RU2006145131A - METHOD FOR PRODUCING NANOPOWDERS AND DEVICE FOR ITS IMPLEMENTATION - Google Patents

METHOD FOR PRODUCING NANOPOWDERS AND DEVICE FOR ITS IMPLEMENTATION Download PDF

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Publication number
RU2006145131A
RU2006145131A RU2006145131/02A RU2006145131A RU2006145131A RU 2006145131 A RU2006145131 A RU 2006145131A RU 2006145131/02 A RU2006145131/02 A RU 2006145131/02A RU 2006145131 A RU2006145131 A RU 2006145131A RU 2006145131 A RU2006145131 A RU 2006145131A
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RU
Russia
Prior art keywords
target
gas
evaporation
evaporation chamber
nanopowders
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RU2006145131/02A
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Russian (ru)
Other versions
RU2353573C2 (en
Inventor
Юрий Александрович Котов (RU)
Юрий Александрович Котов
Сергей Юрьевич Соковнин (RU)
Сергей Юрьевич Соковнин
Владислав Генрихович Ильвес (RU)
Владислав Генрихович Ильвес
Ку Ри Чанг (KR)
Ку Ри Чанг
Original Assignee
Институт электрофизики Уральского отделени РАН (RU)
Институт электрофизики Уральского отделения РАН
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Priority to RU2006145131/02A priority Critical patent/RU2353573C2/en
Publication of RU2006145131A publication Critical patent/RU2006145131A/en
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Publication of RU2353573C2 publication Critical patent/RU2353573C2/en

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Claims (2)

1. Способ получения нанопорошков, включающий испарение мишени электронным пучком, конденсацию паров материала и осаждение нанопорошков на холодной мишени, отличающийся тем, что испарение мишени осуществляют импульсным электронным пучком с энергией не более 100 кэВ, длительностью импульсов от 20 до 300 мкс, плотностью энергии не менее 1 МДж/см2, который на пути к мишени проводят через систему создания перепада давления газа, позволяющую иметь в камере испарения давление газа в диапазоне 1-20 Па для охлаждения частиц.1. A method of producing nanopowders, including evaporation of a target by an electron beam, condensation of material vapor and deposition of nanopowders on a cold target, characterized in that the evaporation of the target is carried out by a pulsed electron beam with an energy of not more than 100 keV, pulse duration from 20 to 300 μs, energy density not less than 1 MJ / cm 2 , which, on the way to the target, is conducted through a gas pressure differential system, which allows the gas to have a gas pressure in the evaporation chamber in the range of 1-20 Pa to cool the particles. 2. Устройство для реализации способа содержит импульсную электронную пушку, систему проводки и фокусировки пучка, камеру испарения, мишень и систему сбора порошка в виде криогенной вращающейся мишени со скребком, отличающееся тем, что использована электронная пушка на основе разряда с полым катодом, а система проводки и фокусировки пучка содержит систему перепада давления газа, состоящую из газодинамических сопел, позволяющую иметь в камере испарения давление газа в диапазоне 1-20 Па.2. A device for implementing the method comprises a pulsed electron gun, a wiring and beam focusing system, an evaporation chamber, a target and a powder collection system in the form of a cryogenic rotating target with a scraper, characterized in that an electron gun based on a hollow cathode discharge is used, and the wiring system and focusing the beam contains a system of differential pressure of gas, consisting of gas-dynamic nozzles, allowing you to have a gas pressure in the evaporation chamber in the range of 1-20 Pa.
RU2006145131/02A 2006-12-18 2006-12-18 Method for obtaining nanopowder and device for its realisation RU2353573C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2006145131/02A RU2353573C2 (en) 2006-12-18 2006-12-18 Method for obtaining nanopowder and device for its realisation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2006145131/02A RU2353573C2 (en) 2006-12-18 2006-12-18 Method for obtaining nanopowder and device for its realisation

Publications (2)

Publication Number Publication Date
RU2006145131A true RU2006145131A (en) 2008-06-27
RU2353573C2 RU2353573C2 (en) 2009-04-27

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RU2006145131/02A RU2353573C2 (en) 2006-12-18 2006-12-18 Method for obtaining nanopowder and device for its realisation

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2507629C2 (en) * 2012-05-10 2014-02-20 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук (ИЭФ УрО РАН) Method of producing thin-layer, thermally and/or optically stimulated luminescence effect based nuclear radiation charged particle detector based on aluminium oxide
RU2526552C1 (en) * 2012-12-17 2014-08-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский Томский политехнический университет" Method of obtaining nanosized metal oxides from organometallic precursors
CN104990946A (en) * 2015-07-03 2015-10-21 中国计量科学研究院 K-fluorescent X-ray radiation appliance
RU2643288C2 (en) * 2016-04-20 2018-01-31 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук (ИЭФ УрО РАН) Method for obtaining non-metal nanopowder

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RU2353573C2 (en) 2009-04-27

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Effective date: 20181219