!27〇528 九、發明說明： 【發明所屬之技術領域】 本發明係關於奈米碳之製造褒置 【先前技術】 其中，碳奈米角則具有3體的微細構造之碳物質。 碳奈米管，其-端就之:捲成圓筒狀的 -般突出於表面之开4隹1^係以气為中心’以81錐部如角(H〇rn) 合體，由於1# = f碳奈米角集合體。碳奈米角集 研究報域巾的應㈣到期待。 月豆兄中，對原料碳物質（以下亦稱「石黑㈣ 二在月 來製造碳奈米离隹人雕。认“Τ'墨革材」。）以雷射光照射， 作雷射光。、π 口版。；專利文獻1，係例示以⑶2氣體雷射當 透時，-般認為利用驗 【專利文獻1】日本特開2001-64004號公報 【專利文獻2】日本特開2〇〇1—5Π91號公報 【發明内容】 曼里的揭示 本發明係檢討有關，將驗製的窗口（以下稱為 =」)設置於製造驗絲製造碳奈米錢合體的方法= 日守’即可級著雷射光學窗之使料間增長，所回 = !27〇528 ί身的重量比（以下稱為「良率」）會降低。又， 短，依據情況有時會破損。其結果表明， 室崎…臟置於腔 透鏡之$命==2集合體的良率低下的原因、雷射光學窗或 = 因，進行了檢討。其結果發現有可能的主要 氣，並由赌時，會由石獅產生碳蒸 或透鏡的表面:而且=該物質附著於雷射光學窗 的表面時，因為在附著狀物質附著於雷射光學窗 透鏡加熱。 ♦生切吸收，而將雷射光學窗、 離，ΐΐ dm千因透鏡效果’光程有可能偏離。光程的偏 照射^表面^光之表面的位置偏移，可能是 G隹ίίΐ;ΐΐ成為破損等的要因。因此，必須有不讓碳奈 米角木口肢之良率降低的製造技術。使 期化，必須有她^的技術。為了使衣置㈣更長 t發縣鑑於上述情事而作成，其目的在於，提供一種 问效率且缺_得奈米碳的技術 提供:贼奈錢製造裝置畴命目的在於’ 果發：力於研究用以高效率地獲得奈米碳的技法。結 石^乾材#㈣士疋_!在使用絲構件將來自賴的出射光照射至 ^ 乂寸，έ因媒灰狀物質的附著而遮蔽了光學構件。又 =變身嫩，而使 ：；ίΙϊί^ μ依’提供—種奈麵的製造裝置，其係具備：石墨 把材’收納該石墨树的腔室；窗部，設置於該腔室之一部分； l27〇528 光的照射而從1 墨 靶:表面;回收部，藉由該 迷，構》了=:::==，材之間。如二 ，表面容易附著媒;所窗 光學構件容諸加熱。 Uitt朗ZnSe製的光學構件時， 相對於此，於本發明之結構，則構 敝來窗部。依據像這樣的結構 材表面遮 部側時，由於會被遮蔽構;：表== 灰狀 之先功率密度會穩 1:附石'卿 性質與狀態的奈米碳。 ^疋且回良率地製造出所希望之 覆蓋配_構件使得其 又，於本發明，腔室係收納石墨靶材，但是， 納石墨革巴材的全體，而收納石墨革巴材之一部分即可。 收 又於本电明’自部係為讓來自光源的出射光透過的 2，例如可以設成雷射絲或透鏡。又，窗部以使其—部分 =室來喊。窗部也可以當做絲之_部分，配置於其出射^ 腔室的纽與絲獨域構件，靴置於㈣石錄材之 又’於本說明書，「功率密度」係指，實際照射於石墨靶材 ，之光的功率密度，亦即，於石麵材絲之光照射部位的功率 役度。 Ϊ270528 於本兔明之製造裝置，於該窗部盘今： 2用以將該光引導至該石墨靶材之該表心；二間蕻::二 =、:可以確實地將光照射於石墨姆的匕 衣仏奈米碳。又，於本發明，由於在^疋 果造成石‘ϊίίτΐί上。因此可以抑制因熱透鏡效 。的=。因此’可以穩定地連續製造所希望之性質形狀的夺 =□此’可以提高奈米碳的良率。又，由於抑制光學構件被 ^，、可斤以抑制了光學構件的破損，可以使光學構件長壽命化。 以丄制因替換光學構件產生裝置維護f的增加。因此，可 合易地貫現耐久性及生產性優良的裝置構造。 依據本發明，提供一種奈米碳的製造裝置，係呈石黑 ^，該石墨树的腔室；窗部，設置於該腔室n/革光 =’由該窗部將光簡至紅錄材 石墨錄蒸發出碳蒸氣，由該碳蒸氣產 if將回收，反射構件，用以使透過了該窗部的透過光反射， 亚將其導引至該石墨靶材表面。 包含本發日狀奈米碳的製造裝置中，該光學構件也可以 昭Μ藉由如此方式，可以將穿透過該窗部之光的光程改變後，再 至石墨靶材表面。因此，可以確實地抑制媒灰狀物質朝窗部 附著。 於本發明，反射構件可以例如將其表面設成金屬，藉此方式， 確保較佳的表面散熱性。因此，即使於表面附著媒灰狀物質等， 也可以抑制溫度過度上昇。於本發明，也可以更具備用以冷卻反 射構件的冷卻機構。如此做的話，可以更加確實地冷卻反射構件。 ，此L可以抑制反射構件的過度加熱，且可以提高其壽命。又， 可以％定地製造奈米碳。又，於本發明，也可以更設有用以將附 1270528 著於反射構件的媒灰狀物質除去的掃塵機構。如此做的与， 在既定的計時除去媒灰狀物質，同時製造奈米碳。因此， 提高奈米碳的良率。 更 於本發明之奈米礙的製造裝置，更可以具備遮蔽構件 介在該反射構件與該石墨靶材之間。 〃你 藉此方式，可以更加確實地保護窗部或光學構件， 媒灰狀物質。因此，可以抑制奈米碳良率的降低。又， 化光學構件的壽命。 長期 於本發明之奈米碳的製造裝置，該反射構件也可以 作用。藉此方式，可以確實地將光聚光在石墨树的^ ς九 因此’可崎定地製造奈米碳。又，由於沒有設置肋 學構件而可以將光聚光在石錄材的表面，所以可 = 造^效率地製造奈米碳。而且，具有聚光作用的反射構件易: 由单一構件構成，也可以利用多數之構件的組合來構成。 例如，反射構件可以設成凹面鏡。又，於本發明之 製造裝置，該反射構件也可以是拋物面鏡。如此的話，可^將 光反射在凹面鏡的反射光確實地聚光在其無。因此，可及 射光5確貫崎絲石錄材的表面。目此，可以更穩定地製造 奈米碳。 、^ 总明之奈米碳的製造裝置，可以具備•材支持機構，直 ^支，，同狀的該石餘材，同時使石墨树繞中心軸圓 式，可以連續地製造奈米碳。因此，可以提高奈米碳 的集Σί㈣之奈米賴s造裝置，該奈米碳也可以是碳奈米角 藉，方式’可以高良率地穩定地製造碳奈米角的集合體。 你之奈米碳的製造裝置’也可以更具有吸氣部，其係 進行方向的氣流產生，並從該光源侧流向著該石墨 巴貝1。猎此方式，可以更加4實地抑制，媒灰狀物質從該光源 1270528 你士 1上’雖已說明本發明之構成，但任意組合鱗之構成，當 ，。又，將本發明之表現變換成其他範 ^ 當作本發明之恶樣也是有效的。 依據如以上說明之本發明，藉由於窗部與石墨耙材之間設置 =構件，可以高產率地製造奈輕。又，依據本發明可以長期 化奈米碳製造裝置的壽命。[Technical Field] The present invention relates to a manufacturing device for nano carbon. [Prior Art] Among them, the carbon nanohorn has a carbon material having a three-body fine structure. Carbon nanotubes, the end of which is: rolled into a cylindrical shape - generally protrudes from the surface of the opening 4隹1^ is centered on the gas 'to the 81 taper such as the angle (H〇rn) fit, due to 1# = f carbon nanohorn aggregate. Carbon nano-angle set Research report area towel should be (four) to look forward to. In the moon peasant brother, the raw material carbon material (hereinafter also referred to as "Shihei (4) 2) in the month of manufacture of carbon nano-man-made carvings. Recognize "Τ '墨墨材".) Laser light, laser light. , π mouth version. In the case of the (3) 2 gas laser, it is considered that the use of the gas laser is generally used. [Patent Document 1] Japanese Patent Laid-Open No. 2001-64004 (Patent Document 2) Japanese Patent Laid-Open Publication No. Hei 2-5-91 SUMMARY OF THE INVENTION The disclosure of the present invention is related to the review, and the method of manufacturing the window (hereinafter referred to as "") is set in the method of manufacturing a carbon nano-combination for the manufacture of silk. The window grows between the materials, and the weight ratio of the return = !27〇528 is reduced (hereinafter referred to as "yield"). Also, it is short and may be damaged depending on the situation. The results showed that the reason why Murazaki... was placed in the cavity lens and the yield of the assembly was low, and the laser optical window or = cause was examined. As a result, it is found that there is a possibility of major gas, and when gambling, the surface of the carbon steam or lens is generated by the stone lion: and = the substance adheres to the surface of the laser optical window because the attached substance adheres to the laser optical window The lens is heated. ♦ Raw cut absorption, while the laser optical window, away, ΐΐ dm thousand lens effect 'the optical path may be deviated. Partial illumination of the optical path ^The positional shift of the surface of the surface ^ light may be G隹ίίΐ; ΐΐ becomes a cause of damage, etc. Therefore, there must be a manufacturing technique that does not reduce the yield of carbon nanohorns. To make it happen, there must be her technology. In order to make the clothing (4) longer, the county is made in view of the above circumstances, the purpose of which is to provide a technical efficiency and lack of technology to provide: the thief money manufacturing device is aimed at 'fruit hair: force Research techniques for obtaining nanocarbons efficiently.结石^干材# (4) Gentry _! The use of a wire member to illuminate the emitted light from the ray to the 乂 inch, and the optical member is shielded by the adhesion of the ash-like substance. And =================================================================== ; l27 〇 528 light irradiation from 1 ink target: surface; recycling department, by the fan, constructed =:::==, between the materials. For example, the surface is easy to adhere to the medium; the optical components of the window are heated. In the case of an optical member made of Uitt Lang ZnSe, in contrast to the structure of the present invention, the window portion is constructed. According to the surface of the structural surface of such a structure, it will be shielded;: Table == The first power density will be stable 1: The stone with the nature and state of the stone.疋 回 回 回 回 回 回 回 回 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件 构件can. It is also possible to provide a laser or a lens for transmitting the light emitted from the light source. Also, the window is shouted by making it - part = room. The window can also be used as a part of the wire, and it can be placed in the exiting chamber of the wire and the wire-in-one component. The shoe is placed in the (4) stone material. In this specification, the "power density" means that the actual target is irradiated to the graphite target. The power density of the light, that is, the power service of the light-irradiated portion of the stone surface. Ϊ 270528 in the manufacturing device of the rabbit, in the window: 2 to guide the light to the centroid of the graphite target; two 蕻:: two =,: can accurately illuminate the graphite The 匕 仏 仏 nano carbon. Moreover, in the present invention, the stone is caused to be ‘ϊίίτΐί. Therefore, it is possible to suppress the effect of thermal lensing. =. Therefore, it is possible to stably produce a desired shape of the desired shape. This can increase the yield of the nanocarbon. Further, since the suppression of the optical member is suppressed, the optical member can be prevented from being damaged, and the optical member can be extended in life. The increase in maintenance f is caused by the replacement of the optical member by the tanning. Therefore, it is possible to easily realize a device structure excellent in durability and productivity. According to the present invention, there is provided a nano carbon manufacturing apparatus, which is a stone black, a chamber of the graphite tree, and a window portion disposed in the chamber n/leather = 'the light is reduced to the red record by the window portion The graphite material evaporates carbon vapor, which is recovered from the carbon vapor, and the reflecting member reflects the transmitted light that has passed through the window portion and guides it to the surface of the graphite target. In the manufacturing apparatus including the present-day nanocarbon, the optical member can also be characterized in that the optical path of the light passing through the window can be changed to the surface of the graphite target. Therefore, it is possible to surely suppress the adhesion of the ash-like substance toward the window portion. In the present invention, the reflecting member can be made, for example, such that its surface is made of metal, thereby ensuring better surface heat dissipation. Therefore, even if a gray matter or the like adheres to the surface, excessive temperature rise can be suppressed. In the present invention, a cooling mechanism for cooling the reflecting member may be further provided. By doing so, the reflective member can be cooled more reliably. This L can suppress excessive heating of the reflective member and can increase its life. In addition, nanocarbon can be produced in a fixed amount. Further, in the present invention, a dust sweeping mechanism for removing the ash-like substance attached to the reflecting member may be further provided. In doing so, the ash-like substance is removed at a predetermined timing, and nanocarbon is produced at the same time. Therefore, the yield of nanocarbon is increased. Further, in the manufacturing apparatus of the nanometer of the present invention, a shielding member may be provided between the reflecting member and the graphite target. 〃 In this way, you can more reliably protect the window or optical components, the gray matter. Therefore, the decrease in the yield of the nanocarbon can be suppressed. Also, the life of the optical member is reduced. The reflection member can also function as long as the apparatus for producing nanocarbon of the present invention. In this way, it is possible to surely concentrate the light on the graphite tree, so that the nanocarbon can be produced in a stable manner. Further, since the rib member is not provided, the light can be condensed on the surface of the stone recording material, so that the nano carbon can be manufactured efficiently. Further, the reflecting member having a condensing action is preferably composed of a single member or a combination of a plurality of members. For example, the reflective member can be configured as a concave mirror. Further, in the manufacturing apparatus of the present invention, the reflecting member may be a parabolic mirror. In this case, the reflected light reflected by the concave mirror can be surely concentrated on it. Therefore, the visible light 5 is sure to conform to the surface of the slate. In this way, nanocarbon can be produced more stably. ^ The manufacturing equipment of the nano carbon of the total Ming can be made of a material support mechanism, a straight support, and the same shape of the stone. At the same time, the graphite tree is rounded around the central axis, and the nano carbon can be continuously produced. Therefore, it is possible to improve the nano-carbon Σ ( 四 ( ( ( ( ( ( ( ( ( ( ( ( ( ( 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The manufacturing apparatus of your nano carbon may also have an air suction portion which generates a flow of air in a direction and flows from the light source side toward the graphite babe 1. Hunting this way, you can more 4 physical suppression, the medium gray matter from the light source 1270528, you have described the composition of the present invention, but the composition of any combination of scales, when. Further, it is also effective to convert the expression of the present invention into other vanes as the evil of the present invention. According to the invention as described above, since the member is disposed between the window portion and the graphite crucible, the light weight can be manufactured at a high yield. Further, according to the present invention, the life of the nanocarbon producing apparatus can be long-term.
^上述之目的及其之另一目的、特徵及優點，藉由於以下所述 之較佳的實施態樣及附隨它的圖面，會變得更明白。 【實施方式】 fcj之最佳實施熊檨 以下，參照圖式，詳細說明本發明之較佳的實施態樣。 (弟一實施態樣）The above and other objects, features and advantages of the present invention will become more apparent from the aspects of the preferred embodiments illustrated herein. [Embodiment] The best implementation of fcj is as follows. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. (Different implementation)
本實施態樣係關於一種奈米碳製造裝置，其係將照射在石墨 ，材表面的光其光程周邊，用遮蓋件遮覆。圖1為顯示依本實施 恶樣奈米碳製造裝置構成之一示例的剖面圖。又，於本說明書， 用於說明圖1及其他製造裝置的圖皆為概略圖，各構成構件之大 小不一定與實際的尺寸相對應。 ^圖1之奈米碳製造裝置125具備製造腔室107'奈米碳回收腔 室109、以及連接該等之搬送管14ι。又，圖1之製造裝置具備： 出射雷射光103的雷射光源111、ZnSe爭凸透鏡131、ZnSe窗部 U3、遮蓋件167、以及支持著石墨棒1〇ι，並使該等延它的中心 轴外周旋轉的旋轉裝置115。奈米碳製造裝置125更具備惰性氣體 供給部127、流量計129、真空幫浦143、及壓力計145。 於奈米碳製造裝置125,從雷射光源1Π出射的出射光會聚光 在ZnSe平凸透鏡131，通過設置於製造腔室107之壁面的ZnSe 10 I27〇528 窗部133,照射至製造腔室107内之累 會通過沿著其光程來設置的遮蓋件16=m。物’雷射光⑽ 材。碳單體物f ’ _來當作雷射光⑽的乾 射方向進而遠離的 轉實針方λ 轉裝置m ’能夠使其繞中心軸外周4 i〇l例如能夠沿中心軸方向移動位置的構造。 土牛 搬送管141係連通於製造腔室1〇7及奈米碳回收腔室邯 將該等連接。雷射光103會從雷射光源U1照射至 的 侧面，此時在黯109的產生方向隔著搬送管141來設置^ :=U9’所生成的碳奈求角集合體1Π會回收在奈“ 由於煙流109的產生方向，係、垂直於雷射光1〇3騎位置之 石墨棒1G1的切線的方向，亦即法線方向，所以若在該 ^ 搬送管14卜可以有效率地將碳蒸氣引導至奈米碳回收腔室^， 回收石厌奈米角集合體117的粉體。例如，照射角為45〇時， 搬送管141設置在對鉛直方向之間為45。的方向。 、 、奈米碳製造裝置125在製造腔室1〇7内，沿著從如^窗部133 附近至石墨棒101之表面附近的雷射光103通過路徑，設置了遮 覆光程的遮蓋件167。設置遮蓋件167直到石墨棒1〇1 ^附近，1 使其端部呈開口，雷射光103會通過該遮蓋件167内照射至黑 棒101的表面。 土 藉由設置遮蓋件167 ’確保朝石墨棒101之光的照射路彳<τ<，同 時為了使雷射光103照射至石墨棒1〇1之表面產生碳蒸氣广再由 1270528 ，蒸氣得到的媒灰狀物質不會附著，可以將驗 由於會抑制朝ZnSe窗部133表面附著媒灰狀物質以备 =窗部133表面吸收雷射光⑽。因此，可以抑制昭射至日T 棒101之表面的雷射* 103其功率密度的晃動。而2、 ，This embodiment relates to a nanocarbon manufacturing apparatus which irradiates light on the surface of graphite and the surface of the material, and is covered by a covering member. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an example of the configuration of a waste-like nanocarbon producing apparatus according to the present embodiment. Further, in the present specification, the drawings for explaining Fig. 1 and other manufacturing apparatuses are schematic views, and the size of each constituent member does not necessarily correspond to the actual size. The nanocarbon producing apparatus 125 of Fig. 1 includes a manufacturing chamber 107' nanocarbon recovery chamber 109, and a transfer tube 141 for connecting the same. Further, the manufacturing apparatus of Fig. 1 includes a laser light source 111 that emits laser light 103, a ZnSe squint lens 131, a ZnSe window portion U3, a cover member 167, and a graphite rod 1〇, and the center of the extension A rotating device 115 that rotates around the circumference of the shaft. The nanocarbon producing apparatus 125 further includes an inert gas supply unit 127, a flow meter 129, a vacuum pump 143, and a pressure gauge 145. In the nanocarbon manufacturing apparatus 125, the emitted light emitted from the laser light source 1 is condensed on the ZnSe plano-convex lens 131, and is irradiated to the manufacturing chamber 107 through the ZnSe 10 I27 528 window portion 133 provided on the wall surface of the manufacturing chamber 107. The inside will pass through the cover 16=m set along its optical path. Thunder light (10) material. The carbon monomer f ' _ is used as a dry direction of the laser light (10) and further away from the rotating needle λ rotating device m ' can be moved around the central axis outer periphery 4 i 〇 l, for example, capable of moving in the central axis direction . The cattle transport pipe 141 is connected to the manufacturing chamber 1〇7 and the carbon recovery chamber 将该 to connect them. The laser light 103 is emitted from the side surface to which the laser light source U1 is irradiated. At this time, in the direction in which the crucible 109 is generated, the carbon nano-aggregation aggregate 1 generated by the ^:=U9' is disposed in the transport tube 141. The direction in which the smoke stream 109 is generated is perpendicular to the direction of the tangent of the graphite rod 1G1 at the riding position of the laser light, that is, the normal direction, so that the carbon vapor can be efficiently guided at the transport tube 14 The nano carbon recovery chamber is used to recover the powder of the stone anatomite assembly 117. For example, when the irradiation angle is 45 Å, the transfer tube 141 is disposed in a direction of 45 between the vertical directions. The rice carbon manufacturing apparatus 125 is provided with a cover member 167 that covers the optical path in the manufacturing chamber 1〇7 along the path of the laser light 103 from the vicinity of the surface of the window rod 133 to the vicinity of the surface of the graphite rod 101. The piece 167 is near the graphite rod 1〇1^, 1 has its end open, and the laser light 103 is irradiated to the surface of the black rod 101 through the cover member 167. The soil is ensured toward the graphite rod 101 by providing the covering member 167' The illumination path of the light is <τ<, and at the same time, in order to irradiate the laser light 103 to The surface of the ink stick 1〇1 generates a large amount of carbon vapor and then 1270528, and the ash-like substance obtained by the vapor does not adhere, and it is possible to suppress the adhesion of the ash-like substance to the surface of the ZnSe window portion 133 to prepare the surface of the window portion 133. The laser light (10) is absorbed. Therefore, it is possible to suppress the shaking of the power density of the laser*103 on the surface of the T-bar 101.
ZnSe窗部133的溫度過度上昇。因此，可以抑制朝石 1 面雷射光103照射位置之熱透鏡效果所產 f +表 自隹米碳製造裝置125能夠以高良率穩定地生產碟夺平 角木，巧，且可以輕易地實現耐久性優良的裝置構造，未 ^ ’於示米石炭製造裝i 125係沿煙流⑽產生方向設置搬 之表面，就會產生煙流墨細 狀物質。奈米碳製造裝置125，由於將搬 為媒灰The temperature of the ZnSe window portion 133 excessively rises. Therefore, it is possible to suppress the thermal lens effect of the irradiation position of the laser light 103 toward the surface of the stone, and the f + table from the glutinous rice carbon manufacturing apparatus 125 can stably produce the dishing angle wood with high yield, and the durability can be easily achieved. The excellent device structure, which is not disposed in the direction of the flow direction of the smoke flow (10), is produced in the direction of the flow of the smoke (10). Nano carbon manufacturing unit 125, will be moved to the media
Str因，卜所以它會通過搬送管141確實5地引導至奈米碳=9 S l〇q Λ 1可ί提局碳奈米角集合體117的良率的效率。又， 切ΐ係為垂^方^ 1G1之表面的雷射光1Q3照射位置的 又，奈米故製造裝置125構成，使石墨棒丨〇1朝圓 产：照射在其側面。係以雷射光103的方向與煙 Γΐΐί 致的位置義，來作成雷射光⑽的照射。 地回:住雷射光103的照射路徑，效率良好 所吝ΐ，奈求碳製造裝置125 ’可以預先預測在石墨棒101之侧面 位晋盘ΐΐ流109的角*。因此，能夠精密地控制搬送管⑷之 因此，能夠以後述的條件效率良好地製造碳奈米角 集己體117，且可以確實地將其回收。 接著’針對使用圖1之奈米碳製造裂置125的碳奈米角集合 12 1270528 體117的製造方向，具體地加以說明。 奈米碳製造裝置125，係可以使用高純度石墨，例如圓棒狀燒 結碳或壓縮成型碳等，作為石墨棒1〇1。 又，作為雷射光103，例如可以使用高輪出。〇2氣體雷射。雷 射光103之朝石墨棒1〇1的照射，係在Ar、He等稀有氣體之反應 惰性氣體環境下進行，例如在⑽Pa以上與聊a以下的氣體環境 中進行。又’較佳的情況係預先將製造腔室1{)7減_氣至l〇_2pa 以下後，作為反應惰性氣體環境。 又= 圭的情況係、’調節雷射光103的輸出、光點直徑、及照 m之侧面的雷射㈣3的功率密度大約一定， 例如成為5kW/cm以上至25kW/cm2以下。 輸出設成例如1kW以上至5GkW以下，又，雷射 Ϊ 設成例如◦. 5秒以上，較佳的係設纽75秒以 103的曰^H充份確保照射在石墨棒101之表面的雷射光 效率良好地製造碳奈米賴合體117。 成1. 25秒以下。！係設成例如丨.5秒以下，較佳的係設 加轨造成夺面卜处方式’可以抑制因石墨棒101之表面過度地 降^^動’而造成碳奈米角集合體⑴良率 以上至i秒以下。二此=雷射^103之脈衝寬度係設成〇. 75秒 產率與良率—起提高的活，可以將碳奈米角集合體1Π的生 較佳歇日= 度^糊如1秒以上， 石墨棒日ijn之表面的過度加|此方式，可以更加一層確實地抑制 固定’同：㈡光尸，保持雷射光103之議 將雷射光1〇3，簡以功歧速度㈣，藉此可以 圓周方向上。又，你手山度連績地照射在石墨棒101之側面 射光103以固定之功率其長方向滑動，藉此可以將雷 手山度連績地照射在石墨棒101之長方向。 1270528 此時較佳的情況是將照射角設為30。以上、 係指，在雷射光1G3照射位置上之石錄材表面二=。照射角 二10士3之間:斤作成的角度。使用係為圓筒形狀石墨靶二的 101吟，則定義成：在垂直於石墨棒101長方、土午 位置與圓中心的線段、與水平面之間所作成的。’連結照射 藉=將該照射角設成3G。以上，可以防止所照J 反射，亦即可以防止發生返回光。而且，可以防止 =會通過Znse窗部133絲臉平凸透鏡131。因此， f tfs ^ 1Π I, znl i f 可以穩定化照射至石墨棒i〇i之雷射細 的功率岔度，且可以高良率並穩定地製造碳奈米角集人 又，藉由將該照射角設成60。以下，可以抑制生成口 ^ (am〇n)h_ess)碳，且可以提高生成物中碳奈米角 的比例’亦即碳奈米角集合體117的良率。又，尤其較 係將該照射角設成45°±5°。藉由用約奴的照射可以使生成物^ 奈米角集合體117的_更加提高。 又，奈米礙»造裝置125構成將雷射光103照射在石墨棒1〇1 之側，。因此，在將ZnSe平凸透鏡131的位置固定的狀態下， 用調即石墨棒1G1的高度，可以改變朝側面的照射角。藉由 雷射光103的照射角，可以改變在石墨棒1〇1之表面雷射光ι〇3 的照射面積，使功率密度可以調整，並可以確實地調節。 具體而言，在將ZnSe平凸透鏡131的位置固定的情況時，例 如將照射角設為30°的話，就可以提高功率密度；又，例如藉由將 照射角設為60°，可以控制功率密度讓它變低。 曰 又，在照射時雷射光103朝石墨棒1〇1侧面照射的光點直徑， 例如可以設成0· 5mm以上5mm以下。 又敢佳的情況係’可以使雷射光103的光點，以例如 0.01讓/sec以上55麵/sec以下的線速度（圓周速度）移動，線 速度大時，在一次的脈衝照射，雷射光1〇3照射在石墨棒1〇1之 14 1270528 表面的長度會較長；另一方面，發 在一次的脈衝照射，雖然雷射氺1Λ9肪6二^、此踝迷度小時’ 長度會較短，但所產生的蒸發合在黑=棒立01之表面的 大的範圍内。 ’，、、各3在攸石墨棒101之表面到其深度 每單位時間媒灰狀物質的生成量，亦即媒灰 率、以及所生成的媒灰狀物質中石炭 二 认、，成 -次的脈衝照射時’被推測出取決於昭' =二々良率’在 發的深度。碳蒸發的深度過深時，'合生2及碳蒸 外的物質且降低良率；又，如、二t成角集合體U7以 好地製造碳奈米角集合體117。W仵了〜良率且效率良 例如，將雷射光103照射在直徑 利用旋轉裝置115使直徑⑽_之石石墨轉之表面時， 方向旋轉，並將旋轉速度設成例^1L定速度在圓周 就可f料、十、括如〇. 〇lrpm以上10_以下時， ,,r ..述之線速度。另外’雖然石墨棒101的旋Μ方内开> 特別制限，但較佳的情況係 :二向亚热 送管141的方向旋Ξ 般’從雷射光103向搬 集合體Π7 方式，可以更加確實地回收碳奈米角 &隹^在奈米碳回收腔室119的媒灰狀物質，主要包含步大半 角集合體117,例如所回收的物質為 、 在90wU以上的物質。 貝巧^心奈+角集合體117 部125製造奈米碳時，可以沿著從㈣窗 級im達ί墨棒0表面之雷射光103的出射方向，或者從石 开1C Γ由搬送管141到達奈錢回收腔室119的方向， 心成乳概。例如，可以沿著雷射光⑽的進行 1 部’以產生從雷射光源⑴側向石墨棒 ^ 置及^ 做的話，可以更讀實地抑制媒灰狀物質從石墨面月口此 15 1270528Str, because it will be guided by the transport pipe 141 to the carbon carbon = 9 S l 〇 q Λ 1 can be used to improve the yield efficiency of the carbon nanohorn aggregate 117. Further, the tangent system is a laser light 1Q3 irradiation position on the surface of the vertical surface 1G1, and the nanometer manufacturing apparatus 125 is configured to illuminate the graphite rod 1 to be irradiated on the side surface thereof. The laser light (10) is irradiated with the position of the laser light 103 and the position of the smoke. Ground return: The illumination path of the laser light 103 is good, and the carbon manufacturing apparatus 125' can predict in advance the angle * of the turbulence 109 on the side of the graphite rod 101. Therefore, the transport tube (4) can be precisely controlled, and the carbon nanohorn 117 can be efficiently produced under the conditions described later, and can be reliably recovered. Next, the manufacturing direction of the carbon nanohorn set 12 1270528 body 117 using the nanocarbon production crack 125 of Fig. 1 will be specifically described. As the nanocarbon producing apparatus 125, high-purity graphite such as round bar-shaped sintered carbon or compression-molded carbon can be used as the graphite rod 1〇1. Further, as the laser light 103, for example, a high wheel can be used. 〇 2 gas laser. The irradiation of the graphite rods 1 to 1 by the laser light 103 is carried out in a reaction inert gas atmosphere of a rare gas such as Ar or He, and is carried out, for example, in a gas atmosphere of (10) Pa or more and below. Further, it is preferable to reduce the manufacturing chamber 1{)7 to l〇_2pa or less in advance as a reaction inert gas atmosphere. In addition, the power density of the output of the laser light 103, the spot diameter, and the side of the laser (4) 3 is approximately constant, and is, for example, 5 kW/cm or more and 25 kW/cm 2 or less. The output is set to, for example, 1 kW or more to 5 GkW or less, and the laser Ϊ is set to, for example, ◦. 5 seconds or more. Preferably, the ridge is provided for 75 seconds to ensure the ray irradiated on the surface of the graphite rod 101. The carbon nano-composite 117 is efficiently produced by light emission. It is less than 1.25 seconds. ! The system is set to, for example, 丨5 seconds or less, and the preferred method of adding the rails to cause the face-to-face method can suppress the excessive reduction of the surface of the graphite rod 101 to cause the carbon nanohorn aggregate (1) yield. Above to below i seconds. The second is = the pulse width of the laser ^103 is set to 〇. 75 seconds yield and yield - to improve the activity, you can take the carbon nano-angle assembly 1 Π 较佳 较佳 = = = = = = Above, the excessive addition of the surface of the graphite rod day ijn|This way, it is possible to suppress the fixed 'same: (2) light corpse in a more layer, and keep the laser light 1 〇 3, keeping the laser light 1 〇 3, simply by the speed of the difference (four), This can be in the circumferential direction. Further, the hand is irradiated on the side of the graphite rod 101 in a continuous manner. The light 103 is slid in the longitudinal direction at a fixed power, whereby the lightning force can be irradiated to the long direction of the graphite rod 101 in a continuous manner. 1270528 The better case at this time is to set the illumination angle to 30. Above, refers to the surface of the stone recording material at the 1G3 irradiation position of the laser light. The angle of illumination is between 2 and 3 ± 3: the angle of the pound. The use of 101 Å which is a cylindrical graphite target 2 is defined as being made between a line segment perpendicular to the graphite rod 101, the midday position and the center of the circle, and the horizontal plane. 『Link irradiation l l The angle of illumination is set to 3G. In the above, the J reflection can be prevented, that is, the return light can be prevented from occurring. Moreover, it is possible to prevent the through-convex lens 131 from passing through the Znse window portion 133. Therefore, f tfs ^ 1Π I, znl if can stabilize the fine power intensity of the laser irradiated to the graphite rod i〇i, and can manufacture the carbon nano angle collector with high yield and stability, by using the irradiation The angle is set to 60. Hereinafter, it is possible to suppress the generation of the port ^ (am〇n)h_ess) carbon, and it is possible to increase the ratio of the carbon nanohorn in the product, that is, the yield of the carbon nanohorn aggregate 117. Further, in particular, the irradiation angle is set to 45 ° ± 5 °. The _ of the product ^ nano angle aggregate 117 can be further improved by irradiation with Johan. Further, the nanostructure device 125 is configured to irradiate the laser light 103 to the side of the graphite rod 1〇1. Therefore, in a state where the position of the ZnSe plano-convex lens 131 is fixed, the irradiation angle toward the side surface can be changed by the height of the graphite rod 1G1. By the irradiation angle of the laser light 103, the irradiation area of the laser light ι 3 on the surface of the graphite rod 1 〇 1 can be changed, so that the power density can be adjusted and can be surely adjusted. Specifically, when the position of the ZnSe plano-convex lens 131 is fixed, for example, when the irradiation angle is set to 30°, the power density can be increased; and, for example, by setting the irradiation angle to 60°, the power density can be controlled. Let it go low. Further, the spot diameter of the laser light 103 irradiated toward the side surface of the graphite rod 1〇1 at the time of irradiation may be, for example, 0.5 mm or more and 5 mm or less. In the case of the daring, the light spot of the laser light 103 can be moved at a linear velocity (circumferential speed) of, for example, 0.01 sec/sec or more and 55 sec/sec or less. When the linear velocity is large, the laser beam is irradiated at one time, and the laser beam is irradiated. 1〇3 irradiation on the surface of the graphite rod 1〇1 14 1270528 will be longer; on the other hand, it will be emitted in one pulse, although the laser 氺1Λ9 fat 6 2 ^, this 踝 度 ' ' Short, but the resulting evaporation is in the large range of the surface of the black bar 01. ',,, 3, the amount of the ash-like substance generated per unit time from the surface of the ruthenium graphite rod 101 to the depth thereof, that is, the ash content, and the generated ash-like substance in the ash-like substance, When the pulse is irradiated, it is presumed to depend on the depth of the Zhao's = 2 々 yield. When the depth of carbon evaporation is too deep, 'concrete 2 and carbon-evaporated substances reduce the yield; and, for example, the two-tangled aggregate U7 is used to produce the carbon nanohorn aggregate 117. W 仵 ~ yield and good efficiency, for example, when the laser light 103 is irradiated to the surface of the diameter (10) _ stone graphite by the rotating device 115, the direction is rotated, and the rotation speed is set to the example ^1L fixed speed in the circumference It can be f material, ten, including such as 〇. 〇lrpm above 10_ below, ,, r.. described line speed. In addition, although the opening of the graphite rod 101 is particularly limited, it is preferable that the direction of the two-way sub-heat transfer tube 141 is rotated from the laser light 103 to the moving assembly Π7. The ash-like substance in the carbon recovery chamber 119 is reliably recovered, and mainly includes a step-large half-angle assembly 117. For example, the recovered substance is a substance of 90 wU or more. When the nano-carbon is produced by the BT part of the 奈 ^ 心 心 + 117 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 125 Arriving in the direction of the money recovery chamber 119, the heart becomes a milk. For example, it can be performed along the laser light (10) to produce a graphite rod from the side of the laser light source (1), and it can be more realistically suppressed from the graphite surface. 15 1270528
ZnSe窗部133之方向的附著。又，由於可 的碳奈米角集合體117，從搬送管141弓丨導至奈米^回^斤室生成 119，所以可以^吏碳奈米角集合體117的良率提高。 又’奈米碳製造裝置125雖然使用了驗平 =，，’但是也可以設置ZnSe平凸透鏡當作_窗部 133。也就疋說此時’不將驗平凸透鏡131設置在製造腔室1〇7 外二而巧成使用透鏡當作窗部來將製造腔室1()7密封。藉此方式， 以實現簡便且生產效率優良的裝置結構。 .而且’在以圖1裝置及之後的實施態樣來加以說明的裝置中， 係將雷射光源111設置在製造腔室雨的上方。於是構成了，將 =用照射雷射光103來生成的碳奈米角集合體117，經由搬送管 太外回製造腔f 107側方的奈米碳回收腔室119。於 本貝施悲樣及之後貫施態樣中，關於雷射光源ln的配置， 定要限定是設置在製造腔室107上方的態樣。 迭』如η 2圖狀2 遮蓋件167之奈米碳製造裝置另一構 仏的Η目2 U中，雷射光源m設置在製造腔室1〇7的側方， =將雷射光103從製造腔室1〇7的側方向石墨棒ι〇1照射。又此 流⑽產生在與石墨棒而之照射位置之切線垂直的方向。 置關係’在製造腔室1Q7巾煙流109朝向姉於錯直 …方成45的方向產生。_ 2裝置也與圖以置相同，皆是構成， ^墨棒101之表_近、赖煙流產生方向平行地設置搬送管 亚將由煙流纟成的媒灰狀物f，回收在設置在製造腔室 107之上部的奈米碳回收腔室119。 而且’於圖2裝置中，旋轉裝置115具有支持石墨棒ι〇ι並 ^沿其中心軸旋轉的旋轉機構。且’圖2裝置的情況也與圖】 衣置的情況相同皆構成，使石墨棒1〇1可以在其中心轴方向移 又於圖1裝置中’雖然设置了遮蓋件167,作為用以保 nSe窗部133的遮蔽構件，並沿著從雷射光源⑴射出之雷射 103的光程，將該光程遮覆，但遮蔽構件不一定要限定為該態樣。 16 !27〇528 制、=如’圖3裝置的構造為，設置分隔壁179替代圖1奈米碳 衣造衣置125的遮蓋件167，其他的構造具與奈米碳製造裝置125 相同。於圖3裳置中，將分隔壁179設置在^造腔室術内。分 1¾壁179將製造腔室1〇7區劃成兩腔室，分別為設有論窗部133 的腔室、，與設有石墨棒101的腔室。在分隔壁179上，設有用以 ，田射光103通過並到達至石墨棒1〇1的孔。因此，雷射光能夠 朝石，棒m照射。藉由設置分隔壁179，可以遮蔽從石墨棒1〇1 則所產生之媒灰狀物質移動至沅^窗部133侧。因此，可以抑制 媒灰狀物質附著在ZnSe窗部133的表面。 又於圖1至圖3裝置中，雖然在製造腔室1〇7之壁面設置了 ZnSe窗部133，作為窗部，但是只要窗部是在製造腔室1〇7中， 亚使其露部分即可，並雜定為該構造。例如，也可以將於 射出端面具有窗部的雷射光源⑴，配置於製造腔室1〇7中。此 時，利用遮蓋件167或分隔壁179#之遮蔽構件，來將雷射光源 111與石墨棒101之間遮蔽，藉此抑制媒灰狀物質朝雷射光源⑴ 之囪部附著。又’也可以將ZnSe平凸透鏡131設置在製造腔室 内。此時，例如利用遮蓋件167或分隔壁179來將ZnSe平凸透鏡 131與石墨棒101之間遮蔽，藉此就可以抑制媒灰狀物質朝驗 平凸透鏡131之窗部附著。 (第二實施態樣） 本實施態樣侧於另-奈錢製造裝置的構造，其不直 來自雷射光源111的出射光照射在石墨棒1〇1之表自，而 射改變光程後，再照射至石墨棒1〇1之表面。 圖4為顯不依本實施態樣之奈米碳製造裝置173，從侧 之構造的剖賴。於本實施態樣中，與記載於第—實施態樣f 米石炭製造裝置125相同之構成要素，皆附上相同的符號 二 地將說明省略。 奈米碳製造裝置125 (圖υ構成了，將從雷射光源lu 的雷射光103在ZnSe平凸透鏡131聚光，使得在石墨棒1〇〗之表 1270528 面的光點形成既定尺寸的光點直徑，之後，再從ZnSe窗部133照 射至製造腔室107内；相對於此，圖4之奈米碳製造裝置173，^ 有將從雷射光源111射出的雷射光1〇3聚光，就從ZnSe窗部13^ 照射至製造腔室107内。由於奈米碳製造裝置173具有用以改變 雷射光103之光程的平面鏡169及拋物面鏡171，所以雷射光1〇3 在製造腔室107内，會先在平面鏡169反射，進而在拋物面鏡pi 反射。在拋物面鏡171反射的光，會被聚光在設置於拋物面鏡171 之焦點附近的石墨棒101之表面。Adhesion in the direction of the ZnSe window portion 133. Further, since the carbon atom angle aggregate 117 can be guided from the transfer pipe 141 to the nano-return chamber generation 119, the yield of the carbon nanohorn aggregate 117 can be improved. Further, although the 'nano carbon manufacturing apparatus 125 uses the leveling =, ', a ZnSe plano-convex lens may be provided as the _ window portion 133. That is to say, at this time, the inspection convex lens 131 is not disposed outside the manufacturing chamber 1 〇 7 and the lens is used as the window portion to seal the manufacturing chamber 1 () 7 . In this way, a device structure that is simple and has high production efficiency is realized. Further, in the apparatus described with the apparatus of Fig. 1 and the subsequent embodiment, the laser light source 111 is disposed above the rain of the manufacturing chamber. Then, the carbon nanohorn assembly 117 which is generated by the irradiation of the laser light 103 is returned to the nanocarbon recovery chamber 119 on the side of the cavity f 107 via the transfer pipe. In the case of the Bebesch sadness and the subsequent application, the configuration of the laser light source ln is limited to the state set above the manufacturing chamber 107. In the other embodiment of the nano carbon manufacturing apparatus of the cover member 167, the laser light source m is disposed on the side of the manufacturing chamber 1〇7, and the laser light 103 is The side of the chamber 1〇7 is irradiated with the graphite rod ι〇1. Further, this flow (10) is generated in a direction perpendicular to the tangent to the irradiation position of the graphite rod. The relationship 'in the manufacturing chamber 1Q7 is generated in the direction in which the tobacco stream 109 is oriented 45 in the wrong direction. The _ 2 device is also the same as the figure, and is configured. The ink stick 101 is arranged in parallel with the direction in which the smoke flow is generated in parallel, and the transporting ash f is formed by the smoke flow. A carbon recovery chamber 119 is formed above the chamber 107. Further, in the apparatus of Fig. 2, the rotating device 115 has a rotating mechanism that supports the graphite rod and rotates along its central axis. And the case of the device of Fig. 2 is also the same as that of the case. The graphite rod 1〇1 can be moved in the direction of its central axis and in the device of Fig. 1 although the cover member 167 is provided as a The shielding member of the nSe window portion 133 covers the optical path along the optical path of the laser 103 emitted from the laser light source (1), but the shielding member is not necessarily limited to this. The structure of the apparatus of Fig. 3 is such that the partition wall 179 is provided instead of the cover member 167 of the nanocarbon garment set 125 of Fig. 1, and the other constructions are the same as those of the nanocarbon manufacturing apparatus 125. In the skirt of Fig. 3, the partition wall 179 is placed in the chamber. The wall 179 divides the manufacturing chamber 1 〇 7 into two chambers, respectively a chamber provided with a window portion 133 and a chamber provided with a graphite rod 101. On the partition wall 179, there is provided a hole for the passage of the field light 103 to reach the graphite rod 1〇1. Therefore, the laser light can be irradiated toward the stone and the rod m. By providing the partition wall 179, it is possible to shield the ash-like substance generated from the graphite rod 1〇1 from moving to the side of the window portion 133. Therefore, it is possible to suppress the adhesion of the ash-like substance to the surface of the ZnSe window portion 133. Further, in the apparatus of Figs. 1 to 3, although the ZnSe window portion 133 is provided as the window portion on the wall surface of the manufacturing chamber 1〇7, as long as the window portion is in the manufacturing chamber 1〇7, the exposed portion is partially exposed. It can be, and is mixed with this configuration. For example, a laser light source (1) having a window portion on the exit end surface may be disposed in the manufacturing chamber 1A7. At this time, the shield member 167 or the partition member of the partition wall 179# is used to shield the laser light source 111 from the graphite rod 101, thereby suppressing the adhesion of the ash-like substance to the bulb portion of the laser light source (1). Further, the ZnSe plano-convex lens 131 may be disposed in the manufacturing chamber. At this time, for example, the cover member 167 or the partition wall 179 is used to shield the ZnSe plano-convex lens 131 from the graphite rod 101, whereby the adhesion of the ash-like substance to the window portion of the illuminating convex lens 131 can be suppressed. (Second Embodiment) The present embodiment is configured on the side of the other-money manufacturing apparatus, and the light emitted from the laser light source 111 is not incident on the surface of the graphite rod 1〇1, and the light is changed after the optical path is changed. And then irradiated to the surface of the graphite rod 1〇1. Fig. 4 is a cross-sectional view showing the structure of the nanocarbon producing apparatus 173 which is not in accordance with the present embodiment. In the present embodiment, the same components as those of the first embodiment of the f-carboniferous manufacturing apparatus 125 will be denoted by the same reference numerals and will not be described. The nano carbon manufacturing apparatus 125 is configured to condense the laser light 103 from the laser light source 153 in the ZnSe plano-convex lens 131 so that a spot of a predetermined size is formed on the surface of the surface of the graphite rod 1〇 The diameter is then irradiated from the ZnSe window portion 133 into the manufacturing chamber 107. On the other hand, the nanocarbon manufacturing apparatus 173 of Fig. 4 collects the laser light 1〇3 emitted from the laser light source 111. The ZnSe window portion 13 is irradiated into the manufacturing chamber 107. Since the nanocarbon manufacturing device 173 has a plane mirror 169 and a parabolic mirror 171 for changing the optical path of the laser light 103, the laser light 1 〇 3 is in the manufacturing chamber. 107 is reflected first by the plane mirror 169 and then by the parabolic mirror pi. The light reflected by the parabolic mirror 171 is concentrated on the surface of the graphite rod 101 disposed near the focus of the parabolic mirror 171.
如此般，在奈米碳製造裝置173中，通過ZnSe窗部133入射 至衣k腔至107中的雷射光1〇3，並沒有直接照射至石墨棒 表面，而利用平面鏡169及拋物面鏡171二次反射改變来葙德 =至大石墨棒'之表面。又，由於經由平面鏡169 鏡 ，不米奴製造裝置173相較於奈米碳製造裝置125，可以 ZnSe窗部133到達石墨棒1〇1之光程的長度增加。 文攸 、六㈡凡，緣衣直稱成了，能抑制從石墨棒1〇1之表面產生的、 =〇9及由煙流⑽戶斤得到之媒灰狀物質，朝驗窗部133附; 長期間使用奈鱗製造裝置173，也可以抑制照射至 的雷射光103工力率密度的變化。因此，可以抑仲As described above, in the nanocarbon producing apparatus 173, the laser light 1〇3 incident on the garment k chamber 107 by the ZnSe window portion 133 is not directly irradiated onto the surface of the graphite rod, but the plane mirror 169 and the parabolic mirror 171 are used. The secondary reflection changes to the surface of the 葙德=to the large graphite rod. Further, since the mirror No. 169 mirror is used, the length of the optical path of the ZnSe window portion 133 reaching the graphite rod 1〇1 is increased as compared with the nanocarbon producing unit 125. Wenyu, Liu (2) Fan, Yuanyi directly said that it can suppress the ash-like substance produced from the surface of the graphite rod 1〇1 and the material obtained by the plume (10), and attached to the inspection window 133 When the nanoscale manufacturing apparatus 173 is used for a long period of time, it is also possible to suppress a change in the work rate density of the irradiated laser light 103. Therefore, you can suppress
3 117良率的降低，穩定地連續生產碳奈米角集如 又，可以長期化奈米碳製造裝置173的裝置壽 或抛物^^7? j置173 ’係可以使用例如CU作為平面鏡Π 著至♦面料。由於&熱傳導率高，即使媒灰狀物質 祕二t效率良好地進行散熱。又，也可以在平面鏡169 ) 、兄Π1的表面，施加虬或.的塗布。藉由使用兮 可以抑制平面鏡169或拋物面鏡171的破損。 18 1270528 構成使其反射1次，或者使其反射3次以上再照射至石墨棒101 的構造。 又，奈米碳製造裝置173係構成了，藉由讓雷射光1〇3在拋 ，面鏡171反射，而聚光在石墨棒ίο〗之表面，但是只要是構成 聚光在石墨棒101之表面的構造即可，沒有將反射鏡的形狀限定 為拋物面鏡171，例如也能夠使用例如其他形狀的凹面鏡。而且， 也可以組合多數的反射鏡來聚光在石墨棒1〇1之表面。 (第三實施態樣） 、本實施樣態係關於奈米碳製造裝置的另一構造。於本實施態 ·- 樣中，與記載於第一或第二實施態樣之奈米碳製造裝置125(圖丨）馨· 或奈米碳製造裝置173 (圖4)相同之構成要素，皆附上相同的符 號’並適當地將說明省略。 圖5為顯示依本實施態樣之奈米碳製造裝置175之構造從側 方觀^的剖面圖。奈米碳製造裝置175的基本裝置構造與奈米碳 製，裝置173 (圖4)糊’但是奈米碳製造裝置175與奈米碳製 造裝置173相異點在於，設置了用以保護雷射光1〇3之通過路徑 的遮蓋件167。 每藉由設置遮蓋件167,如於第一實施態樣所說明般，可以更確 貫地抑制’由煙流109所產生的媒灰狀物質直接附著在ZnSe窗部 133上。而且’可以更一層地確實防止在平面鏡169或拋物面鏡 m 171的表面上附著媒灰狀物質。因此，能抑制在石墨棒1〇1表面上 一 的雷射光103的照射位置、或功率密度的晃動，及抑制碳奈米 集合體117良率的降低。又，可以更加一層地長期化装置壽命。 · —又，在圖5之奈米碳製造裝置175中，雖然因為連接於製造 107之壁面5又置遮蓋件167,而在製造腔室1〇7内部設置zn§e ， 囪部133 ’但是只要是構成上可以將惰性氣體密封在製造腔室 内即可，ZnSe窗部133的位置並沒有限定是在製造腔室1〇7内部， 巧如設置在製造腔室m的壁面也可以。例如，圖6係顯示奈米 石反製造裝置176的圖，其將ZnSe窗部133設置在製造腔室1〇7壁 19 1270528 面 (第四實施態樣） 以說明、，但:中二雖然係以使用石墨棒的情況做示例來加 _大，例沒有將石墨編形狀限定為 (圖⑽騎嫩奈_造裝謂 於圖之歧之健構造的圖。 物質作為被雷石墨乾材139為固體碳單體 供給平板135在it i持部153上。平板支持部137係使革巴材 給平板135 r動日士=向以亚進方式移動。因此構成了，乾材供 光⑽的照‘位二：十的石墨革巴材139就會移動，雷射 例如可崎置也會移動。 輪的方式㈣7之左上向訂移細齒條與齒 底部形成可以在溝部滑動的凸ϋ = 再於姆支持部153之 咖，_在嶋部153的石卿 射出==:墨祕供給至從雷射細1 光度設成 再度照射雷射光103時，就會產生;面就會粗糙化； 棒1〇1之表面照射雷射光103的次仏=動，因此朝石墨 奈米角集合體117。 愈可以穩定地生產碳 20 1270528 以上’⑽據實贿樣對本拥加 皆為示例，能夠有各式各樣的變形例， 二 ΐ發明之範.内’這些都是熟習該項技藝人士所理;的= * 實施態樣的裝置，雖然皆構成將利用昭射雷射 積ί適ί的基板上來回收、或用集塵袋回 體流動來回收氣體在反應容器内流通，再利用惰性氣 面之度 的_速度等條件’都可以適宜地因應材^ 3石二= ^石：奈未角的形狀、直徑大小、長度、尖端部的形 邮ΐ制Ϊ示於第二〜四之實施態樣的裝i (圖4〜圖7)，作為窗 =，在找腔室107之壁面設置了 ZnSe窗部133，但是在制 中二吏一部分露出的態樣即可，並沒有將窗部限ΐίΐ 可以將在出射端面具有窗部的雷射光源111，配置 用^此時，使來自f射光源111的出射光例如利 或物面鏡171等的反射鏡來反射後，使其到達石 ϋ 101之表面’藉此來抑制媒灰狀物餘 r者=，Λ可以將ZnSe平凸透鏡131 s置在製造腔室ϋ。 守透過nSe平凸透鏡131的光例如利用平面鏡169 物 等的反射鏡來反射後，使其到達石墨棒丨:^， 此來抑制媒灰狀物質朝ZnSe平凸透鏡131之表面的附著。‘ 又’顯示於第二〜第四之實施態樣的裝置（圖4〜圖 以更設備肋冷卻抛物面鏡171的冷卻機構。藉由冷卻拋物面^ 21 1270528 T制媒灰狀物質附著在抛物面鏡171之表面時過度的加 Γ从二:7? ί長期蹄置壽命。又’也可以設備用以將附著在 表面的媒灰狀物質除去的掃塵機構。依據如此構造， 巧，面鏡m表面畴媒灰狀物質時，也能夠在適當的計時將 其除去，因此可以更確實地抑制，使得照射至石墨棒101之表面 =隹固定的值。因此，可以更—層地提高碳奈 木角术。脰117的良率，且可以更長期化裝置壽命。又，在此， 雖然^物面鏡171的情況做為糊，針對冷卻機構及掃塵機構 加以况明’但是，應需求也可以對平面鏡169設置該等機構。 以下，依據貫施例進一步說明本發明，但是該等並非本發 所限定者。 (實施例） 於本貫施例，使用圖2所示之奈米碳製造裝置126、以及圖8、 圖9、圖10所不之奈米碳製造裝置，利用雷射剝蝕（iaser ablation)法，來進行碳奈米角集合體117的製造。不過，圖8 及圖9的裝置分別構成了，在圖4奈米碳製造裝置173及圖5 米碳製造裝置Π5中，與奈米礙製造裝置126相同地，使雷射光 103從製造腔室1〇7之側面入射的構造。又，圖1〇裝置為另一奈 =石，製造I置，構成了，僅有不具備遮蓋件167這點與奈米碳製 造裝置126相異，其餘與奈米碳製造裝置126相同的構造。 將直徑100mm之燒結圓碳桿設置在真空容器内作為固體狀碳 物貝，並對谷裔内進行減壓排氣到1〇-卞&後，再導入氬氣（八厂） 使其成為/1.01325xl〇5Pa的環境氣壓。然後，在室溫將高輸出的 ⑶2雷射光妝射至该固體狀碳物質。將雷射的輸出設成1〇⑽，將於 固體狀碳物質表面的功率密度設成22kW/Cm2，將脈衝寬度設成 lsec，將停歇時間寬度設成25〇msec，使固體狀碳物質以叶泖的 速度疑轉，同日守照射角設成45°，來照射雷射光。進行雷射光照射 直到ZnSe ®。卩破損為止，並測定各裝置直到窗部破損的時 間。 、 22 1270528 調查;置㈣情況， 圖η為^示各裝置之ZnSe窗部的部圖。圖 ZnSe」為有關圖10裝置之實驗結果。又，「ZnSe+防】大半石山 ί者圓錐 =右「!f物面鏡」、及「拋物面鏡+防止奈米碳附 果 、圖δ、及圖9所示之奈米碳製造裝置的實 由可知’於使用ZnSe平凸透鏡131來聚光的裝造構造 中，猎1置遮蓋件167來增力口 ZnSe窗部133的对久時間== 可明白，藉由構紐職物面鏡171絲光_造，會地辦 加ZnSe窗部133的财久時間；再者，藉由將遮蓋件167設二 上也會增加。 …、 由該結果可以證實，藉由構成了使職物面鏡m來將雷射 光103反射及聚光後，照射至石墨棒1〇1之表面，可以長期化裝 置壽命。 / ^ 又，圖12為顯示針對圖π「ZnSe」與「拋物面鏡」的裝置， 亦即圖10及圖8的裝置，其製造時間與碳奈米角集合體117良率之 關係的圖。由圖12得知，圖1〇裝置中依照製造時間的經過碳奈米 角集合體117良率會下降；相對於此，使用圖8奈米碳製造裝置\73 時，拉長製造時間也不會使碳奈米角集合體117良率降低，呈現大 約固定的良率。因此證貫了，利用平面鏡169及拋物面鏡171使雷 射光103反射，又利用拋物面鏡171將雷射光103聚光在石墨棒ι〇1 之表面，藉此能夠穩定且高良率地製造碳奈米角集合體。 23 1270528 【圖式簡單說明】 圖1為顯示依實施態樣之奈米碳製造裝置之構造的圖。 圖2為顯示依實施態樣之奈米碳製造裝置之構造的圖。 圖3為顯示依實施態樣之奈米碳製造裝置之構造的圖。 圖4為顯示依實施態樣之奈米碳製造裝置之構造的圖。 圖5為顯示依實施態樣之奈米碳製造裝置之構造的圖。 圖6為顯不依貫施悲樣之奈米碳製造裝置之構造的圖。 圖7為顯示依實施態樣之奈米碳製造裝置之構造的圖。 圖8為顯示依實施例之奈米碳製造裝置之構造的圖。 圖9為顯示依實施例之奈米碳製造裝置之構造的圖。 圖10為顯示依實施例之奈米碳製造裝置之構造的圖。 圖11為顯示實施例各裝置之ZnSe窗之破損時間的圖。 圖12為顯示實施例之製造時間與碳奈米角集合體之良率的關 係的圖。 【主要元件符號說明】 101 ·石墨棒 103 :雷射光 107 :製造腔室 109 :煙流 111 :雷射光源 115 :旋轉裝置 117 :碳奈米角集合體 119 :奈米碳回收腔室 125 :奈米碳製造裝置 126 :奈米碳製造裝置 127 :惰性氣體供給部 129 :流量計 131 : ZnSe平凸透鏡 24 1270528 133 : ZnSe 窗部 135 :靶材供給平板 137 :平板支持部 139 :石墨靶材 141 :搬送管 143 :真空幫浦 145 :壓力計 153 :靶材支持部 167 :遮蓋件 169 :平面鏡 171 :拋物面鏡 173 :奈米碳製造裝置 175 :奈米碳製造裝置 176 :奈米碳製造裝置 177 :奈米碳製造裝置 179 :分隔壁3 117 reduction in yield, stable continuous production of carbon nano-angle sets, such as long-term device nano-carbon manufacturing device 173 device life or parabolic ^ ^ 7 ? j 173 ' can use, for example, CU as a flat mirror To ♦ fabric. Since & has a high thermal conductivity, even the ash-like substance is efficiently dissipated. Further, it is also possible to apply a coating of 虬 or . on the surface of the plane mirror 169) and the bristles 1. The damage of the plane mirror 169 or the parabolic mirror 171 can be suppressed by using 兮. 18 1270528 A structure in which it is reflected once or reflected three times or more and then irradiated to the graphite rod 101. Further, the nanocarbon manufacturing apparatus 173 is configured to condense on the surface of the graphite rod by reflecting the laser light 1 〇 3 in the throwing mirror 171, but it constituting the condensed light on the graphite rod 101 The configuration of the surface may be such that the shape of the mirror is not limited to the parabolic mirror 171, and for example, a concave mirror of another shape can also be used. Further, a plurality of mirrors may be combined to condense on the surface of the graphite rod 1〇1. (Third embodiment) This embodiment is another configuration of a nanocarbon producing apparatus. In the present embodiment, the same components as those described in the first or second embodiment of the nanocarbon producing apparatus 125 (Fig. 4) or the carbon manufacturing apparatus 173 (Fig. 4) are the same. The same symbols are attached 'and the description is omitted as appropriate. Fig. 5 is a cross-sectional view showing the structure of the nanocarbon producing apparatus 175 according to the present embodiment as viewed from the side. The basic device configuration of the nanocarbon manufacturing apparatus 175 is the same as that of the nano carbon, and the apparatus 173 (Fig. 4) paste. However, the nano carbon manufacturing apparatus 175 differs from the nano carbon manufacturing apparatus 173 in that it is provided to protect the laser light. A cover member 167 of the path of 1〇3. By providing the covering member 167, as described in the first embodiment, it is possible to more reliably suppress the direct attachment of the ash-like substance generated by the smoke stream 109 to the ZnSe window portion 133. Moreover, it is possible to surely prevent the adhesion of the ash-like substance on the surface of the plane mirror 169 or the parabolic mirror m 171 more layer. Therefore, it is possible to suppress the irradiation position of the laser light 103 or the fluctuation of the power density on the surface of the graphite rod 1〇1, and to suppress the decrease in the yield of the carbon nanotube assembly 117. Moreover, the life of the device can be long-termized in a further layer. In addition, in the nanocarbon manufacturing apparatus 175 of FIG. 5, although the cover member 167 is attached to the wall surface 5 of the manufacturing 107, zn§e, the bony portion 133' is disposed inside the manufacturing chamber 1〇7. The position of the ZnSe window portion 133 may not be limited to the inside of the manufacturing chamber 1〇7 as long as it is configured to seal the inert gas in the manufacturing chamber, and may be provided on the wall surface of the manufacturing chamber m. For example, FIG. 6 is a view showing a nano stone inverse manufacturing apparatus 176 which sets the ZnSe window portion 133 on the surface of the manufacturing chamber 1〇7 wall 19 1270528 (fourth embodiment) to explain, but: In the case of using a graphite rod as an example, the shape of the graphite rod is increased, and the shape of the graphite is not limited to (Fig. (10) Chien Nai _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The solid carbon monomer supply plate 135 is placed on the holding portion 153. The flat plate supporting portion 137 is configured to move the leather material to the flat plate 135 r to move in a sub-feed manner. Therefore, the dry material is supplied to the light (10). According to the 'bit two: ten graphite leather material 139 will move, the laser can move, for example, can also be moved. The way of the wheel (four) 7 on the left to the left to the fine rack and the bottom of the tooth to form a convex slidable in the groove = Further, the coffee of the support section 153, _ the stone of the crotch part 153 is emitted ==: the ink is supplied to the laser light 1 from the laser light 1 to be irradiated again; the surface is roughened; The surface of the rod 1〇1 is irradiated with the laser light 103, and then moves toward the graphite nano-angle assembly 117. The production of carbon 20 1270528 or above '(10) according to the actual bribery sample for this example, can have a variety of variants, the second invention of the invention. These are all familiar with the skilled person; * The device of the embodiment is constructed to be recycled on a substrate that uses the lasing laser, or to flow back through the dust bag to recover the gas in the reaction vessel, and then use the inert gas surface. _Speed and other conditions can be appropriately adapted to the material ^ 3 stone two = ^ stone: the shape of the shape of the horn, the diameter, the length, the shape of the tip of the post is shown in the second to the fourth embodiment of the installation i (Fig. 4 to Fig. 7), as the window =, the ZnSe window portion 133 is provided on the wall surface of the looking chamber 107. However, in the system, a part of the dice is exposed, and the window portion is not limited. The laser light source 111 having the window portion on the exit end surface is disposed, and the light emitted from the f-light source 111, for example, is reflected by a mirror such as the spectroscopy mirror 171, and then reaches the surface of the sarcophagus 101. By this, the ZnSe plano-convex lens 131 s can be set. The light that has passed through the nSe plano-convex lens 131 is reflected by, for example, a mirror of a mirror 169 or the like, and then reaches the graphite rod: ^, thereby suppressing the surface of the ash-like substance toward the surface of the ZnSe plano-convex lens 131. Attachment. 'again' is shown in the second to fourth embodiment of the device (Fig. 4 to Fig. 4 is a cooling mechanism of the device rib cooling parabolic mirror 171. By cooling the paraboloid ^ 21 1270528 T made of ash-like substance adhesion Excessive twisting on the surface of the parabolic mirror 171 from two: 7? ί long-term hoof life. Also 'can also be used to remove the dust-removing mechanism attached to the surface of the ash-like material. According to this configuration, it is possible to remove the surface of the surface of the graphite rod 101 at a proper timing when the surface of the mirror m is ash-like, so that it can be more reliably suppressed so that the surface of the graphite rod 101 is irradiated to a fixed value. Therefore, the carbon nanohorn can be improved more layerwise. The yield of 脰117 can be used to prolong the life of the device. Here, although the case of the face mirror 171 is used as a paste, the cooling mechanism and the dust sweeping mechanism are explained. However, the mechanism may be provided to the plane mirror 169 as needed. Hereinafter, the present invention will be further described based on the examples, but these are not intended to be limited by the present invention. (Example) In the present embodiment, the nanocarbon manufacturing apparatus 126 shown in Fig. 2 and the nanocarbon manufacturing apparatus shown in Figs. 8, 9, and 10 were used, and the iaser ablation method was used. The production of the carbon nanohorn aggregate 117 is performed. However, the devices of Figs. 8 and 9 are respectively configured to make the laser light 103 from the manufacturing chamber in the same manner as the nanostructure manufacturing device 126 in the nano carbon manufacturing device 173 of Fig. 4 and the carbon steel manufacturing device 5 of Fig. 5. The structure of the side incidence of 1〇7. Further, the apparatus of Fig. 1 is a different type of stone, and I is formed, and the configuration is the same as that of the nanocarbon manufacturing apparatus 126 except that the covering member 167 is not provided, and the rest is the same structure as the nano carbon manufacturing apparatus 126. . A sintered round carbon rod having a diameter of 100 mm was placed in a vacuum vessel as a solid carbon shell, and the inside of the valley was depressurized to 1 〇-卞& and then argon gas (eight plants) was introduced to make it /1.01325xl 〇 5Pa ambient pressure. Then, a high output (3) 2 laser light is applied to the solid carbon material at room temperature. Set the output of the laser to 1 〇 (10), set the power density of the surface of the solid carbon material to 22 kW/cm2, set the pulse width to 1 sec, and set the stop time width to 25 〇 msec to make the solid carbon material The speed of Ye Hao was suspicious, and the angle of illumination on the same day was set at 45° to illuminate the laser light. Laser light is irradiated until ZnSe ® . The 卩 is damaged and the time until the window is broken by each device is measured. 22 1270528 Investigation; set (4), Figure η is a partial view of the ZnSe window of each device. Figure ZnSe" is the experimental result for the device of Figure 10. In addition, "ZnSe+Protection" is more than half of the stone mountain cones = right "!f object mirror", and "parabolic mirror + anti-nano carbon-attached fruit, figure δ, and the real carbon manufacturing device shown in Figure 9. It can be seen that in the fabricated structure in which the ZnSe plano-convex lens 131 is used for collecting light, the duration of the ZnSe window portion 133 is increased by the cover member 167. It is understood that the structure is mirrored by the mirror mirror 171. _, the site will add the ZnSe window 133 for a long time; in addition, by setting the cover 167 will also increase. ..., from the results can be confirmed, by the composition of the mirror m After reflecting and concentrating the laser light 103, it is irradiated onto the surface of the graphite rod 1〇1, and the life of the device can be prolonged. / ^ Moreover, Fig. 12 shows the device for the π "ZnSe" and the "parabolic mirror". That is, the relationship between the manufacturing time and the yield of the carbon nanohorn aggregate 117 in the apparatus of Figs. 10 and 8. 12, the yield of the carbon nanohorn assembly 117 in accordance with the manufacturing time in the apparatus of Fig. 1 is lowered. On the other hand, when the nanocarbon manufacturing apparatus \73 of Fig. 8 is used, the manufacturing time is not elongated. This will reduce the yield of the carbon nanohorn assembly 117, exhibiting a fixed yield. Therefore, it is confirmed that the laser beam 103 is reflected by the plane mirror 169 and the parabolic mirror 171, and the laser light 103 is condensed on the surface of the graphite rod ι〇1 by the parabolic mirror 171, whereby the carbon nanometer can be manufactured stably and with high yield. Angular aggregates. 23 1270528 [Brief Description of the Drawings] Fig. 1 is a view showing the structure of a nanocarbon producing apparatus according to an embodiment. Fig. 2 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Fig. 3 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Fig. 4 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Fig. 5 is a view showing the structure of a nanocarbon producing apparatus according to an embodiment. Fig. 6 is a view showing the configuration of a nanocarbon producing apparatus which is inconsistent with the sadness. Fig. 7 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Fig. 8 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Fig. 9 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Fig. 10 is a view showing the configuration of a nanocarbon producing apparatus according to an embodiment. Figure 11 is a graph showing the breakage time of the ZnSe window of each device of the example. Fig. 12 is a graph showing the relationship between the manufacturing time of the examples and the yield of the carbon nanohorn aggregate. [Description of main component symbols] 101 · Graphite rod 103 : Laser light 107 : Manufacturing chamber 109 : Smoke flow 111 : Laser light source 115 : Rotating device 117 : Carbon nano angle assembly 119 : Nano carbon recovery chamber 125 : Nano carbon production apparatus 126: Nano carbon production apparatus 127: inert gas supply unit 129: flow meter 131: ZnSe plano-convex lens 24 1270528 133: ZnSe window portion 135: target supply plate 137: plate support portion 139: graphite target 141 : conveying pipe 143 : vacuum pump 145 : pressure gauge 153 : target supporting portion 167 : covering member 169 : plane mirror 171 : parabolic mirror 173 : nano carbon manufacturing device 175 : nano carbon manufacturing device 176 : nano carbon manufacturing Device 177: Nano carbon manufacturing device 179: partition wall