TWI267159B - Alignment mark and inspection method using the same - Google Patents

Alignment mark and inspection method using the same

Info

Publication number
TWI267159B
TWI267159B TW95106776A TW95106776A TWI267159B TW I267159 B TWI267159 B TW I267159B TW 95106776 A TW95106776 A TW 95106776A TW 95106776 A TW95106776 A TW 95106776A TW I267159 B TWI267159 B TW I267159B
Authority
TW
Taiwan
Prior art keywords
alignment mark
same
inspection method
alignment
chip
Prior art date
Application number
TW95106776A
Other languages
English (en)
Other versions
TW200735244A (en
Inventor
Po-Ching Chung
Wan-Ho Chung
Chien-Chung Chen
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW95106776A priority Critical patent/TWI267159B/zh
Application granted granted Critical
Publication of TWI267159B publication Critical patent/TWI267159B/zh
Publication of TW200735244A publication Critical patent/TW200735244A/zh

Links

Landscapes

  • Wire Bonding (AREA)
TW95106776A 2006-03-01 2006-03-01 Alignment mark and inspection method using the same TWI267159B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95106776A TWI267159B (en) 2006-03-01 2006-03-01 Alignment mark and inspection method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95106776A TWI267159B (en) 2006-03-01 2006-03-01 Alignment mark and inspection method using the same

Publications (2)

Publication Number Publication Date
TWI267159B true TWI267159B (en) 2006-11-21
TW200735244A TW200735244A (en) 2007-09-16

Family

ID=38191768

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95106776A TWI267159B (en) 2006-03-01 2006-03-01 Alignment mark and inspection method using the same

Country Status (1)

Country Link
TW (1) TWI267159B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI662286B (zh) * 2018-05-10 2019-06-11 力成科技股份有限公司 晶片偏移量補償方法
CN113238400A (zh) * 2021-03-29 2021-08-10 绵阳惠科光电科技有限公司 对位标记、显示装置和对位标记的判断方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI397141B (zh) * 2009-08-14 2013-05-21 Au Optronics Corp 接合面檢測結構及接合面檢測方法
TWI466260B (zh) * 2012-05-28 2014-12-21 Au Optronics Corp 對位結構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI662286B (zh) * 2018-05-10 2019-06-11 力成科技股份有限公司 晶片偏移量補償方法
CN113238400A (zh) * 2021-03-29 2021-08-10 绵阳惠科光电科技有限公司 对位标记、显示装置和对位标记的判断方法

Also Published As

Publication number Publication date
TW200735244A (en) 2007-09-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees