1299065 九、發明說明： 【發明所屬之技術領域】 、本發明係有關-種喷流式加卫裝置，特別是指—種可加工 複雜形狀、表面加工之效果佳、可同時進行上色處理以及工 件表面不會殘留工作液之喷流式加工裝置。 【先前技術】 傳統之電解加卫、上色(俗稱陽極處理）、電鑄等加工程 序’必須要將工件整個浸入電解槽之工作液中，所以無法只在 工件之特雜置進行電解加I、上色魏鑄之加I，更遠論在 一工件表面產生默之凹凸狀駐顏色分佈（圖形）。 、其次’傳統上以電解槽之方式來處理時，該電解槽内之工 作液可能是強酸、強驗或是對人體有危害之化學物質，加工後 會殘留於工件表面’需要另—道清洗程序啊，也衍生出環 境污染的問題。 另外’如改用傳統之刀具進行接觸式加工，則又產生有毛 邊、殘留應力、無法對超高硬度材料加卫之問題。 再者，於—般傳_半導雜减薄膜電晶贿晶顯示器 (TFT-LCD)製财’其製轉、縣滅_板上先沉積薄膜， 然後於該_上_-層光_，縣上—光罩顧射紫外光 進行曝光，之碰_影_除未轉光之光_，_基板 或玻璃板，最後1_卩完成；而移除細獅過財，也同樣 產生私境汗染的問題。1299065 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a spray-type type of hoisting device, in particular, a process capable of processing complex shapes, surface processing, and capable of simultaneously performing color processing and A jet processing device that does not leave a working fluid on the surface of the workpiece. [Prior Art] Traditional electrolytic processing, coloring (commonly known as anodizing), electroforming and other processing procedures 'must immerse the entire workpiece into the working fluid of the electrolytic cell, so it is impossible to perform electrolysis only on the special miscellaneous of the workpiece. Adding I to the Wei casting, and further on the surface of a workpiece to produce a silent concave color distribution (graphic). Secondly, when it is traditionally treated by electrolytic cell, the working fluid in the electrolytic cell may be a strong acid, a strong test or a chemical substance harmful to the human body, and will remain on the surface of the workpiece after processing. The program also has the problem of environmental pollution. In addition, if the traditional tool is used for contact processing, there is a problem of burrs, residual stress, and the inability to protect the ultra-high hardness material. Furthermore, in the general-transmission-semi-conducting film-transparent thin film electro-crystal bridging display (TFT-LCD), it is the first to deposit a film, and then the film is deposited on the board, and then on the _-layer light _, In the county, the reticle is exposed to ultraviolet light for exposure, and the collision _ shadow _ except the light that has not been converted _, _ substrate or glass plate, the last 1_卩 is completed; and the removal of the fine lion is too rich, also creates a private environment The problem of sweating.
1299065 因此，有必要研發新技術， 【發明内容】 以解決上述缺點。 本發明之主要目的在於提供一 工複雜形狀。 種贺流式加工裝置，其可加 本發明之次—目的在於提供-種魏式加工裝置， 加工之效果佳。 本發明之又-目的在於提供—種錢式加工裝置， 時進行上色處理。 其表面 其可同 本發明之再-目的在於提供—種愤式加工裝 件表面不會殘留工作液。 置，其使工 為達到上述目的之噴流式加工裝置，其包括： 一電源供應單元，係具有一第一 頭，其間具有一預定之電壓； 電極接頭及一第二電極接1299065 Therefore, it is necessary to develop new technologies, [invention] to solve the above disadvantages. The main object of the present invention is to provide a complex shape. A kind of flow processing device, which can be added to the present invention, aims to provide a type of Wei processing device, and the processing effect is good. Still another object of the present invention is to provide a money processing apparatus which performs coloring processing. The surface thereof can be repurposed with the present invention in order to provide that the surface of the irritated processing article does not leave a working fluid. The jet processing apparatus for achieving the above object comprises: a power supply unit having a first head with a predetermined voltage therebetween; an electrode joint and a second electrode connection
▲一具導電性且為金屬之工件，係連接至該第一電極接頭， 缸件具有至少—工作表面及至少—拉作表面； -一工作时吸系統，其具有至少—個被組件一供液單 疋、一回吸單元、-過濾、單元及—儲液單a;每—喷吸組件呈 有-工作電極一供紐道及-回崎道；該工作電極係連接 至，紅電極接頭；該儲液單元係儲存_預定之工作液，該供 液早疋係肋職舰單元内之卫作液供應至該噴吸纟且件之 供液通道中’該回吸單元係肋將獻作液吸回至該過濾單元 過濾後，再輸送至該儲液單元； 6 ^299〇65 —嘴吸控㈣統，係具註少—個控制單元，其用以控制 對應之嘴吸組件之電化學反應之啟動/關閉，該控制單元之設 置位置係選自該噴吸組件之供液通道與回吸通道上、該第二電 _ 極接頭至該工作電極間其中之一。 II此’本發明可細在電解、上色、電鑄及光阻劑塗佈等 多方面之製程上。 兹以下列實施舰配合圖式詳細說明本發明於後： • 【實施方式】 參閱第-、第二、第三A、第四及第五圖，本發明係為一 種噴机式加玉裝置’該噴流式加工裝置係包括_電源供應單元 10、-工件20、-工作液噴吸系統3〇及一喷吸控制系統4〇 ; 该電源供應單元1 〇係用以提供該工作液喷吸系統3〇 配合該喷 吸控制系統40對該辑20進行電解、上色、電鑄、光阻劑清 除/喷塗加工所需之電力；其中： 籲 _於該工作液喷吸系統3〇，係具有至少—喷吸組件31、 -供液通道312、-回吸通道313、一供液單元32、一回吸單 兀33、一過濾單το 34及一儲液單元35 ;該儲液單元35儲存 之工作液36，係經該供液單元32而從該喷吸組件31之供液 通道312朝該工件20喷出；該回吸單元33則從該喷吸組件 31之回吸通道313吸回噴出之工作液36，並傳送至該過濾單 元34過濾後送到該儲液單元35中儲存，以供反覆利用； 至於该喷吸控制系統40，係控制該工作液喷吸系統啟 1299065 動/啟閉。 ★於本發明之第一實施例_，該電源供應單元i〇係具有一 第一電極接頭u及一第二電極接頭12，其間有一預定之龍。 該具導電性且為金屬之工件20係連接至該第一電極接頭 11 ’該工件20具有至少一工作表φ 21及至少一非工作表面 22 〇 ―紅作液翁纽3G，係具有複數個喷吸組件训概呈同 軸道％)、雜液單兀32、該回吸單元33、該過鮮元34(用 以過濾雜質及帶離反魅成物)及_液單元35 ;每—喷吸組 件31皆具有一工作電極3U、該供液通道312及該回吸通道 313 ;該工作電極311係連接該第二電極接頭12 ;該儲液單元 35係儲存預定之工條36，該供液單元32係將該儲液單元 邪内之工作液36供應至該喷吸組件31之供液通道M2中， _吸單元33係將工作液36吸回該過渡單元科後再 傳輸至該儲液單元35中； 該噴吸控制系統40 ’係具有複數個控制單元4卜其用以 分別控制該倾組件31之電化學反應啟朗請，該控制單元 Ο之設置位置係選自該噴吸組件31之供液通道312與回吸通 k 313上、該第一電極_ 12至該工作電極川間其中之一。 在本案之第-實施例中，該第—電極接頭u係為正極，該第 -電極接碩12係為負極，且該工作液％係為電解液其中， 1299065 該工件20之工作表面21係接觸該工作液36❿產生陽極氧化 反應，進而溶解金屬而在該工作表面21上產生預定之凹部 2H。 該控制單元41開啟，該工作電極31丨與該工件2〇之工作 表面21間充滿-工作液36(非工作表面22不會接觸工作液36) 且產生-預定之電化學反應；該工作液36係由該供液通道 供應並由該回吸通道313吸回。 故，上述之第一實施例係利用電解反應於該工件2〇之工 作表面21上產生預定之凹部211。 其次，參閱第六、第七、第八、第九及第十圖，其係本發 明之第二實施例，此第二實施例A_於第—實施例而設有一 電源供應單元10、-功20、-卫作液喷吸系統3G及一噴吸 控制系統40 ;但是，該第一電極接頭u係為正極，該第二電 極接頭12係為負極’且該工作液36係為陽極處理電解液。其 中，該工件20之工作表面21係接觸該工作液36而產生一金 屬氧化薄膜212，該金屬氧化薄膜212並有預定之顏色。 如第七圖所示，該金屬氧化薄膜212係為一薄層，它可能 是如第八圖所示之平坦狀或是第九圖所示之具有蜂巢狀凹洞 213之狀悲（當它是氧化鋁時），此時，可以再搭配另一電鑄沉 積步驟將另-特定之金屬填入物214沉積至這些蜂巢狀凹洞 213中（如第十圖所示），則可產生特殊之顏色（或色澤）。 1299065 因此，可以得到想要之上色效果。 一此外，本發明之第三實施例如第十―、第十二及第十三圖 所不，其中，該第—電極接頭11係為負極，該第：電極接頭 12係為正極，該工作電極311係為一預定之金屬且該工作 液36係為電解液’又，該工件2〇之工作表面2H系接觸該工 作液36而會產生電鑄沉積反應，進而於該工# 20之工作表面 21上產生預定之凸部215。 當然，可以在每一不同的工作表面21上各設置—可同 時用以進行電解/電鑄/上色反應时吸組件31，再將每—喷 吸組件31連接琳同的電源供應單元1{)，每―電源供應單元 10皆可任意改變輸出之電壓與電流；藉此控制不同的工作表 面21產生不同的電解、電鑄或上色狀態，增加工件21加工: 變化性。 當然，也可將上述之第一、第二及第三實施例三者合併在 -起(或其中之兩者）。並將電源供應單元1()、工作液嘴吸系 統30及喷吸控制系統4〇也增加為三組（圖中未示）。 ” 如第十四圖所示，該喷吸組件31可分成三大組： “ [a]第-組中之噴吸組件31A、31B(兩者略為錯開而可涵 蓋整個掃過之Φ積)在預定錄處進行f—實麵之電解加工 (產生複數個凹部）。 [b]第二組中之噴吸組件31C、31D(兩者略為錯開而可涵 1299065 蓋整個掃過之面積)在另—預定位置處進行第二實施例之上色 處理（產生預定之顏色）。 [c]第二組中之喷吸組件31E、31F(兩者略為錯開而可涵 蓋整個掃過之面積)在另—預定位置處進行第三實施例之電鱗 沉積處理（產生複數個凸部）。 此外，請參閱第-及第二圖，本發明可搭配一機械移動系 統50，用以使該工件20與該工作液喷吸系统％帛產生_預 定之相對移動。 再者’如第十五圖所示，該噴吸組件31之供液通道312 與回吸通道313也可由原先之「内_外」關係修改成「外—内」 關係；仍可得到相同之功效。 當然，如第十六圖所示，該嘴吸組件31之喷液通道312(亦 可說是喷液70件)細吸通道313(亦可說是回吸元件地可以 是兩個管體併狀麵，係本發狀等效置換。 而不管是哪—實_，雜鮮元41具有以下任一種控 制方式： [1]控制流體：如第三A圖所示，該控制單元41又包括 兩個次開關41A、41B，其分別裝設於該供液通道312與回吸 通道313上，並用以控制該供液通道312與該回吸通道313開 啟/關閉，甚至可控制開啟之流量； ⑵控制供電：如第三β圖所示，該控制單元41連結於▲ a conductive and metal workpiece connected to the first electrode joint, the cylinder member having at least a working surface and at least a pull surface; - a working suction system having at least one of the components a liquid single crucible, a suckback unit, a filter, a unit, and a liquid storage unit a; each of the spray components has a working electrode, a supply line, and a returning road; the working electrode is connected to the red electrode joint The liquid storage unit stores a predetermined working fluid, and the liquid supply in the early-sealing ribbed ship unit is supplied to the liquid supply passage of the spray suction device, and the suction unit is provided The liquid is sucked back to the filter unit for filtration, and then sent to the liquid storage unit; 6 ^ 299 〇 65 - mouth suction control (four) system, the system has less control - a control unit for controlling the corresponding mouth suction component The electrochemical reaction is started/closed, and the control unit is disposed at a position selected from a liquid supply channel and a suction channel of the fuel injection assembly, and between the second electrode connector and the working electrode. II. The present invention can be finely processed in various processes such as electrolysis, coloring, electroforming, and photoresist coating. The present invention will be described in detail below with reference to the following embodiments: • [Embodiment] Referring to the first, second, third, fourth, and fifth figures, the present invention is a jet type jade device' The jet processing device includes a power supply unit 10, a workpiece 20, a working fluid squirting system 3A, and a squirting control system 4; the power supply unit 1 is configured to provide the working fluid squirting system 3〇 cooperate with the squirting control system 40 to perform the electrolysis, coloring, electroforming, photoresist removal/spraying processing power of the series 20; wherein: 吁 _ the working fluid squirting system 3 〇 Having at least a squirting assembly 31, a liquid supply passage 312, a suction passage 313, a liquid supply unit 32, a suction unit 33, a filtration unit το 34, and a liquid storage unit 35; the liquid storage unit 35 The stored working fluid 36 is ejected from the liquid supply passage 312 of the ejector assembly 31 toward the workpiece 20 via the liquid supply unit 32; the suckback unit 33 is sucked from the suction passage 313 of the squirt assembly 31. Returning the sprayed working fluid 36 to the filter unit 34 for filtration and then sending it to the liquid storage unit 35 for storage. For repeated use; as for the squirting control system 40, the working fluid squirting system is controlled to start 1299065. In the first embodiment of the present invention, the power supply unit i has a first electrode connector u and a second electrode connector 12 with a predetermined dragon therebetween. The electrically conductive and metal workpiece 20 is coupled to the first electrode joint 11'. The workpiece 20 has at least one worksheet φ 21 and at least one non-working surface 22 〇 - red liquid liquid Weng New 3G, having a plurality of The squirting assembly is shown as a coaxial channel %), a liquid single cymbal 32, the suckback unit 33, the over-fresh element 34 (for filtering impurities and away from the anti-magic object), and the _ liquid unit 35; The assembly 31 has a working electrode 3U, the liquid supply channel 312 and the suckback channel 313; the working electrode 311 is connected to the second electrode connector 12; the liquid storage unit 35 stores a predetermined work line 36, the liquid supply The unit 32 supplies the working fluid 36 in the liquid storage unit to the liquid supply channel M2 of the fuel injection unit 31, and the suction unit 33 sucks the working liquid 36 back to the transition unit to be transferred to the liquid storage unit. In the unit 35, the squirting control system 40' has a plurality of control units 4 for controlling the electrochemical reaction of the tilting assembly 31, and the setting position of the control unit 系 is selected from the squirting assembly. 31 of the liquid supply channel 312 and the back suction k 313, the first electrode _ 12 to the working electrode One of the Sichuan. In the first embodiment of the present invention, the first electrode connector u is a positive electrode, the first electrode connection 12 is a negative electrode, and the working fluid % is an electrolyte, wherein 1299065 the working surface 21 of the workpiece 20 is Contact with the working fluid 36 produces an anodizing reaction, which in turn dissolves the metal to produce a predetermined recess 2H on the working surface 21. The control unit 41 is opened, and the working electrode 31 is filled with the working surface 21 of the workpiece 2 - the working fluid 36 (the non-working surface 22 does not contact the working fluid 36) and generates a predetermined electrochemical reaction; The 36 is supplied from the liquid supply passage and sucked back by the suction passage 313. Therefore, the first embodiment described above generates a predetermined concave portion 211 on the working surface 21 of the workpiece 2 by electrolytic reaction. Next, referring to the sixth, seventh, eighth, ninth and tenth drawings, which is a second embodiment of the present invention, the second embodiment A_ is provided with a power supply unit 10, The work 20 is a liquid spray system 3G and a spray control system 40; however, the first electrode joint u is a positive electrode, the second electrode joint 12 is a negative electrode, and the working fluid 36 is anodized. Electrolyte. The working surface 21 of the workpiece 20 contacts the working fluid 36 to produce a metal oxide film 212 having a predetermined color. As shown in the seventh figure, the metal oxide film 212 is a thin layer, which may be a flat shape as shown in the eighth figure or a honeycomb-shaped recess 213 as shown in the ninth figure. When it is alumina, at this time, another electroforming deposition step can be used to deposit another specific metal filler 214 into the honeycomb recesses 213 (as shown in the tenth figure), which can produce special The color (or color). 1299065 Therefore, you can get the desired color effect. In addition, the third embodiment of the present invention is not described in the tenth, twelfth, and thirteenth embodiments, wherein the first electrode tab 11 is a negative electrode, and the first electrode tab 12 is a positive electrode, and the working electrode is 311 is a predetermined metal and the working fluid 36 is an electrolyte. In addition, the working surface 2H of the workpiece 2 contacts the working fluid 36 to generate an electroforming deposition reaction, and further the working surface of the work #20 A predetermined convex portion 215 is produced on the 2121. Of course, it can be arranged on each of the different working surfaces 21 - the suction assembly 31 can be used for the electrolysis/electroforming/coloring reaction at the same time, and each of the squirting assemblies 31 can be connected to the same power supply unit 1{ The power supply unit 10 can arbitrarily change the voltage and current of the output; thereby controlling different working surfaces 21 to produce different electrolysis, electroforming or coloring states, and increasing the processing of the workpiece 21: variability. Of course, the first, second, and third embodiments described above may also be combined (or both). The power supply unit 1 (), the working nozzle suction system 30, and the suction control system 4A are also increased into three groups (not shown). As shown in Fig. 14, the squirt assembly 31 can be divided into three groups: "[a] squirt assemblies 31A, 31B in the group - (the two are slightly staggered to cover the entire Φ product) Electro-processing of the f-solid surface (generating a plurality of recesses) is performed at the predetermined recording. [b] The squirting assemblies 31C, 31D in the second group (the two are slightly staggered to cover the entire swept area of the 1297065 cover) at the other predetermined position for the coloring process of the second embodiment (generating a predetermined color) ). [c] The squirting assemblies 31E, 31F in the second group (both slightly offset to cover the entire swept area) performing the scale deposition process of the third embodiment at another predetermined position (generating a plurality of convex portions) ). In addition, referring to the first and second figures, the present invention can be combined with a mechanical moving system 50 for causing the workpiece 20 to produce a predetermined relative movement with the working fluid squirting system. Furthermore, as shown in the fifteenth figure, the liquid supply passage 312 and the suckback passage 313 of the squirt assembly 31 can also be modified from the original "inner-outer" relationship to an "outer-inner" relationship; efficacy. Of course, as shown in FIG. 16 , the liquid discharge channel 312 (also referred to as a spray liquid 70) of the mouth suction assembly 31 can be a small suction channel 313 (it can be said that the suction element can be two pipe bodies and The surface is equivalent to the hair-like equivalent replacement. Regardless of which---------------------------------------------------------------------------------------------------------------------------------------------------------- The two secondary switches 41A, 41B are respectively disposed on the liquid supply channel 312 and the suction channel 313, and are used for controlling the liquid supply channel 312 and the suction channel 313 to be turned on/off, and even controlling the flow rate of the opening; (2) Control power supply: As shown in the third β diagram, the control unit 41 is connected to
11 1299065 该工作電極311與該第二電極接頭12間，其用以控制該工作 電極311與該第二電極接頭12間導電/斷電，甚至可控制導電 之電壓差或電流量。 不論是控概體或㈣供電，均可達顺制電化學反應之 目的。 本發明的另—實侧，是在前述電化學反應加工完成後， 停止供電’並直接以該供液單元32内的工作液％對工件别(例 如為基板)之狀錄紐輕的清除程序(例如清除用以進 行曝光作紐之光阻）。由此可知本發明亦可顧於噴塗/清除 製程，實是一大發明。 紅上所述，本發明之優點及功效可歸納為·· [1] 可加工複雜形狀。利用本發明之複數個喷吸組件，可 、精確的在預疋位置上產生凹部或凸部，故，可加工複雜之形 狀。 [2] 表面加工之效果佳。由於刀具（電極）與工件不接觸， 不會有磨損、產生毛邊或殘留應力之問題，另外，只要控制得 宜’亦可得到良好之表面㈣造度。同時，非接觸式的加工方式 對於超尚硬度之金屬工件，也可適用。 [3] 可同時進行上色處理。本發明之第二實施例可對工件 進行上色處理，並利用類似喷墨印表機之概念，於最大解析度 範圍内，於工件上產生預定之顏色或圖形。 1299065 ^ + 面不胃朗卫作液。本發明之I作液可採用同 :及原理’以控制嘴出之液量及位置，加工後則吸回，故， 工件表面不會殘留卫作液，大幅降低污染之問題。 、僅疋藉由R實齡彳詳細酬本發明，對於該實施例 所做的任何鮮修改錢化，料雌本刺之精神與範圍。11 1299065 The working electrode 311 and the second electrode connector 12 are used to control the conduction/de-energization between the working electrode 311 and the second electrode connector 12, and even control the voltage difference or current amount of the conduction. Whether it is the control body or (4) power supply, the purpose of the electrochemical reaction can be achieved. The other side of the present invention is a cleaning procedure for stopping the power supply after the completion of the electrochemical reaction processing and directly recording the workpiece (for example, a substrate) with the working fluid % in the liquid supply unit 32. (For example, remove the photoresist used to perform exposure). From this, it can be seen that the present invention can also be applied to the spraying/cleaning process, which is a great invention. As described above, the advantages and effects of the present invention can be summarized as [1] processing complex shapes. With the plurality of squirting assemblies of the present invention, concave or convex portions can be accurately and accurately formed at the pre-twisted position, so that a complicated shape can be processed. [2] The effect of surface processing is good. Since the tool (electrode) is not in contact with the workpiece, there is no problem of abrasion, burrs or residual stress, and a good surface (four) degree can be obtained as long as it is properly controlled. At the same time, the non-contact machining method is also applicable to metal workpieces with excessive hardness. [3] Color processing can be performed at the same time. The second embodiment of the present invention can color the workpiece and utilize a concept similar to an ink jet printer to produce a predetermined color or pattern on the workpiece within a maximum resolution range. 1299065 ^ + No side stomach. The liquid I of the present invention can adopt the same principle and principle to control the amount and position of the liquid discharged from the mouth, and suck back after processing, so that the surface of the workpiece does not leave the working fluid, and the problem of pollution is greatly reduced. The invention is based on the invention of R, and any fresh modification of the embodiment is made by the spirit and scope of the female thorn.
由以上系細6兒明’可使熟知本項技藝者明瞭本發明的確可 達絲述目的，實已符合專利法之規定，爰提出發明專利申請。 【圖式簡單說明】 第一圖係本發明之俯視圖 第二圖係本發明之立體圖 第一 A圖係本發明之第一實施例之控制單元應用於控制流體 之不意圖 弟一 B圖係本發明之弟一實施例之控制單元應用於控制供電 之示意圖 弟四圖係本發明之第一實施例之過程一之局部示意圖 第五圖係本發明之第一實施例之過程二之局部示意圖 第六圖係本發明之第二實施例之局部剖視之示意圖 第七圖係本發明之第二實施例之過程一之局部示意圖 第八圖係本發明之第二實施例之過程二之局部示意圖 第九圖係本發明之第二實施例之過程三之局部示意圖From the above-mentioned details, it will be apparent to those skilled in the art that the present invention can be clearly stated, and that it has met the requirements of the Patent Law and has filed an invention patent application. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a top view of the present invention. The second drawing is a perspective view of the present invention. The first A drawing is a control unit of the first embodiment of the present invention applied to control fluids. BRIEF DESCRIPTION OF THE DRAWINGS The control unit of an embodiment is applied to control power supply. The fourth embodiment of the first embodiment of the present invention is a partial schematic diagram. The fifth diagram is a partial schematic diagram of the second embodiment of the first embodiment of the present invention. 6 is a partial cross-sectional view of a second embodiment of the present invention. The seventh embodiment is a partial schematic view of a second embodiment of the present invention. FIG. 8 is a partial schematic view of the second process of the second embodiment of the present invention. Figure 9 is a partial schematic view of the third process of the second embodiment of the present invention
13 1299065 第十圖係本發明之第二實施例之過程四之局部示意圖 f十一圖係本發明之第三實施例之局部剖視示意圖 計二_本翻之第三實_之酿—之局部示意圖 f十一圖係本翻之第三實酬之過程二之局部示意圖 第十四圖係本發明之喷吸組件之排列狀態之示意圖 第十五圖係本發明之噴吸組件之等效變更之示音圖一 第十六圖係本發明之噴吸組件之等效變更之示咅、圖一 【主要元件符號說明】 10電源供應單元 11第-電極接頭 12第二電極接頭 20工件 21工作表面 211凹部 212氧化金屬薄膜 213蜂巢狀凹洞 214金屬填入物 215凸部 22非工作表面 30工作液噴吸系統 31、31A、31B、31C、31D、31E、31F 喷吸組件 311工作電極 312供液通道 313回吸通道 314通道開關 32供液單元 33回吸單元 34過濾單元 35儲液單元 36工作液 40喷吸控制系統 41控制單元 41A、41B次開關 50機械移動系統13 1299065 FIG. 10 is a partial schematic view showing a fourth embodiment of the second embodiment of the present invention. FIG. 11 is a partial cross-sectional view showing a third embodiment of the present invention. Partial Schematic FIG. 11 is a partial schematic diagram of the second process of the third embodiment. FIG. 14 is a schematic view showing the arrangement state of the squirting assembly of the present invention. The fifteenth diagram is the equivalent of the squirting assembly of the present invention. Fig. 16 is a diagram showing an equivalent change of the squirting assembly of the present invention, Fig. 1 [Description of main components and symbols] 10 power supply unit 11 - electrode joint 12 second electrode joint 20 workpiece 21 Working surface 211 concave portion 212 oxidized metal film 213 honeycomb cavity 214 metal filling 215 convex portion 22 non-working surface 30 working fluid squirting system 31, 31A, 31B, 31C, 31D, 31E, 31F squirting assembly 311 working electrode 312 liquid supply channel 313 suction channel 314 channel switch 32 liquid supply unit 33 suction unit 34 filter unit 35 liquid storage unit 36 working fluid 40 injection control system 41 control unit 41A, 41B secondary switch 50 mechanical movement system