1291140 九、發明說明： 【發明所屬之技術領域】 本發明係一種基板影像檢查方法及結構，其係最主要係針對現今各式 的基板部份做一損瓖檢測，透過精準的檢測過程讓基板達到較高的良率， 以減少不良品的產生。 【先前技術】 φ 就習知所述如第一圖所示，台灣新型專利公告號碼578905液晶顯示哭 面板(LCDPanel)點燈後顯像品質自動檢測裝置所述，其係以龍門式跨架之 裝置跨設於LCD製程中之人工目檢測設備上方，藉由跨架運動機構所裝設 之數位攝影機以上下或左右之移動方式移至定點後，以靜止拍攝方式逐次 將液晶顯示器面板(LCD Panel)點燈後顯示影像完整拍入系統以提供電腦軟 體分析辨識壞點(MURA)、亮點(DOT/LINE)等缺陷；又如第二圖所示，台 〉考新型專利公告號· M261685用以檢測表面設置偏光板之玻璃基板之缺陷 鲁 檢測设備中所述，其係利用一光源提供光束，以照射該表面設置偏光板之 玻璃基板，並利用一連接該光源之角度調整裝置，以調整該光源以控制光 束照射該表面設置偏光板之玻璃基板之照射角度，接著以一影像感測器感 應該光束照射該表面設置偏光板之玻璃基板所產生之缺陷影像係具灰階變 化之顯像點，最後藉由一分析模組根據該顯像點之灰階值，以分析確認該 顯像點所對應之缺陷；再如第三圖台灣發明專利公告第123〇296號液晶顯示 器面板測試裝置及方法所述，其係為該液晶顯示面板依序由一第一偏光 板、一第一位相差板、一液晶單體、一第二位相差板及一第二偏光板所組 5 ⑧ 1291140 成，其中該液晶顯示面板測試裝置係包括有：一光源產生裝置，可提供一 光源，-測铺座，其翻以承触液·示面板，使該液晶顯示面板與 該光源行進方向呈-適當角度，且制試基座可旋翻魏第_相差板與 第一位相差板之相位，以及選擇進行該第一位相差板與選擇進行該第二位 相差板之·;-光擷取單元，其餘職該光源魏裝置設置，用以接 收由该液晶顯示面板來的光源；—光職檢職置，其猶接於該光顧取 單元’用以判讀該光擷取單元之數據。 然上所述之習知技術，其人工目視檢測方式良率相當不好，且好工費 時，而台灣新型專利公告號碼578905液晶顯示器面板(LCDPand)點燈後顯 像品質自動檢職倾述，其彡、為組裝完錢才能檢表面找出缺陷， 故在組裝的過程巾是無法做-各狀檢測，需雜裝完成才能做檢測，找 出缺陷後再將成品淘汰《_將會浪肢量的製造成本及加卫過程；又 台灣新型糊公告^嫌刪5用以檢_面設置偏光板之玻璃基板之缺 P嫌測設射所述，錢必翻帛—狀光束及驗誠_灰階顯像處理 才能比對出缺陷處，且每次偏光板經運輸的過程若產生檢測位置上的偏 差，需常更改光線角度，否則會產生灰階部份(缺陷部份)的誤判，實感麻煩 且檢測常會造成不精確的狀況，在台灣發明專利公告第1230296號液晶顯示 器面板測試裝置及方法中所述，其彡断人_個特定角度的光線與特定的光 線波長射人制面_，取得-取樣鶴標準數值去輯得出是否為損壞 之面板，實施上會有較大的誤差，且需常調整特定的入射光線角度與波長， 貝感麻煩且檢測的單兀並不多。1291140 IX. Description of the Invention: [Technical Field] The present invention relates to a substrate image inspection method and structure, which is mainly for performing damage detection on various substrate parts of the present type, and allowing the substrate to be passed through an accurate detection process. Achieve higher yields to reduce the production of defective products. [Prior Art] φ As is known in the first figure, Taiwan's new patent number 578905 liquid crystal display crying panel (LCDPanel) lighting quality automatic detection device after lighting, which is based on gantry type cross-frame The device is placed over the artificial visual inspection device in the LCD process. After the digital camera installed by the cross-frame motion mechanism moves to the fixed point above or below, the liquid crystal display panel (LCD Panel) is successively taken in a still shooting manner. After the lighting, the image is completely captured into the system to provide computer software analysis and identification of defects (MURA), bright spots (DOT/LINE) and other defects; as shown in the second figure, the table is used to test the new patent announcement number · M261685 In the defect detecting apparatus for detecting the glass substrate on which the polarizing plate is disposed, the light source is provided by a light source to illuminate the glass substrate on which the polarizing plate is disposed, and an angle adjusting device connected to the light source is used to adjust the The light source controls the light beam to illuminate the illumination angle of the glass substrate on the surface of the polarizing plate, and then the image sensor senses the light beam to illuminate the surface. The defect image generated by the glass substrate of the board has a development point of gray scale change, and finally an analysis module determines the defect corresponding to the development point according to the gray scale value of the development point; The third figure is the invention of the liquid crystal display panel according to the method and method for testing the liquid crystal display panel of the invention No. 123〇296. The liquid crystal display panel is sequentially composed of a first polarizing plate, a first phase difference plate, a liquid crystal cell, a second phase difference plate and a second polarizing plate group 5 8 1291140, wherein the liquid crystal display panel testing device comprises: a light source generating device, which can provide a light source, a measuring device, which is turned over to touch a liquid-display panel, the liquid crystal display panel and the light source travel direction are at an appropriate angle, and the test base can rotate the phase of the Wei-phase difference plate and the first phase difference plate, and select the first phase difference The board and the second phase difference plate are selected; the light extraction unit, and the remaining light source device is arranged to receive the light source from the liquid crystal display panel; the optical inspection position is still connected to The patronage unit The interpretation of the data retrieval unit of light. However, the conventional techniques described above have a very good rate of manual visual inspection, and the time and cost are good, and the new type of patent announcement number 578905 LCD panel (LCDPand) in Taiwan is automatically checked after the lighting. In fact, in order to assemble the money, the surface can be found to be defective, so the process towel can not be done in the assembly process - all kinds of inspections are required, and the miscellaneous preparation is required to do the inspection, and the defects are eliminated before the finished product is eliminated. Quantity of manufacturing costs and the process of strengthening; and Taiwan's new paste announcement ^ suspected to delete 5 for inspection _ surface set of polarizing plate glass substrate lack of P suspected to set the description, the money will turn over - beam and test _ Gray-scale imaging processing can compare the defects, and each time the polarizing plate is transported, if the deviation of the detection position occurs, the angle of the light should be changed frequently, otherwise the gray-scale part (defective part) will be misjudged. Really troublesome and often caused inaccurate conditions, as described in Taiwan’s invention patent publication No. 1230296 LCD panel test device and method, which breaks people's specific angles of light and specific wavelengths of light into the surface _ Achieved - Sampling crane standard values to obtain series of whether the panel is damaged, there is a large error on the embodiment, and often need to adjust the angle of incident light with a specific wavelength, shellfish feeling cumbersome and not much detection of single-Wu.
6 1291140 【發明内容】 本發明係-種基板影像檢查方法及結構，其主要係將各式加工過之待 檢測基板置胁本發明制裝置之紐壯，_檢_錢上輸送裝置 將待檢測基板傳送至檢測裝置之止構裝置，穩固地將其停放再待檢平台 上，而待檢平台上待檢測基板先由傳輸裝置部份的止擒裝置上之定位攝影 機掃猫該修正之誤差值’將掃_後之誤差值熱傳送至檢_統裡，透 過檢測系統將魏錄加綠記且分析輯，藉此_縣值去校正其待 測基板所產生的掃晦位置誤差，接著利用正、背兩種光源去照射待測基板， 再由CCD攝職稱錢行面掃喊轉㈤影佩财式攝取得其待測基 板之正光與背光之顯影，由電腦去比對制基板之位移量、磨邊量檢查等 等，將檢查出有缺陷的基板，以確保基板之品質。 然針對上述習知之缺陷而言，就人工目視檢測的方式，已不需要利用 人工做-不精確的目視檢測工作，此自動化的方式大幅減少了人力使用上 的成本，且經由本發明的嚴密比對方式可大幅提高良率；就台灣新型專利 公告號碼57娜液晶器面板(LCD pan•燈鶴像品f自動檢測裝置 所述，本發明係針對偏光板部份加以各別檢測，不需經過組裝後再去檢測 其缺陷；就台_賴公告號·· M26廳肋檢·面設置偏光板之玻 璃基板之缺陷檢測設備中與台灣發明專利公告第123〇2%號液晶顯示器面 板測試裝置及方法巾所述，本發義糊_影像崎的方式達到更多的缺 陷測試，例如磨邊量檢查、偏移量檢查等等，甚至本發明特別設置了一止 檔結構加上校正感測功能使其為全自動之測試並不需做過多的測試調整， 使用上極為方便且大幅度的提升其良率。 1291140 【實施方式】 部份1卜-是基板撐起架部份12，一是傳輸裝置部份13，_是系統處理部 份14 ; 如圖四所示’-種基板影像檢查方法及結構，其整體係為—個基板檢 查機10，而其基板檢查機1〇上具有分成幾個部份以下幾個部份，一是掃瞒 配合第五圖所示，然其掃瞄部份n分了幾個單元： - ccd攝影機m，其係負責將待測之基板做完整的掃晦，其掃瞒又 可大致分純觸及雜瞄，其面胸影像獄(亦縣辦列，矩陣或漸 進式面掃瞎)是採用二維矩陣圖素㈣），經由一次曝光 影像資訊，而不需要移動圖素或CCD攝影鏡頭，而其另—種線掃瞒影像感 測是以-列微感賴-維），在某—方向掃瞒，輪取—列訊號，依序讀 出資料後，再掃釘-列，喊必顧覆讀取影像魏才可形成整張二維 的影像晝面，並且其將掃_後的絲歸彡_輸至纽裝置部份，然其 CCD攝影機有各種的機種，有彩色、黑白、微型、高低解析鱗等，然其 一般係使用高解析度CCD攝影機； -可移動支樓架m，當然CCD攝影機f要―個可鶴支撑架，才可順利 移動其CCD攝影機至躺面域進行掃晦，透過可軸支撐架可讓c⑦ 攝影機做-全面性及全綠崎猫，錢可_崎喊面触的方式將 待測基板進行掃目苗的動作； 一正、背光光源⑴、m，其係裝設於CCD攝影機下方當可移動支樓架 將CCD攝影機移動到待測基板時，此時的正、背光光源會各別或同時的提 供光源，以達成正背光顯影的效果，使CCD攝顯可雜—正、背光的擇 1291140 瞒顯影資料； 而基板擇起架12部份分成以下幾個結構： —掉起平台m，其係先經由傳輸裝置部份之輸送帶將基板傳爾起平二 ，在紅撐起平台_時，挪輸《雜有-止《置職板大鄉 寺疋的位置’再由止植裝置上的定位攝影機照攝基板位置，並將位置 資料送至系統裝置部份做分析與比對，透過分析比對達到檢測定位的成效； =裝置，其係裝設在撐起平台下樹起平台相連接，然其系統裝置 =下指令麟起平台下方的馬輕置，將偏歧撐起供細部份 仏f田再將掃跑過後的偏光板經由傳輸裝置傳送走； 配合弟六圖及第七圖，而彳 口而傳輪裝置部份13係分為以下幾個 ==131，__般之_置，最墙纖輸送至檢 傳 =置傳^，嫩输_嫩，_邮蝴的滾輪式 一止播裝置132及定位攝影_，其係配合基板撐起架部份，其係是縣 7送至軸平台上，錢至物平㈣前方、在傳鮮 = 影 透過分 有一止繼纖大峰線物上的定ΓΓ 部份齡析與比對， 析比對達到檢測定位的成效； 一系統處理部份14可分為下列幾種模組： -細收模組，先將定位攝影機的定位資料做—接收的動作，並將資料 1291140 傳送至處理模組中，再將掃猫部份所傳送出來_資料做—接收，並將 掃瞄資料傳送至處理模組； -處理’將定赠駿—分键理，較位㈣數據翻設位置資料 伙比對產生健差5周整值，再將基板掃晦的光源顯影圖加以處理與預 設之良好-輯，子間之補(含柳㈣、端子部 破損、非端子部補、祕破損、Bali、_、娜量檢查、磨邊量檢查等6 1291140 SUMMARY OF THE INVENTION The present invention is a substrate image inspection method and structure, which is mainly for arranging various types of processed substrates to be inspected, and the device of the present invention is to be tested. The substrate is transferred to the stop device of the detecting device, and is stably parked on the platform to be inspected, and the substrate to be detected on the platform to be inspected is firstly scanned by the positioning camera on the stopping device of the transmitting device. 'The error value after sweeping_ is transferred to the inspection system, and Wei Lu will be recorded and analyzed by the detection system, and the _ county value will be used to correct the position error of the broom generated by the substrate to be tested, and then use Two kinds of light sources, the front and the back, illuminate the substrate to be tested, and then the CCD photographs the title and the money is swept away. (5) The image of the positive light and the backlight of the substrate to be tested is obtained by the computer, and the displacement of the substrate is compared by the computer. The amount of edging, the amount of edging, etc., will detect the defective substrate to ensure the quality of the substrate. However, in view of the above-mentioned drawbacks, in the manner of manual visual inspection, it is no longer necessary to use manual-inaccurate visual inspection work, and this automated method greatly reduces the cost of human use, and the strict ratio through the present invention. The method can greatly improve the yield; as described in the Taiwanese new patent announcement number 57 Na liquid crystal panel (LCD pan• lamp crane image f automatic detection device, the present invention separately detects the polarizing plate portion without going through After the assembly, the defect is detected; the defect detection device for the glass substrate with the polarizing plate set on the ribbed inspection surface of the M26 hall and the Taiwan invention patent notice No. 123〇2% LCD panel test device and According to the method towel, the method of the sensation paste reaches more defect tests, such as edging amount inspection, offset inspection, etc., and even the invention specifically sets a stop structure plus a correction sensing function. It is not necessary to make too many test adjustments for the fully automatic test, and it is extremely convenient and greatly improved in its use. 1291140 [Embodiment] Part 1 Bu-Yes The board support portion 12, one is the transmission device portion 13, _ is the system processing portion 14; as shown in Fig. 4, the substrate-based image inspection method and structure, the whole is a substrate inspection machine 10, The substrate inspection machine 1 has several parts divided into several parts. One is that the broom is matched with the fifth figure, but the scanning part is divided into several units: - ccd camera m, The system is responsible for making the complete substrate of the broom to be tested, and the broom can be roughly divided into purely impulsive sights. The face chest image prison (also set up by the county, matrix or progressive broom) is a two-dimensional matrix diagram. (4)), through one exposure of image information, without the need to move the pixel or CCD camera lens, and the other type of line broom image sensing is - column micro-sensitive - dimensional), in a certain direction, broom, Round-to-column signal, after reading the data in sequence, then sweeping the nail-column, shouting must read the image Wei Cai can form the entire two-dimensional image surface, and it will sweep the _ after the silk 彡 _ The new device part, but its CCD camera has a variety of models, including color, black and white, micro, high and low resolution scales, etc. Generally use high-resolution CCD camera; - movable branch frame m, of course, CCD camera f must be a crane support frame, in order to smoothly move its CCD camera to the lying area for broom, through the shaft support frame Let the c7 camera do - comprehensive and full green saki cat, money can _ screaming face to touch the substrate to be tested to sweep the seedlings; a positive, backlight source (1), m, which is installed under the CCD camera When the movable branch frame moves the CCD camera to the substrate to be tested, the positive and backlight sources at this time will provide the light source separately or simultaneously to achieve the effect of positive backlight development, so that the CCD can be miscellaneous-positive and backlit. The selection of the 1291140 瞒 development data; and the substrate selection frame 12 is divided into the following structures: - the platform m is dropped, the substrate is first transferred to the second through the conveyor belt of the transmission device, and is supported by the red Platform _, when the "mixed-stop" position of the board of the Daxiang Temple, and then the position of the substrate on the stop device to take the position of the substrate, and send the location data to the system device for analysis and comparison Yes, through analysis and comparison to achieve detection and positioning Effect; = device, which is installed under the support platform to connect the platform to the platform, but its system device = lower command the horse below the platform to lightly lift the eccentricity for the fine part 仏 f田 again After the sweep, the polarizing plate is transported away via the transmission device; with the six figures and the seventh picture, the 13 parts of the transfer device are divided into the following ==131, __like_set, the most wall The fiber is transported to the inspection pass = set pass ^, tender transfer _ tender, _ mail butterfly roller type one stop device 132 and positioning photography _, which is matched with the substrate support frame part, which is the county 7 to the axle platform On the front, the money to the level (4) in front, in the fresh pass = shadow through the minute and the secondary fiber on the peak line of the part of the age of the analysis and comparison, the analysis of the comparison to achieve the effect of detection and positioning; a system processing part 14 It can be divided into the following types of modules: - Fine-receiving module, firstly, the positioning information of the positioning camera is made to receive the action, and the data 1291140 is transmitted to the processing module, and then the part of the scanning cat is transmitted. Do-receive and transfer the scan data to the processing module; - Process 'will be given the key - the key, the position (four) According to the revamped position data, the difference is 5 weeks, and the light source development map of the substrate broom is processed and pre-set to be good - the complement between the sub-segments (including the willow (four), the terminal part is broken, the non-terminal Department supplement, secret damage, Bali, _, Na amount inspection, edging amount inspection, etc.
等…再將檢測結果由顯示裝置顯示出來，然:處理模組有將既定行程指令輸 出至傳送魏餘’將鶴齡傳送师_、料至基板#起架部份 與傳輸裝置部份讓整體的掃目旨達到其最好的狀態。 第八、九、十、十—圖為其運作側視圖及俯視圖，然在其檢測方法係 先將基板20經由傳輪裝置13之輸送帶裝置131，將基油輸送至基板檢 測裝置10之基板支撐平臺⑵上，當輸送至基板檢測裝置1〇之基板支撐 平臺⑵日夺會有-個止檔裝置132讓基板20停止於基板支撐平臺⑵之該 制位置’但鱗紐2〇置祕板讀轉121之驗麻置時通常會有 些許的誤差’但透過止播裝置132旁之定位攝影機133的定位攝影後，藉 由系統處if部份Μ之校正❹彳魏來修正絲如賴攝驗置，將其該 修正數值先齡至纟統處理部份14裡，縣再由基板支#平臺121旋轉移 動，令掃晦部份U中之CCD攝影鏡頭1Π進行掃瞒影像感測方式取得基 板之光源顯制n掃啦彡像㈣方式分躺胸影像技舰線掃晦影 像技術，其面掃瞄影像技術(亦稱為面陣列，矩陣或漸進式面掃瞄)是採用二 維矩陣圖素(pixel)，經由-次曝光時間内，擷取整個影像資訊，而不需要移 1291140 動圖素或CCD攝影鏡頭，而其另一種線掃瞄影像感測是以一列微感測器(一 維），在某一方向掃瞒，同時擷取一列訊號，依序讀出資料後，再掃瞄下一 列，而其必須重覆讀取影像資訊才可形成整張二維的影像畫面，再其將掃 目苗過後之光源顯影圖送至緒處理部份14，再配合先前由基板檢測系統中 所產生的修正數值修正顯影圖令基板位置，將其與正確之光源顯影圖比 對’判趙測之基板是砰觀處，再將制猶的紐由雜裝置13之 輸送帶裝置131送至指定地方。 练上所述，本發明所述之基板影像檢查方法及結構，不僅可達預期之 貝用功效外並且為$所未見之設計，已符合專利法發明之要件，爰依法具 文申請之。為此，謹請f審委員詳予㈣，並祈早日崎專利，至感德 便。 以上已將發明作-詳細說明，惟以上所述者，僅為本發明之較佳實施 例而已，當不能限定本發明實施之範圍，即凡—本發明申請專利範圍所作 之均等變化與修飾等，皆蘭本發明之翻喊範圍賴倾之範脅。 1291140 【圖式簡單說明】Etc... Then the test results are displayed by the display device. However, the processing module outputs the scheduled stroke command to the transmission Wei Yu's the crane carrier _, the material to the base plate and the transmission device. The purpose of sweeping is to achieve its best condition. The eighth, ninth, tenth, and tenth drawings are the side view and the top view of the operation. However, in the detection method, the substrate 20 is first transported to the substrate of the substrate detecting device 10 via the conveyor device 131 of the transfer device 13. On the support platform (2), when the substrate supporting platform (2) which is transported to the substrate detecting device 1 has a stop device 132, the substrate 20 is stopped at the position of the substrate supporting platform (2). There is usually some error in reading the test of the 121. But after the positioning of the positioning camera 133 next to the stop device 132, the correction is performed by the if part of the system. After the inspection, the correction value is advanced to the processing part 14 of the system, and the county is further rotated by the substrate support # platform 121, so that the CCD camera lens in the broom portion U is scanned and imaged. The light source of the substrate is used to display the image of the broom image. The image of the bounce image is used to scan the image technology. The surface scan image technology (also known as surface array, matrix or progressive surface scan) uses a two-dimensional matrix. Pixel (pixel), via - exposure time, 撷The entire image information, without the need to move the 1291140 moving picture or CCD camera, and the other line scan image sensing is a column of micro sensors (one-dimensional), sweeping in one direction, while taking a column The signal, after reading the data in sequence, scans the next column again, and it must read the image information repeatedly to form a whole two-dimensional image, and then send the light source development map after scanning the seedling to the processing part. 14. In combination with the correction value previously generated by the substrate inspection system, the position of the developing substrate is corrected, and compared with the correct source development map, the substrate of the measurement is a point of view, and then the button is made. The conveyor device 131 of the miscellaneous device 13 is sent to a designated place. As described above, the method and structure of the substrate image inspection according to the present invention can not only achieve the expected use efficiency but also be unseenly designed, and has met the requirements of the patent law invention, and is applied according to law. To this end, I would like to ask the members of the trial committee to give details (4), and pray for the Japanese patents, to the sense of virtue. The invention has been described in detail above, but the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the equivalent variations and modifications of the scope of the invention. , the scope of the shouting of the invention is the scope of the invention. 1291140 [Simple description of the diagram]
第一圖係習知公告號碼578905號之立體圖 第二圖係習知公告號碼M261685號之立體圖 第三圖係習知公告號碼1230296號之立體圖 第四圖本發明基板影像檢查方法及結構之立體圖 第五圖本發明掃瞄部份分之立體圖 第六圖本發明傳輸裝置部份立體圖 第七圖本發明傳輸裝置部份剖面圖 第八圖本發明運作方式剖視圖之一 第九圖本發明運作方式剖視圖之二 第十圖本發明運作方式俯視圖之一 第十一圖本發明運作方式俯視圖之二 【主要元件符號說明】 10基板檢查機 11 掃瞄部份 111 CCD攝影機 112可移動支撐架 113 正光光源 114背光光源 12基板撐起架部份 121基板支撐平臺 13傳輸裝置部份 12 1291140 ' 131輸送帶裝置 132止檔裝置 133定位攝影機 14系統處理部份 20基板 ⑧The first picture is a perspective view of the conventional publication number 578905. The second picture is a perspective view of the conventional publication number M261685. The third picture is a perspective view of the conventional publication number 1230296. The fourth picture is a perspective view of the substrate inspection method and structure of the present invention. FIG. 5 is a perspective view of a portion of a transmission device of the present invention. FIG. 7 is a partial cross-sectional view of the transmission device of the present invention. FIG. FIG. 11 is a top view of the operation mode of the present invention. FIG. 11 is a top view of the operation mode of the present invention. [Main component symbol description] 10 substrate inspection machine 11 scanning portion 111 CCD camera 112 movable support frame 113 positive light source 114 Backlight source 12 substrate support frame portion 121 substrate support platform 13 transmission device portion 12 1291140 '131 conveyor belt device 132 stop device 133 positioning camera 14 system processing portion 20 substrate 8