1287184 九、發明說明： 【發明所屬之技術區域】 本發明是有關一種故障檢測裝置，連接於溫度調整系 • 統，例如具有：使用於工業爐加熱器，半導體洗淨裝置，塑 .膠成形機等控制對象的加熱器；用來供給電力到前述加熱器 之電源部；配置於此等加熱器及電源部間，根據溫度控制信 號從前述電源部來調整供給到前述加熱器的電量之固態繼 電器裝置（solid state relay)(以下，簡稱爲SSR裝置）；及 • 監視前述加熱器的溫度，且須根據該監視結果，將前述加熱 器之溫度設定成目標溫度，且輸出前述溫度調整控制信號的 溫度調整裝置；且該故障檢測裝置係用來檢測前述S SR裝置 或前述加熱器的故障。 【先前技術】 先前技術，譬如塑膠成形機中，已知有一溫度調整系 統，具有：配置於射出機料筒之控制對象的加熱器；用來供 給電力到前述加熱器之電源部；配置於此等加熱器及電源部 • 間，根據溫度調整控制信號調整從前述電源部供給到前述加 熱器的電量之固態繼電器裝置（以下，簡稱爲SSR裝置）； 及監視前述加熱器的溫度，根據該監視結果，用以將前述加 熱器之溫度設定成目標溫度，且輸出前述溫度調整控制信號 的溫度調整裝置。 若依據這樣之溫度調整系統，用於迅速地來檢測加熱器 的斷線等之故障，已知有以下所說明的故障檢測裝置。 該故障檢測裝置，是將加熱器之溫度到達目標溫度爲止 1287184 的正常時之溫度調整控制信號的控制量預先加以記億放 著，以溫度調整裝置用來計測加熱器之溫度到達目標溫度爲 止的溫度調整控制信號之控制量，比較該計測的控制量及記 -憶中之正常時的控制量，該比較結果超過預定臨界値且計測 .中之控制量變大時，則用來判斷加熱器的斷線（譬如參考曰 本專利文獻1 )。 若依據該專利文獻1之故障檢測裝置，則即使不使用用 來計測加熱器電流的加熱器電流計測器，僅朝SSR裝置來監 φ 視溫度調整控制信號之控制量，亦可用來檢測加熱器的斷 線。 又，作爲其他故障檢測裝置，已知有一具備下述者：用 來檢測加熱器電流之變流器；用來輸出根據該變流器的加熱 器電流之直流電壓的直流電壓輸出電路；將該直流電壓進行 數位變換以預定周期來取樣，用來算出所取入的複數次輸入 信號的移動平均値之手段；及根據該算出的移動平均値來決 定加熱器電流之基準値，並比較該加熱器電流之基準値及這 • 次的電流値，這次之電流値比基準値更小的情況下用來判斷 加熱器斷線之加熱器斷線判定手段（譬如參考日本專利文獻 2) ° 若依據專利文獻2之故障檢測裝置’則以預定周期來取 樣，用來算出所取入的複數次輸入信號的移動平均値’根據 該算出的移動平均値來決定加熱器電流之基準値’並比較該 加熱器電流之基準値及适次的電流値’适次之電纟iL値比基準 値更小的情況下用來判斷加熱器斷線’所以加熱器之經年變 1287184 化等即使使特性產生變動但亦可再設定基準値，可確實地來 檢測加熱器的斷線。 〔專利文獻1〕 日本特開2002-343537號公報（參考 ·〔 0079〕及第 14 圖） . 〔專利文獻2〕 日本實公平7-41117號公報（參考〔新 型專利申請範圍〕及第2圖） 【發明內容】 〔發明揭示〕 # 〔發明所欲解決之問題〕 可是，若依據上述專利文獻1之故障檢測裝置，則以溫 度調整裝置用來計測加熱器之溫度到達目標溫度爲止的溫 度調整控制信號之控制量，比較該計測的控制量及記憶中之 正常時的控制量，該比較結果超過預定臨界値且計測中之控 制量變大時，則用來判斷加熱器的斷線，但不能用來判斷溫 度調整系統內之SSR裝置的故障，譬如開啓故障或短路故 障。 • 又，若依據上述專利文獻2之故障檢測裝置，則以預定 周期來取樣用來算出所取入的複數次輸入信號的移動平均 値，根據該算出的移動平均値來決定加熱器電流之基準値， 並比較該加熱器電流之基準値及這次的電流値，這次之電流 値比基準値更小的情況下用來判斷加熱器斷線，即使因加熱 器之經年變化等使特性產生變動但亦可再設定基準値，可確 實地來檢測加熱器的斷線，但無法識別加熱器斷線前之加熱 器斷線壽命。 1287184 本發明有鑑於上述各點問題，其目的是提供一種故障檢 測裝置，可用來檢測SSR裝置之故障。 又，作爲本發明之目的，是提供一種故障檢測裝置，可 - 用來識別加熱器斷線前的加熱器斷線壽命，即偶然短路（rare short ) 〇 〔解決問題之手段〕 爲了來達成上述目的本發明之故障檢測裝置，是連接於 溫度調整系統，具有：控制對象的加熱器；用來供給電力到 • 前述加熱器之電源部；配置於此等加熱器及電源部間，根據 溫度調整控制信號調整從前述電源部供給到前述加熱器的 電量之SSR裝置；及監視前述加熱器的溫度，根據該監視結 果，用於將前述加熱器之溫度設定成目標溫度，且輸出前述 溫度調整控制信號的溫度調整裝置；且該故障檢測裝置係用 來檢測前述SSR裝置的故障，並具有：用來檢測前述SSR 裝置及前述加熱器間之加熱器電流的加熱器電流檢測手 段；用來判定前述溫度調整控制信號是否有第1預定電平以 ^ 上之控制量的第1判定手段；用來判定用前述加熱器電流檢 測手段所檢測的加熱器電流是否有第2預定電平以上之第2 判定手段；及根據前述第1判定手段的判定結果及第2判定 手段之判定結果，來判定前述S S R裝置的故障之故障判定手 段。 本發明之故障檢測裝置’是前述故障判定手段用前述第 1判定手段判定前述溫度調整控制信號有第1預定電平以上 的控制量’且用前述第2判定手段判定前述加熱器電流非有 1287184 第2預定電平以上時，判定前述SSR裝置之SSR開啓故障。 本發明之故障檢測裝置，是前述故障判定手段，用前述 第1判定手段判定前述溫度調整控制信號非有第1預定電平 •以上的控制量，且用前述第2判定手段判定前述加熱器電流 .有第2預定電平以上時，則可判定前述SSR裝置之SSR短 路故障。 本發明之故障檢測裝置，是具有用來報知輸出前述故障 判定手段的判定結果之報知手段。 • 本發明之故障檢測裝置，是前述加熱器電流檢測手段具 有：將前述SSR裝置及前述加熱器間的加熱器電流値以預定 周期內取得預定個數分之A/D取樣値的A/D取樣値取得手 段；用前述A/D取樣値取得手段根據所取得之預定個數分的 A/D取樣値來算出基本値之基本値算出手段；及將用該基本 値算出手段所算出的預定周期分之基本値進行平方平均値 化將所算出的電流値，以前述第2判定手段來判定換算成作 爲加熱器電流値之加熱器電流値換算手段。 • 本發明之故障檢測裝置，是前述加熱器電流檢測手段具 有：將前述SSR裝置及前述加熱器間的加熱器電流値來進行 全波整流，在預定周期內來取得所預定個數分之A/D取樣値 的A/D取樣取得手段；及累計該預定個數分之A/D取樣値， 並將該累計後的A/D取樣値進行平方平均値化所算出之電 流値，以前述第2判定手段來判定換算成作爲加熱器電流値 之加熱器電流値換算手段。 本發明之故障檢測裝置，是具有與上位機器及其他故障 -10- 1287184 檢測裝置進行無線連接的無線通訊手段，通過該無線通、 段，將前述故障判定手段之判定結果，在前述上位機器或 述其他故障檢測裝置之間進行發送和接收。 -又，爲了達成上述目的本發明之故障檢測裝置，是連接 β 於溫度調整系統，具有：控制對象的加熱器；用來供給電力 到前述加熱器之電源部；配置於此等加熱器及電源部間，根 據溫度調整控制信號調整前述電源部供給到前述加熱器的 電量之SSR裝置；及監視前述加熱器的溫度，根據該監視結 # 果，用於將前述加熱器之溫度設定成目標溫度，且輸出前述 溫度調整控制信號的溫度調整裝置；且該故障檢測裝置係用 於檢測前述加熱器的故障，並具有：用來檢測前述SSR裝置 及前述加熱器間的加熱器電流之加熱器電流檢測手段；將前 述加熱器要斷線之前的過電流値作爲偶然短路臨界値預先 加以記憶之偶然短路臨界値記憶手段；用前述加熱器電流檢 測手段來檢測前述加熱器電流時，用來判定該加熱器電流在 前述偶然短路臨界値記憶手段是否超過記憶中之偶然短路 • 臨界値的偶然短路臨界値判定手段；及用前述偶然短路臨界 値判定手段判定前述加熱器電流超過前述偶然短路臨界値 時，判斷前述加熱器之偶然短路的偶然短路判定手段。 本發明之故障檢測裝置，是具有用來判定前述溫度調整 控制信號是否有第1預定電平以上的控制量之第1判定手 段，而前述偶然短路判定手段是用前述第1判定手段判定前 述溫度調整控制信號有第1預定電平以上的控制量，且用前 述偶然短路臨界値判定手段判定前述加熱器電流超過前述 -11- 1287184 偶然短路臨界値時，則執行判斷前述加熱器之偶然短路的判 斷動作，同時用前述偶然短路臨界値判定手段判定前述加熱 器電流超過前述偶然短路臨界値，且，用前述第1判定手段 -判定前述溫度調整控制信號非第1預定電平以上之控制量 _ 時，則禁止判斷前述加熱器的偶然短路之判斷動作。 本發明之故障檢測裝置，是具有在前述偶然短路臨界値 記憶手段將記憶中的前述偶然短路臨界値，根據前述溫度調 整控制信號的設定電流値來加以調整，並將該調整後之偶然 • 短路臨界値在前述偶然短路臨界値記憶手段來進行記憶更 新的偶然短路臨界値調整手段。 本發明之故障檢測裝置，是具有用前述偶然短路判定手 段判定前述加熱器的偶然短路時，用來報知輸出該判斷結果 的報知手段。 本發明之故障檢測裝置，是前述加熱器電流檢測手段具 有：將前述SSR裝置及前述加熱器間的加熱器電流値以預定 周期內取得預定個數分之A/D取樣値的A/D取樣値取得手 • 段；用前述A/D取樣値取得手段根據所取得之預定個數分的 A/D取樣値來算出基本値之基本値算出手段；及將用該基本 値算出手段所算出的預定周期分之基本値進行平方平均値 化所算出的電流値，以前述偶然短路臨界値判定手段來判定 換算成作爲前述加熱器電流値之加熱器電流値換算手段。 本發明之故障檢測裝置，是前述加熱器電流檢測手段具 有：將前述SSR裝置及前述加熱器間的加熱器電流値進行全 波整流，在預定周期內來取得所預定個數分之A/D取樣値的 -12- 1287184 A/D取樣取得手段；及累計該預定個數分之A/D取樣値，並 將該累計後的A/D取樣値進行平方平均値化所算出之電流 値’以前述偶然短路臨界値判定手段來判定換算成作爲前述 •加熱器電流値之加熱器電流値換算手段。 ，本發明之故障檢測裝置，是具有與上位機器及其他故障 檢測裝置進行無線連接的無線通訊手段，通過該無線通訊手 段，將前述偶然短路判定手段之判定結果，在前述上位機器 或前述其他故障檢測裝置之間進行發送和接收。 •〔發明效果〕 若依據如上述所構成之本發明的故障檢測裝置，具有： 用來判定前述溫度調整控制信號是否有第1預定電平以上之 控制量的第1判定手段；及用來判定前述加熱器電流是否有 第2預定電平以上之第2判定手段；並設定成根據前述第1 判定手段的判定結果及前述第2判定手段之判定結果，來判 定前述SSR裝置的故障，所以可用來判定SSR裝置之故障， 譬如開啓故障或短路故障。 • 若依據本發明之故障檢測裝置，則設定成用前述第1判 定手段判定前述溫度調整控制信號有第1預定電平以上的控 制量，且用前述第2判定手段判定前述加熱器電流非有第2 預定電平以上時，判定前述SSR裝置之SSR開啓故障，所 以可用來判別SSR裝置的開啓故障。 若依據本發明之故障檢測裝置，則設定成用前述第1判 定手段判定前述溫度調整控制信號非有第1預定電平以上的 控制量，且用前述第2判定手段判定前述加熱器電流有第2 -13- 1287184 預定電平以上時，判定前述SSR裝置之SSR短路故障，所 以可用來判別S S R裝置的短路故障。 若依據本發明之故障檢測裝置，則將故障判定手段的判 •定結果用報知手段報知輸出，譬如設定成進行顯示輸出或揚 .聲器輸出，所以故障檢測裝置之使用者，可識別故障判定手 段的判定結果。 若依據本發明之故障檢測裝置，則加熱器電流檢測手段 是將前述SSR裝置及前述加熱器間的加熱器電流値以預定 • 周期內取得預定個數分之A/D取樣値，根據此等所取得之預 定個數分的A/D取樣値來算出基本値，將該所算出的預定周 期分之基本値進行平方平均値化所算出的電流値，以前述第 2判定手段來判定換算成作爲加熱器電流値，所以取得並非 類比性的，而是數位性的加熱器電流値，而不會受到雜波之 影響，可用來確保對加熱器電流値的電流變化之反應速度， 其結果可提高SSR裝置之故障判定精確度。 若依據本發明之故障檢測裝置，則前述加熱器電流檢測 • 手段是將前述SSR裝置及前述加熱器間的加熱器電流値進 行全波整流以預定周期內取得預定個數分之A/D取樣値，累 計該預定個數分的A/D取樣値，將該所累計的A/D取樣値 進行平方平均値化所算出的電流値，以前述第2判定手段來 判定換算成作爲加熱器電流値，所以用來取得並非類比性 的，而是數位性的加熱器電流値，不會受到雜波之影響，可 用來確保對加熱器電流値的電流變化之反應速度，其結果可 提高SSR裝置之故障判定精確度。 -14- 1287184 若依據本發明之故障檢測裝置，具有與上位機器及其他 故障檢測裝置進行無線連接，譬如以紅外線進行無線連接的 無線通訊手段，且設定成通過該無限通訊手段，將前述的故 障判定手段的判定結果在前述上位機器或其他故障檢測裝 置之間發送和接收，因此在上位機器或其他故障檢測裝置 側，可一面達成省配線，一面辨識故障檢測裝置的判定結 果，即SSR裝置的故障。其結果可辨識系統全體的SSR裝 置的故障。 又，若依據如上述所構成之本發明的故障檢測裝置，則 具有偶然短路臨界値記憶手段，接近前述加熱器之斷線壽命 時會使加熱器內部的絕緣性下降，著眼於斷線壽命之前會使 流動在加熱器的電流變高，而將前述加熱器在斷線之前的過 電流値作爲偶然短路臨界値來加以預先記憶，並檢測前述加 熱器電流時，則判定該加熱器電流是否超過記億中的偶然短 路，若判定前述加熱器電流是超過前述偶然短路臨界値時， 則判斷前述加熱器之偶然短路，所以可用來識別加熱器斷線 前的偶然短路，其結果容易把握加熱器斷線時之故障原因而 可確保維修性。又，加熱器斷線前的前兆，即把握偶然短路 而可在加熱器斷線前交換加熱器，所以可確保其預防維修 性。 若依據本發明之故障檢測裝置，則具有用來判定前述溫 度調整控制信號是否有第1預定電平以上的控制量之第1判 定手段，而判定前述溫度調整控制信號有第1預定電平以上 -15- 1287184 的控制量，且判定前述加熱器電流超過前述偶然短路臨界値 時，即使判斷前述加熱器之偶然短路，同時判定前述加熱器 電流超過前述偶然短路臨界値，但判定前述溫度調整控制信 • 號非第1預定電平以上之控制量時，則用來禁止判斷前述加 熱器的偶然短路之判斷動作，所以在溫度調整控制信號非第 1預定電平以上的控制量之狀態下可確實地來防止加熱器斷 線前的偶然短路錯誤檢測。 若依據本發明之故障檢測裝置，則在前述偶然短路臨界 • 値記憶手段將記憶中的前述偶然短路臨界値，根據前述溫度 調整控制信號的設定電流値來加以調整，並將該調整後之偶 然短路臨界値在前述偶然短路臨界値記憶手段來進行記憶 更新，所以即使變更成前述溫度調整控制信號的設定電流 値，但可將對應於該設定電流値之偶然短路臨界値來自動地 對應更新。 若依據本發明之故障檢測裝置，則來判斷前述加熱器之 偶然短路，並來報知輸出該判斷結果，譬如具有進行顯示輸 • 出或揚聲器輸出的報知手段，所以故障檢測裝置之使用者， 可識別加熱器斷線之前的偶然短路。 若依據本發明之故障檢測裝置，則前述加熱器電流檢測 手段是將前述SSR裝置及前述加熱器間的加熱器電流値以 預定周期內取得預定個數分之A/D取樣値，根據此等所取得 之預定個數分的A/D取樣値算出基本値，將該所算出的預定 周期分之基本値進行平方平均値化所算出的電流値，以前述 偶然短路臨界値判定手段來判定換算成作爲前述加熱器電 -16- 1287184 流値，所以用來取得並非類比性的，而是數位性的加熱器電 流値，不會受到雜波之影響，可用來確保對加熱器電流値的 電流變化之反應速度，其結果可提高加熱器斷線前的偶然短 -路之判定精確度。 若依據本發明之故障檢測裝置，則前述加熱器電流檢測 手段是將前述SSR裝置及前述加熱器間的加熱器電流値進 行全波整流以預定周期內取得預定個數分之A/D取樣値，累 計該預定個數分的A/D取樣値，將該所累計的A/D取樣値 φ 進行平方平均値化所算出的電流値，以前述偶然短路臨界値 判定手段來判定換算成作爲前述加熱器電流値，所以用來取 得並非類比性的，而是數位性的加熱器電流値，不會受到雜 波之影響，可用來確保對加熱器電流値的電流變化之反應速 度，其結果可提高加熱器斷線前的偶然短路之判定精確度。 若依據本發明之故障檢測裝置，具有與上位機器及其他 故障檢測裝置進行無線連接，譬如以紅外線進行無線連接的 無線通訊手段，且設定成通過該無線通訊手段，將前述偶然 • 短路判定手段之判定結果，在前述上位機器或前述其他故障 檢測裝置之間進行發送和接收，所以在上位機器或其他故障 檢測裝置，可達成省配線，並且可識別故障檢測裝置之判斷 結果，即加熱器斷線前的偶然短路。其結果可用來確保有關 系統全體之加熱器的維修性及預防維修性。 【實施方式】 〔實施發明之最佳形態〕 以下，根據圖式對於有關本發明之故障檢測裝置所示實施形 -17- 1287184 態的溫度調整系統來加以說明。 (實施形態1 ) 第1圖是顯示第1實施形態所示溫度調整系統內部之槪 -略構成方塊圖。 .第1圖所示溫度調整系統1 〇，是具有：譬如配置於射出 成形機內的料筒之控制對象的加熱器1 ;供給電力到加熱器 1之三相交流電源部（以下，簡稱「電源部」）1A ;配置於 此等加熱器1及電源部1 A間，根據溫度調整控制信號調整 φ 從電源部1A調整供給到加熱器1的電量的SSR裝置3 ;用 未圖示溫度感測器來監視加熱器1之溫度，並根據該監視結 果，將加熱器1的溫度設定成目標溫度，且輸出溫度調整控 制信號之溫度調整裝置6 ;用來檢測SSR裝置3及加熱器1 間的加熱器電流之加熱器電流檢測器5 ( 5 A、5B );及根據 溫度調整裝置6及SSR裝置3間的溫度調整控制信號呈ON 或OFF狀態及用加熱器電流檢測器5所檢測之加熱器電流呈 ON或OFF狀態，來判定SSR裝置3的故障之故障檢測裝置 • 第2圖是顯示有關第1實施形態的故障檢測裝置4內部 之槪略構成方塊圖。1287184 IX. Description of the invention: [Technical region to which the invention pertains] The present invention relates to a fault detecting device connected to a temperature adjustment system, for example, for use in an industrial furnace heater, a semiconductor cleaning device, a plastic molding machine a heater for controlling the power; a power supply unit for supplying electric power to the heater; and a solid state relay for adjusting the amount of electric power supplied to the heater from the power supply unit based on a temperature control signal disposed between the heater and the power supply unit a solid state relay (hereinafter, abbreviated as an SSR device); and • monitoring the temperature of the heater, and setting the temperature of the heater to a target temperature according to the monitoring result, and outputting the temperature adjustment control signal a temperature adjusting device; and the fault detecting device is for detecting a failure of the aforementioned S SR device or the aforementioned heater. [Prior Art] In the prior art, for example, a plastic molding machine, there is known a temperature adjustment system having: a heater disposed to be controlled by an injector barrel; and a power supply portion for supplying electric power to the heater; a solid state relay device (hereinafter, abbreviated as SSR device) for adjusting the amount of electric power supplied from the power supply unit to the heater according to a temperature adjustment control signal, and a temperature of the heater, and monitoring the temperature of the heater according to the monitoring As a result, a temperature adjusting means for setting the temperature of the heater to the target temperature and outputting the aforementioned temperature adjustment control signal. According to such a temperature adjustment system, a failure detecting device described below is known for promptly detecting a failure of a heater or the like. In the failure detecting device, the control amount of the temperature adjustment control signal at the normal time when the temperature of the heater reaches the target temperature is 1287184, and the temperature adjustment device is used to measure the temperature of the heater to reach the target temperature. The control amount of the temperature adjustment control signal is compared with the control amount of the measurement and the normal control amount in the memory, and the comparison result exceeds the predetermined threshold and the control amount in the measurement becomes larger, and is used to determine the heater. Broken wire (for example, refer to Patent Document 1). According to the failure detecting device of Patent Document 1, even if the heater current measuring device for measuring the heater current is not used, the control amount of the temperature adjustment control signal can be monitored only by the SSR device, and can be used to detect the heater. Broken line. Further, as another failure detecting device, there is known a converter for detecting a heater current; a DC voltage output circuit for outputting a DC voltage according to a heater current of the converter; The DC voltage is digitally converted and sampled at a predetermined period to calculate a moving average 所 of the input multiple input signals; and the reference 値 of the heater current is determined based on the calculated moving average 値, and the heating is compared The reference of the current of the current and the current of the current, 这次, when the current 値 is smaller than the reference 値, the heater disconnection determination means for judging the heater disconnection (for example, refer to Japanese Patent Document 2) The failure detecting device of Patent Document 2 samples a predetermined period to calculate a moving average of the input multiple input signals 値 'determining the reference 加热器' of the heater current based on the calculated moving average 并 and comparing the The reference of the heater current and the appropriate current 値 'the appropriate power 纟iL 用来 is used to judge the heater disconnection when the reference 値 is smaller than the reference ' Even if the characteristics of the heater are changed by the annual change of the heater, the reference 値 can be set again, and the disconnection of the heater can be reliably detected. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2002-343537 (refer to [0079] and Fig. 14). [Patent Document 2] Japanese Patent Publication No. 7-41117 (refer to [New Patent Application Range] and Fig. 2) [Disclosure of the Invention] [Problem to be Solved by the Invention] However, according to the failure detecting device of Patent Document 1, the temperature adjustment device is used to measure the temperature adjustment until the temperature of the heater reaches the target temperature. The control amount of the control signal is compared with the measured control amount and the normal control amount in the memory. When the comparison result exceeds the predetermined threshold and the control amount in the measurement becomes large, it is used to determine the disconnection of the heater, but not It is used to judge the fault of the SSR device in the temperature adjustment system, such as open fault or short circuit fault. Further, according to the failure detecting device of Patent Document 2, the moving average 値 of the plurality of input signals input is calculated at a predetermined cycle, and the reference of the heater current is determined based on the calculated moving average 値.値, and compare the reference current of the heater current and the current 値 of this time. When the current 値 is smaller than the reference 値, it is used to judge the heater disconnection, even if the characteristics change due to the change of the heater over the years. However, the reference 値 can be set again to reliably detect the disconnection of the heater, but the heater disconnection life before the heater is disconnected cannot be recognized. 1287184 The present invention has been made in view of the above various problems, and an object thereof is to provide a failure detecting device which can be used to detect a failure of an SSR device. Further, as an object of the present invention, there is provided a failure detecting device which can be used for identifying a heater disconnection life before a heater is disconnected, that is, an accident short circuit (a means for solving a problem). A fault detecting device according to the present invention is connected to a temperature adjustment system and includes: a heater to be controlled; a power supply unit for supplying electric power to the heater; and a heater and a power supply unit disposed between the heaters and the power supply unit, and adjusting according to temperature The control signal adjusts the SSR device that supplies the amount of electric power from the power supply unit to the heater; and monitors the temperature of the heater, and based on the monitoring result, sets the temperature of the heater to a target temperature, and outputs the temperature adjustment control. a temperature adjusting device for the signal; and the fault detecting device is configured to detect a fault of the SSR device, and has: a heater current detecting means for detecting a heater current between the SSR device and the heater; a first determining means for determining whether the temperature adjustment control signal has a first predetermined level or more; Determining whether or not the heater current detected by the heater current detecting means has a second predetermined level or higher; and determining the result of the determination by the first determining means and the second determining means The failure determining means of the failure of the SSR device. In the failure detecting device of the present invention, the failure determining means determines that the temperature adjustment control signal has a control amount "above a first predetermined level or more" by the first determination means, and determines that the heater current is not 1287184 by the second determination means. When the second predetermined level or higher, the SSR turn-on failure of the SSR device is determined. The failure detecting device according to the present invention is the failure determining means, and the first determining means determines that the temperature adjustment control signal does not have a first predetermined level or more, and determines the heater current by the second determining means. When there is a second predetermined level or higher, it is possible to determine the SSR short-circuit failure of the SSR device. The failure detecting device of the present invention is a notification means for notifying the result of the determination of the output of the failure determining means. In the fault detecting device of the present invention, the heater current detecting means includes: A/D for obtaining a predetermined number of A/D samples 加热器 in a predetermined period by a heater current 前述 between the SSR device and the heater. a sampling/obtaining means; the A/D sampling/obtaining means calculates a basic parameter calculating means based on the obtained predetermined number of A/D samples, and a predetermined calculation by the basic calculating means The basis of the cycle is 値 squared and averaged, and the calculated current 値 is determined by the second determination means to be converted into a heater current 値 conversion means as the heater current 。. In the fault detecting device of the present invention, the heater current detecting means includes: performing full-wave rectification by heating the heater current between the SSR device and the heater, and acquiring a predetermined number of minutes in a predetermined cycle. A/D sampling acquisition means for the /D sampling ;; and accumulating the predetermined number of A/D sampling 値, and calculating the current 値 calculated by the squared average of the accumulated A/D sampling 値, The second determination means determines the heater current 値 conversion means that is converted into the heater current 値. The fault detecting device of the present invention has a wireless communication means for wirelessly connecting with a higher-level device and another fault -10- 1287184 detecting device, and the determination result of the failure determining means is determined by the wireless communication unit or the upper-level machine or Transmission and reception are performed between other failure detecting devices. Further, in order to achieve the above object, the failure detecting device of the present invention is a temperature adjustment system that is connected to β, includes a heater to be controlled, a power supply unit for supplying electric power to the heater, and a heater and a power source. And an SSR device for adjusting the amount of electric power supplied to the heater by the power supply unit according to the temperature adjustment control signal; and monitoring the temperature of the heater, and setting the temperature of the heater to a target temperature according to the monitoring result And outputting the temperature adjustment device of the temperature adjustment control signal; and the failure detecting device is configured to detect a failure of the heater, and has: a heater current for detecting a heater current between the SSR device and the heater The detecting means; the overcurrent 値 before the heater is to be disconnected as an accidental short-circuit critical 値 pre-memorized accidental short-circuit critical memory means; when the heater current detecting means is used to detect the heater current, it is used to determine the Whether the heater current exceeds the memory in the aforementioned accidental short-circuit critical memory means However, the critical short circuit • accidental shorts critical Zhi Zhi the judging means; and accidental shorts with the critical Zhi judgment means judges that the heater current exceeds the critical Zhi accidental shorts when shorting is determined chance of accidental shorting of the heater judging means. The failure detecting device according to the present invention is a first determining means for determining whether or not the temperature adjustment control signal has a control amount equal to or greater than a first predetermined level, and the accidental short circuit determining means determines the temperature by the first determining means. Adjusting the control signal to have a control amount greater than or equal to the first predetermined level, and determining that the heater current exceeds the -11- 1287184 accidental short-circuit threshold by the accidental short-circuit critical threshold determination means, performing an accidental short circuit of the heater is performed. And determining, by the accidental short-circuit critical threshold determining means, that the heater current exceeds the accidental short-circuit threshold 値, and determining, by the first determining means, that the temperature adjustment control signal is not greater than a first predetermined level or more At the time, it is prohibited to judge the accidental short-circuit of the heater. The fault detecting device of the present invention has the aforementioned accidental short-circuit threshold 记忆 in the memory of the accidental short-circuit critical memory, adjusted according to the set current 値 of the temperature adjustment control signal, and the accidental short circuit after the adjustment The critical 値 is the accidental short-circuit critical 値 adjustment means for memory update in the aforementioned accidental short-circuit critical 値 memory means. The failure detecting device of the present invention has a notification means for reporting the result of the determination when the accidental short circuit of the heater is determined by the accidental short-circuit determination means. In the fault detecting device of the present invention, the heater current detecting means includes A/D sampling for obtaining a predetermined number of A/D samples 加热器 in a predetermined period by a heater current 前述 between the SSR device and the heater. Obtaining a hand/segment; using the A/D sampling/obtaining means to calculate a basic 値 basic 値 calculating means based on the obtained predetermined number of A/D samples ;; and calculating the basic 値 calculating means by the basic 値 calculating means The current period 値 calculated by the square averaging of the predetermined period is determined by the accidental short-circuit critical 値 determination means to determine the heater current 値 conversion means as the heater current 値. In the fault detecting device of the present invention, the heater current detecting means includes: full-wave rectifying a heater current 间 between the SSR device and the heater, and acquiring a predetermined number of A/Ds in a predetermined cycle. Sampling -12-1287184 A/D sampling acquisition means; and accumulating the predetermined number of A/D sampling 値, and calculating the current after the accumulated A/D sampling 平方 squared 値The heater current 値 conversion means as the heater current 値 is determined by the accidental short-circuit critical 値 determination means. The fault detecting device of the present invention has a wireless communication means for wirelessly connecting with a host device and other fault detecting devices, and the result of the accidental short circuit determining means is determined by the wireless communication means in the host device or the other faults. Transmission and reception are performed between detection devices. [Effect of the Invention] The failure detecting device according to the present invention configured as described above includes: a first determining means for determining whether or not the temperature adjustment control signal has a control amount equal to or greater than a first predetermined level; and The second determination means that the heater current has a second predetermined level or higher, and is set to determine the failure of the SSR device based on the determination result of the first determination means and the determination result of the second determination means, so that it is available To determine the failure of the SSR device, such as a fault or short circuit fault. The failure detecting device according to the present invention is configured to determine, by the first determining means, that the temperature adjustment control signal has a control amount equal to or greater than a first predetermined level, and determine, by the second determining means, that the heater current is non-existent When the second predetermined level or higher determines that the SSR of the SSR device is turned on, it can be used to determine the turn-on failure of the SSR device. According to the failure detecting device of the present invention, the first determining means determines that the temperature adjustment control signal does not have a control amount equal to or greater than a first predetermined level, and the second determining means determines that the heater current has a 2 -13- 1287184 When the SSR short-circuit fault of the SSR device is determined at a predetermined level or higher, it can be used to determine the short-circuit fault of the SSR device. According to the fault detecting device of the present invention, the determination result of the failure determining means is reported to the output by the notification means, for example, the display output or the speaker output is set, so that the user of the failure detecting device can recognize the failure determination. The result of the judgment of the means. According to the fault detecting device of the present invention, the heater current detecting means obtains a predetermined number of A/D samples by the heater current between the SSR device and the heater, in accordance with the predetermined number of cycles. The obtained A/D sample 预定 of the predetermined number of points is used to calculate the basic 値, and the calculated current 値 is calculated by dividing the calculated 周期 of the calculated basic period into a square 値, and the second determination means determines the conversion into As the heater current 値, it is not analogous, but the digital heater current 値, without being affected by the clutter, can be used to ensure the reaction speed of the current change of the heater current ,, the result can be Improve the accuracy of fault determination of SSR devices. According to the fault detecting device of the present invention, the heater current detecting means performs full-wave rectification of the heater current 间 between the SSR device and the heater to obtain a predetermined number of A/D samples in a predetermined cycle.累计, accumulating the predetermined number of A/D samples 値, and performing the squared average of the accumulated A/D samples 値 to calculate the current 値, and determining the converted current as the heater current by the second determining means値, so it is used to obtain a non-analogous, but digital heater current 値, will not be affected by clutter, can be used to ensure the reaction speed of the current change of the heater current ,, the result can improve the SSR device The accuracy of the fault determination. -14- 1287184 The fault detecting device according to the present invention has a wireless communication means for wirelessly connecting with a host computer and other fault detecting devices, such as wireless connection by infrared rays, and is set to pass the above-mentioned malfunction by means of the infinite communication means Since the determination result of the determination means is transmitted and received between the host device or another failure detecting device, the determination result of the failure detecting device, that is, the SSR device, can be recognized on the host device or other failure detecting device side while saving wiring. malfunction. As a result, the failure of the entire SSR device of the system can be identified. Further, according to the failure detecting device of the present invention constructed as described above, there is an accidental short-circuit critical memory means, and the insulation inside the heater is lowered when the disconnection life of the heater is approached, and the focus is on the disconnection life. The current flowing in the heater is increased, and the overcurrent 値 of the heater before the disconnection is pre-memorized as an accidental short-circuit threshold, and when the heater current is detected, it is determined whether the heater current exceeds In case of accidental short circuit in the billion, if it is determined that the heater current exceeds the accidental short circuit threshold, the accidental short circuit of the heater is judged, so it can be used to identify the accidental short circuit before the heater is disconnected, and the result is easy to grasp the heater. The cause of the failure at the time of disconnection ensures maintenance. Further, the precursor before the heater is disconnected, that is, the accidental short circuit can be grasped, and the heater can be exchanged before the heater is disconnected, so that the preventability can be ensured. According to the fault detecting device of the present invention, the first determining means for determining whether or not the temperature adjustment control signal has a control amount equal to or greater than a first predetermined level is provided, and determining that the temperature adjustment control signal has a first predetermined level or higher -15- 1287184 control amount, and determining that the heater current exceeds the accidental short-circuit critical threshold, even if it is determined that the heater is accidentally short-circuited, and the heater current is determined to exceed the accidental short-circuit threshold, the temperature adjustment control is determined. When the signal is not a control amount equal to or greater than the first predetermined level, it is used to prohibit the determination of the accidental short-circuit of the heater. Therefore, the temperature adjustment control signal is not in the first predetermined level or more. It is sure to prevent accidental short-circuit error detection before the heater is disconnected. According to the fault detecting device of the present invention, the aforementioned accidental short circuit critical memory is used to adjust the aforementioned accidental short circuit in memory, and is adjusted according to the set current 値 of the temperature adjustment control signal, and the adjusted accident is Since the short-circuit threshold 记忆 is memory-updated by the above-described accidental short-circuit threshold memory means, even if the set current 値 of the temperature adjustment control signal is changed, the accidental short-circuit threshold corresponding to the set current 値 can be automatically updated correspondingly. According to the fault detecting device of the present invention, the accidental short circuit of the heater is judged, and the result of the determination is outputted, for example, having a notification means for performing display output or speaker output, so that the user of the fault detecting device can Identify accidental shorts before the heater is disconnected. According to the fault detecting device of the present invention, the heater current detecting means is configured to obtain a predetermined number of A/D samples 加热器 in a predetermined period by the heater current 前述 between the SSR device and the heater. The obtained A/D sample of the predetermined number of points is calculated as a basic value, and the calculated current period 値 is calculated by dividing the square 値 of the calculated basic period into the average 値, and the conversion is determined by the accidental short-circuit critical 値 determination means. It is used as the above-mentioned heater electric-16-1287184, so it is used to obtain a non-analogous, but digital heater current 値, which is not affected by the clutter and can be used to ensure the current flowing to the heater current. The reaction speed of the change, the result can improve the accuracy of the accident short-circuit determination before the heater is disconnected. According to the fault detecting device of the present invention, the heater current detecting means performs full-wave rectification of the heater current 间 between the SSR device and the heater to obtain a predetermined number of A/D samples in a predetermined cycle. And accumulating the predetermined number of A/D samples 値, and calculating the current 値 calculated by averaging the accumulated A/D samples 値 φ by the accidental short-circuit threshold determination means The heater current is 値, so it is used to obtain a non-analogous, but digital heater current 値, which is not affected by the clutter, and can be used to ensure the reaction speed of the current change of the heater current ,, the result can be Improve the accuracy of the accidental short circuit before the heater is disconnected. According to the fault detecting device of the present invention, there is a wireless communication means for wirelessly connecting with a host computer and other fault detecting devices, such as wireless connection by infrared rays, and setting the accidental short circuit determining means by the wireless communication means. As a result of the determination, transmission and reception are performed between the host device or the other failure detecting device. Therefore, in the upper device or other failure detecting device, the wiring can be saved, and the judgment result of the failure detecting device can be identified, that is, the heater is disconnected. The accidental short circuit before. The result can be used to ensure the maintainability and preventive maintenance of the heaters of the entire system. [Embodiment] [Best Mode for Carrying Out the Invention] Hereinafter, a temperature adjustment system of the embodiment -17-1287184 shown in the failure detecting device according to the present invention will be described with reference to the drawings. (Embodiment 1) FIG. 1 is a block diagram showing the inside of a temperature adjustment system shown in a first embodiment. The temperature adjustment system 1A shown in Fig. 1 has a heater 1 that is controlled by, for example, a cartridge disposed in the injection molding machine, and a three-phase AC power supply unit that supplies electric power to the heater 1 (hereinafter referred to as " The power supply unit "1A" is disposed between the heater 1 and the power supply unit 1A, and adjusts the φ from the power supply unit 1A to adjust the amount of electric power supplied to the heater 1 based on the temperature adjustment control signal; The detector monitors the temperature of the heater 1, and sets the temperature of the heater 1 to the target temperature according to the monitoring result, and outputs a temperature adjustment control signal for the temperature adjustment device 6; for detecting between the SSR device 3 and the heater 1 The heater current detector 5 ( 5 A, 5B ) of the heater current; and the temperature adjustment control signal between the temperature adjustment device 6 and the SSR device 3 is turned ON or OFF and detected by the heater current detector 5 The failure detecting device for determining the failure of the SSR device 3 in the state where the heater current is turned ON or OFF. Fig. 2 is a schematic block diagram showing the inside of the failure detecting device 4 according to the first embodiment.
第2圖所示之故障檢測裝置4，是具有：用來監視傳送 SSR裝置3及溫度調整裝置6間之溫度調整控制信號的溫度 調整控制信號監視電路A ;用於檢測從加熱器電流檢測器5 來的加熱器電流之加熱器電流檢測電路B ;對故障檢測裝置 4來供給電力的電源電路C ;將該故障檢測裝置4本身呈ON -18- 1287184 或OFF狀態的開關電路1 7 ;用來記憶各種資訊之記憶電路 1 2 ;用來報知輸出各種資訊的報知控制電路D ;用來控制該 故障檢測裝置4全體之CPU 1 1 ;擔任與上位個人電腦（以下， .簡稱上位PC) 100的通訊介面的通訊介面E ;及用來檢測重 設或斷電之重設·斷電檢測電路1 8。 溫度調整控制信號監視電路A，爲了用來判別溫度調整 控制信號呈ON或OFF狀態，而監視所必要的SSR裝置3 及溫度調整裝置6間之電壓値，並將該電壓値經由光藕合器 φ 1 4來通知到CPU 1 1。還有，溫度調整控制信號監視電路A 及CPU1 1間是被絕緣，並藉由光藕合器14以紅外線通訊連 接。又，電壓値有〇v及5v二種。 加熱器電流檢測電路B是用加熱器電流檢測器5將所檢 測之加熱器電流進行數位變換並通知到CPU 1 1的電路，具 有：用加熱器電流檢測器5內的檢測部（CT 1 ) 5 A將所檢測 之加熱器電流進行數位變換的A/.D變換電路16A;配置於該 A/D變換電路16A之前段，用來保護該A/D變換電路16A， # 並用來防止加熱器電流的過輸入之過輸入保護電路15A;用 加熱器電流檢測器5內的檢測部（CT2 ) 5B將所檢測之加熱 器電流進行數位變換的A/D變換電路16B ;用來保護該A/D 變換電路16B之過輸入保護電路15B。 電源電路C是爲了供給電力到故障檢測裝置4本體之電 路，具有：從商用電源經由過輸入保護電路24將所取得的 電源電壓進行全波整流之全波整流電路26;將該全波整流的 電源電壓供給到一次線圏側並進行切換，在二次線圏側來產 -19- 1287184 生電源電壓之切換電源電路27 ;將產生於該二次線圏側的電 源電壓來變換成根據各電路之電源電壓的定電壓電路 28A、28B、28C;及從商用電源來監視電源電壓之電平的電 壓電平檢測電路25。 報知控制電路D，具有：從後述之CPU 1 1根據故障報知 信號來驅動控制LED23之顯示LED驅動電路22 ;及根據故 障報知信號來驅動控制警報輸出的光藕合器20及輸出繼電 器21之驅動電路19。 • 通訊介面E，是擔任上位PC 100及CPU1 1間之通訊介 面的部位，具有：用來驅動控制光藕合器30A之驅動器30; 及來保護驅動器30的過輸入保護電路29，並通過光藕合器 30A來執行上位PC100及CPU11間之通訊動作。 第3圖是顯示有關第1實施形態之故障檢測裝置4內的 CPU11內部之槪略構成方塊圖。 CPU 1 1，是具有：通過溫度調整控制信號監視電路A來 檢測SSR裝置3及溫度調整裝置6間之溫度調整控制信號的 • 電壓値之溫度調整控制信號檢測部3 1 ;通過加熱器電流檢測 電路B來計測加熱器電流値的加熱器電流計測部32 ;用溫 度調整控制信號檢測部31根據所檢測之電壓値來判定溫度 調整控制信號呈ON狀態或呈OFF狀態的溫度調整控制信號 判定部33 ;用加熱器電流計測部32根據所計測之加熱器電 流値，來判定加熱器電流呈ON狀態或OFF狀態的加熱器電 流判定部34 ;根據溫度調整控制信號判定部33之判定結果 及加熱器電流判定部34的判定結果來判定SSR裝置3之故 -20- 1287184 障內容的SSR故障判定部35 ;及根據該SSR故障判定部35 之判定結果來輸出故障報知信號的輸出處理部3 6。 溫度調整控制信號判定部3 3判定溫度調整控制信號之 • 控制量，譬如爲電壓値繼續1 〇〇m秒鐘呈5v狀態，則判斷該 溫度調整控制信號呈ON狀態，同時判定電壓値繼續100m 秒鐘呈非5v狀態，則判斷該溫度調整控制信號呈OFF狀態。 加熱器電流判定部3 4判定加熱器電流之計測最小電流 値在45 %以上，則判斷加熱器電流呈ON狀態，同時判定加 • 熱器電流之計測最小電流値非45 %以上，則判斷加熱器電流 呈OFF狀態。 SSR故障判定部35是用溫度調整控制信號判定部33判 定溫度調整控制信號呈ON狀態，且用加熱器電流判定部34 判定加熱器電流呈ON狀態時，判斷SSR裝置3呈正常狀態。 SSR故障判定部35是用溫度調整控制信號判定部33判 定溫度調整控制信號呈Ο N狀態，且用加熱器電流判定部3 4 判定加熱器電流呈OFF狀態時，判斷S S R裝置3呈開啓故 •障狀態。 又，SSR故障判定部35是用溫度調整控制信號判定部 3 3判定溫度調整控制信號呈OFF狀態，且用加熱器電流判 定部34所判定加熱器電流呈on狀態時，判斷SSR裝置3 呈短路故障狀態。 輸出處理部3 6是用S S R故障判定部3 5判定S S R裝置3 之開啓故障時’則將對應於該開啓故障的故障報知信號來輸 出到驅動電路1 9，同時用S S R故障判定部3 5判定S S R裝置 -21- 1287184 3之短路故障時，則將對應於該短路故障的故障報知信號來 輸出到驅動電路1 9。 還有，申請專利範圍所記載之電源部是相當於電源部 . 1 A，加熱器電流檢測手段是加熱器電流檢測電路B及加熱器 電流計測部32，第1判定手段是溫度調整控制信號判定部 33，第2判定手段是加熱器電流判定部34，故障判定手段是 SSR故障判定部35，第1預定電平以上之控制量是5v以上 的電壓値，第2預定電平是計測最小電流値之45 %，報知手 φ 段是輸出處理部3 6及報知控制電路D。 其次對於第1實施形態所示之溫度調整系統1 〇內的故 障檢測裝置4之動作來加以說明。 故障檢測裝置4內之溫度調整控制信號監視電路A，是 用來監視傳送SSR裝置3及溫度調整裝置6間的溫度調整控 制信號之電壓値，並將該電壓値經由光藕合器14來通知到 CPU11 。 CPU 1 1內之溫度調整控制信號檢測部3 1是經由光藕合 • 器1 4來檢測溫度調整控制信號的電壓値時，則將該電壓値 來傳送到溫度調整控制信號判定部3 3。 溫度調整控制信號判定部33，是來判定溫度調整控制信 號之電壓値是否繼續l〇〇m秒鐘呈5v以上狀態，判定該電壓 値繼續1 〇〇m秒鐘呈5v以上狀態時，則判斷該溫度調整控制 信號呈ON狀態，並將該判斷結果傳送到SSR故障判定部 35。又，判定溫度調整控制信號的電壓値繼續l〇〇m秒鐘呈 非5v以上狀態時，則判斷該溫度調整控制信號呈OFF狀態， -22- 1287184 並將該判斷結果傳送到SSR故障判定部35。 又，故障檢測裝置4內之加熱器電流檢測電路b，是用 加熱器電流檢測器5將所檢測的加熱器電流進行數位變換， 並將該數位變換後之加熱器電流傳送到CPU 1 1。 CPU 1 1之加熱器電流計測部32，是根據從加熱器電流 檢測電路B來的加熱器電流來計測加熱器電流値，並將該加 熱器電流値傳送到加熱器電流判定部34。 加熱器電流判定部34是用來判定加熱器電流値是否計 • 測最小電流量値在45%以上，判定該加熱器電流値在計測最 小電流値之45 %以上時，則判斷該加熱器電流呈ON狀態， 並將該判斷結果傳送到SSR故障判定部35。又，判定加熱 器電流値非在計測最小電流値之45 %以上時，則判斷該加熱 器電流呈OFF狀態，並將該判斷結果傳送到SSR故障判定 部35 〇 SSR故障判定部35是用溫度調整控制信號判定部33判 定溫度調整控制信號呈ON狀態，且用加熱器電流判定部34 • 判定加熱器電流呈OFF狀態時，則判斷SSR裝置3呈開啓 故障狀態，並將該判斷結果來通知到輸出處理部3 6。 輸出處理部36是將對應於SSR裝置3之開啓故障的故 障報知信號來通知到驅動電路1 9及顯示LED驅動電路22。 驅動電路1 9是檢測該故障報知信號時，用來警報輸出S S R 裝置3之開啓故障，形成用來驅動控制光藕合器20或輸出 繼電器2 1。又，顯示LED驅動電路22是檢測該故障報知信 號時，驅動控制用來報知SSR裝置3的開啓故障之LED23。 -23 - 1287184 又’ SSR故障判定部35是用溫度調整控制信號判定部 33判定溫度調整控制信號呈0FF狀態，且用加熱器電流判 定部34判定加熱器電流呈on狀態時，用來判斷SSR裝置3 • 呈短路故障狀態，並將該判斷結果來通知到輸出處理部36。 輸出處理部36是將對應於SSR裝置3之短路故障的故 障報知信號，通知到驅動電路19及顯示LED驅動電路22。 驅動電路19是檢測該故障報知信號時，用來警報輸出SSR 裝置3之短路故障，形成用來驅動控制光藕合器20或輸出 • 繼電器21。又，顯示LED驅動電路22是用來檢測該故障報 知信號，驅動控制用來報知SSR裝置3的短路故障之LED2 3。 又，輸出處理部36檢測SSR裝置3之開啓故障或短路 故障的判斷結果時，則通過通訊介面E來通知該判斷結果到 上位PC100。 若依據第1實施形態，則具有：用來判定溫度調整控制 信號呈ON狀態或呈OFF狀態之溫度調整控制信號判定部 33，及用來判定加熱器電流呈ON狀態或呈OFF狀態之加熱 • 器電流判定部34，並用溫度調整控制信號判定部33判定溫 度調整控制信號呈ON狀態，且用加熱器電流判定部34判 定加熱器電流呈OFF狀態時，則判斷SSR裝置3之開啓故 障，所以可識別SSR裝置3的開啓故障。 若依據第1實施形態，則用溫度調整控制信號判定部33 判定溫度調整控制信號呈OFF狀態，且用加熱器電流判定部 34判定加熱器電流呈ON狀態時，則判斷SSR裝置3之短路 故障，所以可識別SSR裝置3的短路故障。 -24- 1287184 % 又，若依據第1實施形態，則將根據SSR裝置3之故障 判斷結果的故障報知信號輸出到驅動電路1 9，以該驅動電路 19驅動控制光藕合器20或輸出繼電器21來報知輸出該故障 .判斷結果，所以故障檢測裝置4之使用者，可識別SSR裝置 3的故障內容。 還有’上述第1實施形態中，設定成用溫度調整控制信 號監視電路A來監視溫度調整控制信號之電壓値（控制 量），並用溫度調整控制信號判定部3 3判定該電壓値繼續 # loom秒鐘呈5v以上狀態時，則判斷溫度調整控制信號呈 ON狀態，而判定該電壓値繼續100m秒鐘呈非5v以上狀態 時，則判斷溫度調整控制信號呈OFF狀態，但譬如將溫度調 整控制信號在4mA〜20mA之範圍內設定成進行直線變化的 電流値，並將該溫度調整控制信號之電流値作爲控制量來加 以監視，用溫度調整控制信號判定部33判定該電流値在4mA 以上時，則.判斷溫度調整控制信號呈ON狀態，而判定該電 流値非在4mA以上時，則判斷溫度調整控制信號呈OFF狀 # 態，勿庸多贅亦可取得同樣的效果。 又，同樣將溫度調整控制信號之電流値作爲控制量來加 以監視，並用溫度調整控制信號判定部3 3判定該電流値是 否在計測最小電流値的45 %以上’判定該電流値在計測最小 電流値之45 %以上時，則判斷溫度調整控制信號呈ON狀 態，而判定該電流値在計測最小電流値非45 %以上時，則判 斷溫度調整控制信號呈0FF狀態’亦可取得同樣的效果。 又，上述第1實施形態中，設定成在加熱器電流計測部 -25 - 1287184 32計測從加熱器電流檢測電路B來的加熱器電流値，但亦 可將該加熱器電流計測部32以第4圖或第5圖所示軟體構 成。 .第4圖是顯示加熱器電流計測部32內部之槪略構成方 • 塊圖。 第4圖所示加熱器電流計測部32，具有：將從加熱器電 流檢測電路B來的加熱器電流作爲1周期360°，而以每15° 來取得A/D取樣値，並將1周期24個分之A/D取樣値保持 φ 於RAM區域41的A/D取樣値取得部42 ;用A/D取樣値取 得部42在所取得之RAM區域41根據保持中的24個分之 A/D取樣値來算出基本値之基本値算出部43;及用該基本値 算出部43將所算出的1周期分之基本値進行平方平均値化 所算出的電流値，以加熱器電流判定部34判定作爲加熱器 電流値來換算之加熱器電流値換算部44。 基本値算出部43，是在RAM區域41將保持中之24個 分的A/D取樣値代入下述演算式來算出基本値。 • ym= ( xm- ( xm-12) + ( xm-4) — ( xm-16) ) /2/3 xm是取樣點m時之A/D取樣値 ym是取樣點m時之基本値 (xm-12)是比xm更前12取樣點時之A/D取樣値 (xm-4 )是比xm更前4取樣點時之A/D取樣値 (X m -1 6 )是比X m更前1 6取樣點時之A / D取樣値 加熱器電流値換算部44，是以基本値算出部43將所算 出之24個分（1周期分）的基本値進行平方平均値化來算出 -26- 1287184 電流値，並將該電流値換算成加熱器電流値。 還有，申請專利範圍所記載之A/D取樣値取得手段是相 當於A/D取樣値取得部42，基本値算出手段是基本値算出 .部43，加熱器電流値換算手段是加熱器電流値換算部44。 若依據第4圖所示軟體構成之加熱器電流計測部3 2，則 將從加熱器電流檢測電路B來的加熱器電流作爲1周期 360。，而以每15。來取得A/D取樣値，並將1周期24個分之 A/D取樣値保持於RAM區域41，並根據保持於該RAM區域 φ 41的24個分之A/D取樣値來算出基本値，且將所算出的1 周期分之基本値進行平方平均値化將所算出的電流値，以加 熱器電流判定部34判定換算成作爲加熱器電流値，所以用 來取得並非類比性的，而是數位性的加熱器電流値，不會受 到雜波之影響，可用來確保對應於加熱器電流値的電流變化 之反應速度，其結果可達成提高SSR裝置3之故障判定精確 度。. 第5圖是顯示加熱器電流計測部3 2內部之槪略構成方 φ塊圖。 第5圖所示加熱器電流計測部32，是具有：將從加熱器 電流檢測電路B來的加熱器電流作爲1周期360°，而以每3° 來取得A/D取樣値，並將1周期120個分之A/D取樣値保 持於RAM區域51的A/D取樣値取得部52 ;及用來累計保 持於RAM區域51中的120個分之A/D取樣値，並將該累計 的A/D取樣値進行平方平均値化所算出之電流値，以加熱器 電流判定部34來判定換算作爲加熱器電流値之加熱器電流 -27- 1287184 値換算部53。還有，申請專利範圍所記載之A/D取樣値取 得手段是相當於A/D取樣値取得部52，加熱器電流値換算 手段是加熱器電流値換算部53。 .若依據第5圖所示軟體構成之加熱器電流計測部32,則 _ 將從加熱器電流檢測電路B來的加熱器電流作爲1周期 360°，而以每3°來取得A/D取樣値，並將1周期120個分之 A/D取樣値保持於RAM區域5 1，並來累計保持於該RAM區 域51中的120個分之A/D取樣値，將該累計A/D取樣値進 φ 行平方平均値化所算出的電流値，以加熱器電流判定部34 判定換算成作爲加熱器電流値，所以用來取得並非類比性 的，而是數位性的加熱器電流値，不會受到雜波之影響，可 用來確保對應於加熱器電流値的電流變化之反應速度，其結 果，可達成提高SSR裝置3之故障判定精確度。 又，上述第1實施形態中，是對於用來檢測SSR裝置3 之故障的故障檢測裝置4作了說明，但亦可考慮可在事前進 行檢測加熱器斷線前之加熱器斷線壽命的功能，即加熱器偶 •然短路功能。 因此，對於具備這種加熱器偶然短路功能之故障檢測裝 置4，作爲第2實施形態來加以說明。 (實施形態2 ) 第6圖是顯示有關第2實施形態之故障檢測裝置4內的 CPU11內部槪略構成方塊圖。還有，對於與第1實施形態有 關之故障檢測裝置4同樣構成，則賦予同樣圖號，對於其重 複的構成及動作則省略其說明。 -28- 1287184 第6圖所示故障檢測裝置4內之CPU 1 1，是具有：通過 溫度調整控制信號監視電路A將SSR裝置3及溫度調整裝 置6間之溫度調整控制信號的電流値作爲控制量來監視，並 -用來檢測該電流値之溫度調整控制信號檢測部3 1 ;通過加熱 ^ 器電流檢測電路B來計測加熱器電流値的加熱器電流計測 部32 ;用溫度調整控制信號檢測部3 1根據所檢測之電流値 來判定溫度調整控制信號呈ON狀態或呈OFF狀態的溫度調 整控制信號判定部33;將加熱器1的斷線之前的過電流値作 # 爲偶然短路臨界値預先加以記憶之偶然短路臨界値記憶部 6 1 ;在該偶然短路臨界値記憶部61將記憶中的偶然短路臨 界値根據溫度調整控制信號之設定電流値來加以調整，並在 該調整後的偶然短路臨界値記憶部61進行記憶更新之臨界 値調整部62 ;用加熱器電流計測部32來判定所計測的加熱 器電流値是否超過記億於偶然短路臨界値記憶部61中之偶 然短路臨界値，所判定加熱器電流値超過偶然短路臨界値 時，則判斷加熱器1之偶然短路的加熱器偶然短路判定部 • 63 ;及根據該加熱器偶然短路判定部63之判斷結果來輸出 故障報知信號的輸出處理部36。 溫度調整控制信號檢測部3 1，譬如將溫度調整控制信號 在4mA〜20mA之範圍內設定成進行直線變化的電流値，並 將該溫度調整控制信號之電流値作爲控制量來加以監視。 溫度調整控制信號判定部3 3，是以溫度調整控制信號檢 測部3 1判定所檢測之溫度調整控制信號的電流値在4mA以 上時，則判斷溫度調整控制信號呈ON狀態，判定所檢測之 -29- 1287184 該電流値非在4mA以上時，則判斷溫度調整控制信號呈0FF 狀態。 記憶於偶然短路臨界値記憶部6 1中之偶然短路臨界 • 値’ 一^般而§成爲接近加熱器1的斷線爵命時，著眼於會使 加熱器1內部之絕緣性下降並使流動於加熱器1的電流値變 高的特性，用來設定在該壽命斷線之前的過電流値。還有， 記憶於偶然短路臨界値記憶部61中之偶然短路臨界値，是 從未圖示操作部或上位PC 100可作適當設定變更。 • 臨界値調整部62是根據對於溫度調整控制信號之設定 電流値也就是20mA的比率，用來調整偶然短路臨界値，並 將該調整後之偶然短路臨界値在偶然短路臨界値記憶部61 進行記憶更新。還有，臨界値調整部62是將對應於現在的 溫度調整系統10的設定之最適當偶然短路臨界値，在偶然 短路臨界値記部6 1進行記憶更新。 加熱器偶然短路判定部6 3是以溫度調整控制信號判定 部3 3判定溫度調整控制信號呈ON狀態，且判定加熱器電 • 流値超過偶然短路臨界値時，用來執行判斷加熱器之偶然短 路的判斷動作。還有，加熱器偶然短路判定部63係即使判 定加熱器電流超過偶然短路臨界値，但以溫度調整控制信號 判定部3 3判定溫度調整控制信號呈OFF狀態時，用來禁止 判斷前述加熱器1之偶然短路的判斷動作。 輸出處理部36是以加熱器偶然短路判定部63判定加熱 器1之偶然短路時，則將對應於該加熱器偶然短路的故障報 知信號來輸出到驅動電路1 9。 -30- 1287184 還有’申請專利範圍所記載之加熱器電流檢測手段是相 當於加熱器電流計測部32,偶然短路臨界値記憶手段是偶然 短路臨界値記憶部6 1，偶然短路臨界値判定手段及偶然短路 • 判定手段是加熱器偶然短路判定部63，第1判定手段是溫度 調整控制信號判定部3 3，偶然短路臨界値調整手段是臨界値 調整部62，報知手段是輸出處理部36及報知控制電路D。 其次對於第2實施形態所示溫度調整系統1 〇內之故障 檢測裝置4的動作，根據第2圖及第6圖來加以說明。 • 故障檢測裝置4內之溫度調整控制信號監視電路A，是 用來監視傳送SSR裝置3及溫度調整裝置6間的溫度調整控 制信號之電流値，並將該電流値經由光藕合器1 4來通知到 CPU11 。 CPU 1 1內之溫度調整控制信號檢測部3 1，是經由光藕 合器14用來檢測溫度調整控制信號的電流値，且將該電流 値來傳送到溫度調整控制信號判定部33。 溫度調整控制信號判定部33是用來判定溫度調整控制 • 信號之電流値是否在4mA以上，且判定該電流値在4Ma時， 則判斷該溫度調整控制信號呈ON狀態，並將該判斷結果來 傳送到加熱器偶然短路判定部63。又，溫度調整控制信號判 定部33判定溫度調整控制信號之電流値非在4mA以上時， 則判斷該溫度調整控制信號呈OFF狀態，並將該判斷結果來 傳送到加熱器偶然短路判定部63。 又，故障檢測裝置4內之加熱器電流檢測電路B，是以 加熱器電流檢測器5將所檢測的加熱器電流進行數位變換， -31- 1287184 並將該數位變換之加熱器電流傳送到CPU 1 1。 CPU 1 1之加熱器電流計測部3 2，是根據從加熱器電流 檢測電路B來的加熱器電流來計測加熱器電流値，並將該加 . 熱器電流値傳送到加熱器偶然短路判定部63。 加熱器偶然短路判定部63是以溫度調整控制信號判定 部3 3用來檢測溫度調整控制信號呈ON狀態之判定結果， 和判定以加熱器電流計測部32所計測的加熱器電流値在偶 然短路臨界値記憶部61記憶中的偶然短路臨界値以上時， φ 判斷加熱器1之偶然短路，並將該判斷結果通知到輸出處理 部36 〇 輸出處理部36是檢測加熱器1之偶然短路的判斷結果 時，將對應於該加熱器1之偶然短路的故障報知信號通知到 驅動電路19及顯示LED驅動電路22。驅動電路19是檢測 該故障報知信號時，用來警報輸出該加熱器偶然短路，成爲 驅動控制光藕合器20或輸出繼電器21。又，顯示LED驅動 電路22是檢測該故障報知信號時，成爲用來驅動控制用以 • 報知加熱器1之偶然短路的LED23。又輸出處理部36是用 來檢測加熱器偶然短路之判斷結果時，通過通訊介面E形成 來通知該判斷結果到上位PC 1 00。 又，加熱器偶然短路判定部63是以溫度調整控制信號 判定部3 3用來檢測溫度調整控制信號呈OFF狀態之判定結 果時，則形成用來禁止加熱器電流値及偶然短路臨界値的比 較判定動作。 若依據第2實施形態，則具有偶然短路臨界値記憶部 -32- 1287184 * 6 1，接近加熱器斷線壽命時會下降加熱器1內部之絕緣性’ 來著眼於在壽命之前會使流動於加熱器1的電流變高’將加 熱器1在斷線之前的過電流値作爲偶然短路臨界値預先記 .億，且判定溫度調整控制信號呈ON狀態時，則判定加熱器 電流是否超過記憶中的偶然短路臨界値，而判定加熱器電流 是超過偶然短路臨界値時，則判斷加熱器之偶然短路’所以 可識別加熱器斷線前的加熱器偶然短路，其結果成爲容易把 握加熱器斷線時之故障原因而可用來確保維修性。又’以把 φ 握加熱器斷線前的前兆即偶然短路，而可用來在加熱器斷線 前交換加熱器1，所以可確保其預防維修性。 又，若依據第2實施形態，則判定溫度調整控制信號呈 OFF狀態時，禁止加熱器電流及偶然短路臨界値之比較判定 動作，所以藉由溫度調整控制信號呈OFF狀態中的比較判定 動作可確實地來防止加熱器偶然短路之錯誤判定。 若依據第2實施形態，則將記憶於偶然短路臨界値記憶 部61中之偶然短路臨界値根據溫度調整控制信號的設定電 φ 流値來調整，將該調整後之偶然短路臨界値在偶然短路臨界 値記憶部61進行記憶更新，所以可用來設定對應於現在的 溫度調整系統的設定之最適當之偶然短路臨界値。 還有，上述第2實施形態中，加熱器電流計測部32是 計測從加熱器電流檢測電路B來的加熱器電流値，但亦可將 該加熱器電流計測部32以第4圖或第5圖所示之軟體來構 成。 又，上述第2實施形態中，是設有用來調整偶然短路臨 33 - 1287184 界値之臨界値調整部62，但不設該臨界値調整部62，而根 據記憶於偶然短路臨界値記憶部61中的偶然短路臨界値和 加熱器電流，可來判定加熱器1之偶然短路是勿庸多贅。 -又’上述第2實施形態中，設定成判定溫度調整控制信 . 號呈OFF狀態時，則禁止加熱器電流及偶然短路臨界値之比 較判定動作，但溫度調整控制信號呈OFF狀態，亦可執行加 熱器電流値及偶然短路臨界値之比較判定動作，而判定加熱 器電流値爲偶然短路臨界値時，亦可來判定加熱器1之偶然 鲁 短路是勿庸多贅。 又，有關上述第1實施形態及第2實施形態之故障檢測 裝置4中，是使用通訊介面E將故障檢測裝置4對SSR裝置 3的故障結果或加熱器1之偶然短路的判斷結果來通知到上 位PC 1 00，但如第7圖所示，設有與鄰接之其他故障檢測裝 置來執行紅外線通訊的紅外線通訊介面F，亦可使用該紅外 線通訊介面F以故障檢測裝置4相互間可通知該判斷結果之 系統構成。 # 這種情況下，譬如從上位PC 1 00將要求指令，經由各故 障檢測裝置4來配送信號到各故障檢測裝置4，同時根據該 要求指令從各故障檢測裝置4將判斷結果來通知到上位 PC 1 00，所以在上位PC 100側可將SSR裝置3之故障結果或 加熱器1之偶然短路結果總括來進行管理。 又，用來通訊連接這種複數之故障檢測裝置4及上位 PC 1 00間的溫度調整系統中，是在每一故障檢測裝置4賦予 識別號碼，並將賦予該識別號碼之要求指令從上位PC 1 00 -34- 1287184 ' 進行配送信號，使各故障檢測裝置4來接收要求指令，且抽 出賦予在該要求指令的識別號碼，判定該抽出之識別號碼是 自已識別號碼時，亦可藉由自已之故障檢測裝置4將S SR裝 .置3的故障或加熱器偶然短路之判斷結果來通知到上位 PC 1 00，而上位PC 100側，當然可將系統內之全故障檢測裝 置4的判斷結果總括來管理，亦可成爲僅將所要之故障檢測 裝置4的判斷結果來個別地抽出。 又，上述實施形態中，是例舉加熱器1爲三相用加熱器 φ 來加以說明，但如第8圖所示單相用加熱器1B，亦可根據 SSR裝置3及溫度調整裝置6間之溫度調整控制信號呈ON 或OFF狀態，及SSR裝置3及單相加熱器1B間的加熱器電 流呈ON或OFF狀態來判定SSR裝置3之開啓故障或短路故 障，同時根據SSR裝置3及單相加熱器1B間的加熱器電流 及偶然短路臨界値來判定加熱器偶然短路是勿庸多贅。 〔產業上之利可能性〕 本發明之故障檢測裝置，是用來檢測SSR裝置的故障 Φ (開啓/短路），藉由輸出與加熱器斷線區別之警報，具有 容易把握組裝有故障檢測裝置的系統之故障原因的效果，在 使用於工業爐加熱器、半導體洗淨裝置、塑膠成形機等之加 熱器的溫度調整系統極爲有用。 【圖式簡單說明】 第1圖是顯示有關本發明之故障檢測裝置的第1實施形 態所示溫度調整系統全體之槪略構成方塊圖。 第2圖是顯示有關第1實施形態之故障檢測裝置內部的 -35 - 1287184 * 槪略構成方塊圖。 第3圖是顯示有關第1實施形態之故障檢測裝置內的 CPU內部之槪略構成方塊圖。 — 第4圖是顯示有關第1實施形態之CPU內的加熱器電 流計測部內部之一例方塊圖。 第5圖是顯示有關第1實施形態之c P U內的加熱器電 流計測部內部之一例方塊圖。 第6圖是顯示有關第2實施形態之故障檢測裝置內的 φ CPU內部之槪略構成方塊圖。 第7圖是具體地顯示有關其他實施形態之溫度調整系統 的系統構成的說明圖。 第8圖是顯示其他實施形態之溫度調整系統全體的槪略 構成方塊圖。 【元件符號說明】 1.. .加熱器 1 A…電源部 • 2…溫度調整系統 3".SSR裝置 4.. .故障檢測裝置 32··.加熱器電流計測部（加熱器電流檢測手段） 33…溫度調整控制信號判定部（第1判定手段） 34···加熱器電流判定部（第2判定手段） 35 ...SSR故障判定部（故障判定手段） 36···輸出處理部（報知手段） -36- 1287184 42、52…A/D取樣値取得部（A/D取樣値取得手段） 43·.·基本値算出部（基本値算出手段） 44、53…加熱器電流値換算部（加熱器電流値換算手段） 6 1…偶然短路臨界値記憶部（偶然短路臨界値記憶手段） 62…臨界値調整部（偶然短路臨界値記憶手段） 63…加熱器偶然短路判定部（偶然短路臨界値判定手段及偶 然短路判定手段） B…加熱器電流檢測電路（加熱器電流檢測手段） φ D…報知控制電路（報知手段）The failure detecting device 4 shown in Fig. 2 has a temperature adjustment control signal monitoring circuit A for monitoring a temperature adjustment control signal between the transmission SSR device 3 and the temperature adjustment device 6; for detecting the slave heater current detector a heater current detecting circuit B for the heater current of 5; a power supply circuit C for supplying power to the fault detecting device 4; and a switching circuit 1 for turning the fault detecting device 4 itself to ON-18-1287184 or OFF; A memory circuit for memorizing various kinds of information; a notification control circuit D for reporting various kinds of information; a CPU 1 1 for controlling the entire failure detecting device 4; and a personal computer (hereinafter, referred to as a superordinate PC) 100 The communication interface E of the communication interface; and the reset/power-off detection circuit 18 for detecting reset or power-off. The temperature adjustment control signal monitoring circuit A monitors the voltage 値 between the SSR device 3 and the temperature adjustment device 6 necessary for determining whether the temperature adjustment control signal is turned ON or OFF, and passes the voltage 藕 through the optical coupler. φ 1 4 is notified to the CPU 1 1. Further, the temperature adjustment control signal monitoring circuit A and the CPU 1 1 are insulated and connected by infrared communication by the optical coupler 14. In addition, there are two types of voltages: 〇v and 5v. The heater current detecting circuit B is a circuit that digitally converts the detected heater current by the heater current detector 5 and notifies the CPU 11 that the detecting unit (CT 1 ) in the heater current detector 5 is used. 5 A A/.D conversion circuit 16A for digitally converting the detected heater current; disposed in front of the A/D conversion circuit 16A for protecting the A/D conversion circuit 16A, # and for preventing the heater The overcurrent input of the current passes through the input protection circuit 15A; and the A/D conversion circuit 16B that digitally converts the detected heater current by the detecting unit (CT2) 5B in the heater current detector 5 is used to protect the A/ The D conversion circuit 16B passes through the input protection circuit 15B. The power supply circuit C is a circuit for supplying electric power to the main body of the failure detecting device 4, and has a full-wave rectifying circuit 26 that performs full-wave rectification of the obtained power supply voltage from the commercial power source via the over-input protection circuit 24; The power supply voltage is supplied to the primary winding side and switched, and the switching power supply circuit 27 of the -19-28778 raw power supply voltage is generated on the secondary side of the secondary line; the power supply voltage generated on the side of the secondary line is converted into The constant voltage circuits 28A, 28B, and 28C of the power supply voltage of the circuit; and the voltage level detecting circuit 25 for monitoring the level of the power supply voltage from the commercial power source. The notification control circuit D includes a display LED drive circuit 22 that drives the control LED 23 based on a failure notification signal from a CPU 1 1 to be described later, and a drive of the optical coupler 20 and the output relay 21 that drive the control alarm output based on the failure notification signal. Circuit 19. The communication interface E is a portion that serves as a communication interface between the upper PC 100 and the CPU 1 1 and has a driver 30 for driving the control optical coupler 30A, and an over-input protection circuit 29 for protecting the driver 30, and passes the light. The combiner 30A performs a communication operation between the upper PC 100 and the CPU 11. Fig. 3 is a block diagram showing the outline of the inside of the CPU 11 in the failure detecting device 4 of the first embodiment. The CPU 1 1 is a temperature adjustment control signal detecting unit 3 1 that detects a temperature adjustment control signal between the SSR device 3 and the temperature adjustment device 6 by the temperature adjustment control signal monitoring circuit A; The heater B current measuring unit 32 that measures the heater current 电路, and the temperature adjustment control signal detecting unit 31 determines whether the temperature adjustment control signal is in an ON state or in an OFF state based on the detected voltage 値. The heater current measuring unit 32 determines the heater current determining unit 34 that the heater current is in the ON state or the OFF state based on the measured heater current 値, and determines the result and heating of the control signal determining unit 33 based on the temperature. The SSR failure determination unit 35 that determines the failure of the SSR device 3 -20-1287184 is the result of the determination by the current determination unit 34; and the output processing unit 36 that outputs the failure notification signal based on the determination result of the SSR failure determination unit 35. . The temperature adjustment control signal determination unit 33 determines the control amount of the temperature adjustment control signal, for example, if the voltage 値 continues for 5 状态 m seconds, the temperature adjustment control signal is turned ON, and the voltage 値 continues to be 100 m. When the second is in the non-5v state, it is judged that the temperature adjustment control signal is in the OFF state. When the heater current determination unit 34 determines that the minimum current 値 of the heater current is 45% or more, it is determined that the heater current is ON, and it is determined that the minimum current of the heater current is not more than 45%, and the heating is judged. The current is OFF. When the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the ON state, and the heater current determination unit 34 determines that the heater current is in the ON state, the SSR failure determination unit 35 determines that the SSR device 3 is in the normal state. When the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the ΟN state, and the heater current determination unit 34 determines that the heater current is in the OFF state, the SSR failure determination unit 35 determines that the SSR device 3 is turned on. Barrier status. Further, when the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the OFF state, and the heater current determination unit 34 determines that the heater current is in the ON state, the SSR failure determination unit 35 determines that the SSR device 3 is short-circuited. Fault status. When the SSR failure determination unit 35 determines that the SSR device 3 is turned on, the output processing unit 36 outputs a failure notification signal corresponding to the ON failure to the drive circuit 1 and determines by the SSR failure determination unit 35. When the short circuit fault of the SSR device-21- 1287184 3, the fault notification signal corresponding to the short circuit fault is output to the drive circuit 19. Further, the power supply unit described in the patent application scope corresponds to the power supply unit. 1 A, the heater current detecting means is the heater current detecting circuit B and the heater current measuring unit 32, and the first determining means is the temperature adjustment control signal determination. The second determination means is the heater current determination unit 34, and the failure determination means is the SSR failure determination unit 35. The control amount of the first predetermined level or higher is a voltage 値 of 5 V or more, and the second predetermined level is the measurement minimum current. 45%, the notification hand φ segment is the output processing unit 36 and the notification control circuit D. Next, the operation of the failure detecting device 4 in the temperature adjustment system 1 shown in the first embodiment will be described. The temperature adjustment control signal monitoring circuit A in the failure detecting device 4 is for monitoring the voltage 传送 of the temperature adjustment control signal transmitted between the SSR device 3 and the temperature adjustment device 6, and notifying the voltage 値 via the optical coupler 14 Go to CPU11. When the temperature adjustment control signal detecting unit 31 in the CPU 1 detects the voltage 値 of the temperature adjustment control signal via the optical pickup unit 14, the voltage 値 is transmitted to the temperature adjustment control signal determining unit 33. The temperature adjustment control signal determination unit 33 determines whether or not the voltage 値 of the temperature adjustment control signal continues for 5 volts or more for 1 〇〇 m seconds, and determines that the voltage 値 continues for 5 volts or more for 5 sec. The temperature adjustment control signal is in an ON state, and the determination result is transmitted to the SSR failure determination unit 35. When it is determined that the voltage 値 of the temperature adjustment control signal continues to be less than 5 volts for 1 〇〇 m seconds, it is determined that the temperature adjustment control signal is OFF, -22 - 1287184, and the determination result is transmitted to the SSR failure determination unit 35. Further, the heater current detecting circuit b in the failure detecting device 4 digitally converts the detected heater current by the heater current detector 5, and transmits the digitally converted heater current to the CPU 1 1. The heater current measuring unit 32 of the CPU 1 1 measures the heater current 根据 based on the heater current from the heater current detecting circuit B, and transmits the heater current 値 to the heater current determining unit 34. The heater current determining unit 34 determines whether the heater current • is measured or not, and the minimum current amount 値 is 45% or more. When the heater current 値 is determined to be 45% or more of the minimum current ,, the heater current is determined. The ON state is reached, and the result of the determination is transmitted to the SSR failure determination unit 35. When it is determined that the heater current 値 is not more than 45% of the minimum current 値, the heater current is determined to be in an OFF state, and the determination result is transmitted to the SSR failure determination unit 35. The SSR failure determination unit 35 is the temperature. The adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the ON state, and when the heater current determination unit 34 determines that the heater current is in the OFF state, determines that the SSR device 3 is in the open failure state, and notifies the determination result. Go to the output processing unit 36. The output processing unit 36 notifies the drive circuit 19 and the display LED drive circuit 22 of the failure notification signal corresponding to the turn-on failure of the SSR device 3. The drive circuit 19 is used to drive the control photocoupler 20 or the output relay 21 to detect an open fault of the output S S R device 3 when detecting the fault notification signal. Further, when the display LED drive circuit 22 detects the failure notification signal, the drive control is used to notify the LED 23 of the ON failure of the SSR device 3. -23 - 1287184 Further, when the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the 0FF state, and the heater current determination unit 34 determines that the heater current is in the state, the SSR failure determination unit 35 determines the SSR. The device 3 is in a short-circuit failure state, and notifies the output processing unit 36 of the result of the determination. The output processing unit 36 notifies the drive circuit 19 and the display LED drive circuit 22 of the failure notification signal corresponding to the short-circuit failure of the SSR device 3. The drive circuit 19 is a short-circuit fault for alerting the output SSR device 3 when detecting the fault notification signal, and is formed to drive the control optical coupler 20 or the output relay 21. Further, the display LED drive circuit 22 is for detecting the failure notification signal, and the drive control is used to notify the LED 2 3 of the short-circuit failure of the SSR device 3. Further, when the output processing unit 36 detects the result of the determination of the open failure or the short-circuit failure of the SSR device 3, the communication interface E notifies the determination result to the upper PC 100. According to the first embodiment, the temperature adjustment control signal determining unit 33 for determining whether the temperature adjustment control signal is in an ON state or in an OFF state, and the heating for determining whether the heater current is in an ON state or in an OFF state are included. When the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the ON state and the heater current determination unit 34 determines that the heater current is in the OFF state, the device current determination unit 34 determines that the SSR device 3 is turned on. The opening failure of the SSR device 3 can be identified. According to the first embodiment, when the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is in the OFF state, and the heater current determination unit 34 determines that the heater current is in the ON state, it determines that the SSR device 3 is short-circuited. Therefore, the short circuit failure of the SSR device 3 can be identified. Further, according to the first embodiment, the failure notification signal based on the failure determination result of the SSR device 3 is output to the drive circuit 197, and the drive circuit 19 drives the control optical coupler 20 or the output relay. When the result of the failure and the determination is output, the user of the failure detecting device 4 can recognize the failure content of the SSR device 3. Further, in the first embodiment, the temperature adjustment control signal monitoring circuit A is set to monitor the voltage 値 (control amount) of the temperature adjustment control signal, and the temperature adjustment control signal determination unit 3 determines the voltage 値 to continue #loom When the second is in the state of 5v or more, it is determined that the temperature adjustment control signal is in the ON state, and when it is determined that the voltage 値 continues to be in the state of not more than 5v for 100m, the temperature adjustment control signal is determined to be in the OFF state, but for example, the temperature adjustment control signal is In the range of 4 mA to 20 mA, a current 値 that changes linearly is set, and the current 値 of the temperature adjustment control signal is monitored as a control amount, and when the temperature adjustment control signal determination unit 33 determines that the current 値 is 4 mA or more, When it is judged that the temperature adjustment control signal is in the ON state, and it is determined that the current is not 4 mA or more, it is judged that the temperature adjustment control signal is in the OFF state, and the same effect can be obtained without undue. Further, the current 値 of the temperature adjustment control signal is also monitored as a control amount, and the temperature adjustment control signal determining unit 3 3 determines whether or not the current 在 is 45% or more of the minimum current '. The current is measured at the minimum current. When the temperature is more than 45%, the temperature adjustment control signal is judged to be in an ON state, and it is determined that the current 値 is not more than 45% when the measurement minimum current is not more than 45%, and the same effect can be obtained by determining that the temperature adjustment control signal is in the 0FF state. Further, in the first embodiment, the heater current 値 from the heater current detecting circuit B is measured in the heater current measuring unit -2578184 32, but the heater current measuring unit 32 may be used as the The software shown in Figure 4 or Figure 5. Fig. 4 is a block diagram showing the outline of the inside of the heater current measuring unit 32. The heater current measuring unit 32 shown in Fig. 4 has a heater current from the heater current detecting circuit B as a one-cycle 360°, and an A/D sampling 每 every 15°, and one cycle. The 24/7 A/D sample 値 holds φ in the RAM area 41 by the A/D sample 値 acquisition unit 42. The A/D sample 値 acquisition unit 42 is based on the 24 points in the RAM area 41 that is being held. The basic 値 calculation unit 43 that calculates the basic enthalpy after the D sampling, and the current 値 calculated by the basic 値 calculation unit 43 averaging the calculated 1 of the basic 1 of the first cycle, and the heater current determination unit The heater current conversion unit 44 that is converted as the heater current 判定 is determined. The basic parameter calculation unit 43 calculates the basic parameter by substituting the A/D sample 24 of the 24 points held in the RAM area 41 into the following calculation formula. • ym= ( xm- ( xm-12) + ( xm-4) — ( xm-16) ) /2/3 xm is the sampling point m when the A/D sampling 値 ym is the sampling point m (the basic 値 ( Xm-12) is the A/D sampling 値(xm-4) when the first 12 sampling points are more than xm. The A/D sampling 値(X m -1 6 ) is the X m when the first 4 sampling points are compared with xm. The A/D sampling 値 heater current 値 conversion unit 44 at the time of the first 16 sampling points is calculated by the basic enthalpy calculation unit 43 averaging the basic 値 of the calculated 24 points (1 cycle). -26- 1287184 Current 値, and convert this current 加热器 into heater current 値. Further, the A/D sampling 値 acquisition means described in the patent application scope corresponds to the A/D sampling 値 acquisition unit 42, and the basic 値 calculation means is the basic calculation unit. The heater current 値 conversion means is the heater current.値 conversion unit 44. According to the heater current measuring unit 3 2 of the soft body shown in Fig. 4, the heater current from the heater current detecting circuit B is taken as one cycle 360. And every 15th. The A/D sampling buffer is obtained, and the A/D sampling buffer of one cycle and 24 minutes is held in the RAM area 41, and the basic data is calculated based on the 24 A/D sampling frames held in the RAM area φ 41. And the calculated average current 値 is squared and averaged, and the calculated current 値 is determined by the heater current determination unit 34 to be converted into the heater current 値, so that it is not used for analogy. It is a digital heater current 値, which is not affected by the clutter, and can be used to ensure the reaction speed of the current change corresponding to the heater current ,. As a result, the accuracy of the fault determination of the SSR device 3 can be improved. Fig. 5 is a block diagram showing the outline of the inside of the heater current measuring unit 32. The heater current measuring unit 32 shown in Fig. 5 has a heater current from the heater current detecting circuit B as a one-cycle 360°, and an A/D sampling 每 every 3°, and 1 The A/D sample acquisition unit 52 holding the A/D sample of the period of 120 minutes and the A/D sample acquisition unit 52 held in the RAM area 51; and the A/D sample buffers for accumulating 120 points held in the RAM area 51, and accumulating the accumulation The A/D sample 値 is subjected to a squared average 値 calculated current 値, and the heater current determination unit 34 determines the heater current -27 - 1287184 値 conversion unit 53 that is converted into the heater current 。. Further, the A/D sampling acquisition means described in the patent application scope corresponds to the A/D sampling buffer acquisition unit 52, and the heater current conversion means is the heater current conversion unit 53. According to the heater current measuring unit 32 of the soft body shown in Fig. 5, the heater current from the heater current detecting circuit B is taken as 360° for one cycle, and A/D sampling is taken every 3°.値, and holding 120 cycles of A/D samples 1 in the RAM area 5 1, and accumulating 120 A/D samples 保持 held in the RAM area 51, the accumulated A/D sampling The current 値 calculated by the square averaging of the φ row is determined by the heater current determining unit 34 to be converted into the heater current 値. Therefore, the heater current 数 is not used for the analogy, but the digital heater current 値It is affected by the clutter and can be used to ensure the reaction speed of the current change corresponding to the heater current ,. As a result, the accuracy of the failure determination of the SSR device 3 can be improved. Further, in the first embodiment, the failure detecting device 4 for detecting the failure of the SSR device 3 has been described. However, it is also conceivable that the heater disconnection life before the heater disconnection can be detected beforehand. , that is, the heater even and short circuit function. Therefore, the failure detecting device 4 having such an accidental short-circuiting function of the heater will be described as a second embodiment. (Embodiment 2) FIG. 6 is a block diagram showing the internal configuration of the CPU 11 in the failure detecting device 4 according to the second embodiment. In the same manner as the failure detecting device 4 according to the first embodiment, the same reference numerals are given, and the description of the repeated configuration and operation will be omitted. -28- 1287184 The CPU 1 1 in the failure detecting device 4 shown in Fig. 6 has a temperature 控制 of the temperature adjustment control signal between the SSR device 3 and the temperature adjusting device 6 as a control by the temperature adjustment control signal monitoring circuit A. The amount is monitored, and the temperature adjustment control signal detecting unit 3 1 for detecting the current ;; the heater current measuring unit 32 for measuring the heater current 通过 by the heating current detecting circuit B; and detecting by the temperature adjustment control signal The unit 3 1 determines the temperature adjustment control signal determining unit 33 that the temperature adjustment control signal is in an ON state or in an OFF state based on the detected current 値; and the overcurrent before the disconnection of the heater 1 is made into an accidental short circuit threshold. The accidental short-circuit threshold 预先 memory unit 6 1 is stored in advance; in the accidental short-circuit threshold 値 memory unit 61, the accidental short-circuit threshold in memory is adjusted according to the set current 温度 of the temperature adjustment control signal, and the adjusted accident The short-circuit threshold 値 memory unit 61 performs a memory update threshold adjustment unit 62; the heater current measuring unit 32 determines whether the measured heater current 値 is If it is determined that the heater current 値 exceeds the accidental short-circuit threshold , in the case of the accidental short-circuit threshold 値 memory unit 61, the heater accidental short-circuit determination unit of the heater 1 is judged to be accidentally short-circuited. The output processing unit 36 that outputs the failure notification signal is output based on the determination result of the heater accidental short-circuit determination unit 63. The temperature adjustment control signal detecting unit 3 1 sets the temperature adjustment control signal to a current 値 that changes linearly in the range of 4 mA to 20 mA, and monitors the current 値 of the temperature adjustment control signal as a control amount. When the temperature adjustment control signal detecting unit 31 determines that the current 値 of the detected temperature adjustment control signal is 4 mA or more, the temperature adjustment control signal determining unit 31 determines that the temperature adjustment control signal is ON, and determines that the detected value is detected. 29- 1287184 When the current is not above 4 mA, it is judged that the temperature adjustment control signal is in the 0FF state. Memory of the accidental short-circuit criticality in the accidental short-circuit threshold 値 memory section • 一 一 一 § § 成为 § § § § § 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器 加热器The characteristic that the current 値 of the heater 1 becomes high is used to set the overcurrent 値 before the life is broken. Further, the accidental short-circuit threshold 记忆 stored in the accidental short-circuit threshold memory unit 61 can be appropriately changed from the operation unit or the upper PC 100. • The threshold 値 adjustment unit 62 is configured to adjust the accidental short-circuit threshold 根据 according to the ratio of the set current 値 to the temperature adjustment control signal, that is, 20 mA, and to clamp the adjusted accidental short-circuit threshold to the accidental short-circuit threshold 値 memory unit 61. Memory update. Further, the critical threshold adjustment unit 62 is the most appropriate accidental short-circuit threshold 对应 corresponding to the setting of the current temperature adjustment system 10, and is memory-updated by the accidental short-circuit critical buffer unit 61. The heater accidental short-circuit determination unit 633 is configured to perform the judgment of the heater when the temperature adjustment control signal determination unit 3 determines that the temperature adjustment control signal is in the ON state and determines that the heater power flow exceeds the accidental short-circuit threshold 値. The judgment action of the short circuit. Further, the heater accidental short-circuit determination unit 63 determines to prohibit the determination of the heater 1 when the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is OFF, even if it is determined that the heater current exceeds the accidental short-circuit threshold 値. The judgment action of the accidental short circuit. When the heater accidental short-circuit determination unit 63 determines that the heater 1 is accidentally short-circuited, the output processing unit 36 outputs a failure notification signal corresponding to the accidental short-circuit of the heater to the drive circuit 19. -30- 1287184 Also, the heater current detecting means described in the 'patent scope is equivalent to the heater current measuring unit 32. The accidental short-circuit critical memory means the accidental short-circuit critical state memory unit 6, and the accidental short-circuit critical threshold determining means And the accidental short circuit • The determination means is the heater accident short-circuit determination unit 63, the first determination means is the temperature adjustment control signal determination unit 33, the accidental short-circuit threshold adjustment means is the threshold adjustment unit 62, and the notification means is the output processing unit 36 and The control circuit D is notified. Next, the operation of the failure detecting device 4 in the temperature adjustment system 1 shown in the second embodiment will be described with reference to Figs. 2 and 6 . • The temperature adjustment control signal monitoring circuit A in the failure detecting device 4 is for monitoring the current 値 of the temperature adjustment control signal transmitted between the SSR device 3 and the temperature adjustment device 6, and the current is passed through the optical coupler 14 To notify the CPU11. The temperature adjustment control signal detecting unit 31 in the CPU 1 is a current 用来 for detecting the temperature adjustment control signal via the photocoupler 14, and transmits the current 到 to the temperature adjustment control signal determining unit 33. When the temperature adjustment control signal determination unit 33 determines whether or not the current 値 of the temperature adjustment control signal is 4 mA or more, and determines that the current 値 is 4 Ma, it is determined that the temperature adjustment control signal is ON, and the determination result is obtained. It is sent to the heater accidental short-circuit determination unit 63. When the temperature adjustment control signal determining unit 33 determines that the current of the temperature adjustment control signal is not 4 mA or more, it is determined that the temperature adjustment control signal is in an OFF state, and the determination result is transmitted to the heater accident short-circuit determination unit 63. Further, the heater current detecting circuit B in the failure detecting device 4 digitally converts the detected heater current by the heater current detector 5, -31-1287184, and transmits the digitally converted heater current to the CPU. 1 1. The heater current measuring unit 32 of the CPU 1 1 measures the heater current 根据 based on the heater current from the heater current detecting circuit B, and transmits the heater current 値 to the heater accident short-circuit determining unit. 63. The heater accident short-circuit determination unit 63 is a determination result for detecting that the temperature adjustment control signal is ON in the temperature adjustment control signal determination unit 33, and determines that the heater current measured by the heater current measurement unit 32 is accidentally short-circuited. When the threshold 値 memory unit 61 remembers the accidental short-circuit threshold 値 or more, φ determines the accidental short circuit of the heater 1, and notifies the output processing unit 36 of the determination result. The output processing unit 36 determines that the heater 1 is accidentally short-circuited. As a result, a failure notification signal corresponding to the accidental short circuit of the heater 1 is notified to the drive circuit 19 and the display LED drive circuit 22. The drive circuit 19 detects the accident notification signal and uses an alarm to output an accidental short circuit of the heater to drive the control optical coupler 20 or the output relay 21. Further, when the display LED drive circuit 22 detects the failure notification signal, it is used to drive and control the LED 23 for notifying the accidental short circuit of the heater 1. Further, when the output processing unit 36 detects the result of the accidental short circuit of the heater, the output of the communication interface E is notified to the upper PC 100. Further, when the temperature adjustment control signal determining unit 33 detects the result that the temperature adjustment control signal is in the OFF state, the heater accidental short circuit determining unit 63 forms a comparison for prohibiting the heater current 値 and the accidental short circuit threshold 値. Determine the action. According to the second embodiment, there is an accidental short-circuit threshold 値 memory unit -32 - 1287184 * 6 1, which will lower the insulation inside the heater 1 when approaching the heater disconnection life", focusing on the flow before the life The current of the heater 1 becomes high. 'When the overcurrent 値 before the disconnection of the heater 1 is taken as an accidental short-circuit threshold 値, and the temperature adjustment control signal is judged to be ON, it is determined whether the heater current exceeds the memory. The accidental short circuit is critical, and when it is determined that the heater current exceeds the accidental short circuit threshold, the accidental short circuit of the heater is judged. Therefore, the heater before the heater disconnection can be identified as an accidental short circuit, and the result becomes easy to grasp the heater disconnection. It can be used to ensure maintainability. Further, the precursor before the φ holding heater is disconnected is accidentally short-circuited, and can be used to exchange the heater 1 before the heater is disconnected, so that the preventability can be ensured. Further, according to the second embodiment, when it is determined that the temperature adjustment control signal is in the OFF state, the comparison determination operation of the heater current and the accidental short-circuit threshold is prohibited. Therefore, the comparison control operation in the OFF state by the temperature adjustment control signal can be performed. It is true to prevent erroneous determination of the accidental short circuit of the heater. According to the second embodiment, the accidental short-circuit threshold 记忆 stored in the accidental short-circuit threshold memory unit 61 is adjusted according to the set electric φ flow of the temperature adjustment control signal, and the adjusted accidental short-circuit is critically placed in an accidental short circuit. The threshold memory unit 61 performs memory update, so that it can be used to set the most appropriate accidental short-circuit threshold corresponding to the current temperature adjustment system setting. Further, in the second embodiment, the heater current measuring unit 32 measures the heater current 从 from the heater current detecting circuit B, but the heater current measuring unit 32 may be the fourth or fifth The software shown in the figure is constructed. Further, in the second embodiment, the threshold adjustment portion 62 for adjusting the accidental short circuit 33 - 1287184 is provided, but the threshold adjustment portion 62 is not provided, and the memory portion 61 is stored in accordance with the accidental short circuit. The accidental short circuit threshold and the heater current can be used to determine the accidental short circuit of the heater 1 is not excessive. - In the second embodiment, when it is determined that the temperature adjustment control signal is OFF, the comparison between the heater current and the accidental short-circuit threshold is prohibited, but the temperature adjustment control signal is OFF. When the heater current 値 and the accidental short-circuit threshold 比较 are compared, and the heater current 値 is determined to be an accidental short-circuit critical ,, it is also possible to determine that the accidental short circuit of the heater 1 is unnecessary. Further, in the failure detecting device 4 according to the first embodiment and the second embodiment, the failure detecting device 4 notifies the result of the failure of the SSR device 3 or the accidental short circuit of the heater 1 by using the communication interface E. The upper PC 1 00, but as shown in FIG. 7, an infrared communication interface F for performing infrared communication with another adjacent fault detecting device is provided, and the infrared communication interface F can also be used to notify the fault detecting device 4 of each other. The system structure of the judgment result. # In this case, for example, the command is requested from the upper PC 100, and the signals are distributed to the respective failure detecting devices 4 via the respective failure detecting devices 4, and the determination results are notified from the respective failure detecting devices 4 to the upper level according to the request command. Since PC 1 00, the failure result of the SSR device 3 or the accidental short-circuit result of the heater 1 can be collectively managed on the upper PC 100 side. Further, in the temperature adjustment system for connecting and connecting the plurality of fault detecting devices 4 and the upper PC 100, the identification number is given to each of the failure detecting devices 4, and the request for the identification number is given from the upper PC. 1 00 -34- 1287184 ' The delivery signal is sent so that each failure detecting device 4 receives the request command, and extracts the identification number given to the request command, and determines that the extracted identification number is the self-identified number, The failure detecting device 4 notifies the upper PC 1 00 of the failure of the S SR device or the accidental short circuit of the heater, and the upper PC 100 side can of course determine the result of the full failure detecting device 4 in the system. In general, management may be performed, and only the determination result of the desired failure detecting device 4 may be extracted individually. Further, in the above embodiment, the heater 1 is described as a three-phase heater φ. However, the single-phase heater 1B shown in Fig. 8 may be based on the SSR device 3 and the temperature adjustment device 6. The temperature adjustment control signal is turned ON or OFF, and the heater current between the SSR device 3 and the single-phase heater 1B is turned ON or OFF to determine whether the SSR device 3 is turned on or short-circuited, and according to the SSR device 3 and the single It is not unreasonable to determine the accidental short circuit of the heater by the heater current between the phase heaters 1B and the accidental short circuit threshold. [Industrial Benefits] The failure detecting device of the present invention is for detecting a failure Φ (open/short) of the SSR device, and is capable of grasping the assembly of the failure detecting device by outputting an alarm that is different from the heater disconnection. The effect of the cause of the failure of the system is extremely useful in a temperature adjustment system for a heater such as an industrial furnace heater, a semiconductor cleaning device, or a plastic molding machine. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the overall configuration of a temperature adjustment system according to a first embodiment of the fault detecting device of the present invention. Fig. 2 is a block diagram showing the outline of -35 - 1287184 * in the inside of the failure detecting device according to the first embodiment. Fig. 3 is a block diagram showing the outline of the inside of the CPU in the failure detecting device according to the first embodiment. - Fig. 4 is a block diagram showing an example of the inside of the heater current measuring unit in the CPU of the first embodiment. Fig. 5 is a block diagram showing an example of the inside of a heater current measuring unit in c P U according to the first embodiment. Fig. 6 is a block diagram showing the outline of the inside of the φ CPU in the failure detecting device according to the second embodiment. Fig. 7 is an explanatory view specifically showing a system configuration of a temperature adjustment system according to another embodiment. Fig. 8 is a block diagram showing the overall configuration of a temperature adjustment system according to another embodiment. [Description of component symbols] 1.. Heater 1 A... Power supply unit • 2... Temperature adjustment system 3". SSR device 4.. Fault detection device 32··. Heater current measurement unit (heater current detection means) 33...temperature adjustment control signal determination unit (first determination means) 34···heater current determination unit (second determination means) 35 ...SSR failure determination unit (fault determination means) 36···output processing unit ( Reporting means) -36- 1287184 42, 52...A/D sampling/acquisition unit (A/D sampling/obtaining means) 43···Basic calculation unit (basic calculation method) 44, 53...heater current値 conversion Part (heater current 値 conversion means) 6 1... accidental short-circuit critical 値 memory part (accidental short-circuit critical 値 memory means) 62... critical 値 adjustment part (accidental short-circuit critical 値 memory means) 63... heater accident short-circuit determination section (accidental Short-circuit critical 値 determination means and accidental short-circuit determination means) B... heater current detection circuit (heater current detection means) φ D... notification control circuit (notification means)
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