TW200540590A - Failure detection device - Google Patents

Abstract

This invention relates to a kind of failure detection device 4 which is disposed between heater 1 and power supply portion 1A. The failure detection device connected to temperature adjustment system comprises SSR device 3 adjusting the electricity supplied to heater from power supply portion according to temperature adjustment control signal; temperature adjustment device 6 monitoring the temperature of heater according to the monitored result and setting the temperature of heater to target temperature and outputting the temperature adjustment control signal to detect the failure of SSR device; temperature adjustment control signal decision portion 33 determining whether temperature adjustment control signal is in ON state; heater current decision portion 34 determining whether the heater current between SSR device and heater current is in ON state; SSR failure decision portion 35 determining SSR device failure according to the determined outcome of temperature adjustment control signal portion and determined outcome of heater current decision portion.

Description

200540590 • IX. Description of the invention: [Technical area to which the invention belongs] The present invention relates to a fault detection device connected to a temperature adjustment system. For example, it has control objects such as industrial furnace heaters, semiconductor cleaning devices, and plastic molding machines. A solid state relay device (solid) which is arranged between these heaters and the power supply unit and adjusts the amount of electricity supplied to the heater from the power supply unit according to a temperature control signal; state relay) (hereinafter referred to as SSR device); and ® a temperature adjustment device that monitors the temperature of the heater and sets the temperature of the heater to a target temperature based on the monitoring result, and outputs the temperature adjustment control signal ; And the fault detection device is used to detect a fault of the ss R device or the heater. [Prior art] In the prior art, for example, in a plastic molding machine, it is known that there is a temperature adjustment system 'having a heater which is arranged in the injection machine barrel as a control target; a power supply unit for supplying power to the heater; A solid-state relay device (hereinafter referred to as an SSR device) for adjusting the amount of power supplied from the power supply section to the heater according to a temperature adjustment control signal between the heater and the power supply section®; and monitoring the temperature of the heater according to The monitoring result is used to convert the heating temperature 5 to a target temperature, and output the temperature adjustment device described in the temperature adjustment control. If such a temperature adjustment system is used to quickly detect a failure such as a heater disconnection, a failure detection device described below is known. The fault detection device memorizes the control amount of the temperature adjustment control signal when the temperature of the heater reaches the target temperature in 200540590 when it is normal. The temperature adjustment device is used to measure the temperature until the temperature of the heater reaches the target temperature. Adjust the control amount of the control signal, and compare the measured control amount with the normal control amount in the memory. When the comparison result exceeds a predetermined threshold and the measured control amount becomes large, it is used to judge the heater disconnection (such as Reference is made to Japanese Patent Document 1). According to the failure detection device of Patent Document 1, even if a heater current measuring device for measuring the heater current is not used, it can be used only to monitor the SSR device. Depending on the control amount of the temperature adjustment control signal, it can also be used to detect the heater. As another fault detection device, there is known a converter provided with the following: a converter for detecting a heater current; a DC voltage output circuit for outputting a DC voltage based on the heater current of the converter; The DC voltage is digitally converted and sampled at a predetermined period to calculate a moving average 値 of a plurality of input signals taken in; and a reference 値 of the heater current is determined based on the calculated moving average 値 and compared This heater current reference (and the current of Φ times), this time the current (lower than the reference) is used to determine the heater disconnection of the heater disconnection determination means (for example, refer to Japanese Patent Document 2) ° According to the failure detection device of Patent Document 2, sampling is performed at a predetermined period to calculate a moving average of a plurality of input signals that are taken in.値, determine the heater current reference 根据 based on the calculated moving average 値, and compare the heater current reference 値 with the current 値, which is used to determine the heater if the current 値 is smaller than the reference 値The disconnection of the heater can change the characteristics of the heater year-on-year 200540590. Even if the characteristics are changed, the reference value can be set again to detect the disconnection of the heater reliably. [Patent Document 1] Japanese Patent Laid-Open No. 2002-343537 (refer to [0079] and FIG. 14) [Patent Document 2] Japanese Real Fair No. 7-41117 (refer to [Scope of New Patent Application] and FIG. 2) [ SUMMARY OF THE INVENTION [Disclosure of Invention] • [Problems to be Solved by the Invention] However, according to the failure detection device of Patent Document 1, the temperature adjustment device is used to measure the temperature adjustment control signal until the temperature of the heater reaches the target temperature. The control amount is compared with the measured control amount and the normal control amount in memory. When the comparison result exceeds a predetermined threshold and the control amount in the measurement becomes large, it is used to judge the heater disconnection, but it cannot be used to Judging the failure of the SSR device in the temperature adjustment system, such as an open / start failure or a short circuit failure. • In accordance with the failure detection device of Patent Document 2, the sampling is performed at a predetermined period to calculate a moving average 値 of a plurality of input signals taken in, and a heater current reference is determined based on the calculated moving average 値.値, and compare the reference of the heater current 这次 and the current 値 'this time 値 is smaller than the reference 用来 is used to determine the heater disconnection' even if the characteristics change due to changes in the heater over time However, it is also possible to set the reference mark 値 to reliably detect the heater disconnection, but it is not possible to identify the heater disconnection life before the heater disconnection. 200540590 In view of the above problems, the present invention aims to provide a fault detection device that can be used to detect a fault of an SSR device. In addition, as an object of the present invention, it is to provide a fault detection device that can recognize the heater disconnection life before the heater disconnection, that is, a rare short. 〇 [Means for Solving the Problem] To achieve the above object, The fault detection device of the present invention is connected to a temperature adjustment system and includes: a heater to be controlled; a power supply unit for supplying electric power to the aforementioned heater; and disposed between these heaters and the power supply unit, and adjusting a control signal according to the temperature An SSR device that adjusts the amount of power supplied from the power supply unit to the heater, and monitors the temperature of the heater, and based on the monitoring result, is used to set the temperature of the heater to a target temperature and output the temperature adjustment control signal The temperature detection device; and the fault detection device is used to detect the failure of the aforementioned SSR device, and has ... used to detect the heater current between the SSR device and the heater. Heater current detection means; used to determine The first determination means for whether the aforementioned temperature adjustment control signal has a first predetermined level with a control amount higher than ® It is used to determine whether the heater current detected by the heater current detection means has a second determination means having a second predetermined level or higher; and based on the determination result of the first determination means and the determination result of the second determination means, A failure determination means for determining the failure of the aforementioned SSR device. In the fault detection device of the present invention, the fault determination means determines that the temperature adjustment control signal has a control amount equal to or greater than a first predetermined level by the first determination means, and determines that the heater current is non-existent by the second determination means. 200540590 When it is above the second predetermined level, it is determined that the SSR turn-on failure of the aforementioned SSR device. The fault detection device of the present invention is the aforementioned fault determination means, which uses the first determination means to determine that the temperature adjustment control signal does not have a control amount greater than a first predetermined level, and uses the second determination means to determine that the heater current has Above the second predetermined level, the SSR short-circuit failure of the aforementioned SSR device can be determined. The fault detection device of the present invention has a reporting means for reporting and outputting a judgment result of the aforementioned fault judgment means. # The fault detection device of the present invention is the aforementioned heater current detection means having: A / D sampling the heater current between the SSR device and the heater 値 to obtain a predetermined number of A / D in a predetermined period 値Sampling means for obtaining; A / D sampling means for calculating the basic unit based on the predetermined number of A / D sampling units obtained; and a plan to be calculated using the basic unit calculating means Basically, the cycle is divided into square averages, and the calculated current 判定 is determined and converted into a heater current 値 conversion means which is a heater current 以 by the aforementioned second determination means. • The fault detection device of the present invention is that the heater current detection means includes: performing full-wave rectification on the heater current between the SSR device and the heater, and obtaining a predetermined number of A within a predetermined period; A / D sampling acquisition means of / D sampling; and accumulating the predetermined number of a / D samplings; and calculating the current obtained by performing squared averaging on the accumulated A / D samplings; The second determination means determines a heater current 値 conversion means which is converted into a heater current 値. The fault detection device of the present invention is a wireless communication means having a wireless connection with a higher-level machine and other faults. -10- 200540590 Detection device. Through this wireless communication means, the determination result of the foregoing fault determination means is transmitted to the upper-level machine or the foregoing. Send and receive between other fault detection devices. In order to achieve the above object, the fault detection device of the present invention is connected to a temperature adjustment system, and includes: a heater to be controlled; a power supply unit for supplying power to the heater; and disposed between the heater and the power supply unit. An SSR device that adjusts the amount of power supplied to the heater by the power supply unit according to a temperature adjustment control signal; and monitors the temperature of the heater, and is used to set the temperature of the heater to a target temperature according to the monitoring result, and A temperature adjustment device for outputting the temperature adjustment control signal; and the failure detection device is for detecting a failure of the heater and has a heater current detection for detecting a heater current between the SSR device and the heater Means; using the overcurrent before the heater is disconnected, as the accidental short circuit threshold, and the accidental short circuit threshold that is memorized in advance; the memory method; when the heater current detection method is used to detect the heater current, it is used to determine the Is the heater current in the above-mentioned However, the critical short circuit # accidental shorts critical Zhi Zhi the judging means; and when using the accidental shorts critical Zhi judgment means judges that the heater current exceeds the critical Zhi accidental shorts, a short circuit is determined by chance of accidental shorting of the heater judging means. The fault detection device of the present invention has a first determination means for determining whether the temperature adjustment control signal has a control amount greater than a first predetermined level, and the accidental short-circuit determination means determines the temperature by the first determination means. When the adjustment control signal has a control amount greater than the first predetermined level and the above-mentioned accidental short-circuit critical value is determined by the above-mentioned accidental short-circuit criticality determination means, the occasional short-circuit criticality of the above-mentioned heater is executed, and the accidental disconnection of the heater is determined. At the same time, using the above-mentioned accidental short-circuit criticality determination means to determine that the device current exceeds the above-mentioned accidental short-circuit criticality, and when using the first determination to determine that the temperature adjustment control signal is not above the first predetermined level, it is prohibited to determine the accidental short-circuit of the heater. The judgment of the fault detection device of the present invention is to have the aforementioned accidental short circuit threshold 値 in memory by the aforementioned accidental short memory means, adjust it according to the set current 前 of the pre-control signal, and adjust this adjustment The aforementioned accidental short circuit critical memory means to enter a new accidental short circuit Zhi sector adjustment means. The fault detection device of the present invention is provided with a notification means for notifying the accidental short-circuit of the heater by using the occasional short section.

The fault detection device of the present invention is the aforementioned heater current detection: an A / D sampling section that obtains a predetermined number of A / D samples in the heater current cycle between the SSR device and the heater; The aforementioned A / D sampling / acquisition means calculates the basic (basic) calculation means based on the obtained predetermined A / D sampling; and the current calculated by flattening the basics of the predetermined cycle points calculated by the (calculation) means. Based on the above-mentioned accidental short-circuit criticality, the judgment hand is converted into the heater current, which is the heater current, and the failure detection device of the present invention is the heater current detection, which includes: detecting the heater between the SSR device and the heater. Current wave rectification, to obtain a predetermined number of minutes of A / D short circuit in a predetermined period. The control amount of the heating determination means is critical. The memory is determined by accidental memory adjustment after the temperature adjustment. The number of points obtained by a predetermined number of hands is used to determine the means by using the average square of the basic square. The measuring means is -12-200540590 A / D sampling acquisition means for performing full sampling; and accumulating the predetermined number of A / D sampling points, and performing the squared average of the accumulated A / D sampling points. The calculated current 値 is determined to be converted into a heater current 値 conversion means which is the heater current 以 by the accidental short circuit critical 値 determination means. The fault detection device of the present invention is a wireless communication means having a wireless connection with a higher-level machine and other fault detection devices. Through the wireless communication means, the determination result of the accidental short-circuit determination means is detected on the higher-level machine or the other faults. Send and receive between devices. [Effects of the invention] According to the fault detection device of the present invention configured as described above, the method includes: a first determination means for determining whether or not the temperature adjustment control signal has a control amount of a first predetermined level or more; and Whether the heater current has a second determination means having a second predetermined level or more; and is set to determine the failure of the SSR device based on the determination result of the first determination means and the determination result of the second determination means. It can be used to determine the failure of the SSR device, such as an open failure or a short circuit failure. • According to the fault detection device of the present invention, it is set to use the first determination means to determine that the temperature adjustment control signal has a control amount of a first predetermined level or more, and use the second determination means to determine that the heater current is non-existent. Above the second predetermined level, the SSR turn-on failure of the aforementioned SSR device is determined, so it can be used to determine the turn-on failure of the SSR device. According to the fault detection device of the present invention, it is set to use the first determination means to determine that the temperature adjustment control signal does not have a control amount greater than a first predetermined level, and use the second determination means to determine that the heater current has a 2 -13- 200540590 ^ When the level is above a predetermined level, the SSR short circuit fault of the aforementioned SSR device is judged, so it can be used to judge the short circuit fault of the s SR device. According to the fault detection device according to the present invention, the judgment result of the fault determination means is reported by a notification means, for example, it is set to perform a display output or a speaker output, so the user of the fault detection device can recognize the judgment result of the fault determination means. If the fault detection device according to the present invention is used, the heater current detection means is to sample the heater current between the aforementioned SSR device and the aforementioned heater 値 to obtain a predetermined number of A / D samples within a predetermined # period. The obtained A / D sampling of a predetermined number of points is used to calculate the basic value, and the calculated basic current is calculated by averaging the calculated basic value of the predetermined period point with a squared average current. As the heater current 値, the heater current 比 which is not analogous but digital is obtained without being affected by clutter. It can be used to ensure the response speed to the current change of the heater current 値. The result can be Improve the accuracy of fault diagnosis of SSR devices. According to the fault detection device of the present invention, the aforementioned heater current detection method is to perform full-wave rectification of the heater current 値 between the aforementioned ss R device and the aforementioned heater to obtain a predetermined number of points A / D within a predetermined period. Sampling 値, accumulating the predetermined number of A / D samples 値, performing the squared average 値 of the accumulated a / d sampling 値, and calculating the current 値 using the aforementioned second determination means to convert it into a heater The current 値 is used to obtain a digital heater current 并非 which is not analogous, but is not affected by clutter. It can be used to ensure the response speed to the current change of the heater current 値. As a result, the SSR can be improved. Accuracy of device failure determination. -14- 200540590 If the fault detection device according to the present invention has a wireless communication means with a high-level machine and other fault detection devices, such as a wireless communication means using infrared rays, and it is set to use the infinite communication means to make the aforementioned faults The judgment result of the judgment means is sent and received between the aforementioned higher-level equipment or other fault detection devices. Therefore, on the higher-level equipment or other fault detection equipment side, the judgment result of the fault detection device can be recognized while achieving the wiring-saving, while the SSR device's malfunction. As a result, the failure of the SSR device in the entire system can be identified. In addition, according to the fault detection device of the present invention configured as described above, it has an accidental short-circuit critical 値 memory means. When the disconnection life of the heater is approached, the insulation inside the heater will decrease, and the focus will be on the life before the disconnection The current flowing through the heater will be high, and the overcurrent 値 before the disconnection of the heater will be stored as an accidental short-circuit critical point in advance, and when the heater current is detected, it is determined whether the heater current exceeds The accidental short circuit in the memory, if it is determined that the heater current exceeds the threshold of the accidental short circuit, the accidental short circuit of the heater is judged, so it can be used to identify the accidental short circuit before the heater is disconnected. As a result, it is easy to grasp the heater interruption. The cause of the failure during the line can ensure maintainability. In addition, the warning before the heater is disconnected, that is, the accidental short circuit can be grasped, and the heater can be replaced before the heater is disconnected, so that the preventive maintenance can be ensured. If the fault detection device according to the present invention has a first determination means for determining whether or not the temperature adjustment control signal has a control amount greater than a first predetermined level, it is determined that the temperature adjustment control signal has a first predetermined level or more 200540590 ', and when it is determined that the heater current exceeds the foregoing, even if it is determined that the heater is accidentally short-circuited and the current exceeds the accidental short-circuit critical threshold, but it is determined that the above-mentioned number is not the first predetermined level or more, It is used to judge the accidental short circuit of the heater, so the accidental short circuit error detection before the line can be reliably performed under the condition that the temperature is adjusted by a predetermined level or more. If the fault detection device according to the present invention is used, the memory means will adjust the setting current of the above-mentioned accidental short-circuit critical adjustment control signal 前 in the memory, and the short-circuit threshold will be updated at the accidental short-circuit threshold. Therefore, even if it is changed to the aforementioned temperature adjustment control 値, the accidental short-circuit corresponding to the set current 値 can be updated correspondingly. According to the fault detection device of the present invention, an accidental short circuit is judged, and the judgment result is reported, such as a notification means such as output or speaker output, so the fault detection can identify the accidental short circuit before the heater is disconnected. If the fault detection device according to the present invention is used, the aforementioned means is to obtain a predetermined number of A / D sampling points within a predetermined period between the SSR device and the heater, and calculate the predetermined number of A / D sampling points. Basically, the accidental short-circuit criticality calculated by performing square-averaged basic calculations on the cycle time is determined to be converted into an accidental short-circuit criticality. It is determined that the heater temperature adjustment control signal is prohibited from judging the aforementioned addition control signal. Prevent the heater from stating the accidental short circuit threshold [, according to the aforementioned temperature, perform the adjusted current threshold of the adjusted signal means to automatically cut off the user of the aforementioned heater with a display input device, the heater current The heater current is detected to obtain the calculated predetermined current based on these, and the foregoing is described as the heater current -16-200540590 'current flow' so it is used to obtain a heater that is not analogous but digital The current 値 'is not affected by clutter, and can be used to ensure the response speed to the current change of the heater current 値. As a result, the accuracy of judging an accidental short circuit before the heater is disconnected can be improved. According to the fault detection device of the present invention, the heater current detection means is to perform full-wave rectification of the heater current between the SSR device and the heater to obtain a predetermined number of A / D samples within a predetermined period. , Accumulate the predetermined number of A / D samples 値, and take the accumulated A / D samples 値 • square the average current 算出 to calculate the current 値, use the aforementioned accidental short circuit critical 値 determination means to determine and convert into the aforementioned The heater current 値 is not used to obtain analogous, but digital heater current 値. It is not affected by clutter. It can be used to ensure the response speed to the change in heater current 値. The result can be Improve the accuracy of judging the accidental short circuit before the heater is disconnected. If the fault detection device according to the present invention has a wireless communication means with a host device and other fault detection devices, such as a wireless connection with infrared rays, and is set to pass the wireless communication means to the aforementioned accidental # short-circuit determination means The judgment result is sent and received between the aforementioned host device or the other fault detection device. Therefore, in the host device or other fault detection device, the wiring can be saved, and the judgment result of the fault detection device can be identified, that is, the heater is disconnected. Before the accidental short circuit. The results can be used to ensure the maintainability and preventive maintenance of the heaters in the entire system. [Embodiment] [Best Mode for Carrying Out the Invention] The temperature adjustment system according to the embodiment 200540590 'shown in the fault detection device of the present invention will be described below with reference to the drawings. (Embodiment 1) Figure 1 is a block diagram showing a schematic configuration of the interior of a temperature adjustment system shown in a first embodiment. The temperature adjustment system 10 shown in FIG. 1 includes, for example, a heater 1 as a control target of a barrel disposed in an injection molding machine, and a three-phase AC power supply unit (hereinafter, referred to as "power supply") for supplying power to the heater 1. "" 1A; SSR device 3 placed between the heater 1 and the power supply unit 1A and adjusted according to the temperature adjustment control signal • The SSR device 3 that adjusts the amount of power supplied to the heater 1 from the power supply unit 1A; A temperature adjusting device 6 for monitoring the temperature of the heater 1 based on the monitoring result, setting the temperature of the heater 1 to a target temperature, and outputting a temperature adjustment control signal; used to detect the temperature between the SSR device 3 and the heater 1 Heater current detector 5 (5 A, 5B) of the heater current; and ON or OFF according to the temperature adjustment control signal between the temperature adjustment device 6 and the SSR device 3. The state and detected by the heater current detector 5 The heater current is turned on or off to determine the failure detection device of the SSR device 3. Fig. 2 is a block diagram showing a schematic configuration inside the failure detection device 4 according to the first embodiment.

The fault detection device 4 shown in FIG. 2 is provided with: a temperature adjustment control signal monitoring circuit A for monitoring and transmitting the temperature adjustment control signal between the SSR device 3 and the temperature adjustment device 6; and for detecting a slave current detector Heater current detection circuit B from the heater current of 5; power supply circuit C to supply power to the fault detection device 4; the fault detection device 4 itself is turned on -18- 200540590 or OFF state switching circuit 17; used A memory circuit 12 for storing various information; a notification control circuit d for reporting output of various information; a CPU 1 1 for controlling the whole of the fault detection device 4; and a host personal computer (hereinafter, referred to as a host PC) 1 0 Communication interface E of communication interface 0; and reset and power failure detection circuit 18 for detecting reset or power failure. The temperature g cycle control is a tiger monitoring circuit A. In order to determine whether the temperature adjustment control signal is ON or OFF, it monitors the voltage 値 between the SSR device 3 and the temperature adjustment device 6, and passes the voltage 値Light coupler # 14 comes to notify to CPU 1 1. The temperature adjustment control signal monitoring circuit A and the CPU 11 are insulated from each other, and are connected by infrared communication through a photo coupler 14. There are two types of voltage: 0V and 5V. The heater current detection circuit B is a circuit that digitally converts the detected heater current to the CPU 1 1 using the heater current detector 5 and includes a detection unit (CT 1) in the heater current detector 5. 5 A A / D conversion circuit 16A for digitally converting the detected heater current; placed in front of the A / D conversion circuit 16A to protect the A / D conversion circuit 16A, # and to prevent heater current Over-input over-input protection circuit 15A; A / D conversion circuit 16B for digitally converting the detected heater current by the detection section (CT2) 5B in the heater current detector 5; used to protect the A / D The over-input protection circuit 15B of the conversion circuit 16B. The power supply circuit C is a circuit for supplying power to the main body of the fault detection device 4 and includes a full-wave rectification circuit 26 that performs full-wave rectification of the obtained power supply voltage from a commercial power supply through the input protection circuit 24; The power supply voltage is supplied to the primary coil side and switched, and produced on the secondary line side. 19- 200540590 Reference " Switching power supply circuit for generating power supply voltage 2 7; The power supply voltage generated on the secondary coil side is converted into Constant voltage circuits 28A, 28B, and 28C based on the power supply voltage of each circuit; and a voltage level detection circuit 25 that monitors the level of the power supply voltage from a commercial power supply. The notification control circuit D includes a display LED driving circuit 22 that drives and controls the LED 23 according to a failure notification signal from a CPU 11 described later; and a photo coupler 20 and an output relay 21 that control the alarm output based on the failure notification signal. Driving circuit 1 9. • Communication interface E is the part that serves as the communication interface between the upper PC100 and CPU11. It has: the driver 30 for driving and controlling the optical coupler 30A; and the over-input protection circuit 29 to protect the driver 30, and The photo coupler 30A performs a communication operation between the upper PC 100 and the CPU 1 1. Fig. 3 is a block diagram showing a schematic configuration of the CPU 1 1 in the failure detection device 4 according to the first embodiment. The CPU11 includes a temperature adjustment control signal detection unit 3 1 that detects a temperature adjustment control signal between the SSR device 3 and the temperature adjustment device 6 through a temperature adjustment control signal monitoring circuit A; and a heater current detection circuit B A heater current measuring unit 32 that measures a heater current 値; a temperature adjustment control signal determination unit 3 that uses a temperature adjustment control signal detection unit 31 to determine whether the temperature adjustment control signal is ON or OFF based on the detected voltage 値 3 3 ; Heater current measuring section 34 using heater current measuring section 3 to determine whether heater current is ON or OFF; heater current determining section 34 for determining whether heater current is ON or OFF; based on determination result of temperature adjustment control signal determining section 33 and heating Device current determination unit 34 to determine the cause of SSR device 3-20-200540590 ♦ s SR failure determination unit 3 5 of the fault content; and output a failure based on the s SR failure determination unit 35's determination result Output processing section 36 of the notification signal. The temperature adjustment control signal determination unit 33 determines the control amount of the temperature adjustment control signal. For example, if the voltage 値 continues for 100m to 5v, the temperature adjustment control signal is determined to be ON, and at the same time, the voltage 値 continues to 1 〇〇m. If the second is not 5v, it is judged that the temperature adjustment control signal is OFF. The heater current judging unit 34 judges that the measured minimum current of the heater current 値 is 45% or more, then determines that the heater current is ON, and determines that the measured minimum current of the φ heater current is not more than 45%, determines that the heating is The device current is OFF. When the SSR failure determination unit 35 determines that the temperature adjustment control signal is ON with the temperature adjustment control signal determination unit 33, and when the heater current determination unit 34 determines that the heater current is ON, the SSR device 3 is judged to be in a normal state. When the SSR failure determination unit 35 determines that the temperature adjustment control signal is ON with the temperature adjustment control signal determination unit 3 and the heater current determination unit 34 determines that the heater current is OFF, it is determined that the SSR device 3 is turned on. Obstacle state. When the SSR failure determination unit 35 determines that the temperature adjustment control signal is OFF with the temperature adjustment control signal determination unit 33, and determines that the heater current is ON with the heater current determination unit 34, it determines that the SSR device 3 is short-circuited. Fault status. The output processing unit 36 uses the SSR failure determination unit 35 to determine the open failure of the SSR device 3, and outputs a failure notification signal corresponding to the open failure to the drive circuit 19, and the SSR failure determination unit 35 determines the SSR device. -21- 200540590 '3 When a short-circuit fault occurs, a fault notification signal corresponding to the short-circuit fault is output to the driving circuit 19. The power supply unit described in the scope of the patent application is equivalent to the power supply unit 1 A, the heater current detection means is the heater current detection circuit B and the heater current measurement unit 32, and the first determination means is the temperature adjustment control signal determination. The third determination means is the heater current determination part 34, the failure determination means is the SSR failure determination part 35, the control amount above the first predetermined level is a voltage above 5v, and the second predetermined level is the minimum measurement 45% of the current is reported to the notification hand • The output processing section 36 and the notification control circuit D. Next, the operation of the failure detection device 4 in the temperature adjustment system 10 shown in the first embodiment will be described. The temperature adjustment control signal monitoring circuit A in the fault detection device 4 is used to monitor the voltage 値 of the temperature adjustment control signal transmitted between the SSR device 3 and the temperature adjustment device 6, and pass the voltage 値 through the optical coupler 14 Notify to CPU11. When the temperature adjustment control signal detection section 31 in c ρ ϋ 1 1 detects the voltage 値 of the temperature adjustment control signal via the photo coupler 14, the voltage 値 is transmitted to the temperature adjustment control signal determination section 33. The temperature adjustment control signal determination unit 33 determines whether the voltage 値 of the temperature adjustment control signal continues to be 5 v or more for 100 m seconds, and determines that the voltage 呈 continues to be 5 v or more for 100 m seconds. The temperature adjustment control signal is turned on, and the determination result is transmitted to the SSR failure determination section 35. When it is determined that the voltage of the temperature adjustment control signal is not at least 5v for 100 m seconds, the temperature adjustment control signal is determined to be OFF, -22- 200540590 * and the determination result is transmitted to the SSR failure determination unit 35. The heater current detection circuit b in the fault detection device 4 performs digital conversion on the heater current detected by the heater current detector 5 and transmits the digitally converted heater current to the CPU 11. The heater current measurement unit 32 of the CPU 11 measures the heater current 値 based on the heater current from the heater current detection circuit B, and transmits the heater current 値 to the heater current determination unit 34. The heater current judging unit 34 is used to determine whether the heater current 计 is measured. Φ is measured at a minimum current amount of 45% or more. When the heater current 値 is measured at 45% or more of the measured minimum current 则, the heating is determined. The device current is ON, and the determination result is transmitted to the SSR failure determination section 35. When it is determined that the heater current does not exceed 45% of the measured minimum current, the heater current is judged to be OFF, and the judgment result is transmitted to the SSR failure judgment unit 35. When the SSR failure determination section 35 determines that the temperature adjustment control signal is ON with the temperature adjustment control signal determination section 33, and when the heater current determination section 34 determines that the heater current is OFF, the SSR device 3 is judged to be in the open failure state. And notifies the output processing unit 36 of the determination result. The output processing section 36 notifies the drive circuit 19 and the display LED drive circuit 22 of a failure notification signal corresponding to an open failure of the SSR device 3. The drive circuit 19 is used to alert the output failure of the S S R device 3 when it detects the fault notification signal, and forms the photo coupler 20 or the output relay 21 for driving and controlling. In addition, the display LED driving circuit 22 is an LED 23 for driving the SSR device 3 to report a turn-on failure when the failure notification signal is detected. -23- 200540590 In addition, the SSR failure determination unit 35 uses the temperature adjustment control signal determination unit 33 to determine that the temperature adjustment control signal is in the 0FF state, and the heater current determination unit 34 determines that the heater current is on. The SSR device 3 is in a short-circuit fault state, and notifies the output processing unit 36 of the determination result. The output processing unit 36 notifies the drive circuit 19 and the display LED drive circuit 22 of a failure notification signal corresponding to a short-circuit failure of the SSR device 3. The drive circuit 19 is used to alert the output of the SSR device 3 for a short-circuit failure when detecting the fault notification signal, and forms a photo coupler 20 or an output # relay 21 for driving and controlling. The display LED drive circuit 22 is an LED 23 for detecting the short-circuit failure of the SSR device 3 by detecting the failure report signal. When the output processing unit 36 detects the judgment result of the open failure or short circuit failure of the SSR device 3, it notifies the upper PC 100 of the judgment result through the communication interface E. According to the first embodiment, it includes a temperature adjustment control signal determination section 33 for determining whether the temperature adjustment control signal is ON or OFF, and heating for determining whether the heater current is ON or OFF ♦ When the heater current determination section 34 and the temperature adjustment control signal determination section 33 determine that the temperature adjustment control signal is ON and the heater current determination section 34 determines that the heater current is OFF, it determines that the SSR device 3 is turned on. Therefore, the turn-on failure of the SSR device 3 can be identified. According to the first embodiment, when the temperature adjustment control signal determination section 33 determines that the temperature adjustment control signal is OFF, and when the heater current determination section 34 determines that the heater current is ON, the short circuit failure of the SSR device 3 is determined. Therefore, a short-circuit failure of the SSR device 3 can be identified. -24- 200540590 'Moreover, according to the first embodiment, a failure notification signal based on the failure judgment result of the SR device 3 is output to the drive circuit 19, and the drive circuit 19 is used to drive and control the optical coupler 20 or The output relay 21 reports to output the fault judgment result, so the user of the fault detection device 4 can identify the fault content of the SSR device 3. In the first embodiment, the temperature adjustment control signal monitoring circuit A is used to monitor the voltage 値 (control amount) of the temperature adjustment control signal, and the temperature adjustment control signal determination unit 3 3 determines the voltage 値 to continue φ 1 〇〇m seconds is more than 5 v state, it is judged that the temperature adjustment control signal is ON, and it is determined that the voltage 値 continues for 100m seconds is not more than 5 v state, it is judged that the temperature adjustment control signal is OFF state, but for example, the temperature The adjustment control signal is set to a current that changes linearly within a range of 4 mA to 20 mA, and the current 値 of the temperature adjustment control signal is monitored as a control amount, and the current is determined by the temperature adjustment control signal determination section 33. When it is 4m A or more, it is judged that the temperature adjustment control signal is ON, and when it is judged that the current is not more than 4mA, it is judged that the temperature adjustment control signal is OFF. Needless to say, the same effect can be obtained. In addition, the current 値 of the temperature adjustment control signal is also monitored as a control amount, and the temperature adjustment control signal determination unit 33 determines whether the current 値 is more than 45% of the minimum current 计, and determines whether the current 値 is the minimum 最小. When the current 値 is more than 45%, the temperature adjustment control signal is judged to be ON, and when the current 値 is measured at the minimum current 値 not more than 45%, the temperature adjustment control signal is judged to be OFF, and the same effect can be obtained. . In the first embodiment described above, the heater current measurement unit -25- 200540590 β 3 2 is set to measure the heater current 値 from the heater current detection circuit B. However, the heater current measurement unit 32 may be used. It consists of software shown in Figure 4 or 5. Fig. 4 is a block diagram showing a schematic configuration inside the heater current measuring section 32. The heater current measurement unit 32 shown in FIG. 4 has a heater current from the heater current detection circuit B as a cycle of 3 60 °, and obtains A / D samples every 15 値, and A / D sampling / holding of 24 points per cycle # A / D sampling / obtaining section 42 in the RAM area 41; using A / D sampling / obtaining section 42 based on the 24 points in the RAM area 41 obtained A / D sampling 値 to calculate the basic 値 basic 及 calculation unit 43; and the basic 平方 calculation unit 43 is used to calculate the squared average of the calculated basic cycle of 1 cycle 値 to calculate the current 値, using the heater current The determination unit 34 determines a heater current 値 conversion unit 44 which is converted as a heater current 値. The basic volume calculation unit 43 calculates the basic volume by substituting the 24 A / D sampling frames in the RAM area 41 into the following calculation formula. ym = (xm- (xm-12) + (xm-4)-(xm-16)) / 2 / " 3 xm is the A / D sampling at the sampling point m. ym is the basic at the sampling point m. (xm-12) is the A / D sampling at the first 12 sampling points before xm. (xm-4) is the A / D sampling at the 4 sampling points before xm. (xm-16) is earlier than xm. The A / D sampling / heater current / conversion unit 44 at 16 sampling points is calculated by averaging the calculated basic values of 24 points (1 cycle point) by the basic value calculation unit 43 to calculate -26- 200540590 β current 値, and convert this current 成 into heater current 値. The A / D sampling / acquisition method described in the scope of the patent application is equivalent to the A / D sampling / acquisition section 42. The basic A / D calculation method is the basic A / C calculation section 43, and the heater current / conversion method is heater current. Conversion section 44. According to the heater current measurement unit 32 configured by the software shown in FIG. 4, the heater current from the heater current detection circuit B is taken as a cycle of 3 60 °, and A / D sampling is obtained every 15 °. And hold 24 A / D samples 値 in a cycle in the RAM area 41, and calculate the basic 値 based on the 24 A / D samples 保持 held in the RAM area φ 41, and calculate the The basic current is divided by 1 cycle. The squared average is calculated. The calculated current is converted into the heater current by the heater current determination unit 34. Therefore, it is used to obtain a heater that is not analogous but digital. The current 値 is not affected by the clutter, and can be used to ensure the response speed of the current change corresponding to the heater current 値. As a result, the accuracy of the failure determination of the SSR device 3 can be improved. Fig. 5 is a block diagram showing a schematic configuration inside the heater current measuring section 32. The heater current measuring unit 32 shown in FIG. 5 has a heater current from the heater current detection circuit B as one cycle of 360 °, and acquires A / D samples every 3 °. The A / D sampling unit 120 for 120 minutes in one cycle is held in the RAM area 51. The A / D sampling unit 52 is obtained; and the A / D sampling unit for 120 points in the RAM area 51 is accumulated. And the accumulated A / D sampling 値 squared average 値 calculated the current 値 'The heater current judging unit 34 is used to determine the conversion of the heater current as the heater current -27- 200540590 • 値 conversion unit 5 3. The A / D sampling / acquisition means described in the scope of the patent application is equivalent to the A / D sampling / acquisition section 52, and the heater current / conversion method is the heater current / conversion section 53. If the heater current measurement unit 32 configured based on the software shown in FIG. 5 is used, the heater current from the heater current detection circuit B is taken as one cycle 360. While taking every 3. To obtain A / D samples, and hold 120 A / D samples in one cycle in RAM area 51, and accumulate 120 A / D samples in RAM area 51, Cumulative A / D sampling is performed. • The squared average current is calculated, and the heater current determination unit 34 determines the current to be converted into the heater current. Therefore, it is used to obtain digital heating that is not analogous. The device current 値 is not affected by clutter. It can be used to ensure the response speed of the current change corresponding to the heater current 値. As a result, the accuracy of the fault determination of the SSR device 3 can be improved. Furthermore, in the first embodiment described above, the failure detection device 4 for detecting the failure of the SSR device 3 has been described, but a function that can detect the heater disconnection life before the heater disconnection may be considered in advance , That is, the heater even # short circuit function. Therefore, the failure detection device 4 having the accidental short circuit function of the heater will be described as a second embodiment. (Embodiment 2) Fig. 6 is a block diagram showing a schematic internal configuration of a CPU 1 1 in a failure detection device 4 according to a second embodiment. It should be noted that the same reference numerals are assigned to the same configuration of the fault detection device 4 according to the first embodiment, and the description of the duplicated configurations and operations is omitted. -28- 200540590 β The CPU 1 1 in the fault detection device 4 shown in FIG. 6 has: The temperature adjustment control signal monitoring circuit A uses the current of the temperature adjustment control signal between the SSR device 3 and the temperature adjustment device 6 as The control amount is used to monitor and detect the temperature adjustment control signal detection section 3 1 of the current; the heater current measurement section 32 for measuring the heater current 値 through the heater current detection circuit B; and the temperature adjustment control signal detection section 3 1 The temperature adjustment control signal judging unit that judges whether the temperature adjustment control signal is ON or OFF based on the detected current 将 3; The overcurrent before the disconnection of the heater 1 is operated as a threshold for accidental short circuit 値The accidental short-circuit criticality that is memorized is stored in the memory portion 6 1; the accidental short-circuit criticality is recorded in the billion portion 61, and the accidental short-circuited criticality in the memory is adjusted according to the set current of the temperature adjustment control signal, and the accidental condition after the adjustment is adjusted. Short-circuit criticality: criticality of the memory update by the memory unit 61; adjustment unit 62; determination of the measured heater current by the heater current measuring unit 32; Whether the accidental short-circuit criticality stored in the accidental short-circuit criticality (memory section 61) is exceeded, and when the heater current is determined to exceed the accidental short-circuit criticality, the accidental short-circuited heater judgment section of heater 1 is judged; 63; and An output processing unit 36 that outputs a failure notification signal based on the determination result of the heater accidental short circuit determination unit 63. The temperature adjustment control signal detection unit 31, for example, sets the temperature adjustment control signal within a range of 4 mA to 20 mA to a current 値 which changes linearly, and monitors the current 値 of the temperature adjustment control signal as a control amount. The temperature adjustment control signal determination unit 3 3 determines that the current of the detected temperature adjustment control signal 値 is 4 mA or more with the temperature adjustment control signal detection unit 31, and determines that the temperature adjustment control signal is ON, and determines that the detected- 29- 200540590 • When the current is not more than 4mA, it is judged that the temperature adjustment control signal is OFF. The accidental short-circuit criticality is remembered in the accidental short-circuit criticality of Yibei 61. Generally, when it is close to the disconnection life of the heater 1, the purpose is to reduce the insulation inside the heater 1 and flow to the heater. The characteristic that the current 値 of 1 becomes high is used to set the overcurrent 値 before the life is broken. Incidentally, the accidental short-circuit criticality stored in the accidental short-circuit criticality (memory portion 61) can be appropriately set and changed from the operation portion (not shown) or the upper-level PC 100. The φ critical threshold adjustment unit 62 adjusts the accidental short circuit threshold based on the set current for the temperature adjustment control signal, that is, a ratio of 20 mA, and sets the adjusted accidental short circuit threshold to the accidental short circuit threshold. The memory unit 6 1 Perform memory update. The critical threshold adjusting unit 62 updates the most appropriate accidental short-circuit critical threshold corresponding to the setting of the current temperature adjustment system 10, and updates the memory in the accidental short-circuit critical recording unit 61. The heater accidental short circuit judging unit 63 uses the temperature adjustment control signal judging unit 33 to judge that the temperature adjustment control signal is ON, and determines that the heater electric current # exceeds the accidental short circuit critical threshold, and is used to execute the accidental short circuit of the heater. Judgment action. In addition, even if the heater accidental short-circuit determination unit 63 determines that the heater current exceeds the accidental short-circuit threshold, when the temperature adjustment control signal determination unit 33 determines that the temperature adjustment control signal is OFF, the heater 1 is prohibited from determining the heater 1 Judging action of accidental short circuit. When the output processing unit 36 determines the accidental short circuit of the heater 1 by the heater accidental short circuit determination unit 63, it outputs a failure report signal corresponding to the accidental short circuit of the heater to the drive circuit 19. -30- 200540590 Λ In addition, the heater current detection means described in the scope of the patent application is equivalent to the heater current measuring section 3 2 and the accidental short circuit threshold. The memory method is the accidental short circuit threshold. The memory section 6 1 and the accidental short circuit threshold. The judging means and the accidental short-circuit judging means are the heater accidental short-circuit judging unit 63, the first judging means is the temperature adjustment control signal judging unit 33, the accidental short-circuit criticality adjusting means is the criticality judging unit 62, and the reporting means is the output processing unit. 36 and notification control circuit D. Next, the operation of the failure detection device 4 in the temperature adjustment system 100 shown in the second embodiment will be described with reference to Figs. 2 and 6. # The temperature adjustment control signal monitoring circuit A in the fault detection device 4 is used to monitor the current 値 of the temperature adjustment control signal transmitted between the SSR device 3 and the temperature adjustment device 6, and pass the current 値 through the optical coupler 1 4 The CPU 11 is notified to the temperature adjustment control signal detection unit 31 in the CPU 1 1 via the photo coupler 14 to detect the current 値 of the temperature adjustment control signal, and the current 値 is transmitted to the temperature adjustment control signal. Determination unit 33. The temperature adjustment control signal determination unit 33 is used to determine whether the current 値 of the temperature adjustment control signal is 4 mA or more and the current 判定 is 4 Ma. Then, the temperature adjustment control signal is judged to be ON, and the judgment result is obtained. It is transmitted to the heater accidental short-circuit determination unit 63. In addition, when the temperature adjustment control signal determination unit 33 determines that the current of the temperature adjustment control signal is not more than 4m A, it determines that the temperature adjustment control signal is OFF, and transmits the determination result to the heater accidental short circuit determination unit. 63. In addition, the heater current detection circuit B in the failure detection device 4 'digitally converts the detected heater current with the heater current detector 5' -31- 200540590 • and transmits the digitally converted heater current to CPU 1 1. The heater current measuring unit 3 2 of C P U 1 1 measures the heater current 値 based on the heater current from the heater current detecting circuit B, and transmits the heater current 値 to the heater accidental short-circuit determining unit 63. The heater accidental short-circuit judging section 63 is a judgment result used by the temperature adjustment control signal judging section 33 to detect that the temperature adjustment control signal is ON, and determines that the heater current measured by the heater current measuring section 32 is accidentally short-circuited. When the critical short-circuit memory 61 in the critical 値 memory section 61 is greater than or equal to, φ judges the accidental short-circuit of the heater 1 and notifies the output processing section 36 of the judgment result. When the output processing unit 36 is a judgment result of detecting an accidental short-circuit of the heater 1, it reports a fault notification signal corresponding to the accidental short-circuit of the heater 1 to the driving circuit 19 and the display LED driving circuit 22. When the drive circuit 19 detects the fault notification signal, it is used to warn that the heater is accidentally short-circuited and becomes the drive control photo coupler 20 or the output relay 21. In addition, the display LED. Drive circuit 22 is an LED 23 for driving and controlling to report an accidental short-circuit of the heater 1 when the fault notification signal is detected. When the output processing unit 36 is used to detect the judgment result of an accidental short circuit of the heater, the communication interface E is formed to notify the judgment result to the upper PC 100. In addition, when the heater accidental short-circuit determination unit 63 uses the judgment result of the temperature adjustment control signal determination unit 33 to detect that the temperature adjustment control signal is OFF, a comparison is made to prohibit the heater current 値 and the accidental short circuit threshold 値Determine the action. According to the second embodiment, there is an accidental short circuit threshold. Memory section -32- 200540590 * 6 1. When the heater disconnection life is approached, the insulation inside the heater 1 will be reduced. When the current of the heater 1 becomes high, the overcurrent before the heater 1 is disconnected is used as an accidental short-circuit threshold. When it is judged in advance, and it is judged that the temperature adjustment control signal is ON, it is judged whether the heater current exceeds the accident in the memory. The short circuit is critical, and when it is determined that the heater current exceeds the accidental short circuit threshold, the accidental short circuit of the heater is judged. Therefore, the accidental short circuit of the heater before the heater disconnection can be identified. As a result, it is easy to grasp the time of the heater disconnection. The cause of the fault can be used to ensure maintainability. In addition, the φ grip can be used to replace the heater 1 before the heater is disconnected because it can be accidentally short-circuited before the heater is disconnected. Therefore, preventive maintenance is ensured. In addition, according to the second embodiment, when the temperature adjustment control signal is judged to be OFF, the comparison judgment operation of the heater current and the accidental short circuit threshold 値 is prohibited. Therefore, the comparison judgment operation can be performed when the temperature adjustment control signal is OFF. To prevent erroneous determination of accidental short circuit of the heater. According to the second embodiment, the accidental short circuit threshold stored in the memory 61 is adjusted according to the set current and current of the temperature adjustment control signal, and the adjusted accidental short circuit threshold is adjusted by accidental short circuit. The critical section memory section 61 updates the memory, so it can be used to set the most appropriate accidental short-circuit critical section corresponding to the setting of the current temperature adjustment system. In the second embodiment described above, the heater current measurement unit 32 measures the heater current 値 from the heater current detection circuit B. However, the heater current measurement unit 32 may be shown in FIG. 4 or The software is shown in FIG. 5. In the second embodiment described above, a critical threshold adjustment unit 62 is provided to adjust the accidental short-circuit threshold. However, the critical threshold adjustment unit 62 is not provided, and the accidental short circuit threshold is determined based on the memory. The accidental short circuit threshold 値 and heater current in the memory portion 61 can be used to determine whether an accidental short circuit of the heater 1 is unnecessary. In the second embodiment described above, when the temperature adjustment control signal is judged to be in the OFF state, the comparison and judgment operation of the heater current and the accidental short-circuit criticality are prohibited. However, the heater may be executed if the temperature adjustment control signal is in the OFF state. When the current 动作 and the accidental short circuit threshold 値 are compared to determine the action, and when the heater current 値 is the accidental short circuit threshold ，, the accidental # short circuit of heater 1 can be judged as unnecessary. In addition, in the fault detection device 4 according to the first and second embodiments, the communication interface E is used to notify the failure detection device 4 of the failure result of the SSR device 3 or the result of the accidental short circuit of the heater 1 to the notification. Host PC 1 00, but as shown in FIG. 7, an infrared communication interface F is provided to perform infrared communication with other adjacent fault detection devices. The infrared communication interface F can also be used to notify the fault detection devices 4 to each other. Systematic structure of judgment results. # In this case, for example, a command is requested from the upper PC 100, and a signal is distributed to each fault detection device 4 via each fault detection device 4. At the same time, the judgment result is notified to the higher level from each fault detection device 4 according to the request instruction The PC 100, therefore, can manage the failure results of the SSR device 3 or the accidental short circuit results of the heater 1 on the upper PC 100 side. In addition, in the temperature adjustment system for communication between such a plurality of failure detection devices 4 and a higher-level PC 100, an identification number is assigned to each failure detection device 4, and a request instruction given the identification number is transmitted from the upper-level PC. 1 00 -34- 200540590 Dance ^ Provides a distribution signal to enable each fault detection device 4 to receive a request instruction, and extracts the identification number given to the request instruction, and determines that the extracted identification number is a self-identified number. The own fault detection device 4 notifies the judgment result of the failure of the SSR device 3 or the accidental short circuit of the heater to the upper PC 100 'and the upper PC 100 side, of course, the judgment results of the total fault detection device 4 in the system can be summarized. Management may be performed by extracting only the determination result of the desired failure detection device 4 individually. In the embodiment described above, the heater 1 is described as an example of a three-phase heater. However, as shown in FIG. 8, the single-phase heater 1B can also be used between the SSR device 3 and the temperature adjustment device 6. The temperature adjustment control signal is ON or OFF, and the heater current between the SSR device 3 and the single-phase heater 1B is ON or OFF to determine whether the SSR device 3 is open or short-circuited. The heater current between the phase heaters 1B and the accidental short-circuit critical point 値 are unnecessary to judge the accidental short-circuit of the heater. [Industrial advantage and possibility] The fault detection device of the present invention is used to detect the failure of the SSR device (open / short circuit), and it is easy to grasp that the fault detection device is assembled by outputting an alarm that is different from the heater disconnection. The effect of the failure cause of the system is extremely useful in the temperature adjustment system of heaters used in industrial furnace heaters, semiconductor cleaning devices, and plastic molding machines. [Brief description of the drawings] Fig. 1 is a block diagram showing a schematic configuration of the entire temperature adjustment system shown in the first embodiment of the fault detection device according to the present invention. Fig. 2 is a block diagram showing the outline of the structure of the -35- 200540590 β in the failure detection device according to the first embodiment. Fig. 3 is a block diagram showing the outline of the internal structure of the CPU in the failure detection device according to the first embodiment. Fig. 4 is a block diagram showing an example of the interior of a heater current measuring section in the CPU according to the first embodiment. Fig. 5 is a block diagram showing an example of the inside of a heater current measuring section in the CPU according to the first embodiment. Fig. 6 is a block diagram showing a schematic configuration of a φ CPU in the failure detection device according to the second embodiment. Fig. 7 is an explanatory diagram specifically showing a system configuration of a temperature adjustment system according to another embodiment. Fig. 8 is a block diagram showing a schematic configuration of the entire temperature adjustment system of another embodiment. [Description of component symbols] 1... Heater 1 A ... power supply unit # 2... Temperature adjustment system 3.. 55R device 4.... Failure detection device 3 2. Heater current measurement unit (heater current detection Means) 3 3 ... Temperature adjustment control signal determination unit (first determination means) 34 ... Heater current determination unit (second determination means) 35 ... SSR failure determination means (fault determination means) 36 ... Output processing means (notification means) -36- 200540590 • 42, 52 ... A / D sampling / acquisition section (A / D sampling / acquisition method) 43 ... Basic / calculation section (basic / calculation method) 44, 5 3 ... heater current / conversion section (heating Device current (conversion method) 6 1 ... accidental short circuit criticality (memory circuit) 62 ... criticality adjustment unit (incidental short circuit criticality) memory 6 6 ... heater accidental short circuit judgment unit (incidental short circuit criticality)値 Judging means and accidental short-circuit judging means) B ... heater current detection circuit (heater current detection means) # 〇 ... notification control circuit (notification means)

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Claims (1)

200540590-X. Scope of patent application: 1. A fault detection device connected to a temperature adjustment system, comprising: a heater for controlling an elephant; a power supply section for supplying power to the aforementioned heater; and a heater and a power supply section And an SSR device that adjusts the amount of power supplied to the heater from the electrical unit according to a temperature control signal; and monitors the temperature of the heater, and sets the temperature of the heating to a target temperature based on the monitoring result, and Output the temperature adjustment control signal temperature adjustment device; and the fault detection device is used to detect the SSR device, and is characterized by having: a heater current detection means for detecting a heater current between the SSR device and the heater; The first determination means for determining whether the temperature adjustment control signal has a control amount at a first predetermined level; the heater current detection means is used to determine whether the detected heating current has a second predetermined level or higher. 2 determination means; and the determination result according to the aforementioned first determination means and the ® determination result of the second determination means, Given the failure of the SSR device failure judgment means. 2 · The fault detection device as described in item 丨 of the patent application scope, wherein the previous fault determination means uses the first determination means to determine that the temperature adjustment control signal has a control amount of a first predetermined level or more, and uses the second When the judging means determines that the heater current does not exceed the second predetermined level, the SSR on failure of the SSR device is determined. 3 · The fault detection device as described in item 丨 of the scope of patent application, wherein the previous fault determination means is the aforementioned first determination means for determining the aforementioned temperature adjustment opposing source device installation device judgment control judgment judgment control- 38- 200540590 ^ When the control signal does not have a control amount greater than the first predetermined level, and the second determination means determines that the heater current is greater than the second predetermined level, the SSR short circuit fault of the SSR device is determined. 4. The failure detection device described in item 1 of the scope of patent application, which has a notification means for reporting the output of the determination result of the failure determination means. 5. The fault detection device described in the first item of the patent application scope, wherein the heater current detection means includes: obtaining a predetermined number of heater currents between the SSR device and the heater within a predetermined period; A / D sampling / A / D sampling / acquisition means for sub-A / D sampling; using the aforementioned A / D sampling / acquisition means to calculate basic / basic A / D sampling means based on a predetermined number of A / D samplings obtained; and The current 値 calculated by averaging the basic 値 of the predetermined cycle minutes calculated by the basic 値 calculation means is determined by the aforementioned second determination means and converted into a heater current 値 conversion means which is a heater current 値. • 6. The fault detection device described in item 1 of the scope of patent application, wherein the heater current detection means includes: full-wave rectification of the heater current 値 between the SSR device and the heater, in a predetermined cycle A / D sampling acquisition means for obtaining a predetermined number of A / D sampling points, and accumulating the predetermined A / D sampling points, and squaring the accumulated A / D sampling value The calculated current is converted into the heater current 作为 -39- 200540590 which is the heater current 値 by the second determination means described above. • Conversion means. 7 · The fault detection device described in item 1 of the scope of the patent application, which is a communication means for wireless connection with the higher-level equipment and other fault detection devices, and through the wireless communication means, the above-mentioned fault judgment and determination results are placed in the higher-level equipment. Or the aforementioned other fault detection device performs sending and receiving. 8 · A fault detection device connected to a temperature adjustment system, comprising: an image heater; a power supply unit for supplying power to the aforementioned heater; and between the heater and the power supply unit, and described in accordance with a temperature control signal An SSR device that supplies power to the heater from the power supply unit; and the temperature of the heater, based on the monitoring result, to set the aforementioned temperature to a target temperature 'and output the temperature adjustment control reliability adjustment device; and The fault detection device is used to detect the above-mentioned fault, and is characterized by: having a heater current detection means for detecting heating between the SSR device and the heater; • overcurrent of the heater before disconnection 値As the accidental boundary, the accidental short-circuit criticality is memorized in advance; the heater current detection means is used to detect the heater current to determine whether the heater current is in the accidental short-circuit criticality, whether the memory exceeds the accidental short-circuit criticality in the memory. Critical means of accidental short circuit; and the aforementioned heating by means of judging means of accidental short circuit threshold When the above-mentioned accidental short-circuit critical threshold is exceeded, it is used to determine the control pair between the heaters with wireless communication means: the heater current configured to monitor the number of the front heater is short-circuited temporarily. Accidental -40-200540590 of device current " Accidental short-circuit judgment method of short circuit. 9 · The fault detection device described in item 8 of the scope of patent application, which has a first determination means for determining whether the temperature adjustment control signal has a control amount greater than a first predetermined level, and the aforementioned accidental short-circuit determination means is based on When the first determination means determines the control amount of the temperature adjustment control signal above the first predetermined level, and when the accidental short-circuit criticality is determined by the accidental short-circuit criticality determination means, the heater current is exceeded by the accidental short-circuited criticality, and the judgment is performed using • The judging action of the accidental short circuit of the heater, at the same time, it is judged that the heater current exceeds the accidental short circuit threshold by the judging circuit of the judging short circuit, and judging that the temperature adjustment control signal is not the first predetermined level by the judging method of the first. When the above control amount is used, the judgment action for judging the accidental short circuit of the heater is prohibited. 10. The fault detection device described in item 9 of the scope of the patent application, which has the above-mentioned accidental short-circuit criticality in the aforementioned accidental short-circuit criticality memory means, and adjusts the accidental short-circuit criticality in memory based on the set current of the temperature adjustment control signal, The adjusted accidental short-circuit criticality is adjusted by the accidental short-circuit criticality of the aforementioned accidental short-circuit criticality and memory updating. 1 1 · The failure detection device described in item 8 of the scope of patent application, which has a reporting means for reporting the output of the judgment result when the accidental short circuit of the heater is judged by the aforementioned accidental short circuit judgment means. 1 2 · The fault detection device described in item 8 of the scope of the patent application, wherein the heater current detection means includes: setting the heater current between the SSR device and the heater to -41-200540590 '* A / D sampling / acquisition means for obtaining a predetermined number of A / D samples within a certain period; using the aforementioned A / D sampling / acquisition means to calculate the basic value based on the A / D sampling for a predetermined number of points obtained; The basic current calculation means; and the squared average current of the predetermined period minutes calculated by the basic time calculation means; Current 値 heater current 値 conversion method. φ 13. The fault detection device described in item 8 of the scope of the patent application, wherein the heater current detection means includes: full-wave rectification of the heater current 値 between the SSR device and the heater, and at a predetermined cycle A / D sampling acquisition means for obtaining the predetermined number of A / D sampling points; and accumulating the predetermined number of A / D sampling points; and squaring the accumulated A / D sampling value. The calculated current 値 is converted into a heater current 値 conversion means which is the heater current 値 φ by the aforementioned accidental short circuit critical 値 determination means. 14. The fault detection device described in item 8 of the scope of the patent application, which includes a wireless communication means for wirelessly connecting with a higher-level equipment and other fault detection devices, and through this wireless communication means, the determination result of the aforementioned accidental short-circuit determination means, Transmission and reception are performed between the aforementioned host device or the aforementioned other failure detection device. -42-