, the filtration accuracy, or the like, or the discharge force. Therefore, it is preferable to correctly grasp the filter (4). After the amount of deflection, the distance D is set. In the above-described first embodiment, since the filters 43 are built in the respective nozzles 4a to 4c to prevent the particle size of i 〇 #茁 or more, Since the object or the gelation solution f reaches the orifice 45a, the clogging of the pore σ 45a due to the foreign matter or the like can be reliably prevented. As a result, the organic electroluminescent material core can be stably ejected onto the glass substrate S, and Further, by suppressing the clogging of the nozzle, the operation stop frequency of the organic electroluminescent material coating device can be further reduced, and the operation efficiency of the device can be improved. The substantially central portion of the k filter 43 is received by the flow. The organic electroluminescent material 1 至 a to 1 内部 in the internal space SP of the nozzle body * 1 is deflected toward the opening 45 a side. However, the filter 43 is disposed at a distance corresponding to the deflection amount. Leaving the orifice 45a The vicinity of the position of the portion, so that even if the filter ^3 is deflected due to the pressure of the organic electroluminescent material i〇a, it can be prevented from being in close contact with the orifice 45a, and at the same time, because the filter 43 is separated from the orifice 45a by the distance D. The father is shorter than the degree of deflection (0 in the above embodiment). 6mm), so the 314633 revision 19 1300669 does not cause solute gelation between the filter 43 and the orifice 45a, and the good organic electroluminescent materials 10a to 1c can pass through the orifice 45a. It is ejected toward the glass substrate S. Further, in the organic electroluminescent material coating apparatus configured as described above, the filter is required to be exchanged in the filter 43 due to the operation of the apparatus and the foreign matter or the gelled solute, and the filter 43 is required. Since the internal space sp of the nozzle body 41 is detachable, the filter exchange can be easily performed, and the maintainability can be further improved. Further, since the spacer 44 interposed between the filter 43 and the orifice 45a is not disposed, the separation distance d can be accurately set. However, the main reason for the nozzle clogging of the conventional organic electroluminescent material coating device is that in addition to the gelation of the solute, the following factors can be considered. In other words, in the organic electroluminescent material coating device of the above-described type, in the case where the device is swayed in the pipe to remove foreign matter when the device is raised, it is not possible to completely remove the liquid accumulated in the pipe joint portion or the like by using only the swaying. The foreign matter at the place where the foreign matter at the liquid level is shaken will be sent to the nozzle side as time passes. Then, foreign matter having a size larger than the orifice may block the orifice of the nozzle and cause clogging. Moreover, even if the size of the foreign matter or the gelled solute is smaller than the orifice, sometimes the plurality of such solute are simultaneously sent to the orifice, and in the vicinity of the orifice, the plurality of foreign matter or the like is not obtained due to the transverse pressure of each other. The activity is in a state of detention. As a result, the plurality of foreign matters or the like can block the orifice and cause nozzle clogging. Thus, when the nozzle 20 314633 is corrected in the organic electroluminescent material coating device, the liquid cannot be stably ejected toward the substrate. And will lead to a reduction in product yield. Further, when the nozzle clogging continues, the liquid itself cannot be ejected from the nozzle, and the coating treatment must be temporarily interrupted to perform the decomposition cleaning of the nozzle, which is one of the main causes for lowering the operation efficiency of the coating device. Further, in the case of performing the decomposition cleaning of the nozzle, it is necessary to remove foreign substances such as plugged pores or gelled solute, and there is room for improvement in terms of maintainability. On the other hand, according to the first embodiment, as described above, the problems of the conventional organic electroluminescent material coating apparatus can be solved. The present invention is not limited to the first embodiment, and is not separated. It is intended that various changes can be made in addition to the above. For example, although a filter having a filtration accuracy of 1 〇Am is used as the filter 43, however, it is only necessary to use a filter suitable for each organic electroluminescent material coating device or I-each nozzle. The best is to optimize the separation distance D according to each filter. In this point, in the above-described first embodiment, since the separation distance D can be accurately set by the spacers 4, the spacers corresponding to the optimum separation distance are interposed in each nozzle. It can be between 4 3 and the end member 4 5 . Again, in the above! In the embodiment, the present invention is applied to a nozzle in which the single-hole σ 45a is formed in the distal end member 45. However, the number, arrangement, shape, and the like of the orifices are arbitrary, and the present invention is applicable to discharge organic from the tip end portion of the nozzle. An organic electroluminescent material coating device for an electric field luminescent material is comprehensive. Further, in the above-described first embodiment, the spacer 44 is provided, but the 314633 is modified. The present invention is not limited to this, and the spacer may not be provided. However, as described above, in the first embodiment, the spacer distance 44 is preferable, and the separation distance D can be set accurately. (Second embodiment) Next, a second embodiment of the organic electroluminescent material coating apparatus of the present invention will be described. In the second embodiment, the organic electroluminescent material can be stably ejected by determining the diameter of the nozzle hole provided in the nozzle in accordance with the coating conditions. The same components as those in the above described embodiment are denoted by the same reference numerals, and their description will be omitted. Fig. 3 is a schematic view showing a second embodiment of the apparatus for coating an organic electroluminescent material of the present invention. Fig. 4 is a perspective view showing the positional relationship between the substrate and the nozzle of the organic electroluminescent material coating device of Fig. 3. As shown in FIG. 4, the organic electroluminescent material coating device ejects the organic electroluminescent material 10a from the nozzle toward the groove 1〇 formed on the substrate s, and is formed on the groove S of the substrate S, for example, by A transparent electrode composed of IT〇 (Indium Tin Oxide; indium tin oxide). The width dimension of the groove l〇i is, for example, a specified value of L ^ j 〇〇 # m in the present embodiment. As shown in FIG. 3, the organic electroluminescent material coating device has substantially the same configuration as that of the first embodiment (first drawing), but the control unit 9 is provided with the memory 11 and further by the control unit 9. It is controlled by a liquid crystal display and a touch panel and has an operation display surface that doubles as an input unit and a display unit. Then, the control unit 9 controls the stage moving mechanism unit 2 to move the mounting opening 1 in the γ direction in a private direction, and controls the nozzle moving mechanism unit 8 to move the sprays f 4a to 4c in the other directions by a predetermined amount. At the same time, the respective portions of the device are controlled in the same manner as in the above-described embodiment of the present invention, 314,633, and the organic electroluminescent materials 10a to 10c are applied to the glass substrate S along the groove to form a strip. However, the respective nozzles 4a to 4c of the organic electroluminescent material-coating apparatus configured as described above basically have the same configuration as the first embodiment described in Fig. 2 . That is, as shown in Fig. 2, the distal end member 45 which is provided with the orifice 45a corresponding to the "nozzle hole" of the present invention is detachably attachable to the nozzle body 41. Therefore, if a plurality of distal end members 45 having the orifices 45a having different diameters are prepared in advance, the diameter 0 of the nozzle holes of the nozzles 4a can be easily changed. Next, referring to Figs. 5 and 6, the diameter of the nozzle holes is changed. The advantages are explained. Figs. 5 and 6 are diagrams showing the results of the flow rate (the amount of discharge per unit time) when the coating liquid is changed and the coating liquid is ejected at various discharge pressures; the fifth figure shows the same from the same The results of the different concentrations of the coating liquid were ejected from the orifices of the diameter; and the sixth graph shows the results of ejecting the same concentration of the coating liquid from the orifices of different diameters. Further, the pressure resistance of the piping system in the first to third supply portions 5 to 7 in Fig. 3 is 〇35, and in Figs. 5 and 6, the maximum value of the discharge pressure is set to 〇. 3 MPa. The concentration of the organic electroluminescent material in the coating liquid used in Fig. 5 is D1 > D2 > D3 > D4. For example, at a low concentration of concentration D4, the pressure is about 〇. 12 MPa and the flow rate is about (2) cents, and at the high concentration of concentration (1), the discharge pressure is about 0. 2 MPa and the minimum value of the jetting force in the concentration of about 125//] 1/min of the same flow rate (for example, the G• squeak in the concentration D4 is the minimum value of the liquid column formed by the continuous reading, and is here If a continuous liquid column is not formed under the discharge pressure, it will become a droplet. It can be understood from Fig. 5 that with the 314633 correction, the emission intensity of the organic electric field becomes higher, and the ejection required to obtain the same flow rate is obtained. The force of the nozzle hole will also become higher. The diameter of the nozzle hole used in Fig. 6 is i 6 , j 8 , 2 〇, 22 # m. Even in Fig. 6, as in Fig. 5, the minimum discharge pressure is the same. The value (for example, 021 MPa in diameter 22/zm) is the minimum value of the continuous liquid column formed, and a continuous liquid column is not formed under the discharge pressure which is not full, and becomes a droplet. It can be understood that when the diameter of the nozzle hole is large and the flow rate is not large, no liquid column is formed, and when the liquid column is formed and continuously discharged at a small flow rate, it is necessary to reduce the diameter of the nozzle hole. When the diameter of the hole is small, even if the discharge pressure is raised to the upper limit (〇. 3MPa) can only obtain a small flow rate (for example, a flow rate of 13 〇 #17 points in diameter 16//01), and the diameter of the nozzle hole must be increased in order to obtain a large flow rate. Further, in FIGS. 5 and 6, the organic electroluminescent material is used as a polyvinyl carbazole (PVK) system, and the solvent is used, for example, mesylene, but is not limited to the #, organic electroluminescent material. It can also be polyphenyl, polyfluorene, polystyrene (PPV), cyanide λ = called -PPV system, bribe (Μ Ε Η) _ρρν system, etc., and soluble (4) can be methyl, 1-toluene, nai Full, benzene, tetramethyl, bactericidal test. Further, the diameter of the nozzle hole was set to 18/zm at the fifth time, and the concentration of the organic electroluminescent material was set to D1 in Fig. 6. In the case of using the organic electroluminescent material coating device of FIG. 3 to manufacture an organic electric field light-emitting display device, the viscosity (ie, fluidity) of the cloth is related to the organic electric field of the material. The type or concentration is changed to 314633, and the flow rate required is also changed depending on the film thickness of the coating liquid required or the width dimension of the groove S1 of the substrate S. In this case, according to the fifth and sixth figures, it can be seen that it does not become excessively discharged [force and a continuous liquid column is formed at an appropriate discharge pressure having a margin from the pressure resistance of the system. While spraying the coating liquid, according to the f cloth condition (for example, the concentration of the organic electroluminescent material in the coating liquid, the viscosity of the coating which varies depending on the /length, the width dimension L of the groove of the substrate §, and the required It is effective to change the diameter of the nozzle hole by the flow rate of the coating liquid or the like. For example, if the width dimension of the groove 101 is L=1〇〇Am, when the diameter of the nozzle hole is set to 35 // m or less, since both sides of the alignment width direction have a margin of at least 65/zm, It becomes the margin of the mechanical positioning accuracy of the nozzle to the rolling, and also becomes the margin of the mechanical positioning accuracy of the substrate s (groove 1〇1), so there is no coating liquid overflowing from the groove 101, and the groove of the substrate s can be Ιοί preferably sprays the coating liquid. Further, when the diameter of the nozzle hole is 16 " or more", the flow rate is too small to reduce the yield, and the coating liquid can be preferably discharged to the groove of the substrate S. Thus, the organic electric field of the second embodiment In the luminescent material application device, the organic electroluminescent materials l〇a and i〇b are continuously discharged from the nozzle holes toward the grooves 101 while forming a liquid column, and the ejection target is unstable when it is formed into a droplet shape. Next, the determination of the appropriate diameter of the nozzle hole will be described with reference to Fig. 3. The control unit 9 is constituted by a CPU or the like and has a memory port. In the memory U, for example, coating can be performed. The concentration of the organic electroluminescent material in the liquid, the viscosity of the coating liquid which varies depending on the concentration, and the 314633 of the substrate s. 314633 correct the coating conditions of the 25 1300669 I degree dimension L, the flow rate of the required coating liquid, The correspondence relationship with the appropriate diameter of the nozzle hole is used as a functional formula. Then, the control unit 9 sequentially displays the coating conditions in the operation display panel 12, and when the operator inputs the corresponding data, the input value is obtained. Zhonggen The appropriate diameter is determined in the above-described correspondence relationship and displayed on the operation display panel 12. In this case, when the width L of the groove 101 and the film thickness of the coating liquid are input as the coating conditions, the control unit 9 can also calculate the required flow rate. And according to the result, the appropriate diameter is determined. Moreover, when the width dimension l of the input groove m and the required flow rate are used as the coating conditions, the appropriate diameter can also be determined according to the input data. Furthermore, when inputting the groove 1()1 When the width L and the viscosity of the coating liquid are used as the coating conditions, the appropriate diameter may be determined according to the input data. Further, for example, the characteristics of the organic electroluminescent material and the viscosity of the solvent are stored as described above. In the memory cartridge, when the type of the organic electroluminescent material and the solvent used is input as the coating condition, the appropriate diameter may be determined according to the input data. Thus, in the present embodiment, the display panel 12 is operated. It corresponds to an input mechanism and a display mechanism, and the memory 11 corresponds to a memory mechanism. Thus, according to the second embodiment, since the system is to be sprayed The diameter of the nozzle hole of the spray material containing the coating liquid of the organic electroluminescent material We is set to be in the range of 16 to 3 5 // m, so that it is formed in order to achieve high resolution. The groove 10W whose width on the substrate S is narrower than 1 〇 - is particularly a margin for the mechanical positioning accuracy of the nozzle 4a, and also serves as a margin for the mechanical positioning accuracy of the substrate S (groove m), so the coating liquid It does not overflow and is not enough, so the coating solution 314633 can be well coated with the coating of 26 l3 〇〇 669. However, as a conventional organic electroluminescent material coating device, for example, in the patent application A device for continuously ejecting an organic material from a nozzle hole is disclosed in the publication No. 2000-202357, wherein the nozzle hole diameter of the device is set to be greater than 5 〇 " m, preferably set to be greater than 2 〇" m. However, it is difficult to eject the coating liquid well toward the groove having a width of 100 # m or less by using such a nozzle having a large nozzle diameter. In other words, in the conventional device, it is difficult to flexibly correspond to the fact that the coating width is narrowed as the resolution of the organic electroluminescence display device is increased. However, according to the second embodiment, the elimination can be eliminated. This kind of problem. According to the second embodiment, the nozzle bases 4c that are detachably attached to the nozzle body 41 by the opening 45 & the front end member 45 are configured to easily change the diameter of the nozzle holes. Therefore, by preparing a plurality of front end members having the orifices 45a having different diameters in advance and arranging the front end members having the orifices having the appropriate diameters according to the coating conditions, the spray holes can be set to ten times in advance. A device of appropriate diameter, and thereby, a highly versatile device can be realized. As a result, irrespective of the coating conditions, the liquid column can be surely formed and the organic electroluminescent material can be continuously and stably ejected toward the glass substrate 8, and the ejection can be efficiently performed without lowering the yield. Further, according to the second embodiment, since the appropriate diameter is determined according to the coating conditions of the operation display panel 12, the orifice (nozzle hole) 45a can be frequently set to an appropriate diameter, and the coating can be favorably applied. The liquid is applied to the groove 101 of the substrate S. According to the second embodiment, since the corrected diameter display 27 314633 is corrected on the operation display panel 12, the appropriate diameter can be easily known, and the operability and convenience can be improved. According to the second embodiment, since the nozzles 4a, 4b, and 4C are used, the clogging of the nozzle holes is prevented, the product yield is improved, the operation efficiency of the apparatus is improved, and the adhesion between the filter 43 and the orifice 45a is prevented. The same effects as those of the first embodiment can be obtained. Further, the present invention is not limited to the above-described second embodiment, and various changes can be made in addition to the above without departing from the spirit and scope of the invention. For example, in the second embodiment, a single orifice is formed in the distal end member 45, but the number, arrangement, shape, and the like of the orifices may be arbitrary, and each coating condition may be prior to each coating condition. It is sufficient to measure the flow rate to the discharge pressure. In the first to third supply portions 5 to 7, a pressure gauge is interposed between the pump 21 and the flow meter 22 or directly in front of the nozzle, and the discharge capacity of the pump 21 can also be monitored. In the second embodiment, the correspondence relationship between the coating conditions and the appropriate diameter of the nozzle holes is stored in the memory as a table material, but the present invention is not limited thereto. For example, the relationship between the winter viscosity of the coating liquid, the diameter of the nozzle hole, the discharge pressure of the pump 21, or the flow rate may be previously stored in the memory cartridge, and the control port P may be utilized according to the data input by the operation display panel 12. 9 The above correspondence is different, and an appropriate diameter is obtained based on this. It is also possible to prepare in advance a plurality of front sill members 45 having apertures 45a having mutually different diameters, and a front end member 45 having an aperture 45a corresponding to an appropriate diameter of the nozzle hole determined by the control portion 9 is attached to the nozzle The body "up." 28 314633 Amendment 1300669 When the front end member 45 having the orifice 45a having the appropriate diameter of the determined nozzle hole is not prepared in advance, the orifice 45a having the closest diameter is correspondingly It is sufficient to have an orifice of a suitable diameter. It is also possible to prepare a plurality of front end members 45 having apertures 45a having mutually different diameters, and to store the prepared diameter data in the memory 11 in advance, and the control unit 9, The appropriate diameter is selected as the nozzle hole from among the prepared diameters. - In the second embodiment, the appropriate diameter of the nozzle hole is automatically determined by the control unit 9, but is not limited thereto. For example, it is also possible to prepare a corresponding relationship between the appropriate diameter of the nozzle hole and the coating condition as the surface material, and the operator obtains the appropriate condition from the table data according to the coating conditions. In the embodiment, the nozzles 4a, 4b, and 4c are provided with the filter 43'. However, the present invention is not limited thereto, and the nozzles 4a, 4b, and 4c are provided with the following: Second, the present invention is not limited thereto, and the preferred embodiment is not provided with a spacer, and the spacers 42 and 44 are provided. (Effect of the invention) Since the inside of the four nozzles is provided with a device, the nozzle can be trapped in the nozzle to effectively prevent the nozzle from being clogged. As a result, the coating liquid of the luminescent material can be improved, and the organic electric field can be improved at the same time. Since the filter is designed with respect to the nozzle = loading and unloading from 314633, the modification of this article 29 1300669, the coating can be restarted by only exchanging the filter as needed, so that it is often necessary to perform the decomposition of the nozzle in order to restart the coating process. The prior art also improves the maintainability. Since the spacer is inserted between the end member and the filter before the aperture is formed, the distance between the filter and the aperture can be correctly set. According to the present invention, since the groove width formed on the substrate is l00/zm, and the diameter of the nozzle hole is set to a specified value in the range of 16 to 35 #m, the coating liquid of the organic electric light-emitting material does not It overflows from the trench, and the flow rate is not too small to reduce the yield, but the coating liquid can be sprayed out to the groove which forms a narrow substrate with a wide width, and the positioning accuracy of the machine can be made to have a margin. The coating liquid can be uniformly discharged into a continuous liquid column shape, and the coating liquid can be satisfactorily applied onto the substrate. The above nozzle includes the nozzle body; and the nozzle body is at the end of the nozzle body. It is detachable and detachable, and has an opening at the center of the main towel as a front end member'. Therefore, it is provided with a diameter by mutual cross-cutting; (4) "A plurality of front end members, as long as the front end member is replaced, 1 If the diameter of the nozzle hole is easily changed in accordance with the groove width, it is possible to use a device having high versatility. According to the present invention, since the nozzle holes are determined according to the coating conditions, the organic electroluminescent material: =: Γ can be ejected into a continuous liquid column without any application conditions, whereby the nozzle hole can be satisfactorily The coating liquid is coated on the substrate. τ is determined by the coating conditions, including the flow rate of the coating liquid, the concentration of the electric field luminescent material, the viscosity of the coating liquid, and the width of the groove width to 314,633, which is corrected by 30 UW669. The diameter of the pores, that is, the size of the viscosity, the width dimension, and thereby the sputum + 仃 corresponding to the coating conditions, 7 well coated the coating liquid on the substrate. According to the appropriate diameter of the input mechanism, the appropriate coating conditions are used to determine the coating conditions of the nozzle holes to determine the display mechanism, and the operability and convenience can be improved. The appropriate diameter of the hole is displayed and the input of the corresponding diameter of the root cloth and the appropriate diameter of the nozzle hole is shown on the display mechanism, so that the appropriate diameter selected by the vehicle μ is determined and the appropriate diameter is determined. The nozzle hole of an appropriate diameter can be easily changed by providing a front end member of a plurality of front end members which are determined according to the coating conditions and having a hole corresponding to the coating unit according to the coating condition. Police change heart member ‘ [Simple diagram description] The first picture is the organic mine of the invention! Schematic diagram of the form. The first embodiment/two diagrams of the electric field generating material coating device + (: to (b) are schematic views of the nozzles incorporated in the organic electroluminescent material coating device of Fig. 1. Tt " Schematic diagram of the material form. The fourth line of the 叩 罝 罝 2 2 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第Fig. 314633 Amendment 31 1300669 Fig. 5 is used to measure the result of changing the command to the pump and discharging the coating liquid at various discharge pressures. It is not intended to be 'not apparently discharged from the orifice of the same diameter. The result of the coating liquid of the concentration. Fig. 6 is a schematic diagram showing the results of measuring the flow rate when the coating liquid is discharged and the spraying liquid is discharged at various discharge pressures, and shows that the coating liquid of the same concentration is discharged from the orifice of different diameters. [Main component code description] 1 mounting table 2 mounting table moving mechanism unit 3 Positioning mark detecting units 4a to 4c Nozzle 5 First supply unit 6 Second supply unit 7 Third supply unit 8 Nozzle moving mechanism unit 9Parts 10a to 10c Organic electric field luminescent material 11 Memory (memory mechanism) 12 Operation display panel (input mechanism, display mechanism) 21 Pump 23 Filter 41a through hole 43 Filter 45a Hole 101 groove 20a, 20b, 20c Source 22 Flowmeter 41 Nozzle body 42, 44 Spacer 45 Front end member 46 Fixed cover D Distance away S Glass substrate SP Internal space 32 314633 Revision