J276765 (1) 九、發明說明 【發明所屬之技術領域】 本發明,是關於深冷空氣分離裝置及其運轉方法,更 詳細地說,是關於一種對需求側能夠提供更高壓的製品氧 氣,並且可抑制運轉成本增大的深冷空氣分離裝置及其運 轉方法。 • 【先前技術】 於鋼鐵業等的工業領域中,氣態氧(製品氧)是做爲 作用材料或原材料來使用,其供給源是使用深冷空氣分離 裝置。於這般深冷空氣分離裝置的狀況,通常,製品氧氣 是以複式精餾塔上部塔操作壓力0.01〜〇.〇2MpaG程度的 壓力從上部塔取出,將取出後的氧氣昇壓成所要壓力後供 給至需求側。然而,氧氣要昇壓成所要壓力用的氧氣壓縮 機的所要動力過大’因此降低所要動力就成爲業者的強烈 •要求。 能夠降低氧氣壓縮機所要動力的提案,習知例如有下 述構成。以下,是邊參照第3圖所示備有葉輪體式氣體鼓 風機的涂冷空:氣分離裝置控制電路構成來邊說明該習知例 相關的深冷空氣分離裝置。 即,該習知例相關的深冷空氣分離裝置,具有冷芯盒 5 5,該冷芯盒5 5具有:對原料空氣進行壓縮的原料空氣 壓縮機5 1 ;對在該原料空氣壓縮機5丨壓縮的同時在前釐 冷卻裝置52冷卻後的原料空氣進行前置處理的吸收塔單 -4- J276765 • (2) 元5 3 ;將該吸收塔單元5 3前置處理後的空氣當做原料送 入’從該送入的原料空氣中用深冷分離法分離連續生產氮 或氧的精餾塔5 7、5 8 ;及,使上述送進來的原料空氣隔 熱膨脹以產生冷空氣流入上述精餾塔的膨脹葉輪56,深 冷空氣分離裝置’是應用在需要將製品氧等製品氣體的懕 力利用精餾塔5 7的運轉壓力來成爲高壓的成套設備上。 以深冷狀態來精餾分離製品氣體(例如製品氧)的精餾 φ 塔’是由下塔(中壓塔)5 8和上塔(低壓塔)5 7所構 成,兩者是構成爲於主冷凝器90彼此進行熱交換。於該 主冷凝器90內構成爲是從下塔58上部供給氮氣,液化後 的氮會回到下塔5 8上部。 根據該習知例相關的深冷空氣分離裝置時,是將 0.03MpaG程度的製品氣體(例如製品氧)89以氣體狀態 從上塔(低壓塔)57取出,以空氣熱交換器63恢復溫度 後,將膨脹葉輪5 6常溫側(單側)的阻力風扇做爲製品 φ 氣體(例如製品氧)89昇壓用的氣體鼓風機66來使用。 即’該氣體鼓風機66,是承接膨脹葉輪56的旋轉力使要 成爲製品的氣體(例如製品氧)的壓力能夠形成爲要比上 塔5 7運轉壓力還高的壓力水準地來將製品氣體8 9昇壓成 壓力比1 · 3 6〜1 · 6程度。如上述,於要成爲製品的氣體 (例如製品氧)的壓力是被要求形成爲要高於上塔5 7運 轉壓力的壓力水準之成套設備中,是從上塔5 7以氣體狀 ' 態取出製品氣體(例如製品氧),將該取出後的製品氣體 以被設在冷空氣產生用的膨脹葉輪5 6單側的阻力用氣體 -5- (3) 1276765 鼓風機66來昇壓,使製品氣體(例如製品氧)89成爲指 定壓力被送出來。另,於第3圖,精餾塔右側標示的圖號 62是爲過冷卻器(例如參照專利文獻1 )。 〔專利文獻1〕日本特開2 003 _ 1 667 8 3號公報 【發明內容】 〔發明欲解決之課題〕 p 根據習知例相關的深冷空氣分離裝置時,從冷芯盒取 出的製品氧氣的壓力是限定在 0.02〜0.08 GPaG。因此, 需求側的製品氧氣的需要壓力是與該壓力一致時該深冷空 氣分離裝置是非常有效的裝置。 然而,若需要這以上的壓力時,就無法使用該深冷空 氣分離裝置。當然,若設有氧氣壓縮機,是可對需求側供 給更高壓的製品氧氣,但如此一來於氧氣壓縮機就需要龐 大的動力能源,導致深冷空氣分離裝置的運轉成本不符合 φ 經濟。 因此,本發明的目的,是提供一種對需求側能夠提供 更高壓的製品氧氣,並且可抑制運轉成本增大的深冷空氣 分離裝置及其運轉方法。 〔用以解決課題之手段〕 爲解決上述課題,本發明申請專利範圍第1項相關的 深冷空氣分離裝置所採用的手段,是針對深冷空氣分離裝 置,備有:對原料空氣進行壓縮的原料空氣壓縮機;對該 -6 - 1276765 • (4) 原料空氣壓縮機壓縮後的壓縮空氣中的雜質進行去除的吸 收塔單元;及,對雜質去除後的壓縮空氣進行冷卻的主熱 交換器的同時,還備有空氣分離部,該空氣分離部具有: 由上塔和下塔所形成,可將上述主熱交換器冷卻後導入的 空氣分離成氧和氮的複式精餾塔,其特徵爲,備有:經過 上述主熱交換器連通於下塔,可將經過吸收塔單元的原料 空氣的一部份導入於下塔的第1原料空氣管路;從該第1 Φ 原料空氣管路分歧出來連通於上塔,於上述主熱交換器的 上游側途中設有鼓風機的同時,於主熱交換器的下游側途 中設有膨脹葉輪,可將經過吸收塔單元的原料空氣剩餘部 份導入於上塔的第2原料空氣管路;從上塔將製品氧氣透 過主熱交換器供給至需求側,於主熱交換器的下游側途中 設有氧氣壓縮機的第1製品氧管路;及,從上塔的底部將 製品氧氣透過主熱交換器供給至需求側,在主熱交換器和 上塔之間設有液氧泵浦,要連通於上述第1製品氧管路的 φ 上述氧氣壓縮機下游側的第2製品氧管路。 本發明申請專利範圍第2項相關的深冷空氣分離裝置 所採用的手段,是針對深冷空氣分離裝置,備有:對原料 空氣進行壓縮的原料空氣壓縮機;對該原料空氣壓縮機壓 縮後的壓縮空氣中的雜質進行去除的吸收塔單元;及,對 雜質去除後的壓縮空氣進行冷卻的主熱交換器的同時,還 備有空氣分離部,該空氣分離部具有:由上塔和下塔所形 % 成,可將上述主熱交換器冷卻後導入的空氣分離成氧和氮 的複式精餾塔,其特徵爲,備有:經過上述主熱交換器連 -7- ⑧ 1276765 • (5) 通於下塔,可將經過吸收塔單元的原料空氣的一部份導入 於下塔的第1原料空氣管路;從該第1原料空氣管路分歧 出來連通於上塔,於上述主熱交換器的上游側途中設有鼓 風機的同時,於主熱交換器的下游側途中設有膨脹葉輪, 可將經過吸收塔單元的原料空氣剩餘部份導入於上塔的第 2原料空氣管路;從上塔將製品氧氣透過主熱交換器供給 至第1需求側,於主熱交換器的下游側中途設有氧氣壓縮 φ 機的第1製品氧管路;及,從上塔的底部將製品氧氣透過 主熱交換器供給至第2需求側,在主熱交換器和上塔之間 設有液氧泵浦的第2製品氧管路。 本發明申請專利範圍第3項相關的深冷空氣分離裝置 的運轉方法所採用的手段,是於申請專利範圍第1項或第 2項當中任一項所記載的深冷空氣分離裝置的運轉方法 中,其特徵爲:從上述複式精餾塔取出的全製品氧量的一 部份,是透過上述第2製品氧管路取出做爲液態氧,將取 φ 出後的液態氧在液氧泵浦加壓成所要壓力後在主熱交換器 進行蒸發的同時進行加溫以形成爲製品氧氣;剩餘部份的 氧,是透過第2製品氧管路取出做爲氧氣,將取出後的氧 氣在主熱交換器進行加溫後在氧氣壓縮機壓縮成所要壓力 以形成爲製品氧氣。 本發明申請專利範圍第4項相關的深冷空氣分離裝置 ' 的運轉方法所採用的手段,是於申請專利範圍第3項所記 % 載的深冷空氣分離裝置的運轉方法中,其特徵爲,要將壓 力爲P ( MPaG)的製品氧氣透過上述第2製品氧管路供 -8- (6) 1276765 給至需求側時,是取出能夠獲得全製品氧量的1 6.4x P_G 8%以下氧氣量的液態氧由上述液氧泵浦來使其形成壓 縮。 〔發明效果〕 根據本發明申請專利範圍第1項、第2項相關的深冷 空氣分離裝置或第3項相關的深冷空氣分離裝置時,是將 φ 氧氣以氧氣壓縮機來進行壓縮,使製品氧氣能夠透過第1 製品氧氣管路供給至需求側。此外,是將液態氧在液氧泵 浦壓縮後,以主熱交換器來進行加溫,使製品氧氣能夠透 過第2製品氧氣管路供給至需求側。因此,根據本發明 時,是以驅動氧氣壓縮機和液氧泵浦來對需求側供給製品 氧氣,但因爲液氧泵浦的驅動力只需要比氧氣壓縮機的驅 動力還小許多的小動力即可,所以與要供給至需求側的製 品氧氣全量都是以氧氣壓縮機來進行壓縮的狀況相比,本 Φ 發明是能夠削減所要動力。另外,根據本發明申請專利範 圍第2項相關的深冷空氣分離裝置時,是可對所要壓力爲 不同的2個需求側個別供給這些需求側所要求壓力的製品 氧氣。 再加上,根據本發明申請專利範圍第4項相關的深冷 空氣分離裝置的運轉方法時,雖是透過主熱交換器來使液 態氧和原料空氣進行熱交換,以使液態氧蒸發成爲製品氧 ' 供給至需求側,但從上塔是取出能夠獲得全製品氧量的 16.4 xP^·8%以下氧氣量的液態氧。從上塔取出的液態氧 ⑧ -9- 1276765 * (7) 的量,因是被決定成所取出的量透過原料空氣的全量是可 完全蒸發的量,所以能夠邊保持著主熱交換器的溫度均衡 邊使所取出的液態氧全部蒸發。 【實施方式】 〔發明之最佳實施形態〕 以下,是邊參照第1圖所示的本發明形態1相關的深 Φ 冷空氣分離裝置模式性系統圖來邊說明該深冷空氣分離裝 置。 本發明形態1相關深冷空氣分離裝置,如第1圖所 示,備有原料空氣供給管路1,途中設有:對透過未圖示 濾淨器吸引過來的原料空氣進行壓縮的原料空氣壓縮機 1 a,及,對該原料空氣壓縮機1 a壓縮後的壓縮空氣中的 雜質進行去除的吸收塔單元1 b。從該原料空氣供給管路1 分歧形成有第1原料空氣管路3,該第1原料空氣管路3 φ 是透過主交換器2連通於要形成爲下述構成的空氣分離部 1 〇。即,在吸收塔單元1 b去除雜質後的壓縮空氣的一部 份,是形成爲,流動於第1原料空氣管路3,在主熱交換 器2冷卻後導入空氣分離部1 0。 另外,從該原料空氣供給管路1分歧形成有第2原料 空氣管路4,該第2原料空氣管路4是經由主交換器2連 通於空氣分離部1 〇。即,在吸收塔單元1 b去除雜質後的 ' 壓縮空氣剩餘部份,是形成爲,透過第2原料空氣管路4 導入空氣分離部1 〇。在該第2原料空氣管路4的分歧部 -10- ⑧ 1276765 - (8) 和主熱交換器2之間,裝設有對原料空氣進行壓縮的鼓風 機4a及對該鼓風機4a壓縮後的原料空氣進行冷卻的冷卻 器4b。再加上,在該第2原料空氣管路4的主熱交換器2 和空氣分離部1 〇之間設有膨脹葉輪4c,構成爲是對空氣 分離部1 〇產生其所需要的冷空氣。 另一方面,在空氣分離部10至未圖示的製品需求之 間,要供給將製品氧氣的第1製品氧氣管路5,是經由主 φ 熱交換器2、氧氣壓縮機5形成連通著。再加上,來自於 空氣分離部1 〇的第2製品氧氣管路6,是經由液氧泵浦 6a、主熱交換器2匯流於該第1製品氧氣管路5的氧氣壓 縮機5 a的下游側。 上述空氣分離部1 〇,備有:由上塔1 1 a和配設在該 上塔1 1 a底部內部的冷凝器1 1 b及該上塔1 1 a下側的下塔 1 1 c所形成的複式精餾塔Π ;及,過冷卻器1 2。於複式 精餾塔1 1的下塔1 1 c的底部附近連通著上述第1原料空 φ 氣管路3的同時,於上塔1 1 a的上下方向中程附近連通上 述第2原料空氣管路4。此外,上述第2製品氧氣管路6 的底端部是連接於複式精餾塔1 1的上塔 Π a底部。另 外,從上述複式精餾塔1 1的上塔1 1 a的頂部,經由過冷 卻器1 2來對未圖示的氮需求側供給製品氮氣GN的製品 氮管路7是經由主熱交換器2形成連通著。再加上,廢氮 管路8是從複式精餾塔1 1的上塔1 1 a上部附近,經由過 • 冷卻器12,連通於上述吸收塔單元1 b等。該廢氮管路 8,主要是爲了要使吸收劑再生而運作成是對吸收塔單元 -11 - ⑧ 1276765 . Ο) 1 b供給廢氮氣WN。另,使吸收劑再生後的廢氮氣WN, 透過未圖示的消音器放出在大氣中。 接著,從底部H c使第1管路1 3經由過冷卻器1 2連 通於上塔1 1 a,構成爲是將下塔1 1 c底部氧濃厚的液態空 氣過冷卻後導入上塔Π a。此外,第2管路1 4是從下塔 1 1 c的上述第1管路1 3的連通部上側經由過冷卻器1 2連 通於上塔Π a的上述第1管路1 3的連通部上側,構成爲 φ 是將下塔11 e中間位置的氮濃厚的液態空氣過冷卻後導入 上塔1 1 a。再加上,第3管路是從下塔1 1 c的頂部經由過 冷卻器1 2連通於上塔1 1 a的頂部附近,構成爲是將下塔 1 1 c上部位置的高純度氮過冷卻後導入上塔u a。 透過上述第1原料空氣管路3導入在下塔1 1 c底部的 冷卻後的原料空氣GA,是於塔內上昇期間逐漸變成氮濃 厚’到達下塔1 1 c頂部時就成爲高純度氮。另外,導入在 上塔1 1 a內的氧濃厚液態空氣,是邊在塔內往下流邊逐漸 • 使氧冷凝’到達底部時就成爲高純度液態氧,積蓄在該上 塔1 1 a的底部。另,圖中以一點虛線表示來包圍著住熱交 換器2、膨脹葉輪4c、液氧泵浦6a及空分離部1 〇的是爲 冷心盒9。 以下,是邊參照第1圖來說明本發明形態1相關的深 冷空氣分離裝置的作用形態。即,在原料空氣壓縮機i & 被壓縮的同時在吸引塔單元lb去除雜質後的原料空氣的 一部份’是流入第1原料空氣管路3,在主熱交換器2冷 卻至約沸點溫度後導入空氣分離部1 0的下塔1 1 c的底 •12- (10) 1276765 部。原料空氣剩餘部份,是流入第2原料空氣管路4,在 鼓風機4a昇壓,在冷卻器4b冷卻後接著在主熱交換器2 冷卻然後導入上塔11a上下方向的中程。導入在空氣分離 部1 〇的複式精餾塔1 1內的原料空氣是被精餾,從上塔 1 1 a的底部透過第2製品氧管路6導出液態氧LO,從上 塔1 1 a的下部透過第1製品氧管路5導出氧氣GO。接 著,從上塔1 1 a的頂部透過製品氮管路7導出製品氮氣 _ GN。 根據本發明形態1相關的深冷空氣分離裝置時,是針 對氧氣壓縮機5壓縮後的氧氣,將液氧泵浦6A壓縮後的 液態氧LO透過主熱交換器2來與原料空氣進行熱交換形 成蒸發,然後使蒸發後的氧氣匯流,透過第1製品氧管路 5就能夠將製品氧供給至需求側。不過,從第2製品氧管 路 6取出做爲液態氧 LO的量,在製品氧氣的壓爲 P MPaG時,其是爲全製品氧量的16.4 χρί·8%以下。更詳 φ 細地說,液態氧LO的量,因是設定成透過原料空氣的全 量其是可完全蒸發的量,所以能夠邊保持著主熱交換器溫 度均衡邊使所取出的液態氧LO的全量完全蒸發。因此, 根據本形態1相關的深冷空氣分離裝置時,是與製品氧氣 壓力限定在〇.〇2〜0.08MpaG的習知例相關的深冷空氣分 離裝置不同,對需求側是能夠提供相當高的高壓,並且任 意壓力的製品氧氣。 此外,根據本形態1相關的深冷空氣分離裝置時,如 上述,是以驅動氧氣壓縮機5 a和液氧泵浦6b來對需求側 -13- ⑤ (11) 1276765 供給製品氧氣,但因爲液氧泵浦6b的驅動力只是需要比 氧氣壓縮機的驅動力5 a還小許多的小動力即可’所以與 要供給至需求側的製品氧氣全量都需以氧氣壓縮機來進行 壓縮的習知例相比,本形態1相關的深冷空氣分離裝置是 能夠削減所要動力。 以下,是針對本形態1相關的丨朱冷空氣分離裝置所要 動力進行更具體性的說明。 ϋ 例如:製品氧氣的所要流量和壓力分別爲 1 0,000Nm3/h、2.5MpaG時,就習知例相關的深冷空氣分 離裝置而言,是將l〇,〇〇〇Nm3/h的氧氣以氧氣壓縮機壓縮 至所要壓力2.5MpaG,然後將其做爲製品氧氣來供給至需 求側。氧氣壓縮機壓縮的所要動力,是每1 Nm3/h的氧氣 就需要約〇.15kW的動力,所以於該狀況時是需要1,500 kW的動力。 另一方面,就本發明形態1相關的深冷空氣分離裝置 φ 而言,如上述,是從上塔1 1 a取出能夠獲得全製品氧量 16.4XP + 8%以下=7.9%以下例如是5%氧氣量5 00Nm3/h的 液態氧(以下,爲簡易表現是稱爲5 00Nm3/h的液態氧, 不管液態氧量爲多少都是使用相同表現方式)L0,然後 從上塔11a取出剩餘的9,500 Nm3/h氧氣GO。該9,500 Nm3/h氧氣GO,與習知例相同是在氧氣壓縮機5a壓縮至 2.5MpaG。接著,500Nm3/h的液態氧LO是由液氧栗浦 6A壓縮至2.5MpaG後流動在第2製品氧管路6,然後流 入第1製品氧管路5的氧氣壓縮機5 a的下游側,與氧氣 -14- (12) 1276765 壓縮機5 a壓縮後的氧氣匯流後供給至需求側。 於該狀況,因利用氧氣壓縮機5 a來進行壓縮的氧氣 量爲9,5 00 Nm3/h,所以氧氣壓縮機5a的所要動力爲 l,425kW。另外,是需要有對500Nm3/h的液態氧進行加 壓的液氧泵浦6a的動力’但液體和氣體相較其密度是非 常大而體積是小,所以將液態氧加壓至2.5MpaG爲止的 所需的動力是每IN m3/h的液態氧只要約0.002 kW的動 φ 力就夠,所以液氧泵浦6 a的所要動力爲1 kW。因此,氧 壓縮所需的動力是爲l,426kW。如上述,根據本發明時, 只要追加設置較氧氣壓縮機爲低成本的液氧栗浦6a及其 周邊的配管,就能夠廉價提供任意壓力的製品氧氣。結論 是’當製品氧氣的所要流量和壓力分別爲l〇,〇〇〇Nm3/h、 2.5MpaG時,是能夠減少約74 kw的動力,電費假設爲 10曰圓/ kWh時,則一年就可節省約640萬日圓的電費。 其次’是邊參照第2圖所示的本發明形態2相關的深 • 冷空氣分離裝置模式性系統圖來邊說明該深冷空氣分離裝 置。另’本發明形態2相關深冷空氣分離裝置與上述形態 1相關的涂冷空氣分離裝置不同之處,是在於壓力不同的 製品氧氣需求側爲2件,而主要構成則完全相同。因此, 針封其不同之處是以同一構成及具有同一功能的構成標有 _ 同一圖號,並且以同一名稱來進行說明。 本發明形恶2相關的深冷空氣分離裝置,在比較第2 圖和第1圖形態1相關的深冷空氣分離裝置模式性系統圖 後目匕夠谷易理解到宜曰丨塞成择、 ^ 〇 ^,r ^ ^ ^ w 土」具疋構成爲,弟2製品氧管路6在第1 -15- (13) 1276765 製品氧管路5的氧氣壓縮機5 a的下側是形成爲不匯 以使壓力不同的製品氧氣能夠透過第1製品氧管路5 至未圖示的需求側2,透過第2製品氧管路ό供給至 示的需求側1。 根據本發明形態2相關的深冷空氣分離裝置時 如:製品氧氣的所要流量和壓力是有2種類’對需求 是供給1,〇 〇 〇 N m3 / h、1 · 5 M p a G的製品氧氣,對需求側 B 供給9,0 0 0 N m3 / h、2 · 5 M p a G的製品氧氣,於如此狀況 能夠發揮最佳效果。 例如:於習知例的狀況,是設置2種類的氧氣 機,運轉成是以第1氧氣壓縮機來將i〇,〇〇〇Nm3/h的 壓縮至1.5MpaG,當中的1,〇〇〇Nm3/h是做爲製品氧 給至需求側1。接著’剩餘的9,000Nm3/h是以第2 壓縮機來壓縮至2.5MpaG以做爲製品氧氣供給至需 2。於該狀況,因需要2種類的氧氣壓縮機’所以可 φ 明白是對設備本不利。此外’可以想得到的運轉方法 以1種類的氧氣壓縮機來將l〇,〇〇〇Nm3/h的氧氣壓 2.5MpaG,當中的9,000Nm3/h是做爲製品氧氣供給至 側2,將剩餘的l,〇〇〇Nm3/h減壓至1 .5MpaG以做爲 氧氣供給至需求側1。然而,對於1 · 5 M p a G即可的需 2因是將壓縮成2.5 MpaG的氧氣減壓後來做爲製品氧 給,所以可淸楚明白是對消耗動力不利。 相對於上述習知例,根據形態2相關的深冷空氣 裝置時,l,〇〇〇Nm3/h的液態氧是從第2製品氧管路 流, 供給 未圖 ,例 側1 2是 下就 壓縮 氧氣 氣供 氧氣 求側 淸楚 是, 縮至 需求 製品 求側 氣供 分離 6取 -16- (14) 1276765 出,9,000Nm3/h的氧氣是從第1製品氧管路5取出。該 9,000Nm3/h的氧氣,與習知例相同,是以氧氣壓縮機5a 壓縮至所要的2.5 MpaG,然後做爲製品氧使其透過第1製 品氧管路5供給至需求側2。 另一方面,l,〇〇〇Nm3/h的液態氧是以液氧泵浦6a壓 縮至所要的1 .5MpaG,以主熱交換器2來使其蒸發、加 溫,然後做爲製品氧使其透過第2製品氧管路6供給至需 φ 求側1。如上述,根據本發明形態2相關的深冷空氣分離 裝置時,於製品氧氣的所要流量和壓力爲2種類的狀況, 是不會導致設備成本增加、消耗動力增加,能夠達到可對 應需求側要求的最佳效果。 於上述實施形態1、2中,是以構成爲對需求側能夠 供給製品氧氣和製品氮的深冷空氣分離裝置爲例進行了說 明。但是,本發明的技術性思想也可應用在並非以製品氮 來做爲製品的製造裝置上,並不限定於是應用在上述實施 φ 形態1、2相關的深冷空氣分離裝置的用途上。 【圖式簡單說明】 第1圖爲本發明形態1相關的深冷空氣分離裝置模式 性系統圖。 第2圖爲本發明形態2相關的深冷空氣分離裝置模式 性系統圖。 第3圖爲習知例相關圖,表示備有葉輪體式氣體鼓風 * 機的深冷空氣分離裝置電路構成圖。 【主要元件符號說明】 -17- ⑧ (15) (15)1276765 1 :原料空氣供給管路 1 a :原料空氣壓縮管路 1 b :吸收塔單元 2 :主熱交換器 3 :第1原料空氣管路 4 :第2原料空氣管路 4a :鼓風機 4b :冷卻器 5 :第1製品氧管路 5 a :氧氣壓縮機 6 :第2製品氧管路 6 a :液氧泵浦 7 :製品氮管路 8 :廢氮管路 9 ·冷心盒 1 〇 :空氣分離部 1 1 :複式精餾塔 1 1 a :上塔 1 1 b :冷凝器 1 1 c :下塔 1 2 :過冷卻器 1 3 :第1管路 1 4 :第2管路 1 5 :第3管路 -18J276765 (1) IX. Description of the Invention [Technical Field] The present invention relates to a cryogenic air separation device and a method of operating the same, and more particularly to a product that can provide a higher pressure to the demand side, and A cryogenic air separation device capable of suppressing an increase in running cost and a method of operating the same. • [Prior Art] In the industrial field such as the steel industry, gaseous oxygen (product oxygen) is used as a material or raw material, and the supply source is a cryogenic air separation device. In the case of such a cryogenic air separation device, generally, the oxygen of the product is taken out from the upper tower at a pressure of 0.01 to 〇. 2MpaG in the upper column of the double-type rectification column, and the oxygen after the removal is pressurized to a desired pressure. Supply to the demand side. However, the oxygen required to pressurize the oxygen compressor to the desired pressure is too large, so reducing the required power becomes a strong requirement of the industry. A proposal for reducing the power required for an oxygen compressor is known, for example, as described below. Hereinafter, the cryogenic air separation device according to the conventional example will be described with reference to the configuration of the cold air: gas separation device control circuit provided with the impeller type gas blower shown in Fig. 3. That is, the cryogenic air separation device related to the conventional example has a cold box 5 5 having a raw material air compressor 5 1 for compressing the raw material air, and a raw air compressor 5 for the raw material. The absorption tower which is pretreated at the same time as the raw material air cooled by the front condensing device 52 is compressed, and the air is used as a raw material. The air after the pretreatment of the absorption tower unit 53 is used as a raw material. Feeding into the rectification column 5 7 and 5 8 for continuously producing nitrogen or oxygen from the feed air to be fed, and insulating and expanding the feed air to generate cold air into the above The expansion impeller 56 of the fractionator and the cryogenic air separation unit are applied to a plant that requires high pressure of the product gas such as product oxygen to be used as a high pressure by the operating pressure of the rectification column 57. The rectification φ column 'restilling the product gas (e.g., product oxygen) in a cryogenic state is composed of a lower column (medium pressure column) 58 and an upper column (low pressure column) 57, both of which are configured to be The condensers 90 exchange heat with each other. In the main condenser 90, nitrogen gas is supplied from the upper portion of the lower column 58, and the liquefied nitrogen returns to the upper portion of the lower column 58. According to the cryogenic air separation apparatus according to the conventional example, the product gas (for example, product oxygen) 89 of about 0.03 MPaG is taken out from the upper tower (low pressure tower) 57 in a gaseous state, and the temperature is restored by the air heat exchanger 63. The resistance fan of the expansion impeller 56 on the normal temperature side (one side) is used as a gas blower 66 for boosting the product φ gas (for example, product oxygen) 89. That is, the gas blower 66 is a pressure that receives the rotational force of the expansion impeller 56 so that the pressure of the gas to be a product (for example, product oxygen) can be formed at a pressure level higher than the operating pressure of the upper tower 57 to supply the product gas 8 9 boost to a pressure ratio of 1 · 3 6 ~ 1 · 6 degrees. As described above, the pressure of the gas to be a product (e.g., product oxygen) is required to be formed into a pressure level higher than the operating pressure of the upper column 57, and is taken out from the upper column 57 in a gaseous state. a product gas (for example, product oxygen), and the product gas after the extraction is pressurized by a gas 5 - (3) 1276765 blower 66 provided on one side of the expansion impeller 56 for generating cold air to make the product gas. (for example, product oxygen) 89 is sent out at the specified pressure. Further, in Fig. 3, the reference numeral 62 indicated on the right side of the rectification column is a supercooler (see, for example, Patent Document 1). [Patent Document 1] Japanese Laid-Open Patent Publication No. 2 003 _ 1 667 8 3 [Disclosed] [Problems to be Solved by the Invention] p According to the cryogenic air separation device according to the conventional example, the oxygen of the product taken out from the cold box The pressure is limited to 0.02~0.08 GPaG. Therefore, the cryogenic air separation device is a very effective device when the required pressure of the product oxygen on the demand side is the same as the pressure. However, if more than this pressure is required, the cryogenic air separation unit cannot be used. Of course, if an oxygen compressor is provided, the oxygen of the higher pressure product can be supplied to the demand side, but as a result, the oxygen compressor requires a large amount of power energy, and the operating cost of the cryogenic air separation unit does not conform to the φ economy. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a cryogenic air separation apparatus capable of providing a higher pressure product oxygen on a demand side and suppressing an increase in running cost and a method of operating the same. [Means for Solving the Problem] In order to solve the above problems, the means for the cryogenic air separation device according to the first aspect of the present invention is directed to a cryogenic air separation device, which is provided with: compressing raw material air Raw material air compressor; an absorption tower unit for removing impurities in compressed air compressed by a raw material air compressor; and a main heat exchanger for cooling compressed air after impurity removal At the same time, an air separation unit is provided, the air separation unit having: a double rectification tower formed by an upper tower and a lower tower, which can separate air introduced by cooling the main heat exchanger into oxygen and nitrogen, and is characterized by Provided that: the first main heat exchanger is connected to the lower tower, and a part of the raw material air passing through the absorption tower unit is introduced into the first raw material air line of the lower tower; from the first Φ raw material air line The branch is connected to the upper tower, and a blower is provided on the upstream side of the main heat exchanger, and an expansion impeller is provided on the downstream side of the main heat exchanger, which can be absorbed. The remaining part of the raw material air of the tower unit is introduced into the second raw material air line of the upper tower; the oxygen of the product is supplied from the upper tower to the demand side through the main heat exchanger, and the oxygen compressor is provided on the downstream side of the main heat exchanger. a first product oxygen line; and, from the bottom of the upper tower, the product oxygen is supplied to the demand side through the main heat exchanger, and a liquid oxygen pump is provided between the main heat exchanger and the upper tower, to be connected to the above 1 product oxygen line φ The second product oxygen line on the downstream side of the oxygen compressor. The cryo-air separation device according to the second aspect of the present invention is directed to a cryogenic air separation device, comprising: a raw material air compressor for compressing raw material air; and compressing the raw material air compressor An absorption tower unit for removing impurities in the compressed air; and a main heat exchanger for cooling the compressed air after the impurities are removed, and an air separation unit having: an upper tower and a lower portion A double-type distillation column in which the air introduced by the cooling of the main heat exchanger is separated into oxygen and nitrogen, and is characterized in that: the main heat exchanger is connected to the -7-81266675 ( 5) passing through the lower tower, a part of the raw material air passing through the absorption tower unit may be introduced into the first raw material air line of the lower tower; the first raw material air line is branched and connected to the upper tower, and the main An air blower is provided on the upstream side of the heat exchanger, and an expansion impeller is provided on the downstream side of the main heat exchanger, and the remaining portion of the raw material air passing through the absorption tower unit can be introduced into the upper tower. 2 a raw material air line; the product oxygen is supplied from the upper tower to the first demand side through the main heat exchanger, and the first product oxygen line of the oxygen compression φ machine is provided in the middle of the downstream side of the main heat exchanger; At the bottom of the upper tower, product oxygen is supplied to the second demand side through the main heat exchanger, and a liquid oxygen pumped second product oxygen line is provided between the main heat exchanger and the upper tower. The method of operating the cryogenic air separation apparatus according to any one of the first or second aspect of the invention is the method of operating the cryogenic air separation apparatus according to any one of claims 1 to 2 The method is characterized in that: part of the oxygen content of the whole product taken out from the double-type rectification column is taken out as liquid oxygen through the oxygen line of the second product, and liquid oxygen in the liquid oxygen pump is taken out After the pressure is applied to the desired pressure, the main heat exchanger is heated while being heated to form oxygen as a product; the remaining part of oxygen is taken out as oxygen through the oxygen line of the second product, and the oxygen after removal is After the main heat exchanger is warmed, the oxygen compressor is compressed to a desired pressure to form oxygen in the product. The method for operating the cryogenic air separation apparatus of the fourth aspect of the present invention is characterized in that the method of operating the cryogenic air separation apparatus according to the third aspect of the patent application is characterized in that When the oxygen of the product with a pressure of P (MPaG) is supplied to the demand side through the above-mentioned second product oxygen line for -8-(6) 1276765, it is taken out to obtain the full product oxygen content of 6.4x P_G 8% or less. The oxygen oxygen in the amount of oxygen is pumped by the above liquid oxygen to form a compression. [Effect of the Invention] According to the cryogenic air separation device according to the first or second aspect of the present invention, or the cryogenic air separation device according to the third aspect, the φ oxygen is compressed by the oxygen compressor. The product oxygen can be supplied to the demand side through the first product oxygen line. Further, after the liquid oxygen is compressed by the liquid oxygen pump, the main heat exchanger is used for heating, so that the product oxygen can be supplied to the demand side through the second product oxygen line. Therefore, according to the present invention, the oxygen gas is supplied to the demand side by driving the oxygen compressor and the liquid oxygen pump, but since the driving force of the liquid oxygen pump only needs a small power smaller than the driving force of the oxygen compressor. Therefore, compared with the case where the total amount of oxygen to be supplied to the demand side is compressed by an oxygen compressor, the present invention can reduce the required power. Further, according to the cryogenic air separation device according to the second aspect of the present invention, it is possible to supply the oxygen of the product required for the demand side to the two demand sides having different required pressures. Further, according to the operation method of the cryogenic air separation apparatus according to the fourth aspect of the present application, the liquid oxygen and the raw material air are exchanged by the main heat exchanger to evaporate the liquid oxygen into the product. Oxygen' is supplied to the demand side, but from the upper tower, liquid oxygen having an oxygen content of 16.4 x P^·8% or less which can obtain the total product oxygen amount is taken out. The amount of liquid oxygen 8 -9 - 1276765 * (7) taken from the upper tower is determined to be the amount that is taken out. The total amount of air passing through the raw material is completely evaporable, so that the main heat exchanger can be maintained. The temperature equalization edge causes all the taken out liquid oxygen to evaporate. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the cryogenic air separation device will be described with reference to a schematic diagram of a deep Φ cold air separation device according to the first aspect of the present invention shown in Fig. 1. In the cryogenic air separation apparatus according to the first aspect of the present invention, as shown in Fig. 1, a raw material air supply line 1 is provided, and a raw material air compression for compressing the raw material air sucked through a filter (not shown) is provided in the middle. The machine 1a and the absorption tower unit 1b for removing impurities in the compressed air compressed by the raw material air compressor 1a. The first raw material air line 3 is formed in a divergent manner from the raw material air supply line 1, and the first raw material air line 3? is transmitted through the main exchanger 2 to the air separation unit 1a to be formed into the following configuration. That is, a part of the compressed air after the impurity removal by the absorption tower unit 1 b is formed so as to flow in the first raw material air line 3, and after the main heat exchanger 2 is cooled, the air separation unit 10 is introduced. Further, a second raw material air line 4 is formed branched from the raw material air supply line 1, and the second raw material air line 4 is connected to the air separating unit 1 via the main exchanger 2. That is, the remaining portion of the compressed air after the impurities are removed by the absorption tower unit 1b is formed to be introduced into the air separation unit 1 through the second raw material air line 4. A blower 4a that compresses the raw material air and a raw material that is compressed by the blower 4a are disposed between the branching portions -10-8 1276765-(8) of the second raw material air line 4 and the main heat exchanger 2. The cooler 4b in which the air is cooled. Further, an expansion impeller 4c is provided between the main heat exchanger 2 of the second raw material air line 4 and the air separation unit 1A, and is configured to generate cold air required for the air separation unit 1 to be generated. On the other hand, between the air separation unit 10 and the product (not shown), the first product oxygen line 5 for supplying oxygen to the product is connected via the main φ heat exchanger 2 and the oxygen compressor 5. Further, the second product oxygen line 6 from the air separation unit 1 is the oxygen compressor 5a that is connected to the first product oxygen line 5 via the liquid oxygen pump 6a and the main heat exchanger 2. Downstream side. The air separation unit 1 is provided with an upper tower 1 1 a and a condenser 1 1 b disposed inside the bottom portion of the upper tower 1 1 a and a lower tower 1 1 c disposed on the lower side of the upper tower 1 1 a. Forming a duplex distillation column; and, a subcooler 12. The first raw material air φ gas line 3 is connected to the bottom of the lower tower 1 1 c of the double rectification column 1 1 , and the second raw material air line is communicated in the vicinity of the upper and lower directions of the upper tower 1 1 a. 4. Further, the bottom end portion of the second product oxygen line 6 is connected to the bottom of the upper column Π a of the double rectification column 1 1 . Further, from the top of the upper column 1 1 a of the double rectification column 1 1 , the product nitrogen line 7 for supplying the product nitrogen gas GN to the nitrogen demand side (not shown) via the subcooler 12 is via the main heat exchanger. 2 forms a connection. Further, the waste nitrogen line 8 is connected to the absorption tower unit 1b or the like from the vicinity of the upper portion of the upper column 1 1 a of the double rectification column 1 through the supercooler 12. The waste nitrogen line 8, mainly for the purpose of regenerating the absorbent, operates to supply the waste nitrogen unit WN to the absorption tower unit -11 - 8 1276765 . Further, the waste nitrogen gas WN after the regeneration of the absorbent is released into the atmosphere through a muffler (not shown). Next, the first line 13 is connected to the upper tower 1 1 a via the subcooler 12 from the bottom H c , and is configured to supercool the liquid air having a thick bottom at the bottom of the lower tower 1 1 c and then introduce it into the upper tower Π a . Further, the second conduit 14 is a communication portion of the first conduit 13 that communicates with the upper tower Π a from the upper side of the communication portion of the first conduit 13 of the lower tower 1 1 c via the subcooler 1 2 . On the upper side, φ is configured to supercool the nitrogen-rich liquid air at the intermediate position of the lower tower 11 e and then introduce it into the upper tower 1 1 a. Further, the third conduit is connected from the top of the lower tower 1 1 c to the vicinity of the top of the upper tower 1 1 a via the subcooler 12, and is configured to pass the high-purity nitrogen at the upper portion of the lower tower 1 1 c. After cooling, it is introduced into the upper tower ua. The cooled raw material air GA introduced into the bottom of the lower column 1 1 c through the first raw material air line 3 is gradually increased to a nitrogen concentration during the rise in the column, and becomes high-purity nitrogen when it reaches the top of the lower column 1 1 c. In addition, the oxygen-rich liquid air introduced into the upper tower 1 1 a is gradually flowing downward in the tower. • When the oxygen condenses to the bottom, it becomes high-purity liquid oxygen, which is accumulated at the bottom of the upper tower 1 1 a. . Further, in the figure, the heat exchanger 2, the expansion impeller 4c, the liquid oxygen pump 6a, and the air separation unit 1 are surrounded by a dotted line, which is the cold box 9. In the following, the mode of operation of the cryogenic air separation apparatus according to the first aspect of the present invention will be described with reference to Fig. 1. That is, a portion of the raw material air after the raw material air compressor i & is compressed while the impurity is removed from the suction tower unit 1b is flowing into the first raw material air line 3, and is cooled to about the boiling point in the main heat exchanger 2. After the temperature, it is introduced into the bottom 12-(10) 1276765 of the lower tower 1 1 c of the air separation unit 10 . The remaining portion of the raw material air flows into the second raw material air line 4, is pressurized by the blower 4a, is cooled by the cooler 4b, is then cooled by the main heat exchanger 2, and is introduced into the middle of the vertical direction of the upper tower 11a. The raw material air introduced into the double rectification column 1 1 of the air separation unit 1 is rectified, and the liquid oxygen LO is led from the bottom of the upper column 1 1 a through the second product oxygen line 6 from the upper tower 1 1 a The lower portion is supplied with oxygen GO through the first product oxygen line 5. Next, the product nitrogen _ GN is withdrawn from the top of the upper column 1 1 a through the product nitrogen line 7. According to the cryogenic air separation apparatus according to the first aspect of the present invention, the liquid oxygen compressed by the liquid oxygen pump 6A is transmitted through the main heat exchanger 2 to exchange heat with the raw material air for the oxygen compressed by the oxygen compressor 5. Evaporation is formed, and then the vaporized oxygen is merged, and the product oxygen can be supplied to the demand side through the first product oxygen line 5. However, the amount of liquid oxygen LO taken out from the second product oxygen pipe 6 is 16.4 χρί·8% or less of the total product oxygen amount when the product oxygen pressure is P MPaG. More specifically φ, the amount of liquid oxygen LO is set to be the amount that can be completely evaporated by the total amount of air passing through the raw material, so that the liquid oxygen LO taken out can be maintained while maintaining the temperature balance of the main heat exchanger. The whole amount is completely evaporated. Therefore, the cryogenic air separation device according to the first aspect of the present invention is different from the cryogenic air separation device associated with the conventional example in which the oxygen pressure of the product is limited to 〇2 to 0.08 MPaG, and the demand side can be provided relatively high. The high pressure and optional pressure of the product oxygen. Further, according to the cryogenic air separation device of the present aspect 1, as described above, the oxygen compressor 5a and the liquid oxygen pump 6b are driven to supply the product side to the demand side -13 - 5 (11) 1276765, but because The driving force of the liquid oxygen pump 6b is only a small power that is much smaller than the driving force of the oxygen compressor of 5 a. Therefore, the oxygen of the product to be supplied to the demand side needs to be compressed by the oxygen compressor. As is well known, the cryogenic air separation device according to the first aspect can reduce the required power. Hereinafter, the power required for the 丨朱冷空气分离装置 according to the first aspect will be described more specifically. ϋ For example, when the required flow rate and pressure of the product oxygen are 10,000 Nm3/h and 2.5 MPaG, respectively, for the cryogenic air separation device related to the conventional example, the oxygen of l〇, 〇〇〇Nm3/h is The oxygen compressor is compressed to a desired pressure of 2.5 MPa and then supplied as product oxygen to the demand side. The required power for oxygen compressor compression is about 1515 kW per 1 Nm3/h of oxygen, so 1,500 kW is required in this condition. On the other hand, in the cryogenic air separation apparatus φ according to the first aspect of the present invention, as described above, it is possible to obtain the total product oxygen amount of 16.4 XP + 8% or less = 7.9% or less, for example, 5 from the upper tower 1 1 a. % oxygen with a nitrogen content of 5 00 Nm3/h (hereinafter, a simple expression is a liquid oxygen called 500 Nm3/h, regardless of the amount of liquid oxygen, the same expression is used) L0, and then the remaining one is taken out from the upper tower 11a. 9,500 Nm3/h oxygen GO. The 9,500 Nm3/h oxygen GO, as in the conventional example, is compressed to 2.5 MPaG in the oxygen compressor 5a. Next, the liquid oxygen LO of 500 Nm 3 /h is compressed by the liquid oxygen pump 6A to 2.5 MpaG, flows to the second product oxygen line 6, and then flows into the downstream side of the oxygen compressor 5 a of the first product oxygen line 5, It is supplied to the demand side after confluence of oxygen compressed by the oxygen -14- (12) 1276765 compressor 5 a. In this case, since the amount of oxygen compressed by the oxygen compressor 5a is 9,500 Nm3/h, the required power of the oxygen compressor 5a is 1,425 kW. In addition, it is necessary to have the power of the liquid oxygen pump 6a for pressurizing liquid oxygen of 500 Nm3/h 'but the liquid and gas phases are very large and the volume is small, so the liquid oxygen is pressurized to 2.5 MpaG. The required power is that the liquid oxygen per IN3/h is only about 0.002 kW of moving force, so the required power for liquid oxygen pumping 6 a is 1 kW. Therefore, the power required for oxygen compression is 1,426 kW. As described above, according to the present invention, it is possible to inexpensively supply the oxygen of the product at any pressure as long as the liquid oxygen pump 6a and the piping around it are provided at a lower cost than the oxygen compressor. The conclusion is that when the required flow rate and pressure of oxygen in the product are l〇, 〇〇〇Nm3/h, 2.5MpaG, it is able to reduce the power of about 74 kW, and the electricity cost is assumed to be 10 曰 round / kWh, then one year It can save about 6.4 million yen in electricity bills. Next, the cryogenic air separation device will be described with reference to a schematic diagram of a deep-cooling air separation device according to the second aspect of the present invention shown in Fig. 2. Further, the cryogenic air separation apparatus according to the aspect 2 of the present invention differs from the cold air separation apparatus of the above aspect 1 in that the oxygen demand side of the product having different pressures is two, and the main components are completely the same. Therefore, the difference between the pin seals is that the same structure and the same function are marked with the same figure, and the same name is used for explanation. The cryo-air separation device related to the shape and the like of the present invention, after comparing the schematic system diagrams of the cryogenic air separation device related to the second embodiment and the first aspect of the first aspect, is easy to understand that it is suitable for the selection. ^ 〇^,r ^ ^ ^ w soil is configured to form the lower side of the oxygen compressor 6 of the first -15-(13) 1276765 product oxygen line 5 as The product oxygen that does not meet the pressure can be supplied to the demand side 1 of the display through the first product oxygen line 5 through the first product oxygen line 5 to the demand side 2 (not shown). According to the cryogenic air separation device according to the aspect 2 of the present invention, for example, the desired flow rate and pressure of the product oxygen are two types of products: the demand for the supply of 1, 〇〇〇N m3 / h, 1 · 5 M pa G of product oxygen The product oxygen of 9,0 0 0 N m3 / h, 2 · 5 M pa G is supplied to the demand side B, and the best effect can be obtained in such a situation. For example, in the case of the conventional example, two types of oxygen machines are installed, and the operation is such that the first oxygen compressor compresses i〇, 〇〇〇Nm3/h to 1.5 MpaG, of which 1, Nm3/h is supplied as oxygen to the demand side 1 as product. Then, the remaining 9,000 Nm3/h is compressed to 2.5 MPa by the second compressor to supply oxygen to the product. In this case, since two types of oxygen compressors are required, it is understood that it is disadvantageous to the equipment. In addition, the operation method that can be conceived is to use 1 type of oxygen compressor to treat l〇, 〇〇〇Nm3/h of oxygen pressure 2.5MpaG, of which 9,000Nm3/h is supplied as product oxygen to side 2, and the remaining l, 〇〇〇Nm3/h decompressed to 1.5MpaG as oxygen supply to demand side 1. However, for 1 · 5 M p a G, the need for 2 is to reduce the oxygen to 2.5 MpaG and then use it as a product oxygen, so it can be understood that it is unfavorable to consume power. With respect to the above conventional example, according to the cryogenic air device according to the aspect 2, the liquid oxygen of 〇〇〇Nm3/h flows from the second product oxygen line, and the supply is not shown, and the example side 1 2 is the next Compressed oxygen gas for oxygen side-to-side is reduced to the demanded product for side gas supply separation 6 take -16 - (14) 1276765 out, 9,000 Nm3 / h of oxygen is taken out from the first product oxygen line 5. The 9,000 Nm3/h of oxygen, as in the conventional example, is compressed by the oxygen compressor 5a to the desired 2.5 MpaG, and then supplied as oxygen to the demand side 2 through the first product oxygen line 5. On the other hand, l, 〇〇〇Nm3 / h of liquid oxygen is compressed by the liquid oxygen pump 6a to the desired 1.5MpaG, the main heat exchanger 2 to evaporate, warm, and then as product oxygen It is supplied to the desired φ side 1 through the second product oxygen line 6. As described above, according to the cryogenic air separation device according to the second aspect of the present invention, the required flow rate and pressure of the oxygen in the product are two types, which does not cause an increase in equipment cost and an increase in power consumption, and can meet the demand side requirement. The best results. In the first and second embodiments, the cryogenic air separation device configured to supply the product oxygen and the product nitrogen to the demand side has been described as an example. However, the technical idea of the present invention can also be applied to a manufacturing apparatus that does not use a product nitrogen as a product, and is not limited to the use of the cryogenic air separation apparatus related to the above-described φ forms 1 and 2. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic system diagram of a cryogenic air separation apparatus according to a first aspect of the present invention. Fig. 2 is a schematic system diagram of a cryogenic air separation apparatus according to a second aspect of the present invention. Fig. 3 is a diagram showing the circuit configuration of a cryogenic air separation device equipped with an impeller type gas blasting machine. [Explanation of main component symbols] -17- 8 (15) (15) 1277665 1 : Raw material air supply line 1 a : Raw material air compression line 1 b : Absorption tower unit 2 : Main heat exchanger 3 : 1st raw material air Line 4: second raw material air line 4a: blower 4b: cooler 5: first product oxygen line 5a: oxygen compressor 6: second product oxygen line 6a: liquid oxygen pump 7: product nitrogen Pipe 8: Waste nitrogen line 9 · Cold box 1 〇: Air separation unit 1 1 : Double rectification column 1 1 a : Upper tower 1 1 b : Condenser 1 1 c : Lower tower 1 2 : Subcooler 1 3 : 1st line 1 4 : 2nd line 1 5 : 3rd line -18