TWI278894B - Method for activating electron source surface of field emission display - Google Patents

Abstract

A method for activating surface of electron emission source of a field emission display. After a cathode structure is fabricated and sintered with high temperature, the surface of electron emission source is activated by employing a spray coating technology. The spray coating technology includes a spraying device. The spraying device employs compressed air to homogeneously spray the solution onto the surface of the cathode structure. The solution will then cover the gate electrode layer and permeate into the hole and sagged area on the surface of electron emission source to form a covering layer. The covering layer is then dried and peeled off using a roller peeling device. The roller peeling device includes two rollers, one of which includes a heating unit to heat and soften the covering layer when rolled on the covering layer of the cathode structure. The other roller can thus peel off the covering layer easily.

Description

12^78894

i No. 941052fM V. INSTRUCTION DESCRIPTION (1) [Technical Field 1 of the Invention] This invention relates to a field &-methodization method, especially a method for utilizing ';: unfavorable electron emission source surface living spray infusion Each of the cathode structures = the high-pressure air of the technology, and the effect of the surface of the source is obtained by drying the solution after the film is dried, using the name and the inside, and then drying it into a film. Removed with a stripping device to activate the electrons [Prior Art]. The two-pole field emission of Baizhi has a structure and a cathode structure, and the anode 'its structure mainly includes an anode junction? pacer), which is provided with a support between the anode structure and the pole structure (s and an anode structure and a cathode between the f-pole structures). The interval between the vacuum regions, the anode substrate, the abutment between the anodes, the anode structure includes the acceptor; and the cathode two V-clad eight n glory powder, the electron emission source layer, the one cathode substrate, and the cathode The conductive layer is provided with a potential difference of two layers and a gate layer; wherein the gate layer has an anode conductive layer two;: ΐ: the electrons are driven by the electrons & 4 & 獒 for the electron beam to accelerate, the layer is excited and you 苴Kinetic energy impact (imp i nge) on the anode structure of the phosphor powder two movements [Kong, / ancient light. Accordingly, in order to make the electrons in the field emission display, the vacuum display device maintains the display at least 10-5 Torr (tor 1 〇 below ^ breadth / gives the electron a good average free moving path (mean free Ρ〇 & And the same should avoid the pollution and poisoning of the electron emission source and the phosphor powder area, so that the electrons have enough energy to hit the fluorescent powder, so the gap between the two plates and the t field must make the electrons have enough acceleration space. To strike the phosphor powder, the phosphor powder can fully produce the luminescent effect.

1278894 V. INSTRUCTIONS (2) The so-called electron emission source layer is mainly composed of nano-tubes and carbon nanotubes (Carbon nano tubes) since 991! j j ima 提 $ & (Nature 354, 56 (1991)) has extremely south electronic properties, and has been used in a variety of electronic components, and carbon nanotubes can have a high aspect ratio More than 500%, and high rigidity, its Young's system, number, and more than 10 OOGPn, and the tip or defect of the carbon nanotubes are exposed at the sub-scale scale. These characteristics are considered to be an ideal. The use of an electron field emitter material, such as an electron emission source on a cathode structure of a field emission display. Since the nanotubes have the physical properties shown above, they can also be designed to be used in electronic components such as 'screen printing or thin film processes. And ★ the so-called cathode structure manufacturing technology, the carbon nanotubes are used as an electron source material on the cathode conductive layer, the production method can be = 2: ί deposition, or a sensitization The type of nano-carbon charcoal official Luo = map, produced in the cathode conductive layer in each of the pixels, can also be made of two or two 'speaking' Gu Li grid mesh cover, or an electrophoresis method to reverse the nano stone counter t ί The cloth is deposited on the cathode conductive layer, and in any case, it must be sintered at a high temperature of 5 〇 0 ° C or higher, so that the process can be removed from each process. The carbon nanotubes are fixed to the cathode conductive layer to increase their adhesion. V package, but the L-pole structure process is not completed here, usually in the high-temperature sintering process Y is still; 隹彳一τ a so-called surface activation, due to high temperature sintering is still not enough to remove Φ, 70, or other a carbonaceous bulk structure of other non-carbon nanotubes on the surface of the source; a poorly crystalline nanocarbon tube, or other carbon sphere structure, or

Page 6 1278894 V. Description of the invention (3) He used the high-temperature sintering of the carbon nanotubes to generate a surface-enhanced electron beam, such as Taiwan's rate-enhancing method, which uses a diversion to remove before or after The high temperature can make the material not to be sandblasted, although the cathode junction or the plasma is too high, which is not conducive to the other "the use of the structure, and the cost is low in the above-mentioned cost, and the treatment is processed. A carbon nanotube is a kind of hot laser that achieves low activation, and the electron sequence of the high-emission source formed by 94105204 is used to shift the effect. The 480537" invention patent tape is attached to the so-called multi-expansion laser or good structure. The carbon power will not be the same method, but it is not suitable because the tape sticking method is not conducive to the pixel cathode technology of the sand processing method, such as the electron source field styling gel or the fusible electron emitting f sub-emission source. The effect of warm organic output is to eliminate or change the activation number. This electronic material is produced in the material of the material and the material is not used for the large surface. The structure of the Taiwan-specific galvanic coating source surface is based on the heat of the material, the rate, the quality of the technology can be used in the carbon patent source table or structural heat ί 晶 crystal or material and nodes, such as sub-emission The electronic hair plate is uncovered: it will hurt the implementation. The case of the case is to use the hot surface, the purpose, the material of the dazzle coating still needs to be activated by the electron; the tube source field is stripped after the film' The activation is based on the use of transient decomposition to remove; the damage is affected by the so-called source-emitting emission film treatment tape stripping, the inter-region or the removal of the tape by the way the source has been made in three The source of the pole, in addition, the laser 'and the implementation cost to the original carbon tube structure, and the book No. I 2 2 3 3 8 8" invention patent case, the mold is filled with a three-pole shape and then Although the process of melt-stripping is easy to infuse, there are still restrictions.

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12^78894 Amendment--- Case No. 94105204 彳五、发明说明(4) J--The main limitation of the implementation of the factors is only _ kinds of high-viscosity materials = process viscosity is still above 100 cps, due to field emission is more ' = High: ...'pixels are smaller and wider, to the degree? An air gap is formed between the oxholes, and the air gaps will be the same as the electron emission source of the tube. According to this, it will be difficult to reach the full: and the Nai will cause the surface activation area of the electron emission source to be inconsistent. The effect is greatly reduced. ",, the staff does not face the face = the above-mentioned stripping mechanism is not fully prompted and revealed that the 5 Hai pen emission originated from the process of stripping activation, never knowing each =, so that each of the stripped activated electrons The stone of strength: the physical strength of the scorpion, if it is only arbitrarily stripped, it is still difficult to reach the average. The system has a large-scale trend toward future display products: the fruit, the special film-peeling mechanism exists. However, the main object of the present invention is to solve the above-mentioned method for reducing the cathode electron emission of the three-pole structure of the three-pole structure, and the method of the helmet method is to completely cover the surface of the cathode, and then attach the surface. The effect of the surface of the sub-emissive source; this * coating method can be completely two = activation t in the cathode structure of the two poles, the phenomenon of poor uniformity caused by the filling of the liquid solution of the Luo Wang = Yuan Wang, the virtue, = 2 The technique of opening the sputum without solution drying, and then stripping the film to remove/^ after infusion, 铖 铖 寺 寺 , , , , , , , , , , , , , , , , , , , , , , ,

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1278894 Case No. 94105204 V. Description of invention (5)

The stripping mechanism achieves the above purpose by uniformly stripping the film, and the method of activating the surface of the source is performed on the surface of the electron emission source after the Yinmingji, and the spraying device is used, and the spraying device utilizes high-pressure air. On the surface to be sprayed, at this time, the solution is infiltrated into the electron emission source table to dry the film, and the drum-type stripping device has two rolls of %' heating softening in the rolled cathode structure, allowing another A roller can be [embodiment] activation effect. &The electrode structure of the sun and moon field emission display is completed and made by surface activation. In the electric nozzle coating technology, the spraying technology package is internally filled with a solution, and the spraying liquid is evenly sprayed and poured into the cathode gate electrode. The layer is formed by a coating on the perforated surface to form a spray-coated membrane device. When the coating has a coating in the drum, the drum is first coated to easily peel off the coating. . The sub-emission high-temperature burner emits a coating device pole structure and a concave layer, and then the roller heats the single layer to carry out the technical content and detailed description of the present invention, and is now matched with the cathode of the --- The method for realizing the field emission display of the present invention is mainly to spray η r 』 on the two sub-surfaces, and to convert the yt from the U-pole structure; & Μ, 7? # ^ 丹The effect of the 3-coated membrane on the surface of the buccal source.浚 、, right, 兹, d: in: rk old use of the spray method of hot melt casting technology skill helmet method 6 into, # mouth ° Hai pixel 徭 $% full perfusion caused by uniform 柹 and then reuse After perfusion, the solution |ti ^ Ί is not early B" into the pancreas, and then the stripping pattern is said to be schematic surface active source table to complete the phenomenon will be overcome, to shift

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1278894 V. Description of invention (6) Ϊί: Residual carbon material or organic oxide on the surface of the source.七七亚亚 provides a uniform stripping mechanism to achieve uniform stripping: this method is low in cost, implements simple #, overcoming the structure, and spraying the activation area of the film, and then using the rolling mechanism to improve the stripping Membrane uniformity. ϋFirst, first make a three-pole cathode structure before the spraying solution = structure 10, provide a substrate 丄, the substrate 丄 is broken 2, and an electrode layer 2 is formed on the substrate 用 by silver glue, and the upper layer is formed The η electric layer (Dielectric) 3, before the foregoing, has a gate electrode layer 4, and a puncturing region can be formed on the immersion electrode layer 4 by lithography or etching. And then using a carbon nanotube to form an electron emission source 7. (4) "The second and third figures are shown", which is a schematic diagram of the construction process and completion of the present invention. As shown in the figure: When the top enamel is completed and sintered at a high temperature, ♦ r surface activation is performed. Package 1 is a 3 Å electron emission source 7 surface activation system, but the main technology includes a spray device 2 〇, this t = solution 8 is evenly sprayed = electrode layer 4 ' and by perforation (layer 9 ^ : The surface of the source 7 is formed to form, and the σ brother is not shown), and then the film is dried. The activation effect is activated by the barrel-type stripping 10, the glass material, the electrode layer dielectric layer 3 method, and the violent layer 2 l· pole structure spoke cathode cathode emission source spraying technology coating device 2 The air will be on the surface, ) 5 and the concave spray coating

1278894 -^--^05204

V. Description of the invention (7) The above-mentioned spraying technology can implement the spray-type peeling protection according to this, and the conventional use should be: 2. The commercially available so-called mouth peelable film can be selected as a high score to It is a protective film on the surface. In the irrigation, the conventional use is used for metal processing materials, filled with high-pressure gas film 'by high-pressure gas to polymer: ^ metal surface anti-oxidation coating on the surface of the sprayed surface, after spraying, materials Atomization is carried out by drying a small liquid bead to form a film to form ~彳-, Fen, the volatile solvent in the night is volatilized, and the dry solution is sprayed on the cathode crucible. Manufactured by using this commercially available spray mold on each of the pixels f, 隹: repeated spraying to fill the film sufficiently. According to this, the film can be evaporated and dried to form a film. 5% ~ 10% of water ^ method of Μ or PVP solution solubility can be 5 0 ~ 8 0 ° C after the viscosity can be suppressed ^ and controlled below 1 〇〇〇 Cps, heated 啧 grab, to the topic ^ The system is below 5〇0 CPS. Then, using a pressure-feeding method for coating, the paint is atomized and sprayed on the cathode structure 10 electron emission, shield ry main & L, 夕 if] human a 7 丨 / original 7 surface On the top, with 5 using the coating solution and the ratio of the suspension port 3, the air injection flow rate of the selected spray gun is at least greater than 20, min. Because of the use of the coating solution 8 is an aqueous solution, the sprayed cathode structure 1 〇 It is necessary to be preheated, so that the temperature of the cathode structure 10 is maintained at 50 to 80 ° C, so that the coated solution 8 can be easily dried and formed into a film, and the coating can be repeated by a spraying procedure. It is ensured that the atomized coating is sufficiently cast on the surface of the electron emission source 7. Waiting for the above; after the grain liquid is dry, the film is removed by the drum type film removing device 30 (as shown in the fourth figure), and the drum type film removing device 30 has two rollers 301, 302. The aforementioned drum 3 has a heating unit which is rolled when the coating layer 9 of the cathode structure i is rolled

Page 11 1278894 Case No. 94105204 Year of the month Amendment 5, invention description (8) 3〇1 First, the coating layer 9 is heated and softened, so that the roller 3 0 2 can easily strip the coating layer 9 and the cathode structure can be removed. 1 0 The high-temperature sintering cannot remove the carbonaceous bulk structure of other non-nanocarbon tubes on the surface of the electron-emitting source 7, or other poor-form crystal carbon nanotubes, or other carbon sphere structures, or other high-temperature sintering facilities. The formed high-temperature organic material is stripped together, which makes the display of the field emission display better. Further, the specific thickness of the coating layer to be applied to the stripping process may be 0.1 to 0.5 mm to facilitate the release of the stripping roller, further in the coated cathode. The plate is baked at 60 to 80 ° C for 10 to 20 minutes, and the coating layer 9 is solidified and formed into a film, and then removed by a roller type stripping device 30 to uniformly remove the film. The surface of the electron emission source 7 is uniformly activated. The above are only the preferred embodiments of the present invention and are not intended to limit the scope of the present invention. That is, the equivalent changes and modifications made by the scope of the patent application of the present invention are covered by the scope of the invention.

I

Page 12 1278894 Case No. 94105204 Λ_ Correction Brief description of the drawing [Simplified description of the drawings] The first figure is a schematic diagram of the cathode structure of the present invention. The second drawing is a schematic diagram of the manufacturing process of the cathode structure spraying solution of the present invention. The third drawing is a schematic diagram of the preparation process of the cathode structure spraying solution of the present invention. The fourth drawing is a schematic illustration of the stripping treatment of the surface structure of the cathode structure of the present invention. [Description of main component symbols] Cathode structure.............10 Substrate................1 Electrode layer........ .......2 Dielectric layer..................3 Open electrode..............4 Perforation.... ............5 recessed area..............6 electron emission source..................7 dissolved night ..... 8 Coating layer ···............9 Spraying device... 20 Roller type film stripping device......... ..30 Roller..........3 0 1 , 3〇2

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Claims (1)

1278894 Case No. 94105204 Amendment 6. Patent application scope 1. A field emission display for activating electron emission source table a), taking a sintered b), using a spray coating to form a coating layer; c) The cathode is used to emit a display by using a stripping device to activate the surface of the electron-emitting source of the cathode junction structure 2, such as the surface of the sub-emissive source of the patent application. 3. A method as claimed in claim 1, wherein a substrate is formed on the substrate, and a dielectric layer is formed on the gate electrode layer to form a trapped region on the gate electrode layer, and then activated by a surface of the carbon nanotube source. The method includes the cathode structure of the electron emission surface of the device, and the coating of the residual carbon material coated on the surface of the cathode structure by the solution, or the first item, wherein According to Item 2, wherein the coating layer of the cathode layer is demolded, and the organic oxide field emission pole structure is a field emission pole structure to dry to remove the femininity. The power of the electric device of the display device comprises: forming a gate electrode layer on the electrode layer formed on the electrode layer, forming an electron emission source on the electrode layer of the exposed electrode layer; 4. The method of activating a surface of an electron emission source of a field emission display according to claim 1, wherein the spraying device is a high pressure air filling irrigation. 5. The method of activating a surface of an electron emission source of a field emission display according to claim 1, wherein the spraying device is a spray. 6. The power of the field emission display as described in item 5 of the patent application scope Page 14 1278894 Case No. 94105204 A_L· Amendment to the electric spray of the spray pole structure, wherein the spray is selected from the above-mentioned one of the items, the dissolved one of the According to the item 9, wherein the item is recited in item 1, wherein, in the item 1, the method for activating the surface of the sub-emissive source in the patent application area is sent. The method comprises atomizing and spraying the coating on the cathode 7, and the method for activating the surface of the first source of the patent application, the proportion of the solid solution of the cloth solution and the suspension is at least greater than 2 0 1 / mi η. 8. Any one of the methods for activating the surface of the emitter of the patent application range. 9. A method of activating a surface of a source of a source of a patent, an aqueous solution. 10 0. As claimed in the patent range, the method of surface activation of an electron emission source is made below 1 0 0 c c s. 1 1 , as claimed in the patent range The method of surface activation of the electron emission source The viscosity can be controlled below 50 Ocps ^ 1 2. As claimed in the patent range The method of surface activation of the electron emission source is required to heat 50 to 80 ° C. 1 3. If the method of surface activation of the electron emission source in the patent application area is required to be heated 5 0~8 (TC. The gun is launched by the south sub-launch field to capture the solution of the field emission liquid of the spray field. The field of the solution is sprayed on the surface of the pressure source of the over-pressed air. The electrical conductivity of the display is 5% with the electric PVA or PVP display of the air-intake display. ~10% of the display temperature of the normal temperature viscosity control display of the display 5 0~8 0 〇C The display of the cathode in the process of spraying the display Page 15 1278894 The field emission display device according to the above item 1, wherein the demolding device is a roller, and the patent application scope is 14. The application for an electronic emission source surface active release device. 1 5. If the surface of the applied electron-emitting source has two rollers, and the other layer of the foregoing structure, the coating is applied to the surface of the electron-emitting source > 1 7. If the application of the surface of the electron emission source is baked at 60 to 80 °C, the patent is activated by the patent, and the one of the patents of the patent is normalized. The square of the patent is 0 to 2 0. The field emission display method according to any of the preceding claims, wherein the drum type stripping device has a heating unit in the cylinder, and the coating layer is heated and softened first in the rolling cathode. The method of the field emission display according to the first item, wherein the thickness of the film is 0. 1~0. 5mm to facilitate the field emission display method according to the first item, wherein In the coated cathode bell, the crucible solidifies the casting. # Page 16 1278894 _ Case No. 941Q5204_Yearly Month Day Amendment VI. Designation of Representative Representatives (1) The representative figure of this case is ···___四__图 (2), the symbolic symbol of the representative figure of this case is simple: Page 3 Cathode Structure..... • 1 0 Substrate....... 1 Electrode Layer... 2 Dielectric Layer... • · 3 Gate Electrode.... 4 Perforation....... • 5 Recessed area..... 6 Electron emission source · · · · 7 Coating layer... 9 Roller type stripping device·· • 3 0 Roller · · · 3 0 1 , 3 0 2