1276583 (1) 九、發明說明 【發明所屬之技術領域〕 本發明是關於作成從導管將潔淨空 塵室用的自動倉庫，特別是關於用來防 的逆流情形的技術。 【先前技術】 作爲無塵室用的自動倉庫，是使用： 置導管，將從台架的下部所設置的FFU ( )吹出的潔淨空氣供給到台架內的構造。 是揭示了：在無塵室用的自動倉庫，在潔 的附近’對台架的潔淨空氣的供給量不足 決方式是提出了：在FFU的吹出口設置了 發明者，針對在台架的底部設置了 的自動倉庫，來測定：從導管吹入到台架 速（第7圖）、以及導管的朝向上方的風 而FFU的運轉頻率爲6〇Hz、5〇Hz、4〇Hz 取下段’會產生從台架朝向導管的逆流情 供給會集中在台架的上部（第7圖）。另 的風速，如預料的，高度越增加則會變得 〇 發明者從這種情形了解到，在導管內 分，靜壓力會降低，會產生從台架朝向導 在風速較小的台架的上部，f爭壓力會增加 供給到台架的無 從台架流向導管 在台架的背面設 過濾器風扇單元 在專利文獻1， 淨空氣的吹出口 的情形。而其解 整流構件。 FFU的無塵室用 的潔淨空氣的風 速（第8圖）。 三種。在台架的 形，潔淨空氣的 一方面，導管內 越小（第8圖） 的風速較高的部 管的逆流情形。 ，而供給了超過 -5- 1276583 (2) 需要的潔淨空氣。並且發明者也了解到，伴隨著自動倉庫 的大型化，潔淨空氣的風速增加的話，這種現象會變得更 顯著。 〔專利文獻1〕 專利第2 5 0 5 3 9 3號公報 【發明內容】 〔發明欲解決的課題〕 該發明的課題，是要防止從台架朝向導管的逆流情形 。在第2發明所追加的課題，是要更均一地供給潔淨空氣 ，且減少FFU的數量。在第3發明所追加的課題，是要 利用支柱而更確實地防止保管物品的污染情形。 〔用以解決課題的手段〕 該發明，是在台架的背面設置導管，從潔淨空氣的供 給源，經由導管，將潔淨空氣供給到上述台架內的無塵室 用的自動倉庫，其特徵爲：在上述潔淨空氣的每個供給源 ，設置有複數的潔淨空氣的吹出口。 雖然也可以將過濾部與風扇分離設置，例如使用FFU (過濾器風扇單元）。而最好是，作爲上述潔淨空氣的供 給源，設置複數的過濾器風扇單元，且在過濾器風扇單元 之間，空置出一個過濾器風扇單元內的吹出口以上的間隔 來進行配置。FFU的設置位置，例如可設置在台架的底部 、或設置在自動倉庫的上部。 -6 - 1276583 (3) 最好是，將上述潔淨空氣的供給源配置在自動倉庫的 支柱與支柱之間，且將上述吹出口設置在上述支柱附近。 〔發明效果〕 在該發明中，由於在每個潔淨空氣的供給源是設置有 複數的吹出口，所以從吹出口會產生流動於橫方向的氣流 。因此在台架背面的例如鉛直方向觀察，在對應於吹出口 與吹出口之間的位置’橫方向的氣流會衝撞而讓靜壓力增 加。於是，可防止在該位置的從台架朝向導管的逆流情形 〇 在第2發明，由於在FFU之間設置有間隙，例如在 鉛直方向觀察,，在重疊於該間隙的位置，來自於左右的氣 流會衝撞讓靜壓力增加。於是，在該位置，可以充分地從 導管將潔淨空氣供給到台架，可以防止逆流。當然，在 FFU內的吹出口與吹出口之間，例如在鉛直方向觀察所對 應的位置，來自於左右的氣流會衝撞讓靜壓力增加，可以 充分地從導管將潔淨空氣供給到台架。結果，不會使台架 的潔淨度降低，而可以減少FFU的數量。 在第3發明，在FFU的自動倉庫的支柱附近的位置 吹出潔淨空氣。因此，靜壓力降低的位置會是在支柱附近 。在支柱的附近，以支柱可防止逆流情形，即使產生逆流 情形，該位置會在距離台架內的物品較遠的支柱附近的位 置，所以可以更確實地防止保管物品的污染情形。 (4) 1276583 【實施方式】 以下顯示用來實施本發明的最佳實施例。 〔實施例〕 在第1圖〜第6圖，是顯示了：實施例的無塵 動倉庫2、以及變形例的無塵室用的自動倉庫4 2、 形例的無塵室用的自動倉庫42、52，除了特別指 外’是與實施例的無麈室用的自動倉庫2 —樣。在 中’ 4是行駛空間，鋪設有行駛導軌6，用來讓堆 機8等的搬運裝置行駛。在行駿空間4的例如左右 設置有一對台架10、1〇，在其底部等配置有FFU 器風扇單元）1:2。這裡雖然是使用過濾器與風扇爲 FFU1 2，可是將過濾器與風扇作成不同個體也可以。 在台架1 0、1 0的背面，也就與行駛空間4的 ，是設置有導管1 4、1 4。導管1 4的外側是以無透 外壁部16、16所覆蓋。在台架1〇與導管14之間 有沖孔金屬板等的沒有圖示的整流板。1 8是自動 的頂壁部。自動倉庫2也可以設置在無塵室內，也 置在無麈室以外的建築物內。也可取代堆裝起重機 搬運裝置，而設置固定的移載裝置，在其後側也可 架。 在F F U 1 2的背面的靠近支柱2 2的部分，換言 FFU 1 2的背面的水平方向的兩端附近，例如設置有 出口 20、2]。在吹出口 20、21之間空置間隙，在 室的自 5 2。變 出之處 這些圖 裝起重 兩側， (過濾 一體的 相反側 氣性的 ，設置 倉庫2 可以設 8等的 設置台 之，在 一對吹 自動倉 1276583 (5) 庫2的靠近支柱22的部分，從FFlJl2吹出潔淨空氣 各圖的白箭頭是顯示潔淨空氣的流動。而以黑色箭頭 示通過台架1 0內而從行駛空間4回收到F F u丨2的氣 23是靠近行駛空間4的支柱，24是支架。來自於吹 2 0、2 1的氣流的方向，例如在FFU } 2的背面是直角 即使稍微傾斜也可以。 在第3圖，是示意性地顯示實施例的自動倉庫2 性。由於在每一台FFU 12是設置有一對吹出口 2〇、 所以從吹出口 2 0、2 1吹出的潔淨空氣會一邊朝橫方 展，一邊從台架1 〇的下部朝上部流動。在該說明書 是將FFU12的上面部的位置作爲導管14或台架1〇 度的原點（高度0 )。在接近於FFU 1 2的台架1 〇的 的支架來看的話，在吹出口的附近流速會變得很大。 出口與吹出口之間，來自於左右的一對吹出口的潔淨 會衝撞而讓流速變小。 流速變小的話，如第3圖下部的虛線所示，靜壓 增加。伴隨著，讓潔淨空氣從導管供給到台架內。吹 2 〇、2 1的位置，是設置在支柱2 2附近，所以在物占 的背部中央部附近，來自於吹出口 2 〇、2 1的氣流會 而讓靜壓力增加，來供給潔淨空氣。在吹出口 20、2 附近即使發生逆流現象，也是在稍微遠離物品2 6的 ，並且是在支柱22側，所以影響很少。1^度位置增 話，不管是在吹出口 2 0、2 1的上部、或是在其他位 導管1 4內的朝向上方的氣流是大致一定的，伴隨著 。在 來顯 流。 出口 ，而 的特 21， 向擴 中， 的筒 下部 在吹 空氣 力會 出口 p 2 6 衝撞 1的 位置 加的 置， 靜壓 -9- 1276583 (6) 力也會是大致一定的。 在第4圖，是顯示空置間隔來配置F F U 1 2的變形例 。在第1圖〜第3圖的無塵室用的自動倉庫2，每排台架 10都設置有FFU12，而在第4圖的無塵室用的自動倉庫 4 2中，例如每隔一排來設置F F U 1 2。其他方面與第1圖 〜第3圖的實施例相同。在沒有設置F F U 1 2的排，來自 於左右排的潔淨空氣的氣流會衝撞，藉此讓靜壓力增加， 而可以充分地供給潔淨空氣。即使在沒有設置FFU的排 的上部，例如如果台架1 0的高度爲4 m左右的話，不會 受到高度影響而可更均一地供給潔淨空氣。即使是設置有 FFU12的排，藉由來自於一對吹出口 20、21的潔淨空氣 的衝撞，在該排的中央部附近仍可充分地供給潔淨空氣。 在第5圖的無塵室用的自動倉庫52，可更確實地防 止在吹出口 20、2 1上部的逆流情形。在該變形例中，在 吹出口 2 0、2 1的上部設置有擾流板5 4。擾流板，是從台 架1 0的背面朝向導管1 4例如在水平面內突出的板狀的構 件’從水平面內傾斜配置、或是作成L字型的構件都可以 。設置擾流板5 4的話，在該位置沿著台架1 〇的背面的流 速會降低，伴隨著靜壓力會增加，可以防止逆流情形。在 第5圖的變形例中，如果每一台FFU ] 2設置一對吹出口 2 0、2 1的話，藉由在吹出口 2 0、2 1的上部設置擾流板5 4 ’則可均一地對台架供給潔淨空氣。 如第7圖所示，在習知例子的自動倉庫，在台架的上 部是供給了超過需要的潔淨空氣。因此隔著間隔配置複數 -10- 1276583 (7) 枚的擾流板5 4，在台架1 0的下部配置得較緊密，在上部 配置得較疏散的話，則對台架全體可更均一地供給潔淨空 氣。在該情況，只有下面第一枚的擾流板、或是下面兩枚 的擾流板，是設置在吹出口 2 0、2 ]的、上部。而以上的擾 流板’則不限於吹出口 2 0、2 1的上部，也可設置在吹出 口 2 0、2 1之間的空間的上部。換言之，以設置在台架的 下部 1 /4〜1 /5左右的部分的擾流板，來防止在吹出口 20 、2 1的上部的逆流情形，以更上面所設置的擾流板，來 使台架的背面附近的流速降低，讓潔淨空氣的供給不會偏 '向台架的最上部。 以實施例或變形例可以得到以下的效果。（1 )可以 防止從台架朝向導管的逆流情形。（2 )隔著間隔設置 FFU可以減少FFU的數量，並且在FFU與FFU之間的空 間提高靜壓力，可以均一地供給潔淨空氣。（3 )吹出口 接近支柱的話，以支柱可以防止逆流情形，可以將潔淨空 氣供給到支柱與支柱之間的物品的背面。（4 )設置擾流 板的話，可以防止在吹出口上方的逆流情形。而將擾流板 在台架的下部設置得較緊密，在上部設置得較鬆散的話， 可以均一地將潔淨空氣從台架的下部供給到上部。 【圖式簡單說明】 第1圖是實施例的無塵室用的自動倉庫的在FFU的 正上部的水平方向剖面圖。 第2圖是顯示實施例的無塵室用的自動倉庫的鉛直方 -11 - (8) 1276583 向剖面圖。 第3圖是實施例的特性圖，是針對吹出口的附近高度 、自動倉庫的上部的位置的兩個高度’來顯示支柱間的位 置與潔淨空氣的流速與靜壓力的關係。 第4圖是每隔一排空出間隔配置F F U的變形例的無 塵室用的自動倉庫的在FFU正上部的主要部分水平方向 剖面圖。 第5圖是在FFU的吹出口的上部設置擾流板的變形 例的無麈室用的自動倉庫的在F F U正上部的主要部分水 平方向剖面圖。 第6圖是顯示第5圖的變形例的在吹出口的上部的潔 淨空氣的流速與靜壓力的分布的特性圖。 第7圖是顯示習知例的從導管朝向台架的吹出口的潔 淨空氣的流速分布的特性圖。 第8圖是顯示習知例中的導管內的靠近台架部分的朝 向上方的潔淨空氣的流速分布的特性圖。 【主要元件符號說明】 2、42、52:無塵室用的自動倉庫 4 :行駛空間 6 :行駛導軌 8:堆裝起重機 1 〇 :台架 12 : FFU (過濾器風扇單元） ^ 12- (9) 1276583 Μ :導管 1 6 :外壁部 1 8 :頂壁部 2 0、21 :吹出口 2 2、2 3 :支柱 2 4 :支架 2 6 :物品 5 4 :擾流板 ^1276583 (1) Description of the Invention [Technical Field of the Invention] The present invention relates to an automatic warehouse for cleaning a clean room from a duct, and more particularly to a technique for preventing backflow. [Prior Art] As an automatic warehouse for a clean room, a conduit is provided for supplying clean air blown from the FFU ( ) provided in the lower portion of the gantry to the gantry. It is revealed that the automatic warehouse in the clean room, in the vicinity of the clean 'the supply of clean air to the gantry is insufficient: the inventor of the FFU's air outlet is set, for the bottom of the gantry The set of automatic warehouse is used to measure: the wind from the duct to the gantry speed (Fig. 7) and the upward direction of the duct. The operating frequency of the FFU is 6 〇 Hz, 5 〇 Hz, 4 〇 Hz. The counterflow supply from the gantry to the duct will be concentrated in the upper part of the gantry (Fig. 7). The other wind speed, as expected, the higher the height, the more the inventor learns from this situation. In the duct, the static pressure will decrease, and the gantry will be guided from the gantry to the gantry with a lower wind speed. In the upper part, the pressure is increased, and the supply of the turret to the gantry is increased. The conduit is provided with a filter fan unit on the back of the gantry. And it solves the rectifying member. The wind speed of the clean air used in the clean room of the FFU (Fig. 8). Three kinds. In the shape of the gantry, on the one hand, the smaller the inside of the duct (Fig. 8), the reverse flow of the tube with a higher wind speed. And supplied more than -5 - 1276583 (2) clean air required. The inventors have also learned that this phenomenon becomes more pronounced as the speed of the clean air increases as the size of the automated warehouse increases. [Patent Document 1] Patent No. 2 5 0 3 3 3 3 SUMMARY OF THE INVENTION [Problem to be Solved by the Invention] An object of the invention is to prevent a backflow from a gantry toward a duct. An additional problem in the second invention is to supply clean air more uniformly and to reduce the number of FFUs. An additional problem in the third invention is to more reliably prevent contamination of the stored articles by using the pillars. [Means for Solving the Problem] The present invention is an automatic warehouse for supplying a clean air to a clean room in the gantry from a supply source of clean air and a supply source of clean air through a duct. It is: in each of the above-mentioned supply sources of clean air, a plurality of outlets for clean air are provided. Although it is also possible to separate the filter unit from the fan, for example, an FFU (Filter Fan Unit) is used. Preferably, a plurality of filter fan units are provided as the supply source of the clean air, and an interval above the air outlet of the filter fan unit is vacant between the filter fan units. The location of the FFU can be set, for example, at the bottom of the gantry or at the top of the automated warehouse. -6 - 1276583 (3) Preferably, the supply source of the clean air is disposed between the pillar and the pillar of the automatic warehouse, and the air outlet is disposed in the vicinity of the pillar. [Effect of the Invention] In the present invention, since a plurality of air outlets are provided in each of the supply sources of the clean air, a flow in the lateral direction is generated from the air outlets. Therefore, when the back surface of the gantry is viewed in the vertical direction, for example, the airflow in the lateral direction corresponding to the position between the air outlet and the air outlet collides to increase the static pressure. Therefore, it is possible to prevent the backflow from the gantry toward the duct at the position. According to the second aspect of the invention, a gap is provided between the FFUs, for example, viewed in the vertical direction, and at a position overlapping the gaps, from the left and right. The airflow will collide and increase the static pressure. Thus, at this position, clean air can be sufficiently supplied from the duct to the gantry to prevent backflow. Of course, between the air outlet and the air outlet in the FFU, for example, in the vertical direction, the airflow from the left and right sides collides to increase the static pressure, and the clean air can be sufficiently supplied from the duct to the gantry. As a result, the cleanliness of the gantry is not reduced, and the number of FFUs can be reduced. In the third invention, clean air is blown at a position near the pillar of the automatic warehouse of the FFU. Therefore, the position where the static pressure is lowered will be near the pillar. In the vicinity of the strut, the struts can prevent the backflow, and even if a backflow occurs, the position will be in the vicinity of the strut farther from the article in the gantry, so that the contamination of the stored articles can be more reliably prevented. (4) 1276583 [Embodiment] The preferred embodiment for carrying out the invention is shown below. [Embodiment] In the first to sixth figures, the dust-free warehouse 2 of the embodiment and the automatic warehouse for the clean room of the modification 4 are shown, and the automatic warehouse for the clean room of the example is shown. 42, 52, except for the special case, is the same as the automatic warehouse 2 for the flawless room of the embodiment. In the middle 4 is a traveling space, and a traveling rail 6 is laid for driving the conveying device such as the stacker 8. For example, a pair of stands 10 and 1 are provided on the left and right sides of the horizontal space 4, and an FFU fan unit 1: 2 is disposed at the bottom thereof. Although the filter and the fan are used here as FFU1 2, it is also possible to make the filter and the fan different. On the back side of the gantry 10, 10, and also in the running space 4, ducts 14 and 14 are provided. The outer side of the duct 14 is covered by the non-permeable outer wall portions 16, 16. Between the gantry 1 and the duct 14, there is a rectifying plate (not shown) such as a punched metal plate. 1 8 is the automatic top wall section. The automatic warehouse 2 can also be installed in a clean room or in a building outside the living room. It is also possible to replace the stacking crane handling device and to provide a fixed transfer device that can also be mounted on the rear side. In the portion of the back surface of the F F U 1 2 near the pillar 2 2, in other words, in the vicinity of both ends in the horizontal direction of the back surface of the FFU 1 2, for example, the outlets 20, 2] are provided. A gap is left between the blowers 20, 21, at room 5 from the chamber. Where the changes are made, these figures are loaded on both sides of the lifting. (The opposite side of the filter is integrated. The warehouse 2 can be set up with 8 sets, etc., in a pair of blown automatic bins 1276583 (5) Close to the column 22 of the library 2 In the part, the white arrow which blows out the clean air from the FFlJl2 shows the flow of the clean air, and the gas 23 which is recovered from the traveling space 4 to the FF u丨2 through the gantry 10 by the black arrow is close to the traveling space 4 The pillars 24 are brackets. The direction of the airflow from the blowing 20, 21, for example, the right side of the FFU } 2 is a right angle even if it is slightly inclined. In Fig. 3, the automatic warehouse of the embodiment is schematically shown. Since each of the FFUs 12 is provided with a pair of air outlets 2, the clean air blown from the air outlets 20 and 2 1 flows toward the horizontal side and flows from the lower portion of the gantry 1 to the upper portion. In this specification, the position of the upper surface of the FFU 12 is taken as the origin (height 0) of the degree of the duct 14 or the gantry 1. In the case of the bracket close to the gantry 1 of the FFU 1 2, the air outlet is The flow rate in the vicinity will become very large. Export and blowout In the meantime, the cleanliness of the pair of air outlets from the left and right sides will collide and the flow rate will be reduced. When the flow rate becomes small, the static pressure increases as indicated by the broken line in the lower part of Fig. 3. With the supply of clean air from the duct In the gantry, the position of blowing 2 〇 and 2 1 is placed near the pillar 2 2, so that the airflow from the air outlets 2 〇 and 2 1 increases the static pressure near the center of the back of the object. The clean air is supplied. Even if the backflow phenomenon occurs near the air outlets 20 and 2, it is slightly away from the article 26, and is on the side of the pillar 22, so the influence is small. The position of the 1^ degree is increased, whether it is in the air outlet 2 The upper part of 0, 2 1 or the upward flow in the other position duct 14 is substantially constant, accompanied by the flow. The exit 21, the extension 21, the extension of the lower part of the tube is blowing The air force will exit p 2 6 and the position of the collision 1 will be set. The static pressure will be approximately -9 - 1276583. (6) The force will be approximately constant. In Fig. 4, the modification of the FFU 1 2 is shown in the vacant interval. Automatic use of clean room in Figure 1 to Figure 3 In the library 2, the FFU 12 is provided for each row of the gantry 10, and in the automatic warehouse 42 for the clean room of Fig. 4, for example, the FFU 1 2 is provided every other row. Other aspects and the first to third The embodiment of the figure is the same. In the row in which the FFU 1 2 is not provided, the airflow from the clean air of the left and right rows collides, thereby increasing the static pressure and sufficiently supplying the clean air. Even in the row where the FFU is not provided. The upper portion, for example, if the height of the gantry 10 is about 4 m, the clean air can be supplied more uniformly without being affected by the height. Even in the row in which the FFU 12 is provided, the clean air can be sufficiently supplied in the vicinity of the center portion of the row by the collision of the clean air from the pair of air outlets 20, 21. In the automatic warehouse 52 for the clean room of Fig. 5, the backflow of the upper portions of the air outlets 20, 21 can be more reliably prevented. In this modification, the spoiler 54 is provided at the upper portion of the air outlets 20, 21. The spoiler may be disposed from the rear surface of the gantry 10 toward the duct 14 such as a plate-like member projecting in a horizontal plane from the horizontal plane or an L-shaped member. When the spoiler 5 4 is provided, the flow velocity along the back surface of the gantry 1 降低 at this position is lowered, and the static pressure is increased to prevent the backflow. In the modification of Fig. 5, if each of the FFUs 2 is provided with a pair of air outlets 20 and 2, it is uniform by providing the spoiler 5 4 ' at the upper portion of the air outlets 20 and 2 1 The ground supplies clean air to the gantry. As shown in Fig. 7, in the automatic warehouse of the conventional example, the clean air exceeding the required amount is supplied to the upper portion of the gantry. Therefore, the spoiler 5 4 having a plurality of -10- 1276583 (7) partitions is disposed at a lower interval, and is disposed closer to the lower portion of the gantry 10, and if the upper portion is disposed more evacuated, the gantry can be more uniformly Supply clean air. In this case, only the first spoiler below or the lower two spoilers are provided at the upper portion of the air outlets 20, 2]. The above spoiler ‘ is not limited to the upper portion of the air outlets 20 and 21, and may be provided at the upper portion of the space between the air outlets 20 and 21. In other words, the spoiler is provided at a portion of the lower portion of the pedestal of about 1/4 to 1 /5 to prevent the backflow of the upper portion of the air outlets 20, 21, and the spoiler provided above. The flow rate near the back of the gantry is lowered, so that the supply of clean air is not biased toward the uppermost portion of the gantry. The following effects can be obtained by the embodiment or the modification. (1) It is possible to prevent backflow from the gantry toward the duct. (2) Setting the FFU at intervals can reduce the number of FFUs, and increase the static pressure between the FFU and the FFU to uniformly supply clean air. (3) Blowing outlet When the struts are close to the struts, the struts can prevent backflow, and clean air can be supplied to the back of the articles between the pillars and the pillars. (4) If the spoiler is provided, the backflow above the air outlet can be prevented. The spoiler is placed closer to the lower portion of the gantry, and if the upper portion is loosely disposed, the clean air can be uniformly supplied from the lower portion of the gantry to the upper portion. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a horizontal cross-sectional view of the automatic warehouse for a clean room of the embodiment, directly above the FFU. Fig. 2 is a cross-sectional view showing the vertical square -11 - (8) 1276583 of the automatic warehouse for the clean room of the embodiment. Fig. 3 is a characteristic diagram of the embodiment, showing the relationship between the position between the pillars and the flow velocity of the clean air and the static pressure with respect to the height of the vicinity of the air outlet and the two heights ' at the position of the upper portion of the automatic warehouse. Fig. 4 is a horizontal cross-sectional view of a main portion of the automatic warehouse for a clean room in a modified example in which F F U is arranged at intervals of a row. Fig. 5 is a cross-sectional view of a main portion of the automatic warehouse for a clean room in which the spoiler is provided in the upper portion of the blower outlet of the FFU, in the upper portion of the F F U. Fig. 6 is a characteristic diagram showing the distribution of the flow velocity of the clean air and the static pressure in the upper portion of the air outlet in the modification of Fig. 5. Fig. 7 is a characteristic diagram showing the flow velocity distribution of the clean air from the duct toward the outlet of the gantry in the conventional example. Fig. 8 is a characteristic diagram showing the flow velocity distribution of the upward clean air in the duct near the gantry portion in the conventional example. [Description of main component symbols] 2. 42, 52: Automatic warehouse for clean room 4: Driving space 6: Traveling rail 8: Stacking crane 1 〇: Bench 12: FFU (filter fan unit) ^ 12- ( 9) 1276583 Μ : conduit 1 6 : outer wall portion 1 8 : top wall portion 2 0, 21 : air outlet 2 2, 2 3 : strut 2 4 : bracket 2 6 : item 5 4 : spoiler ^
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